WO2015184666A1 - 水洗腔室的排液方法及装置 - Google Patents

水洗腔室的排液方法及装置 Download PDF

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Publication number
WO2015184666A1
WO2015184666A1 PCT/CN2014/081441 CN2014081441W WO2015184666A1 WO 2015184666 A1 WO2015184666 A1 WO 2015184666A1 CN 2014081441 W CN2014081441 W CN 2014081441W WO 2015184666 A1 WO2015184666 A1 WO 2015184666A1
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WIPO (PCT)
Prior art keywords
washing chamber
water washing
discharge pipe
waste
liquid discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2014/081441
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English (en)
French (fr)
Inventor
李嘉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US14/378,404 priority Critical patent/US20160243594A1/en
Publication of WO2015184666A1 publication Critical patent/WO2015184666A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D9/00—Level control, e.g. controlling quantity of material stored in vessel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Definitions

  • the present invention relates to the field of manufacturing liquid crystal display panels, and more particularly to a method and apparatus for draining a water washing chamber. Background technique
  • the flat display device has many advantages such as thin body, power saving, no radiation, and has been widely used.
  • the existing flat display devices mainly include a liquid crystal display (LCD) and an organic light emitting display (OLED).
  • the conventional liquid crystal display device is generally a backlight type liquid crystal display device, and includes: a casing, a liquid crystal display panel disposed in the casing, and a backlight module disposed in the casing.
  • the working principle of the liquid crystal display panel is to place liquid crystal molecules in two parallel glass substrates, and apply driving voltages on the two glass substrates to control the rotation of the liquid crystal molecules, thereby refracting the light of the backlight module to produce a picture.
  • a liquid crystal display panel comprises a color filter (CF) substrate, a thin film transistor (TFT) substrate, and a liquid crystal (LC) material sandwiched between the color filter substrate and the thin film transistor substrate.
  • the sealant frame (Sealant) the molding process generally includes: front array (Array) process (film, yellow, etching and stripping), middle box (Cell) process (thin film transistor substrate and color filter substrate Fit) and rear module assembly process (drive circuit (IC) is pressed with printed circuit board).
  • FIG. 1 is a schematic structural view of a liquid discharging device of a conventional water washing chamber, which includes a water washing chamber 2 and a drain pipe 4 .
  • the liquid in the washing chamber 2 is directly discharged through the drain pipe 4.
  • This method discharges a large amount of waste liquid, and the cost of treating the waste liquid is high. Therefore, how to reduce the amount of waste liquid to save manufacturing costs has become an urgent need for research by those skilled in the art.
  • Summary of the invention is to provide a liquid discharging method for a water washing chamber, which can realize the classification and recovery of waste water and waste liquid according to the concentration of harmful substances in the liquid in the washing chamber, and reduce the waste liquid discharge and waste liquid. Processing costs.
  • Another object of the present invention is to provide a liquid discharge device for a water washing chamber, wherein a detector is installed in a liquid discharge port of the water washing chamber, and is electrically connected to the control unit, and the harmful substance is detected according to the detector. Differently control the opening of the valve of the waste water discharge pipe or the waste liquid discharge pipe to realize the classification and recovery of waste water and waste liquid, and reduce the waste liquid discharge amount and the waste liquid disposal cost.
  • the present invention provides a method for draining a water washing chamber, comprising the following steps: Step 1. providing a water washing chamber;
  • Step 2 setting a waste water discharge pipe and a waste liquid discharge pipe connected to the water washing chamber, wherein the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the water washing chamber through a valve;
  • Step 3 A detector is disposed in the water washing chamber for detecting the concentration of the predetermined component in the washing chamber;
  • Step 4 According to the detection result of the detector, open the valve to communicate with the waste water discharge pipe or the waste liquid discharge pipe, thereby discharging the liquid in the water washing chamber.
  • the water washing chamber is used for a wet process of a TFT-LCD.
  • the valve is an automatic valve.
  • the detector is connected to a control unit, the control unit is electrically connected to the valve, and the detector transmits the detection result to the control unit, and the control unit determines to open the valve of the waste water discharge pipe or the waste liquid discharge pipe according to the detection result.
  • the water washing chamber is provided with a liquid discharge port, and the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the liquid discharge port through a valve, and the detector is installed at the liquid discharge port.
  • the valve when the concentration of the predetermined component is equal to or greater than a predetermined value, the valve is opened to communicate with the waste liquid discharge pipe; when the concentration of the predetermined component is lower than a predetermined value, the valve is connected to the waste water discharge pipe.
  • the invention also provides a liquid discharging device for a water washing chamber, comprising a water washing chamber, a waste water discharge pipe and a waste liquid discharge pipe, a detector and a control unit respectively connected to the water washing chamber, the waste water discharge pipe and the waste liquid discharge
  • the pipe is connected to the water washing chamber through a valve, and the valve is an automatic valve.
  • the detector is electrically connected to the control unit, and the valve is electrically connected to the control unit.
  • the water washing chamber is used for a wet process of a TFT-LCD.
  • the water washing chamber is provided with a liquid discharge port, and the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the non-liquid port through a valve.
  • the detector is mounted to a drain port.
  • the invention also provides a liquid discharging device for a water washing chamber, comprising a water washing chamber, a waste water discharge pipe and a waste liquid discharge pipe, a detector and a control unit respectively connected to the water washing chamber, the waste water discharge pipe and the waste liquid discharge
  • the pipe is connected to the water washing chamber through a valve, the valve is an automatic valve, the detector is electrically connected to the control unit, and the valve is electrically connected to the control unit respectively;
  • the water washing chamber is used for a wet process of a TFT-LCD
  • the water washing chamber is provided with a liquid discharge port, and the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the 4 non-liquid port through a valve;
  • the detector is mounted to a drain port.
  • the present invention provides a method and a device for draining a water washing chamber, which are provided with a waste water discharge pipe and a waste liquid discharge pipe connected to a water washing chamber, respectively, wherein the waste water discharge pipe and the waste liquid discharge pipe are respectively a valve is connected to the water washing chamber; a detector is arranged in the water washing chamber for detecting the concentration of the predetermined component in the water washing chamber; according to the detection result of the detector, the valve is connected to the waste water discharge pipe or the waste liquid discharge pipe, thereby discharging the water washing chamber Liquid.
  • the invention realizes the classification and recovery of the waste water and the waste liquid according to the concentration of the harmful substances in the liquid in the washing chamber, thereby greatly reducing the waste liquid discharge amount and the waste liquid disposal cost; saving the manufacturing cost and improving the product actually Competing.
  • FIG. 1 is a schematic structural view of a liquid discharge device of a conventional water washing chamber
  • FIG. 2 is a flow chart of a liquid discharging method of a water washing chamber of the present invention
  • FIG. 3 is a schematic structural view of a liquid discharging device of a water washing chamber of the present invention.
  • FIG. 4 is an electrical connection diagram of the control portion of the liquid discharge device of the water washing chamber of the present invention. detailed description
  • the present invention provides a method for draining a water washing chamber, comprising the following steps: Step 1. Providing a water washing chamber.
  • the water washing chamber is used for a wet process of a TFT-LCD.
  • Step 2 setting a waste water discharge pipe and a waste liquid discharge pipe connected to the water washing chamber, wherein the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the water washing chamber through a valve.
  • the valve is an automatic valve.
  • the water washing chamber is provided with a liquid discharge port, and the waste water discharge pipe and the waste liquid discharge pipe are respectively connected to the liquid discharge port through the valve.
  • Step 3 A detector is disposed in the water washing chamber for detecting the concentration of the predetermined component in the washing chamber.
  • the detector is installed at the liquid discharge port and connected to a control unit, the control unit is electrically connected to the valve, and the detector transmits the detection result to the control unit, and the control unit decides to open the waste water discharge pipe or waste according to the detection result.
  • the valve of the liquid discharge pipe is electrically connected to the valve, and the detector transmits the detection result to the control unit, and the control unit decides to open the waste water discharge pipe or waste according to the detection result.
  • Step 4 According to the detection result of the detector, open the valve to communicate with the waste water discharge pipe or the waste liquid discharge pipe, thereby discharging the liquid in the water washing chamber.
  • the valve When the concentration of the predetermined component is equal to or greater than a predetermined value, the valve is opened to communicate with the waste liquid discharge pipe; when the concentration of the predetermined component is lower than a predetermined value, the valve is opened to communicate with the waste water discharge pipe.
  • the predetermined component is fluoride ion
  • the detector is a fluoride ion detector.
  • the fluoride ion concentration is greater than 15 ppm
  • the valve is opened to communicate with the waste liquid discharge pipe, and the liquid in the water washing chamber is discharged as waste liquid, and is entrusted.
  • the concentration of fluoride ion is less than 15ppm
  • the valve is opened to communicate with the waste water discharge pipe, and the liquid in the water washing chamber is directly discharged into the waste water station of the company for recycling.
  • the present invention also provides a liquid discharge device for a water washing chamber, including a water washing chamber.
  • the valves 41 and 42 are electrically connected, and the detectors 51 are electrically connected to the control unit 61.
  • the valves 41 and 42 are electrically connected to the control unit 61, respectively.
  • the water washing chamber 21 is used for a wet process of a TFT-LCD.
  • the water washing chamber 21 is provided with a liquid discharge port 71, and the waste water discharge pipe 31 and the waste liquid discharge pipe 32 are connected to the liquid discharge port 71 through valves 41 and 42, respectively.
  • the detector 51 is mounted to the liquid discharge port 71.
  • the detector 51 is for detecting the concentration of a predetermined component in the water washing chamber 21.
  • the present invention provides a method and a device for draining a water washing chamber, and the waste water discharge pipe and the waste liquid discharge pipe are respectively passed through a waste water discharge pipe and a waste liquid discharge pipe connected to the water washing chamber.
  • a valve is connected to the water washing chamber;
  • a detector is arranged in the water washing chamber to detect the concentration of the predetermined component in the water washing chamber; according to the detection result of the detector, the valve is opened to communicate with the waste water discharge pipe or the waste liquid discharge pipe, thereby discharging the water washing chamber liquid.

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Control Of Washing Machine And Dryer (AREA)
  • Liquid Crystal (AREA)

Abstract

一种水洗腔室的排液方法及装置，所述方法包括如下步骤：步骤１、提供水洗腔室；步骤２、设置与水洗腔室连接的废水排放管道及废液排放管道，所述废水排放管道及废液排放管道分别通过一阀门与水洗腔室连通；步骤３、在水洗腔室内设置探测器用于探测水洗腔室内预定成份的浓度；步骤４、根据探测器的探测结果，开启阀门连通废水排放管道或废液排放管道，从而排放水洗腔室内的液体。该方法根据水洗腔室的液体中有害物质浓度的不同，对废水和废液进行分类回收，降低了废液排放量与废液处理费用。

Description

水洗腔室的排液方法及装置 技术领域
本发明涉及一种液晶显示面板制造领域， 尤其涉及一种水洗腔室的排 液方法及装置。 背景技术
平面显示器件具有机身薄、 省电、 无辐射等众多优点， 得到了广泛的 应用。 现有的平面显示器件主要包括液晶显示器件 （Liquid Crystal Display, LCD) 及有机电致发光显示器件 (Organic Light Emitting Display, OLED)。
现有的液晶显示器件一般为背光型液晶显示器件， 其包括： 壳体、 设 于壳体内的液晶显示面板及设于壳体内的背光模组 （ backlight module )。 液 晶显示面板的工作原理是在两片平行的玻璃基板当中放置液晶分子， 并在 两玻璃基板上施加驱动电压来控制液晶分子的旋转， 从而将背光模组的光 线折射出来产生画面。
通常液晶显示面板由彩色滤光膜 （Color Filter, CF) 基板、 薄膜晶体 管 （Thin Film Transistor, TFT)基板、 夹于彩色滤光膜基板与薄膜晶体管基 板之间的液晶 （Liquid Crystal, LC) 材料及密封胶框 （Sealant) 组成， 其 成型工艺一般包括： 前段阵列 （Array) 制程 （薄膜、 黄光、 蚀刻及剥膜）、 中段成盒 （Cell) 制程 （薄膜晶体管基板与彩色滤光膜基板贴合） 及后段模 组组装制程 （驱动电路 （IC) 与印刷电路板压合）。
在液晶显示面板的前段阵列 （Array) 制程中，有许多湿制程需要使用药 液， 在完成药液处理制程后一般都需要进行水洗处理， 以洗去残留的药液， 由于现有的水洗腔室的排液装置无法对有害物^浓度低的废水和有害物^ 浓度高的废液进行区分以及分类排放， 最终造成排放的废液量很大， 由于 废液需要委托到处理站进行清理， 成本较高， 而废水则可以排放到公司废 水站处理， 节约费用， 因此废液的大量排放会产生大量的费用。
请参阅图 1， 为现有的水洗腔室的排液装置的结构示意图， 其包括水洗 腔室 2及排水管 4。 工作时， 水洗腔室 2中的液体经排水管 4直接排出， 这 种方法排出的废液量大， 处理废液的成本高。 因此如何降低废液的排放量， 以节省制造成本， 成为本领域技术人员亟需研究的课题。 发明内容 本发明的目的在于提供一种水洗腔室的排液方法， 可以根据水洗腔室 的液体中有害物^浓度的不同， 实现对废水和废液的分类回收， 降低了废 液排放量以及废液处理费用。
本发明的又一目的在于提供一种水洗腔室的排液装置， 通过在水洗腔 室的排液口安装一探测器， 其与控制单元电性连接， 根据探测器侦测到有 害物^浓度的不同分别控制废水排放管道或废液排放管道的阀门开启， 实 现对废水和废液的分类回收， 降低了废液排放量以及废液处理费用。
为实现上述目的， 本发明供一种水洗腔室的排液方法， 包括如下步骤： 步骤 1、 提供水洗腔室；
步骤 2、 设置与水洗腔室连接的废水排放管道及废液排放管道， 所述废 水排放管道及废液排放管道分别通过一阀门与水洗腔室连通；
步骤 3、 在水洗腔室内设置探测器用于探测水洗腔室内预定成份的浓 度；
步骤 4、 根据探测器的探测结果， 开启阀门连通废水排放管道或废液排 放管道， 从而排放水洗腔室内的液体。
所述水洗腔室用于 TFT-LCD的湿制程。
所述阀门为自动阀。
所述探测器连接一控制单元， 该控制单元电性连接所述阀门， 该探测 器将探测结果传送给控制单元， 控制单元根据该探测结果决定开启废水排 放管道或废液排放管道的阀门。
所述水洗腔室设有排液口， 所述废水排放管道及废液排放管道分别通 过阀门连接于该排液口， 所述探测器安装于排液口。
所述步骤 5 中， 当所述预定成份的浓度等于或大于预定值时， 开启阀 门连通废液排放管道； 当所述预定成份的浓度低于预定值时， 开启阀门连 通废水排放管道。
本发明还提供一种水洗腔室的排液装置， 包括水洗腔室、 分别与水洗 腔室连接的废水排放管道与废液排放管道、 探测器及控制单元， 所述废水 排放管道及废液排放管道分别通过一阀门与水洗腔室连通， 所述阀门为自 动阀， 所述探测器与控制单元电性连接， 所述阀门分别与控制单元电性连 接。
所述水洗腔室用于 TFT-LCD的湿制程。
所述水洗腔室设有排液口， 所述废水排放管道及废液排放管道分别通 过阀门连接于该 4非液口。
所述探测器安装于排液口。 本发明还提供一种水洗腔室的排液装置， 包括水洗腔室、 分别与水洗 腔室连接的废水排放管道与废液排放管道、 探测器及控制单元， 所述废水 排放管道及废液排放管道分别通过一阀门与水洗腔室连通， 所述阀门为自 动阀， 所述探测器与控制单元电性连接， 所述阀门分别与控制单元电性连 接；
所述水洗腔室用于 TFT-LCD的湿制程；
所述水洗腔室设有排液口， 所述废水排放管道及废液排放管道分别通 过阀门连接于该 4非液口；
所述探测器安装于排液口。
本发明的有益效果： 本发明提供的一种水洗腔室的排液方法及装置， 通过设置与水洗腔室连接的废水排放管道及废液排放管道， 所述废水排放 管道及废液排放管道分别通过一阀门与水洗腔室连通； 在水洗腔室内设置 探测器用于探测水洗腔室内预定成份的浓度； 根据探测器的探测结果， 开 启阀门连通废水排放管道或废液排放管道， 从而排放水洗腔室内的液体。 本发明实现了根据水洗腔室的液体中有害物^浓度的不同， 对废水和废液 进行分类回收， 大幅度降低了废液排放量与废液处理费用； 节约了制造成 本， 提高了产品竟争力。
为了能更进一步了解本发明的特征以及技术内容， 请参阅以下有关本 发明的详细说明与附图， 然而附图仅提供参考与说明用， 并非用来对本发 明加以限制。 附图说明
下面结合附图和实施例对发明的技术方案做进一步的详细描述。
图 1为现有水洗腔室的排液装置的结构示意图；
图 2为本发明水洗腔室的排液方法的流程图；
图 3为本发明水洗腔室的排液装置的结构示意图；
图 4为本发明水洗腔室的排液装置的控制部分的电性连接图。 具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果， 以下结合本发明 的优选实施例及其附图进行详细描述。
请参阅图 2， 本发明提供一种水洗腔室的排液方法， 包括如下步骤： 步骤 1、 提供水洗腔室。
所述水洗腔室用于 TFT-LCD的湿制程。 步骤 2、 设置与水洗腔室连接的废水排放管道及废液排放管道， 所述废 水排放管道及废液排放管道分别通过一阀门与水洗腔室连通。
所述阀门为自动阀。
所述水洗腔室设有排液口， 所述废水排放管道及废液排放管道分别通 过所述阀门连接于该排液口。
步骤 3、 在水洗腔室内设置探测器用于探测水洗腔室内预定成份的浓 度。
所述探测器安装于排液口， 且连接一控制单元， 该控制单元电性连接 所述阀门， 该探测器将探测结果传送给控制单元， 控制单元根据该探测结 果决定开启废水排放管道或废液排放管道的阀门。
步骤 4、 根据探测器的探测结果， 开启阀门连通废水排放管道或废液排 放管道， 从而排放水洗腔室内的液体。
当所述预定成份的浓度等于或大于预定值时， 开启阀门连通废液排放 管道； 当所述预定成份的浓度低于预定值时， 开启阀门连通废水排放管道。
例如， 所述预定成分为氟离子， 所述探测器为氟离子探测器， 当氟离 子浓度大于 15ppm时， 开启阀门连通废液排放管道， 所述水洗腔室内的液 体作为废液排放， 并委托到处理站进行清理； 当氟离子浓度小于 15ppm时， 开启阀门连通废水排放管道， 所述水洗腔室内的液体作为废水直接排放到 公司废水站回收处理。
请参阅图 3-4， 本发明还提供一种水洗腔室的排液装置， 包括水洗腔室
21、 分别与水洗腔室连接的废水排放管道 31 与废液排放管道 32、 探测器 51及控制单元 61， 所述废水排放管道 31与废液排放管道 32分别通过阀门 41和 42与水洗腔室 21连通， 所述阀门 41和 42为自动阀， 所述探测器 51 与控制单元 61电性连接， 所述阀门 41和 42分别与控制单元 61电性连接。
所述水洗腔室 21 用于 TFT-LCD的湿制程。
所述水洗腔室 21设有排液口 71， 所述废水排放管道 31 与废液排放管 道 32分别通过阀门 41和 42连接于该排液口 71。
所述探测器 51安装于排液口 71。 所述探测器 51 用于探测水洗腔室 21 内预定成份的浓度。
综上所述， 本发明提供的一种水洗腔室的排液方法及装置， 通过设置 与水洗腔室连接的废水排放管道及废液排放管道， 所述废水排放管道及废 液排放管道分别通过一阀门与水洗腔室连通； 在水洗腔室内设置探测器以 探测水洗腔室内预定成份的浓度； 根据探测器的探测结果， 开启阀门连通 废水排放管道或废液排放管道， 从而排放水洗腔室内的液体。 本发明实现 了根据水洗腔室的液体中有害物^浓度的不同， 对废水和废液进行分类回 收， 大幅度降低了废液排放量与废液处理费用； 节约了制造成本， 提高了 产品竟争力。
以上所述， 对于本领域的普通技术人员来说， 可以根据本发明的技术 方案和技术构思作出其他各种相应的改变和变形， 而所有这些改变和变形 都应属于本发明权利要求的保护范围。

Claims

权 利 要 求
1、 一种水洗腔室的排液方法， 包括如下步骤：
步骤 1、 提供水洗腔室；
步骤 2、 设置与水洗腔室连接的废水排放管道及废液排放管道， 所述废 水排放管道及废液排放管道分别通过一阀门与水洗腔室连通；
步骤 3、 在水洗腔室内设置探测器用于探测水洗腔室内预定成份的浓 度；
步骤 4、 根据探测器的探测结果， 开启阀门连通废水排放管道或废液排 放管道， 从而排放水洗腔室内的液体。
2、 如权利要求 1所述的水洗腔室的排液方法， 其中， 所述水洗腔室用 于 TFT-LCD的湿制程。
3、 如权利要求 1所述的水洗腔室的排液方法， 其中， 所述阀门为自动 阀。
4、 如权利要求 3所述的水洗腔室的排液方法， 其中， 所述探测器连接 一控制单元， 该控制单元电性连接所述阀门， 该探测器将探测结果传送给 控制单元， 控制单元根据该探测结果决定开启废水排放管道或废液排放管 道的阀门。
5、 如权利要求 1所述的水洗腔室的排液方法， 其中， 所述水洗腔室设 有排液口， 所述废水排放管道及废液排放管道分别通过阀门连接于该排液 口， 所述探测器安装于排液口。
6、 如权利要求 1所述的水洗腔室的排液方法， 其中， 所述步骤 5中， 当所述预定成份的浓度等于或大于预定值时， 开启阀门连通废液排放管道； 当所述预定成份的浓度低于预定值时， 开启阀门连通废水排放管道。
7、 一种水洗腔室的排液装置， 包括水洗腔室、 分别与水洗腔室连接的 废水排放管道与废液排放管道、 探测器及控制单元， 所述废水排放管道及 废液排放管道分别通过一阀门与水洗腔室连通， 所述阀门为自动阀， 所述 探测器与控制单元电性连接， 所述阀门分别与控制单元电性连接。
8、 如权利要求 7所述的水洗腔室的排液装置， 其中， 所述水洗腔室用 于 TFT-LCD的湿制程。
9、 如权利要求 7所述的水洗腔室的排液装置， 其中， 所述水洗腔室设 有排液口， 所述废水排放管道及废液排放管道分别通过阀门连接于该排液 口。
10、 如权利要求 9 所述的水洗腔室的排液装置， 其中， 所述探测器安 装于排液口。
11、 一种水洗腔室的排液装置， 包括水洗腔室、 分别与水洗腔室连接 的废水排放管道与废液排放管道、 探测器及控制单元， 所述废水排放管道 及废液排放管道分别通过一阀门与水洗腔室连通， 所述阀门为自动阀， 所 述探测器与控制单元电性连接， 所述阀门分别与控制单元电性连接；
其中， 所述水洗腔室用于 TFT-LCD的湿制程；
其中， 所述水洗腔室设有排液口， 所述废水排放管道及废液排放管道 分别通过阀门连接于该排液口；
其中， 所述探测器安装于排液口。
PCT/CN2014/081441 2014-06-04 2014-07-02 水洗腔室的排液方法及装置 Ceased WO2015184666A1 (zh)

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