WO2015001911A1 - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- WO2015001911A1 WO2015001911A1 PCT/JP2014/065156 JP2014065156W WO2015001911A1 WO 2015001911 A1 WO2015001911 A1 WO 2015001911A1 JP 2014065156 W JP2014065156 W JP 2014065156W WO 2015001911 A1 WO2015001911 A1 WO 2015001911A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- rotor
- stator
- exhaust
- exhaust side
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/44—Fluid-guiding means, e.g. diffusers
- F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
- F04D29/444—Bladed diffusers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/10—Stators
- F05D2240/12—Fluid guiding means, e.g. vanes
- F05D2240/122—Fluid guiding means, e.g. vanes related to the trailing edge of a stator vane
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/20—Rotors
- F05D2240/30—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor
- F05D2240/304—Characteristics of rotor blades, i.e. of any element transforming dynamic fluid energy to or from rotational energy and being attached to a rotor related to the trailing edge of a rotor blade
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/70—Shape
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/60—Fluid transfer
- F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
Definitions
- the present invention relates to a vacuum pump, and more particularly to a vacuum pump that can be used in a pressure range from a medium vacuum to an ultra-high vacuum.
- a vacuum pump such as a turbo molecular pump is used for exhausting the inside.
- a screw groove pump mechanism constituted by a screw groove engraved on a wall surface to be exhausted and gas is exhausted by moving up and down in the S groove shape in the vertical direction in the screw groove pump mechanism (for example, , See Patent Document 1).
- a substantially cylindrical casing a substantially cylindrical stator disposed in the axial portion of the casing, and a rotor shaft rotatably supported on the axial portion of the stator, the casing and the stator
- a screw having a rotor having a substantially cylindrical tube portion, and a protrusion and a screw groove provided on an inner peripheral surface facing the cylindrical portion of the casing and an outer peripheral surface facing the cylindrical portion of the stator, respectively.
- a groove pump mechanism is known, in which gas is exhausted from the top to the bottom in the vertical direction in the thread groove pump mechanism (see, for example, Patent Document 2).
- gas is not sent to the inner peripheral side of the inner cylinder stator 90 as shown by an arrow B in FIG.
- the inner cylinder rotor 93 may stay while rotating in a ring shape along the rotation direction R.
- the gas staying in such an exhaust part flows backward to the outer peripheral side of the inner cylindrical stator 90, and in the vicinity of the exhaust side outlet 91a of the screw groove 91 where the gas flows backward, The flow was disturbed and gas stagnation was apt to occur.
- the compressed gas may stay on the lower end surface of the cylinder portion of the rotor while rotating in a ring shape along the rotor rotation direction.
- the gas staying while turning may flow backward in the screw groove pump mechanism and disturb the gas flow at the exhaust side outlet of the screw groove, and the gas may stay at the exhaust side outlet of the screw groove.
- the present invention is proposed in order to achieve the above object, and the invention according to claim 1 is characterized in that a rotor cylindrical portion provided in a rotor rotatable in a predetermined rotation direction and a gap between the rotor cylindrical portion.
- a substantially cylindrical stator disposed on the same axis as the rotor cylindrical portion, and a surface facing the rotor cylindrical portion of the stator or a surface facing the stator of the rotor cylindrical portion in the gas exhaust direction.
- a thread groove pump mechanism having a plurality of protrusions extending along the threads and a thread groove engraved between the plurality of protrusions, and gas in the thread grooves in the gas exhaust direction.
- a vacuum pump for transferring from an intake side to an exhaust side, and comprising a gas retention suppressing means for suppressing retention of gas at an exhaust side outlet of the screw groove.
- the gas stagnation suppressing means suppresses gas stagnation at the exhaust side outlet of the screw groove, it suppresses the accumulation of gas products due to gas stagnation at the exhaust side outlet of the screw groove. be able to.
- the gas stagnation suppressing means may be configured such that an exhaust side end portion of the ridge portion on the exhaust side in the gas exhaust direction is disposed in the gas exhaust direction.
- a vacuum pump which is an inflow suppressing wall formed wider than an intake side end portion on the intake side.
- the length of the protruding portion seal is increased by the amount of the inflow suppression wall provided at the exhaust side end of the protruding portion, so that the gas at the exhaust side outlet of the screw groove exceeds the exhaust side end. This prevents the gas from staying at the exhaust-side outlet of the screw groove and the gas from staying at the exhaust-side outlet of the screw groove. The accumulation of gas products can be suppressed.
- the inflow suppression wall is formed in a tapered shape that gradually widens from the intake side toward the exhaust side along the gas exhaust direction.
- a vacuum pump Provides a vacuum pump.
- the inflow suppression wall is formed in a taper shape and the length of the protruding portion is increased, so that the gas at the exhaust side outlet of the thread groove passes over the exhaust side end of the protruding portion and the rotor Inflow into the screw groove forward in the rotational direction is suppressed, and the gas in the screw groove is smoothly exhausted because the inflow suppression wall is formed in a smooth taper shape along the gas exhaust direction. Further, while suppressing an increase in the outlet pressure of the thread groove, it is possible to further suppress the accumulation of the gas product resulting from the gas staying at the exhaust side outlet of the thread groove.
- the ridge portion has a constant width region formed in the same width as the intake side end portion, and is continuous with the constant width region. And a widened region that is widened to the exhaust side end portion to form the inflow suppressing wall.
- the length of the protruding portion seal is increased by the amount of the inflow suppression wall formed in the widened region of the protruding portion, so that the gas at the exhaust side outlet of the screw groove is Since it is suppressed to flow into the thread groove ahead of the rotor in the rotational direction beyond the exhaust side end, further accumulation of gas products due to gas staying at the exhaust side outlet of the thread groove is further suppressed. Can do.
- the gas stagnation suppressing means may be configured so that the exhaust side end portion of the ridge portion on the exhaust side in the gas exhaust direction from the exhaust side end portion of the rotor.
- a vacuum pump which is an inflow suppressing blade formed to extend forward in the rotation direction.
- the inflow suppression blade extends from the exhaust side end in the rotational direction of the rotor, and the seal length of the ridge is increased, so that the gas at the exhaust side outlet of the screw groove is It is possible to prevent inflow into the thread groove ahead of the rotor in the rotational direction beyond the exhaust side end, and because the inflow suppression blade is locally provided only at the outlet of the screw groove, the inflow suppression blade is installed. In order to avoid an excessive decrease in the flow rate of the gas flowing in the screw groove due to the above, further accumulation of gas products caused by gas staying at the exhaust side outlet of the screw groove is further suppressed while maintaining the gas flow rate. Can do.
- the gas stagnation suppression means is a vacuum that is a swirl stagnation suppression wall erected on the exhaust cylinder side surface of the rotor cylindrical portion or the stator. Provide a pump.
- the swirl retention suppressing wall is configured so that the rotation direction of the rotor is in a normal direction toward the axial center of the rotor cylindrical portion or the stator.
- a vacuum pump having a gas guiding surface that is inclined along the surface is provided.
- the gas guide surface of the swirl retention suppression wall guides the gas, which tends to stay on the rotor cylindrical portion or the exhaust side end surface of the stator, toward the rotor cylindrical portion or the axial center of the stator. Or, since the backflow of the gas staying near the exhaust side end face of the stator into the screw groove is further suppressed, the accumulation of gas products caused by the gas staying at the exhaust side outlet of the screw groove is further suppressed. Can do.
- the invention of claim 8 provides a vacuum pump in which the swirl residence restraint wall is formed integrally with the protrusion.
- the protrusion is extended from the exhaust cylinder end surface of the rotor cylindrical part or the stator and is formed integrally with the swirl residence restraint wall, so that the gas is on the exhaust side in the gas exhaust direction of the protrusion. Since it is suppressed to flow into the thread groove ahead of the rotor in the rotational direction beyond the exhaust side end, further accumulation of gas products due to gas staying at the exhaust side outlet of the thread groove is further suppressed. Can do.
- the gas stagnation suppressing means suppresses the stagnation of the gas at the exhaust side outlet of the screw groove, the accumulation of the gas product due to the gas staying at the exhaust side outlet of the screw groove is prevented. Can be suppressed.
- the gas at the exhaust side outlet of the thread groove flows into the thread groove ahead of the rotor in the rotational direction beyond the exhaust side end of the protrusion. Since the inflow suppression wall suppresses this, it is possible to suppress the accumulation of gas products resulting from the gas remaining at the exhaust side outlet of the thread groove.
- the invention described in claim 3 suppresses the inflow restraint wall from flowing into the screw groove forward in the rotational direction of the rotor beyond the exhaust side end. Since the gas in the thread groove is smoothly exhausted along the inflow suppressing wall formed in the taper shape of the protrusion, the gas is supplied to the exhaust side of the thread groove while suppressing an increase in the outlet pressure of the thread groove. It is possible to suppress the accumulation of the gas product due to the staying.
- the invention described in claim 4 allows the gas at the exhaust side outlet of the thread groove to flow into the thread groove ahead of the rotor in the rotational direction beyond the exhaust side end of the protrusion. Since the inflow suppression wall formed over the widened region suppresses this, it is possible to suppress the accumulation of gas products caused by the gas staying at the exhaust side outlet of the screw groove.
- the inflow suppression wall prevents the gas from flowing into the screw groove on the front side in the rotational direction of the rotor beyond the exhaust side end of the protrusion.
- the gas resulting from the gas staying on the exhaust side of the screw groove while maintaining the gas flow rate Product accumulation can be suppressed.
- the invention according to claim 6 is characterized in that the swirl residence restraint wall attenuates the residence of the gas and prevents the gas from flowing back into the screw groove. It is possible to suppress the accumulation of gas products due to staying at the exhaust side outlet.
- the gas guiding surface induces gas, which tends to stay on the rotor cylindrical portion or the exhaust side end surface of the stator, from the outer peripheral side to the inner peripheral side.
- the gas stays at the exhaust side outlet of the screw groove by preventing the gas from flowing back into the screw groove from the exhaust cylinder end surface of the rotor cylinder or the stator and staying at the exhaust side outlet of the screw groove.
- the accumulation of gas products can be suppressed.
- the invention described in claim 8 suppresses the gas from flowing into the screw groove on the front side in the rotational direction of the rotor beyond the exhaust side end of the protrusion. Therefore, it is possible to further suppress the accumulation of the gas product resulting from the gas staying at the exhaust side outlet of the screw groove.
- FIG. 2 is a longitudinal cross-sectional view of the outer peripheral side stator shown in FIG. 1.
- FIG. 1 is a figure of the inner peripheral side stator shown in FIG. 1
- (a) is a top view
- (b) is a side view.
- (a) is a top view
- (b) is a side view.
- (a) is a top view
- (b) is a side view.
- It is a figure which shows the modification of the inner peripheral side stator of FIG. 4 (a) is a top view, (b) is a side view.
- the side view which shows the inner cylinder stator applied to the conventional vacuum pump.
- the present invention is provided in a rotor that can rotate in a predetermined rotation direction in order to achieve the object of suppressing the generation of gas products at the exhaust side outlet of the thread groove and maintaining the pump performance over a long period of time.
- the rotor cylindrical portion two substantially cylindrical stators arranged coaxially with the rotor cylindrical portion via gaps on the inner peripheral surface and outer peripheral surface of the rotor cylindrical portion, respectively, and the rotor cylindrical portions of the two stators are opposed to each other.
- a plurality of protrusions extending along the gas exhaust direction on either the inner surface or the outer peripheral surface of the opposing surface or the rotor cylindrical portion, and a screw groove carved between the plurality of protrusions,
- a vacuum pump that includes a screw groove pump mechanism having gas flow and that transfers gas in the screw groove from the intake side to the exhaust side in the gas exhaust direction, and suppresses gas retention at the exhaust side outlet of the screw groove Realized by having means.
- FIGS. 1 to 3 a vacuum pump according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.
- the vacuum pump 1 is a composite pump composed of a turbo molecular pump mechanism PA and a thread groove pump mechanism PB housed in a substantially cylindrical casing 10.
- the vacuum pump 1 includes a substantially cylindrical casing 10, a rotor shaft 20 that is rotatably supported in the casing 10, a drive motor 30 that rotates the rotor shaft 20, and a rotor shaft that is fixed to an upper portion of the rotor shaft 20.
- the rotor 40 includes rotating blades 41 arranged concentrically with respect to the 20 shaft centers, and a stator column 50 that houses a part of the rotor shaft 20 and the drive motor 30.
- the casing 10 is formed in a bottomed cylindrical shape.
- the casing 10 has a base 11 with a gas exhaust port 11a formed on the lower side, and a cylinder fixed with bolts 13 in a state where the gas intake port 12a is formed on the upper side and placed on the base 11.
- symbol 14 in FIG. 1 is a back cover.
- the casing 10 is attached to a vacuum vessel such as a champ (not shown) via the flange 12b of the cylindrical portion 12.
- the gas inlet 12a is connected to a vacuum vessel, and the gas outlet 11a is connected to communicate with an auxiliary pump (not shown).
- the rotor shaft 20 is supported in a non-contact manner by a radial electromagnet 21 and an axial electromagnet 22.
- the radial electromagnet 21 and the axial electromagnet 22 are connected to a control unit (not shown).
- the control unit controls the exciting currents of the radial electromagnet 21 and the axial electromagnet 22 based on the detection values of the radial direction displacement sensor 21a and the axial direction displacement sensor 22a, so that the rotor shaft 20 floats at a predetermined position. Supported.
- the upper and lower portions of the rotor shaft 20 are inserted into the touchdown bearing 23.
- the rotor shaft 20 becomes uncontrollable, the rotor shaft 20 that rotates at high speed comes into contact with the touchdown bearing 23 to prevent the vacuum pump 1 from being damaged.
- the drive motor 30 includes a rotor 31 attached to the outer periphery of the rotor shaft 20 and a stator 32 arranged so as to surround the rotor 31.
- the stator 31 is connected to the control unit (not shown) described above, and the rotation of the rotor shaft 20 and the rotor 40 is controlled by the control unit.
- the rotor 40 is integrally attached to the rotor shaft 20 by inserting a bolt 43 into the rotor flange 44 and screwing it into the shaft flange 24 with the upper portion of the rotor shaft 20 inserted through the boss hole 42.
- the stator column 50 is fixed on the base 11 via a bolt (not shown) at the lower end while being placed on the base 11.
- the turbo molecular pump mechanism PA is composed of a rotor blade 41 of the rotor 40 and a stationary blade 60 arranged with a gap between the rotor blades 41.
- the rotary blades 41 and the fixed blades 60 are alternately arranged in multiple stages along the vertical direction H. In this embodiment, the rotary blades 41 are arranged in five stages and the fixed blades 60 are arranged in four stages.
- the rotary blade 41 is composed of a blade inclined at a predetermined angle, and is integrally formed on the upper outer peripheral surface of the rotor 40.
- a plurality of rotor blades 41 are provided radially around the axis of the rotor 40.
- the fixed blade 60 is composed of a blade inclined in the opposite direction to the rotary blade 41, and is positioned by being sandwiched in the vertical direction by a spacer 61 installed in a stacked manner on the inner wall surface 12a of the cylindrical portion 12.
- a plurality of fixed blades 60 are also provided radially around the axis of the rotor 40.
- the gap between the rotary blade 41 and the fixed blade 60 is set so as to gradually narrow from the upper side in the vertical direction H to the lower side.
- the lengths of the rotary blade 41 and the fixed blade 60 are set so as to gradually shorten from the upper side in the vertical direction H to the lower side.
- the turbo molecular pump mechanism PA as described above is configured to transfer the gas sucked from the gas inlet 12a from the upper side in the vertical direction H to the lower side by the rotation of the rotor blade 41.
- the thread groove pump mechanism PB includes a rotor cylindrical portion 45 extending downward in the vertical direction H from the lower end of the rotor 40, a substantially cylindrical outer peripheral side stator 70 disposed so as to surround the outer peripheral surface 45a of the rotor cylindrical portion 45, And a substantially cylindrical inner peripheral side stator 80 disposed in the rotor cylindrical portion 45.
- the outer peripheral surface 45a and the inner peripheral surface 45b of the rotor cylindrical portion 45 are formed as flat cylindrical surfaces.
- the outer circumferential surface 45a of the rotor cylindrical portion 45 is opposed to the inner circumferential surface 70a, which is a facing surface facing the outer circumferential surface 45a of the rotor cylindrical portion 45 of the outer stator 70, with a predetermined gap therebetween.
- the inner peripheral surface 45b is opposed to the outer peripheral surface 80a, which is an opposing surface facing the inner peripheral surface 45b of the rotor cylindrical portion 45 of the inner peripheral side stator 80, with a predetermined gap.
- the outer peripheral side stator 70 is fixed to the base 11 via a bolt (not shown).
- a plurality of protrusions 71 are extended along the gas exhaust direction D1 on the inner peripheral surface 70a of the outer stator 70, and a screw groove 72 is formed between the protrusions 71 and 71. Yes.
- the inner diameter of the thread groove 72 of the outer stator 70 is set so that the gas exhaust side is narrower than the intake side.
- the inner peripheral side stator 80 is fixed to the base 11 via a bolt (not shown).
- a plurality of protrusions 81 are extended along the gas exhaust direction D2 on the outer peripheral surface 80a of the inner peripheral side stator 80, and a screw groove 82 is formed between the protrusions 81, 81. Yes.
- the outer diameter of the screw groove 82 of the inner peripheral side stator 80 is set so that the gas exhaust side is narrower than the intake side.
- the gas transferred downward from the gas inlet 12a in the vertical direction H by the turbo molecular pump mechanism PA is folded back into the S-shaped groove pump mechanism PB and transferred to the exhaust port. That is, when the rotor cylindrical portion 45 rotates at a relatively high speed with respect to the outer peripheral side stator 70 and the inner peripheral side stator 80, the gas is sent downward while being compressed in the thread groove 72 of the outer peripheral side stator 70, Folded upward at the exhaust-side end surface 45c of the rotor cylindrical portion 45, sent upward while being further compressed in the screw groove 82 of the inner peripheral side stator 80, folded downward at the exhaust side end surface 80b of the inner peripheral side stator 80, The air is exhausted from the exhaust port 11a through the inner periphery of the circumferential stator 80.
- the protrusion 71 is formed with substantially the same width dimension as the intake side end 71a. ing.
- the protruding portion 71 is formed to widen the exhaust side end portion 71b toward the front in the rotor rotation direction R, and the screw groove 72
- An inflow suppressing wall 73 is provided as a gas retention suppressing means for suppressing gas retention in the vicinity of the exhaust side outlet 72a.
- the lead angle ⁇ 1 of the intake side end 71a is set to 20 °, and the lead angle ⁇ 2 of the inflow suppression wall 73 is set to 15 °. Note that the lead angle ⁇ 2 may be adjusted as appropriate according to the component of the exhaust gas, the flow rate, and the like.
- the inflow suppression wall 73 is formed wider from the exhaust side end portion 71b toward the rear in the rotor rotation direction R, the inflow suppression wall 73 is respectively forward and rearward from the exhaust side end portion 71b in the rotor rotation direction R. It may be formed wider toward the front.
- the inflow suppressing wall 73 is formed in a taper shape by gradually widening from the intake side to the exhaust side in the gas exhaust direction D1 in the widened region E.
- the seal length of the inflow suppression wall 73 is set longer than the seal length of the intake side end portion 71a. Moreover, since the gas in the screw groove 72 is smoothly transferred along the tapered protrusion 71, an increase in the outlet pressure of the screw groove 72 is suppressed.
- the protrusion 81 in the constant width region F extending from the intake side in the vertical direction H of the inner peripheral side stator 80 to a predetermined depth, the protrusion 81 has an intake side end 81a. They are formed with substantially the same width.
- the protrusion 81 is formed to widen the exhaust side end portion 81b toward the front in the rotor rotation direction R, and the screw groove 82
- An inflow suppressing wall 83 is provided as a gas stagnation suppressing means for suppressing gas stagnation in the vicinity of the exhaust outlet 82a.
- the lead angle ⁇ 3 of the equal width portion 81a is set to 20 °, and the lead angle ⁇ 4 of the inflow suppression wall 83 is set to 15 °. Note that the lead angle ⁇ 4 may be adjusted as appropriate according to the component and flow rate of the gas to be exhausted.
- the inflow suppression wall 83 is formed wider from the exhaust side end portion 81b toward the rear in the rotor rotation direction R, the inflow suppression wall 83 is respectively forward and rearward from the exhaust side end portion 81b in the rotor rotation direction R. It may be formed wider toward the front.
- the inflow suppression wall 83 is formed in a taper shape by gradually widening from the intake side in the gas exhaust direction D2 toward the exhaust side in the widened region G.
- the seal length of the inflow suppression wall 83 is set longer than the seal length of the intake side end portion 81a. Moreover, since the gas in the screw groove 82 is smoothly transferred along the tapered protrusion 81, an increase in the outlet pressure of the screw groove 82 is suppressed.
- the inflow suppressing wall 73 prevents the gas from flowing into the screw groove 72 in the front in the rotor rotation direction R beyond the exhaust side end 71b of the protrusion 71. Further, the occurrence of gas retention at the exhaust side outlet 72a of the screw groove 782 is suppressed, and the accumulation of gas products at the exhaust side outlet 72a of the screw groove 72 can be suppressed.
- the inflow suppression wall 83 suppresses the gas from flowing into the front thread groove 82 in the rotor rotation direction R beyond the exhaust side end 81b of the ridge 81, the exhaust side outlet 82a of the thread groove 82 It is possible to suppress the accumulation of gas and suppress the accumulation of gas products at the exhaust side outlet 82a of the thread groove 82.
- the inflow suppression wall 83 of the inner peripheral side stator 80 is an inflow suppression blade 84 that extends from the exhaust side end portion 81 b of the protrusion 81 toward the front in the rotor rotation direction R. It doesn't matter.
- the length L of the inflow suppression blade 84 along the rotor rotation direction R is only required to be able to regulate the flow of the gas that is going to flow beyond the exhaust-side end 83 of the ridge 81, and can be adjusted to the rotor rotation speed or the like. Set accordingly.
- the seal length of the exhaust side end portion 81b of the ridge portion 81 is ensured to be long by the amount that the inflow suppression blade 84 extends forward from the exhaust side end portion 81b in the rotor rotation direction R. Further, since the inflow suppression blade 84 is provided only at the exhaust side end portion 81b, an excessive decrease in the flow rate of the gas flowing in the screw groove 82 is avoided.
- the vacuum pump 1 to which the inner circumferential side stator 80 described above is applied ensures that the gas in the vicinity of the exhaust side outlet 82a of the screw groove 82 is in the protruding portion 81 while ensuring the flow rate of the gas flowing in the screw groove 82.
- the inflow suppression blade 84 suppresses the flow into the screw groove 82 in the front in the rotor rotation direction R beyond the exhaust side end portion 81b, and the gas stays at the exhaust side outlet 82a of the screw groove 82.
- the accumulation of gas products can be suppressed.
- the outer circumferential side stator 70 may be provided with an inflow suppression blade extending from the exhaust side end 71b of the ridge 71 toward the front in the rotor rotation direction R.
- the inner peripheral side stator 80 applied to the vacuum pump according to the second embodiment of the present invention will be described with reference to FIG.
- the vacuum pump according to the first embodiment described above and the vacuum pump according to the present embodiment differ only in the specific configurations of the outer peripheral side stator 70 and the inner peripheral side stator 80, and the same members are used. , The same reference numerals are given, and repeated description is omitted. Further, since the outer peripheral side stator 70 and the inner peripheral side stator 80 have the same configuration, the specific configuration of the inner peripheral side stator 80 will be described below, and the description regarding the outer peripheral side stator 70 will be omitted.
- the inner circumferential side stator 80 of the present embodiment is erected from the exhaust side end face 80 b to retain gas at the exhaust side outlet 82 a of the screw groove 82.
- a swivel stay restraining wall 85 is provided as a gas stay restraining means for restraining.
- the swirl stay restraint wall 85 is composed of a wide swirl stay restraint wall 85A and a narrow swirl stay restraint wall 85B. Are alternately arranged.
- a and B are added to the end of the numerals as reference signs, and when these are collectively called, Only reference signs are used.
- the swirl residence restraint wall 85 includes a gas guiding surface 85a that is inclined from the outer peripheral side of the inner peripheral side stator 80 toward the inner peripheral side.
- the gas guiding surface 85a guides gas that tends to stay on the exhaust side end surface 80b of the inner peripheral side stator 80 from the outer peripheral side to the inner peripheral side, and stays near the exhaust side end surface 80b of the inner peripheral side stator 80.
- the gas is further prevented from flowing back into the screw groove 82.
- the swirl retention restraint wall 85A is formed integrally with the protrusion 81.
- the protrusion 81 is extended beyond the exhaust side end face 80b of the inner peripheral side stator 80, and the gas is prevented from flowing into the screw groove 82 in the front in the rotor rotation direction R beyond the exhaust side end 81b. To do.
- the swirl retention restraint wall 85A is gradually tapered in the widened region E from the intake side in the gas exhaust direction D2 toward the exhaust side, and is formed in a tapered shape. It may be formed integrally with the ridge 81 provided with the inflow suppressing wall 83.
- the seal length of the protrusion 81 is extended, and the gas is suppressed from flowing over the exhaust-side end 81b of the protrusion 81 into the front screw groove 82 in the rotor rotation direction D2.
- the gas that tends to stay in the vicinity of the exhaust side end face 80b of the inner peripheral side stator 80 flows back into the screw groove 82, and the exhaust side outlet 82a of the screw groove 82. Therefore, it is possible to suppress the accumulation of the gas product resulting from the gas staying at the exhaust side outlet 82a of the screw groove 82.
- the swirl retention restraint wall 85 provided on the inner peripheral side stator 80 is illustrated. However, even if the swirl retention restraint wall is provided on the exhaust side end face 70b of the outer peripheral side stator 70, the rotor cylinder. You may provide in the exhaust-side end surface 45c of the part 45. FIG.
- the protrusions and the screw grooves are provided on the inner peripheral surface of the outer peripheral side stator and the outer peripheral surface of the inner peripheral side stator, respectively, but are provided on the inner peripheral surface and the outer peripheral surface of the rotor cylindrical portion, respectively. It doesn't matter.
- each of the embodiments described above exemplifies the screw groove pump mechanism of the folded structure, but the screw groove pump mechanism of a parallel structure in which gas is exhausted from the upper side to the lower side of the pump vertical direction in the screw groove pump mechanism,
- the present invention may be applied to a thread groove pump mechanism in which a stator is disposed only on the outer peripheral side of the rotor cylindrical portion and gas is exhausted to the outer peripheral side of the rotor cylindrical portion.
- Projection 81a (of the inner peripheral side stator) ... Intake side end (of the inner peripheral side stator) 81b (external side stator) exhaust side end 82 (inner side stator) thread groove 82a (inner side stator) exhaust side outlet 83 (inner side) Inflow suppression wall of the side stator 84 ... Inflow suppression blade 85 ... Swirl retention suppression Wall R ... Rotor rotation direction PA ... Turbo molecular pump mechanism PB ... Screw groove pump mechanism
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Abstract
Description
に亘って維持するという目的を達成するために、所定の回転方向に回転可能なロータに設けられたロータ円筒部と、ロータ円筒部の内周面及び外周面に夫々隙間を介してロータ円筒部と同軸上に配置された略円筒状の2つのステータと、2つのステータのロータ円筒部に対向する対向面又はロータ円筒部の内周面及び外周面の何れか一方にガス排気方向に沿って延設された複数の突条部及び複数の突条部の間に刻設されたネジ溝と、を有するネジ溝ポンプ機構を備え、ネジ溝内のガスをガス排気方向の吸気側から排気側へ移送する真空ポンプであって、ネジ溝の排気側出口でのガスの滞留を抑制するガス滞留抑制手段を備えていることにより実現した。
成されている。
10・・・ ケーシング
11・・・ ベース
11a・・・ガス排気口
12・・・ 円筒部
12a・・・ガス吸気口
12b・・・フランジ
13・・・ ボルト
20・・・ ロータシャフト
21・・・ ラジアル電磁石
22・・・ アキシャル電磁石
23・・・ タッチダウン軸受
24・・・ シャフトフランジ
30・・・ 駆動モータ
31・・・ 回転子
32・・・ 固定子
40・・・ ロータ
41・・・ 回転翼
42・・・ ボス孔
43・・・ ボルト
44・・・ ロータフランジ
45・・・ ロータ円筒部
45a・・・外周面
45b・・・内周面
45c・・・排気側端面
50・・・ ステータコラム
60・・・ 固定翼
61・・・ スペーサ
70・・・ 外周側ステータ
70a・・・(外周側ステータの)内周面
70b・・・(外周側ステータの)排気側端面
71・・・ (外周側ステータの)突条部
71a・・・(外周側ステータの)吸気側端部
71b・・・(外周側ステータの)排気側端部
72・・・ (外周側ステータの)ネジ溝
72a・・・(外周側ステータの)排気側出口
73・・・ (外周側ステータの)流入抑制壁
80・・・ 内周側ステータ
80a・・・(内周側ステータの)外周面
80b・・・(内周側ステータの)排気側端面
81・・・ (内周側ステータの)突条部
81a・・・(内周側ステータの)吸気側端部
81b・・・(内周側ステータの)排気側端部
82・・・ (内周側ステータの)ネジ溝
82a・・・(内周側ステータの)排気側出口
83・・・ (内周側ステータの)流入抑制壁
84・・・ 流入抑制翼
85・・・ 旋回滞留抑制壁
R ・・・ ロータ回転方向
PA・・・ ターボ分子ポンプ機構
PB・・・ ネジ溝ポンプ機構
Claims (8)
- 所定の回転方向に回転可能なロータに設けられたロータ円筒部と、該ロータ円筒部に隙間を介して前記ロータ円筒部と同軸上に配置された略円筒状のステータと、該ステータの前記ロータ円筒部に対向する対向面又は前記ロータ円筒部の前記ステータに対向する対向面にガス排気方向に沿って延設された複数の突条部及び該複数の突条部の間に刻設されたネジ溝と、を有するネジ溝ポンプ機構を備え、前記ネジ溝内のガスを前記ガス排気方向の吸気側から排気側へ移送する真空ポンプであって、
前記ネジ溝の排気側出口でのガスの滞留を抑制するガス滞留抑制手段を備えていることを特徴とする真空ポンプ。 - 前記ガス滞留抑制手段は、前記突条部の前記ガス排気方向の排気側の排気側端部を前記ガス排気方向の吸気側の吸気側端部より拡幅して形成された流入抑制壁であることを特徴とする請求項1記載の真空ポンプ。
- 前記流入抑制壁は、前記ガス排気方向に沿って吸気側から排気側に向かって漸次拡幅するテーパ状に形成されていることを特徴とする請求項2記載の真空ポンプ。
- 前記突条部は、前記吸気側端部と同幅に形成された等幅領域と、該等幅領域に連続して前記排気側端部まで拡幅されて前記流入抑制壁を形成する拡幅領域と、を備えていることを特徴とする請求項2記載の真空ポンプ。
- 前記ガス滞留抑制手段は、前記突条部の前記ガス排気方向の排気側の前記排気側端部から前記ロータの前記回転方向の前方に向かって延設して形成された流入抑制翼であることを特徴とする請求項1記載の真空ポンプ。
- 前記ガス滞留抑制手段は、前記ロータ円筒部又は前記ステータの排気側端面に立設された旋回滞留抑制壁であることを特徴とする請求項1記載の真空ポンプ。
- 前記旋回滞留抑制壁は、前記ロータ円筒部又は前記ステータの軸心に向かう法線方向に対し前記ロータの前記回転方向に沿って傾斜するガス誘導面を備えていることを特徴とする請求項6記載の真空ポンプ。
- 前記旋回滞留抑制壁は、前記突条部と一体に形成されていることを特徴とする請求項6又は7記載の真空ポンプ。
Priority Applications (4)
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EP14820662.6A EP3018354B1 (en) | 2013-07-05 | 2014-06-06 | Vacuum pump |
US14/899,917 US10260509B2 (en) | 2013-07-05 | 2014-06-06 | Vacuum pump |
CN201480035337.4A CN105324578B (zh) | 2013-07-05 | 2014-06-06 | 真空泵 |
KR1020157032197A KR102167210B1 (ko) | 2013-07-05 | 2014-06-06 | 진공 펌프 |
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JP2013141863A JP6174398B2 (ja) | 2013-07-05 | 2013-07-05 | 真空ポンプ |
JP2013-141863 | 2013-07-05 |
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EP (1) | EP3018354B1 (ja) |
JP (1) | JP6174398B2 (ja) |
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JP6692635B2 (ja) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | 連結型ネジ溝スペーサ、および真空ポンプ |
JP7187186B2 (ja) * | 2018-06-27 | 2022-12-12 | エドワーズ株式会社 | 真空ポンプ、ステータコラム、ベースおよび真空ポンプの排気システム |
JP7371852B2 (ja) * | 2019-07-17 | 2023-10-31 | エドワーズ株式会社 | 真空ポンプ |
CN114352553B (zh) * | 2021-12-31 | 2024-01-09 | 北京中科科仪股份有限公司 | 一种旋涡机构及复合分子泵 |
EP4155549A1 (de) | 2022-11-14 | 2023-03-29 | Pfeiffer Vacuum Technology AG | Vakuumpumpe mit verbessertem saugvermögen der holweck-pumpstufe |
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2014
- 2014-06-06 CN CN201480035337.4A patent/CN105324578B/zh active Active
- 2014-06-06 EP EP14820662.6A patent/EP3018354B1/en active Active
- 2014-06-06 KR KR1020157032197A patent/KR102167210B1/ko active IP Right Grant
- 2014-06-06 US US14/899,917 patent/US10260509B2/en active Active
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JP2015014259A (ja) | 2015-01-22 |
CN105324578B (zh) | 2018-05-15 |
US10260509B2 (en) | 2019-04-16 |
JP6174398B2 (ja) | 2017-08-02 |
EP3018354A1 (en) | 2016-05-11 |
EP3018354B1 (en) | 2020-10-14 |
KR20160029733A (ko) | 2016-03-15 |
KR102167210B1 (ko) | 2020-10-19 |
EP3018354A4 (en) | 2017-03-15 |
US20160138602A1 (en) | 2016-05-19 |
CN105324578A (zh) | 2016-02-10 |
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