WO2014104098A1 - 複合基板、その製法及び弾性波デバイス - Google Patents
複合基板、その製法及び弾性波デバイス Download PDFInfo
- Publication number
- WO2014104098A1 WO2014104098A1 PCT/JP2013/084675 JP2013084675W WO2014104098A1 WO 2014104098 A1 WO2014104098 A1 WO 2014104098A1 JP 2013084675 W JP2013084675 W JP 2013084675W WO 2014104098 A1 WO2014104098 A1 WO 2014104098A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- thickness
- piezoelectric substrate
- less
- composite
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 137
- 239000002131 composite material Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title abstract description 12
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 21
- 238000009826 distribution Methods 0.000 claims abstract description 15
- 238000005498 polishing Methods 0.000 claims abstract description 10
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000005284 excitation Effects 0.000 claims description 8
- 239000012788 optical film Substances 0.000 claims description 6
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 13
- 239000010410 layer Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- -1 langasite Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
- H10N30/086—Shaping or machining of piezoelectric or electrostrictive bodies by machining by polishing or grinding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
Definitions
- the present invention relates to a composite substrate, a manufacturing method thereof, and an acoustic wave device.
- CVD and smart cut can provide thin films with very uniform thickness, they have the following problems. 1) CVD ⁇ The crystallinity is very bad. -The direction of the crystal axis is limited. 2) Damage due to smart cut ion implantation cannot be fully recovered and crystal defects remain.
- the present invention has been made in view of such problems, and an object of the present invention is to obtain a piezoelectric single crystal thin film having high crystallinity and having an arbitrary crystal axis and a uniform thickness.
- the method for producing the composite substrate of the present invention includes: (A) mirror polishing the piezoelectric substrate side of a bonded substrate having a diameter of 4 inches or more formed by bonding the piezoelectric substrate and the support substrate until the thickness of the piezoelectric substrate is 3 ⁇ m or less; (B) creating data of thickness distribution of the mirror-polished piezoelectric substrate; (C) By performing processing with an ion beam processing machine based on the data of the thickness distribution, the thickness of the piezoelectric substrate is 3 ⁇ m or less, the difference between the maximum value and the minimum value of the thickness is 60 nm or less on all planes, X-rays Obtaining a composite substrate having a crystallinity of a half-value width of a rocking curve obtained by diffraction of 100 arcsec or less; Is included.
- the composite substrate of the present invention is A composite substrate having a diameter of 4 inches or more formed by bonding a piezoelectric substrate and a support substrate,
- the piezoelectric substrate has a thickness of 3 ⁇ m or less, the difference between the maximum value and the minimum value of the thickness is 60 nm or less on all planes of the piezoelectric substrate, and the rocking curve obtained by X-ray diffraction has a half-value width of 100 arcsec or less. It is.
- This composite substrate can be easily obtained by the manufacturing method described above.
- the composite substrate can be used for an acoustic wave device.
- FIG. 2 is a cross-sectional photograph of the piezoelectric substrate of Example 1.
- FIG. 4 is a cross-sectional photograph of the piezoelectric substrate of Example 2.
- the composite substrate of this embodiment has a diameter of 4 inches or more formed by bonding a piezoelectric substrate and a support substrate.
- the piezoelectric substrate has a thickness of 3 ⁇ m or less, and the difference between the maximum value and the minimum value of the thickness is 60 nm or less over the entire plane of the piezoelectric substrate.
- the piezoelectric substrate exhibits crystallinity where the half-value width of the rocking curve obtained by X-ray diffraction is 100 arcsec or less.
- Examples of the material of the piezoelectric substrate include lithium tantalate, lithium niobate, lithium niobate-lithium tantalate solid solution single crystal, lithium borate, langasite, and quartz.
- the material of the supporting substrate is silicon, sapphire, aluminum nitride, alumina, alkali-free glass, borosilicate glass, quartz glass, lithium tantalate, lithium niobate, lithium niobate-lithium tantalate solid solution single crystal, lithium borate, Examples include langasite and crystal.
- the support substrate has the same diameter as the piezoelectric substrate and a thickness of 100 to 1000 ⁇ m, preferably 150 to 500 ⁇ m.
- the composite substrate of this embodiment can be used as an acoustic wave device by forming an electrode pattern on the surface of a piezoelectric substrate.
- a bonded substrate (composite substrate before polishing) having a diameter of 4 inches or more formed by bonding a piezoelectric substrate having a thickness of 100 to 1000 ⁇ m and a supporting substrate having a thickness of 100 to 1000 ⁇ m is 3 ⁇ m in thickness. Mirror finish until below.
- This bonded substrate is a substrate obtained by bonding a piezoelectric substrate and a support substrate through an organic adhesive layer, or is integrated by direct bonding. Examples of the material for the organic adhesive layer include an epoxy resin and an acrylic resin.
- Direct bonding is performed by activating the respective bonding surfaces of the piezoelectric substrate and the support substrate and then pressing both substrates in a state where the bonding surfaces face each other. Examples of the method for activating the bonding surface include irradiation of an ion beam of an inert gas (such as argon) to the bonding surface, irradiation of plasma or a neutral atom beam, and the like.
- the piezoelectric substrate side of the bonded substrate is first polished with a cylinder processing machine, then polished with a lapping machine, and further until the thickness of the piezoelectric substrate becomes 3 ⁇ m or less with a CMP polishing machine. Mirror polishing may be performed. In this way, the thickness of the piezoelectric substrate can be efficiently reduced to 3 ⁇ m or less.
- CMP is an abbreviation for chemical mechanical polishing.
- ⁇ Process (b) Data on the thickness distribution of the mirror-polished piezoelectric substrate is created.
- thickness distribution data may be created by measuring the thickness of a mirror-polished piezoelectric substrate with an optical film thickness measuring instrument using laser interference. In this way, thickness distribution data can be created with high accuracy.
- the piezoelectric substrate is processed by an ion beam processing machine.
- the piezoelectric substrate has a thickness of 3 ⁇ m or less, the difference between the maximum value and the minimum value of the thickness is 60 nm or less in all planes, and the rocking curve obtained by X-ray diffraction has a half-value width of 100 arcsec or less. A substrate is obtained.
- step (c) thickness distribution data may be input to an ion beam processing machine to determine a beam irradiation time at each point on the surface of the piezoelectric substrate, and processing may be performed using the beam irradiation time. In this way, processing can be performed with high accuracy.
- the beam output value is constant, and the beam irradiation time may be increased as the thickness increases.
- the thickness distribution data may be input to an ion beam processing machine to determine the beam output value at each point on the surface of the piezoelectric substrate, and processing may be performed using the beam output value. Good. Even in this case, processing can be performed with high accuracy.
- the beam irradiation time is fixed, and the beam output value may be increased as the thickness increases.
- the processing is preferably performed using an ion beam processing machine equipped with a DC excitation type Ar beam source.
- an ion beam processing machine equipped with a plasma excitation type Ar beam source may be used, but the ion beam processing machine equipped with a DC excitation type Ar beam source is more suitable for the surface of the piezoelectric substrate. This is preferable because the damage given is further reduced.
- the problems of CVD and smart cut are solved, and a piezoelectric single crystal thin film having a uniform thickness and high crystallinity and having an arbitrary crystal axis is obtained. Can do.
- the composite substrate manufactured by this manufacturing method can be used for an acoustic wave device.
- Example 1 A silicon substrate (support substrate) and a LiTaO 3 substrate (piezoelectric substrate) having a thickness of 230 ⁇ m and a diameter of 4 inches polished on both sides were prepared. These substrates were introduced into a vacuum chamber maintaining a degree of vacuum on the order of 10 ⁇ 6 Pa, and the bonded surfaces were held facing each other. The bonded surfaces of both substrates were irradiated with Ar beam for 80 seconds, and the inactive layer on the surface was removed and activated. Next, the substrates were brought into contact with each other and bonded under a load of 1200 kgf. After taking out the bonded substrate thus obtained, the piezoelectric substrate side was ground by a grinder processing machine until the thickness became 10 ⁇ m.
- the bonded substrate was set on a lapping machine and polished with a diamond slurry until the thickness of the piezoelectric substrate became 3 ⁇ m. Further, the surface of the piezoelectric substrate was mirror-polished with a CMP grinder until the thickness became 0.8 ⁇ m. At this time, colloidal silica was used as an abrasive.
- the thickness of the piezoelectric substrate was measured with an optical film thickness measuring device using laser interference, the thickness was within the range of ⁇ 0.1 ⁇ m over the entire surface of the piezoelectric substrate centered on 0.8 ⁇ m. The total number of measurement points was 80 on all planes except for the chamfered end of the piezoelectric substrate.
- the bonded substrate thus obtained was set in an ion beam processing machine equipped with a plasma excitation type Ar beam source.
- the thickness data of the piezoelectric substrate measured by the optical film thickness measuring instrument described above was imported into an ion beam processing machine, and the processing amount at each measurement point of the piezoelectric substrate, here, the irradiation time of the Ar beam was determined.
- the irradiation time of the beam was adjusted by the feeding speed of the bonded substrate.
- an Ar beam having a constant output was irradiated on the entire surface of the piezoelectric substrate while changing the feeding speed of the bonded substrate.
- the beam spot was 6 mm in diameter.
- RF plasma was excited under the conditions of an ion acceleration voltage of 1300 eV and an ion current of 30 mA. Actual processing time was approximately 5 minutes.
- the center film thickness was 0.76 ⁇ m, and the difference between the maximum value and the minimum value was 24 nm over the entire surface.
- the half-width (FWHM) was 80 arcsec, which was exactly the same as that of a bulk single crystal, and it was confirmed that no deterioration in crystallinity occurred.
- This composite substrate can be used for an elastic wave filter to obtain a device with small frequency variation and excellent filter characteristics.
- Example 2 A bonded substrate was produced in the same manner as in Example 1.
- the thickness of the piezoelectric substrate was measured with an optical film thickness measuring instrument using laser interference, the thickness was within the range of ⁇ 0.12 ⁇ m over the entire surface of the piezoelectric substrate centered at 1.0 ⁇ m.
- the total number of measurement points was 80 as in Example 1.
- the bonded substrate thus obtained was set in an ion beam processing machine equipped with a DC excitation type Ar beam source.
- the thickness data of the piezoelectric substrate measured by the optical film thickness measuring instrument described above was imported into an ion beam processing machine, and the processing amount at each measurement point of the piezoelectric substrate, here, the output value of the Ar beam was determined.
- the output of the Ar beam was changed between 20 and 100 W, and the entire surface of the piezoelectric substrate was irradiated with the Ar beam.
- the beam spot was 6 mm in diameter. Since the feed speed is constant, the beam irradiation time is the same over the entire surface of the piezoelectric substrate.
- the center film thickness was 0.92 ⁇ m, and the difference between the maximum value and the minimum value was 50 nm over the entire surface.
- the rocking curve was measured with an X-ray diffractometer, the half-width (FWHM) was 65 arcsec, which was exactly the same as that of a bulk single crystal, and it was confirmed that no deterioration in crystallinity occurred.
- FIG. 1 is a cross-sectional photograph of Example 1
- FIG. 2 is a cross-sectional photograph of Example 2.
- the thickness of the damaged layer (black layer on the surface) of Example 1 was 10 nm
- the thickness of the damaged layer of Example 2 was 3 nm. From this, it was found that the ion beam processing machine provided with the DC excitation type Ar beam source caused less damage to the surface than the ion beam processing machine provided with the plasma excitation type Ar beam source.
- an electrode of a SAW resonator was formed on the piezoelectric substrate of the composite substrate of Examples 1 and 2.
- the electrode pitch was 4 ⁇ m.
- the resonator characteristics having a center frequency of about 930 MHz were not different from those of a resonator formed on a normal piezoelectric substrate. That is, it was found that a damaged layer having a thickness of about 10 nm does not affect the characteristics.
- the present invention can be used for an acoustic wave device such as a SAW filter.
Abstract
Description
1)CVD
・結晶性が非常に悪い。
・結晶軸の方向が限定される。
2)スマートカット
・イオン注入によるダメージが十分に回復できず、結晶欠陥が残る。
(a)圧電基板と支持基板とを接合してなる直径4インチ以上の貼り合わせ基板の圧電基板側を、前記圧電基板の厚みが3μm以下になるまで鏡面研磨する工程と、
(b)前記鏡面研磨した圧電基板の厚み分布のデータを作成する工程と、
(c)前記厚み分布のデータに基づいてイオンビーム加工機で加工を行うことにより、前記圧電基板の厚みが3μm以下、その厚みの最大値と最小値の差が全平面で60nm以下、X線回折により得られるロッキングカーブの半値幅が100arcsec以下の結晶性を示す複合基板を得る工程と、
を含むものである。
圧電基板と支持基板とを接合してなる直径4インチ以上の複合基板であって、
前記圧電基板の厚みが3μm以下、その厚みの最大値と最小値の差は前記圧電基板の全平面で60nm以下、X線回折により得られるロッキングカーブの半値幅が100arcsec以下の結晶性を示す
ものである。
厚みが100~1000μmの圧電基板と厚みが100~1000μmの支持基板とを接合してなる直径4インチ以上の貼り合わせ基板(研磨前の複合基板)の圧電基板側を、圧電基板の厚みが3μm以下になるまで鏡面研磨する。この貼り合わせ基板は、圧電基板と支持基板とを有機接着層を介して貼り合わせたものであるか、直接接合により一体化したものである。有機接着層の材質としては、例えばエポキシ樹脂やアクリル樹脂などが挙げられる。直接接合は、圧電基板と支持基板のそれぞれの接合面を活性化した後、両接合面を向かい合わせにした状態で両基板を押圧することにより行う。接合面を活性化する方法は、例えば、接合面への不活性ガス(アルゴンなど)のイオンビームの照射のほか、プラズマや中性原子ビームの照射などが挙げられる。
鏡面研磨した圧電基板の厚み分布のデータを作成する。例えば、鏡面研磨した圧電基板の厚みをレーザーの干渉を用いた光学式膜厚測定器で測定して厚み分布のデータを作成してもよい。こうすれば、厚み分布のデータを精度よく作成することができる。
厚み分布のデータに基づいてイオンビーム加工機で圧電基板に加工を行う。こうすることにより、圧電基板の厚みが3μm以下、その厚みの最大値と最小値の差が全平面で60nm以下、X線回折により得られるロッキングカーブの半値幅が100arcsec以下の結晶性を示す複合基板が得られる。
両面研磨された厚みが230μm、直径が4インチのシリコン基板(支持基板)、LiTaO3基板(圧電基板)をそれぞれ用意した。これら基板を10-6Pa台の真空度を保つ真空チャンバーに導入し、接合面を対向させ保持した。両基板の接合面にArビームを80sec間照射し、表面の不活性層を除去し活性化した。ついで互いの基板を接触させ、1200kgfの荷重をかけて接合した。このようにして得られた貼り合わせ基板を取り出した後、グラインダー加工機により圧電基板側をその厚みが10μmになるまで研削した。ついで、その貼り合わせ基板をラップ加工機にセットし、ダイヤモンドスラリーを用いて圧電基板の厚みが3μmになるまで研磨した。更に、その圧電基板の表面をCMP研磨機で厚みが0.8μmになるまで鏡面研磨した。この時、研磨剤としてコロイダルシリカを用いた。レーザーの干渉を用いた光学式膜厚測定器で圧電基板の厚みを測定したところ、その厚みは0.8μmを中心として圧電基板の全面で±0.1μmの範囲に収まっていた。測定点は、圧電基板の面取りがされた端部を除く全平面で合計80点とした。
実施例1と同じようにして貼り合わせ基板を作製した。レーザーの干渉を用いた光学式膜厚測定器で圧電基板の厚みを測定したところ、その厚みは1.0μmを中心として圧電基板の全面で±0.12μmの範囲に収まっていた。測定点は、実施例1と同じく合計80点とした。
Claims (8)
- (a)圧電基板と支持基板とを接合してなる直径4インチ以上の貼り合わせ基板の圧電基板側を、前記圧電基板の厚みが3μm以下になるまで鏡面研磨する工程と、
(b)前記鏡面研磨した圧電基板の厚み分布のデータを作成する工程と、
(c)前記厚み分布のデータに基づいてイオンビーム加工機で加工を行うことにより、前記圧電基板の厚みが3μm以下、その厚みの最大値と最小値の差が全平面で60nm以下、X線回折により得られるロッキングカーブの半値幅が100arcsec以下の結晶性を示す複合基板を得る工程と、
を含む複合基板の製法。 - 前記工程(a)では、前記貼り合わせ基板の圧電基板側を、まずクラインダー加工機で研磨し、次いでラップ加工機で研磨し、更にCMP研磨機で前記圧電基板の厚みが3μm以下になるまで鏡面研磨する、
請求項1に記載の複合基板の製法。 - 前記工程(b)では、前記鏡面研磨した圧電基板の厚みをレーザーの干渉を用いて光学式膜厚測定器で測定して厚み分布のデータを作成する、
請求項1又は2に記載の複合基板の製法。 - 前記工程(c)では、前記厚み分布のデータを前記イオンビーム加工機に入力して前記圧電基板の表面の各点におけるビーム照射時間を決定し、該ビーム照射時間を用いて加工を行う、
請求項1~3のいずれか1項に記載の複合基板の製法。 - 前記工程(c)では、前記厚み分布のデータを前記イオンビーム加工機に入力して前記圧電基板の表面の各点におけるビームの出力値を決定し、該ビームの出力値を用いて加工を行う、
請求項1~3のいずれか1項に記載の複合基板の製法。 - 前記工程(c)では、前記イオンビーム加工機として、DC励起型Arビーム源を備えたイオンビーム加工機を用いる、
請求項1~5のいずれか1項に記載の複合基板の製法。 - 圧電基板と支持基板とを接合してなる直径4インチ以上の複合基板であって、
前記圧電基板の厚みが3μm以下、その厚みの最大値と最小値の差は前記圧電基板の全平面で60nm以下、X線回折により得られるロッキングカーブの半値幅が100arcsec以下の結晶性を示す、複合基板。 - 請求項7に記載の複合基板を用いた弾性波デバイス。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020157016846A KR102133336B1 (ko) | 2012-12-26 | 2013-12-25 | 복합 기판, 그 제법 및 탄성파 디바이스 |
CN201380066077.2A CN104871431B (zh) | 2012-12-26 | 2013-12-25 | 复合基板及其制造方法,以及弹性波装置 |
DE112013006227.5T DE112013006227T5 (de) | 2012-12-26 | 2013-12-25 | Verbundsubstrat, Herstellungsverfahren dafür und akustische-Wellen-Vorrichtung |
JP2014554494A JP6265915B2 (ja) | 2012-12-26 | 2013-12-25 | 複合基板の製法 |
US14/737,655 US9917246B2 (en) | 2012-12-26 | 2015-06-12 | Composite substrate, production method thereof, and acoustic wave device |
US15/810,714 US10622544B2 (en) | 2012-12-26 | 2017-11-13 | Composite substrate and acoustic wave device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261745898P | 2012-12-26 | 2012-12-26 | |
US61/745898 | 2012-12-26 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/737,655 Continuation US9917246B2 (en) | 2012-12-26 | 2015-06-12 | Composite substrate, production method thereof, and acoustic wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014104098A1 true WO2014104098A1 (ja) | 2014-07-03 |
Family
ID=51021176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/084675 WO2014104098A1 (ja) | 2012-12-26 | 2013-12-25 | 複合基板、その製法及び弾性波デバイス |
Country Status (7)
Country | Link |
---|---|
US (2) | US9917246B2 (ja) |
JP (2) | JP6265915B2 (ja) |
KR (1) | KR102133336B1 (ja) |
CN (1) | CN104871431B (ja) |
DE (1) | DE112013006227T5 (ja) |
TW (1) | TWI584505B (ja) |
WO (1) | WO2014104098A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015146512A (ja) * | 2014-02-03 | 2015-08-13 | 京セラクリスタルデバイス株式会社 | 水晶加工装置及び方法 |
JP6097896B1 (ja) * | 2015-09-15 | 2017-03-15 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
JP6100984B1 (ja) * | 2015-09-15 | 2017-03-22 | 日本碍子株式会社 | 複合基板の製造方法 |
WO2017047605A1 (ja) * | 2015-09-15 | 2017-03-23 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
JP2018093496A (ja) * | 2012-12-26 | 2018-06-14 | 日本碍子株式会社 | 複合基板及び弾性波デバイス |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3051979B1 (fr) * | 2016-05-25 | 2018-05-18 | Soitec | Procede de guerison de defauts dans une couche obtenue par implantation puis detachement d'un substrat |
TWI780103B (zh) * | 2017-05-02 | 2022-10-11 | 日商日本碍子股份有限公司 | 彈性波元件及其製造方法 |
JP2019029941A (ja) * | 2017-08-02 | 2019-02-21 | 株式会社ディスコ | 弾性波デバイス用基板の製造方法 |
DE102017221267A1 (de) * | 2017-11-28 | 2019-05-29 | Siemens Aktiengesellschaft | Wicklungsanordnung für zumindest zwei versetzt taktende leistungselektronische Wandler und Wandleranordnung |
CN111092148B (zh) * | 2019-12-27 | 2022-08-09 | 厦门市三安集成电路有限公司 | 一种压电材料复合基板的制造方法 |
JP2023552014A (ja) * | 2021-09-01 | 2023-12-14 | 福建晶安光電有限公司 | フィルタ用基板の加工方法、基板及びtc-sawフィルタ |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996004713A1 (fr) * | 1994-08-05 | 1996-02-15 | Japan Energy Corporation | Dispositif a ondes acoustiques de surface et procede de production |
JPH0992895A (ja) * | 1995-07-19 | 1997-04-04 | Matsushita Electric Ind Co Ltd | 圧電素子とその製造方法 |
JP2004200432A (ja) * | 2002-12-19 | 2004-07-15 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004221816A (ja) * | 2003-01-14 | 2004-08-05 | Nippon Dempa Kogyo Co Ltd | 水晶振動子の製造方法 |
JP2005174991A (ja) * | 2003-12-08 | 2005-06-30 | Seiko Epson Corp | 半導体装置の製造方法、半導体装置、回路基板および電子機器 |
JP2007214215A (ja) * | 2006-02-07 | 2007-08-23 | Showa Shinku:Kk | エッチング装置、エッチング方法及びプログラム |
JP2008301066A (ja) * | 2007-05-30 | 2008-12-11 | Yamajiyu Ceramics:Kk | タンタル酸リチウム(lt)又はニオブ酸リチウム(ln)単結晶複合基板 |
WO2011013553A1 (ja) * | 2009-07-30 | 2011-02-03 | 日本碍子株式会社 | 複合基板及びその製造方法 |
JP2011124738A (ja) * | 2009-12-10 | 2011-06-23 | Murata Mfg Co Ltd | 圧電デバイスの製造方法 |
JP2012060259A (ja) * | 2010-09-06 | 2012-03-22 | Fujitsu Ltd | 振動子の作製方法、振動子および発振器 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759753A (en) | 1995-07-19 | 1998-06-02 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric device and method of manufacturing the same |
JPH09208399A (ja) * | 1996-01-31 | 1997-08-12 | Kyocera Corp | 圧電基体及び弾性表面波装置 |
US20030030119A1 (en) * | 2001-08-13 | 2003-02-13 | Motorola, Inc. | Structure and method for improved piezo electric coupled component integrated devices |
US20040070312A1 (en) * | 2002-10-10 | 2004-04-15 | Motorola, Inc. | Integrated circuit and process for fabricating the same |
JP4712450B2 (ja) * | 2004-06-29 | 2011-06-29 | 日本碍子株式会社 | AlN結晶の表面平坦性改善方法 |
JP2007243918A (ja) * | 2006-02-08 | 2007-09-20 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
JP2008013390A (ja) | 2006-07-04 | 2008-01-24 | Sumitomo Electric Ind Ltd | AlN結晶基板の製造方法、AlN結晶の成長方法およびAlN結晶基板 |
JP4743258B2 (ja) | 2008-10-31 | 2011-08-10 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
JP5389627B2 (ja) * | 2008-12-11 | 2014-01-15 | 信越化学工業株式会社 | ワイドバンドギャップ半導体を積層した複合基板の製造方法 |
JP5500966B2 (ja) * | 2008-12-25 | 2014-05-21 | 日本碍子株式会社 | 複合基板及び金属パターンの形成方法 |
JP5549167B2 (ja) * | 2009-09-18 | 2014-07-16 | 住友電気工業株式会社 | Sawデバイス |
KR101374303B1 (ko) * | 2009-11-26 | 2014-03-14 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 디바이스 및 압전 디바이스의 제조방법 |
JP5429200B2 (ja) * | 2010-05-17 | 2014-02-26 | 株式会社村田製作所 | 複合圧電基板の製造方法および圧電デバイス |
JP5447682B2 (ja) * | 2010-09-28 | 2014-03-19 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
JP5796316B2 (ja) | 2011-03-22 | 2015-10-21 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
WO2013031617A1 (ja) * | 2011-08-26 | 2013-03-07 | 株式会社村田製作所 | 圧電デバイス、および、圧電デバイスの製造方法 |
CN104871431B (zh) * | 2012-12-26 | 2018-04-10 | 日本碍子株式会社 | 复合基板及其制造方法,以及弹性波装置 |
-
2013
- 2013-12-25 CN CN201380066077.2A patent/CN104871431B/zh active Active
- 2013-12-25 DE DE112013006227.5T patent/DE112013006227T5/de active Pending
- 2013-12-25 JP JP2014554494A patent/JP6265915B2/ja active Active
- 2013-12-25 KR KR1020157016846A patent/KR102133336B1/ko active IP Right Grant
- 2013-12-25 WO PCT/JP2013/084675 patent/WO2014104098A1/ja active Application Filing
- 2013-12-26 TW TW102148381A patent/TWI584505B/zh active
-
2015
- 2015-06-12 US US14/737,655 patent/US9917246B2/en active Active
-
2017
- 2017-11-13 US US15/810,714 patent/US10622544B2/en active Active
- 2017-12-11 JP JP2017236975A patent/JP2018093496A/ja active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996004713A1 (fr) * | 1994-08-05 | 1996-02-15 | Japan Energy Corporation | Dispositif a ondes acoustiques de surface et procede de production |
JPH0992895A (ja) * | 1995-07-19 | 1997-04-04 | Matsushita Electric Ind Co Ltd | 圧電素子とその製造方法 |
JP2004200432A (ja) * | 2002-12-19 | 2004-07-15 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004221816A (ja) * | 2003-01-14 | 2004-08-05 | Nippon Dempa Kogyo Co Ltd | 水晶振動子の製造方法 |
JP2005174991A (ja) * | 2003-12-08 | 2005-06-30 | Seiko Epson Corp | 半導体装置の製造方法、半導体装置、回路基板および電子機器 |
JP2007214215A (ja) * | 2006-02-07 | 2007-08-23 | Showa Shinku:Kk | エッチング装置、エッチング方法及びプログラム |
JP2008301066A (ja) * | 2007-05-30 | 2008-12-11 | Yamajiyu Ceramics:Kk | タンタル酸リチウム(lt)又はニオブ酸リチウム(ln)単結晶複合基板 |
WO2011013553A1 (ja) * | 2009-07-30 | 2011-02-03 | 日本碍子株式会社 | 複合基板及びその製造方法 |
JP2011124738A (ja) * | 2009-12-10 | 2011-06-23 | Murata Mfg Co Ltd | 圧電デバイスの製造方法 |
JP2012060259A (ja) * | 2010-09-06 | 2012-03-22 | Fujitsu Ltd | 振動子の作製方法、振動子および発振器 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018093496A (ja) * | 2012-12-26 | 2018-06-14 | 日本碍子株式会社 | 複合基板及び弾性波デバイス |
US10622544B2 (en) | 2012-12-26 | 2020-04-14 | Ngk Insulators, Ltd. | Composite substrate and acoustic wave device |
JP2015146512A (ja) * | 2014-02-03 | 2015-08-13 | 京セラクリスタルデバイス株式会社 | 水晶加工装置及び方法 |
JP6097896B1 (ja) * | 2015-09-15 | 2017-03-15 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
JP6100984B1 (ja) * | 2015-09-15 | 2017-03-22 | 日本碍子株式会社 | 複合基板の製造方法 |
WO2017047604A1 (ja) * | 2015-09-15 | 2017-03-23 | 日本碍子株式会社 | 複合基板の製造方法 |
WO2017047605A1 (ja) * | 2015-09-15 | 2017-03-23 | 日本碍子株式会社 | 複合基板及び圧電基板の厚み傾向推定方法 |
US9935257B2 (en) | 2015-09-15 | 2018-04-03 | Ngk Insulators, Ltd. | Production method for composite substrate |
US10566518B2 (en) | 2015-09-15 | 2020-02-18 | Ngk Insulators, Ltd. | Composite substrate and thickness-tendency estimating method for piezoelectric substrate |
Also Published As
Publication number | Publication date |
---|---|
US20150280107A1 (en) | 2015-10-01 |
CN104871431A (zh) | 2015-08-26 |
TW201448298A (zh) | 2014-12-16 |
CN104871431B (zh) | 2018-04-10 |
JPWO2014104098A1 (ja) | 2017-01-12 |
JP2018093496A (ja) | 2018-06-14 |
KR20150100696A (ko) | 2015-09-02 |
KR102133336B1 (ko) | 2020-07-13 |
TWI584505B (zh) | 2017-05-21 |
JP6265915B2 (ja) | 2018-01-24 |
US20180083184A1 (en) | 2018-03-22 |
US10622544B2 (en) | 2020-04-14 |
DE112013006227T5 (de) | 2015-10-01 |
US9917246B2 (en) | 2018-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6265915B2 (ja) | 複合基板の製法 | |
US11239405B2 (en) | Method of producing a composite substrate | |
KR101794488B1 (ko) | 복합 기판의 제조 방법 | |
DE112017001539B4 (de) | Verbindungsverfahren | |
JP2007134889A (ja) | 複合圧電基板 | |
US11070189B2 (en) | Joint and elastic wave element | |
US20230216463A1 (en) | Method for manufacturing composite substrate provided with piezoelectric single crystal film | |
JP2019077607A (ja) | タンタル酸リチウム単結晶基板及びこれの接合基板とこの製造法及びこの基板を用いた弾性表面波デバイス | |
CN108352442B (zh) | 复合基板及压电基板的厚度趋势推定方法 | |
US20220149811A1 (en) | Bonded body and acoustic wave element | |
JP2018093329A (ja) | 弾性波素子 | |
JP2015159499A (ja) | 複合基板の製法及び複合基板 | |
US11411547B2 (en) | Joint and elastic wave element | |
JP2002171008A (ja) | 圧電素子片及び圧電デバイスの製造方法 | |
JP2022068747A (ja) | 酸化物単結晶ウエハ、複合基板用ウエハ、複合基板、酸化物単結晶ウエハの加工方法、酸化物単結晶ウエハの製造方法、複合基板用ウエハの製造方法および複合基板の製造方法 | |
JP2011124628A (ja) | 複合圧電チップ及び複合圧電チップの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13867310 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2014554494 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20157016846 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112013006227 Country of ref document: DE Ref document number: 1120130062275 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13867310 Country of ref document: EP Kind code of ref document: A1 |