WO2015083463A1 - 発光封体 - Google Patents
発光封体 Download PDFInfo
- Publication number
- WO2015083463A1 WO2015083463A1 PCT/JP2014/078761 JP2014078761W WO2015083463A1 WO 2015083463 A1 WO2015083463 A1 WO 2015083463A1 JP 2014078761 W JP2014078761 W JP 2014078761W WO 2015083463 A1 WO2015083463 A1 WO 2015083463A1
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- WIPO (PCT)
- Prior art keywords
- electron emission
- positioning
- light emitting
- electron
- diameter
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
- H01J61/0737—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode characterised by the electron emissive material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/88—Mounting, supporting, spacing, or insulating of electrodes or of electrode assemblies
- H01J1/94—Mountings for individual electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
Definitions
- the present invention relates to a luminous envelope in which a luminous gas is enclosed.
- a light source device that emits ultraviolet rays while irradiating an ionized gas in a housing with laser light to maintain a plasma state.
- plasma is generated by discharge between electrodes by supplying power between opposed electrodes arranged in a glass casing.
- the laser support light that is plasma emission is turned on and maintained.
- the electrode or a power supply path to the electrode
- the electrode or the power feeding path to the electrode
- the electrode is embedded in the housing in order to hold the portion through which the electrode (or the power feeding path to the electrode) penetrates or the electrode (or the power feeding path to the electrode). If there is a fused part, the joint between the housing and the electrode (or the power supply path to the electrode) becomes a weak part due to the difference in thermal expansion coefficient, etc., and the housing is sealed. The state may not be maintained.
- the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a light emitting envelope that can satisfactorily maintain a sealed state of a casing.
- a light emitting envelope includes a housing in which a light emitting gas is sealed in an internal space, an electron emitting structure containing an electron-emitting material that emits electrons when irradiated with laser light, and A positioning portion that positions the position of the electron emission structure in the internal space, and the electron emission structure is disposed only in the internal space of the housing, and the positioning portion is in the internal space of the housing or It is characterized by being arranged only outside.
- the electron emission structure is disposed only in the internal space of the casing in which the luminescent gas is sealed, and the positioning part of the electron emission structure is also disposed only in the internal space or outside of the casing. Yes. That is, in this light emitting envelope, the electron emission structure and the positioning portion do not penetrate the casing, and a part thereof is not buried in the casing. Therefore, it is possible to prevent a fragile portion from being generated in the housing, and to keep the sealed state of the housing satisfactorily.
- the electron emission structure includes an electron emission portion made of a metal member containing an electron emission material and a support portion that supports the electron emission portion, and the support portion is positioned in the internal space by the positioning portion.
- the electron emission structure is preferably positioned in the internal space. In this case, it becomes easy to arrange the electron emitting portion at a desired position while keeping the sealed state of the housing in a good state.
- the housing has a main body portion where the electron emitting portion is located and a protruding portion protruding from the main body portion, and the support portion is positioned in the protruding portion by the positioning portion.
- the optimal positioning of the support portion can be performed without affecting the main body portion.
- a small-diameter portion formed by reducing the inner diameter of the protruding portion so as to contact the support portion is formed as the positioning portion.
- the support portion electron emission structure
- a spacer member is provided as a positioning portion between the support portion and the inner wall of the protruding portion, and the support portion is fitted into the internal space of the protruding portion via the spacer member.
- the support portion (electron emission structure) can be suitably held by the spacer member.
- an elastic member is provided as a positioning portion between the support portion and the inner wall of the protruding portion, and the support portion is fitted into the internal space of the protruding portion via the elastic member.
- the support portion (electron emission structure) can be suitably held by the elastic member.
- the support portion is at least partially formed of metal, and as a positioning portion, a small-diameter portion obtained by reducing the inner diameter of the projecting portion and a large-diameter portion provided on the support portion so as to be able to contact the small-diameter portion. It is preferable to have a diameter portion and a magnetic force applying portion that applies a magnetic force to the support portion from the outside of the housing so that the large diameter portion contacts the small diameter portion. In this case, the support portion (electron emission structure) can be suitably held by the magnetic force application portion.
- the support portion is at least partially formed of metal, and as a positioning portion, a spacer member provided so that the support portion can be inserted between the support portion and the inner wall of the protruding portion, and can contact the spacer member It is preferable to have a large-diameter portion provided in the support portion so as to be, and a magnetic force applying portion that applies a magnetic force to the support portion from the outside of the housing so that the large-diameter portion contacts the spacer member. .
- the support portion (electron emission structure) can be suitably held by the magnetic force application portion.
- the support portion is made of a rod-like member, and the rod-like member supports the electron emission portion and has a narrow diameter portion smaller than the main body portion. If it carries out like this, it will become difficult to transmit the heat
- the support portion is made of a rod-like member, and the rod-like member has a narrow diameter portion thinner than the main body portion and a relay portion that is supported by the narrow diameter portion and thicker than the narrow diameter portion and supports the electron emission portion. It is preferable. In this case, by heating the relay part supported by the small diameter part by laser light irradiation, the electron emission part can be efficiently heated while suppressing sputtering in the electron emission part. Therefore, efficient electron emission can be realized.
- the electron emitting portion has an inclined surface that is inclined with respect to the incident axis of the laser beam. In this way, it is possible to shift the radiation direction of the spatter generated in the electron emitting portion by the laser light irradiation with respect to the incident direction of the laser light, and it is possible to suppress the sputtering from hindering the incidence of the laser light. .
- the electron emission structure has a spherical shape, and the positioning portion is made of a ferromagnetic material, and is arranged to face at least a part of the electron emission structure and a magnetic film that covers the electron emission structure. It is preferable to have a magnet. In this case, the electron emission structure can be favorably held by magnetic force with the casing sandwiched, and the sealed state of the casing can be favorably maintained.
- the electron emission structure has a spherical shape
- the positioning portion has a first pedestal that is disposed inside the housing and into which a part of the electron emission structure is fitted.
- the electron emission structure can be positioned with a simple configuration by the first pedestal.
- the casing and the electron emission structure are both spherical, and the positioning portion is disposed outside the casing and has a second pedestal to which a part of the casing is fitted. preferable. In this case, since the casing is positioned by the second pedestal, the electron emission structure can also be positioned inside the casing.
- the casing and the electron emission structure are both formed in a columnar shape, and it is preferable that a small-diameter portion formed by reducing the inner diameter of the casing to be in contact with the electron emission structure is formed as a positioning portion. .
- the laser beam aberration can be suppressed by making the laser beam incident from the axial end surface of the columnar casing.
- the electron emission structure can be suitably held by the small diameter portion.
- the sealing state of the housing can be favorably maintained.
- FIG. 1 It is a figure which shows the outline of the light source device comprised by applying the light emitting envelope which concerns on 1st Embodiment of this invention. It is a figure which shows the other structural example of the positioning part of a metal structure, (a) is the form which used the spacer member, (b) is the form which used the leaf
- FIG. 1 is a diagram showing an outline of a light source device configured by applying a light emitting envelope according to a first embodiment of the present invention.
- the light source device 1 includes a laser unit 2 that generates laser light, an optical system 3 that guides the laser light L from the laser unit 2, and a laser beam L that easily emits electrons.
- a metal structure (electron emission structure) 13 containing an electron emitting substance and a light emitting envelope 11 containing a light emitting gas G are included.
- the metal structure 13 is irradiated with the continuous laser light L, plasma due to the emission gas G is generated in the irradiation region of the continuous laser light L in the vicinity of the metal structure 13.
- plasma is generated when electrons emitted from the metal structure 13 by irradiation of the continuous laser light L ionize the light emission gas G and the ionized light emission gas G is irradiated with the continuous laser light L. It is guessed. Then, by continuously irradiating the generated plasma with continuous laser light L (continuously supplying laser energy to the plasma), the continuous laser light L is collected in the light emitting envelope 11 as the light source 7. It is possible to turn on and maintain high-luminance laser support light that is plasma light emission having a predetermined light-emitting region including the light position F.
- the laser support light is used as a light source for semiconductor inspection or light for spectroscopic measurement, for example.
- the laser unit 2 is, for example, a laser diode.
- the laser unit 2 may be either a continuous laser or a pulse laser, but a continuous laser is used in this embodiment.
- laser light L having a wavelength of 980 nm is emitted as a continuous wave in accordance with the absorption spectrum of the luminescent gas G.
- the output of the laser beam L is, for example, about 60W.
- Laser light L emitted from the laser unit 2 is guided to the optical system 3 by the optical fiber 4.
- the optical system 3 is an optical system that condenses the laser light L from the laser unit 2 toward the light emitting envelope 11.
- the optical system 3 is composed of, for example, two lenses 5 and 6.
- the laser light L emitted from the head 4 a of the optical fiber 4 is collimated by the lens 5 and then condensed toward the light emitting envelope 11 by the lens 6 with the optical axis LA.
- the light-emitting envelope 11 contains a bulb (housing) 12 in which a light-emitting gas G is sealed in a high pressure in the internal space S, and an electron-emitting material that emits electrons when irradiated with laser light L.
- the metal structure 13 and the positioning portion 14 that positions the position of the metal structure 13 in the internal space S are configured.
- the bulb 12 is formed hollow, for example, by glass, and includes a spherical portion (main body portion) 12a having a spherical outer diameter and a spherical inner space S and a part of the spherical portion 12a. And a protruding portion (protruding portion) 12b protruding in a columnar shape.
- xenon gas as a luminescent gas G is sealed at a high pressure.
- the top portion 12c located on the opposite side of the protruding portion 12b is an incident portion (laser incident window portion LW) of the laser light L.
- the laser incident window portion LW is not limited to the top portion 12c but may be any portion of the spherical portion 12a as long as it faces a desired laser incident portion.
- the metal structure 13 is formed of a refractory metal such as tungsten, for example, and includes an electron emission portion 13a containing, for example, barium as an easily radiating substance, and a support portion 13b that supports the electron emission portion 13a.
- the electron emitting portion 13a irradiated with the laser light L is formed in, for example, a thin cylindrical shape, and the tip 13c serving as the incident portion of the laser light L is the top portion 12c (laser incident window) of the bulb 12. It is arranged inside the spherical part 12a so as to face the part LW).
- the incident part of the continuous laser beam L is not limited to the tip 13c, but may be a side part of the electron emission part 13a.
- the support portion 13b has a rod-like member 15 formed in a columnar shape by a high melting point metal such as molybdenum.
- the electron emission portion 13a (tip 13c) is supported on the distal end side of the support portion 13b so as to be disposed at a desired position in the internal space S in the spherical portion 12a, and the proximal end side of the support portion 13b is It arrange
- the electron emitting portion 13a and the support portion 13b do not necessarily have to be made of different constituent materials, and the support portion 13b may be formed integrally with the material used for the electron emitting portion 13a.
- the base may be integrally formed of the same metal, and the electron emissive substance may be contained only in the portion corresponding to the electron emitting portion 13a. Moreover, the electron emission part 13a and the whole metal structure 13 may be comprised with the easy electron emission substance itself. Furthermore, the base of the electron emission structure is not limited to a metal (conductive material) such as tungsten or molybdenum, and may be an insulator such as ceramic.
- Such a light emitting envelope 11 has a small-diameter portion 16 that holds the rod-shaped member 15 that is the support portion 13 b as the positioning portion 14 of the metal structure 13 in the internal space S of the bulb 12.
- the small-diameter portion 16 is provided by using a part of the inner wall of the protruding portion 12b, and the protruding portion 12b has a smaller inner diameter than other portions so as to contact the rod-shaped member 15.
- the small diameter portion 16 is only in contact with the peripheral surface of the rod-shaped member 15 and is not fused to the rod-shaped member 15. Further, the small diameter portion 16 may be provided closer to the base end (lower side in the drawing) than the position illustrated in FIG. 1 or closer to the distal end side (upper side in the drawing). Further, a plurality of small diameter portions 16 may be provided.
- the metal structure 13 containing the easily electron emissive substance is accommodated in the bulb 12 in which the light emitting gas G is enclosed.
- the light emitting envelope 11 generates plasma by irradiating the metal structure 13 with the laser beam L, and continuously irradiates the laser beam L with the laser beam.
- Laser support light can be turned on and maintained.
- this light emitting envelope 11 by using a metal structure 13 containing an easy electron emitting material that emits electrons when irradiated with laser light L, power is fed between the counter electrodes in order to generate arc discharge as in the conventional case. There is no need to do it. That is, in the light emitting envelope 11, it is not necessary to connect a power feeding member or the like from the outside of the bulb 12 to the metal structure 13. That is, it can be said that the metal structure 13 has a configuration different from that of the electrode for which power feeding is essential, and thus there is no electrode in the light emitting envelope 11.
- the entire metal structure 13 is disposed in the internal space S of the bulb 12, and the positioning portion 14 (small diameter portion 16) of the metal structure 13 is configured by a part of the bulb 12. . Therefore, in the light emitting envelope 11, the metal structure 13 and the positioning portion 14 do not penetrate the bulb 12, or a part thereof is not buried in the bulb 12, and no fragile portion is formed in the glass bulb 12. Therefore, the sealing state of the valve 12 can be maintained satisfactorily. Since the sealed state of the bulb 12 can be satisfactorily maintained, the lifetime of the bulb 12 can be prevented from being damaged and the emission gas G can be prevented from being shortened, and the sealed pressure of the emission gas G can be increased. Can be improved.
- the electron emitting portion 13a is supported on the distal end side of the rod-shaped member 15 (support portion 13b), and the bulb 12 includes a spherical portion 12a in which the distal end side of the rod-shaped member 15 and the electron emitting portion 13a are located.
- the protruding portion 12b protrudes from the spherical portion 12a and accommodates the proximal end side of the rod-like member 15 and constitutes the positioning portion 14 (small diameter portion 16).
- the electron emission portion 13a is sufficiently thinned as compared with the rod-shaped member 15 (support portion 13b).
- the time for which the electron emitting portion 13a is heated by the laser light L can be shortened so that electrons are easily emitted, so that the time until the laser supporting light is turned on can be shortened and the spattering of the metal structure 13 is generated. Can also be reduced.
- the configuration of the positioning unit 14 can take other forms.
- a spacer member having a through-hole having an inner diameter substantially matching the outer diameter of the rod-like member 15 in a cylindrical member having an outer diameter substantially matching the inner diameter of the protruding portion 12b of the valve 12. 17 may be used as the positioning unit 14.
- the rod-shaped member 15 is fitted via the spacer member 17 by fitting the rod-shaped member 15 to the through hole of the spacer member 17 and fitting the protruding portion 12 b of the spacer member 17 to the internal space S.
- the base end side of 15 may be fitted into the internal space S of the protruding portion 12b.
- a leaf spring member (elastic member) 18 that curves outward may be used as the positioning portion 14.
- the leaf spring member 18 is provided on the base end side of the rod-like member 15, and the leaf spring member 18 is brought into contact with the inner wall of the protruding portion 12 b in a state of elasticity, so that the leaf spring member 18 is interposed via the leaf spring member 18.
- You may fit the base end side of the rod-shaped member 15 in the internal space S of the protrusion part 12b. In these configurations, the positioned metal structure 13 can be suitably held by the spacer member 17 and the leaf spring member 18, respectively.
- the constituent material of the spacer member 17 is preferably the same material as that of the valve 12 (protruding portion 12b), but may be other materials as long as the materials have a similar thermal expansion coefficient. If the constituent material of the spacer member 17 is the same material as the valve 12 (projecting portion 12b) or a material having a similar thermal expansion coefficient, the outer surface of the spacer member 17 and the inner wall surface of the projecting portion 12b are fused. Thus, the spacer member 17 may be fixed.
- the rod member 15 is inserted between the leaf spring members by inserting the rod member 15 between the leaf spring members.
- You may perform a fitting.
- the leaf spring member but other elastic members may be used as long as they can be brought into a fitted state between the rod-like member 15 and the inner wall of the protruding portion 12b by elasticity.
- the fitting portion between the rod-shaped member 15 and the protruding portion 12 b is not limited to the base end side (lower side in the drawing) but may be closer to the distal end side (upper side in the drawing). A plurality of these positioning portions 14 may be provided.
- the metal structure 13 can be moved in the axial direction of the metal structure 13 in the internal space S, and a coil (magnetic force applying portion) is formed. ) 19 may be used as the positioning portion 14.
- the inner wall of the protruding portion 12b is reduced in diameter, and the rod-shaped member 15 that is the support portion 13b is slidably held in the axial direction of the metal structure 13 (rod-shaped member 15).
- the support portion 13b is composed of the rod-shaped member 15 and the large diameter portion 13d.
- the coil 19 is provided in the outer wall side of the protrusion part 12b so that it may correspond to the position of the large diameter part 13d, and magnetic force which moves the metal structure 13 to the axial direction is given to the support part 13b which consists of a magnetic material.
- the coil 19 applies a magnetic force to the support portion 13b and applies a force to move the metal structure 13 to the electron emission portion 13a side (spherical portion 12a side), while the large diameter portion 13d is applied to the small diameter portion 16.
- the contact is limited by the contact. That is, the movable metal structure 13 can be positioned at a predetermined position by the cooperation of the coil 19, the small diameter portion 16, and the large diameter portion 13d.
- the rod-like member 15 slides in the axial direction of the metal structure 13 (rod-like member 15) as the positioning portion 14.
- the spacer member 17 fitted to the inner wall of the projecting portion 12b so as to be inserted through the spacer member 17 is provided at the end of the rod-like member 15 and has a larger diameter than the portion passed through the spacer member 17, thereby You may have the large diameter part 13d provided so that contact
- the coil 19 is provided on the outer wall side of the protruding portion 12b so as to correspond to the position of the large-diameter portion 13d, and the magnetic force that moves the metal structure 13 in the axial direction is supported by the magnetic material.
- the coil 19 applies a magnetic force to the support portion 13b and applies a force to move the metal structure 13 to the electron emission portion 13a side (spherical portion 12a side), while the large diameter portion 13d is applied to the spacer member 17.
- the contact is limited by the contact. That is, the movable metal structure 13 can be positioned at a predetermined position by the cooperation of the coil 19, the spacer member 17, and the large diameter portion 13d.
- the large-diameter portion 13d described above may be made of the same material as the rod-shaped member 15 or may be made of a different material.
- the rod-shaped member 15 receives the magnetic force from the coil 19 and contributes to the positioning of the metal structure 13, and vice versa.
- One of the large-diameter portion 13d and the rod-shaped member 15 is made of a magnetic material. In the above configuration, after turning on the laser support light, the coil 19 is turned off to stop applying the magnetic force, so that the large-diameter portion 13d is brought into contact with the bottom side of the protruding portion 12b.
- the power supply state of the coil 19 is not limited to this, and various states can be appropriately selected depending on the arrangement of the light emitting envelope 11 and the like.
- the configuration of the metal structure 13 can take other aspects.
- the support member 13b is exemplified by a rod-shaped member 15 having a diameter larger than that of the electron emission part 13a.
- the support part 13b is an electron emission part.
- a narrow diameter portion 20 a that supports the electron emission portion 13 a and is thinner than the main body portion 20 b may be formed on the distal end side of the rod-shaped member 20.
- the electron emitting portion 13 a having the inclined surface 13 e inclined with respect to the optical axis LA of the laser light L may be supported by the rod-shaped member 20.
- the inclination angle of the inclined surface 13e can be set arbitrarily. In this case, it becomes possible to shift the emission direction of the sputter generated in the electron emitting portion 13 a by the irradiation of the laser light L with respect to the incident direction of the laser light L, and the spatter is directed to the inner wall side of the laser incident window portion LW of the bulb 12. It can suppress adhering and obstructing incidence of laser beam L.
- the laser support light is extracted from the bulb 12 in the direction opposite to the sputter emission direction (for example, the side not facing the inclined surface 13e as shown by the arrow WS in FIG. 4C).
- the influence of sputtering on the laser support light extraction portion is reduced, which is more preferable.
- a relay portion 20c may be formed on the distal end side of the rod-shaped member 20 and further on the distal end side of the narrow diameter portion 20a that is thinner than the main body portion 20b.
- the relay portion 20c is supported by the small diameter portion 20a and is thicker than the small diameter portion 20a and the electron emission portion 13a, and supports the electron emission portion 13a at the tip side.
- the electron emitting portion 13a can be indirectly heated by causing the laser beam L to enter the relay portion 20c from the direction intersecting the axis SA of the rod-shaped member 20 and heating the relay portion 20c.
- the high-intensity laser support light can be turned on more efficiently.
- the small diameter portion 20a makes it difficult for the heat of the relay portion 20c to be transmitted to the main body portion 20b and to be easily transmitted to the electron emitting portion 13a. Therefore, the electron emission part 13a can be heated more efficiently, and highly efficient electron emission can be realized.
- the inclined surface 13e is not necessarily provided.
- FIG. 5 is a view showing a light emitting envelope according to the second embodiment of the present invention.
- the luminous envelope 21 according to the second embodiment is different from the first embodiment in the shape of the bulb 22, the shape of the metal structure 23, and the configuration of the positioning portion 24.
- the bulb 22 is a substantially spherical casing having a spherical portion 22a and a protruding portion 22b protruding from a part of the spherical portion 22a.
- the metal structure 23 arranged in the internal space S 22 is also spherical.
- a magnetic film made of a ferromagnetic material such as a nickel film 25 is coated on the surface so as to cover approximately half of the surface of the metal structure 23.
- a first pedestal 26 having a fitting portion 26a into which a part of the metal structure 23 (for example, a portion coated with a nickel film 25) is fitted as a positioning portion 24 at the bottom of the internal space S of the valve 22. Is arranged.
- the 1st base 26 has the fitting part 26a which is a recessed part formed in the inner wall of the protrusion part 22b.
- the structure after sealing the exhaust pipe used for exhausting the bulb 22 and sealing the luminescent gas G can also be used as the protruding portion 22b and the fitting portion 26a.
- the positioning portion 24 also has a second pedestal 27 having a fitting portion 27a into which the bottom portion of the valve 22 is fitted. More specifically, the second pedestal 27 is a member that holds the valve 22 from the outside, and has a fitting portion 27a that is a recess corresponding to the shape of the bottom portion of the valve 22 and the protruding portion 22b. Thus, since the fitting part 27a has a shape corresponding to the protruding part 22b, the stability of the valve 22 is further ensured.
- the positioning unit 24 has a magnet 28 embedded in the second pedestal 27 at a position facing the first pedestal 26. More specifically, the magnet 28 is a region corresponding to the fitting portion 27 a of the second pedestal 27 and exerts a magnetic force on the nickel film 25 of the metal structure 23 arranged on the first pedestal 26. It is embedded in such a position and functions as the positioning portion 24 in cooperation with the nickel film 25. That is, in the positioning portion 24, the nickel film 25 and the first pedestal 26 are disposed only in the internal space S of the valve 22, and the second pedestal 27 and the magnet 28 are disposed only outside the valve 22. In either case, the valve 22 does not penetrate or a part thereof is not buried in the valve 22.
- the metal structure 23 and the positioning portion 24 do not penetrate the bulb 22, or a part thereof is not buried in the bulb 22, and a weak portion is formed in the glass bulb 22. Therefore, the sealed state of the valve 22 can be maintained satisfactorily.
- the metal structure 23 can be positioned by fitting a part of the metal structure 23 into the fitting portion 26 a of the first base 26.
- the metal structure 23 can also be positioned by fitting the bottom of the valve 22 into the fitting portion 27 a of the second pedestal 27.
- the metal structure 23 in the light emitting envelope 21, a part of the metal structure 13 is coated with a nickel film 25, which is a magnetic film made of a ferromagnetic material, and is embedded in the nickel film 25 and the second pedestal 27.
- the positioning unit 24 has three configurations of the first pedestal 26, the second pedestal 27, and the magnet 28. However, any one of these, or a combination of any two of them.
- the metal structure 23 may be positioned by the above.
- since the metal structure 23 is spherical, if the metal structure 23 is rotated, the region that becomes the incident site of the laser light L can be changed, so that the lighting performance is deteriorated. It is also possible to deal with cases. [Third Embodiment]
- FIG. 6 is a view showing a light emitting envelope according to the third embodiment of the present invention. As shown in the figure, the light emitting envelope 31 according to the third embodiment is different from the first embodiment in the shape of the bulb 32, the shape of the metal structure 33, and the configuration of the positioning portion 34.
- the bulb 32 is formed by the cylindrical portion 32a, and the metal structure 33 arranged in the internal space S of the bulb 32 is also cylindrical.
- the outer diameter of the metal structure 33 is slightly smaller than the inner diameter of the valve 12 and is disposed on the proximal end side of the inner space S of the valve 32.
- a small diameter portion 35 is formed as a positioning portion 34 of the metal structure 33 and protrudes toward the peripheral surface side of the metal structure 33.
- the metal structure 33 and the positioning portion 34 do not penetrate the bulb 32, or a part thereof is not buried in the bulb 32, and a fragile portion is formed in the glass bulb 32. Therefore, the sealing state of the valve 32 can be maintained satisfactorily.
- the laser light L can be incident from the axial end surface 32 b of the cylindrical bulb 32. Therefore, the aberration (for example, astigmatism) of the laser beam L can be suppressed compared to the case where the laser beam L is incident on the spherical bulb.
- the small-diameter portion 35 enables the metal structure 33 to be positioned with a simple structure.
- FIG. 7 is a view showing a light emitting envelope according to the fourth embodiment of the present invention.
- the light emitting envelope 41 according to the fourth embodiment is different from the first embodiment in the shape of the bulb 42, the shape of the metal structure 43, and the configuration of the positioning portion 44.
- the bulb 42 is formed by the cylindrical portion 42a, while the metal structure 43 disposed in the internal space S of the bulb 42 is spherical.
- the surface of the metal structure 43 is coated with a magnetic film made of a ferromagnetic material such as a nickel film 45 so as to cover approximately half of the metal structure 43.
- a first pedestal 46 having a fitting portion 46 a into which a part of the metal structure 43 (for example, a portion coated with a nickel film 45) is fitted as a positioning portion 44 at the bottom of the internal space S of the valve 42. Is arranged.
- a magnet 47 as a positioning portion 44 is disposed outside the valve 42 at a position facing the first pedestal 46.
- the metal structure 43 can be positioned by fitting a part of the metal structure 43 into the fitting portion 46a of the first base 46. Further, in the light emitting envelope 41, a part of the metal structure 43 is coated with a magnetic film made of a ferromagnetic material, and a magnet 47 is provided outside the bulb 42 so as to face the first pedestal 46. Has been placed. Thereby, the metal structure 43 positioned by the first pedestal 46 can be suitably held by the magnetic force.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Plasma Technology (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
[第1実施形態]
[第2実施形態]
[第3実施形態]
[第4実施形態]
Claims (15)
- 内部空間に発光ガスが封入された筐体と、
レーザ光の照射によって電子を放射する易電子放射物質を含有する電子放射構造体と、
前記内部空間内での前記電子放射構造体の位置を位置決めする位置決め部と、を備え、
前記電子放射構造体は、前記筐体の内部空間内にのみ配置され、
前記位置決め部は、前記筐体の内部空間内又は外部にのみ配置されていることを特徴とする発光封体。 - 前記電子放射構造体は、前記易電子放射物質を含有する金属部材からなる電子放射部と、前記電子放射部を支持する支持部とを有し、
前記支持部が前記位置決め部によって前記内部空間内で位置決めされることにより、前記電子放射構造体が前記内部空間内で位置決めされていることを特徴とする請求項1記載の発光封体。 - 前記筐体は、前記電子放射部が位置する本体部と、前記本体部から突出する突出部とを有し、
前記支持部は、前記位置決め部によって前記突出部内で位置決めされていることを特徴とする請求項2記載の発光封体。 - 前記位置決め部として、前記支持部に当接するように前記突出部の内径を縮径してなる小径部が形成されていることを特徴とする請求項3記載の発光封体。
- 前記位置決め部として、前記支持部と前記突出部の内壁との間にスペーサ部材が設けられ、前記スペーサ部材を介して前記支持部が前記突出部の内部空間に嵌合していることを特徴とする請求項3記載の発光封体。
- 前記位置決め部として、前記支持部と前記突出部の内壁との間に弾性部材が設けられ、前記弾性部材を介して前記支持部が前記突出部の内部空間に嵌合していることを特徴とする請求項3記載の発光封体。
- 前記支持部は、少なくとも一部が金属によって形成され、
前記位置決め部として、前記突出部の内径を縮径してなる小径部と、前記小径部に当接可能となるように前記支持部に設けられた大径部と、前記大径部が前記小径部に当接するように前記筐体の外部から前記支持部に磁力を付与する磁力付与部とを有していることを特徴とする請求項3記載の発光封体。 - 前記支持部は、少なくとも一部が金属によって形成され、
前記位置決め部として、前記支持部と前記突出部の内壁との間で前記支持部が挿通するように設けられたスペーサ部材と、前記スペーサ部材に当接可能となるように前記支持部に設けられた大径部と、前記大径部が前記スペーサ部材に当接するように前記筐体の外部から前記支持部に磁力を付与する磁力付与部とを有していることを特徴とする請求項3記載の発光封体。 - 前記支持部は、棒状部材からなり、
前記棒状部材は、前記電子放射部を支持すると共に本体部分よりも細い細径部を有していることを特徴とする請求項2~8のいずれか一項記載の発光封体。 - 前記支持部は、棒状部材からなり、
前記棒状部材は、本体部分よりも細い細径部と、前記細径部に支持されると共に前記細径部よりも太く、前記電子放射部を支持する中継部を有していることを特徴とする請求項2~8のいずれか一項記載の発光封体。 - 前記電子放射部は、前記レーザ光の入射軸に対して傾斜する傾斜面を有していることを特徴とする請求項2~10のいずれか一項記載の発光封体。
- 前記電子放射構造体は、球状をなし、
前記位置決め部は、強磁性体からなると共に前記電子放射構造体の少なくとも一部を覆う磁性膜と、前記筐体の外部において前記筐体と対向して配置される磁石とを有していることを特徴とする請求項1記載の発光封体。 - 前記電子放射構造体は、球状をなし、
前記位置決め部は、前記筐体の内部に配置されると共に前記電子放射構造体の一部が嵌合する第1の台座を有していることを特徴とする請求項1又は12記載の発光封体。 - 前記筐体及び前記電子放射構造体は、いずれも球状をなし、
前記位置決め部は、前記筐体の外部に配置されると共に前記筐体の一部が嵌合する第2の台座を有していることを特徴とする請求項1,12,13のいずれか一項記載の発光封体。 - 前記筐体及び前記電子放射構造体は、いずれも柱状をなし、
前記位置決め部として、前記電子放射構造体に当接するように前記筐体の内径を縮径してなる小径部が形成されていることを特徴とする請求項1記載の発光封体。
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JP2015551426A JP6023355B2 (ja) | 2013-12-06 | 2014-10-29 | 発光封体 |
DE112014005524.7T DE112014005524T5 (de) | 2013-12-06 | 2014-10-29 | Lichtemittierender, abgedichteter Körper |
US15/025,928 US9984865B2 (en) | 2013-12-06 | 2014-10-29 | Light-emitting sealed body |
IL244701A IL244701A0 (en) | 2013-12-06 | 2016-03-22 | An opaque light emitting body |
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WO2015083463A1 (ja) | 2013-12-06 | 2015-06-11 | 浜松ホトニクス株式会社 | 発光封体 |
US11367989B1 (en) | 2020-12-21 | 2022-06-21 | Hamamatsu Photonics K.K. | Light emitting unit and light source device |
US11862922B2 (en) | 2020-12-21 | 2024-01-02 | Energetiq Technology, Inc. | Light emitting sealed body and light source device |
US11972931B2 (en) | 2020-12-21 | 2024-04-30 | Hamamatsu Photonics K.K. | Light emitting sealed body, light emitting unit, and light source device |
JP2023054443A (ja) * | 2021-10-04 | 2023-04-14 | 浜松ホトニクス株式会社 | 発光封体及び光源装置 |
JP2023054442A (ja) * | 2021-10-04 | 2023-04-14 | 浜松ホトニクス株式会社 | 発光封体、光源装置、及び発光封体の駆動方法 |
JP2023054439A (ja) * | 2021-10-04 | 2023-04-14 | 浜松ホトニクス株式会社 | 発光封体及び光源装置 |
US11637008B1 (en) | 2022-05-20 | 2023-04-25 | Kla Corporation | Conical pocket laser-sustained plasma lamp |
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JP6023355B2 (ja) | 2016-11-09 |
US20160240365A1 (en) | 2016-08-18 |
JPWO2015083463A1 (ja) | 2017-03-16 |
IL244701A0 (en) | 2016-04-21 |
US9984865B2 (en) | 2018-05-29 |
JP6412229B2 (ja) | 2018-10-24 |
JP2017224629A (ja) | 2017-12-21 |
JP2017027955A (ja) | 2017-02-02 |
DE112014005524T5 (de) | 2016-08-18 |
JP2017130461A (ja) | 2017-07-27 |
JP6200612B2 (ja) | 2017-09-20 |
JP6111371B2 (ja) | 2017-04-05 |
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