WO2014002650A1 - 圧電ユニット、圧電装置、圧電判定装置及び状態判定方法 - Google Patents
圧電ユニット、圧電装置、圧電判定装置及び状態判定方法 Download PDFInfo
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- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/16—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by measuring damping effect upon oscillatory body
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- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
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- H—ELECTRICITY
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- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
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- H03H9/25—Constructional features of resonators using surface acoustic waves
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- G01N9/34—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity by using flow properties of fluids, e.g. flow through tubes or apertures by using elements moving through the fluid, e.g. vane
Definitions
- the present invention relates to a piezoelectric unit, a piezoelectric device, a piezoelectric determination device, and a state determination method for measuring physical properties using thickness-thickness vibration of a piezoelectric element.
- a quartz crystal microbalance (QCM) measurement method is known as a physical property measurement method using a crystal resonator that excites thickness-thickness vibration (for example, Patent Document 1).
- the QCM measurement method is, for example, by adding an organic polymer film that selectively adsorbs a specific substance in addition to the structure of a general crystal resonator in which one electrode is provided on each side of a quartz plate. This is a method for measuring the concentration of a specific substance.
- the characteristics that can be measured using the QCM sensor are usually limited to a single characteristic.
- one characteristic is insufficient, and it may not make sense unless two or more characteristics are acquired at the same time.
- the viscosity depends on the temperature, and therefore the temperature at the same measurement point as the viscosity needs to be measured simultaneously. Therefore, when using a conventional QCM sensor, it is necessary to prepare a temperature sensor together with a QCM sensor for measuring viscosity.
- Patent Document 2 a structure in which a separate temperature sensor or capacitive sensor is added to the surface or lower part of the crystal resonator in addition to the structure of a general crystal resonator is proposed (for example, Patent Document 2).
- JP 2010-71716 A JP-T-2006-522918
- the QCM sensor measures the resonance frequency and equivalent circuit constant of the crystal resonator because the vibration characteristics of the crystal resonator when the thickness vibration is excited reflects the state of the medium in contact with the crystal plate.
- the sensor acquires physical property information of the medium. Therefore, as shown in the above prior art, when a structure is provided in which a separate sensor is provided on the surface or outer periphery of the quartz plate, the stress due to the provision of the separate sensor affects the thickness-thickness vibration, and the QCM sensor Measurement may not be performed accurately.
- the present invention has been made in view of such circumstances, and obtains two or more physical properties of a measurement object at the same time, and has a piezoelectric unit, a piezoelectric device, a piezoelectric determination device, and a state that hardly affect the thickness-thickness vibration.
- An object is to provide a determination method.
- the first feature of the piezoelectric unit according to the present invention is that the piezoelectric element that excites thickness vibration, the first electrode provided on one surface of the piezoelectric element, and the surface opposite to the one surface of the piezoelectric element.
- An electrode unit having a second electrode and a third electrode that are electrically insulated from each other, and a switch that is connected to the first electrode, the second electrode, and the third electrode and switches a connection state of each electrode And the switch is connected to an electrode for measuring the mass or viscoelasticity of a substance in contact with the piezoelectric element by exciting vibrations through the thickness of the piezoelectric element.
- the measurement mode can be switched to any one of a measurement mode and an electrical property measurement mode that is an electrode connection state for measuring electrical properties between the second electrode and the third electrode.
- At least one of the second electrode and the third electrode functions as a single-sided electrode of a pair of electrodes for applying a signal to the piezoelectric element, and a pair of electrodes by the second electrode and the third electrode.
- a second feature of the piezoelectric unit according to the present invention is that the piezoelectric element is a crystal resonator. According to the characteristics of the piezoelectric unit, a composite sensor having high measurement stability using thickness-thinning vibration can be realized by using the piezoelectric element as a crystal resonator capable of obtaining stable thickness-thickness vibration.
- a third feature of the piezoelectric unit according to the present invention is that the shapes of the second electrode and the third electrode are comb-like. According to the characteristics of the piezoelectric unit, the physical properties of the second electrode and the third electrode are measured as a pair of electrodes by setting the second electrode and the third electrode in a comb shape (with the switch in the second state). In the case of use for the measurement, the measurement can be performed with high sensitivity by increasing the number of paths through which the signal flows through the measurement object.
- a fourth feature of the piezoelectric unit according to the present invention is that the mass / viscoelasticity measurement mode forms a pseudo integrated electrode by keeping the second electrode and the third electrode at an equal potential, and the integrated electrode And a connection state in which a potential difference is formed between the first electrode and the first electrode. According to the characteristics of the piezoelectric unit, since the area ratio of the front and back electrodes of the piezoelectric element can be made closer, the piezoelectric element can be stably vibrated and the measurement can be performed with high sensitivity.
- a fifth feature of the piezoelectric unit according to the present invention is that the mass / viscoelasticity measurement mode forms a potential difference between the first electrode and the second electrode or the third electrode. It is a state. According to the characteristics of the piezoelectric unit, the switching of the switch can be further simplified, so that the piezoelectric unit that acquires two or more physical properties can be configured more easily.
- a sixth feature of the piezoelectric unit according to the present invention is that the electrical characteristic measurement mode is a state in which the first electrode is short-circuited with either the second electrode or the third electrode. It is a connection state in which a potential difference is formed between two electrodes and the third electrode. According to the characteristics of the piezoelectric unit, the regulation capacity of the measurement system can be eliminated by connecting either the second electrode or the third electrode to the first electrode, and the measurement in the high frequency region can be particularly improved. Can be done with precision.
- a seventh feature of the piezoelectric unit according to the present invention is that a region surrounded by the outer shape of the first electrode and a region surrounded by the outer shape including the second electrode and the third electrode have the same area. And the relative positions of the front and back sides of the piezoelectric element are the same. According to the characteristics of the piezoelectric unit, the piezoelectric element can be vibrated more stably, and the measurement can be performed with high sensitivity.
- An eighth feature of the piezoelectric unit according to the present invention is that the piezoelectric element has a sensitive film on the surface.
- a specific element contained in the liquid or gas is used when performing measurement using thickness vibration.
- the concentration, density, insoluble particle amount, mass, etc. of the substance can be easily measured.
- measurement sensitivity in measurement using thickness vibration can be improved.
- a first feature of the piezoelectric device is a piezoelectric unit having any one of the first to eighth features, a first circuit unit connected to the piezoelectric unit, and connected to the piezoelectric unit.
- a piezoelectric device comprising: a second circuit unit; wherein the first circuit unit applies a first input signal to the electrode unit in a connected state in the mass / viscoelasticity measurement mode. And the second circuit unit includes a second signal applying circuit that applies a second input signal to the electrode portion in the connection state in the electrical characteristic measurement mode.
- both the second electrode and the third electrode form a pair of electrodes of the function of the single electrode of the counter electrode that applies a signal to the piezoelectric element and the second electrode and the third electrode.
- a second feature of the piezoelectric device is that the first circuit unit has a first signal detection circuit that detects a first output signal corresponding to the first input signal, and the first output signal includes Based on the first physical quantity,
- the second circuit unit includes a second signal detection circuit that detects a second output signal corresponding to the second input signal applied by the second signal application circuit, and a second signal based on the second output signal.
- the physical quantity can be measured.
- the first input signal applied between the integrated electrode and the first electrode by the first signal applying circuit included in the first circuit unit is in contact with the piezoelectric element in the first state.
- the first physical quantity of the substance is measured by exciting the thickness vibration reflecting the physical properties of the substance to the piezoelectric element in the piezoelectric unit and measuring the thickness vibration state by the first signal detection circuit.
- the second signal applying circuit included in the second circuit unit causes the second electrode and the third electrode to input the second input signal to the substance interposed therebetween, and the electricity passed through the substance.
- the second physical quantity of the substance is measured by measuring the signal with the second signal detection circuit.
- the signal detection circuit and the signal application circuit are integrated, it is easy to control the phase and detect the phase difference of both signals at the time of signal input and output. Thus, a more accurate measuring device can be realized.
- a third feature of the piezoelectric device is that the first signal applying circuit includes an oscillator circuit capable of arbitrarily setting a frequency of a signal to be applied. According to the characteristics of the piezoelectric device, the frequency of the alternating voltage applied to the piezoelectric element can be arbitrarily set because the first signal applying circuit includes the oscillator circuit. Therefore, the equivalent circuit constant of the piezoelectric element can be easily obtained.
- a fourth feature of the piezoelectric device is that the frequency f II of the input signal applied by the second signal applying circuit in a state where the piezoelectric element is in contact with the substance having the first physical quantity or the second physical quantity.
- the condition equation (Equation 1) using the resonance frequency f acquired based on the first output signal detected by the first signal detection circuit in a state in contact with the substance is satisfied.
- noise applied to the measured value of the second physical quantity is reduced by not applying the applied frequency applied between the second electrode and the third electrode to the resonance frequency of the piezoelectric element and the frequency of the overtone vibration. And the measurement can be performed with high accuracy.
- a fifth feature of the piezoelectric device according to the present invention is that the first signal applying circuit is an oscillation circuit that excites oscillation at a resonance frequency of a fundamental wave or a double vibration of the piezoelectric element. According to the characteristics of the piezoelectric device, the piezoelectric element can be easily oscillated by using the first signal applying circuit as an oscillation circuit.
- a sixth feature of the piezoelectric device is that the second signal applying circuit includes an oscillator circuit capable of arbitrarily setting a frequency of a signal to be applied.
- the frequency of the alternating voltage applied between the second electrode and the third electrode can be arbitrarily set because the second signal applying circuit includes the oscillator circuit. Therefore, the electrical characteristics and electrochemical characteristics of the substance interposed between the second electrode and the third electrode can be easily obtained. Furthermore, it is possible to give diversity to the characteristics that can be measured.
- a seventh feature of the piezoelectric device according to the present invention is that the first circuit unit and the second circuit unit are composed of the same common unit. According to the characteristics of the piezoelectric device, it is possible to reduce the size of the piezoelectric device by sharing the first circuit unit and the second circuit unit.
- An eighth feature of the piezoelectric device is that the first signal applying circuit and the second signal applying circuit are composed of a single common signal applying circuit, and the common signal applying circuit can arbitrarily set the frequency.
- An oscillator circuit is included. According to the characteristics of the piezoelectric device, the configuration of the piezoelectric device can be simplified by sharing the signal application circuit.
- a ninth feature of the piezoelectric device according to the present invention is that the first signal detection circuit and the second signal detection circuit comprise a single common signal detection circuit. According to the characteristics of the piezoelectric device, the configuration of the piezoelectric device can be simplified by sharing the signal detection circuit.
- a tenth feature of the piezoelectric device is that, based on the first output signal detected by the first signal detection circuit, the admittance, conductance, susceptance, inductance, reactance, and resistance when the piezoelectric element is torsionally vibrated. A first output value of any one of impedance, capacitance, and resonance frequency is acquired. According to the characteristics of the piezoelectric device, the first output value of at least one of admittance, conductance, susceptance, inductance, reactance, resistance, impedance, capacitance, and resonance frequency in the thickness vibration of the piezoelectric element is obtained. It can be used for measurement of physical quantities of liquid or gas.
- An eleventh feature of the piezoelectric device is that the first physical quantity is at least one of viscosity, elasticity, viscoelasticity, concentration, density, insoluble particle amount, temperature, and mass based on the first output value. It is characterized by being. According to the characteristics of the piezoelectric device, it is possible to measure at least one physical quantity of viscosity, elasticity, viscoelasticity, concentration, density, insoluble particle quantity, temperature, mass of liquid or gas, or measurement using those physical quantities. It can be used as a device or a determination device.
- a twelfth feature of the piezoelectric device is that, based on the second output signal detected by the second signal detection circuit, current, potential difference, impedance, admittance, conductance, susceptance, inductance, reactance, resistance, capacitance
- the at least one second output value is acquired.
- the second output of at least one of potential difference, current, impedance, admittance, conductance, susceptance, inductance, reactance, resistance, and capacitance is achieved by a pair of electrodes of the second electrode and the third electrode.
- the piezoelectric device can be used for measuring the physical quantity of the liquid or gas interposed between the second electrode and the third electrode.
- a thirteenth feature of the piezoelectric device according to the present invention is that the second physical quantity is at least one of electrical conductivity, ionic conductivity, dielectric constant, ion concentration, redox potential, redox substance concentration based on the second output value. It is any one of them.
- a first feature of the piezoelectric determination device is a piezoelectric device having any one of the second to thirteenth features, a determination device connected to the first signal detection circuit, and the second signal detection circuit.
- the determination unit determines the state of the substance using the first physical quantity and the second physical quantity.
- both the second electrode and the third electrode serve as a pair of electrodes by the function of a single-sided electrode for applying a signal to the piezoelectric element and the second electrode and the third electrode.
- the 2nd characteristic of the piezoelectric determination apparatus which concerns on this invention is characterized by the said determination device having a display part which displays the determination result by the said determination device. According to the feature of the piezoelectric determination device, the determination result can be easily confirmed by the determination unit having the display unit.
- a third feature of the piezoelectric determiner according to the present invention is that the determiner includes a temperature management unit that measures the temperature of the substance. According to the characteristics of the piezoelectric determining apparatus, the state of the substance can be determined more accurately by measuring while measuring the temperature.
- the temperature management unit includes a temperature control unit that controls the temperature of the substance. According to the characteristics of the piezoelectric determination device, since measurement can be performed while controlling the temperature, determination can be performed under the same temperature condition, so even a highly temperature-dependent substance or piezoelectric element can be determined more accurately. can do.
- a first feature of the state judging method is a state judging method for judging a state of a substance using a piezoelectric judging device having the first or second feature, wherein the first physical quantity and the second physical quantity are determined. The physical quantity is measured, and the state of the substance is determined using both the first physical quantity and the second physical quantity.
- at least one of the second electrode and the third electrode has a function of a single-sided electrode for applying a signal to the piezoelectric element, and a pair of electrodes of the second electrode and the third electrode.
- the characteristics and state of a substance By determining the characteristics and state of a substance using a piezoelectric unit having a structure that also functions as two functions, the characteristics and state of the substance can be determined based on two or more characteristics of the substance. Therefore, a more reliable determination result can be derived.
- a second feature of the state determination method is that the substance is a liquid, and the state is a deteriorated state of characteristics of the liquid.
- the characteristics of the state determination method at least one of the second electrode and the third electrode forms a pair of electrodes by the function of one electrode of the electrode that applies a signal to the piezoelectric element, and the second electrode and the third electrode. Since the deterioration state of the liquid can be determined based on two or more characteristics of the liquid by determining the deterioration state of the liquid using a piezoelectric unit having a structure that also functions as two functions. It is possible to determine the deterioration of the liquid with higher reliability.
- the piezoelectric unit of the present invention it is possible to provide two or more physical properties to be measured at the same time, and provide a piezoelectric unit, a piezoelectric device, a piezoelectric determination device, and a state determination method that hardly affect the thickness vibration.
- FIG. 1 is a configuration diagram showing a first embodiment of a piezoelectric device 1 according to the present invention.
- the piezoelectric device 1 includes a piezoelectric unit 4, a first circuit unit 7, and a second circuit unit 10.
- the piezoelectric unit 4 includes a piezoelectric vibrator 2 as a piezoelectric element, and a switching device 3 connected to the piezoelectric vibrator 2 by connection portions T1, T2, and T3.
- the piezoelectric vibrator 2 is provided with the first electrode 11 to the third electrode 13, the first electrode 11 on the front surface and the second electrode 12 and the third electrode 13 on the back surface being electrically insulated. Piezoelectric plate 2a formed.
- the component part which consists of the said 1st electrode 11-the 3rd electrode 13 is called an electrode part for convenience.
- the switch 3 has a function that can arbitrarily switch the connection state between each electrode on the piezoelectric vibrator 2 and the circuit unit. The detailed configurations of the piezoelectric vibrator 2 and the switch 3 will be described later.
- the first circuit unit 7 includes a first signal detection circuit 5 and a first signal application circuit 6, and is connected to the piezoelectric unit 4 (switching device 3) through connection portions T4 and T5.
- the 2nd circuit unit 10 consists of the 2nd signal detection circuit 8 and the 2nd signal application circuit 9, and is connected to the piezoelectric unit 4 (switch 3) by connection part T6, T7.
- the first signal applying circuit 6 and the second signal applying circuit 9 are respectively provided with oscillator circuits 17 and 18, and between the connecting part T4 and the connecting part T5 or between the connecting part T6 and the connecting part T7. A voltage having an arbitrary frequency and an arbitrary amplitude can be applied between them.
- the first signal applying circuit 6 and the second signal applying circuit 9 include the oscillator circuits 17 and 18 so that the frequency of the signal applied to the piezoelectric element can be arbitrarily set.
- the first signal detection circuit 5 and the second signal detection circuit 8 detect an output signal based on a potential difference formed between the electrodes.
- piezoelectric vibrator configuration Next, a detailed configuration of the piezoelectric vibrator 2 will be described.
- 2A and 2B are schematic views showing the front surface and the back surface of the piezoelectric plate 2a, respectively.
- the piezoelectric plate 2a of the piezoelectric vibrator 2 is cut so as to excite thickness-thickness vibration, and particularly AT-cut quartz is desirable. That is, the piezoelectric device 1 can realize a composite sensor having high measurement stability using thickness vibration by using a piezoelectric element as a quartz crystal resonator.
- the 1st electrode 11 which is a solid electrode is provided in the front surface of the piezoelectric plate 2a. Moreover, the 1st electrode 11 is connected to the switch 3 via the connection part T1.
- the second electrode 12 and the third electrode 13 are provided on the back surface of the piezoelectric plate 2a in an electrically insulated state.
- the second electrode 12 and the third electrode 13 are composed of a pair of comb electrodes. As described above, when the second electrode 12 and the third electrode 13 are formed in a comb-teeth shape, when the second electrode and the third electrode are used for measurement of physical properties as a pair of electrodes, the measurement object is interposed.
- Measurement can be performed with high sensitivity by increasing the number of paths through which the signal flows. Further, as shown in FIGS. 2A and 2B, the regions surrounded by the outer shapes of the electrodes on the front and back surfaces of the piezoelectric plate 2a have substantially the same area, and the relative positions across the piezoelectric plate 2a are substantially the same. Is formed. In this way, the piezoelectric device 1 can stabilize the signal obtained from the vibration due to the thickness of the piezoelectric plate 2a by forming the front and back electrodes to have the same area and relative position. It can be done with good sensitivity.
- the second electrode 12 is connected to the switch 3 via the connection portion T2, and the third electrode 13 is connected to the switch 3 via the connection portion T3.
- the first electrode 11, the second electrode 12, and the third electrode 13 are preferably made of a material that hardly changes in quality, such as gold, platinum, and carbon, but are not limited thereto as long as the change does not occur in the use environment.
- the first electrode 11, the second electrode 12, and the third electrode 13 may use ITO (Indium Tin Oxide) or the like depending on the usage situation.
- the first electrode 11, the second electrode 12, and the third electrode 13 are interposed with other materials such as chromium and titanium in order to improve adhesion with the piezoelectric plate 2 a when installed on the piezoelectric plate 2 a. It doesn't matter.
- the configuration on the back side of the piezoelectric plate 2a is not limited to that illustrated in FIG. 2B, and may be configured as shown in FIG. 3, for example.
- FIG. 3 is a schematic diagram showing another configuration example of the back side of the piezoelectric plate 2a.
- reference numeral 14 indicates a second electrode
- reference numeral 15 indicates a third electrode.
- the second electrode 14 and the third electrode 15 are a pair of electrodes disposed so that at least a part thereof is opposed to each other. That is, as shown in FIG. 3, the second electrode 14 and the third electrode 15 are not necessarily comb-shaped electrodes, but are a pair of electrodes that are electrically insulated and have opposing portions. What is necessary is just to have (the shape of the 2nd electrode 14 and the 3rd electrode 15 may be arbitrary).
- FIG. 4 is a diagram showing a configuration of the switch 3.
- the switching device 3 has a function capable of switching to either the connection state of the state A (mass / viscoelasticity measurement mode) or the state B (electrical characteristic measurement mode).
- the state A is a connection for forming a pseudo integrated electrode by short-circuiting the connecting portion T2 and the connecting portion T3 and maintaining the second electrode 12 and the third electrode 13 shown in FIG. State. That is, the switch 3 can easily realize the state A by electrically short-circuiting the second electrode 12 and the third electrode 13 to make them equipotential.
- State A is a state in which the switch 3 connects the integrated electrode and the connection portion T4, and connects the connection portion T1 and the connection portion T5. The switch 3 thus forms a potential difference between the integral electrode and the first electrode.
- the first signal applying circuit 6 inputs and outputs signals to and from the piezoelectric plate 2a via the connecting portion T4 and the connecting portion T5, thereby exciting the piezoelectric plate 2a with thickness vibration.
- the first signal detection circuit 5 can measure electrical characteristics such as admittance, conductance, susceptance, inductance, reactance, resistance, impedance, capacitance, and resonance frequency of the piezoelectric plate 2a at that time. Therefore, the first signal detection circuit 5 shown in FIG.
- first output value the liquid or gas viscosity, elasticity, viscosity It can be used as a measurement device for at least one physical quantity of elasticity, concentration, density, insoluble particle amount, temperature, and mass, or as a measurement device or determination device using those physical quantities.
- the state B is a state in which the connecting portion T2 and the connecting portion T6 are connected in a state where the connecting portion T2 and the connecting portion T3 are insulated, and the connecting portion T3 and the connecting portion T7 are connected.
- the switch 3 switches to the state B, thereby forming a potential difference between the second electrode and the third electrode. That is, when the second signal application circuit 9 exchanges signals between the connection portion T6 and the connection portion T7 in the state B, the second signal detection circuit 8 is connected between the second electrode 12 and the third electrode 13.
- the second signal detection circuit 8 shown in FIG. 1 acquires at least one of these output values (second output value), and based on the second output value, the electric conductivity, ionic conductivity, dielectric
- the second physical quantity that is at least one of the rate, ion concentration, redox potential, and redox substance concentration can be measured.
- the piezoelectric device 1 has both the second electrode 12 and the third electrode 13 as shown in FIG. 2 functioning as a single-sided electrode for applying a signal to the piezoelectric element, the second electrode,
- the piezoelectric device 1 can realize a composite sensor that hardly affects the thickness-thickness vibration.
- the first circuit unit 7 of FIG. 1 is a first signal applying circuit that applies an input signal between the integrated electrode formed by the second electrode 12 and the third electrode 13 and the first electrode 11. 6.
- the second circuit unit 10 of FIG. 1 includes a second signal applying circuit 9 that applies an input signal between the second electrode 12 and the third electrode 13.
- both the second electrode 12 and the third electrode 13 have a function of a single-sided electrode of a counter electrode that applies a signal to the piezoelectric element, and a pair of electrodes of the second electrode and the third electrode.
- This is a piezoelectric device that uses a piezoelectric unit having a structure that also functions as two functions, and therefore, when used for measuring physical properties, to realize a composite sensor device that is less susceptible to thickness-thickness vibration. Can do.
- the first circuit unit 7 in FIG. 1 detects an output signal based on the potential difference formed between the integrated electrode formed by the second electrode 12 and the third electrode 13 and the first electrode 11.
- the first signal detection circuit 5 is provided.
- the second circuit unit 10 in FIG. 1 includes a second signal detection circuit 8 that detects an output signal based on a potential difference formed between the second electrode 12 and the third electrode 13. Have.
- the first signal detection circuit 5 and the second signal detection circuit 8 are used to measure the first physical quantity and the second physical quantity of the substance, respectively.
- the 1st signal detection circuit 5 measures the 1st physical quantity of a substance by measuring the thickness thickness vibration state. Further, in the state B of FIG. 4, the second signal applying circuit 9 included in the second circuit unit 10 of FIG. 1 causes the second electrode 12 and the third electrode 13 to input an electric signal to the substance interposed therebetween. . And the 2nd signal detection circuit 8 measures the 2nd physical quantity of a substance by measuring the electrical signal which passed through the substance.
- the piezoelectric device 1 performs phase control and phase difference detection of both signals at the time of signal input and output. It becomes easy to remove, and a more accurate measuring device can be realized.
- the configuration of the switch 3 is not limited to that illustrated in FIG. 4, and may be that illustrated in FIG. 5.
- FIG. 5 is a diagram showing the switch 3 using the switch 16. As shown in FIG. 5, switching between the state A and the state B may be performed using the switch 16. In state A, T2 and T4 are electrically connected to T3. In state B, T3 and T7 are electrically connected. Further, the switch 3 may be designed by using a plurality of switches so that the connection between T2 and T6 in the state A and the connection between T2 and T4 in the state B are insulated.
- the operation of the piezoelectric device 1 in the first embodiment will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 3 to the state A.
- the first signal applying circuit 6 applies a voltage having an arbitrary frequency between the connecting portion T4 and the connecting portion T5.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 3 and the connection portions T1, T2, and T3.
- a voltage is applied between the first electrode 11 on the piezoelectric plate 2 a and the integrated electrode of the second electrode 12 and the third electrode 13.
- the piezoelectric vibrator 2 vibrates in thickness by reflecting the characteristics of the liquid sample.
- the first signal detection circuit 5 acquires the first output value from the piezoelectric vibrator 2 that vibrates through the thickness.
- the operation of the piezoelectric device 1 in the state B will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 3 to the state B.
- the second signal applying circuit 9 applies a voltage between the connection portion T6 and the connection portion T7.
- the frequency of the applied voltage here will be described in detail later.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 3 and the connection portions T2 and T3.
- a voltage is applied between the second electrode 12 and the third electrode 13 on the piezoelectric plate 2a.
- the second signal detection circuit 8 acquires a second output value that is an electrical characteristic reflecting the characteristic of the liquid sample.
- FIG. 17 is a diagram illustrating frequency characteristics of the piezoelectric vibrator 2 acquired by the first signal detection circuit 5 in a state where the piezoelectric vibrator 2 is immersed in a liquid sample.
- the resonance frequency of the piezoelectric vibrator 2 or the frequency of the overtone vibration is assumed to be f.
- the frequency f II of the voltage applied between the connecting portion T6 and the connecting portion T7 by the second signal applying circuit 9 is set in the shaded area excluding the ⁇ 5% frequency area of f shown in FIG. (In other words, f II preferably satisfies the conditional expression (Expression 1)).
- the piezoelectric device 1 can reduce the noise of the second output value obtained by the second signal detection circuit 8, so that the measurement can be performed with higher accuracy.
- the first circuit unit 7 is different from the first embodiment, and other than that is substantially the same as the first embodiment.
- the same reference numerals are given to the same components as those of the first embodiment described above, among the components of the piezoelectric device 1, and the description thereof is omitted.
- FIG. 6 is a configuration diagram showing the piezoelectric device 1 in the present embodiment.
- the piezoelectric device 1 in this embodiment includes a piezoelectric unit 4, a first circuit unit 7 connected to the piezoelectric unit 4, and a second circuit unit 10 connected to the piezoelectric unit 4.
- the first circuit unit 7 includes a first signal detection circuit 5 and an oscillation circuit 19.
- the first signal application circuit according to the first embodiment is the oscillation circuit 19 that excites oscillation at the resonance frequency of the fundamental wave or the double vibration of the piezoelectric element.
- the piezoelectric element can be easily oscillated.
- the piezoelectric vibrator 2 vibrates in thickness by reflecting the characteristics of the liquid sample. Thereafter, the first signal detection circuit 5 acquires the first output value from the piezoelectric vibrator 2 that vibrates through the thickness.
- the operation in the state B is the same as that in the first embodiment.
- the piezoelectric device 1 according to the present embodiment is different from the first embodiment in the configuration of the switch 24 and the circuit unit connected to the switch 24, and is otherwise substantially the same as the first embodiment.
- the same reference numerals are given to the same components as those of the first embodiment described above, among the components of the piezoelectric device 1, and the description thereof is omitted.
- FIG. 7 is a configuration diagram illustrating the piezoelectric device 1 according to the third embodiment.
- the piezoelectric device 1 in the present embodiment includes a piezoelectric unit 4 and a common circuit unit 20.
- the piezoelectric unit 4 includes a piezoelectric vibrator 2 and connection portions T1, T2, and T3 similar to the configuration shown in the first embodiment, and a switch 24 that is connected to the piezoelectric vibrator 2 through the connection portions T1, T2, and T3. Become.
- the first circuit unit and the second circuit unit according to the first embodiment include the common circuit unit 20 that is the same common unit. That is, the piezoelectric device 1 can be miniaturized by sharing the first circuit unit and the second circuit unit.
- the common circuit unit 20 includes a first signal detection circuit 21, a second signal detection circuit 22, and a common signal application circuit 23.
- the common signal applying circuit 23 includes an oscillator circuit 32. That is, in the first embodiment, the configuration of the piezoelectric device 1 is simplified by sharing the signal application circuit provided for each circuit unit as the common signal application circuit 23. Further, the circuit unit 20 is connected to the switch 24 by the connecting portions T8 and T9.
- FIG. 8 is a diagram showing the configuration of the switch 24 in the third embodiment.
- the switch 24 in this embodiment has a function that can switch the connection between the state A2 (mass / viscoelasticity measurement mode) and the state B2 (electrical characteristic measurement mode).
- the state A2 is a state in which the connection portion T2 and the connection portion T3 are short-circuited and connected to the connection portion T8, and the connection portion T1 and the connection portion T9 are connected.
- the state B2 is a state in which the connecting portion T2, the connecting portion T3, and the connecting portion T1 are insulated from each other, the connecting portion T2 and the connecting portion T8 are connected, and the connecting portion T3 and the connecting portion T9 are connected. It is.
- the common signal application circuit 23 shown in FIG. 7 includes an application circuit that applies a signal between the second electrode 12 and the third electrode 13, and the first electrode 11 and the second electrode 12.
- the combination of the first electrode 11 and the third electrode 13 also serves as an application circuit that applies signals to both surfaces of the piezoelectric vibrator 2.
- the common signal application circuit 23 applies a signal between the second electrode 12 and the third electrode 13 by electrically connecting the connection portions T2 and T3 when the switch 24 is in the state A2. To do.
- the common signal application circuit 23 operates as an application circuit that applies signals to both surfaces of the piezoelectric vibrator 2 when the switch 24 is in the state B2.
- the operation of the piezoelectric device 1 in the third embodiment will be described.
- the operation of the piezoelectric device 1 in the state A2 will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 24 to state A2.
- the common signal applying circuit 23 applies a voltage having an arbitrary frequency between the connecting portion T8 and the connecting portion T9.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 24 and the connection portions T1, T2, and T3.
- a voltage is applied between the first electrode 11 on the piezoelectric plate 2a and the integrated electrode of the second electrode 12 and the third electrode 13.
- the piezoelectric vibrator 2 vibrates in thickness by reflecting the characteristics of the liquid sample.
- the first signal detection circuit 21 acquires the first output value from the piezoelectric vibrator 2 that vibrates through the thickness.
- the operation of the piezoelectric device 1 in the state B2 will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 24 to state B2.
- the common signal applying circuit 23 applies a voltage having an arbitrary frequency between the connecting portion T8 and the connecting portion T9.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 24 and the connection portions T2 and T3.
- a voltage is applied between the second electrode 12 and the third electrode 13 on the piezoelectric plate 2a.
- the second signal detection circuit 22 acquires a second output value that is an electrical characteristic reflecting the characteristic of the liquid sample.
- the piezoelectric device 1 according to the present embodiment is different from the third embodiment in the configuration of the circuit unit, and is otherwise substantially the same as the first embodiment.
- the same components as those in the third embodiment described above are denoted by the same reference numerals and the description thereof is omitted.
- FIG. 9 is a configuration diagram illustrating the piezoelectric device 1 according to the present embodiment.
- the piezoelectric device 1 in this embodiment includes a piezoelectric unit 4 and a common circuit unit 33.
- the piezoelectric unit 4 includes a piezoelectric vibrator 2 having the same configuration as that shown in the third embodiment, connection portions T1, T2, and T3, and a switch 24 that is connected to the piezoelectric vibrator 2 through the connection portions T1, T2, and T3. Consists of.
- the common circuit unit 33 includes a common signal detection circuit 34 and a common signal application circuit 35.
- the common signal application circuit 35 includes an oscillator circuit 36.
- the common circuit unit 33 is connected to the switch 24 by the connecting portions T8 and T9.
- the piezoelectric device 1 is simplified by making both the signal application circuit and the signal detection circuit in the common circuit unit 33 into a single circuit.
- the operation of the piezoelectric device 1 in the fourth embodiment will be described.
- the operation of the piezoelectric device 1 in the state A2 will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 24 to state A2.
- the common signal application circuit 35 applies a voltage having an arbitrary frequency between the connection portion T8 and the connection portion T9.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 24 and the connection portions T1, T2, and T3.
- a voltage is applied between the first electrode 11 on the piezoelectric plate 2a and the integrated electrode of the second electrode 12 and the third electrode 13.
- the piezoelectric vibrator 2 vibrates in thickness by reflecting the characteristics of the liquid sample.
- the common signal detection circuit 34 acquires the first output value from the piezoelectric vibrator 2 that vibrates through the thickness.
- the operation of the piezoelectric device 1 in the state B2 will be described.
- the user prepares for measurement by immersing the piezoelectric vibrator 2 in a liquid sample.
- the user sets the switch 24 to state B2.
- the common signal application circuit 35 applies a voltage having an arbitrary frequency between the connection portion T8 and the connection portion T9.
- a voltage is applied to the piezoelectric vibrator 2 via the switch 24 and the connection portions T2 and T3.
- a voltage is applied between the second electrode 12 and the third electrode 13 on the piezoelectric plate 2a.
- the common signal detection circuit 34 acquires a second output value that is an electrical characteristic reflecting the characteristic of the liquid sample.
- the piezoelectric device 1 according to the present embodiment is substantially the same as the first embodiment except that the piezoelectric vibrator 2 is different from the first embodiment.
- the same reference numerals are given to the same components as those of the first embodiment described above, among the components of the piezoelectric device 1, and the description thereof is omitted.
- FIG. 10 is a view showing the front surface of the piezoelectric plate 2a in the fifth embodiment.
- the piezoelectric plate 2a in this embodiment has a sensitive film 30 formed on the surface thereof.
- the sensitive film 30 an appropriate film is used according to the application. For example, by selectively attaching a specific substance in a liquid or gas as a measurement sample to the sensitive film 30, the vibration state of the piezoelectric plate 2a through the thickness changes. That is, the piezoelectric device 1 can measure the mass, density, concentration in liquid or gas of the adhered substance from the change. In addition, the piezoelectric device 1 can measure the amount of precipitated insoluble particles and the like when the measurement sample is such that an insoluble component is precipitated by a chemical reaction.
- the sensitive film 30 an appropriate material is selected according to the substance to be measured, such as an oxide semiconductor, an organic polymer sensitive film, a biomaterial-containing sensitive film using an antigen-antibody reaction, and the like. Is desirable.
- membrane 30 may be used in order to amplify the change of the thickness change vibration state of the quartz plate 2 by using the material in which viscoelasticity changes a lot by attaching a trace amount substance. Thereby, the piezoelectric device 1 can improve the measurement sensitivity in the measurement using the thickness vibration.
- FIG. 11 is a view showing the back surface of the piezoelectric plate 2a.
- the piezoelectric plate 2a in FIG. 10 the example in which the sensitive film 31 is formed only on the front surface is shown, but the film may be formed only on the back surface as shown in FIG. Alternatively, the piezoelectric plate 2a may have a sensitive film formed on both the front surface and the back surface.
- the piezoelectric determination device 26 includes the piezoelectric device 1 having substantially the same configuration as that of the first embodiment. Note that the piezoelectric device 1 is not limited to the same configuration as that of the first embodiment, and any of the piezoelectric devices of the first to fifth embodiments described above may be used. In the following description, the same reference numerals are given to the same components as those in the first embodiment among the components of the piezoelectric device 1 described above, and the description thereof is omitted.
- FIG. 12 is a configuration diagram showing a configuration of the piezoelectric determination device 26 according to the present embodiment.
- the piezoelectric determination device 26 is connected to the piezoelectric device 1 having the same configuration as that shown in the first embodiment, and to the first signal detection circuit 5 and the second signal detection circuit 8 (see FIG. 1) of the piezoelectric device 1 by the connecting portions T10 and T11.
- the determination unit 27 is connected.
- the determiner 27 determines the state of the substance using the first physical quantity and the second physical quantity obtained from the piezoelectric device 1.
- the two functions of the second electrode and the third electrode are a function of a single-sided electrode for applying a signal to the piezoelectric element and a function of forming a pair of electrodes by the second electrode and the third electrode.
- the piezoelectric determination device 26 using a piezoelectric unit having a structure that also serves as a structure can realize a determination device using a composite sensor that hardly affects the thickness-thickness vibration.
- the determination unit 27 includes a display unit 28, the determination result determined by the determination unit 27, the physical quantity measured by the piezoelectric device 1, the resonance frequency and equivalent circuit constant of the piezoelectric vibrator 2, and the piezoelectric determination device 26. And the like can be displayed on the display unit 28. That is, the user can easily confirm the determination result by the determination unit 27 having the display unit 28.
- FIG. 13 is a flowchart showing a process in which the determination unit 27 of the piezoelectric determination device 26 shown in FIG. First, the determination unit 27 receives two physical quantities of the substance viscosity V and dielectric constant ⁇ from the piezoelectric device 1 (S-1).
- the viscosity V is a first physical quantity obtained from the resonance frequency that is the first output value.
- the dielectric constant ⁇ is a second physical quantity obtained from the impedance that is the second output value.
- each output value for obtaining each physical quantity is not limited to this.
- the determination unit 27 compares the viscosity V with a preset viscosity threshold Vc, and similarly compares the dielectric constant ⁇ with a preset impedance threshold ⁇ c (S-2).
- the determiner 27 outputs an output value reflecting the comparison result of (S-2) to the display unit 28 (S-3).
- the display unit 28 displays an output value or a message reflecting the output value (S-4).
- the piezoelectric determination device 26 measures the first physical quantity and the second physical quantity obtained from the piezoelectric device 1, and determines the state of the substance using both the first physical quantity and the second physical quantity.
- the piezoelectric determination device 26 is configured such that both the second electrode 12 and the third electrode 13 function as a single-sided electrode for applying a signal to the piezoelectric element, and the second electrode 12 and the third electrode 13 are a pair of electrodes.
- the characteristics and state of the substance are determined using a piezoelectric unit having a structure that also functions as two functions.
- the piezoelectric determination device 26 can determine the characteristics, state, and the like of the substance based on two or more characteristics of the substance, so that a more reliable determination result can be derived.
- the piezoelectric determination apparatus 26 which can determine that the oil / fat has deteriorated is realized when either or both of the viscosity and the dielectric constant of the oil / fat exceed a reference threshold value. .
- the piezoelectric device 1 according to the present embodiment is different from the first embodiment in the configuration of the switching device 40, and is otherwise substantially the same as the first embodiment.
- the same reference numerals are given to the same components as those of the first embodiment described above, among the components of the piezoelectric device 1, and the description thereof is omitted.
- FIG. 16 is a diagram showing the configuration of the switching device 40 in the seventh embodiment.
- the switcher 40 in this embodiment has a function that can switch the connection to either the state A3 or the state B3.
- the state A3 is a state in which the connection portion T2 and the connection portion T4 are connected and the connection portion T1 and the connection portion T5 are connected. That is, the switching device 40 generates a potential difference between the second electrode 12 and the first electrode 11 which are one of the comb electrodes, and forms a connection state in which the piezoelectric vibrator 2 vibrates in thickness.
- one of the comb-shaped electrodes is not necessarily the second electrode 12, and a state in which the third electrode 13 is connected in the same manner may be set as the state A3.
- the state B3 is a state in which the connection portion T2 and the connection portion T1 are short-circuited and connected to the connection portion T6, and the connection portion T3 and the connection portion T7 are connected.
- the piezoelectric device 1 can reduce the regulation procedure of the measurement system by short-circuiting the second electrode 12 on one side of the comb electrode and the first electrode 11 on the surface. Therefore, the piezoelectric device 1 can stably acquire the second output value obtained between the comb-shaped electrodes, and the measurement by the piezoelectric device 1 can be performed with higher accuracy.
- the piezoelectric determination device 26 according to the present embodiment is substantially the same as the sixth embodiment except that the configuration of the piezoelectric device 43 and the determination device 29 is different from that of the sixth embodiment.
- the same reference numerals are given to the same components as those of the above-described sixth embodiment among the components of the piezoelectric determination device 26, and description thereof will be omitted.
- FIG. 18 is a configuration diagram showing an embodiment of the piezoelectric determination device 26 according to the present invention.
- the determination device 29 in this embodiment includes a temperature management unit 41 that can measure and control the temperature of a substance.
- the temperature management unit 41 is electrically connected to the determination unit 29 and the display unit 28 inside the determination unit 29.
- the temperature management part 41 is provided with the adjuster 42 which can adjust the temperature of a substance from the outside.
- the piezoelectric device 43 in the present embodiment can accommodate both a substance that is a measurement sample of the piezoelectric vibrator 2 and a temperature measurement terminal 45 that measures the temperature of the substance, and at the same time, an internal substance by an electric signal from the outside.
- the temperature control mechanism 44 which can control the temperature of the is provided.
- the temperature control mechanism 44 is electrically connected to the piezoelectric device 43, and the piezoelectric device 43 and the temperature management unit 41 are connected to each other by the connecting portions T 12 and T 13 via the determination device 29.
- the electrical signal of the temperature of the substance by the temperature measurement terminal 45 is input to the temperature management part 41 via the connection part T12.
- the temperature value output from the temperature management unit 41 is displayed on the display unit 28. Therefore, the user can confirm the temperature of the substance from the outside via the display unit 28.
- the electrical signal of the set temperature that is externally input by the adjuster 42 is input to the temperature control mechanism 44 via the connection portion T13.
- the piezoelectric determination device 26 can determine the state of the substance under the same temperature condition by measuring the first physical quantity and the second physical quantity of the substance while controlling the temperature of the substance. For this reason, the piezoelectric determination device 26 can determine the state more accurately even if a substance having high temperature dependency or a piezoelectric vibrator is used.
- Measurement example of measuring two physical quantities of a liquid sample For reference, a measurement example in which two physical quantities of a liquid sample are actually measured is shown.
- fat and oil samples to be measured fat and oil A, fat and oil B, and fat and oil C are prepared, and each is subjected to QCM measurement that is equivalent to the integrated electrode and the first electrode 11 when heating treatment is repeated at 200 ° C. for 8 hours.
- QCM measurement that is equivalent to the integrated electrode and the first electrode 11 when heating treatment is repeated at 200 ° C. for 8 hours.
- a change in resonance frequency and a change in capacitance due to the comb-shaped electrode having values equivalent to those of the second electrode 12 and the third electrode 13 were measured.
- FIG. 14 shows a resonance frequency measurement result of QCM measurement using a crystal resonator.
- the horizontal axis represents the number of heat treatments of the oil and fat sample, and the vertical axis represents the resonance frequency [Hz].
- FIG. 15 shows the result of capacitance measurement using a comb electrode.
- the horizontal axis represents the number of heat treatments of the oil and fat sample, and the vertical axis represents the capacitance [pF]. From this figure, it can be seen that although the measurement data has a flutter, any of the fats and oils A, B and C has a tendency to gradually increase the capacitance. Since the capacitance reflects the dielectric constant of the substance, it can be inferred that the dielectric constant of the oil / fat has changed due to oxidative degradation due to repeated heat treatment.
- the substance is a liquid and the deterioration of the characteristics of the liquid is measured.
- Piezoelectric device 2 Piezoelectric vibrator 2a: Piezoelectric plate 3, 24, 40: Switcher 4: Piezoelectric unit 5, 21: 1st signal detection circuit 6: 1st signal application circuit 7: 1st circuit unit 8 22: second signal detection circuit 9: second signal application circuit 10: second circuit unit 11: first electrode 12, 14: second electrode 13, 15: third electrode 16: switches 17, 18, 32, 36 : Oscillator circuit 19: Oscillator circuit 20, 33: Common circuit unit 23, 35: Common signal application circuit 34: Common signal detection circuit 26: Piezoelectric determination device 27, 29: Determinator 28: Display unit 41: Temperature management unit 42: Adjuster 44: Temperature control mechanism 45: Temperature measurement terminal 30, 31: Sensitive film T1 to T13: Connection part
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Abstract
Description
そのため、QCMセンサと他のセンサを一体化した一体化センサが求められていた。
本発明に係る圧電ユニットの第1の特徴は、厚み辷り振動を励起する圧電素子と、前記圧電素子の片面に備えられる第1電極と、前記圧電素子の前記片面と反対側の面に備えられる互いに電気的に絶縁された第2電極および第3電極と、を有する電極部と、前記第1電極、前記第2電極および前記第3電極に接続され、各々の電極の接続状態を切り替える切り替え器と、を有し、前記切り替え器が、前記圧電素子の厚み辷り振動を励起させることにより前記圧電素子に接触する物質の質量もしくは粘弾性を測定するための電極の接続状態である質量・粘弾性測定モードと、前記第2電極と前記第3電極との電極間における電気特性を測定するための電極の接続状態である電気特性測定モードと、の何れかの測定モードに切り替え可能であることを特徴とする。
係る圧電ユニットの特徴によれば、圧電素子を安定した厚み辷り振動が得られる水晶振動子とすることで、厚み辷り振動を利用した測定の安定度が高い複合センサを実現することができる。
係る圧電ユニットの特徴によれば、第2電極と第3電極を櫛歯状とすることで、第2電極と第3電極を一対の電極として(切り替え器を第2状態にして)物性の測定に利用する場合において、測定対象物を介して信号が流れる経路を増やすことで、測定を高感度に行うことができる。
係る圧電ユニットの特徴によれば、圧電素子の表裏の電極の面積比をより近づけることができるため、圧電素子を安定して振動させることができ、測定を高感度に行うことができる。
係る圧電ユニットの特徴によれば、切り替え器の切り替えをより簡略化することができるため、2つ以上の物性を取得する圧電ユニットをより容易に構成することができる。
係る圧電ユニットの特徴によれば、第2電極または第3電極の何れかと第1電極と接続させておくことにより、測定系の規制容量を排除することができ、特に高周波領域での測定を高精度に行うことができる。
係る圧電ユニットの特徴によれば、圧電素子をより安定的に振動させることができ、測定を高感度に行うことができる。
係る圧電ユニットの特徴によれば、圧電素子が特定の物質を付着させる感応膜を備えている場合には、厚み辷り振動を利用した測定を実施する際に、液体や気体中に含まれる特定の物質の濃度、密度、不溶粒子量、質量などを容易に測定することができる。また、極微量な物質と結合することで粘弾性が大きく変化する感応膜を備えている場合には、厚み辷り振動を利用した測定における測定感度を向上させることができる。
係る圧電装置の特徴によれば、第2電極と第3電極の両電極が、圧電素子に信号を印加する対電極の片面電極の機能と、第2電極と第3電極で一対の電極となる機能、の2つの機能を兼ねる構造を有する圧電ユニットを利用して圧電装置とすることで、圧電装置を物性の測定に使用した際に、厚み辷り振動への影響を与えにくい複合センサ装置を実現することができる。
前記第2回路ユニットが、前記第2信号印加回路により印加される前記第2入力信号に応じた第2出力信号を検出する第2信号検出回路を有し、当該第2出力信号に基づく第2物理量を測定可能であることを特徴とする。
係る圧電装置の特徴によれば、第1状態において、第1回路ユニットに含まれる第1信号印加回路により一体電極と第1電極との間に印加された第1入力信号が、圧電素子が接する物質の物性を反映した厚み辷り振動を圧電ユニット内の圧電素子に励起し、その厚み辷り振動状態を第1信号検出回路で測定することで、物質の第1物理量を測定する。
また、係る圧電装置における第1回路ユニット、第2回路ユニットにおいて、信号検出回路と信号印加回路を一体化すると、信号の入力時と出力時における双方の信号の位相制御や位相差検出がしやすくなり、より正確な測定装置を実現することができる。
係る圧電装置の特徴によれば、第1信号印加回路がオシレータ回路を有することにより、圧電素子に印加する交流電圧の周波数を任意に設定することができる。ゆえに、圧電素子の等価回路定数を容易に求めることができる。
係る圧電装置の特徴によれば、第1信号印加回路を発振回路とすることで、圧電素子を容易に発振させることができる。
係る圧電装置の特徴によれば、第2信号印加回路がオシレータ回路を有することにより、第2電極と第3電極間に印加する交流電圧の周波数を任意に設定することができる。ゆえに、第2電極と第3電極間に介在する物質の電気的特性、電気化学的特性を容易に求めることができる。またさらに、測定できる特性に多様性を持たせることが可能になる。
係る圧電装置の特徴によれば、第1回路ユニットと第2回路ユニットを共通化することにより、圧電装置を小型化することが可能になる。
係る圧電装置の特徴によれば、信号印加回路を共通化することにより、圧電装置の構成を簡易化することができる。
係る圧電装置の特徴によれば、信号検出回路を共通化することにより、圧電装置の構成を簡易化することができる。
係る圧電装置の特徴によれば、圧電素子の厚み辷り振動における、アドミッタンス、コンダクタンス、サセプタンス、インダクタンス、リアクタンス、レジスタンス、インピーダンス、キャパシタンス、共振周波数の少なくともいずれか一つの第1出力値を取得することで、液体もしくは気体の物理量の測定に利用することができる。
係る圧電装置の特徴によれば、液体もしくは気体の粘性、弾性、粘弾性、濃度、密度、不溶粒子量、温度、質量の少なくともいずれか一つの物理量の測定装置、もしくはそれらの物理量を利用した測定装置や判定装置として利用することができる。
係る圧電装置の特徴によれば、第2電極と第3電極の一対の電極により、電位差、電流、インピーダンス、アドミッタンス、コンダクタンス、サセプタンス、インダクタンス、リアクタンス、レジスタンス、キャパシタンスの少なくともいずれか一つの第2出力値を取得することで、圧電装置を第2電極と第3電極間に介在する液体もしくは気体の物理量の測定に利用することができる。
係る圧電装置の特徴によれば、液体もしくは気体の電気伝導度、イオン伝導度、誘電率、イオン濃度、酸化還元電位、酸化還元物質濃度の少なくともいずれか一つの物理量の測定装置、もしくはそれらの物理量を利用した測定装置や判定装置として利用することができる。
係る圧電判定装置の特徴によれば、第2電極と第3電極の両電極が、圧電素子に信号を印加する電極の片面電極の機能と、第2電極と第3電極で一対の電極となる機能、の2つの機能を兼ねる構造を有する圧電ユニットを利用して圧電判定装置とすることで、厚み辷り振動への影響を与えにくい複合センサによる判定装置を実現することができる。
係る圧電判定装置の特徴によれば、判定器が表示部を有することにより、判定結果を容易に確認することができる。
係る圧電判定装置の特徴によれば、温度を計測しながら測定することにより、物質の状態をより正確に判定することができる。
係る圧電判定装置の特徴によれば、温度を制御しながら測定できることにより、同一温度条件下で判定することが可能であるため、温度依存性の高い物質や圧電素子であってもより正確に判定することができる。
係る特性状態判定方法の特徴によれば、第2電極と第3電極の少なくとも一方が、圧電素子に信号を印加する電極の片面電極の機能と、第2電極と第3電極で一対の電極となる機能、の2つの機能を兼ねる構造を有する圧電ユニットを利用して物質の特性、状態を判定することにより、物質の2つ以上の特性を基に、物質の特性、状態等を判定することができるため、より信頼性の高い判定結果を導くことができる。
係る状態判定方法の特徴によれば、第2電極と第3電極の少なくとも一方が、圧電素子に信号を印加する電極の片電極の機能と、第2電極と第3電極で一対の電極となる機能、の2つの機能を兼ねる構造を有する圧電ユニットを利用して液体の劣化状態を判定することにより、液体の2つ以上の特性を基に、液体の劣化状態を判定することができるため、より信頼性の高い液体の劣化判定を行うことができる。
以下、本発明に係る圧電装置と当該圧電装置による測定方法の第1実施形態を、図1から図5を参照して説明する。
図1は、本発明に係る圧電装置1の第1実施形態を示す構成図である。圧電装置1は、圧電ユニット4と、第1回路ユニット7と、第2回路ユニット10と、を備えている。
次いで、圧電振動子2の詳細な構成について説明する。
図2(a)、(b)は、圧電板2aのおもて面と裏面をそれぞれ示した模式図である。圧電振動子2の圧電板2aは、厚み辷り振動を励起するようにカットされたものであり、特にATカットされた水晶が望ましい。つまり、圧電装置1は、圧電素子を水晶振動子とすることで、厚み辷り振動を利用した、測定の安定度が高い複合センサを実現することができる。
なお、圧電板2aの裏面側の構成は、図2(b)で図示したものに限定されるものではなく、例えば、図3のように構成してもよい。
次いで、切り替え器3の詳細な構成について説明する。
図4は、切り替え器3の構成を示した図である。切り替え器3は、状態A(質量・粘弾性測定モード)か状態B(電気特性測定モード)の何れかの接続状態に切り替えることができる機能を有している。
なお、切り替え器3の構成は、図4で図示したものに限定されるものではなく、図5に示すものであっても良い。
次いで、第1実施形態における圧電装置1の動作について説明する。はじめに、状態Aにおける圧電装置1の動作について説明する。ユーザは、圧電振動子2を液体試料に浸漬させ、測定の準備を行う。次に、ユーザは、切り替え器3を状態Aに設定する。その後、第1信号印加回路6は、接続部T4と接続部T5との間に任意の周波数の電圧を印加する。そして、切り替え器3及び接続部T1、T2、T3を介して、圧電振動子2に電圧が印加される。状態Aにおいては、圧電板2a上の第1電極11と、第2電極12と第3電極13の一体電極との間に電圧が印加される。これにより、液体試料の特性を反映して圧電振動子2は厚み辷り振動を起こす。その後、第1信号検出回路5は、厚み辷り振動している圧電振動子2から第1出力値を取得する。
次に、図6に基づいて圧電装置1の第2実施形態について説明する。本実施形態に係る圧電装置1は、第1回路ユニット7が第1実施形態と相異しており、それ以外は第1実施形態とほぼ同様である。なお、以下では、圧電装置1の各部構成のうち上述した第1実施形態と同様の構成については同一の符号を付し、説明を省略する。
次いで、第2実施形態における圧電装置1の動作について説明する。はじめに、状態Aの動作について説明する。ユーザは、圧電振動子2を液体試料に浸漬させ、測定の準備を行う。次に、ユーザは、切り替え器3を状態Aに設定する。その後、発振回路19は、接続部T4と接続部T5との間に任意の周波数の電圧を印加する。そして、切り替え器3及び接続部T1、T2、T3を介して、圧電振動子2に電圧が印加される。状態Aにおいては、圧電板2a上の第1電極11と、第2電極12と第3電極13の一体電極との間に電圧が印加される。これにより、液体試料の特性を反映して圧電振動子2は厚み辷り振動を起こす。その後、第1信号検出回路5は、厚み辷り振動している圧電振動子2から第1出力値を取得する。
なお、状態Bの動作については、第1実施形態と同様である。
次に、図7から図8に基づいて圧電装置1の第3実施形態について説明する。本実施形態に係る圧電装置1は、切り替え器24および切り替え器24に接続される回路ユニットの構成について第1実施形態と相異しており、それ以外は第1実施形態とほぼ同様である。なお、以下では、圧電装置1の各部構成のうち上述した第1実施形態と同様の構成については同一の符号を付し、説明を省略する。
次いで、第3実施形態における圧電装置1の動作について説明する。はじめに、状態A2における圧電装置1の動作について説明する。まず、ユーザは、圧電振動子2を液体試料に浸漬させ、測定の準備を行う。次に、ユーザは、切り替え器24を状態A2に設定する。その後、共通信号印加回路23は、接続部T8と接続部T9との間に任意の周波数の電圧を印加する。そして、切り替え器24及び接続部T1、T2、T3を介して、圧電振動子2に電圧が印加される。状態A2においては、圧電板2a上の第1電極11と、第2電極12と第3電極13の一体電極との間に電圧が印加される。これにより、液体試料の特性を反映して圧電振動子2は厚み辷り振動を起こす。その後、第1信号検出回路21は、厚み辷り振動している圧電振動子2から第1出力値を取得する。
次に図9に基づいて圧電装置1の第4実施形態について説明する。本実施形態に係る圧電装置1は、回路ユニットの構成が第3実施形態と相異しており、それ以外は第1実施形態とほぼ同様である。なお、以下では、圧電装置1の各部構成のうち上述した第3実施形態と同様の構成については同一の符号を付し、説明を省略する。
このように、共通回路ユニット33内の信号印加回路と信号検出回路を共に単一回路化することで、圧電装置1は簡素化される。
次いで、第4実施形態における圧電装置1の動作について説明する。はじめに、状態A2における圧電装置1の動作について説明する。まず、ユーザは、圧電振動子2を液体試料に浸漬させ、測定の準備を行う。次に、ユーザは、切り替え器24を状態A2に設定する。その後、共通信号印加回路35は、接続部T8と接続部T9との間に任意の周波数の電圧を印加する。そして、切り替え器24及び接続部T1、T2、T3を介して、圧電振動子2に電圧が印加される。状態A2においては、圧電板2a上の第1電極11と、第2電極12と第3電極13の一体電極との間に電圧が印加される。これにより、液体試料の特性を反映して圧電振動子2は厚み辷り振動を起こす。その後、共通信号検出回路34は、厚み辷り振動している圧電振動子2から第1出力値を取得する。
次に図10、11に基づいて圧電装置1の第5実施形態について説明する。本実施形態に係る圧電装置1は、圧電振動子2が第1実施形態と相異しており、それ以外は第1実施形態とほぼ同様である。なお、以下では、圧電装置1の各部構成のうち上述した第1実施形態と同様の構成については同一の符号を付し、説明を省略する。
これにより、圧電装置1は、厚み辷り振動を利用した測定における測定感度を向上させることができる。
次に図12、13に基づいて圧電判定装置26の第6実施形態について説明する。本実施形態に係る圧電判定装置26は、第1実施形態とほぼ同様の構成からなる圧電装置1を備える。なお、圧電装置1は、第1実施形態の構成と同様のものに限られず、上述した第1実施形態から第5実施形態の何れの圧電装置を用いても良い。なお、以下の説明では、上述した圧電装置1の各部構成のうち第1実施形態と同様の構成については同一の符号を付し、説明を省略する。
次に図16に基づいて圧電装置1の第7実施形態について説明する。本実施形態に係る圧電装置1は、切り替え器40の構成が第1実施形態と相異しており、それ以外は第1実施形態とほぼ同様である。なお、以下では、圧電装置1の各部構成のうち上述した第1実施形態と同様の構成については同一の符号を付し、説明を省略する。
次に図18に基づいて圧電判定装置26の第8実施形態について説明する。本実施形態に係る圧電判定装置26は、圧電装置43と判定器29の構成が第6実施形態と相異しており、それ以外は第6実施形態とほぼ同様である。なお、以下では、圧電判定装置26の各部構成のうち上述した第6実施形態と同様の構成については同一の符号を付し、説明を省略する。
参考までに、実際に液体試料の2つの物理量を測定した測定例を示す。
測定する油脂試料として、油脂A、油脂B、油脂Cを用意し、それぞれについて200℃、8時間の加熱処理を繰り返した際の、一体電極と第1電極11と同等の値であるQCM測定による共振周波数変化と、第2電極12と第3電極13と同等の値である櫛形電極によるキャパシタンス変化を測定した。
図14は、水晶振動子によるQCM測定の共振周波数測定結果を示したものである。
横軸に油脂試料の加熱処理回数を並べ、縦軸は共振周波数[Hz]を示している。この図より、油脂A、油脂B、油脂Cの何れの油脂試料においても、加熱処理を長時間加えるにつれて、共振周波数が低下することがわかる。一般的に、液体の粘性が大きくなると、共振周波数が低下することがわかっている。今回、加熱処理を繰り返すことにより油脂の酸化劣化が進んだと推測できるが、その結果として共振周波数の低下、すなわち粘性の増大がみられたといえる。
横軸に油脂試料の加熱処理回数、縦軸にキャパシタンス[pF]を示している。この図より、測定データにバタつきがあるものの、油脂A、油脂B、油脂Cの何れの油脂も、徐々にキャパシタンスが上昇していく傾向にあることがわかる。キャパシタンスは、物質の誘電率を反映しているので、加熱処理の繰り返しによる酸化劣化では、油脂の誘電率が変化していることが推測できる。
2:圧電振動子
2a:圧電板
3、24、40:切り替え器
4:圧電ユニット
5、21:第1信号検出回路
6:第1信号印加回路
7:第1回路ユニット
8、22:第2信号検出回路
9:第2信号印加回路
10:第2回路ユニット
11:第1電極
12、14:第2電極
13、15:第3電極
16:スイッチ
17、18、32、36:オシレータ回路
19:発振回路
20、33:共通回路ユニット
23、35:共通信号印加回路
34:共通信号検出回路
26:圧電判定装置
27、29:判定器
28:表示部
41:温度管理部
42:アジャスター
44:温度制御機構
45:温度計測端子
30、31:感応膜
T1~T13:接続部
Claims (27)
- 厚み辷り振動を励起する圧電素子と、
前記圧電素子の片面に備えられる第1電極と、前記圧電素子の前記片面と反対側の面に備えられる互いに電気的に絶縁された第2電極および第3電極と、を有する電極部と、
前記第1電極、前記第2電極および前記第3電極に接続され、各々の電極の接続状態を切り替える切り替え器と、
を有し、
前記切り替え器は、前記圧電素子の厚み辷り振動を励起させることにより前記圧電素子に接触する物質の質量もしくは周辺環境の粘弾性を測定するための電極の接続状態である質量・粘弾性測定モードと、前記第2電極と前記第3電極との電極間における電気特性を測定するための電極の接続状態である電気特性測定モードと、の何れかの測定モードに切り替え可能であることを特徴とする圧電ユニット。 - 前記圧電素子は、水晶振動子であることを特徴とする請求項1に記載の圧電ユニット。
- 前記第2電極と前記第3電極の形状が櫛歯状であることを特徴とする請求項1又は2に記載の圧電ユニット。
- 前記質量・粘弾性測定モードは、前記第2電極と前記第3電極を等電位に保つことで擬似的な一体電極を形成し、前記一体電極と前記第1電極との間に電位差を形成する接続状態であることを特徴とする請求項1~3の何れか一項に記載の圧電ユニット。
- 前記質量・粘弾性測定モードは、前記第1電極と、前記第2電極または前記第3電極の何れか一方と、の間に電位差を形成する接続状態であることを特徴とする請求項1~3の何れか一項に記載の圧電ユニット。
- 前記電気特性測定モードは、前記第1電極と、前記第2電極または前記第3電極の何れか一方と、を短絡させた状態で、前記第2電極と前記第3電極との間に電位差を形成する接続状態であることを特徴とする請求項1~5の何れか一項に記載の圧電ユニット。
- 前記第1電極の外形に囲まれた領域と、前記第2電極および前記第3電極を併せた外形に囲まれた領域とは同一の面積であり、かつ、前記圧電素子を挟んだ表裏の相対位置が一致していることを特徴とする請求項1~6の何れか一項に記載の圧電ユニット。
- 前記圧電素子は、表面に感応膜を備えていることを特徴とする請求項1~7の何れか一項に記載の圧電ユニット。
- 請求項1~8の何れか一項に記載の圧電ユニットと、前記圧電ユニットに接続される第1回路ユニットと、前記圧電ユニットに接続される第2回路ユニットと、を含む圧電装置であり、
前記第1回路ユニットは、前記質量・粘弾性測定モードの接続状態において前記電極部に第1入力信号を印加する第1信号印加回路を有し、
前記第2回路ユニットは、前記電気特性測定モードの接続状態において前記電極部に第2入力信号を印加する第2信号印加回路を有することを特徴とする圧電装置。 - 前記第1回路ユニットは、前記第1信号印加回路により印加される前記第1入力信号に応じた第1出力信号を検出する第1信号検出回路を有し、当該第1出力信号に基づく第1物理量を測定可能であって、
前記第2回路ユニットは、前記第2信号印加回路により印加される前記第2入力信号に応じた第2出力信号を検出する第2信号検出回路を有し、当該第2出力信号に基づく第2物理量を測定可能であることを特徴とする請求項9に記載の圧電装置。 - 前記第1信号印加回路は、印加する信号の周波数を任意に設定可能なオシレータ回路を含むことを特徴とする請求項10に記載の圧電装置。
- 前記第1信号印加回路が、前記圧電素子の基本波あるいは倍振動での共振周波数において発振を励起する発振回路であることを特徴とする請求項10に記載の圧電装置。
- 前記第2信号印加回路は、印加する信号の周波数を任意に設定可能なオシレータ回路を含むことを特徴とする請求項10~12に記載の圧電装置。
- 前記第1回路ユニット及び前記第2回路ユニットは、同一の共通ユニットから成ることを特徴とする請求項9又は10に記載の圧電装置。
- 前記第1信号印加回路及び前記第2信号印加回路が単一の共通信号印加回路から成り、
前記共通信号印加回路は、周波数を任意に設定可能なオシレータ回路を含むことを特徴とする請求項15に記載の圧電装置。 - 前記第1信号検出回路及び前記第2信号検出回路が単一の共通信号検出回路から成ることを特徴とする請求項15又は16に記載の圧電装置。
- 前記第1信号検出回路は、検出した前記第1出力信号に基づき、前記圧電素子の辷り振動時のアドミッタンス、コンダクタンス、サセプタンス、インダクタンス、リアクタンス、レジスタンス、インピーダンス、キャパシタンス、共振周波数のいずれか一つの第1出力値を取得することを特徴とする請求項10~17の何れか一項に記載の圧電装置。
- 前記第1物理量は、前記第1出力値に基づく、粘性、弾性、粘弾性、濃度、密度、不溶粒子量、温度、質量の少なくともいずれか一つであることを特徴とする請求項10~18の何れか一項に記載の圧電装置。
- 前記第2信号検出回路は、検出した前記第2出力信号に基づき、電流、電位差、インピーダンス、アドミッタンス、コンダクタンス、サセプタンス、インダクタンス、リアクタンス、レジスタンス、キャパシタンスの少なくともいずれか一つの第2出力値を取得することを特徴とする請求項10~19の何れか一項に記載の圧電装置。
- 前記第2物理量は、前記第2出力値に基づく、電気伝導度、イオン伝導度、誘電率、イオン濃度、酸化還元電位、酸化還元物質濃度の少なくともいずれか一つであることを特徴とする請求項10~20の何れか一項に記載の圧電装置。
- 請求項10~21の何れか一項に記載の圧電装置と、
前記第1信号検出回路および前記第2信号検出回路に接続される判定器と、
を有し、
前記判定器は、前記第1物理量と前記第2物理量を利用して前記物質の特性、状態を判定することを特徴とする圧電判定装置。 - 前記判定器は、当該判定器による判定結果を表示する表示部を有することを特徴とする請求項22に記載の圧電判定装置。
- 前記判定器は、前記物質の温度を測定する温度管理部を備えることを特徴とする請求項22又は23に記載の圧電判定装置。
- 前記温度管理部は、前記物質の温度を制御する温度制御部を備えることを特徴とする請求項24に記載の圧電判定装置。
- 請求項22~25の何れか一項に記載の圧電判定装置を用いて、物質の状態を判定する状態判定方法であり、
前記第1物理量と前記第2物理量とを測定し、
前記第1物理量と前記第2物理量の双方を利用して前記物質の状態を判定することを特徴とする状態判定方法。 - 前記物質は液体であり、
前記状態は前記液体の特性の劣化状態であることを特徴とする請求項26に記載の状態判定方法。
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