WO2013154118A1 - Li含有燐酸化合物焼結体およびスパッタリングターゲット、並びにその製造方法 - Google Patents
Li含有燐酸化合物焼結体およびスパッタリングターゲット、並びにその製造方法 Download PDFInfo
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- WO2013154118A1 WO2013154118A1 PCT/JP2013/060777 JP2013060777W WO2013154118A1 WO 2013154118 A1 WO2013154118 A1 WO 2013154118A1 JP 2013060777 W JP2013060777 W JP 2013060777W WO 2013154118 A1 WO2013154118 A1 WO 2013154118A1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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Definitions
- the present invention relates to a Li-containing phosphoric acid compound sintered body used when a Li-containing phosphoric acid compound thin film useful as a solid electrolyte material such as an all-solid-state secondary battery is formed by a sputtering method, and a sputtering target. .
- the present invention relates to a Li-containing phosphoric acid compound sintered body and a sputtering target, and the Li-containing phosphoric acid compound sintered body capable of stably forming the thin film at a high film formation rate by a sputtering method. It is related with the manufacturing method.
- Li-based thin film secondary batteries All-solid-state thin film lithium secondary batteries (hereinafter referred to as “Li-based thin film secondary batteries”) are used in various devices such as thin film solar cells, thin film thermoelectric elements, and wireless charging elements.
- the demand for Li-based thin film secondary batteries is rapidly increasing.
- a Li-based thin film secondary battery typically includes a positive electrode made of a Li-containing transition metal oxide thin film containing Li and a transition metal, a solid electrolyte made of a phosphoric acid compound thin film containing Li, and a negative electrode made of a Li metal thin film. And is composed of.
- a sputtering method in which a sputtering target (hereinafter sometimes abbreviated as a target) made of substantially the same material as the film is used is suitably used.
- the sputtering method has advantages such as easy adjustment of film formation conditions and easy film formation on a semiconductor substrate.
- Patent Document 1 discloses that the relative density is 90% or more by sequentially performing CIP (cold isostatic pressing) and HIP (hot isostatic pressing), A target with a reduced proportion of a certain Li 4 P 2 O 7 phase is disclosed.
- Patent Document 2 discloses a manufacturing method in which a fine Li 3 PO 4 powder containing moisture is calcined to reduce the moisture content of the Li 3 PO 4 powder before sintering. According to this manufacturing method, a sintered body in which formation of defects (voids) such as pores is suppressed can be obtained.
- An object of the present invention is to contain a Li-containing phosphoric acid compound thin film useful as a solid electrolyte such as a Li-based thin film secondary battery, stably forming a Li-containing thin film at a high film formation rate without causing abnormal discharge.
- the Li-containing phosphoric acid compound sintered body having both a high relative density and a fine crystal grain size and having defects (voids) such as pores suppressed, a Li-containing phosphoric acid compound target, and a method for producing the same Is to provide.
- an object of the present invention is to provide a sintered body, a target, and a method for producing the same, in which an impurity phase (Li 4 P 2 O 7 phase) is reduced.
- the Li-containing phosphoric acid compound sintered body of the present invention which has solved the above problems, has no defects of 50 ⁇ m or more in a 1 mm 2 cross section within the sintered body, an average crystal grain size of 15 ⁇ m or less, and a relative density of 85%. It has a gist in the above.
- the diffraction intensity (P314) of the (011) plane of the Li 3 PO 4 phase and the diffraction intensity (P427) of the (1-11) plane of the Li 4 P 2 O 7 phase in the powder X-ray diffraction of the sintered body It is also a desirable embodiment that the ratio is P314 / P427 ⁇ 1.1.
- the present invention also includes a sputtering target obtained using the Li-containing phosphoric acid compound sintered body.
- the present invention is a method for producing the above Li-containing phosphoric acid compound sintered body, wherein a raw material containing an Li-containing phosphoric acid compound having an average particle size of 10 ⁇ m or less is not calcined while maintaining an atmosphere having a dew point of ⁇ 30 ° C. or less. After being introduced into the hot press furnace, it is summarized that it is sintered by a hot press method.
- the sintering by the hot press method is performed in a vacuum or an inert atmosphere at a hot press temperature of 700 to 1000 ° C. and a pressure of 10 to 100 MPa.
- a Li-containing phosphoric acid compound that has both a high relative density and a fine crystal grain size, a defect is suppressed, and a ratio of an impurity phase (Li 4 P 2 O 7 phase) is further reduced.
- a sintered body and a Li-containing phosphate compound target could be provided. Therefore, a Li-containing phosphate compound thin film useful as a solid electrolyte could be stably formed at a high film formation rate without causing abnormal discharge or the like.
- the present inventors have combined a high relative density and a fine crystal grain size, suppressed defects, and further reduced the impurity phase (Li 4 P 2 O 7 phase) ratio.
- a target Li-containing phosphoric acid compound sintered body target
- a raw material containing an Li-containing phosphoric acid compound having an average particle size of 10 ⁇ m or less is used; the raw material is introduced into a hot press furnace without being calcined while maintaining an atmosphere having a dew point of ⁇ 30 ° C. or lower; After the introduction, sintering is performed by a hot press method (for example, sintering is performed at a temperature of 700 to 1000 ° C. and a pressure of 10 to 100 MPa in a vacuum or an inert atmosphere); the intended purpose is achieved.
- a hot press method for example, sintering is performed at a temperature of 700 to 1000 ° C. and a pressure of 10 to 100 MPa in a vacuum or an inert atmosphere
- the production method of the present invention comprises: (A) Use fine raw material powder, (B) An atmosphere in which moisture is not adsorbed to the raw material powder, (C) It is characterized by being sintered by hot pressing without calcining, Preferably, (d) the hot pressing temperature during sintering is appropriately controlled.
- the present invention it is important to use (a) a fine raw material powder. This is because the reduction and density increase (relative density) of the Li 4 P 2 O 7 phase which is an impurity phase is mainly taken into consideration. That is, when the particle diameter of the raw material powder is coarse, a dense sintered body cannot be obtained unless it is sintered at a high temperature at which an impurity phase is generated. Therefore, in the present invention, raw material powder having an average particle size of 10 ⁇ m or less is used. If the raw material powder has an average particle size of 10 ⁇ m or less, a sintered body having an average crystal particle size of 15 ⁇ m or less can be obtained by the production method of the present invention.
- an atmosphere in which moisture is not adsorbed on the raw material powder is set. Specifically, it is important that the atmosphere until the raw material powder is refined and then introduced into the hot press furnace has a dew point of ⁇ 30 ° C. or lower.
- Li 3 PO 4 powder used as a raw material has a hygroscopic property, and when the Li 3 PO 4 powder is refined, the hygroscopic property tends to be further increased. Therefore, even if fine Li 3 PO 4 powder is used, if the moisture content is increased by adsorbing moisture in the atmosphere before sintering, the resulting sintered body has defects (voids or voids) such as pores or fine cracks. ) Will occur.
- an atmosphere in which moisture is not adsorbed even when a fine raw material powder is used.
- an atmosphere with a dew point of ⁇ 30 ° C. or lower since the raw material powder does not adsorb moisture, generation of defects (voids) caused by moisture in the sintered body can be suppressed.
- the crystal grains of the sintered body obtained by sintering can be refined (average crystal grain size of 15 ⁇ m or less).
- (c) sintering is performed by a hot press method without calcining. Since the raw material powder of the present invention does not adsorb moisture as described above, it is not necessary to carry out calcination before sintering to remove moisture from the raw material powder. Therefore, since it can sinter with fine raw material powder, the coarsening of the crystal grain by temporary sintering can be prevented.
- a hot press method is adopted in order to obtain a sintered body having a high relative density.
- the sintering conditions by the hot press method it is recommended to perform the sintering under a vacuum or an inert atmosphere (for example, nitrogen or argon) at a temperature of 700 to 1000 ° C. and a pressure of 10 to 100 MPa.
- the raw material has an average particle size from the viewpoint of reducing the impurity phase (Li 4 P 2 O 7 phase) in the sintered body, increasing the density of the sintered body, and miniaturizing the crystal grains constituting the sintered body. It is desirable to use fine raw material powder of 10 ⁇ m or less, preferably 8 ⁇ m or less, more preferably 6 ⁇ m or less.
- the lower limit of the average particle diameter of the raw material powder is not particularly limited, but is preferably 1 ⁇ m or more, more preferably 3 ⁇ m or more from the viewpoint of ease of production.
- Li-containing phosphoric acid compound Li 3 PO 4
- Li-containing phosphoric acid compound Li 3 PO 4
- a precipitate obtained from an aqueous solution in which Li and P are dissolved may be heated to a predetermined temperature to obtain a Li-containing phosphoric acid compound (Li 3 PO 4 ).
- the Li-containing phosphoric acid compound thus obtained is finely pulverized by a pulverizer such as a ball mill to obtain a raw material powder having an average particle size of 10 ⁇ m or less.
- a pulverizer such as a ball mill to obtain a raw material powder having an average particle size of 10 ⁇ m or less.
- pulverization for a certain period of time is necessary. At this time, contamination from balls used for pulverization may occur. From the viewpoint of suppressing contamination, it is desirable that the particle size of the powder before pulverization is small.
- the powder obtained by raising the temperature of the precipitate obtained from the aqueous solution has less contamination, and a fine raw material powder can be obtained.
- the atmosphere until the raw material (Li 3 PO 4 powder) is introduced into the hot press furnace is preferably dew point of ⁇ 30 ° C. or lower. Specifically, the dew point is set to ⁇ 30 ° C. or less immediately after the raw material powder of 10 ⁇ m or less is manufactured.
- the raw material powder is filled in a predetermined graphite mold without being calcined, and then introduced into a hot press furnace.
- the inside of the hot press furnace is in a vacuum or an inert atmosphere, it is basically unnecessary to control the dew point after introduction into the furnace.
- the reason why the graphite mold is filled without calcining is that the grain size may be coarsened if calcined.
- the raw material powder is filled into a graphite mold in the dew point atmosphere.
- the raw material powder may be filled directly without pre-molding, or after filling another mold and pre-molding with a mold press, It may be filled.
- the latter preforming is performed for the purpose of improving the handleability when setting to a predetermined mold in the hot press process. For example, a pressure of about 0.5 to 1.0 tonf / cm 2 is applied. It is preferable to form a preform.
- the sintering conditions by hot pressing are preferably controlled to a vacuum or inert atmosphere, a temperature of 700 to 1000 ° C., and a pressure of 10 to 100 MPa.
- the sintering temperature is less than 700 ° C., the relative density of the sintered body is as low as less than 85%, and cracks are likely to occur during sputtering.
- the sintering temperature exceeds 1000 ° C., the average crystal grain size of the sintered body becomes large and the impurity phase (Li 4 P 2 O 7 phase) cannot be kept low, and the strength ratio (P314 / P427) ) Becomes less than 1.1.
- the sintering temperature is preferably 900 ° C. or higher and 950 ° C. or lower.
- Sintering in a vacuum or in an inert atmosphere prevents moisture from adsorbing to the raw material powder introduced into the furnace and suppresses oxidation and disappearance of the graphite-type graphite used in the present invention. It is to do.
- the gas used in the inert atmosphere include inert gases such as Ar and N 2 .
- the atmosphere control method is not particularly limited. For example, the atmosphere may be adjusted by introducing Ar gas or N 2 gas into the furnace.
- the holding time at this time varies depending on the temperature and pressure during sintering, but is preferably about 100 hours or less. When the holding time exceeds 100 hours, weight reduction due to sintering becomes significant, and a good sintered body (especially a sintered body having a high relative density) cannot be obtained.
- the holding time includes 0 hour (no holding). For example, when the sintering temperature is set in an optimum range in relation to the raw materials, the holding time can be zero.
- the oxide sintered body obtained as described above has a high relative density, a fine average crystal grain size, and no defects (voids). Moreover, a sintered body with a low impurity phase can be obtained by appropriately controlling the temperature during sintering.
- the sputtering target of the present invention can be obtained by processing and bonding the above oxide sintered body by a conventional method.
- the sputtering target thus obtained also has a high relative density and a fine crystal grain size, is free of defects, and preferably has a low impurity phase, which is very good like a sintered body.
- the Li-containing phosphoric acid compound sintered body of the present invention has (1) an average crystal grain size of 15 ⁇ m or less, (2) no defects (voids) of 50 ⁇ m or more in the cross section inside the sintered body, (3) The relative density is 85% or more, and preferably (4) the intensity ratio (P314 / P427) of the Li 3 PO 4 phase to the Li 4 P 2 O 7 phase in powder X-ray diffraction is 1.1 or more.
- the Li-containing phosphoric acid compound sintered body of the present invention has (1) an average crystal grain size of 15 ⁇ m or less.
- a preferable average crystal grain size is 12 ⁇ m or less, more preferably 10 ⁇ m or less.
- the void evaluated as a defect can be measured by a longitudinal cross-sectional SEM photograph of the sintered body. Specifically, an arbitrary region of the sintered body longitudinal section is observed with an SEM, a defect (void) is identified from the SEM photograph, and the length (maximum diameter) is measured.
- the sintered body of the present invention has no defects of 50 ⁇ m or more in the 1 mm 2 region.
- the relative density of the sintered body is 85% or more. Since the deposition power during sputtering can be increased by increasing the relative density, the deposition rate is improved and the productivity is increased. On the other hand, if the relative density is less than 85%, the target may be cracked during sputtering.
- a preferable relative density is 90% or more, more preferably 95% or more, and still more preferably 98% or more.
- the sintered body of the present invention can achieve the intended purpose as long as the above conditions (1) to (3) are satisfied.
- (4) Li 3 PO 4 phase and Li 3 in powder X-ray diffraction are used. It is desirable that the strength ratio (P314 / P427) of the 4 P 2 O 7 phase is 1.1 or more. If the strength ratio of the Li 3 PO 4 phase and the Li 4 P 2 O 7 phase is 1.1 or more, a uniform sintered body can be obtained, so that the film formation stability is improved and the formed Li-containing phosphoric acid The characteristics of the compound membrane as a solid electrolyte membrane are also improved.
- the powder X-ray diffraction intensity (P314) of the (011) plane of the Li 3 PO 4 phase and the Li 4 P 2 O 7 The powder X-ray diffraction intensity (P427) of the (1-11) plane of the phase is shown in the XRD chart.
- the intensity ratio of P314 / P427 may be calculated based on the chart.
- the strength ratio of P314 / P427 is preferably 1.5 or more, more preferably 2.0 or more, preferably 5.0 or less, more preferably 4.0 or less, and still more preferably 3.0 or less.
- a sputtering target (Li-containing phosphoric acid compound sintered body target) obtained by using the above sintered body is also included within the scope of the present invention.
- the manufacturing method of a sputtering target is not specifically limited, The method used normally can be used.
- the sputtering target thus obtained also has the same characteristics (high relative density, no voids, fine average crystal grain size, more preferably low impurity phase) as the Li-containing phosphoric acid compound sintered body.
- Li 3 PO 4 powder (purity: 99.9% or more, average particle size: “particle size” described in Table 1) was used as the raw material powder.
- the raw material powder was directly set in a graphite mold and sintered by hot pressing under the conditions shown in Table 1 to obtain a sintered body.
- Table 1 No. In Nos. 1 to 6 and 8, the raw material powder was set in a graphite mold and the atmosphere had a dew point of ⁇ 30 ° C. or lower until it was introduced into a hot press furnace. No. 1 to 7 were sintered without calcination. In addition, No. No.
- the X-ray diffraction intensity (P314) of the (011) plane of the Li 3 PO 4 phase and the X-ray diffraction intensity (P427) of the (1-11) plane of the Li 4 P 2 O 7 phase of each sintered body are expressed as CuK ⁇ It was measured by powder X-ray diffraction using a wire. The intensity ratio (P314 / P427) was determined from the obtained X-ray diffraction chart.
- No. 1 in Table 1 Reference numerals 2 to 4 denote Li-containing phosphoric acid compound sintered bodies produced by the production method defined in the present invention. These No. Nos. 2 to 4 had no defects (voids) of 50 ⁇ m or more as defined in the present invention, had an average crystal grain size of 15 ⁇ m or less, and a high relative density of 85% or more.
- the intensity ratio (P314 / P427) is No. 2 is 1.2, no. 3 is 1.5, no. 4 was 2.9, all satisfying the preferable definition of the present invention.
- No. 1 in Table 1 Since the sintering temperature of No. 1 was low, the relative density decreased. No. No. 5 had a high sintering temperature and a high relative density, but the average grain size defined in the present invention was not satisfied because the average grain size of the powder raw material was large. No. No. 6 did not satisfy the average crystal grain size defined in the present invention because the powder raw material had a large average grain size. No. Since no dew point control was performed on No. 7, defects of 50 ⁇ m or more occurred. No. Since No. 8 was calcined, it did not satisfy the average crystal grain size defined in the present invention.
- Film formation apparatus RF magnetron sputtering apparatus is used Film formation conditions: substrate temperature room temperature, RF discharge power 600 W, sputtering gas pressure 3 mTorr, a mixed gas of Ar and nitrogen is used as the sputtering gas, and the film thickness is 500 nm.
- Deposition procedure Each target was mounted on the sputtering apparatus, and a glass substrate was mounted on the substrate stage facing the target. The inside of the chamber was evacuated to 5 ⁇ 10 ⁇ 4 Pa or less with a vacuum pump, and the substrate temperature was adjusted to room temperature. Next, the above sputtering gas was supplied into the chamber using mass flow.
- a high voltage was applied to the target using an RF (alternating current) power source to cause plasma discharge.
- the discharge power was 600 W, and the film was formed to a thickness of 500 nm.
- the target A having a low relative density (relative density: 76.6%)
- the target was broken during the film formation.
- the target C having a large average crystal grain size (average crystal grain size: 35 ⁇ m)
- the target D having defects (two defects)
- the target E having a large average crystal grain size (average crystal grain size: 25 ⁇ m) An abnormal discharge occurred and stable discharge could not be maintained.
- target B that satisfies all the provisions of the present invention, the target was not broken during film formation, and stable discharge could be maintained.
- a Li-containing phosphoric acid compound thin film useful for an electrolyte thin film such as a Li-based secondary battery can be stably formed at a high film formation rate by sputtering without causing target cracking or abnormal discharge. It was confirmed that it was possible. Therefore, the use of the sputtering target is extremely useful in that the thin film can be provided at a high film formation rate.
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Abstract
Description
(ア)微細な原材料粉末を使用すること、
(イ)原材料粉末に水分が吸着しない雰囲気とすること、
(ウ)仮焼せずにホットプレス法によって焼結すること、に特徴を有しており、
好ましくは、(エ)焼結時のホットプレス温度を適切に制御することにある。
原材料は、焼結体中の不純物相(Li4P2O7相)の低減、焼結体の高密度化、および焼結体を構成する結晶粒の微細化を図る観点からは平均粒径10μm以下、好ましくは8μm以下、更に好ましくは6μm以下の微細な原材料粉末を用いることが望ましい。一方、原材料粉末の平均粒径の下限は特に限定されないが、製造容易性の観点から、好ましくは1μm以上、より好ましくは3μm以上である。
更に本発明では上記原材料(Li3PO4粉末)をホットプレス炉に導入するまでの雰囲気を露点-30℃以下とすることが好ましい。詳細には、10μm以下の原材料粉末を製造した直後から雰囲気を露点-30℃以下とする。この雰囲気下で仮焼せずに該原材料粉末を所定の黒鉛型に充填した後、ホットプレス炉に導入する。後記するようにホットプレス炉内は真空または不活性雰囲気であるため、炉内導入後は基本的に露点の制御が不要である。上記仮焼せずに黒鉛型に充填するのは、仮焼すると粒径が粗大化することがあるからである。
上記原材料を焼結するにあたっては、まず、上記露点雰囲気下で上記原材料粉末を黒鉛型に充填する。黒鉛型への充填に当たっては、上記原材料粉末を、予備成形することなく直接、充填しても良いし、或いは、別の金型に一旦充填し、金型プレスで予備成形した後、黒鉛型に充填しても良い。後者の予備成形は、ホットプレス工程で所定の型にセットする際のハンドリング性を向上させる目的で行なわれるものであり、例えば、約0.5~1.0tonf/cm2程度の加圧力を加えて予備成形体とすることが好ましい。
本発明のLi含有燐酸化合物焼結体は、(1)平均結晶粒径が15μm以下であること、(2)焼結体内部の断面に50μm以上の欠陥(空隙)がないこと、(3)相対密度が85%以上であること、また好ましくは(4)粉末X線回折におけるLi3PO4相とLi4P2O7相の強度比(P314/P427)が1.1以上である。
本発明には、上記焼結体を用いて得られるスパッタリングターゲット(Li含有燐酸化合物焼結体ターゲット)も、本発明の範囲内に包含される。スパッタリングターゲットの製造方法は特に限定されず、通常用いられる方法を用いることができる。このようにして得られるスパッタリングターゲットも、上記Li含有燐酸化合物焼結体と同様の特性(高い相対密度、空隙がない、微細な平均結晶粒径、更に好ましくは低い不純物相)が得られる。
(Li含有燐酸化合物焼結体の作製)
原材料粉末としてLi3PO4粉末(純度:99.9%以上、平均粒径:表1記載の「粒径」)を用いた。
上記の原材料粉末を、直接、黒鉛型にセットし、表1に示す条件で、ホットプレスによる焼結を行ない、焼結体を得た。なお、表1のNo.1~6、8は原料粉末を黒鉛型にセットし、ホットプレス炉に導入するまでは露点-30℃以下の雰囲気とした。またNo.1~7は仮焼を行わずに焼結を行った。なお、No.7は露点を管理せず、露点-30℃超の雰囲気で黒鉛型にセットし、ホットスタンプ炉に導入した。No.8は原材料粉末を黒鉛型にセットする前に大気中で750℃、3時間仮焼した。
上記各焼結体の相対密度を、アルキメデス法によって測定した。
上記各焼結体のLi3PO4相の(011)面のX線回折強度(P314)とLi4P2O7相の(1-11)面のX線回折強度(P427)を、CuKα線を用いた粉末X線回折により測定した。得られたX線回折チャートから強度比(P314/P427)を求めた。
上記各焼結体の縦断面における任意の位置を走査型電子顕微鏡(SEM)で観察し、破面写真(SEM写真、視野サイズ:150×220μm)より、切断法にて求めた。
上記各焼結体の縦断面のSEM写真の任意の1mm2領域において、欠陥(空隙)の最大径をスケールから求め、目視にて最大径が50μm以上の欠陥の個数を測定した。
(スパッタリングターゲットの作製)
次に、上記No.1、No.3、No.5、No.7、No.8の焼結体を用いてスパッタリングターゲットを製造した。スパッタリングターゲットは、上記の各焼結体を機械加工して4インチφ×5mmt(t=厚み)に仕上げ、Cu製バッキングプレートにインジウムを用いてボンディングすることによって得た。No.1、No.3、No.5、No.7、No.8の上記焼結体を用いて得られたスパッタリングターゲットを、それぞれターゲットA~Eと呼ぶ。
成膜条件:基板温度室温、RF放電パワー600W、スパッタガス圧3mTorr、スパッタガスとしてArと窒素の混合ガスを使用、成膜膜厚500nm
成膜手順:
各ターゲットを上記のスパッタ装置に装着し、ターゲットに対向する基板ステージ上にガラス基板を装着した。チャンバー内を真空ポンプで5×10-4Pa以下の真空に引き、基板温度を室温に調整した。次に、マスフローを用いて上記のスパッタガスをチャンバー内に供給した。スパッタガス圧を3mTorrに調整した後、RF(交流)電源を用いてターゲットに高電圧を印加し、プラズマ放電させた。このときの放電パワーは600Wで行い、500nmの膜厚になるよう成膜を実施した。
Claims (6)
- Liを含む燐酸化合物焼結体であって、焼結体内部の断面1mm2領域中に50μm以上の欠陥がなく、平均結晶粒径が15μm以下であり、相対密度が85%以上であることを特徴とするLi含有燐酸化合物焼結体。
- 前記焼結体の粉末X線回折におけるLi3PO4相の(011)面の回折強度(P314)とLi4P2O7相の(1-11)面の回折強度(P427)の強度比が、P314/P427≧1.1である請求項1に記載のLi含有燐酸化合物焼結体。
- 請求項1に記載のLi含有燐酸化合物焼結体を用いて得られるスパッタリングターゲット。
- 請求項2に記載のLi含有燐酸化合物焼結体を用いて得られるスパッタリングターゲット。
- 請求項1に記載のLi含有燐酸化合物焼結体を製造する方法であって、
平均粒径10μm以下のLi含有燐酸化合物を含む原材料を、露点-30℃以下の雰囲気に維持しながら仮焼せずにホットプレス炉に導入した後、ホットプレス法によって焼結することを特徴とするLi含有燐酸化合物焼結体の製造方法。 - 前記ホットプレス法による焼結は、真空または不活性雰囲気下、ホットプレス温度700~1000℃、圧力10~100MPaで行うものである請求項5に記載の製造方法。
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CN201380019399.1A CN104245623B (zh) | 2012-04-11 | 2013-04-10 | 含Li磷酸化合物烧结体和溅射靶,及其制造方法 |
EP13776280.3A EP2837610A4 (en) | 2012-04-11 | 2013-04-10 | SINTER BODY AND SPUTTER TARGET OF A LI-CONTAINING PHOSPHORIC ACID COMPOUND AND METHOD FOR PRODUCING THE SINTERED BODY FROM THE LI-CONTAINING PHOSPHORIC ACID CONNECTION |
US14/386,950 US9892891B2 (en) | 2012-04-11 | 2013-04-10 | Li-containing phosphoric-acid compound sintered body and sputtering target, and method for manufacturing said Li-containing phosphoric-acid compound sintered body |
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US9870902B2 (en) | 2013-04-30 | 2018-01-16 | Kobelco Research Institute, Inc. | Li-containing oxide target assembly |
JP2018024933A (ja) * | 2016-07-29 | 2018-02-15 | 三菱マテリアル株式会社 | Cu−Gaスパッタリングターゲット及びCu−Gaスパッタリングターゲットの製造方法 |
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