WO2014097543A1 - 成膜装置および成膜方法 - Google Patents

成膜装置および成膜方法 Download PDF

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Publication number
WO2014097543A1
WO2014097543A1 PCT/JP2013/006891 JP2013006891W WO2014097543A1 WO 2014097543 A1 WO2014097543 A1 WO 2014097543A1 JP 2013006891 W JP2013006891 W JP 2013006891W WO 2014097543 A1 WO2014097543 A1 WO 2014097543A1
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WIPO (PCT)
Prior art keywords
spray
spray nozzle
raw material
material liquid
sprayed
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Application number
PCT/JP2013/006891
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English (en)
French (fr)
Japanese (ja)
Inventor
衛 奥本
奥田　則之
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ダイキン工業株式会社
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Publication of WO2014097543A1 publication Critical patent/WO2014097543A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • B05B5/08—Plant for applying liquids or other fluent materials to objects
    • B05B5/082—Plant for applying liquids or other fluent materials to objects characterised by means for supporting, holding or conveying the objects
    • B05B5/084—Plant for applying liquids or other fluent materials to objects characterised by means for supporting, holding or conveying the objects the objects lying on, or being supported above conveying means, e.g. conveyor belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/04—Sheets of definite length in a continuous process

Definitions

  • the present invention relates to a film forming apparatus and a film forming method for forming a film on an object by electrostatic spraying.
  • Patent Document 1 discloses a film forming apparatus that sprays a raw material liquid from a plurality of openings arranged in a row in order to form a film on a wide surface.
  • the droplets sprayed from the openings are charged. Innumerable droplets sprayed from the openings fly while spreading in a generally conical shape and adhere to the object. For this reason, in the vicinity of the surface of the object, the distance between the droplets sprayed from the adjacent openings is shortened.
  • the droplets ejected from each opening are charged with the same polarity. Therefore, when droplets sprayed from adjacent openings near the surface of the object approach each other, a Coulomb force acting in a direction repelling each other acts on each droplet. For this reason, when the raw material liquid is sprayed from a plurality of openings arranged in a row, almost no liquid droplets reach the portion located between adjacent openings on the surface of the object, and a coating is applied to the entire surface of the object. There was a possibility that it could not be formed.
  • the present invention has been made in view of such a point, and the object thereof is to reliably apply to the entire surface of an object when a raw material liquid is sprayed from a plurality of locations by electrostatic spraying to form a film on the object. It is to form a film on.
  • the first invention is directed to an electrostatic spray type film forming apparatus that forms a film on the surface of the object (20) by spraying a raw material liquid onto the object (20).
  • the spray unit (30) having a plurality of spray nozzles (42, 52) and the raw material liquid are charged droplets and sprayed from the spray nozzle (42, 52) to the object (20).
  • a moving mechanism (15) that moves relative to the first spray nozzle (42) and the second spray nozzle (52), the spray section (30).
  • the adhesion position of the raw material liquid sprayed from the second spray nozzle (52) to the object (20) is the object to the spray part (30). It is shifted in the relative movement direction of (20).
  • the film forming apparatus (10) of the first invention is provided with a first spray nozzle (42) and a second spray nozzle (52) in the spray section (30).
  • the voltage application unit (70) applies a voltage between the spray nozzle (42, 52) and the object (20)
  • the raw material liquid is sprayed from the spray nozzle (42, 52).
  • the droplet-form raw material liquid sprayed from the spray nozzle (42, 52) adheres to the surface of the object (20), and a film is formed by the attached raw material liquid.
  • the moving mechanism (15) moves one of the object (20) and the spray unit (30) relative to the other.
  • each spray nozzle ( 42, 52) the raw material liquid adheres to the band-like region.
  • the first spray nozzle (42) and the second spray nozzle (52) in the direction intersecting the relative movement direction of the object (20) with respect to the spray unit (30). ) are alternately arranged.
  • the adjoining positions of the first spray nozzle (42) and the second spray nozzle (52) adjacent to the target (20) of the raw material liquid sprayed from each of the target (20) ) In the relative movement direction. For this reason, the adhesion position of the raw material liquid sprayed from each spray nozzle (42, 52) to the object (20) is straight in the direction intersecting the relative movement direction of the object (20) with respect to the spray part (30).
  • the liquid material sprayed from the first spray nozzle (42) and the spray from the second spray nozzle (52) are sprayed.
  • the distance from the droplet-shaped raw material liquid is increased. Therefore, an electrical repulsive force acting between the droplet-form raw material liquid sprayed from the first spray nozzle (42) and the liquid-form raw material liquid sprayed from the second spray nozzle (52). And the raw material liquid adheres to the entire surface of the object (20).
  • the first spray nozzle (42) supplies the raw material liquid in a direction of relative movement of the object (20) with respect to the spray section (30).
  • the second spray nozzle (52) sprays the raw material liquid in a direction opposite to the moving direction of the object (20) relative to the spray section (30).
  • the spray direction of the raw material liquid from the 1st spray nozzle (42), and the 2nd spray nozzle (52) The spraying direction of the raw material liquid from is opposite.
  • the liquid material in the form of droplets sprayed from the first spray nozzle (42) and the material in the form of liquid droplets sprayed from the second spray nozzle (52) Increases the distance to the liquid.
  • the first spray nozzle (42) has a tip surface (45) inclined with respect to the axial center of the first spray nozzle (42). (30) is arranged so as to face the front side of the relative movement direction of the object (20) with respect to (30), and the second spray nozzle (52) is located with respect to the axis of the second spray nozzle (52).
  • the inclined tip surface (55) is arranged so as to face the rear side of the relative movement direction of the object (20) with respect to the spray part (30).
  • the tip surfaces (45, 55) of the spray nozzles (42, 52) are inclined with respect to the respective axial directions.
  • the tip surface (45) of the first spray nozzle (42) and the tip surface (55) of the second spray nozzle (52) Is facing the other side.
  • a 1st spray nozzle (42) sprays raw material liquid from the front end surface (45) which faced the front side of the relative movement direction of the target object (20) with respect to the spray part (30).
  • the second spray nozzle (52) sprays the raw material liquid from the tip surface (55) facing the rear side in the relative movement direction of the object (20) with respect to the spray section (30).
  • the first deflection electrode (60, 61) having the same polarity as the liquid droplet sprayed from the first spray nozzle (42) and the object (20) for the spray section (30) )
  • the second deflection nozzle having the same polarity as the droplet sprayed from the second spray nozzle (52).
  • Electrode (60, 62) having the same polarity as the droplet sprayed from the second spray nozzle
  • the film forming apparatus (10) is provided with the deflection electrodes (60, 61, 62).
  • the potential of each deflection electrode (60, 61, 62) has the same polarity as the potential of the droplet sprayed from the corresponding spray nozzle (42, 52).
  • the first deflection electrode (60, 61) is disposed on the rear side of the tip of the first spray nozzle (42). An electrical repulsive force acts between the droplet-shaped raw material liquid sprayed from the first spray nozzle (42) and the first deflecting electrode (60, 61).
  • the droplet-form raw material liquid sprayed from the 1st spray nozzle (42) scatters toward the relative moving direction of the target object (20) with respect to the spray part (30).
  • the second deflection electrode (60, 62) is arranged in front of the tip of the second spray nozzle (52) in the relative movement direction of the object (20) with respect to the spray section (30). .
  • An electrical repulsive force acts between the liquid material in the form of droplets sprayed from the second spray nozzle (52) and the second deflecting electrodes (60, 62). For this reason, the droplet-form raw material liquid sprayed from the 2nd spray nozzle (52) scatters in the direction opposite to the relative moving direction of the target object (20) with respect to the spray part (30).
  • the second spray nozzle (52 ) After starting the spraying of the raw material liquid from the first spray nozzle (42), the object (20) is relatively separated from the spraying part (30). At the time of spraying, the spraying of the raw material liquid from the first spray nozzle (42) is stopped after the spraying of the raw material liquid from the second spray nozzle (52) is stopped.
  • the object (20) relatively approaching the spray section (30) first enters an area where the raw material liquid sprayed from the second spray nozzle (52) reaches, and then the first spray It enters the area where the raw material liquid sprayed from the nozzle (42) reaches.
  • the object (20) moving away from the spray section (30) first deviates from the region where the raw material liquid sprayed from the second spray nozzle (52) reaches, and then the first spray nozzle. From (42), it deviates from the area where the sprayed raw material liquid reaches.
  • the raw material liquid sprayed from the spray nozzle (42, 52) is the target (20 ) Will not adhere. Therefore, in this case, if the raw material liquid is continuously sprayed from the spray nozzle (42, 52), the raw material liquid is wasted.
  • the spraying of the raw material liquid from the second spray nozzle (52) is started first, and then the second The spraying of the raw material liquid from one spray nozzle (42) is started. That is, while the object (20) exists only in the region where the raw material liquid sprayed from the second spray nozzle (52) reaches, the spraying of the raw material liquid from the first spray nozzle (42) is stopped. The raw material liquid is sprayed from the second spray nozzle (52).
  • the 1st and 2nd spray nozzle (42,52) Spray the raw material liquid.
  • the spraying of the raw material liquid from the second spray nozzle (52) is first stopped, and then the second The spraying of the raw material liquid from one spray nozzle (42) is stopped. That is, the first and second spray nozzles (42, 52) while the object (20) exists in the region where the raw material liquid sprayed from the first and second spray nozzles (42, 52) reaches. Spray the raw material liquid. Then, while the object (20) exists only in the region where the raw material liquid sprayed from the first spray nozzle (42) reaches, the spraying of the raw material liquid from the second spray nozzle (52) is stopped. The raw material liquid is sprayed from the first spray nozzle (42).
  • the position of the tip of the first spray nozzle (42) and the position of the tip of the second spray nozzle (52) are as follows.
  • the object (20) is displaced in the relative moving direction with respect to the spraying part (30).
  • the position is different.
  • the raw material liquid is sprayed from the tip of each spray nozzle (42, 52) whose positions in the moving direction of the object (20) relative to the spray section (30) are different from each other.
  • the seventh invention is the above-mentioned sixth invention, comprising a shielding member (69) for shielding between the first spray nozzle (42) and the second spray nozzle (52).
  • the shielding member (69) blocks between the first spray nozzle (42) and the second spray nozzle (52).
  • the raw material liquid is sprayed from the first spray nozzle (42) toward one side of the shielding member (69), and from the second spray nozzle (52) to the other side of the shielding member (69).
  • the raw material liquid is sprayed toward it. That is, the shielding member (69) is formed between the droplet-form raw material liquid sprayed from the first spray nozzle (42) and the liquid-form raw material liquid sprayed from the second spray nozzle (52). Block.
  • the potential of the shielding member (69) is the same as that of the droplet sprayed from the spray nozzle (42, 52). A voltage is applied so that
  • a voltage is applied to the shielding member (69).
  • the potential of the shielding member (69) has the same polarity as the potential of the droplet sprayed from the spray nozzle. For this reason, an electrical repulsive force acts on the droplet sprayed from each spray nozzle (42, 52) and the shielding member (69). In other words, the Coulomb force acting in the direction of moving the droplet away from the shielding member (69) acts on the droplet sprayed from each spray nozzle (42, 52).
  • the spray section (30) is connected to all the first spray nozzles (42) to connect each first spray nozzle ( 42) a first header member (41) that distributes the raw material liquid, and a second header member (41) that is connected to all the second spray nozzles (52) and distributes the raw material liquid to each second spray nozzle (52). 2 header members (51).
  • two header members (41, 51) are provided in the spray section (30).
  • a first spray nozzle (42) is connected to the first header member (41).
  • the first spray nozzle (42) sprays the raw material liquid supplied from the first header member (41).
  • a second spray nozzle (52) is connected to the second header member (51).
  • the second spray nozzle (52) sprays the raw material liquid supplied from the second header member (51).
  • the tenth invention is directed to a film forming method for forming a film on the surface of an object (20) by spraying a raw material liquid onto the object (20). And while moving one of the spray part (30) having the plurality of spray nozzles (42, 52) and the spray part (30) relative to the other, the raw material liquid becomes a charged droplet.
  • the spray unit By applying a voltage between the spray nozzle (42, 52) and the object (20) so as to be sprayed from the spray nozzle (42, 52) to the object (20), the spray unit ( From the first spray nozzle (42) and the second spray nozzle (52) of the spray section (30) alternately arranged in the direction intersecting the relative movement direction of the object (20) relative to 30)
  • the adhesion position of the raw material liquid sprayed from the first spray nozzle (42) to the object (20), and the target object (20) of the raw material liquid sprayed from the second spray nozzle (52) So that the attachment position to the target is shifted in the relative movement direction of the object (20) with respect to the spray part (30). It is intended to spray the postal solution.
  • a voltage is applied between the spray nozzle (42, 52) and the object (20) by the voltage application unit (70), and the raw material liquid is sprayed from the spray nozzle (42, 52). Is done.
  • the droplet-form raw material liquid sprayed from the spray nozzle (42, 52) adheres to the surface of the object (20), and a film is formed by the attached raw material liquid.
  • one of the object (20) and the spray section (30) is moved relative to the other. When the object (20) moves relative to the spray part (30) while the raw material liquid is being sprayed from the spray nozzles (42, 52), each spray nozzle ( 42, 52), the raw material liquid adheres to the band-like region.
  • the first spray nozzle (42) and the second spray nozzle (52) are arranged in a direction crossing the relative movement direction of the object (20) with respect to the spray section (30). Place them alternately. And the attachment position to the target object (20) of the raw material liquid sprayed from the 1st spray nozzle (42), and the target of the raw material liquid sprayed from the 2nd spray nozzle (52) to the target object (20) The attachment position is shifted in the relative movement direction of the object (20) with respect to the spray portion (30).
  • the adhesion position of the raw material liquid sprayed from each spray nozzle (42, 52) to the object (20) is straight in the direction intersecting the relative movement direction of the object (20) with respect to the spray part (30).
  • the liquid material sprayed from the first spray nozzle (42) and the spray from the second spray nozzle (52) are sprayed.
  • the distance from the droplet-shaped raw material liquid is increased. Therefore, an electrical repulsive force acting between the droplet-form raw material liquid sprayed from the first spray nozzle (42) and the liquid-form raw material liquid sprayed from the second spray nozzle (52). And the raw material liquid adheres to the entire surface of the object (20).
  • the first spray nozzle (42) and the second spray nozzle (52) are alternately arranged in the direction intersecting the relative movement direction of the object (20) with respect to the spray unit (30), In the relative movement direction of the object (20) with respect to the spray unit (30), the position of the raw material liquid sprayed from the first spray nozzle (42) on the object (20) and the second spray nozzle The position of the raw material liquid sprayed from (52) on the object (20) is displaced. For this reason, in the vicinity of the surface of the object (20), the liquid material in the form of droplets sprayed from the first spray nozzle (42) and the material in the form of liquid droplets sprayed from the second spray nozzle (52).
  • the liquid material liquid droplets sprayed from the first spray nozzle (42) and the liquid material liquid droplets sprayed from the second spray nozzle (52) can be reduced. Therefore, according to the present invention, it is possible to make the liquid material in the form of droplets reach the entire surface of the object (20), and a film can be reliably formed on the entire surface of the object (20). .
  • the front end surface (45) of the first spray nozzle (42) faces the front side
  • the second spray nozzle The tip surface (55) of (52) faces the rear side.
  • the raw material liquid can be sprayed from the front end surface (45) of the first spray nozzle (42) toward the relative movement direction of the object (20) with respect to the spray section (30), and the second spray From the front end surface of the nozzle (52), the raw material liquid can be sprayed toward the side opposite to the moving direction of the object (20) relative to the spray section (30).
  • each deflection electrode (60, 61, 62) has the same polarity as the potential of the droplet sprayed from the corresponding spray nozzle (42, 52). For this reason, an electric repulsive force acts between each deflecting electrode (60, 61, 62) and the droplet-shaped raw material liquid sprayed from the corresponding spray nozzle (42, 52). Therefore, according to the present invention, the spray direction of the raw material liquid from each spray nozzle (42, 52) can be reliably controlled.
  • the timing of starting the spraying of the raw material liquid from the first spray nozzle (42) that sprays the raw material liquid in the relative movement direction of the object (20) with respect to the spraying part (30) is as follows. It is later than the timing for starting spraying the raw material liquid from the second spray nozzle (52) that sprays the raw material liquid in the direction opposite to the direction.
  • the timing which stops spraying of the raw material liquid from the 1st spray nozzle (42) which sprays a raw material liquid in the relative moving direction of the target object (20) with respect to the spray part (30) is the It is later than the timing of stopping the spraying of the raw material liquid from the second spray nozzle (52) that sprays the raw material liquid in the direction opposite to the direction.
  • the position is different.
  • the attachment position of the raw material liquid sprayed from the first spray nozzle (42) to the object (20) and the target of the raw material liquid sprayed from the second spray nozzle (52) (20) can be reliably shifted in the moving direction of the object (20) relative to the spray part (30).
  • the shielding member (69) is provided between the first spray nozzle (42) and the second spray nozzle (52).
  • the shielding member (69) is formed between the liquid material droplets sprayed from the first spray nozzle (42) and the liquid material droplets sprayed from the second spray nozzle (52). Block. For this reason, the mutual influence of the raw material liquid sprayed from each spray nozzle (42,52) can be suppressed, and the spraying state of the raw material liquid from each spray nozzle (42,52) can be stabilized. .
  • the potential of the shielding member (69) has the same polarity as the potential of the droplet sprayed from the spray nozzle. Accordingly, a Coulomb force acting in the direction of moving the droplet away from the shielding member (69) acts on the droplet sprayed from each spray nozzle (42, 52). For this reason, the spray direction of the raw material liquid from each spray nozzle (42, 52) can be stabilized, and the adhesion position of the raw material liquid sprayed from the first spray nozzle (42) to the object (20) The position of the material liquid sprayed from the second spray nozzle (52) on the object (20) is reliably shifted in the relative movement direction of the object (20) with respect to the spray part (30). Can do.
  • FIG. 1 is a schematic configuration diagram illustrating the overall configuration of the film forming apparatus according to the first embodiment.
  • FIG. 2 is a schematic perspective view showing a spray zone of the film forming apparatus of the first embodiment.
  • FIG. 3 is a cross-sectional view showing the PP cross section of FIGS. 4 and 5 and the schematic configuration of the voltage application unit and the liquid supply unit.
  • FIG. 4 is a schematic plan view showing a spray zone of the film forming apparatus according to the first embodiment.
  • FIG. 5 is a schematic front view showing a spray zone of the film forming apparatus of the first embodiment.
  • FIG. 6 is an enlarged cross-sectional view of the main part of the PP cross section of FIGS. 4 and 5.
  • FIG. 7A and 7B are views showing the operation of the film forming apparatus of Embodiment 1, wherein FIG. 7A is a cross-sectional view showing the PP cross section of FIGS. 4 and 5, and FIG. 7B is a spray of the film forming apparatus. It is a top view of a zone.
  • FIG. 8 is a view showing the operation of the film forming apparatus of Embodiment 1, and is a cross-sectional view showing the main part of the PP cross section of FIGS. 4 and 5.
  • FIG. 9 is a schematic plan view of the spray zone showing the operation of the film forming apparatus of the first embodiment.
  • FIG. 10 is a cross-sectional view corresponding to FIG. 6 of the spray unit according to the first modification of the first embodiment.
  • FIG. 11 is a cross-sectional view corresponding to FIG. 3 of the film forming apparatus according to the second modification of the first embodiment.
  • FIG. 12 is a cross-sectional view showing a cross section corresponding to FIG. 3 of the film forming apparatus of the second embodiment.
  • FIG. 13 is a schematic front view showing a spray zone of the film forming apparatus of the second embodiment.
  • FIG. 14 is a cross-sectional view showing a cross-section corresponding to FIG. 12 of a film forming apparatus according to a modification of the second embodiment.
  • FIG. 15 is a cross-sectional view showing an SS cross section of FIG. 17 and schematic configurations of a voltage application unit and a liquid supply unit.
  • FIG. 16 is a schematic plan view illustrating a spray zone of the film forming apparatus according to the third embodiment.
  • FIG. 17 is a schematic front view illustrating a schematic configuration of a spray zone, a voltage application unit, and a liquid supply unit of the film forming apparatus of the third embodiment.
  • 18A and 18B are cross-sectional views showing an enlarged main part of the spray unit of the third embodiment, where FIG. 18A shows a QQ cross section of FIG. 16, and FIG. 18B shows a RR cross section of FIG. Show.
  • FIG. 19 is an enlarged cross-sectional view showing a main part of a spray unit according to a modification of the third embodiment.
  • FIG. 19A shows a cross section corresponding to FIG. 18A, and FIG. A section corresponding to B) is shown.
  • Embodiment 1 of the Invention A first embodiment of the present invention will be described.
  • the film forming apparatus (10) of the present embodiment is for forming an antifouling film on the surface of the glass substrate (20) of the touch panel.
  • the film forming apparatus (10) of the present embodiment is an electrostatic spray type component that forms a film by adhering a raw material liquid sprayed by a so-called electrostatic spray method to the surface of a glass substrate (20) as an object.
  • the film-forming apparatus (10) has a pretreatment zone (11), a spray zone (12), and a posttreatment zone (13).
  • the film forming apparatus (10) includes a controller (14).
  • the controller (14) controls the operation of the film forming apparatus (10).
  • the film forming apparatus (10) is provided with a belt conveyor (15) for conveying the glass substrate (20).
  • the belt conveyor (15) is provided across the pretreatment zone (11), the spray zone (12), and the posttreatment zone (13), and the glass substrate (20) placed on the conductive plate (25) ,
  • the pretreatment zone (11), the spray zone (12), and the posttreatment zone (13) are conveyed in this order. That is, the belt conveyor (15) conveys the glass substrate (20) straight from left to right in FIG.
  • the belt conveyor (15) is a moving mechanism that moves the glass substrate (20) relative to a spray unit (30) described later.
  • the spray zone (12) In the pretreatment zone (11), a process for cleaning the surface of the substrate is performed. In the spray zone (12), a step of attaching the raw material liquid to the surface of the substrate is performed. As will be described in detail later, the spray zone (12) is provided with a spray section (30), a voltage application section (70), and a liquid supply section (80). In the post-processing zone (13), a step of fixing the film on the glass substrate (20) is performed. Specifically, in the post-processing zone (13), the glass substrate (20) to which the raw material liquid is attached is heated.
  • the spray zone (12) of the film forming apparatus (10) is provided with a spray section (30), a liquid supply section (80), and a voltage application section (70). ing.
  • the conductive plate (25) on which the glass substrate (20) is placed moves straight from left to right in FIGS.
  • the conductive plate (25) is a rectangular flat plate member made of a conductive resin or the like.
  • the glass substrate (20) is formed in a rectangular flat plate shape.
  • the spray unit (30) is disposed above the glass substrate (20).
  • the spray unit (30) includes a first spray unit (40) and a second spray unit (50).
  • the first spray unit (40) includes one first header member (41) and four first spray nozzles (42).
  • the second spray unit (50) includes one second header member (51) and five second spray nozzles (52).
  • the first spray unit (40) is arranged on the front side of the second spray unit (50) in the moving direction of the glass substrate (20) (that is, the relative moving direction of the glass substrate (20) with respect to the spraying part (30)).
  • the number of spray nozzles (42, 52) provided in each spray unit (40, 50) is merely an example.
  • a passage for distributing the raw material liquid to the plurality of spray nozzles (42, 52) is formed in the header member (41, 51) of each spray unit (40, 50).
  • Each header member (41, 51) is disposed in a posture in which the respective axial directions are substantially orthogonal to the moving direction of the glass substrate (20). That is, the first header member (41) and the second header member (51) are in a posture in which the respective axial directions are parallel to each other, and the moving direction of the glass substrate (20) (that is, the long side of the glass substrate (20)). (Direction) with a predetermined interval.
  • the first spray nozzle (42) is attached to the lower surface of the first header member (41).
  • a second spray nozzle (52) is attached to the lower surface of the second header member (51).
  • Each spray nozzle (42, 52) includes a base (43, 53) formed in a hollow cylindrical shape and a metal nozzle body (44, 54).
  • the material of the base (43, 53) is a non-conductive resin.
  • the material of the nozzle body (44, 54) may be a conductive resin.
  • the nozzle body (44, 54) is a thin tube having an outer diameter of about 0.3 mm and an inner diameter of about 0.1 mm.
  • Each spray nozzle (42,52) has a base (43,53) bonded to the lower surface of the header member (41,51) and a nozzle body (44,54) bonded to the lower surface of the base (43,53). Yes.
  • the nozzle body (44, 54) of each spray nozzle (42, 52) has a substantially vertical direction (that is, a direction substantially perpendicular to the surface of the glass substrate (20)). .
  • first spray nozzles (42) are arranged at equal intervals along the axial direction of the first header member (41).
  • the interval between adjacent first spray nozzles (42) that is, the interval between the central axes of adjacent nozzle bodies (44)
  • the four first spray nozzles (42) are arranged in a line at a constant pitch 2L.
  • the second spray unit (50) five second spray nozzles (52) are arranged at equal intervals along the axial direction of the second header member (51).
  • the interval between the adjacent second spray nozzles (52) (that is, the interval between the central axes of the adjacent nozzle bodies (54)) is 2L. That is, in the second spray unit (50), the five second spray nozzles (52) are arranged in a line at a constant pitch 2L.
  • the position of the first spray nozzle (42) in the first spray unit (40) is shifted by a half pitch with respect to the position of the second spray nozzle (52) in the second spray unit (50) (see FIG. 4). ).
  • the first spray nozzle (42) and the second spray nozzle (52) in a direction orthogonal to the moving direction of the glass substrate (20) that is, the short side direction of the glass substrate (20)).
  • the distance between the first spray nozzle (42) and the second spray nozzle (52) adjacent in the short side direction of the glass substrate (20) that is, the central axis of the nozzle body (44) and the nozzle body
  • the interval between the central axes of (54) is L.
  • the 1st header member (41) of the 1st spray unit (40) and the 2nd header member (51) of the 2nd spray unit (50) are glass substrates. They are arranged at a predetermined interval in the long side direction of (20). Therefore, the position of the lower end of the first spray nozzle (42) attached to the first header member (41) (that is, the lower end of the nozzle body (44)) and the first attached to the second header member (51). The position of the lower end of the two spray nozzles (52) (that is, the lower end of the nozzle body (54)) is shifted in the moving direction of the glass substrate (20).
  • the front end surface (45, 55) of the nozzle body (44, 54) of each spray nozzle (42, 52) is inclined with respect to the central axis of the nozzle body (44, 54). .
  • the inclination angle of the distal end surface (45) with respect to the center axis of the nozzle body (44) is theta 1.
  • the inclination angle of the distal end surface (55) with respect to the center axis of the nozzle body (54) is a theta 2.
  • Inclination angle theta 1 of the distal end surface of the nozzle body (44) (45) is equal to the inclination angle theta 2 of the distal end surface of the nozzle body (54) (55).
  • each 1st spray nozzle (42) of a 1st spray unit (40) the front end surface (45) of a nozzle main body (44) faces the front side (right side in FIG. 6) of the moving direction of a glass substrate (20). Yes.
  • the tip surface (55) of the nozzle body (54) faces the rear side (left side in FIG. 6) of the movement direction of the glass substrate (20). ing.
  • tip (lower end in FIG.3 and FIG.5) of the nozzle main body (44,54) of each spray nozzle (42,52) to the surface of a glass substrate (20). D are equal to each other.
  • the liquid supply part (80) includes a tank (81), an infusion pipe (82), and a pump (83).
  • the tank (81) stores the raw material liquid.
  • the raw material liquid is obtained by diluting a substance that forms an antifouling film with a solvent.
  • One end of the infusion piping (82) is connected to the bottom of the tank (81), and the other end is connected to the header member (41, 51) of each spray unit (40, 50).
  • the pump (83) is provided in the infusion pipe (82) and discharges the raw material liquid sucked from the tank (81) toward the header member (41, 51).
  • the voltage application unit (70) includes a power source (71), a ground electrode (68), a first switch (72), and a second switch (73).
  • the voltage application unit (70) includes one upper electrode (60) and two lower electrodes (66, 67).
  • the power supply (71) is a DC power supply with an output voltage of about 5 kV.
  • the positive electrode (+ electrode) of the power source (71) is connected to the nozzle bodies (44) of all the first spray nozzles (42) via the first switch (72) and to all nozzles (44) via the second switch (73).
  • Each of the two spray nozzles (52) is electrically connected to the nozzle body (54).
  • the negative (-) pole of the power source (71) is grounded.
  • the ground electrode (68) is grounded in the same manner as the negative electrode of the power source (71).
  • the ground electrode (68) is disposed below the conductive plate (25) and contacts the lower surface of the conductive plate (25) conveyed by the belt conveyor (15). That is, the ground electrode (68) is electrically connected to the conductive plate (25), and the conductive plate (25) has the same potential as the ground electrode (68).
  • the upper electrode (60) is a member made of conductive resin formed in a rod shape, and is formed in an I shape in plan view.
  • the upper electrode (60) is disposed between the tip of the nozzle body (44) of the first spray nozzle (42) and the tip of the nozzle body (54) of the second spray nozzle (52). That is, in the moving direction of the glass substrate (20), the upper electrode (60) is located behind the tip of the nozzle body (44) of the first spray nozzle (42) and the second spray nozzle (52). Located in front of the tip of the nozzle body (54). Further, as shown in FIGS.
  • the upper electrode (60) is electrically connected to the positive electrode of the power source (71).
  • the upper electrode (60) serves as a first deflection electrode corresponding to the first spray nozzle (42) and a second deflection electrode corresponding to the second spray nozzle (52).
  • each lower electrode (66, 67) is a member made of conductive resin formed in a rod shape, and is formed in a rod shape extending in the short side direction of the glass substrate (20). ing. Each lower electrode (66, 67) is disposed below the upper electrode (60) and closer to the glass substrate (20). The first lower electrode (66) is disposed on the front side of the first spray nozzle (42) in the moving direction of the glass substrate (20). The second lower electrode (67) is arranged behind the second spray nozzle (52) in the moving direction of the glass substrate (20).
  • both ends of the first lower electrode (66) are bent substantially at right angles to the second lower electrode (67) side, and both ends of the first lower electrode (67) are directed to the first lower electrode (66) side. It is bent at a right angle.
  • the first lower electrode (66) and the second lower electrode (67) are electrically connected to the positive electrode of the power source (71).
  • the film forming apparatus (10) includes the step of cleaning the glass substrate (20) in the pretreatment zone (11) and the step of attaching the raw material liquid to the glass substrate (20) in the spray zone (12). Then, the step of fixing the film to the glass substrate (20) in the post-treatment zone (13) is performed.
  • the operation performed by the film forming apparatus (10) to adhere the raw material liquid to the glass substrate (20) in the spray zone (12) will be described.
  • the film forming apparatus (10) executes a film forming method as described below.
  • each spray nozzle (42,52) When both the first switch (72) and the second switch (73) are in the ON state, the nozzle body (44,54) of each spray nozzle (42,52) is electrically connected to the positive electrode of the power supply (71). To do. Further, the conductive plate (25) on which the glass substrate (20) is placed is electrically connected to the ground electrode (68). For this reason, a voltage is applied between the nozzle body (44, 54) of each spray nozzle (42, 52) and the glass substrate (20) mounted on the conductive plate (25).
  • the tip surface (45) of the nozzle body (44) faces the front side in the moving direction of the glass substrate (20). For this reason, droplet-form raw material liquid is sprayed from the nozzle body (44) in the moving direction of the glass substrate (20).
  • the tip surface (55) of the nozzle body (54) faces the rear side in the moving direction of the glass substrate (20). For this reason, droplet-form raw material liquid is sprayed from the nozzle body (54) in the direction opposite to the moving direction of the glass substrate (20).
  • the liquid material sprayed from the nozzle body (44, 54) has a positive (+) charge. is doing.
  • An electrical repulsive force acts between the liquid material in the form of droplets having a positive (+) charge and the upper electrode (60) that is electrically connected to the positive electrode of the power source (71).
  • the distance G 1 between the center axis of the nozzle body (44) to the surface of the upper electrode (60) the distance G 2 from the central axis of the nozzle body (54) to the surface of the upper electrode (60) equal.
  • the Coulomb force in the direction of separating the droplet from the upper electrode (60) acts on the droplet sprayed from the nozzle body (44, 54) of each spray nozzle (42, 52). For this reason, the droplet sprayed from the nozzle body (44) of the first spray nozzle (42) is scattered in the direction opposite to the upper electrode (60) (that is, the moving direction of the glass substrate (20)). Go. Further, the droplet sprayed from the nozzle body (54) of the second spray nozzle (52) is directed in the direction opposite to the upper electrode (60) (that is, the direction opposite to the moving direction of the glass substrate (20)). Will be scattered.
  • an electrical repulsive force acts between the liquid raw material having a positive charge and the lower electrodes (66, 67) that are electrically connected to the positive electrode of the power source (71). That is, the Coulomb force in the direction opposite to the moving direction of the glass substrate (20) is applied to the droplet sprayed from the nozzle body (44) of the first spray nozzle (42) and reaching the vicinity of the surface of the glass substrate (20). Works. For this reason, the excessive spreading
  • the repulsive force acting during) is almost equal.
  • the spray direction of the raw material liquid from the first spray nozzle (42) and the spray direction of the raw material liquid from the second spray nozzle (52) are the upper electrode (60).
  • the reaching area (91, 92) which is the area where the droplet-shaped raw material liquid sprayed from each spray nozzle (42, 52) reaches, is a substantially circular area.
  • the liquid material in the form of droplets sprayed from the first spray nozzle (42) scatters obliquely downward to the right in the figure, while the second spray nozzle (52 The liquid material in the form of droplets sprayed from) scatters toward the lower left of the figure.
  • region (91) which is an area
  • the second reaching region (92) is separated in the long side direction of the glass substrate (20). That is, the attachment position of the raw material liquid sprayed from the first spray nozzle (42) to the glass substrate (20) and the attachment position of the raw material liquid sprayed from the second spray nozzle (52) to the glass substrate (20). Is shifted in the moving direction of the glass substrate (20).
  • the adjacent reaching regions (91, 92) are arranged in a line in the short side direction of the glass substrate (20), the adjacent reaching regions (91, 92) The interval is substantially zero.
  • the position of the first arrival region (91) corresponding to the first spray nozzle (42) and the second arrival region (corresponding to the second spray nozzle (52)) ( 92) is shifted in the long side direction of the glass substrate (20). For this reason, in the film-forming apparatus (10) of this embodiment, as shown to FIG. 7 (B), the space
  • the conductive plate (25) on which the glass substrate (20) is placed is conveyed to the spray zone (12) by the belt conveyor (15).
  • the front edge (21) of the glass substrate (20) Enters the second arrival area (92) and then enters the first arrival area (91).
  • the first arrival region (91) is a region where droplets sprayed from the first spray nozzle (42) reach
  • the second arrival region (92) is the second spray nozzle ( This is the area where droplets sprayed from (52) reach.
  • both the first switch (72) and the second switch (73) are in the OFF state. Spraying of the raw material liquid from the spray nozzle (42) and the second spray nozzle (52) is stopped.
  • the second switch (73) is switched to the ON state, and the second spray nozzle Spraying of the raw material liquid from (52) is started.
  • FIG. 9 (a) when the glass substrate (20) moves while the raw material liquid is sprayed from the second spray nozzle (52), each of the glass substrates (20) is moved from the front edge (21). The raw material liquid adheres to the band-like region that reaches the two reaching region (92).
  • the spray section (30) first starts spraying the raw material liquid from the second spray nozzle (52), and thereafter The spraying of the raw material liquid from the spray nozzle (42) is started.
  • the film forming apparatus (10) of the present embodiment a sufficient interval between the first reaching region (91) and the second reaching region (92) adjacent in the short side direction of the glass substrate (20) is secured. Therefore, the repulsive force acting between the droplet sprayed from the first spray nozzle (42) and the droplet sprayed from the second spray nozzle (52) becomes substantially zero. Therefore, on the surface of the glass substrate (20), there are a region where the raw material liquid sprayed from the first spray nozzle (42) is attached and a region where the raw material liquid sprayed from the second spray nozzle (52) is attached. There is no region between which the raw material liquid does not adhere.
  • the rear edge (22) of the glass substrate (20) (that is, the rear edge in the moving direction of the glass substrate (20)) reaches the second arrival region (92).
  • the raw material liquid is sprayed from both the first spray nozzle (42) and the second spray nozzle (52).
  • the second switch (73) is turned off, and the second spray nozzle (52 The spraying of the raw material liquid from) stops.
  • the band-shaped region corresponding to the second reaching region (92) of the surface of the glass substrate (20) is the raw material on the entire surface from the front edge (21) to the rear edge (22) of the glass substrate (20). The liquid has adhered (refer FIG.9 (c)).
  • the glass substrate (20) moves while the raw material liquid is sprayed from the first spray nozzle (42).
  • the raw material liquid adheres to the portion corresponding to the first reaching region (91) on the surface of the glass substrate (20).
  • the first switch (72) is turned off, and the spray of the raw material liquid from the first spray nozzle (42) is performed. Stop.
  • the glass substrate (20) is in a state where the raw material liquid is attached to the entire surface.
  • the spraying part (30) first stops the spraying of the raw material liquid from the second spraying nozzle (52), and thereafter The spraying of the raw material liquid from the spray nozzle (42) is stopped.
  • the first switch (72) and the second switch (73) are either in the ON state or the OFF state depending on the position of the glass substrate (20). Is set. The operation of the first switch (72) and the second switch (73) is performed by the controller (14).
  • the first spray nozzle (42) and the second spray nozzle (52) are alternately arranged in the direction intersecting with the moving direction of the glass substrate (20), and the first reaching region is obtained. (91) and the second reaching region (92) are shifted in the moving direction of the glass substrate (20).
  • the first reaching region (91) is a region where the droplet sprayed from the first spray nozzle (42) reaches, and the second reaching region (92) is sprayed from the second spray nozzle (52). This is the area where the droplets reach.
  • the distance between the charged droplet sprayed from the first spray nozzle (42) and the charged droplet sprayed from the second spray nozzle (52) is sufficient.
  • the electrical repulsive force acting between the droplet sprayed from the first spray nozzle (42) and the droplet sprayed from the second spray nozzle (52) can be reduced. it can. Therefore, in the film forming apparatus (10) of the present embodiment, the droplets sprayed from each spray nozzle are repelled to prevent the formation of a region where the raw material liquid does not adhere to the surface of the glass substrate (20). And a film can be reliably formed on the entire surface of the glass substrate (20).
  • the potential of the upper electrode (60) has the same polarity as the potential of the droplet sprayed from each spray nozzle (42, 52). For this reason, an electrical repulsive force acts between the droplet sprayed from each spray nozzle (42, 52) and the upper electrode (60). That is, a Coulomb force in the moving direction of the glass substrate (20) acts on the droplet sprayed from the first spray nozzle (42), and a glass sprayed on the droplet sprayed from the second spray nozzle (52). Coulomb force in the direction opposite to the moving direction of the substrate (20) acts.
  • the droplet sprayed from the 1st spray nozzle (42) can be reliably scattered toward the moving direction of a glass substrate (20), and it can be made from the 2nd spray nozzle (52).
  • the sprayed droplets can be reliably scattered in the direction opposite to the moving direction of the glass substrate (20).
  • the film forming apparatus (10) as described above, the distance G 1 between the center axis of the nozzle body (44) of the first spray nozzle (42) to the surface of the upper electrode (60), the distance G 2 from the central axis of the nozzle body (54) of the second spray nozzle (52) to the surface of the upper electrode (60) are equal.
  • the time until the droplet sprayed from the first spray nozzle (42) reaches the surface of the glass substrate (20) and the droplet sprayed from the second spray nozzle (52) The time to reach the surface of) is almost the same.
  • the difference from the diameter of the droplet reaching the surface of (20) can be made as small as possible.
  • the first spray nozzle that sprays the raw material liquid in the moving direction of the glass substrate (20) in the process in which the glass substrate (20) approaches the spray unit (30).
  • the 1st spray nozzle (42) which sprays a raw material liquid in the moving direction of a glass substrate (20) in the process in which a glass substrate (20) leaves
  • the timing of stopping the spraying of the raw material liquid from the second is later than the timing of stopping the spraying of the raw material liquid from the second spray nozzle (52) that sprays the raw material liquid in the direction opposite to the moving direction of the glass substrate (20). It has become. Therefore, according to the present embodiment, the raw material liquid sprayed from the spray nozzle (42, 52) when the glass substrate (20) is located in a region where the raw material liquid sprayed from the spray nozzle (42, 52) does not reach. The amount of raw material liquid that is wasted without adhering to the glass substrate (20) can be reduced.
  • the tip surface (45,55) of the nozzle body (44,54) of each spray nozzle (42,52) 54) may be orthogonal to the central axis.
  • an electric repulsive force acts between the droplet sprayed from each spray nozzle (42, 52) and the upper electrode (60). Therefore, also in this modification, the droplet sprayed from the first spray nozzle (42) is scattered in the direction away from the upper electrode (60) (that is, the moving direction of the glass substrate (20)), and the second spray.
  • the droplet sprayed from the nozzle (52) is scattered in a direction away from the upper electrode (60) (that is, a direction opposite to the moving direction of the glass substrate (20)).
  • the central axis of the nozzle body (44, 54) of each spray nozzle (42, 52) is inclined with respect to the surface of the glass substrate (20). You may do it.
  • the nozzle body (44) of each first spray nozzle (42) is positioned so that the distal end is located on the front side in the movement direction of the glass substrate (20) relative to the base end. Inclined.
  • the nozzle body (54) of each second spray nozzle (52) has its tip positioned behind the base end in the movement direction of the glass substrate (20). Inclined to do.
  • Embodiment 2 of the Invention A second embodiment of the present invention will be described. Here, the difference between the film forming apparatus (10) of the present embodiment and the film forming apparatus (10) of the first embodiment will be described.
  • a shielding plate (69) is provided instead of the upper electrode (60).
  • the shielding plate (69) is a plate-like member provided between the first spray unit (40) and the second spray unit (50), and includes the first spray unit (40) and the second spray unit ( 50) constitutes a shielding member that shields the gap.
  • the shielding plate (69) is a member formed in a rectangular thick plate shape, and is arranged so as to shield between the first spray unit (40) and the second spray unit (50). .
  • the length of the long side of the shielding plate (69) is slightly longer than the length of the header member (41, 51).
  • the shielding plate (69) has an upper end located between the first header member (41) and the second header member (51), and a lower end thereof, the first lower electrode (66) and the second lower electrode. Located between (67).
  • the material of the shielding plate (69) is a non-conductive resin. Unlike the upper electrode (60), the shielding plate (69) is not connected to the power source (71).
  • the first spray unit (40) and the second spray unit (50) are shielded by the shielding plate (69) made of a non-conductive material.
  • the electric field formed near the tip of each spray nozzle is blocked by the shielding plate (69). Therefore, the influence of the electric field in the vicinity of one end of the first spray nozzle (42) and the second spray nozzle (52) on the spray state of the raw material liquid from the other is substantially eliminated.
  • the raw material from the second spray nozzle (52) can be kept constant, and as a result, the thickness of the film formed on the surface of the glass substrate (20) can be made uniform.
  • the material of the shielding plate (69) may be metal or conductive resin, and the shielding plate (69) may be electrically connected to the positive electrode of the power source (71).
  • the potential of the shielding plate (69) of this modification is the same polarity as the potential of the droplet sprayed from the spray nozzle (42, 52). For this reason, an electrical repulsive force acts between the droplet sprayed from the spray nozzle (42, 52) and the shielding plate (69). Therefore, according to this modification, the spray direction of the raw material liquid from the spray nozzle (42, 52) can be stabilized.
  • Embodiment 3 of the Invention will be described.
  • the film forming apparatus (10) of the present embodiment will be described with respect to differences from the film forming apparatus (10) of the first embodiment.
  • the film forming apparatus (10) of the present embodiment is provided with one spray unit (35) instead of the first spray unit (40) and the second spray unit (50). It is done.
  • the spray unit (35) includes one header member (36), four first spray nozzles (42), and five second spray nozzles (52).
  • a passage for distributing the raw material liquid to the plurality of spray nozzles (42, 52) is formed in the header member (36) of the spray unit (35).
  • the header member (36) is arranged in a posture in which its axial direction is substantially orthogonal to the moving direction of the glass substrate (20).
  • the infusion piping (82) is connected to the header member (36).
  • the first spray nozzle (42) and the second spray nozzle (52) are attached to the lower surface of the header member (36).
  • the base (43,53) is joined to the lower surface of the header member (36), and the nozzle body (44,54) is joined to the lower surface of the base (43,53).
  • the nozzle body (44, 54) of each spray nozzle (42, 52) has a substantially vertical direction (that is, a direction substantially perpendicular to the surface of the glass substrate (20)). .
  • the first spray nozzle (42) and the second spray nozzle (52) are alternately arranged at equal intervals along the axial direction of the header member (36). .
  • the distance between the adjacent first spray nozzle (42) and the second spray nozzle (52) that is, the distance between the central axis of the adjacent nozzle body (44) and the central axis of the nozzle body (54)).
  • Is L that is, in the spray unit (35), the four first spray nozzles (42) and the five second spray nozzles (52) are alternately arranged in a line at a constant pitch L.
  • each first spray nozzle (42) has the front end surface (45) of the nozzle body (44) facing the front side (right side in FIG. 18) of the movement direction of the glass substrate (20).
  • the tip end surface (55) of the nozzle body (54) faces the rear side (left side in FIG. 18) of the movement direction of the glass substrate (20).
  • each first spray nozzle (42) is electrically connected to the positive electrode of the power source (71) via the first switch (72), and each second nozzle The nozzle body (54) of the spray nozzle (52) is electrically connected to the positive electrode of the power source (71) via the second switch (73).
  • the film forming apparatus (10) of this embodiment has four (that is, the same number as the first spray nozzle (42)) instead of one upper electrode (60).
  • the first upper electrode (61) and five (that is, the same number as the second spray nozzle (52)) second upper electrodes (62) are provided.
  • Each upper electrode (61, 62) is a small rectangular plate-shaped member.
  • the material of each upper electrode (61, 62) is metal or conductive resin.
  • the first upper electrode (61) is a first deflecting electrode, and is located behind each first spray nozzle (42) in the moving direction of the glass substrate (20).
  • the four first upper electrodes (61) are arranged in a row along the longitudinal direction of the header member (36) in a standing posture in which the respective width directions are parallel to the longitudinal direction of the header member (36).
  • the upper end of each first upper electrode (61) is located above the lower end of the nozzle body (44) of the corresponding first spray nozzle (42).
  • Each first upper electrode (61) is electrically connected to the positive electrode of the power source (71) (see FIG. 17). Therefore, the potential of the first upper electrode (61) has the same polarity as the potential of the droplet sprayed from the first spray nozzle (42).
  • the second upper electrode (62) is a second deflecting electrode, and is provided in front of each second spray nozzle (52) in the moving direction of the glass substrate (20).
  • the five second upper electrodes (62) are arranged in a line along the longitudinal direction of the header member (36) in a standing posture in which the respective width directions are parallel to the longitudinal direction of the header member (36).
  • the upper end of each second upper electrode (62) is located above the lower end of the nozzle body (54) of the corresponding second spray nozzle (52).
  • Each second upper electrode (62) is electrically connected to the positive electrode of the power source (71) (see FIG. 17). Therefore, the potential of the second upper electrode (62) has the same polarity as the potential of the droplet sprayed from the second spray nozzle (52).
  • the liquid material droplets sprayed from the spray nozzles (42, 52) have a positive (+) charge. Therefore, an electric repulsive force acts between the droplet sprayed from each first spray nozzle (42) and the first upper electrode (61) corresponding to the first spray nozzle (42). For this reason, the droplet sprayed from each first spray nozzle (42) moves away from the first upper electrode (61) corresponding to the first spray nozzle (42) (that is, movement of the glass substrate (20)). (Direction). An electric repulsive force acts between the droplet sprayed from each second spray nozzle (52) and the second upper electrode (62) corresponding to the second spray nozzle (52). For this reason, the droplet sprayed from each second spray nozzle (52) moves away from the second upper electrode (62) corresponding to the second spray nozzle (52) (that is, movement of the glass substrate (20)). It scatters in the direction opposite to the direction.
  • the position of the first arrival region (91) corresponding to each first spray nozzle (42) is the same as the film forming apparatus (10) of the first embodiment.
  • region (92) corresponding to each 2nd spray nozzle (52) shifts
  • the first reaching region (91) is a region where the droplet sprayed from the first spray nozzle (42) reaches, and the second reaching region (92) is sprayed from the second spray nozzle (52). This is the area where the droplets reach.
  • the tip surfaces (45, 55) of the nozzle bodies (44, 54) of the spray nozzles (42, 52) 54) may be orthogonal to the central axis.
  • the droplet sprayed from the first spray nozzle (42) is scattered in the direction away from the first upper electrode (61) (that is, the moving direction of the glass substrate (20)),
  • the droplets sprayed from the two spray nozzles (52) are scattered in the direction away from the second upper electrode (62) (that is, the direction opposite to the moving direction of the glass substrate (20)).
  • the film forming apparatus (10) of each of the above embodiments is configured to move the glass substrate (20) while fixing the spray unit (30), but on the contrary, the glass substrate (20) is moved.
  • the spray unit (30) may be configured to be fixed and moved.
  • the present invention is useful for a film forming apparatus and a film forming method for forming a film on an object by electrostatic spraying.
  • Film deposition equipment 15 Belt conveyor (movement mechanism) 20 Glass substrate (object) 30 Spraying portion 41 First header member 42 First spray nozzle 45 Tip surface 51 Second header member 52 Second spray nozzle 55 Tip surface 60 Upper electrode (deflection electrode) 61 First upper electrode (deflection electrode) 62 Second upper electrode (electrode for deflection) 69 Shield plate (shield member) 70 Voltage application section

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  • Application Of Or Painting With Fluid Materials (AREA)
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JP2016137479A (ja) * 2015-01-22 2016-08-04 アネスト岩田株式会社 静電噴霧装置
WO2017164198A1 (ja) * 2016-03-25 2017-09-28 アネスト岩田株式会社 静電噴霧装置
JP2017177096A (ja) * 2016-03-25 2017-10-05 アネスト岩田株式会社 静電噴霧装置

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JP6474631B2 (ja) * 2015-02-17 2019-02-27 東レエンジニアリング株式会社 エレクトロスプレー装置
JP2021126637A (ja) * 2020-02-17 2021-09-02 旭サナック株式会社 エレクトロスプレー用のノズル、エレクトロスプレー装置、及びエレクトロスプレー法

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JPH03249963A (ja) * 1990-02-26 1991-11-07 Nippon Steel Corp 静電粉体塗装方法および装置
JPH09502126A (ja) * 1993-09-02 1997-03-04 インペリアル・ケミカル・インダストリーズ・ピーエルシー 静電噴霧装置

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JPS4749617B1 (zh) * 1967-04-19 1972-12-13
JPS6144258U (ja) * 1984-08-28 1986-03-24 トリニテイ工業株式会社 静電塗油装置
JPH03249963A (ja) * 1990-02-26 1991-11-07 Nippon Steel Corp 静電粉体塗装方法および装置
JPH09502126A (ja) * 1993-09-02 1997-03-04 インペリアル・ケミカル・インダストリーズ・ピーエルシー 静電噴霧装置

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JP2016137479A (ja) * 2015-01-22 2016-08-04 アネスト岩田株式会社 静電噴霧装置
WO2017164198A1 (ja) * 2016-03-25 2017-09-28 アネスト岩田株式会社 静電噴霧装置
JP2017177096A (ja) * 2016-03-25 2017-10-05 アネスト岩田株式会社 静電噴霧装置
EP3434376A4 (en) * 2016-03-25 2019-11-27 Anest Iwata Corporation ELECTROSTATIC SPRAYER

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