WO2015010396A1 - 对位系统 - Google Patents

对位系统 Download PDF

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Publication number
WO2015010396A1
WO2015010396A1 PCT/CN2013/087428 CN2013087428W WO2015010396A1 WO 2015010396 A1 WO2015010396 A1 WO 2015010396A1 CN 2013087428 W CN2013087428 W CN 2013087428W WO 2015010396 A1 WO2015010396 A1 WO 2015010396A1
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WO
WIPO (PCT)
Prior art keywords
alignment
light
aligned
light source
receiving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2013/087428
Other languages
English (en)
French (fr)
Inventor
邓朝阳
林子锦
赵海生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Beijing BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to US14/387,379 priority Critical patent/US9798167B2/en
Publication of WO2015010396A1 publication Critical patent/WO2015010396A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133374—Constructional arrangements; Manufacturing methods for displaying permanent signs or marks

Definitions

  • Embodiments of the invention relate to a registration system. Background technique
  • TFT-LCD Thin-film Transistor Liquid Crystal Display
  • PDA Personal Digital Assistant
  • a plurality of mask processes are performed on a glass substrate to form a separate TFT pixel array circuit, and each pixel array area corresponds to a liquid crystal panel to form an array substrate (TFT substrate).
  • Liquid crystal is dropped on the TFT substrate, and the color filter is covered to form an LCD panel, and the LCD panel is cut to form an independent liquid crystal display.
  • a backlight, an optical film, and peripheral circuits are mounted for each liquid crystal display to form a complete TFT-LCD display module.
  • the first fabrication process When the glass substrate enters the array process, taking the bottom gate type TFT-LCD as an example, the first fabrication process generally produces gates and gate lines. In the first fabrication process, an alignment mark is also formed on the corners of the glass substrate. The alignment mark is generally formed into a cross shape and is made of a metal film. Therefore, the alignment mark is opaque. The role of the alignment marks on the array substrate in the three stages of fabrication described above is critical. In each manufacturing process, it is generally necessary to clamp the glass substrate to the equipment corresponding to the process (such as sputtering equipment, PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, exposure equipment, and glue application).
  • PECVD Laser Enhanced Chemical Vapor Deposition
  • a developing machine ie, a device other than the exposure device in the photolithography process
  • a developing machine ie, a device other than the exposure device in the photolithography process
  • corresponding operations on the glass substrate such as a film forming operation, an exposure operation, an etching operation, and the like.
  • the clamping member of each device may cause the glass substrate to deviate from its standard position (that is, the position where the glass substrate should be in an ideal state in which the clamping member has no error), so correspondingly to the glass substrate Before the operation, the glass substrate is aligned to confirm whether the glass substrate is in good alignment.
  • the currently used alignment method for the alignment mark on the glass substrate is: pre-storing the standard photo of the alignment mark on the glass substrate when the glass substrate is in the standard position; if it is necessary to perform the alignment during the production process, The current photo of the align mark on the photographed glass substrate is compared with a pre-saved standard photograph. If the comparison result is the same, it indicates that the glass substrate is aligned correctly, and the glass substrate is correspondingly operated; if not, the alignment of the glass substrate is inaccurate.
  • the alignment processing method used in the manufacturing process of the conventional liquid crystal display device has a long processing time and low processing efficiency.
  • the embodiment of the present invention provides a aligning system for solving the problem that the existing processing method of the aligning processing method has a long processing time and the processing efficiency is low.
  • Embodiments of the present invention provide a aligning system including a light source emitting device, a light source receiving device, and a processor; the light source transmitting device is located at one side of the object to be aligned, and is emitted toward the object to be aligned
  • the light source receiving device is located on the other side of the object to be aligned and is located at a standard position corresponding to the alignment mark set on the object to be aligned, and the light source receiving device faces the object to be aligned a plurality of light sensors for sensing the light are disposed on the end surface;
  • the processor receives the sensing signal transmitted by each of the light sensors, and determines whether the light is sensed according to whether the light sensor senses the light Whether the alignment of the alignment object is accurate.
  • the processor determining whether the alignment of the object to be aligned is accurate comprises: if the at least one light sensor included in the light source receiving device does not sense the light emitted by the light source emitting device, the processor determines Determining the alignment of the alignment object is inaccurate; if all the light sensors included in the light source receiving device sense the light emitted by the light source emitting device, the processor determines that the alignment of the object to be aligned is accurate .
  • the processor further determines, according to the position and quantity of the light sensor that does not sense the light in the light source receiving device, respectively Determining a matching direction and a matching distance that the object to be aligned needs to be adjusted, wherein the matching distance includes a horizontal distance and a vertical distance.
  • the processor is not sensing the light in the light source receiving device corresponding to the two of the alignment marks. a position of the light sensor, determining whether the object to be aligned generates rotation; or, for at least two of the alignment marks set on the object to be aligned, the processor respectively determines each of the pair The bit mark corresponds to a maximum horizontal distance and a maximum vertical distance, and determines whether the object to be aligned generates rotation according to a maximum horizontal distance and a maximum vertical distance corresponding to the two of the alignment marks.
  • the difference between the maximum horizontal distance of the two of the alignment marks and the maximum vertical distance of the two of the alignment marks by the processor Determining the alignment angle; and determining, by the processor, the location of the light sensor that does not sense the light in the light source receiving device corresponding to the two of the alignment marks Compensating direction of the bit angle; after compensating the object to be aligned according to the alignment angle and the compensation direction, for any of the alignment marks, the processor is not according to the light source receiving device Sensing the position and the number of the light sensors of the light, respectively determining the alignment direction and the alignment distance that the object to be aligned needs to be adjusted.
  • an end face of the light source receiving device facing the alignment mark includes a first area at a central position and the first area a second region adjacent to the first region, the shape and size of the first region being the same as the shape and size of the alignment mark; wherein the second region is respectively disposed around the rectangular region where the first region is located.
  • the sub-areas are configured such that all of the light sensors are evenly distributed in the second area, and any two of the light sensors are equidistantly disposed.
  • a central position of the first area is provided with a central light receiving device, if all light sensors included in the light source receiving device sense the light, and the central light receiving device included in the light source receiving device is not sensed Determining, by the processor, the alignment of the object to be aligned is accurate; if all the light sensors included in the light source receiving device sense the light, and the central light receiving device included in the light receiving device senses The processor determines that the alignment of the object to be aligned is inaccurate.
  • the processor determines, according to the position of the light sensor that does not sense the light in the light source receiving device, that the alignment direction of the object to be aligned is away from the light source receiving device.
  • the alignment mark is transparent, and the periphery of the alignment mark is opaque, the end face of the light source receiving device facing the alignment mark includes a first area at a center position, the first area
  • the shape and size of the alignment mark are the same as the shape and size of the alignment mark; wherein all the light sensors are hooked in the first area, and any two of the light sensors are equidistantly disposed.
  • the processor determines, according to the position and the number of the light sensors that do not sense the light in the outer region of the projection of the aligning rectangle of the alignment mark in the light source receiving device, respectively The alignment direction and the alignment distance to be adjusted by the object to be aligned, wherein the alignment distance includes a horizontal distance and a vertical distance.
  • the processor determines that the alignment direction of the object to be aligned is a direction toward a position of a light sensor in the light source receiving device that does not sense light emitted by the light source emitting device.
  • the alignment system is applied to the display device manufacturing process, and the object to be aligned is a substrate substrate, and the alignment mark is disposed in at least one corner region of the substrate substrate.
  • FIG. 1 is a schematic structural diagram of a registration system according to an embodiment of the present invention.
  • FIG. 2A is a schematic diagram showing a distribution of a plurality of light sensors according to Embodiment 1 of the present invention
  • FIG. 2B is a schematic diagram showing a relative position of a registration mark and a light source receiving device according to Embodiment 1 of the present invention
  • FIG. 2C is a schematic diagram showing another relative position of a registration mark and a light source receiving device in Embodiment 1 according to an embodiment of the present invention
  • FIG. 2D is a schematic diagram of a first position of two alignment marks on a to-be-aligned object in Embodiment 1 according to an embodiment of the present disclosure
  • FIG. 2E is a schematic diagram of a second location of two alignment marks on a to-be-aligned object according to Embodiment 1 of the present invention.
  • FIG. 2F is a schematic diagram of two alignment marks in a first embodiment according to an embodiment of the present invention. A schematic diagram of the third position on the top;
  • 2G is still another schematic structural diagram of an end face of a light sensor of a light source receiving device according to Embodiment 1 of the present invention.
  • FIG. 3A is a schematic diagram showing a distribution of a plurality of light sensors according to Embodiment 2 of the present invention
  • FIG. 3B is a schematic diagram showing a relative position of a registration mark and a light source receiving device according to Embodiment 2 of the present invention
  • 3C is a schematic diagram showing another relative position of a registration mark and a light source receiving device in Embodiment 2 according to an embodiment of the present invention
  • FIG. 4 is a schematic diagram of a distribution of a plurality of optical sensors according to an embodiment of the present invention
  • FIG. 5 is a schematic diagram of a preferred structure of a aligning system applied to a display device according to an embodiment of the present invention. detailed description
  • whether the light sensor included in the light source receiving device senses the light emitted by the light source emitting device can determine whether the alignment of the object to be aligned is accurate, thereby shortening the time of the alignment processing and improving the time. The efficiency of the alignment process.
  • an embodiment of the present invention provides a registration system including: a light source emitting device 1, a light source receiving device 2, and a processor 3.
  • the light source emitting device 1 When the alignment object is subjected to the alignment processing, the light source emitting device 1 is located on one side of the object to be aligned, and emits light toward the object to be aligned; the light source receiving device 2 is located on the other side of the object to be aligned and located at the a plurality of light sensors for sensing the light emitted by the light source emitting device 1 are disposed on the end surface of the light source receiving device 2 facing the object to be aligned; The processor 3 receives the sensing signals transmitted by each of the light sensors, and determines whether the alignment of the object to be aligned is accurate according to whether each of the light sensors senses the light emitted by the light source emitting device 1.
  • the light sensor senses the light emitted by the light source emitting device (ie, the light sensor receives the light emitted by the light source emitting device)
  • the light sensor is processed to Transmitting a sensing signal for indicating that the light emitted by the light source emitting device is sensed by the light emitting device; that is, the light sensor does not receive the light emitted by the light source emitting device (ie, the light sensor does not receive the light emitted by the light emitting device) Light
  • the light sensor transmits to the processor an inductive signal indicating that the light emitted by the light source emitting device is not sensed by itself.
  • the standard position (also referred to as an ideal position) corresponding to the object to be aligned refers to the position where the object to be aligned is clamped in an ideal state in which the clamping member of the device has no error.
  • the standard position (also referred to as an ideal position) corresponding to the alignment mark on the object to be aligned refers to the position of the alignment mark on the object to be aligned when the object to be aligned is in the standard position.
  • the light source emitting device located on one side of the object to be aligned emits light toward the object to be aligned, and another object located in the object to be aligned a light source receiving device on a side corresponding to a standard position corresponding to the alignment mark disposed on the object to be aligned, sensing light emitted by the light source emitting device; and determining whether the light source is received according to the light sensor included in the light source receiving device
  • the light emitted by the transmitting device determines whether the alignment of the object to be aligned is accurate.
  • whether the light sensor included in the light source receiving device senses the light emitted by the light source emitting device can determine whether the alignment of the object to be aligned is accurate, thereby shortening the time of the alignment processing and improving the pair. The efficiency of bit processing.
  • the light source emitting device and the light source receiving device are respectively disposed on two sides of the object to be aligned, and the light source emitting device may be disposed at any position on one side of the object to be aligned; Whether the light sensor included in the light source receiving device senses the light to determine whether the alignment of the object to be aligned is accurate. Therefore, the light source receiving device needs to be disposed on the other side of the object to be aligned and located on the object to be aligned. Set the alignment mark corresponding to the standard position.
  • the light source emitting device and the light source receiving device are respectively located on two sides of the object to be aligned, and the position of the light source emitting device corresponds to the position of the light source receiving device, that is, the light source is
  • the radiation device and the light source receiving device are respectively disposed on both sides of the alignment mark of the object to be aligned.
  • the light source receiving apparatus of the embodiment of the present invention may further move from a standard position corresponding to one alignment mark to a standard position corresponding to another alignment mark as needed. In order to perform the alignment processing of the object to be aligned based on different alignment marks.
  • the shape of the alignment mark is not limited, and the alignment mark may be any shape, such as a cross, a triangle, a circle, a polygon, or the like;
  • the type of the light sensor is not limited, and any light source can be sensed according to the alignment accuracy of the object to be aligned (such as micro-level alignment accuracy, or millimeter-level alignment precision, etc.), and light is selected.
  • the type of sensor for example, selecting a charge-coupled device (CCD) as a light sensor), parameter information such as size, resolution, etc., and determining that a plurality of light sensors are arbitrarily adjacent when the light source emitting device is distributed The spacing between the two light sensors.
  • CCD charge-coupled device
  • the processor determines whether the alignment of the object to be aligned is accurate, and may include the following two situations:
  • the processor determines that the alignment of the object to be aligned is inaccurate
  • the processor determines that the object to be aligned is aligned accurately.
  • the processor determines that the alignment of the object to be aligned is inaccurate, the processor further determines, according to the position and the quantity of the light sensor that does not sense the light in the light source receiving device, that the object to be aligned needs to be adjusted. Alignment direction and alignment distance.
  • the alignment distance includes a horizontal distance and a vertical distance.
  • the processor may further determine, according to the position and quantity of the light sensor that does not sense the light in the light source receiving device, how much distance the object to be aligned needs to move in the horizontal direction (left or right), and/or How much distance needs to be moved in the vertical direction (up or down) so that the object to be aligned can be located at its corresponding standard position.
  • the object to be aligned when the alignment processing is performed, the object to be aligned may be deflected, that is, there is a certain rotation angle with the corresponding standard position, and the angle value of the corner is generally small (generally within 1), The following processing can be performed.
  • the alignment processing can be performed by setting an alignment mark on the object to be aligned. For example, when it is determined that the alignment of the alignment object is inaccurate, according to the position and the quantity of the light sensor that does not sense the light in the light source receiving device, respectively, the alignment direction of the object to be aligned needs to be adjusted and Alignment distance.
  • the processor needs to first determine whether the alignment object has generated rotation. Then, after determining that the rotation has been generated, the processor determines the alignment angle (ie, the angle at which the alignment object is rotated) and the compensation direction (compensates in a direction opposite to the direction in which the alignment object rotates); After the alignment object is compensated according to the alignment angle and the compensation direction, the processor determines the distance that needs to be adjusted in the horizontal direction (ie, how much distance is moved to the left or right in the horizontal direction) and the vertical adjustment The distance (ie how much distance is moved up or down in the vertical direction).
  • the alignment angle ie, the angle at which the alignment object is rotated
  • the compensation direction compensation direction (compensates in a direction opposite to the direction in which the alignment object rotates)
  • the processor determines the distance that needs to be adjusted in the horizontal direction (ie, how much distance is moved to the left or right in the horizontal direction) and the vertical adjustment The distance (ie how much distance is moved up or down in the vertical direction).
  • the processor determines whether the alignment object has generated a rotation, for example, including the following two methods:
  • the processor determines the to-be-aligned position according to the position of the light sensor that does not sense light in the light source receiving device corresponding to the two alignment marks Whether the object produces a rotation. For example, if the positions of the light sensors that do not sense the light in the light source receiving device corresponding to the two alignment marks are the same, the processor determines that the object to be aligned does not rotate; if the light source receiving device corresponding to the two alignment marks The position of the light sensor that does not sense the light is different, and the processor determines that the object to be aligned has rotated.
  • Method 2 For at least two alignment marks set on the object to be aligned, the processor respectively determines a maximum horizontal distance and a maximum vertical distance corresponding to each of the alignment marks, and according to the maximum corresponding to the two alignment marks The horizontal distance and the maximum vertical distance determine whether the object to be aligned generates rotation. For example, if the maximum horizontal distances corresponding to the two alignment marks are equal, and the maximum vertical distances corresponding to the two alignment marks are equal, the processor determines that the object to be aligned does not generate a rotation; if the two alignment marks correspond to the maximum The horizontal distance is not equal, or the maximum vertical distance corresponding to the two alignment marks is not equal, then The processor determines that the object to be aligned has rotated.
  • the processor determines the compensation direction of the alignment angle (ie, clockwise compensation or counterclockwise compensation) according to the position of the light sensor that does not sense the light in the light source receiving device corresponding to the two alignment marks. After compensating the object to be aligned according to the alignment angle and the compensation direction thereof, the processor determines respectively according to the position and quantity of the light sensor that does not sense the light in the light source receiving device for any of the alignment marks. The alignment direction and the alignment distance that need to be adjusted for the object to be aligned are obtained.
  • the processor determines the alignment angle of the object to be aligned according to the formula 1:
  • AH is the difference between the maximum horizontal distances of the two alignment marks, and the difference between the maximum vertical distances of the two alignment marks.
  • the object to be aligned is compensated according to the determined alignment angle.
  • the specific example includes: adjusting the object to be aligned according to the determined alignment angle and the compensation direction thereof (ie, clockwise or counterclockwise rotation)
  • the object to be aligned is such that there is no angular deviation between the current position of the object to be aligned and its standard position or the angle deviation is within an allowable error range.
  • the alignment system provided by the embodiment of the present invention can be applied to the manufacturing process of the display device.
  • the object to be aligned is a substrate, and at least one corner region of the substrate is disposed. There is a registration mark.
  • the alignment system provided by the embodiment of the present invention can also be applied to other scenarios that need to perform alignment processing.
  • the alignment mark provided on the substrate substrate is a cross-shaped alignment mark.
  • the alignment mark can also be other shapes such as triangles, circles, rectangles, polygons, and the like.
  • the light source receiving device of the embodiment of the present invention may include a plurality of light sensors, and the plurality of light sensors are distributed on the end surface of the light source receiving device facing the alignment mark Whether the alignment mark on the bit object is transparent and the shape of the alignment mark includes the following two preferred embodiments: Embodiment 1: If the alignment mark on the object to be aligned is opaque, and the periphery of the alignment mark is transparent, the end face of the light source receiving device facing the alignment mark includes a first area at the center position and the first area The second area adjacent to the area.
  • the shape and size of the first area are the same as the shape and size of the alignment mark provided on the object to be aligned, and the second area is composed of sub-areas respectively disposed around the rectangular area where the first area is located, all the light
  • the sensors are hooked in the second area, and any two light sensors are equidistantly disposed.
  • the shape of the alignment mark is a cross shape, and the alignment marks of other shapes are similar thereto, and are not illustrated here.
  • the structure of the first region M and the second region N in the end face of the light source receiving device facing the alignment mark is shown in FIG. 2A.
  • the shape and size of the first region M are set on the object to be aligned.
  • the shape and size of the alignment mark are the same, and the second area N is composed of sub-areas respectively disposed around the rectangular area where the first area M is located, and all the light sensors are evenly distributed in the second area N, and any two A light sensor is equidistantly set.
  • the processor determines that the alignment of the object to be aligned is inaccurate; if all the light sensors included in the light source receiving device are When the light emitted by the light source emitting device is sensed, the processor determines that the alignment of the object to be aligned is accurate.
  • the processor determines the direction and position of the object to be aligned according to the corresponding processing manner according to the corresponding processing manner:
  • the first application scenario At this time, when performing the alignment processing, the processor only needs to consider the offset of the object to be aligned in the horizontal direction and the vertical direction.
  • the object to be aligned may include only one alignment mark, and the light source emitting device is located on one side of the alignment mark, and emits light toward the alignment mark, and the light source receiving device is located The other side of the alignment mark is located at a standard position corresponding to the alignment mark, and the processor determines respectively according to the position and the number of the light sensors of the light source receiving device that do not sense the light emitted by the light source emitting device.
  • the alignment direction and the alignment distance that the object to be aligned needs to be adjusted.
  • the alignment distance includes a horizontal distance and a vertical distance.
  • the processor determines, according to the position and the quantity of the light sensor that does not sense the light in the light source receiving device, that the alignment direction of the object to be aligned needs to be adjusted is away from the light source in the receiving device.
  • the direction of the position where the light sensor of the light emitted by the transmitting device is located For example, in the horizontal direction, if the light sensor in the left area does not sense the light emitted by the light source emitting device, the determined alignment direction is rightward, that is, the object to be aligned needs to be adjusted to the right; If the light sensor of the area does not sense the light emitted by the light source emitting device, the determined alignment direction is leftward, that is, the object to be aligned needs to be adjusted to the left;
  • the determined alignment direction In the vertical direction, if the light sensor of the upper side region does not sense the light emitted by the light source emitting device, the determined alignment direction is downward, that is, the object to be aligned needs to be adjusted downward; if the lower region is The light sensor does not sense the light emitted by the light source emitting device, and the determined alignment direction is upward, that is, the object to be aligned needs to be adjusted upward.
  • the processor determines a matching distance that the to-be-aligned object needs to be adjusted according to a correspondence between the number of the light sensors that do not sense the light and the distance of the alignment;
  • the corresponding relationship may be a correspondence between a total number of light sensors that do not sense light in any sub-area of the second area and a matching distance; the corresponding relationship may also be the second area.
  • the correspondence between the number of rows (or the number of columns) occupied by the light sensor that does not sense light in any sub-area and the alignment distance For example, if the light sensor that does not sense light in the left sub-area of the second area occupies three columns, the corresponding alignment distance is two column distances, and, for example, the upper sub-area in the second area is not The light sensor that senses the light occupies two lines, and the corresponding alignment distance is one line spacing.
  • the correspondence relationship is a correspondence between a number M of rows (or the number of columns N) occupied by a light sensor that does not induce light in any sub-region of the second region, and a distance between the alignments,
  • the determined alignment distance is M-1 row spacing (or N-1 column spacing).
  • the relative position of the alignment mark on the current object to be aligned and the light source receiving device is as shown in FIG. 2B, part of the light sensors included in the left sub-region in the second region of the light source receiving device are not Detecting the light emitted by the light source emitting device and the partial light sensor included in the lower sub-region does not sense the light emitted by the light source emitting device, the determined alignment direction is as shown by the arrow in FIG.
  • the direction of the bit is a direction away from the position of the light sensor in the light source receiving device that does not sense the light emitted by the light source emitting device, that is, the object to be aligned needs to be compensated to the right and the upward direction, so that the object to be aligned can be In its corresponding standard position.
  • the processor can determine the alignment distance to be adjusted according to the correspondence between the set number of the light sensors that do not sense the light and the alignment distance.
  • the light sensor that does not sense the light emitted by the light source emitting device in the left sub-region of the second region of the light source receiving device has 7 columns, and the alignment distance in the horizontal direction is determined to be 6 columns.
  • the light sensor that does not sense the light emitted by the light source emitting device in the lower sub-area in the second region of the light source receiving device is In 5 rows, it is determined that the alignment distance in the vertical direction is 4 line spacings, and in combination with the alignment direction, it is necessary to compensate the alignment distance of 4 line spacings upward.
  • the second application scenario the processor needs to consider the alignment angle of the object to be aligned, that is, whether the angle of the object to be aligned has been angularly deflected. If the object to be aligned is angularly deflected, any alignment mark on the object to be aligned will have an angular deflection corresponding to it, as shown in Fig. 2C.
  • the alignment processing when performing the alignment processing, according to the at least two alignment marks set on the alignment object, using the above method 1 or method 2, determining whether the to-be-aligned object has generated rotation, if Rotate to further determine the corresponding alignment angle and compensation direction. After the object to be aligned is compensated according to the alignment angle and the compensation direction, the alignment distance and the horizontal direction and the vertical direction are determined according to the processing manner in the first application scenario of the embodiment. Bit direction.
  • the light source receiving device is first placed on a standard position corresponding to any of the alignment marks set on the alignment object, and the light sensor that does not sense the light in the light source receiving device is determined. Position and quantity; then, according to the relative positional relationship between the two alignment marks, the light source receiving device is moved to a standard position corresponding to another alignment mark, and it is determined that the light source receiving device does not sense light.
  • the light sensor that does not sense the light in the light source receiving device is determined.
  • the processor determines a compensation direction of the alignment angle according to a position of a light sensor that does not sense light in the light source receiving device corresponding to the two alignment marks. For example, when the light source receiving device is located at a standard position corresponding to the first alignment mark, the processor determines a position of the light sensor that does not sense light in the light source receiving device; and the light source receiving device is located in the second pair When the bit mark corresponds to the standard position, the processor determines the position of the light sensor that does not sense the light in the light source receiving device; the processor does not sense the light in the light source receiving device corresponding to the two alignment marks The position of the light sensor determines the direction in which the object to be aligned rotates relative to the standard position corresponding to the object to be aligned (ie, clockwise or counterclockwise).
  • the processor determines that the compensation direction of the alignment angle is the opposite direction of the direction in which the object to be aligned rotates relative to its corresponding standard position (if the direction of rotation is clockwise, the compensation direction is counterclockwise; If the direction of rotation is counterclockwise, the compensation direction is clockwise). It should be noted that, because the positions of the two alignment marks are different, the method of determining the compensation direction is different, but as long as the position of the two alignment marks is determined, the setting method can be followed.
  • the compensation direction of the alignment angle is determined according to the position of the light sensor that does not sense the light in the light source receiving device corresponding to the two alignment marks.
  • the processor determines the compensation direction of the alignment angle as follows.
  • the processor determines, according to the alignment mark located in the upper right corner, the left sub-region (and/or the upper sub-region) in the light source receiving device includes a light sensor that does not sense light, and the processor is located in the lower left corner
  • the aligning mark determines that the right sub-region (and/or the lower sub-region) of the light source receiving device contains a light sensor that does not sense light, and the processor determines that the direction of the object to be aligned is Counterclockwise, further, the compensation direction determined by the processor is clockwise.
  • the processor determines, according to the alignment mark located in the upper right corner, that the right sub-region (and/or the lower sub-region) in the light source receiving device contains a light sensor that does not sense light, and the processor is located in the lower left corner
  • the aligning mark determines that the left sub-region (and/or the upper sub-region) of the light source receiving device contains a light sensor that does not sense light
  • the processor determines that the direction of the object to be aligned is Clockwise, further, the compensation direction determined by the processor is counterclockwise.
  • two alignment marks are respectively located on two edge regions of the upper side of the object to be aligned.
  • one alignment mark is set in the upper left corner and the other alignment mark is set in the upper right corner.
  • the specific example of the processor determining the compensation direction of the alignment angle is as follows.
  • the processor determines, according to the alignment mark located in the upper left corner, the light sensor that includes the uninduced light in the lower sub-area of the light source receiving device, and the processor determines the light source receiving according to the alignment mark located in the upper right corner If the upper sub-area of the device includes a light sensor that does not sense light, the processor determines that the direction of the object to be aligned is counterclockwise, and further, the compensation direction determined by the processor is clockwise; The processor determines, according to the alignment mark located in the upper left corner, the light sensor that includes the uninduced light in the upper sub-area of the light source receiving device, and the processor determines the light source receiving device according to the alignment mark located in the upper right corner
  • the middle and lower sub-regions include a light sensor that does not sense light, and the processor determines that the direction of rotation of the object to be aligned is clockwise. Further, the compensation direction determined by the processor is counterclockwise.
  • the processor determines the compensation direction of the alignment angle as follows.
  • the processor determines, according to the alignment mark located in the upper right corner, the light sensor that includes the uninduced light in the left sub-area of the light source receiving device, and the processor determines the light source receiving according to the alignment mark located in the lower right corner If the right sub-region of the device includes a light sensor that does not sense light, the processor determines that the direction of rotation of the object to be aligned is counterclockwise, and further, the compensation direction determined by the processor is clockwise; The processor determines, according to the alignment mark located in the upper right corner, the light sensor that includes the uninduced light in the right sub-region of the light source receiving device, and the processor determines the light source receiving device according to the alignment mark located in the lower right corner
  • the middle left sub-area includes a light sensor that does not sense light, and the processor determines that the direction of the object to be aligned is clockwise. Further, the processor determines that the compensation direction is counterclockwise.
  • the two alignment marks can also be set at other positions of the object to be aligned, such as one alignment mark is set in the upper left corner and the other is set in the lower right corner.
  • one alignment mark is set in the upper left corner and another A processor is disposed in the lower left corner, and the like, and the processor can determine the compensation of the alignment angle of the object to be aligned according to the position of the light sensor that does not sense the light in the light source receiving device corresponding to the two alignment marks. Directions, no longer listed here.
  • the central position of the first region M is provided with a central light receiving device 21.
  • the processor may perform the following steps: if all the light sensors included in the light source receiving device sense the light emitted by the light source emitting device, and the light source receiving device comprises The central light receiving device does not sense the light emitted by the light source emitting device, and determines that the alignment object to be aligned is accurate; if all the light sensors included in the light source receiving device sense the light emitted by the light source emitting device, and The central light receiving device included in the light source receiving device senses the light emitted by the light source emitting device, and determines that the alignment of the object to be aligned is inaccurate.
  • a central light receiving device is disposed at a center position of the end surface of the light source receiving device facing the object to be aligned, thereby avoiding a large offset of the object to be aligned (eg, the object to be aligned currently)
  • the misalignment is caused when the alignment mark has completely deviated from the light source receiving device.
  • a specific example of the above manner 1 is as follows. Firstly, according to the determined alignment angle and the compensation direction thereof, the object to be aligned is rotated; and then the object to be aligned is moved according to the determined alignment direction and the alignment distance, and the object to be aligned is adjusted after being adjusted.
  • the registration mark is at its corresponding standard position.
  • a specific example of the above mode 2 is as follows. First, according to the determined alignment angle and the compensation direction thereof, the object to be aligned is rotated; and according to the determined alignment direction and the alignment distance, the operation required to be performed on the object to be aligned is compensated.
  • the alignment system is applied to the manufacturing process of the display device, and the object to be aligned is a substrate of the village.
  • the current operation is an operation of forming an active layer on the substrate of the village as an example, before processing,
  • the alignment processing of the village substrate is performed by the alignment system of the embodiment of the present invention. If the processor determines that the alignment of the substrate is inaccurate, determining the alignment direction and the alignment distance that need to be adjusted in this operation according to the position and the number of the light sensors that do not sense the light in the light source receiving device, and Compensation is performed in the process of fabricating the active layer (mask, exposure, development, etching, etc.).
  • the mask is moved according to the determined alignment direction and the alignment distance to avoid a deviation between the active layer formed in the process and the fabricated gate, gate line, and the like.
  • the relative positional relationship between the active layer and the fabricated gate, gate line and the like is ensured.
  • the processor determines whether the alignment of the object to be aligned is accurate according to whether each light sensor in the light receiving device senses the light emitted by the light emitting device, and if the light source receiving device appears If all the included light sensors do not sense the light (that is, abnormal conditions), it indicates that the alignment system is faulty or the alignment mark of the object to be aligned is defective. In this case, the alignment The system sends an alarm signal to prompt the staff to troubleshoot.
  • Embodiment 2 If the alignment mark set on the object to be aligned is transparent, and the periphery of the alignment mark is opaque, the end face of the light source receiving device facing the alignment mark includes a first area at a central position, the first The shape and size of an area are the same as the shape and size of the alignment mark; all of the light sensors are evenly distributed in the first area, and any two light sensors are equidistantly disposed.
  • the shape of the alignment mark is still a cross shape.
  • the structure of the first region M and the second region N in the end face of the light source receiving device facing the alignment mark is shown in FIG. 3A.
  • Figure In 3A the shape and size of the first region M are the same as the shape and size of the alignment mark, and all the light sensors are uniformly distributed in the first region M, and any two light sensors are equidistantly disposed.
  • the processor determines that the alignment of the object to be aligned is inaccurate; if all the light sensors included in the light source receiving device are When the light emitted by the light source emitting device is sensed, the processor determines that the alignment of the object to be aligned is accurate.
  • the processor determines that the alignment of the object to be aligned is inaccurate, the processor determines the direction and position to be adjusted according to the corresponding processing manner according to the corresponding processing manner.
  • the first application scenario At this time, when performing the alignment processing, the processor only needs to consider the offset of the object to be aligned in the horizontal direction and the vertical direction.
  • the object to be aligned may include only one alignment mark.
  • the light source emitting device is located on one side of the alignment mark, and emits light toward the alignment mark
  • the light source receiving device is located on the other side of the alignment mark and located at a standard position corresponding to the alignment mark.
  • the processor determines the alignment direction and the alignment distance that the object to be aligned needs to be adjusted according to the position and the number of the light sensors in the light source receiving device that do not sense the light emitted by the light source emitting device.
  • the alignment distance includes a horizontal distance and a vertical distance.
  • the processor determines, according to the position and the number of the light sensors that do not sense the light in the outer region of the projection of the aligning rectangle of the alignment mark in the light source receiving device, respectively, that the to-be-aligned object needs to be adjusted.
  • Alignment direction and alignment distance includes a horizontal distance and a vertical distance.
  • the alignment direction determined by the processor to be adjusted by the processor is a direction toward a position of the light source receiving device that does not sense the light emitted by the light source emitting device.
  • the processor determines the alignment distance that the object to be aligned needs to be adjusted according to the correspondence between the number of the light sensors that do not sense the light and the alignment distance.
  • the correspondence may be in any sub-region of the outer region.
  • Corresponding relationship between the total number of light sensors that sense the light and the distance of the alignment; the corresponding relationship may also be the light sensing of the light that is not induced in any of the outer regions.
  • the correspondence relationship is a correspondence between the number of rows M (or the number of columns N) occupied by the light sensor that does not induce light in any sub-region of the outer region and the alignment distance, where The determined alignment distance is M-1 line spacing (or N-1 column spacing).
  • FIG. 3B A rectangle indicated by a broken line is a projection of the alignment mark in the light source receiving device, and the outer region of the projection includes four sub-regions of up, down, left, and right, and the sub-region on the left side and the sub-region on the lower side are included.
  • Part of the light sensor does not sense the light emitted by the light source emitting device, and the determined alignment direction is as indicated by the arrow in FIG. 3B, and the alignment direction is toward the light source receiving device not sensing the light source emitting device.
  • the direction of the position where the light sensor of the light is located, that is, the object to be aligned needs to be compensated left and right.
  • the processor can determine the alignment distance to be adjusted according to the correspondence between the set number of light sensors that do not sense light and the distance of the alignment.
  • the circumscribed rectangle of the alignment mark is in the left sub-area of the outer region of the projection in the light source receiving device, and the light sensor that does not sense the light emitted by the light source emitting device is four columns, and the level is determined.
  • the alignment distance of the direction is 3 column distances, and in combination with the alignment direction, the alignment distance of 3 column distances needs to be compensated to the left.
  • the light sensor that does not sense the light emitted by the light source emitting device in the lower sub-region of the second region of the light source receiving device has 5 rows, and the vertical distance is determined to be 4 rows. In combination with the alignment direction, it is necessary to compensate the offset distance of 4 line spacings downward.
  • the processor needs to consider the alignment angle of the object to be aligned, that is, whether the angular displacement of the object to be aligned has occurred. If the object to be aligned is angularly deflected, any alignment mark on the object to be aligned will have an angular deflection corresponding to it, as shown in Fig. 3C.
  • the processing method determines the alignment distance and the alignment direction in the horizontal direction and the vertical direction.
  • the light source receiving device is first placed on the alignment object. Setting a position of the light sensor that does not sense light in the light source receiving device at a standard position corresponding to any of the alignment marks; and then, according to the relative positional relationship between the two alignment marks, The light source receiving device moves to a standard position corresponding to another alignment mark to determine the position and number of light sensors in the light source receiving device that do not sense light.
  • the processor determines the compensation direction of the alignment angle according to the position of the light sensor that does not sense the light in the light source receiving device corresponding to the two alignment marks, and the specific example is as follows.
  • the processor determines a position of the light sensor that does not sense light in the light source receiving device; and the light source receiving device is located at the second alignment mark
  • the processor determines the position of the light sensor that does not sense light in the light source receiving device; the processor receives the light sensor that does not sense light according to the light source corresponding to the two alignment marks a position determining a direction in which the object to be aligned rotates relative to a standard position corresponding to the object to be aligned (ie, clockwise or counterclockwise); further, the processor determines that the compensation direction of the alignment angle is the The opposite direction of the direction in which the alignment object rotates relative to its corresponding standard position (if the direction of rotation is clockwise, the
  • the method of determining the compensation direction is different, but as long as the positions of the two alignment marks are determined, the two pairs can be determined according to the set method.
  • the position of the light sensor that does not sense the light in the light source receiving device corresponding to the bit mark determines the compensation direction of the alignment angle.
  • the method for determining the compensation direction of the alignment angle in the present embodiment is similar to the method for determining the compensation direction of the alignment angle in the first embodiment, and will not be described herein.
  • the processor determines whether the alignment of the object to be aligned is accurate according to whether each light sensor in the light receiving device senses the light emitted by the light emitting device, and if the light source receiving device appears If all the included light sensors do not sense the light (that is, abnormal conditions), it indicates that the alignment system is faulty or the alignment mark of the object to be aligned is defective. In this case, the alignment The system sends an alarm signal to prompt the staff to troubleshoot.
  • the light source receiving device includes a plurality of light sensors at the end faces of the light source receiving device facing the alignment mark.
  • the distribution on the top may also take other forms, such as the distribution shown in FIG.
  • the alignment mark on the object to be aligned is opaque, and the periphery of the alignment mark is transparent, the light source receiving device
  • the end face facing the alignment mark includes a first area M at a central position and a second area adjacent to the first area, a shape and a size of the first area M, and a shape of the alignment mark set on the object to be aligned
  • the shape of the second region N is complementary to the shape of the first region M, all the light sensors are evenly distributed in the second region N, and any two light sensors are equidistantly disposed.
  • the alignment precision is low, and the processing time is long.
  • the position and the quantity of the light sensor that does not sense the light emitted by the light source emitting device in the light source receiving device are determined respectively.
  • the corresponding alignment direction and alignment distance are operated, thereby improving the alignment accuracy and shortening the processing time.
  • Figure 5 illustrates a preferred embodiment of the alignment system of an embodiment of the present invention, but is not a limitation of the location of the various devices of the system.
  • a registration processing system in a manufacturing process of a display device includes: a light source emitting device 1, a light source receiving device 2, and a processor 3.
  • the light source emitting device 1 is located on one side of the substrate 4 for emitting light toward the substrate 1; the light source receiving device 2 is located on the other side of the substrate 4 and corresponding to the alignment mark 41 disposed on the substrate 4
  • a plurality of light sensors are disposed on the end surface of the light source receiving device 2 facing the substrate 4, each light sensor is used to sense the light emitted by the light source emitting device 1; and the processor 3 is configured to receive the light source.
  • the sensing signal transmitted by the plurality of light sensors included in the device 2 determines whether the alignment of the substrate substrate 4 is accurate according to whether the plurality of light sensors sense the light emitted by the light source emitting device 1.
  • the processor 3 determines that the alignment of the substrate substrate 4 is inaccurate; if all the light included in the light source receiving device 2 When the sensors sense the light emitted by the light source emitting device 1, the processor 3 determines that the substrate substrate 4 is aligned accurately.
  • the processor 3 can also be used to determine that the village substrate 4 needs to be adjusted according to the position and the number of the light sensors in the light source receiving device 2 that are not inductive when determining the inaccuracy of the alignment of the substrate 4
  • the alignment direction and the alignment distance includes a horizontal distance and a vertical distance.
  • the alignment accuracy of the village substrate 4 is very high. Therefore, it is necessary to consider whether the substrate substrate 4 has a rotation, and the processor 3 determines whether the substrate substrate 4 has rotated. In order to include the following two methods.
  • the processor 3 determines the substrate of the substrate based on the position of the light sensor that does not sense light in the light source receiving device 2 corresponding to the two alignment marks. 4 Whether it produces rotation. Specific examples are as follows. If the positions of the light sensors in the light source receiving device 2 corresponding to the two alignment marks are not the same, the processor 3 determines that the substrate substrate 4 does not rotate; if the two alignment marks correspond to the light source receiving device The position of the light sensor in which the light is not sensed in 2 is different, and the processor 3 determines that the substrate 4 is rotated.
  • the processor 3 For at least two alignment marks provided on the substrate 4, the processor 3 respectively determines the maximum horizontal distance and the maximum vertical distance corresponding to each of the alignment marks, and according to the maximum corresponding to the two alignment marks The horizontal distance and the maximum vertical distance determine whether or not the substrate substrate 4 is rotated. Specific examples are as follows. If the maximum horizontal distances corresponding to the two alignment marks are equal, and the maximum vertical distances corresponding to the two alignment marks are equal, the processor 3 determines that the village substrate 4 does not rotate; if the maximum level corresponding to the two alignment marks The distance between the distances, or the maximum vertical distance corresponding to the two alignment marks, is different, and the processor 3 determines that the village substrate 4 has rotated.
  • the process of the processor 3 performing the alignment processing is as follows: The difference between the maximum horizontal distance of the two alignment marks by the processor 3 and the maximum vertical of the two alignment marks The difference between the distances determines the alignment angle; and the processor 3 determines the compensation direction of the alignment angle according to the position of the light sensor that does not sense the light in the light source receiving device 2 corresponding to the two alignment marks; After the substrate substrate 4 is compensated according to the alignment angle and the compensation direction, the processor 3 determines the position and the number of the light sensors that do not sense the light in the light source receiving device 2 for any of the alignment marks. The substrate substrate 4 needs to be adjusted in the alignment direction and the alignment distance.
  • the end surface of the light source receiving device 2 facing the alignment mark 41 includes a first area at the center position and a second region adjacent to the first region, the shape and size of the first region being the same as the shape and size of the alignment mark 41, wherein the second region is respectively disposed in a sub-region of the periphery of the rectangular region where the first region is located.
  • the light sensor is evenly distributed in the second area, and any two light sensors are equidistantly disposed.
  • the processor 3 determines the alignment direction and the alignment distance that the village substrate 4 needs to adjust according to the position and the number of the light sensors that do not sense the light in the light source receiving device 2.
  • the alignment direction determined by the processor 3 is not sensed in the receiving device 2 facing away from the light source.
  • the central position of the first area is provided with a central light receiving device, and accordingly, the processor 3 can be used, for example, in the following case. If all the light sensors included in the light source receiving device 2 sense the light emitted by the light source emitting device 1, and the central light receiving device included in the light source receiving device 2 does not sense the light emitted by the light source emitting device 1, the bottom of the substrate is determined. The substrate 4 is aligned accurately; if all the light sensors included in the light source receiving device 2 sense the light emitted by the light source emitting device 1, and the central light receiving device included in the light source receiving device 2 senses the light emitted from the light source emitting device 1. Light, to determine the alignment of the base substrate 4 is not accurate.
  • the end surface of the light source receiving device 2 facing the alignment mark 41 includes the central position, and all the light sensors are uniform. Distributed in the first area, and any two light sensors are equidistantly set.
  • the processor 3 determines the position and number of light sensors that do not sense light in the outer region of the projection of the light source receiving device 2 according to the circumscribed rectangle of the alignment mark 41, and respectively determines the village substrate 4 The alignment and alignment distances that need to be adjusted.
  • the alignment direction determined by the processor 3 is a direction toward a position where the light sensor of the light source receiving device 2 that does not sense the light emitted by the light source emitting device 1 is located.
  • the alignment mark is a cross-shaped alignment mark.
  • an alignment mark is respectively disposed in the two corner regions of the substrate substrate 4 at diagonal positions.
  • the specific example of the first mode may be: According to the determined alignment angle and the alignment direction corresponding to the alignment angle, the village substrate 4 is rotated; and the object to be aligned is moved according to the determined alignment direction and the alignment distance, and the village is adjusted to make the village
  • the alignment marks on the base substrate 4 are located at their corresponding standard positions.
  • the specific example of the second mode may be: first rotating the village substrate 4 according to the determined alignment angle and the alignment direction corresponding to the alignment angle; The alignment direction and the alignment distance compensate for the operation required for the village substrate 4 this time.

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Abstract

一种对位系统，包括：光源发射装置（1），位于待对位对象（4）的一侧，用于朝向待对位对象（4）发射光线；光源接收装置（2），位于待对位对象（4）的另一侧且位于待对位对象（4）上设置的对位标记（41）对应的标准位置上，光源接收装置（2）中朝向待对位对象（4）的端面上设置有多个用于感应光源发射装置（1）发射出的光线的光感应器；处理器（3），用于接收每个光感应器传输的感应信号，并根据每个光感应器是否感应到光源发射装置（1）发射出的光线，判断待对位对象（4）对位是否准确，从而缩短了处理时间，提高了处理效率。

Description

对位系统 技术领域
本发明的实施例涉及一种对位系统。 背景技术
薄膜晶体管液晶显示器（TFT-LCD )具有体积小、 功耗低、 无辐射等优 点， 在当前的平板显示器市场中占据了主导地位， 广泛应用于台式电脑、 笔 记本电脑、 个人数字助理 ( Personal Digital Assistant, PDA ) 、 手机、 电视、 监视器等领域。 TFT-LCD制造过程大致可以分为以下三个阶段：
一、 Array工艺 （阵列工艺）
在一张玻璃 ( Glass )基板上经过多次掩膜工艺， 形成独立的 TFT像素阵 列电路，每个像素阵列区对应一个液晶显示屏（ Panel ) ,以形成阵列基板（ TFT 基板） 。
二、 Cell工艺 （对盒工艺）
在 TFT基板上滴加液晶， 并覆盖彩色滤光片， 从而拼合成 LCD面板， 对该 LCD面板进行切割处理， 从而形成独立的液晶显示屏。
三、 Module工艺 （模组工艺）
为每个液晶显示屏安装背光源， 光学膜片以及周边电路等， 从而形成完 整的 TFT-LCD显示模组。
在玻璃基板进入阵列工艺时， 以底栅型 TFT-LCD为例， 第一道制作工 序一般是制作栅极和栅线。 第一道制作工序还同时在玻璃基板的边角上制作 对位标记（Alignment Mark ) , 该对位标记一般制作成十字形状， 且采用金 属薄膜制作， 因此， 该对位标记不透光。 阵列基板上的对位标记在上述三个 制作阶段中的作用至关重要。 由于每道制作工序中， 一般都需要将玻璃基板 夹持到该工序对应的设备上（如溅射设备、 PECVD( Plasma Enhanced Chemical Vapor Deposition, 等离子体增强化学气相沉积）设备、 曝光设备、 涂胶显影 ( Track )机（即光刻工序中除曝光设备之外的其他设备）等）， 以实现对该 玻璃基板进行相应操作， 如成膜操作、 曝光操作、 刻蚀操作等。 但是， 由于 各设备的夹持构件在夹持玻璃基板时， 有可能会使玻璃基板偏离其标准位置 (即夹持构件无误差的理想状态下该玻璃基板应在的位置） ， 因此在对玻璃 基板进行相应的操作之前， 都要对玻璃基板进行对位， 以确认玻璃基板对位 是否良好。
目前采用的对玻璃基板上的对位标记进行对位的方式为： 预先保存玻璃 基板在标准位置时， 该玻璃基板上的对位标记的标准照片； 在制作过程中， 若需要进行对位， 则将拍摄到的该玻璃基板上的对位标记的当前照片与预先 保存的标准照片进行对比。 如果对比结果是相同， 则说明该玻璃基板对位准 确， 并对该玻璃基板进行相应操作； 如果不相同， 则说明该玻璃基板的对位 不准确。
综上所述， 现有液晶显示装置的制作过程中所采用的对位处理方式， 处 理时间长， 且处理效率低。 发明内容
本发明的实施例提供了一种对位系统， 用于解决现有的对位处理方式存 在的处理时间长， 且处理效率低的问题。
本发明的实施例提供了一种对位系统， 该对位系统包括光源发射装置、 光源接收装置及处理器； 光源发射装置位于待对位对象的一侧， 且朝向所述 待对位对象发射光线； 光源接收装置位于所述待对位对象的另一侧且位于所 述待对位对象上设置的对位标记对应的标准位置上， 所述光源接收装置中朝 向所述待对位对象的端面上设置有多个用于感应所述光线的光感应器； 处理 器接收每个所述光感应器传输的感应信号， 并根据所述光感应器是否感应到 所述光线， 判断所述待对位对象对位是否准确。
例如， 处理器判断所述待对位对象对位是否准确包括： 若所述光源接收 装置包含的至少一个光感应器未感应到所述光源发射装置发射出的光线， 则 所述处理器确定所述待对位对象对位不准确； 若所述光源接收装置包含的所 有光感应器均感应到所述光源发射装置发射出的光线， 则所述处理器确定所 述待对位对象对位准确。
进一步， 例如， 在确定所述待对位对象对位不准确时， 所述处理器还根 据所述光源接收装置中未感应到所述光线的光感应器的位置和数量， 分别确 定出所述待对位对象需要调节的对位方向和对位距离， 其中， 所述对位距离 包括水平距离和垂直距离。
进一步， 例如， 针对所述待对位对象上设置的至少两个所述对位标记， 所述处理器根据两个所述对位标记对应的所述光源接收装置中未感应到所述 光线的光感应器的位置， 判断所述待对位对象是否产生转动； 或者， 针对所 述待对位对象上设置的至少两个所述对位标记， 所述处理器分别确定出每个 所述对位标记对应的最大水平距离和最大垂直距离， 并根据两个所述对位标 记对应的最大水平距离和最大垂直距离，判断所述待对位对象是否产生转动。
进一步， 例如， 在确定所述待对位对象产生了转动之后， 所述处理器根 据两个所述对位标记的最大水平距离的差值以及两个所述对位标记的最大垂 直距离的差值， 确定出所述对位角度； 且， 所述处理器根据两个所述对位标 记对应的所述光源接收装置中未感应到所述光线的光感应器的位置， 确定出 所述对位角度的补偿方向； 在根据所述对位角度及所述补偿方向对所述待对 位对象进行补偿后， 针对任一所述对位标记， 所述处理器根据所述光源接收 装置中未感应到所述光线的光感应器的位置和数量， 分别确定出所述待对位 对象需要调节的对位方向和对位距离。
例如， 若所述对位标记不透明， 且所述对位标记的周边透明， 则所述光 源接收装置中朝向所述对位标记的端面包括位于中心位置的第一区域以及与 所述第一区域邻接的第二区域， 所述第一区域的形状及尺寸与所述对位标记 的形状及尺寸相同； 其中， 所述第二区域由分别设置于所述第一区域所在的 矩形区域的四周的子区域构成， 所有所述光感应器均匀分布于所述第二区域 内， 且任意两个所述光感应器等距离设置。
例如， 所述第一区域的中心位置设置有中心光接收器件， 若所述光源接 收装置包含的所有光感应器均感应到所述光线， 且该光源接收装置包含的中 心光接收器件未感应到所述光线，所述处理器确定所述待对位对象对位准确； 若所述光源接收装置包含的所有光感应器均感应到所述光线， 且该光源接收 装置包含的中心光接收器件感应到所述光线， 所述处理器确定所述待对位对 象对位不准确。
在该实现方式下， 处理器 ^据所述光源接收装置中未感应到所述光线的 光感应器的位置， 确定出所述待对位对象的对位方向为背离所述光源接收装 置中未感应到所述光源发射装置发射出的光线的光感应器所在位置的方向。 又例如， 若所述对位标记透明， 且所述对位标记的周边不透明， 则所述 光源接收装置中朝向所述对位标记的端面包括位于中心位置的第一区域， 所 述第一区域的形状及尺寸与所述对位标记的形状及尺寸相同； 其中， 所有所 述光感应器均勾分布于所述第一区域内， 且任意两个所述光感应器等距离设 置。
在该实现方式下， 所述处理器根据所述对位标记的外接矩形在所述光源 接收装置中的投影的外侧区域中未感应到光线的光感应器的位置和数量， 分 别确定出所述待对位对象需要调节的对位方向和对位距离， 其中， 所述对位 距离包括水平距离和垂直距离。
例如， 处理器确定出所述待对位对象的对位方向为朝向所述光源接收装 置中未感应到所述光源发射装置发射出的光线的光感应器所在位置的方向。
例如， 所述对位系统应用于显示装置制作过程中， 且所述待对位对象为 村底基板， 所述村底基板的至少一个边角区域内设置有所述对位标记。 附图说明
为了更清楚地说明本发明实施例的技术方案， 下面将对实施例的附图作 筒单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例， 而非对本发明的限制。
图 1为本发明实施例提供的一种对位系统的结构示意图；
图 2A为本发明实施例提供的实施方式一中多个光感应器的分布示意图； 图 2B为本发明实施例提供的实施方式一中对位标记与光源接收装置的 一种相对位置示意图；
图 2C为本发明实施例提供的实施方式一中对位标记与光源接收装置的 另一种相对位置示意图；
图 2D为本发明实施例提供的实施方式一中两个对位标记在待对位对象 上的第一种位置示意图；
图 2E为本发明实施例提供的实施方式一中两个对位标记在待对位对象 上的第二种位置示意图；
图 2F为本发明实施例提供的实施方式一中两个对位标记在待对位对象 上的第三种位置示意图；
图 2G为本发明实施例提供的实施方式一中光源接收装置的光感应器所 在的端面的又一优选结构示意图；
图 3A为本发明实施例提供的实施方式二中多个光感应器的分布示意图； 图 3B为本发明实施例提供的实施方式二中对位标记与光源接收装置的 一种相对位置示意图；
图 3C为本发明实施例提供的实施方式二中对位标记与光源接收装置的 另一种相对位置示意图；
图 4为本发明实施例提供的再一种多个光感应器的分布示意图； 图 5为本发明实施例提供的对位系统应用于显示装置制作过程中的优选 结构示意图。 具体实施方式
为使本发明实施例的目的、 技术方案和优点更加清楚， 下面将结合本发 明实施例的附图，对本发明实施例的技术方案进行清楚、 完整地描述。显然， 所描述的实施例是本发明的一部分实施例， 而不是全部的实施例。 基于所描 述的本发明的实施例， 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例， 都属于本发明保护的范围。
本发明的一个实施例通过光源接收装置包含的光感应器是否感应到光源 发射装置发射出的光线， 就能判断出待对位对象对位是否准确， 从而缩短了 对位处理的时间， 提高了对位处理的效率。
参见图 1所示， 本发明的实施例提供了一种对位系统， 该系统包括： 光 源发射装置 1、 光源接收装置 2及处理器 3。
在对待对位对象进行对位处理时， 光源发射装置 1位于待对位对象的一 侧， 且朝向该待对位对象发射光线； 光源接收装置 2位于待对位对象的另一 侧且位于该待对位对象上设置的对位标记对应的标准位置上， 光源接收装置 2中朝向该待对位对象的端面上设置有多个用于感应光源发射装置 1发射出 的光线的光感应器； 处理器 3接收每个光感应器传输的感应信号， 并根据每 个光感应器是否感应到光源发射装置 1发射出的光线， 判断该待对位对象对 位是否准确。 例如， 针对光源接收装置中的任一光感应器， 若该光感应器感应到光源 发射装置发射出的光线（即该光感应器接收到光源发射装置发射出的光线）， 则该光感应器向处理器传输用于表示自身感应到了该光源发射装置发射出的 光线的感应信号； 若该光感应器未感应到光源发射装置发射出的光线（即该 光感应器未接收到光源发射装置发射出的光线） ， 则该光感应器向处理器传 输用于表示自身未感应到该光源发射装置发射出的光线的感应信号。
本发明实施例中， 待对位对象对应的标准位置（也可以称为理想位置） 是指， 在设备的夹持构件无误差的理想状态下， 该待对位对象被夹持时所在 的位置。 进一步， 待对位对象上的对位标记对应的标准位置（也可以称为理 想位置）是指， 该待对位对象位于标准位置时， 该待对位对象上的对位标记 所在的位置。 但是， 由于设备的夹持构件进行的每一次夹持动作之间一般都 会存在细微的误差 （一般为微米级的误差） ， 这种差别在制作工艺中也是不 能容忍的， 需要通过对对位标记进行对位， 进一步消除该待对位对象所处位 置与标准位置（即理想位置）之间的差异， 确保使用本设备对待对位对象进 行制作得到的图案与该待对位对象的前一次制作工艺形成的图案能够匹配。
本发明实施例中， 在对该待对位对象进行对位处理时， 位于该待对位对 象的一侧的光源发射装置朝向该待对位对象发射光线， 而位于该待对位对象 的另一侧且位于该待对位对象上设置的对位标记对应的标准位置上的光源接 收装置， 感应该光源发射装置发射出的光线； 根据该光源接收装置包含的光 感应器是否感应到该光源发射装置发射出的光线， 来判断该待对位对象对位 是否准确。 由于本发明实施例通过光源接收装置包含的光感应器是否感应到 光源发射装置发射出的光线， 就能判断出待对位对象对位是否准确， 从而缩 短了对位处理的时间， 提高了对位处理的效率。
需要说明的是， 本发明实施例中， 光源发射装置与光源接收装置分别设 置于该待对位对象的两侧， 光源发射装置可以设置于待对位对象的一侧的任 意位置； 由于需要根据光源接收装置包含的光感应器是否感应到该光线来判 断该待对位对象对位是否准确， 因此， 光源接收装置需要设置于该待对位对 象的另一侧且位于该待对位对象上设置的对位标记对应的标准位置上。
优选的， 光源发射装置可以与光源接收装置分别位于该待对位对象的两 侧， 且该光源发射装置的位置与该光源接收装置的位置相对应， 即该光源发 射装置与该光源接收装置分别设置于该待对位对象的对位标记的两侧。
进一步， 若待对位对象上设置有至少两个对位标记， 则本发明实施例光 源接收装置还可以根据需要从一个对位标记对应的标准位置上移动到另一个 对位标记对应的标准位置上， 以便于基于不同的对位标记进行该待对位对象 的对位处理。
需要说明的是， 本发明实施例中， 不对对位标记的形状进行限定， 对位 标记可以为任意形状， 如十字形、 三角形、 圓形、 多边形等等；
本发明实施例中， 不对光感应器的种类进行限定， 凡是能够感应光源发 以根据待对位对象的对位精度(如微米级对位精度、或毫米级对位精度等等）， 选择光感应器的类型 （例如， 选择电荷耦合元件（Charge-coupled Device, CCD )作为光感应器） 、 尺寸、 分辨率等参数信息， 以及确定多个光感应器 在该光源发射装置分布时任意相邻两个光感应器的间距。
在实施中， 处理器判断待对位对象对位是否准确， 可以包括以下两种情 况：
( 1 )若光源接收装置包含的至少一个光感应器未感应到光源发射装置发 射出的光线， 则该处理器确定该待对位对象对位不准确；
( 2 )若光源接收装置包含的所有光感应器均感应到光源发射装置发射出 的光线， 则该处理器确定该待对位对象对位准确。
进一步， 在处理器确定该待对位对象对位不准确时， 该处理器还根据光 源接收装置中未感应到光线的光感应器的位置和数量， 分别确定出该待对位 对象需要调节的对位方向和对位距离。该对位距离包括水平距离和垂直距离。
例如， 处理器还可以根据光源接收装置中未感应到光线的光感应器的位 置和数量， 确定出该待对位对象在水平方向上（向左或向右）需要移动多大 距离， 和 /或， 在垂直方向上（向上或向下）需要移动多大距离， 以使该待对 位对象能够位于其对应的标准位置上。
本发明实施例中， 在进行对位处理时， 待对位对象有可能出现偏转， 即与 其对应的标准位置存在一定的转角， 该转角的角度值一般较小 （一般在 1。 以 内） ， 此时可以有如下处理。
( 1 )若仅需要检测待对位对象的对位是否准确，则可以通过在该待对位 对象上仅设置一个对位标记， 即可判断出该对位对象是否对位准确。
( 2 )若需要确定出该待对位对象需要在水平方向和垂直方向上调节的距 离， 且该待对位对象与其对应的标准位置之间不存在转角或者对该待对位对 象的转角参数的精度要求较低（即可忽略该待对位对象的转角参数） ， 则可 以通过在该待对位对象上设置一个对位标记， 进行对位处理。 例如， 在判断 出该对位对象对位不准确时， 根据该根据光源接收装置中未感应到光线的光 感应器的位置和数量， 分别确定出该待对位对象需要调节的对位方向和对位 距离。
( 3 )若既需要考虑该待对位对象是否产生了转动，又需要考虑该待对位 对象在水平方向和垂直方向上的偏移， 则处理器需要先确定该对位对象是否 产生了转动； 然后， 在确定产生了转动后， 该处理器确定对位角度（即该对 位对象转动的角度）及补偿方向 （朝向与该对位对象转动的方向相反的方向 进行补偿）； 接着， 在根据该对位角度及补偿方向对该对位对象进行补偿后， 该处理器再确定其需要在水平方向上调节的距离 （即水平方向上向左或向右 移动多大距离）和垂直方向上调节的距离 （即垂直方向上向上或向下移动多 大距离） 。
在实施中， 处理器确定该对位对象是否产生了转动， 例如包括以下两种 方法：
(方法 1 )针对该待对位对象上设置的至少两个对位标记， 处理器根据 两个对位标记对应的光源接收装置中未感应到光线的光感应器的位置， 判断 该待对位对象是否产生转动。 例如， 若两个对位标记对应的光源接收装置中 未感应到光线的光感应器的位置相同， 则处理器确定该待对位对象未产生转 动； 若两个对位标记对应的光源接收装置中未感应到光线的光感应器的位置 不同， 则处理器确定该待对位对象产生了转动。
(方法 2 )针对该待对位对象上设置的至少两个对位标记， 处理器分别 确定出每个对位标记对应的最大水平距离和最大垂直距离， 并根据两个对位 标记对应的最大水平距离和最大垂直距离，判断该待对位对象是否产生转动。 例如， 若两个对位标记对应的最大水平距离相等， 且两个对位标记对应的最 大垂直距离相等， 则处理器确定该待对位对象未产生转动； 若两个对位标记 对应的最大水平距离不等， 或两个对位标记对应的最大垂直距离不等， 则处 理器确定该待对位对象产生了转动。
在实施中， 处理器进行对位处理具体示例包括如下情形。
针对该待对位对象上设置的至少两个对位标记， 处理器根据该两个对位 标记的最大水平距离的差值以及该两个对位标记的最大垂直距离的差值， 确 定出对位角度； 且， 该处理器根据两个对位标记对应的光源接收装置中未感 应到光线的光感应器的位置， 确定出该对位角度的补偿方向 （即顺时针补偿 或逆时针补偿） ； 在根据对位角度以及其补偿方向对该待对位对象进行补偿 后， 针对任一对位标记， 该处理器根据光源接收装置中未感应到光线的光感 应器的位置和数量， 分别确定出该待对位对象需要调节的对位方向和对位距 离。
例如， 处理器按照公式一确定出该待对位对象的对位角度：
Δν 公式一；
其中， 为该待对位对象的对位角度， AH为两个对位标记的最大水平距 离的差值， 为两个对位标记的最大垂直距离的差值。
在实施中， 根据确定出的对位角度对该待对位对象进行补偿， 具体示例 包括： 根据确定出的对位角度及其补偿方向， 调节该待对位对象（即顺时针 或逆时针转动该待对位对象） ， 以使该待对位对象当前所在位置与其标准位 置之间的不存在角度偏差或使该角度偏差在允许的误差范围内。
作为一种优选应用场景， 本发明实施例提供的对位系统可以应用于显示 装置制作过程中， 此时， 该待对位对象为衬底基板， 该衬底基板的至少一个 边角区域内设置有对位标记。 当然， 本发明实施例提供的对位系统也可以应 用于其他需要进行对位处理的场景下。
若本发明实施例的对位系统可以应用于显示装置制作过程中， 作为一种 优选实现方式， 该衬底基板上设置的对位标记为十字形对位标记。 当然， 该 对位标记也可以为其他形状， 如三角形、 圓形、 矩形、 多边形等等。
在实施中， 本发明实施例的光源接收装置可以包含多个光感应器（Light Sensor ) , 该多个光感应器在该光源接收装置的朝向该对位标记的端面上的 分布与该待对位对象上的对位标记是否透光以及对位标记的形状有关， 包括 以下两种优选实施方式： 实施方式一： 若该待对位对象上的对位标记不透明， 且该对位标记的周 边透明， 该光源接收装置中朝向对位标记的端面包括位于中心位置的第一区 域以及与该第一区域邻接的第二区域。 该第一区域的形状及尺寸与待对位对 象上设置的对位标记的形状及尺寸相同， 该第二区域由分别设置于该第一区 域所在的矩形区域的四周的子区域构成， 所有光感应器均勾分布于该第二区 域内， 且任意两个光感应器等距离设置。
举例说明， 以对位标记的形状为十字形为例， 其他形状的对位标记与其 类似， 此处不再——举例说明。 该光源接收装置中朝向对位标记的端面中的 第一区域 M及第二区域 N的结构参见图 2A所示， 图 2A中，第一区域 M的 形状及尺寸与待对位对象上设置的对位标记的形状及尺寸相同， 第二区域 N 由分别设置于该第一区域 M所在的矩形区域的四周的子区域构成，所有光感 应器均匀分布于该第二区域 N内， 且任意两个光感应器等距离设置。
该方式下， 若光源接收装置包含的至少一个光感应器未感应到光源发射 装置发射出的光线， 则处理器确定待对位对象对位不准确； 若光源接收装置 包含的所有光感应器均感应到光源发射装置发射出的光线， 则该处理器确定 待对位对象对位准确。
该方式下， 若处理器确定该待对位对象对位不准确时， 该处理器根据不 同应用场景， 按照对应的处理方式确定出该待对位对象需要调节的方向和位 置：
第一种应用场景。 此时， 在进行对位处理时， 处理器仅需要考虑该待对 位对象在水平方向和垂直方向发生的偏移。
在该应用场景下， 进行对位处理时， 该待对位对象上可以仅包含一个对 位标记， 光源发射装置位于该对位标记的一侧， 朝向该对位标记发射光线， 光源接收装置位于该对位标记的另一侧且位于该对位标记对应的标准位置 上， 该处理器根据光源接收装置中未感应到光源发射装置发射出的光线的光 感应器的位置和数量， 分别确定出该待对位对象需要调节的对位方向和对位 距离。 该对位距离包括水平距离和垂直距离。
在实施中， 该处理器根据光源接收装置中未感应到光线的光感应器的位 置和数量， 确定出的该待对位对象需要调节的对位方向为背离该光源接收装 置中未感应到光源发射装置发射出的光线的光感应器所在的位置的方向。 例如， 在水平方向上， 若左侧区域的光感应器未感应到光源发射装置发 射出的光线， 则确定的对位方向为向右， 即需要向右调节该待对位对象； 若 右侧区域的光感应器未感应到光源发射装置发射出的光线， 则确定的对位方 向为向左， 即需要向左调节该待对位对象；
在垂直方向上， 若上侧区域的光感应器未感应到光源发射装置发射出的 光线， 则确定的对位方向为向下， 即需要向下调节该待对位对象； 若下侧区 域的光感应器未感应到光源发射装置发射出的光线， 则确定的对位方向为向 上， 即需要向上调节该待对位对象。
在实施中， 该处理器根据设定的未感应到光线的光感应器的数量与对位 距离之间的对应关系， 确定出该待对位对象需要调节的对位距离；
具体的， 该对应关系可以是该第二区域的任一子区域内未感应到光线的 光感应器的总数量与对位距离之间的对应关系； 该对应关系也可以是该第二 区域的任一子区域内未感应到光线的光感应器所占的行数（或列数）与对位 距离之间的对应关系。 例如， 该第二区域中左侧子区域内未感应到光线的光 感应器占三列， 则对应的对位距离为两个列距， 又如， 该第二区域中上侧子 区域内未感应到光线的光感应器占两行， 则对应的对位距离为一个行距。
在实施中， 例如， 该对应关系是该第二区域的任一子区域内未感应到光 线的光感应器所占的行数 M (或列数 N )与对位距离之间的对应关系，其中， 确定出的对位距离为 M-1个行距（或 N-1个列距） 。
举例说明， 若当前待对位对象上的对位标记与该光源接收装置的相对位 置如图 2B所示， 该光源接收装置的第二区域中的左侧子区域内包含的部分 光感应器未感应到光源发射装置发射出的光线以及下侧子区域内包含的部分 光感应器未感应到光源发射装置发射出的光线，则确定出的对位方向如图 2B 中箭头所示， 且该对位方向为背离该光源接收装置中未感应到光源发射装置 发射出的光线的光感应器所在的位置的方向， 即需要向右及向上补偿该待对 位对象， 以使该待对位对象能够处于其对应的标准位置上。
在实施中， 处理器可以根据设定的未感应到光线的光感应器的数量与对 位距离之间的对应关系， 确定出需要调节的对位距离。 图 2B 中， 假设该光 源接收装置的第二区域中的左侧子区域内未感应到光源发射装置发射出的光 线的光感应器为 7列， 确定出水平方向的对位距离为 6个列距， 结合对位方 向， 需要向右补偿 6个列距的对位距离； 图 2B中， 假设该光源接收装置的 第二区域中的下侧子区域内未感应到光源发射装置发射出的光线的光感应器 为 5行， 确定出垂直方向的对位距离为 4个行距， 结合对位方向， 需要向上 补偿 4个行距的对位距离。
第二种应用场景。 此时， 在进行对位处理时， 处理器需要考虑该待对位 对象的对位角度， 即需要考虑该待对位对象是否发生了角度偏转。 若该待对 位对象发生了角度偏转， 则该待对位对象上的任一对位标记也会相应存在角 度偏转， 如图 2C所示。
在该应用场景下， 进行对位处理时， 根据该对位对象上设置的至少两个 对位标记， 采用上述方法 1或方法 2, 确定出该待对位对象是否产生了转动， 若产生了转动， 进一步确定出相应的对位角度以及补偿方向。 在根据该对位 角度以及其补偿方向对该待对位对象进行补偿后， 再根据本实施例的第一种 应用场景下的处理方式确定出水平方向上和垂直方向上的对位距离和对位方 向。
例如， 在进行对位处理过程中， 先将光源接收装置放置于该对位对象上 设置的任一对位标记对应的标准位置上， 确定出该光源接收装置中未感应到 光线的光感应器的位置和数量； 然后， 根据两个对位标记之间的相对位置关 系， 将该光源接收装置移至另一个对位标记对应的标准位置上， 确定出该光 源接收装置中未感应到光线的光感应器的位置和数量。
在实施中， 该处理器根据两个对位标记对应的光源接收装置中未感应到 光线的光感应器的位置， 确定出该对位角度的补偿方向。 例如， 在光源接收 装置位于第一个对位标记对应的标准位置时， 该处理器确定出该光源接收装 置中未感应到光线的光感应器的位置； 在该光源接收装置位于第二个对位标 记对应的标准位置时， 该处理器确定出该光源接收装置中未感应到光线的光 感应器的位置； 该处理器 ^据两个对位标记对应的光源接收装置中未感应到 光线的光感应器的位置， 确定出该待对位对象相对于该待对位对象对应的标 准位置转动的方向 （即顺时针或逆时针） 。 进一步， 该处理器确定出该对位 角度的补偿方向为该待对位对象相对于其对应的标准位置转动的方向的反方 向 （若转动的方向为顺时针， 则该补偿方向为逆时针； 若转动的方向为逆时 针， 则该补偿方向为顺时针） 。 需要说明的是， 由于两个对位标记设置的位置不同， 确定补偿方向的方 法也不同， 但只要确定了两个对位标记设置的位置， 即可按照设定的方法。 根据该两个对位标记对应的光源接收装置中未感应到光线的光感应器的位 置， 确定出对位角度的补偿方向。
例如， 4 设两个对位标记分别位于该待对位对象的对角位置上。 例如， 一个对位标记设置于右上角， 另一个对位标记设置于左下角， 参见图 2D所 示， 则处理器确定对位角度的补偿方向具体示例如下。 若处理器根据位于右 上角的对位标记确定出的光源接收装置中左侧子区域（和 /或上侧子区域）中 包含未感应到光线的光感应器， 且该处理器根据位于左下角的对位标记确定 出的光源接收装置中右侧子区域（和 /或下侧子区域）中包含未感应到光线的 光感应器， 则该处理器确定出该待对位对象转动的方向为逆时针， 进一步， 该处理器确定出的补偿方向为顺时针。 若处理器根据位于右上角的对位标记 确定出的光源接收装置中右侧子区域（和 /或下侧子区域）中包含未感应到光 线的光感应器， 且该处理器根据位于左下角的对位标记确定出的光源接收装 置中左侧子区域（和 /或上侧子区域）中包含未感应到光线的光感应器， 则该 处理器确定出该待对位对象转动的方向为顺时针， 进一步， 该处理器确定出 的补偿方向为逆时针。
又如， 假设两个对位标记分别位于该待对位对象的上侧的两个边缘区域 上。 例如， 一个对位标记设置于左上角， 另一个对位标记设置于右上角， 参 见图 2E所示， 则处理器确定对位角度的补偿方向具体示例如下所述。 若处 理器根据位于左上角的对位标记确定出的光源接收装置中下侧子区域中包含 未感应到光线的光感应器， 且该处理器根据位于右上角的对位标记确定出的 光源接收装置中上侧子区域中包含未感应到光线的光感应器， 则该处理器确 定出该待对位对象转动的方向为逆时针， 进一步， 该处理器确定出的补偿方 向为顺时针； 若处理器根据位于左上角的对位标记确定出的光源接收装置中 上侧子区域中包含未感应到光线的光感应器， 且该处理器根据位于右上角的 对位标记确定出的光源接收装置中下侧子区域中包含未感应到光线的光感应 器， 则该处理器确定出该待对位对象转动的方向为顺时针， 进一步， 该处理 器确定出的补偿方向为逆时针。
再如， 假设两个对位标记分别位于该待对位对象的右侧的两个边缘区域 上。 例如， 一个对位标记设置于右上角， 另一个对位标记设置于右下角， 参 见图 2F所示， 则处理器确定对位角度的补偿方向具体示例如下所述。 若处 理器根据位于右上角的对位标记确定出的光源接收装置中左侧子区域中包含 未感应到光线的光感应器， 且该处理器根据位于右下角的对位标记确定出的 光源接收装置中右侧子区域中包含未感应到光线的光感应器， 则该处理器确 定出该待对位对象转动的方向为逆时针， 进一步， 该处理器确定出的补偿方 向为顺时针； 若处理器根据位于右上角的对位标记确定出的光源接收装置中 右侧子区域中包含未感应到光线的光感应器， 且该处理器根据位于右下角的 对位标记确定出的光源接收装置中左侧子区域中包含未感应到光线的光感应 器， 则该处理器确定出该待对位对象转动的方向为顺时针， 进一步， 该处理 器确定出的补偿方向为逆时针。
当然， 两个对位标记还可以设置于该待对位对象的其他位置， 如一个对 位标记设置于左上角且另一个设置于右下角， 又如， 一个对位标记设置于左 上角且另一个设置于左下角， 等等， 该处理器均可以根据两个对位标记对应 的光源接收装置中未感应到光线的光感应器的位置， 确定出该待对位对象的 对位角度的补偿方向， 此处不再一一列举。
本实施例中， 优选的， 参见图 2G所示， 该第一区域 M的中心位置设置 有中心光接收器件 21。
相应的，处理器在判断该待对位对象对位是否准确时，可执行如下步骤： 若光源接收装置包含的所有光感应器均感应到光源发射装置发射出的光线， 且该光源接收装置包含的中心光接收器件未感应到光源发射装置发射出的光 线， 则确定该待对位对象对位准确； 若光源接收装置包含的所有光感应器均 感应到光源发射装置发射出的光线， 且该光源接收装置包含的中心光接收器 件感应到光源发射装置发射出的光线， 则确定该待对位对象对位不准确。
本发明实施例中， 通过在光源接收装置的朝向待对位对象的端面的中心 位置设置一个中心光接收器件， 从而避免了待对位对象发生较大的偏移（如 当前该待对位对象的对位标记已完全偏离出该光源接收装置 ) 时造成误判。
本实施例中， 进一步， 在对该待对位对象进行补偿时， 包括以下几种补 偿方式：
(方式一）根据确定出的对位方向和对位距离移动该待对位对象， 以进 行补偿， 经调节后使该待对位对象上的对位标记位于其对应的标准位置上。
(方式二 )根据确定出的对位方向和对位距离， 对本次需要对该待对位 对象进行的操作进行补偿。
若该待对位对象存在角度偏转， 则上述方式一的具体示例如下所述。 先 根据确定出的对位角度及其补偿方向， 转动该待对位对象； 再根据确定出的 对位方向和对位距离移动该待对位对象， 经调节后使该待对位对象上的对位 标记位于其对应的标准位置上。
若该待对位对象存在角度偏转， 则上述方式二的具体示例如下所述。 先 根据确定出的对位角度及其补偿方向， 转动该待对位对象； 再根据确定出的 对位方向和对位距离， 对本次需要对该待对位对象进行的操作进行补偿。
以该对位系统应用于显示装置制作过程中， 且该待对位对象为村底基板 为例， 假设本次操作为在村底基板上制作有源层的工序为例， 在进行处理之 前， 先通过本发明实施例的对位系统对村底基板进行对位处理。 若处理器确 定出该村底基板对位不准确， 则根据光源接收装置中未感应到光线的光感应 器的位置和数量， 分别确定本次操作需要调节的对位方向和对位距离， 并在 制作有源层的工序中 （掩膜、 曝光、 显影、 刻蚀等工艺）进行补偿。 即根据 确定出的对位方向和对位距离移动掩膜板（mask ) , 以避免本工序中制作出 的有源层与已制作的栅极、 栅线等结构之间发生偏移现象， 从而保证了有源 层与已制作的栅极、 栅线等结构之间的相对位置关系。
需要说明的是， 本实施方式中， 处理器根据光接收装置中每个光感应器 是否感应到光发射装置发射出的光线， 判断待对位对象对位是否准确时， 若 出现该光源接收装置包含的所有光感应器均未感应到光线的情况（即非正常 状况） ， 则说明该对位系统出现故障或该待对位对象的对位标记的制作出现 问题， 该情况下， 该对位系统发出报警信号， 以提示工作人员排除故障。
实施方式二： 若该待对位对象上设置的对位标记透明， 且该对位标记的 周边不透明， 则光源接收装置中朝向该对位标记的端面包括位于中心位置的 第一区域， 该第一区域的形状及尺寸与该对位标记的形状及尺寸相同； 所有 光感应器均匀分布于该第一区域内， 且任意两个光感应器等距离设置。
举例说明， 仍以对位标记的形状为十字形为例， 该光源接收装置中朝向 对位标记的端面中的第一区域 M及第二区域 N的结构参见图 3A所示。 图 3A中， 第一区域 M的形状及尺寸与对位标记的形状及尺寸相同， 所有光感 应器均匀分布于该第一区域 M内， 且任意两个光感应器等距离设置。
该方式下， 若光源接收装置包含的至少一个光感应器未感应到光源发射 装置发射出的光线， 则处理器确定待对位对象对位不准确； 若光源接收装置 包含的所有光感应器均感应到光源发射装置发射出的光线， 则该处理器确定 待对位对象对位准确。
该方式下， 若处理器确定该待对位对象对位不准确时， 该处理器根据不 同应用场景， 按照对应的处理方式确定出该待对位对象需要调节的方向和位 置。
第一种应用场景。 此时， 在进行对位处理时， 处理器仅需要考虑该待对 位对象在水平方向和垂直方向发生的偏移。
在该应用场景下， 进行对位处理时， 该待对位对象上可以仅包含一个对 位标记。 光源发射装置位于该对位标记的一侧， 朝向该对位标记发射光线， 光源接收装置位于该对位标记的另一侧且位于该对位标记对应的标准位置 上。 该处理器根据光源接收装置中未感应到光源发射装置发射出的光线的光 感应器的位置和数量， 分别确定出该待对位对象需要调节的对位方向和对位 距离。 该对位距离包括水平距离和垂直距离。
在实施中， 处理器根据该对位标记的外接矩形在该光源接收装置中的投 影的外侧区域中未感应到光线的光感应器的位置和数量， 分别确定出该待对 位对象需要调节的对位方向和对位距离。 该对位距离包括水平距离和垂直距 离。
例如， 该处理器确定出的该待对位对象需要调节的对位方向为朝向该光 源接收装置中未感应到光源发射装置发射出的光线的光感应器所在的位置的 方向。
进一步， 本实施例中， 该处理器根据设定的未感应到光线的光感应器的 数量与对位距离之间的对应关系，确定出该待对位对象需要调节的对位距离。
例如， 由于该对位标记的外接矩形在该光源接收装置中的投影的外侧区 域包括上、 下、 左、 右四个子区域， 因此， 该对应关系可以是该外侧区域中 任一子区域内未感应到光线的光感应器的总数量与对位距离之间的对应关 系； 该对应关系也可以是该外侧区域中任一子区域内未感应到光线的光感应 器所占的行数（或列数）与对位距离之间的对应关系。
在实施中， 例如， 该对应关系是该外侧区域的任一子区域内未感应到光 线的光感应器所占的行数 M (或列数 N )与对位距离之间的对应关系， 这里 确定出的对位距离为 M-1个行距（或 N-1个列距） 。
举例说明， 若当前待对位对象上的对位标记与该光源接收装置的相对位 置如图 3B所示。虚线所示的矩形为该对位标记在该光源接收装置中的投影， 该投影的外侧区域包括上、 下、 左、 右四个子区域， 且左侧的子区域及下侧 的子区域包含的部分光感应器未感应到光源发射装置发射出的光线， 则确定 出的对位方向如图 3B 中箭头所示， 该对位方向为朝向该光源接收装置中未 感应到光源发射装置发射出的光线的光感应器所在的位置的方向， 即需要向 左及向下补偿该待对位对象。
在实施中， 处理器可以根据设定的未感应到光线的光感应器的数量与对 位距离之间的对应关系， 确定出需要调节的对位距离。 图 3B 中， 假设该对 位标记的外接矩形在该光源接收装置中的投影的外侧区域的左侧子区域内未 感应到光源发射装置发射出的光线的光感应器为 4列， 确定出水平方向的对 位距离为 3个列距， 结合对位方向， 需要向左补偿 3个列距的对位距离。 图 3B中，假设该光源接收装置的第二区域中的下侧子区域内未感应到光源发射 装置发射出的光线的光感应器为 5行， 确定出垂直方向的对位距离为 4个行 距， 结合对位方向， 需要向下补偿 4个行距的对位距离。
第二种应用场景。 这里， 在进行对位处理时， 处理器需要考虑该待对位 对象的对位角度， 即需要考虑该待对位对象是否发生了角度偏转。 若该待对 位对象发生了角度偏转， 则该待对位对象上的任一对位标记也会相应存在角 度偏转， 如图 3C所示。
在该应用场景下， 进行对位处理时， 根据该对位对象上设置的至少两个 对位标记， 采用上述方法 1或方法 2, 确定出该待对位对象是否产生了转动。 若产生了转动， 进一步确定出相应的对位角度以及补偿方向， 在根据该对位 角度以及其补偿方向对该待对位对象进行补偿后， 再根据本实施例的第一种 应用场景下的处理方式确定出水平方向上和垂直方向上的对位距离和对位方 向。
例如， 在进行对位处理过程中， 先将光源接收装置放置于该对位对象上 设置的任一对位标记对应的标准位置上， 确定出该光源接收装置中未感应到 光线的光感应器的位置和数量； 然后， 根据两个对位标记之间的相对位置关 系， 将该光源接收装置移至另一个对位标记对应的标准位置上， 确定出该光 源接收装置中未感应到光线的光感应器的位置和数量。
在实施中， 该处理器根据两个对位标记对应的光源接收装置中未感应到 光线的光感应器的位置，确定出该对位角度的补偿方向，具体示例如下所述。 在光源接收装置位于第一个对位标记对应的标准位置时， 该处理器确定出该 光源接收装置中未感应到光线的光感应器的位置； 在该光源接收装置位于第 二个对位标记对应的标准位置时， 该处理器确定出该光源接收装置中未感应 到光线的光感应器的位置； 该处理器根据两个对位标记对应的光源接收装置 中未感应到光线的光感应器的位置， 确定出该待对位对象相对于该待对位对 象对应的标准位置转动的方向 （即顺时针或逆时针） ； 进一步， 该处理器确 定出该对位角度的补偿方向为该待对位对象相对于其对应的标准位置转动的 方向的反方向 （若转动的方向为顺时针， 则该补偿方向为逆时针； 若转动的 方向为逆时针， 则该补偿方向为顺时针） 。
需要说明的是， 由于两个对位标记设置的位置不同， 确定补偿方向的方 法也不同， 但只要确定了两个对位标记设置的位置， 即可按照设定的方法， 根据该两个对位标记对应的光源接收装置中未感应到光线的光感应器的位 置， 确定出对位角度的补偿方向。 由于本实施方式中确定对位角度的补偿方 向的方法与实施方式一中确定对位角度的补偿方向的方法类似， 此处不再赘 述。
需要说明的是， 本实施方式中， 处理器根据光接收装置中每个光感应器 是否感应到光发射装置发射出的光线， 判断待对位对象对位是否准确时， 若 出现该光源接收装置包含的所有光感应器均未感应到光线的情况（即非正常 状况） ， 则说明该对位系统出现故障或该待对位对象的对位标记的制作出现 问题， 该情况下， 该对位系统发出报警信号， 以提示工作人员排除故障。
需要说明的是， 以上仅给出了本发明实施例的两种优选实施例， 本发明 实施例中， 光源接收装置包含的多个光感应器在该光源接收装置的朝向该对 位标记的端面上的分布， 还可以采用其他形式， 如图 4所示的分布， 其中待 对位对象上的对位标记不透明， 且该对位标记的周边透明， 该光源接收装置 中朝向对位标记的端面包括位于中心位置的第一区域 M 以及与该第一区域 邻接的第二区域^该第一区域 M的形状及尺寸与待对位对象上设置的对位 标记的形状及尺寸相同， 该第二区域 N的形状与该第一区域 M的形状互补， 所有光感应器均匀分布于该第二区域 N内，且任意两个光感应器等距离设置。
如背景技术所述，采用现有的对位方式进行对位处理时，对位精度较低， 且处理时间较长。 比较而言， 在本发明实施例中， 在对待对位对象进行对位 处理时， 根据光源接收装置中未感应到光源发射装置发射出的光线的光感应 器的位置和数量， 分别确定本次操作对应的对位方向和对位距离， 从而提高 了对位精度， 缩短了处理时间。
下面结合附图对本发明实施例提供的对位系统应用于显示装置的制作过 程为例， 对本发明实施例的对位系统的结构进行详细说明。
图 5示出了本发明实施例对位系统的一种优选实施方式， 但并不是对该 系统的各装置所在位置的限定。
参见图 5所示， 本发明实施例提供的一种在显示装置制作过程中的对位 处理系统包括： 光源发射装置 1、 光源接收装置 2及处理器 3。 光源发射装置 1位于村底基板 4的一侧， 用于朝向村底基板 1发射光线； 光源接收装置 2 位于村底基板 4的另一侧且位于村底基板 4上设置的对位标记 41对应的标准 位置上， 光源接收装置 2中朝向村底基板 4的端面上设置有多个光感应器， 每个光感应器用于感应光源发射装置 1发射出的光线； 处理器 3用于接收光 源接收装置 2包含的多个光感应器传输的感应信号， 并根据该多个光感应器 是否感应到光源发射装置 1发射出的光线， 判断村底基板 4对位是否准确。
具体的， 若光源接收装置 2包含的至少一个光感应器未感应到光源发射 装置 1发射出的光线， 则处理器 3确定村底基板 4对位不准确； 若光源接收 装置 2包含的所有光感应器均感应到光源发射装置 1发射出的光线， 则处理 器 3确定村底基板 4对位准确。
进一步， 处理器 3还可以用于在确定村底基板 4对位不准确时， 根据光 源接收装置 2中未感应到光线的光感应器的位置和数量， 分别确定出该村底 基板 4需要调节的对位方向和对位距离。对位距离包括水平距离和垂直距离。
在实施中， 对该村底基板 4的对位精度要求很高， 因此需要考虑该村底 基板 4是否产生了转动， 处理器 3判断该村底基板 4是否产生了转动例如可 以包括以下两种方法。
(方法 1 )针对村底基板 4上设置的至少两个对位标记， 处理器 3根据 两个对位标记对应的光源接收装置 2中未感应到光线的光感应器的位置， 判 断村底基板 4是否产生转动。 具体示例如下。 若两个对位标记对应的光源接 收装置 2中未感应到光线的光感应器的位置相同， 则处理器 3确定该村底基 板 4未产生转动； 若两个对位标记对应的光源接收装置 2中未感应到光线的 光感应器的位置不同， 则处理器 3确定该村底基板 4产生了转动。
(方法 2 )针对村底基板 4上设置的至少两个对位标记， 处理器 3分别 确定出每个对位标记对应的最大水平距离和最大垂直距离， 并根据两个对位 标记对应的最大水平距离和最大垂直距离， 判断村底基板 4是否产生转动。 具体示例如下。 若两个对位标记对应的最大水平距离相等， 且两个对位标记 对应的最大垂直距离相等， 则处理器 3确定该村底基板 4未产生转动； 若两 个对位标记对应的最大水平距离不等， 或两个对位标记对应的最大垂直距离 不等， 则处理器 3确定该村底基板 4产生了转动。
进一步， 在确定该村底基板 4产生了转动后， 处理器 3进行对位处理的 过程如下： 处理器 3根据两个对位标记的最大水平距离的差值以及两个对位 标记的最大垂直距离的差值， 确定出对位角度； 且处理器 3根据两个对位标 记对应的光源接收装置 2中未感应到光线的光感应器的位置， 确定出该对位 角度的补偿方向；在根据该对位角度及该补偿方向对村底基板 4进行补偿后， 针对任一对位标记， 处理器 3根据光源接收装置 2中未感应到光线的光感应 器的位置和数量， 分别确定出村底基板 4需要调节的对位方向和对位距离。
作为一种优选的实施方式， 若对位标记 41不透明， 且该对位标记 41的 周边透明，则光源接收装置 2中朝向该对位标记 41的端面包括位于中心位置 的第一区域以及与该第一区域邻接的第二区域， 第一区域的形状及尺寸与对 位标记 41的形状及尺寸相同，其中，该第二区域由分别设置于该第一区域所 在的矩形区域的四周的子区域构成， 所有光感应器均匀分布于第二区域内， 且任意两个光感应器等距离设置。
该方式下， 该处理器 3根据光源接收装置 2中未感应到光线的光感应器 的位置和数量， 分别确定出该村底基板 4需要调节的对位方向和对位距离。
例如， 该处理器 3确定出的对位方向为背离光源接收装置 2中未感应到 光源发射装置 1发射出的光线的光感应器所在的位置的方向。
在该实施方式下， 进一步， 该第一区域的中心位置设置有中心光接收器 件， 相应的， 处理器 3例如可以用于如下情形。 若光源接收装置 2包含的所 有光感应器均感应到光源发射装置 1发射出的光线， 且该光源接收装置 2包 含的中心光接收器件未感应到光源发射装置 1发射出的光线， 确定村底基板 4对位准确；若光源接收装置 2包含的所有光感应器均感应到光源发射装置 1 发射出的光线， 且该光源接收装置 2包含的中心光接收器件感应到光源发射 装置 1发射出的光线， 确定村底基板 4对位不准确。
具体参见上述实施方式一的描述， 此处不再赘述。
作为另一种优选的实施方式， 若对位标记 41透明， 且对位标记 41的周 边不透明，则光源接收装置 2中朝向对位标记 41的端面包括位于中心位置的 其中， 所有光感应器均匀分布于第一区域内， 且任意两个光感应器等距离设 置。
该方式下，该处理器 3 ^据对位标记 41的外接矩形在该光源接收装置 2 的投影的外侧区域中未感应到光线的光感应器的位置和数量， 分别确定出该 村底基板 4需要调节的对位方向和对位距离。
具体的， 该处理器 3确定出的对位方向为朝向光源接收装置 2中未感应 到光源发射装置 1发射出的光线的光感应器所在的位置的方向。
具体参见上述实施方式二的描述， 此处不再赘述。
优选的， 对位标记为十字形对位标记。
优选的， 村底基板 4的位于对角位置的两个边角区域内分别设置一个对 位标记。
本实施例中， 进一步， 在对该村底基板 4进行补偿时， 例如可以包括以 下几种补偿方式：
(方式一）根据确定出的对位方向和对位距离移动该村底基板 4, 以进 行补偿， 经调节后使该村底基板 4上的对位标记位于其对应的标准位置上。
(方式二 )根据确定出的对位方向和对位距离， 对本次需要对该村底基 板 4进行的操作进行补偿， 如对掩模 ( mask )板进行补偿。
若该村底基板 4存在角度偏转， 则上述方式一的具体示例可以为： 先根 据确定出的对位角度及该对位角度对应的对位方向， 转动该村底基板 4; 再 根据确定出的对位方向和对位距离移动该待对位对象， 经调节后使该村底基 板 4上的对位标记位于其对应的标准位置上。若该村底基板 4存在角度偏转， 则上述方式二的具体示例可以为： 先根据确定出的对位角度及该对位角度对 应的对位方向， 转动该村底基板 4; 再根据确定出的对位方向和对位距离， 对本次需要对该村底基板 4进行的操作进行补偿。
以上所述仅是本发明的示范性实施方式， 而非用于限制本发明的保护范 围， 本发明的保护范围由所附的权利要求确定。

Claims

权利要求书
1、 一种对位系统， 包括光源发射装置、 光源接收装置及处理器； 其中： 光源发射装置位于待对位对象的一侧，且朝向所述待对位对象发射光线； 光源接收装置位于所述待对位对象的另一侧且位于所述待对位对象上设 置的对位标记对应的标准位置上， 所述光源接收装置中朝向所述待对位对象 的端面上设置有多个用于感应所述光线的光感应器；
处理器接收每个所述光感应器传输的感应信号， 并根据所述光感应器是 否感应到所述光线， 判断所述待对位对象对位是否准确。
2、如权利要求 1所述的对位系统， 其中， 若所述光源接收装置包含的至 少一个光感应器未感应到所述光源发射装置发射出的光线， 则所述处理器确 定所述待对位对象对位不准确；
若所述光源接收装置包含的所有光感应器均感应到所述光源发射装置发 射出的光线， 则所述处理器确定所述待对位对象对位准确。
3、如权利要求 1所述的对位系统， 其中，在确定所述待对位对象对位不 准确时， 所述处理器还根据所述光源接收装置中未感应到所述光线的光感应 器的位置和数量， 分别确定出所述待对位对象需要调节的对位方向和对位距 离， 其中， 所述对位距离包括水平距离和垂直距离。
4、如权利要求 3所述的对位系统， 其中，针对所述待对位对象上设置的 至少两个所述对位标记， 所述处理器 ^据两个所述对位标记对应的所述光源 接收装置中未感应到所述光线的光感应器的位置， 判断所述待对位对象是否 产生转动； 或者，
针对所述待对位对象上设置的至少两个所述对位标记， 所述处理器分别 确定出每个所述对位标记对应的最大水平距离和最大垂直距离， 并根据两个 所述对位标记对应的最大水平距离和最大垂直距离， 判断所述待对位对象是 否产生转动。
5、如权利要求 4所述的对位系统， 其中，在确定所述待对位对象产生了 转动之后， 所述处理器根据两个所述对位标记的最大水平距离的差值以及两 个所述对位标记的最大垂直距离的差值， 确定出所述对位角度； 且， 所述处 理器 ^据两个所述对位标记对应的所述光源接收装置中未感应到所述光线的 光感应器的位置， 确定出所述对位角度的补偿方向；
在根据所述对位角度及所述补偿方向对所述待对位对象进行补偿后， 针 对任一所述对位标记， 所述处理器根据所述光源接收装置中未感应到所述光 线的光感应器的位置和数量， 分别确定出所述待对位对象需要调节的对位方 向和对位距离。
6、 如权利要求 1所述的对位系统， 其中， 若所述对位标记不透明， 且所 述对位标记的周边透明， 则所述光源接收装置中朝向所述对位标记的端面包 括位于中心位置的第一区域以及与所述第一区域邻接的第二区域， 所述第一 区域的形状及尺寸与所述对位标记的形状及尺寸相同；
其中， 所述第二区域由分别设置于所述第一区域所在的矩形区域的四周 的子区域构成， 所有所述光感应器均匀分布于所述第二区域内， 且任意两个 所述光感应器等距离设置。
7、如权利要求 6所述的对位系统， 其中， 所述第一区域的中心位置设置 有中心光接收器件， 若所述光源接收装置包含的所有光感应器均感应到所述 光线， 且该光源接收装置包含的中心光接收器件未感应到所述光线， 所述处 理器确定所述待对位对象对位准确；
若所述光源接收装置包含的所有光感应器均感应到所述光线， 且该光源 接收装置包含的中心光接收器件感应到所述光线， 所述处理器确定所述待对 位对象对位不准确。
8、如权利要求 6所述的对位系统， 其中， 所述处理器根据所述光源接收 装置中未感应到所述光线的光感应器的位置， 确定出所述待对位对象的对位 方向为背离所述光源接收装置中未感应到所述光源发射装置发射出的光线的 光感应器所在位置的方向。
9、 如权利要求 1所述的对位系统， 其中， 若所述对位标记透明， 且所述 对位标记的周边不透明， 则所述光源接收装置中朝向所述对位标记的端面包 括位于中心位置的第一区域， 所述第一区域的形状及尺寸与所述对位标记的 形状及尺寸相同；
其中， 所有所述光感应器均勾分布于所述第一区域内， 且任意两个所述 光感应器等距离设置。
10、 如权利要求 9所述的对位系统， 其中， 所述处理器根据所述对位标 记的外接矩形在所述光源接收装置中的投影的外侧区域中未感应到光线的光 感应器的位置和数量， 分别确定出所述待对位对象需要调节的对位方向和对 位距离， 其中， 所述对位距离包括水平距离和垂直距离。
11、如权利要求 10所述的对位系统， 其中， 所述处理器确定出所述待对 位对象的对位方向为朝向所述光源接收装置中未感应到所述光源发射装置发 射出的光线的光感应器所在位置的方向。
12、 如权利要求 1~11 任一项所述的对位系统， 其中， 所述对位系统应 用于显示装置制作过程中， 且所述待对位对象为村底基板， 所述村底基板的 至少一个边角区域内设置有所述对位标记。
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