WO2014153889A1 - 一种紫外线掩膜板及其制备方法和封框胶的固化方法 - Google Patents
一种紫外线掩膜板及其制备方法和封框胶的固化方法 Download PDFInfo
- Publication number
- WO2014153889A1 WO2014153889A1 PCT/CN2013/078463 CN2013078463W WO2014153889A1 WO 2014153889 A1 WO2014153889 A1 WO 2014153889A1 CN 2013078463 W CN2013078463 W CN 2013078463W WO 2014153889 A1 WO2014153889 A1 WO 2014153889A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- light
- blocking strip
- ultraviolet
- sealant
- mask layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Definitions
- the invention relates to the field of ultraviolet curing technology of a sealant in a liquid crystal panel forming process, in particular to an ultraviolet mask, a preparation method thereof and a curing method of the sealant. Background technique
- the sealant is a material necessary for the liquid crystal panel forming process.
- the UV cure of the sealant sealant refers to the addition of a photoinitiator or a photosensitizer to a specially formulated resin material such as ultraviolet paint, ink, adhesive, and the like.
- the photoinitiator or photosensitizer absorbs high-intensity ultraviolet light in the ultraviolet curing device to generate active radicals or ionic groups, thereby initiating polymerization, crosslinking and grafting reactions, thereby converting the resin material from a liquid state to a few seconds. Solid state.
- the sealant is usually UV-cured by the method shown in FIG. 1, and the ultraviolet light curing device contains four ultraviolet irradiation lamps (not shown in FIG. 1), each of which is leftward. Move back and forth at an angle of 15 degrees to the right to illuminate the display substrate ⁇ (including the array substrate and the color filter substrate) to cure the sealant 2 .
- a metal film is usually formed on the ultraviolet mask 5 at a position corresponding to the effective area 4 of the display screen to form a metal mask layer 6'.
- the intensity of the ultraviolet light emitted by the ultraviolet light will gradually decrease, and the ultraviolet curing time of the sealant will be extended accordingly, such as: 7000mj (megajoule) light intensity
- the irradiation time is roughly increased from about 80s in the initial stage to about 100s. It can be seen that the existing frame sealant has a longer UV curing time and a lower production efficiency.
- the substrate of the ultraviolet mask 5 is a transparent material, such as glass
- the ultraviolet mask 5 is not provided with a metal mask layer 6, and the position is transparent to the ultraviolet light 3, and therefore, from FIG. It can be seen that the ultraviolet light 3 may illuminate the effective area 4 of the display screen, and the display substrate 1 is damaged. Thereby affecting the quality of the liquid crystal panel. Summary of the invention
- the main object of the present invention is to provide an ultraviolet mask, a preparation method thereof and a method for curing a sealant, which can improve the ultraviolet curing rate of the sealant and prevent ultraviolet light from being irradiated to the display screen. region.
- an ultraviolet ray mask comprising: a transparent substrate and a metal mask layer disposed on the transparent substrate; wherein the metal mask layer is provided with a light blocking strip at a pattern edge position.
- the light blocking strip is made of a reflective material.
- the reflective material can comprise a metallic reflective material.
- the metal reflective material can include aluminum.
- the light blocking strip is vertically disposed at a position of a pattern edge of the metal mask layer.
- the height of the light blocking strip is b, the b > ( a / 2 ) / tgl 5 degrees, and the a is the width of the sealing glue.
- a method for preparing an ultraviolet mask comprising: sequentially depositing a metal mask layer and a photosensitive layer on a transparent substrate; forming a pattern of the metal mask layer by a patterning process, wherein the method further The method includes: setting a light blocking strip at a graphic edge position of the metal mask layer by a patterning process.
- the light blocking strip is made of a reflective material.
- the light blocking strip is disposed perpendicular to a graphical edge position of the metal mask layer.
- the light blocking strip is set to a height b, and the b > ( a / 2 ) / tgl 5 degrees, the a is the width of the sealant.
- a method for curing a sealant wherein the sealant is cured by using an ultraviolet mask, the ultraviolet mask comprising a transparent substrate and a metal mask layer disposed on the transparent substrate,
- the graphic mask edge of the metal mask layer is provided with a light blocking strip, and the method comprises: locating an inner edge of the sealant on the same vertical plane as an outer edge of the light blocking strip disposed on the ultraviolet mask position.
- the light blocking strip is made of a reflective material.
- the light blocking strip is vertically disposed at a position of a pattern edge of the metal mask layer.
- the height of the light blocking strip is b, the b > ( a / 2 ) / tgl 5 degrees, and the a is the width of the sealant.
- FIG. 1 is a schematic structural view of a conventional frame sealing glue ultraviolet curing method
- FIG. 2 is a schematic flow chart of a method for preparing an ultraviolet mask according to the present invention
- FIG. 3 is a schematic cross-sectional view of a UV mask after depositing a metal mask layer and a photosensitive layer
- FIG. 4 is a schematic view showing the structure of exposing an ultraviolet mask to which a metal mask layer and a photosensitive layer have been deposited
- FIG. 5 is a schematic cross-sectional view of an ultraviolet mask after forming a metal mask layer pattern
- FIG. 6 is a schematic cross-sectional view of an ultraviolet mask formed with a light blocking strip according to the present invention.
- FIG. 7 is a schematic structural view showing an embodiment of a method for curing a frame sealant according to the present invention. detailed description
- the basic idea of the invention is: providing a light blocking strip at the edge of the metal mask layer pattern of the ultraviolet mask to block ultraviolet light from being irradiated to the effective area of the display screen, and reflecting ultraviolet light to illuminate the sealing frame glue, thereby improving The UV curing rate of the sealant.
- the light blocking strip is preferably a reflective material; preferably a metal reflective material such as aluminum, tantalum, molybdenum or the like, and the material of the light blocking strip is preferably aluminum because of the highest reflectivity of aluminum therein.
- Step 201 sequentially depositing a metal mask layer and a photosensitive layer on a transparent substrate.
- a metal mask layer material is applied through a coating process. More specifically, for example, a layer of metal molybdenum is deposited on a transparent substrate 7, such as a glass substrate, and then a photosensitive layer material is deposited on the metal mask layer 6 to form a photosensitive layer 8, as shown in FIG.
- Step 202 Form a pattern of the metal mask layer by a patterning process.
- the effective portion is shielded by the light blocking plate 9, the unoccluded region is exposed by the ultraviolet light exposure process, and the ineffective portion is developed by the ultraviolet light 3; then the photoresist of the photosensitive portion 10 is dissolved by chemical action, The photoresist which is not photosensitive is cured to obtain a structure as shown in FIG. Thereafter, the ineffective portion of the molybdenum metal is etched away using a chemical gas such as sulfur hexafluoride or chlorine gas to finally obtain a metal mask layer pattern, as shown in FIG. Figure 5 shows the structure of the existing UV mask.
- a chemical gas such as sulfur hexafluoride or chlorine gas
- Step 203 A light blocking strip is disposed at a position of a pattern edge of the metal mask layer by a patterning process.
- a reflective material preferably a metal reflective material such as aluminum, tantalum, molybdenum or the like, is deposited on the transparent substrate 7 on which the pattern of the metal mask layer 6 is formed. Since aluminum has the highest reflectivity, a layer may be deposited thereon.
- the metal aluminum is formed into a pattern of the light-blocking strip 11 by a patterning process such as exposure and etching. As shown in FIG. 6, the light-blocking strip 11 is vertically disposed at a position of a pattern edge of the metal mask layer 6.
- the ultraviolet light 3 emitted from the ultraviolet irradiation lamp (not shown in FIG. 7) is reflected by the light blocking strip 11 onto the sealant 2, or directly irradiated. Go to the sealant 2 on the seal.
- the distance between the ultraviolet ray irradiation lamp and the reflection normal line 12 is usually set to about 900 mm. Since the ultraviolet ray irradiation lamp is moved back and forth by tilting 15 degrees to the left and right, the maximum angle of the ultraviolet light 3 is 15 degrees.
- the reflection line in Fig. 7 is the reflection line of the light corresponding to the maximum angle of the ultraviolet light 3 irradiation.
- the ultraviolet light 3 cannot be irradiated to the effective area 4 of the display screen and can be totally or partially reflected onto the sealant 2, it is necessary to set the minimum height of the light blocking strip.
- the reflected light of the ultraviolet light 3 is irradiated to the center position of the sealant 2 .
- ZBDE is the angle of ultraviolet light 3 irradiation
- the ⁇ value changes with the ultraviolet irradiation angle ZBDE
- the maximum angle of ZBDE is 15 Degree
- the maximum value of the angle ⁇ is 15 degrees
- the width a of the sealant 2 is known.
- the inner edge of the sealant is located at the same vertical plane as the outer edge of the light barrier provided on the ultraviolet mask. Due to the existence of the control precision in the actual application process, there is a certain distance between the light blocking strip and the display screen, which is not closely attached, and the control precision is usually 0.2 mm.
- the width of the light blocking strip 11 c there is no special requirement, and the width is set to 0.5 mm according to the actual process capability of the production line.
- the edge of the light-blocking strip provided by the invention is located at the same vertical position as the edge of the sealant, so that the ultraviolet light that is directed to the effective area of the display screen can be reflected on the sealant or other areas of the display screen, thereby preventing The purpose of ultraviolet light to the effective area of the display ensures the quality of the liquid crystal panel.
- the light blocking strip can reflect the ultraviolet light onto the sealing frame glue, and the ultraviolet light directly irradiated onto the sealing frame glue, the ultraviolet light irradiated by the sealing frame rubber area is denser, so that the ultraviolet of the sealing frame glue can be accelerated.
- the curing rate increases the utilization of the UV lamp and increases productivity.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
Abstract
一种紫外线掩膜板及其制备方法和封框胶的固化方法,所述紫外线掩膜板包括:透明基板(7)和透明基板(7)上设置的金属掩膜层(6);所述金属掩膜层(6)的图形边缘位置设有挡光条(11)。通过设置挡光条,可以进一步防止紫外光照射到显示屏的有效区域,保证液晶面板的质量。此外,挡光条可以用于将紫外光反射至封框胶,从而加快封框胶固化速率,提高产能。
Description
一种紫外线掩膜板及其制备方法和封框胶的固化方法 技术领域
本发明涉及液晶面板成盒工艺中的封框胶的紫外固化技术领域, 尤其涉 及一种紫外线掩膜板及其制备方法和封框胶的固化方法。 背景技术
在液晶面板的对盒工艺中,为防止阵列基板和彩膜基板之间的液晶流出, 需要在阵列基板和彩膜基板的四周边缘处涂覆封框胶, 从而形成液晶盒, 达 到液晶导光和显示的目的。 因此, 封框胶是液晶面板成盒工艺中所必需的材 料。
有一类封框胶为紫外固化的封框胶,所述封框胶的紫外固化是指在特殊 配方的树脂材料, 如: 紫外线涂料、 油墨、 粘合剂等中加入光引发剂或光敏 剂, 所述光引发剂或光敏剂吸收紫外线光固化设备中的高强度紫外光后, 产 生活性自由基或离子基, 从而引发聚合、 交联和接枝反应, 使树脂材料在数 秒内由液态转化为固态。
现有技术中, 通常采用如图 1所示的方法对封框胶进行紫外固化, 紫外 线光固化设备中含有 4个紫外线照射灯(图 1未示出),所述紫外线照射灯各 自以向左和向右各倾斜 15度角度来回移动, 以对显示屏基板 Γ (包括阵列 基板和彩膜基板)进行照射, 以使封框胶 2,固化。 为了防止紫外光 3,照射到 显示屏的有效区域 4,,通常在紫外线掩膜板 5,对应显示屏的有效区域 4,的位 置设置一层金属膜形成金属掩膜层 6'。
对于紫外线照射灯来说, 随着使用时间的增长, 紫外线照射灯发出的紫 外光的光强会逐渐衰减,封框胶的紫外固化时间则会相应延长,如:在 7000mj (兆焦耳)光强下,照射时间大致由使用初期的 80s增加到 100s左右。可见, 现有封框胶的紫外固化时间较长, 生产效率不高。
此外, 由于紫外线掩膜板 5,的基板为透明材料, 如玻璃, 因此紫外线掩 膜板 5,上未设置金属掩膜层 6,的位置可透过紫外光 3,, 因此, 从图 1可以看 出, 紫外光 3,可能会照射到显示屏的有效区域 4,, 显示屏基板 1,遭到破坏,
从而影响液晶面板的质量。 发明内容
有鉴于此, 本发明的主要目的在于提供一种紫外线掩膜板及其制备方法 和封框胶的固化方法, 可提高封框胶的紫外固化速率, 且能防止紫外光照射 到显示屏的有效区域。
根据本发明实施例, 提供一种紫外线掩膜板, 其包括: 透明基板和透明 基板上设置的金属掩膜层; 其中, 所述金属掩膜层的图形边缘位置设有挡光 条。
优选, 所述挡光条选用反光材料。
例如, 所述反光材料可以包括金属反光材料。
例如, 所述金属反光材料可以包括铝。
优选, 所述挡光条垂直设置于所述金属掩膜层的图形边缘位置。
优选, 所述挡光条的高度为 b, 所述 b > ( a/2 ) / tgl5度, 所述 a为封框 胶的宽度。
根据本发明实施例, 还提供一种紫外线掩膜板的制备方法, 其包括: 在 透明基板上顺序沉积金属掩膜层和感光层; 通过构图工艺形成金属掩膜层的 图形, 其中该方法还包括: 通过构图工艺在所述金属掩膜层的图形边缘位置 设置挡光条。
优选, 所述挡光条选用反光材料制成。
优选, 将所述挡光条设置为垂直于所述金属掩膜层的图形边缘位置。 优选, 将所述挡光条设置为高度为 b, 所述 b > ( a/2 ) / tgl5度, 所述 a 为封框胶的宽度。
根据本发明实施例, 提供一种封框胶的固化方法, 其中, 采用紫外线掩 膜板对封框胶进行固化, 所述紫外线掩膜板包括透明基板和透明基板上设置 的金属掩膜层, 所述金属掩膜层的图形边缘位置设有挡光条, 所述方法包括 使所述封框胶的内侧边缘与所述紫外线掩膜板上设置的挡光条的外侧边缘位 于同一竖直面位置。
优选, 所述挡光条选用反光材料。
优选, 所述挡光条垂直设置于所述金属掩膜层的图形边缘位置。
优选, 所述挡光条的高度为 b, 所述 b > ( a/2 ) / tgl5度, 所述 a为封框 胶的宽度。 附图说明
为了更清楚地说明本发明实施例的技术方案, 下面将对实施例的附图作 筒单地介绍,显而易见地,下面描述中的附图仅仅涉及本发明的一些实施例, 而非对本发明的限制。
图 1为现有封框胶紫外固化方法实现结构示意图;
图 2为本发明紫外线掩膜板的制备方法流程示意图;
图 3为沉积金属掩膜层和感光层后的紫外线掩膜板截面示意图; 图 4为对已沉积金属掩膜层和感光层的紫外线掩膜板进行曝光的结构示 意图;
图 5为形成金属掩膜层图形后的紫外线掩膜板截面示意图;
图 6为本发明形成有挡光条的紫外线掩膜板截面示意图;
图 7为本发明封框胶紫外固化方法实施例实现结构示意图。 具体实施方式
为使本发明实施例的目的、 技术方案和优点更加清楚, 下面将结合本发 明实施例的附图,对本发明实施例的技术方案进行清楚、 完整地描述。显然, 所描述的实施例是本发明的一部分实施例, 而不是全部的实施例。 基于所描 述的本发明的实施例, 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例, 都属于本发明保护的范围。
本发明的基本思想是: 在紫外线掩膜板金属掩膜层图形的边缘位置设置 挡光条, 以阻挡紫外光照射到显示屏的有效区域, 并能反射紫外光以照射到 封框胶, 提高封框胶的紫外固化速率。
所述挡光条优选为反光材料; 优选为金属反光材料, 如; 铝、 钕、 钼等, 由于其中铝的反光率最高, 所述挡光条的材料优选为铝。
下面结合附图及具体实施例对本发明作进一步详细说明。
图 2为本发明紫外线掩膜板的制备方法流程示意图, 如图 2所示, 包括 如下步骤 201至 203。
步骤 201 : 在透明基板上顺序沉积金属掩膜层和感光层。
例如, 通过镀膜工艺将一层金属掩膜层材料。 更具体, 例如, 将一层金 属钼沉积在透明基板 7, 如玻璃基板上, 之后在所述金属掩膜层 6上沉积一 层感光层材料形成感光层 8, 如图 3所示。
步骤 202: 通过构图工艺形成金属掩膜层的图形。
例如, 利用挡光板 9将有效部分遮挡起来, 通过紫外光曝光工艺使未被 遮挡区域感光, 无效部分通过紫外光 3照射后形成显影; 再通过化学作用使 感光部分 10的光刻胶溶解,将没有感光的光刻胶固化,得到如图 4所示的结 构。 之后, 利用六氟化硫、 或氯气等化学气体将无效部分的金属钼刻蚀掉, 最终得到金属掩膜层图形, 如图 5所示。 图 5所示即为现有紫外线掩膜板的 结构示意图。
上述两个步骤形成金属掩膜层图形的过程可采用现有技术实现。
步骤 203:通过构图工艺在所述金属掩膜层的图形边缘位置设置挡光条。 例如,在形成有金属掩膜层 6的图形的透明基板 7上沉积一层反光材料, 优选金属反光材料, 如; 铝、 钕、 钼等, 由于其中铝的反光率最高, 这里可 沉积一层金属铝,并通过曝光和刻蚀等构图工艺形成挡光条 11的图形,如图 6所示, 所述挡光条 11垂直设置于所述金属掩膜层 6的图形边缘位置。
关于挡光条 11的高度,需考虑紫外线掩膜板的使用方法进行确定。如图 7所示, 本发明所述紫外线掩膜板在使用过程中, 紫外线照射灯(图 7未示 出)发出的紫外光 3经挡光条 11反射到封框胶 2上、 或直接照射到封框胶 2 上。 所述紫外线照射灯距离反射法线 12的距离通常设置为 900mm左右, 由 于紫外线照射灯以向左和向右各倾斜 15度角度来回移动进行照射,所以紫外 光 3照射最大角度为 15度,设图 7中的反射线即为紫外光 3照射的最大角度 对应的光线的反射线。
为了保证紫外光 3不能照射到显示屏的有效区域 4, 且能全部或部分反 射到封框胶 2上,需要设置挡光条的最小高度。在挡光条 11的设计上考虑使 紫外光 3的反射光线照射到封框胶 2的中心位置。根据反射三角形( AABC ) 与入射三角形( vDBE )相似的原理, 以及 ZBDE=Za, ZBDE即为紫外光 3照射的角度, α值随着紫外线照射角度 ZBDE的变化而变化, ZBDE的最 大角度为 15度, 因此 α角的最大值为 15度, 已知封框胶 2的宽度 a, 设所
述封框胶 2的内侧边缘(与显示屏的有效区域 4相连的边缘)与挡光条 11 的外侧边缘位于同一竖直面位置, 因此, 1§01=1§15度= ( a/2 ) /b, 所述 b为挡 光条 11的高度, α为经挡光条 11反射的反射光与竖直方向的夹角, 因此可 得挡光条 11的高度 b= ( a/2 ) / tga, 需要说明的是, 如果 α小于等于 15度, 那么挡光条 11的高度大于等于封框胶 2的宽度 a的一半除以 tgl5度,即: b> ( a/2 ) / tgl5度, 即当 α等于 15度时, 可以得到挡光条的最小高度。
这里需要说明的是, 封框胶 2的宽度 a与显示屏的尺寸相关, 根据上述 关系, 挡光条的最小高度与封框胶的宽度 a有关。 例如: 如果封框胶 2的宽 度 a为 1.8mm, 那么计算所得 b=3.358mm。 因此, 挡光条 11的最小理论高 度为 3.358mm。
利用本发明所述紫外线掩膜板对封框胶进行固化时, 所述封框胶的内侧 边缘与所述紫外线掩膜板上设置的挡光条的外侧边缘位于同一竖直面位置。 由于考虑实际应用过程中的管控精度的存在, 所述挡光条与显示屏之间有一 定距离, 并未紧贴, 所述管控精度通常为 0.2mm。
关于挡光条 11的宽度 c没有特殊要求,根据产线的实际工艺能力, 宽度 设为 0.5mm即可。
本发明设置的挡光条的边缘与封框胶的边缘位于同一竖直位置, 因此可 将射向显示屏的有效区域的紫外光反射到封框胶上或显示屏的其他区域, 达 到了防止紫外光照射到显示屏的有效区域的目的, 保证了液晶面板的质量。
此外, 由于挡光条可将紫外光反射到封框胶上, 与直接照射到封框胶上 的紫外光共同作用, 封框胶区域照射的紫外光更密集, 因此可加快封框胶的 紫外固化速率, 进而提高紫外线照射灯的利用率, 并可提高产能。
以上所述, 仅为本发明的较佳实施例而已, 并非用于限定本发明的保护 范围。
Claims
权利要求书
I、一种紫外线掩膜板,包括:透明基板和透明基板上设置的金属掩膜层; 其中, 所述金属掩膜层的图形边缘位置设有挡光条。
2、根据权利要求 1所述的紫外线掩膜板, 其中, 所述挡光条选用反光材 料。
3、根据权利要求 2所述的紫外线掩膜板, 其中, 所述反光材料包括金属 反光材料。
4、根据权利要求 3所述的紫外线掩膜板, 其中, 所述金属反光材料包括 铝。
5、 根据权利要求 1-4任一项所述的紫外线掩膜板, 其中, 所述挡光条垂 直设置于所述金属掩膜层的图形边缘位置。
6、 根据权利要求 1-4任一项所述的紫外线掩膜板, 其中, 所述挡光条的 高度为 b, 所述 b > ( a/2 ) / tgl5度, 所述 a为封框胶的宽度。
7、一种紫外线掩膜板的制备方法, 包括: 在透明基板上顺序沉积金属掩 膜层和感光层; 通过构图工艺形成金属掩膜层的图形;
其中, 该方法还包括: 通过构图工艺在所述金属掩膜层的图形边缘位置 设置挡光条。
8、 根据权利要求 7所述的方法, 其中, 所述挡光条选用反光材料制成。
9、根据权利要求 7或 8所述的方法, 其中, 将所述挡光条设置为垂直于 所述金属掩膜层的图形边缘位置。
10、 根据权利要求 7-9中任一项所述的方法, 其中, 将所述挡光条设置 为高度为 b, 所述 b > ( a/2 ) / tgl5度, 所述 a为封框胶的宽度。
I I、 一种封框胶的固化方法, 其中, 采用紫外线掩膜板对封框胶进行固 化, 所述紫外线掩膜板包括透明基板和透明基板上设置的金属掩膜层, 所述 金属掩膜层的图形边缘位置设有挡光条, 所述方法包括使所述封框胶的内侧 边缘与所述紫外线掩膜板上设置的挡光条的外侧边缘位于同一竖直面位置。
12、根据权利要求 11所述的固化方法,其中,所述挡光条选用反光材料。
13、 根据权利要求 11或 12所述的固化方法, 其中, 所述挡光条垂直设 置于所述金属掩膜层的图形边缘位置。
14、 根据权利要求 11-13 中任一项所述的固化方法, 其中, 所述挡光条 的高度为 b, 所述 b> (a/2) /tgl5度, 所述 a为封框胶的宽度。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310098781.8 | 2013-03-26 | ||
| CN201310098781.8A CN104076597B (zh) | 2013-03-26 | 2013-03-26 | 一种紫外线掩膜板及其制备方法和封框胶的固化方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2014153889A1 true WO2014153889A1 (zh) | 2014-10-02 |
Family
ID=51597956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2013/078463 Ceased WO2014153889A1 (zh) | 2013-03-26 | 2013-06-28 | 一种紫外线掩膜板及其制备方法和封框胶的固化方法 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104076597B (zh) |
| WO (1) | WO2014153889A1 (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614946A (zh) * | 2015-01-16 | 2015-05-13 | 上海凸版光掩模有限公司 | 基于滴定工装的ut装脚工艺 |
| CN109581757B (zh) * | 2018-12-25 | 2020-10-30 | 深圳市华星光电半导体显示技术有限公司 | 紫外光固化设备及框胶固化方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020027803A (ko) * | 2000-10-05 | 2002-04-15 | 윤종용 | 반도체 장치의 사진 공정에 사용되는 마스크 |
| TW200736845A (en) * | 2006-03-22 | 2007-10-01 | Kuender & Co Ltd | Mask and exposure method for producing high depth photoresist |
| CN101196690A (zh) * | 2006-12-05 | 2008-06-11 | 上海广电Nec液晶显示器有限公司 | 一种遮光掩膜板的制造方法及其应用 |
| JP2009009058A (ja) * | 2007-06-29 | 2009-01-15 | Toppan Printing Co Ltd | カラーフィルタ基板、その製造に用いるフォトマスク、及び液晶表示装置 |
| JP2009109843A (ja) * | 2007-10-31 | 2009-05-21 | Toppan Printing Co Ltd | フォトマスク及びそれを用いたカラーフィルタ基板の製造方法 |
| CN101900933A (zh) * | 2009-06-01 | 2010-12-01 | 北京京东方光电科技有限公司 | 使用掩模板曝光工艺的基板及其对位方法 |
-
2013
- 2013-03-26 CN CN201310098781.8A patent/CN104076597B/zh not_active Expired - Fee Related
- 2013-06-28 WO PCT/CN2013/078463 patent/WO2014153889A1/zh not_active Ceased
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020027803A (ko) * | 2000-10-05 | 2002-04-15 | 윤종용 | 반도체 장치의 사진 공정에 사용되는 마스크 |
| TW200736845A (en) * | 2006-03-22 | 2007-10-01 | Kuender & Co Ltd | Mask and exposure method for producing high depth photoresist |
| CN101196690A (zh) * | 2006-12-05 | 2008-06-11 | 上海广电Nec液晶显示器有限公司 | 一种遮光掩膜板的制造方法及其应用 |
| JP2009009058A (ja) * | 2007-06-29 | 2009-01-15 | Toppan Printing Co Ltd | カラーフィルタ基板、その製造に用いるフォトマスク、及び液晶表示装置 |
| JP2009109843A (ja) * | 2007-10-31 | 2009-05-21 | Toppan Printing Co Ltd | フォトマスク及びそれを用いたカラーフィルタ基板の製造方法 |
| CN101900933A (zh) * | 2009-06-01 | 2010-12-01 | 北京京东方光电科技有限公司 | 使用掩模板曝光工艺的基板及其对位方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104076597B (zh) | 2016-03-02 |
| CN104076597A (zh) | 2014-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4382791B2 (ja) | 光線方向制御素子の製造方法 | |
| CN104656306B (zh) | 设置有黑矩阵的基板及其制造方法、显示装置 | |
| JP5365571B2 (ja) | スクリーン印刷版およびその製造方法 | |
| CN102023406B (zh) | 液晶显示面板及其制造方法 | |
| WO2015054905A1 (zh) | 固化框胶用遮光罩的制作方法 | |
| WO2017049878A1 (zh) | 一种光刻胶图案的制作方法、彩色滤光片及显示装置 | |
| TW201609275A (zh) | 使用光學透明樹脂的顯示模組製造方法 | |
| WO2014194634A1 (zh) | 显示屏的制作方法 | |
| CN104102094A (zh) | 掩模挡板及其制造方法 | |
| JPWO2019188861A1 (ja) | 黒色構造体、ならびにそれを備えた自発光画像表示装置 | |
| WO2017004905A1 (zh) | 一种光罩及彩膜基板的制备方法 | |
| CN106547143A (zh) | 显示基板的制作方法、显示基板及显示装置 | |
| US9568843B2 (en) | Exposure method and exposure device | |
| CN104076597B (zh) | 一种紫外线掩膜板及其制备方法和封框胶的固化方法 | |
| KR102068957B1 (ko) | 감광성 유기물질의 절연층을 포함하는 표시장치용 기판 및 그 제조방법 | |
| WO2019061556A1 (zh) | 一种显示器的基板的制造方法及光罩 | |
| CN105629590A (zh) | 一种封框胶涂覆装置及涂覆方法 | |
| US11309374B2 (en) | Mask component | |
| US20130141705A1 (en) | Exposure apparatus and exposure method | |
| CN102692815B (zh) | 光掩模及其制造方法 | |
| CN102591156B (zh) | 曝光装置及曝光方法 | |
| US20130333834A1 (en) | Manufacturing method of display | |
| CN107908048B (zh) | 一种隔垫物及其制作方法、显示装置 | |
| CN103941548A (zh) | 具有吸光层的感光层结构与使用感光层结构的光刻工艺 | |
| CN111352316B (zh) | 光阻漂白与烘烤方法及其装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13879726 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 13879726 Country of ref document: EP Kind code of ref document: A1 |