WO2013153953A1 - Device for applying adhesive film, method for applying adhesive film, and connection structure - Google Patents

Device for applying adhesive film, method for applying adhesive film, and connection structure Download PDF

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Publication number
WO2013153953A1
WO2013153953A1 PCT/JP2013/059098 JP2013059098W WO2013153953A1 WO 2013153953 A1 WO2013153953 A1 WO 2013153953A1 JP 2013059098 W JP2013059098 W JP 2013059098W WO 2013153953 A1 WO2013153953 A1 WO 2013153953A1
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WO
WIPO (PCT)
Prior art keywords
adhesive
film
adhesive film
sticking
base film
Prior art date
Application number
PCT/JP2013/059098
Other languages
French (fr)
Japanese (ja)
Inventor
美佐夫 小西
Original Assignee
デクセリアルズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by デクセリアルズ株式会社 filed Critical デクセリアルズ株式会社
Priority to KR1020147025645A priority Critical patent/KR20140124848A/en
Priority to KR1020167019852A priority patent/KR20160091444A/en
Priority to CN201380017895.3A priority patent/CN104203786A/en
Publication of WO2013153953A1 publication Critical patent/WO2013153953A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B65H37/002Web delivery apparatus, the web serving as support for articles, material or another web
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B65H37/04Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for securing together articles or webs, e.g. by adhesive, stitching or stapling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H37/00Article or web delivery apparatus incorporating devices for performing specified auxiliary operations
    • B65H37/02Article or web delivery apparatus incorporating devices for performing specified auxiliary operations for applying adhesive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00Handling processes for sheets or webs
    • B65H2301/50Auxiliary process performed during handling process
    • B65H2301/51Modifying a characteristic of handled material
    • B65H2301/514Modifying physical properties
    • B65H2301/5143Warming
    • B65H2301/51432Applying heat and pressure

Definitions

  • the present invention relates to a bonding apparatus for bonding a tape-shaped adhesive film to an object to be bonded, and in particular, an adhesive film bonding apparatus, an adhesive film bonding method, and a connection that have been improved in the adhesive film transport process. Concerning the structure.
  • a mounting method has been used in which an electronic component is mounted on an object to be connected such as a glass substrate using an adhesive film.
  • a COG (Chip on Glass) mounting method in which an IC chip that is a liquid crystal driving circuit is mounted on the periphery of a liquid crystal display panel (LCD panel) via a conductive adhesive film, or a tab that serves as an interconnector in a solar cell
  • the connection method which connects a line is mentioned.
  • the conductive adhesive film 50 is obtained by forming an adhesive layer 50a in which conductive particles are dispersed in a binder resin on a base film 50b serving as a support.
  • a conductive adhesive film 50 is used in the form of a film wound body wound around a core 53 of a reel member 51 having a pair of reel flanges 52 as shown in FIG. , See Patent Document 1).
  • the conductive adhesive film 50 unwound from the reel member 51 is conveyed onto a support base 56 on which a connection object 55 such as a glass substrate is supported while being guided by a plurality of guide rollers 54. Then, the adhesive layer 50 a side is temporarily attached to the terminal electrode region formed on the connection object 55. At this time, the conductive adhesive film 50 is provided on the support base 56 so as to be movable up and down, and is heated from the base film 50b side at a predetermined pressure and a predetermined time by a heating and pressing head 57 heated to a predetermined temperature. Pressed. Thereby, as for the electroconductive adhesive film 50, the adhesive bond layer 50a peels from the base film 50b, and it sticks on the connection target object 55 side (for example, refer patent document 2).
  • the temperature and pressure for temporarily attaching the conductive adhesive film 50 are also required to be further reduced in temperature and pressure.
  • the adhesive layer 50a of the conductive adhesive film 50 may not be sufficiently peeled off from the base film 50b, and an error in sticking to the connection object 55 may occur.
  • An object of the present invention is to provide an adhesive film sticking apparatus, an adhesive film sticking method, and a connection structure manufactured thereby.
  • Means for solving the problems are as follows. That is, ⁇ 1> A transport mechanism for transporting a tape-like adhesive film having a base film and an adhesive layer supported on the base film; A support part for supporting an object to be adhered to which the adhesive layer is adhered; A head that is provided facing the support portion and presses the adhesive film conveyed onto the sticking object against the sticking object, and causes the adhesive layer to stick to the sticking object.
  • the removal member is an adhesive tape.
  • the adhesive film sticking apparatus according to ⁇ 1>, wherein the removal member is a roll.
  • the transport mechanism includes a plurality of guide rollers that guide the adhesive film, and chucking pieces that sandwich and pull the base film from which the adhesive layer has been peeled.
  • An adhesive film sticking apparatus according to any one of the above.
  • the adhesive film according to any one of ⁇ 1> to ⁇ 4> including a cut mechanism that half-cuts the adhesive layer side. Landing gear.
  • the adhesive film is a conductive adhesive film in which conductive particles are dispersed in the adhesive layer, or an insulating adhesive film in which conductive particles are not contained in the adhesive layer.
  • An adhesive film sticking apparatus according to any one of the above.
  • an adhesive film sticking method for removing the adhesive layer remaining on the base film by a removing member at a downstream side of the supporting portion and the head in the conveying direction of the adhesive film. is there.
  • ⁇ 8> The method for attaching an adhesive film according to ⁇ 7>, wherein the removing member is an adhesive tape.
  • the transport mechanism includes a plurality of guide rollers that guide the adhesive film, and a chucking piece that sandwiches and pulls the base film from which the adhesive layer has been peeled off.
  • ⁇ 11> A connection structure manufactured using the adhesive film sticking method according to any one of ⁇ 7> to ⁇ 10>.
  • the adhesive layer does not remain on the base film, and the adhesive layer does not adhere to the transport mechanism. Therefore, an error does not occur when the base film is sandwiched or pulled by the adhesive layer, and time loss due to the stop of the production line can be prevented.
  • FIG. 1 is a side view showing an example of a sticking apparatus to which the present invention is applied.
  • FIG. 2 is a cross-sectional view showing an example of the configuration of the adhesive film.
  • FIG. 3 is a side view showing another example of another sticking apparatus to which the present invention is applied.
  • FIG. 4A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film.
  • FIG. 4B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate.
  • FIG. 1 is a side view showing an example of a sticking apparatus to which the present invention is applied.
  • FIG. 2 is a cross-sectional view showing an example of the configuration of the adhesive film.
  • FIG. 3 is a side view showing another example of another sticking apparatus to which the present invention is applied.
  • FIG. 4C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied.
  • the base film is sandwiched and pulled by a chucking piece and is removed onto the base film by a removing member (adhesive tape). It is a side view which shows the state which removes the remaining binder.
  • FIG. 5A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film.
  • FIG. 5B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate.
  • FIG. 5C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied.
  • the base film is sandwiched and pulled by a chucking piece and remains on the base film by a removing member (roll). It is a side view which shows the state which removes the binder to perform.
  • FIG. 6A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film.
  • FIG. 6B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate.
  • FIG. 6C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied.
  • the base film is sandwiched and pulled by a chucking piece and remains on the base film by a removing member (roll). It is a side view which shows the state which removes the binder to perform.
  • FIG. 7 is a perspective view showing a reel member around which an adhesive film is wound.
  • FIG. 8A is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a process of heat-pressing an adhesive film.
  • FIG. 8B is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate.
  • FIG. 8C is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a state in which the base film is sandwiched and pulled by a chucking piece.
  • FIG. 9 is a side view showing a state in which a conventional sticking apparatus is held and pulled by a chucking piece while an adhesive layer remains on the base film due to a temporary sticking failure.
  • the attachment device 1 for the adhesive film 20 to which the present invention is applied is preliminarily applied to an object to be attached when an electronic component such as an IC chip or a flexible substrate is mounted on an object to be attached such as a glass substrate or a printed wiring board.
  • An adhesive film 20 such as an anisotropic conductive adhesive film (ACF) is temporarily attached on the provided terminal electrode.
  • ACF anisotropic conductive adhesive film
  • substrates 10 such as a glass substrate and a printed wiring board, are demonstrated to an example as a sticking target object.
  • the sticking apparatus 1 includes a transport mechanism 2 that transports a tape-like adhesive film 20, a support base 3 that supports a substrate 10 to which an adhesive layer 21 is pasted, and a support base 3.
  • the heating press head 4 that presses the adhesive film 20 conveyed on the substrate 10 against the substrate 10 and attaches the adhesive layer to the substrate 10, the support base 3, and the heating press head 4.
  • the removal member 5 is provided further on the downstream side in the transport direction of the adhesive film 20 and removes the adhesive layer 21 remaining on the base film 22.
  • the adhesive film 20 temporarily attached by the sticking apparatus 1 includes an adhesive layer 21 made of a binder (insulating adhesive composition) 21a containing conductive particles 23 and an adhesive. And a base film 22 serving as a support for supporting the layer 21.
  • the adhesive film 20 will be described in detail later.
  • the support base 3 supports the substrate 10 to which the adhesive film 20 is temporarily attached.
  • the support 3 is provided with a positioning mechanism (not shown) for positioning the substrate 10.
  • the support 3 is supported by an XY stage and can align the terminal electrodes of the substrate 10 with respect to the adhesive film 20 and the heating and pressing head 4.
  • a heating and pressing head 4 that heat-presses the adhesive film 20 against the substrate 10 is provided.
  • the heater 4a for heating the adhesive film 20 is built in the heating and pressing head 4.
  • the heating and pressing head 4 can be moved up and down by an elevating mechanism 6.
  • the elevating mechanism 6 includes, for example, a drive cylinder and a rod to which the heating and pressing head 4 is attached, and raises and lowers the heating and pressing head 4 according to the operation of the rod.
  • the raising / lowering mechanism 6 can be comprised by a well-known mechanism other than using the mechanism which consists of a drive cylinder and a rod.
  • the adhering apparatus 1 is a temporary adhering position where the adhesive layer 21 of the adhesive film 20 is temporarily adhering to the substrate 10 between the support 3 and the heating and pressing head 4.
  • the conveyance mechanism 2 that conveys the adhesive film 20 between the support 3 and the heating and pressing head 4 includes a supply reel 11 around which the tape-like adhesive film 20 is wound and a base film 22 from which the adhesive layer 21 has been peeled off.
  • the supply reel 11 includes a winding core 16 around which a tape-like adhesive film 20 is wound, and reel flanges 17 provided on both sides of the winding core 16.
  • the adhesive film 20 wound around the supply reel 11 forms a film winding body 18 by being wound around the core 16.
  • the take-up reel 12 also includes a core around which the base film 22 from which the adhesive layer 21 has been peeled is wound, and reel flanges provided on both sides of the core.
  • supply reel 11 and the take-up reel 12 are both engaged with a rotational drive source (not shown), and are rotated by the rotational drive source to unwind the adhesive film 20 or peel off the adhesive layer 21.
  • the base film 22 is wound up.
  • the pair of chucking pieces 14 sandwich the base film 22 and pull it in the direction of arrow A in FIG.
  • the pair of chucking pieces 14 conveys the base film 22 to the take-up reel 12 and conveys a new adhesive film 20 to the temporary attachment position.
  • the chucking piece 14 can be moved close to and away from the traction drive source 19 to sandwich and release the base film 22.
  • the chucking piece 14 is linearly driven in the vertical direction between the position indicated by the solid line and the position indicated by the broken line in FIG.
  • the traction drive source 19, the rotation drive source that rotates the supply reel 11, and the rotation drive source that rotates the take-up reel 12 are all operated in synchronization. Therefore, the transport mechanism 2 performs unwinding of the adhesive film 20, pulling of the base film 22 from which the adhesive layer 21 has been peeled, and winding of the base film 22 in synchronism, thereby transporting the adhesive film 20. It can be carried out.
  • the removing member 5 is for removing the binder 21a remaining in the base film 22 in advance before the base film 22 is sandwiched between the chucking pieces 14 and preventing a pinching error and a traction error due to the chucking pieces 14. is there.
  • the removal member 5 is provided on the downstream side in the transport direction of the adhesive film 20 from the temporary attachment position, and is provided on the upstream side in the transport direction of the adhesive film 20 from the chucking piece 14.
  • the removal member 5 is constituted by an adhesive tape 30, for example, as shown in FIG.
  • the pressure-sensitive adhesive tape 30 a known pressure-sensitive adhesive tape can be used as long as it has an adhesive force larger than the adhesive force with the base film 22 between the adhesive layer 21.
  • the adhesive force between the adhesive layer 21 and the base film 22 is, for example, 1.6 mN / cm. Therefore, the adhesive tape 30 has an adhesive force with the binder 21a of 1.6 mN / cm or more.
  • the adhesive tape 30 is wound around the first winding core 31, unwound from the first winding core 31, then drawn along the transport route of the base film 22, and the second winding core 32. Rolled up.
  • the adhesive tape 30 is supported to face the base film 22 by a pressing member 35 provided between the temporary attachment position on the transport route of the base film 22 and the chucking piece 14.
  • the pressing member 35 presses the adhesive surface of the adhesive tape 30 against the base film 22, and is driven by a driving mechanism (not shown) so that the adhesive tape 30 can be pressed toward the base film 22 side.
  • the sticking apparatus 1 normally retracts the pressing member 35 downward and separates the adhesive tape 30 from the base film 22.
  • the sticking apparatus 1 is provided with a detection means 25 such as a camera or a sensor on the downstream side of the temporary sticking position, and monitors whether or not the binder 21a remains on the base film 22.
  • a detection means 25 such as a camera or a sensor on the downstream side of the temporary sticking position, and monitors whether or not the binder 21a remains on the base film 22.
  • the sticking device 1 detects the binder 21a remaining on the base film 22 and then presses the pressing member. 35 is driven to press the adhesive tape 30 against the base film 22, and the remaining binder 21 a is removed from the base film 22.
  • the binder 21a does not remain on the base film 22, and the binder 21a does not adhere to the chucking piece 14 even when the chucking piece 14 holds the binder 21a. Therefore, even when the chucking piece 14 holds and pulls the base film 22 thereafter, a chucking error due to the attachment of the binder 21a does not occur, and time loss due to the stop of the production line can be prevented. .
  • the roll 40 is supported between the temporary attachment position on the transport route of the base film 22 and the chucking piece 14 with the rolling direction parallel to the transport direction of the base film 22.
  • the roll 40 is always supported at a position in contact with the base film 22 and may always roll following the conveyance of the base film 22, or may be supported so as to be close to and away from the base film 22.
  • the base film 22 may be slidably contacted.
  • the sticking apparatus 1 provided with the roll 40 as the removing member 5 can stick the binder 21a remaining on the base film 22 to the roll 40 and remove the base film 22 by rolling the roll 40.
  • the sticking apparatus 1 wipes the stuck binder 21a from the roll 40 by bringing a scraper (not shown) into contact with the roll 40 or rolling another roll, and maintains the removal performance of the binder 21a. You may make it do. Further, every time the binder 21a remaining on the base film 22 is detected, the sticking apparatus 1 makes the roll 40 contact with the base film 22 and replaces it with a clean roll 40 each time the binder 21a is removed. May be.
  • the adhesive film 20 conveyed to the sticking apparatus 1 will be described.
  • the adhesive film 20 includes an adhesive layer 21 and a base film 22 serving as a support that supports the adhesive layer 21.
  • the adhesive layer 21 can be an anisotropic conductive film (ACF: Anisotropic Conductive Film) containing conductive particles 23 in a binder (insulating adhesive composition) 21a, but is not limited thereto.
  • ACF Anisotropic Conductive Film
  • NCF Non-Conductive Film
  • the binder 21a of the adhesive film for example, a normal binder containing a film-forming resin, a thermosetting resin, a latent curing agent, a silane coupling agent, or the like can be used.
  • a normal binder containing a film-forming resin, a thermosetting resin, a latent curing agent, a silane coupling agent, or the like can be used.
  • an anisotropic conductive composition in which conductive particles 23 are dispersed in a binder 21 a or an insulating adhesive composition that does not contain the conductive particles 23 in a binder 21 a is applied on the base film 22.
  • the film is formed on the base film 22.
  • the base film 22 supports the binder 21a in the form of a film.
  • a film For example, PET (Poly Ethylene Terephthalate), OPP (Oriented Polypropylene), PMP (Poly-4-methylpentene-1), PTFE (Polytetrafluoroethylene), and the like. It is formed by applying a release agent such as.
  • the film forming resin contained in the binder 21a is preferably a resin having an average molecular weight of about 10,000 to 80,000.
  • the film forming resin include various resins such as an epoxy resin, a modified epoxy resin, a urethane resin, and a phenoxy resin. Among these, phenoxy resin is particularly preferable from the viewpoint of film formation state, connection reliability, and the like.
  • thermosetting resin is not particularly limited as long as it has fluidity at room temperature, and examples thereof include commercially available epoxy resins and acrylic resins.
  • the epoxy resin is not particularly limited.
  • naphthalene type epoxy resin biphenyl type epoxy resin, phenol novolac type epoxy resin, bisphenol type epoxy resin, stilbene type epoxy resin, triphenolmethane type epoxy resin, phenol aralkyl type epoxy resin.
  • an acrylic compound, liquid acrylate, etc. can be selected suitably.
  • what made acrylate the methacrylate can also be selected from methyl acrylate, ethyl acrylate, isopropy
  • the latent curing agent is not particularly limited, and examples thereof include various curing agents such as a heat curing type and a UV curing type.
  • the latent curing agent does not normally react, but is activated by various triggers selected according to applications such as heat, light, and pressure, and starts the reaction.
  • the activation method of the thermally activated latent curing agent includes a method of generating active species (cations and anions) by a dissociation reaction by heating, and the like.
  • Thermally active latent curing agents include imidazole series, hydrazide series, boron trifluoride-amine complex, sulfonium salt, amine imide, polyamine salt, dicyandiamide, and modified products thereof. The above mixture may be sufficient. Among these, a microcapsule type imidazole-based latent curing agent is preferable.
  • the silane coupling agent is not particularly limited, and examples thereof include an epoxy type, an amino type, a mercapto sulfide type, and a ureido type. By adding the silane coupling agent, the adhesion at the interface between the organic material and the inorganic material is improved.
  • Examples of the conductive particles 23 include any known conductive particles used in anisotropic conductive films.
  • Examples of the conductive particles 23 include particles of various metals and metal alloys such as nickel, iron, copper, aluminum, tin, lead, chromium, cobalt, silver, gold, metal oxide, carbon, graphite, glass, ceramic, Examples thereof include those in which the surface of particles such as plastic is coated with metal, or those in which the surface of these particles is further coated with an insulating thin film.
  • examples of the resin particle include an epoxy resin, a phenol resin, an acrylic resin, an acrylonitrile / styrene (AS) resin, a benzoguanamine resin, a divinylbenzene resin, a styrene resin, and the like. Can be mentioned.
  • the adhesive film 20 in which the adhesive layer 21 made of ACF or NCF is laminated on the base film 22 is used.
  • the present invention is not limited to this example.
  • the film laminate may be an anisotropic conductive film having two or more layers in which ACF and NCF are laminated.
  • the adhesive film 20 may have a configuration in which a cover film is provided on the side of the adhesive layer 21 opposite to the side on which the base film 22 is laminated.
  • a cover film is provided on the side of the adhesive layer 21 opposite to the side on which the base film 22 is laminated.
  • it is good also as a conductive adhesive film for electrically connecting a photovoltaic cell and a tab wire.
  • the adhesive film 20 is unwound from the supply reel 11 and set in the sticking device 1.
  • the adhesive film 20 is supported by the plurality of guide rollers 13 on the side of the base film 22, so that the adhesive film 20 is drawn to the take-up reel through the temporary attachment position between the support base 3 and the heating and pressing head 4. Thereby, as for the adhesive film 20, the adhesive bond layer 21 is supported toward the support stand 3 side.
  • the adhesive layer 20 is peeled off from the base film 22 in advance by the removing member 5 or other methods from the temporary attachment position to the chucking piece 14. Thereby, adhesion of the binder 21a to the chucking piece 14 can be prevented. Further, it is desirable that the removing member 5 made of the adhesive tape 30 or the roll 40 is separated from the base film 22. Further, the chucking pieces 14 are separated from each other and are lowered in the direction of the arrow A in FIG.
  • the substrate 10 is placed on the support 3 and alignment adjustment with the adhesive film 20 is performed. Further, the adhesive film 20 is half-cut by the cutting mechanism 41 to a predetermined length corresponding to the length of the adhesive layer 21 attached to the substrate 10. At this time, the adhesive film 20 is not cut up to the base film 22.
  • the heating and pressing head 4 heated to a predetermined temperature is lowered by the elevating mechanism 6 and heat-pressed at a predetermined pressure and time from the base film 22 side of the adhesive film 20.
  • the heating temperature by the heating and pressing head 4 is set to a predetermined temperature that exhibits fluidity although the binder 21a of the adhesive layer 21 is not thermally cured, and is set within a range of, for example, 30 ° C. to 120 ° C. due to a demand for low temperature. .
  • the adhesive film 20 is temporarily attached to the substrate 10 with the adhesive layer 21 peeled off from the base film 22.
  • the chucking piece 14 driven by the pulling drive source 19 sandwiches the base film 22 and pulls in the direction of arrow A in FIG. 4C. Thereby, the base film 22 from which the adhesive layer 21 has been peeled is conveyed downstream from the temporary attachment position.
  • the sticking apparatus 1 monitors whether or not the binder 21a of the adhesive layer 21 remains on the base film 22 by the detecting means 25. As a result, when the binder 21a remains on the base film 22, the residue of the binder 21a is removed by the removing member 5.
  • the sticking device 1 drives the pressing member 35 to press the adhesive tape 30 against the base film 22 and remains.
  • the binder 21a to be removed is removed from the base film 22.
  • the adhesive tape 30 has an adhesive force with the binder 21a that is larger than the adhesive force between the binder 21a and the base film 22, for example, 1.6 mN / cm or more, it remains on the base film 22.
  • the binder 21a can be reliably adhered.
  • the adhesive tape 30 is separated from the base film 22 by the pressing member 35 and wound around the second core 32. Thereby, the adhesive tape 30 is removed by attaching an unused part from the first core 31.
  • the roll 40 is not subjected to a peeling treatment on the surface, and the roll surface and the adhesive layer are more than the adhesive force between the base film 22 coated with a release agent such as silicone and the adhesive layer 21.
  • the binder 21a remaining on the base film 22 can be reliably adhered by making the adhesive strength with the substrate 21 large, for example, 1.6 mN / cm or more.
  • the roll 40 is prepared for subsequent use by wiping the adhered binder 21a by sliding contact with a scraper or another roll.
  • the sticking apparatus 1 causes the roll 40 to be separated from the base film 22 in a normal state, and the binder 21a remains on the base film 22 as illustrated in FIG. 6C.
  • the roll 40 that has been waiting after being separated from the base film 22 is brought into contact with the base film 22 and is removed by adhering the remaining binder 21a.
  • the roll 40 is separated from the base film 22 when the binder 21a is adhered.
  • the roll 40 is prepared for use after the next time by wiping away the binder 21a stuck by a scraper or another roll, or replacing the roll 40 with a new roll 40.
  • the binder 21 a does not remain on the base film 22, and even when the chucking piece 14 is sandwiched in the subsequent process, The binder 21a does not adhere. Therefore, the chucking piece 14 does not cause a chucking error when holding or towing the base film 22 thereafter, and time loss due to the stop of the production line can be prevented.
  • the substrate 10 on which the adhesive layer 21 of the adhesive film 20 is temporarily attached is placed on an electronic component such as an IC chip or a flexible substrate, and is heated and pressed from above the electronic component by a heating and pressing head.
  • the adhesive layer 21 has the binder 21a flowing out from between the electrode terminals of the substrate 10 and the electronic component, and the conductive particles are sandwiched between the electrode terminals.
  • the process of temporarily bonding the adhesive layer 21 of the adhesive film 20 to the substrate 10 has been described.
  • the process of removing the adhesive layer 21 by the bonding apparatus 1 is performed when the supply reel 11 is replaced.
  • the present invention can also be applied to a case where 21 is not attached to the substrate and is conveyed as it is. Also in this case, by removing the adhesive layer 21 from the base film 22 by the removing member 5, the adhesive film 20 can be transported without the binder 21a adhering to the chucking piece 14, and the production line is stopped.
  • the temporary sticking process of the adhesive film 20 can be performed following the replacement of the supply reel 11 without any change.
  • an adhesive film was temporarily pasted on the terminal electrode of the glass substrate for evaluation using the pasting apparatus 1 having the removing member 5 and the conventional pasting apparatus not having the removing member 5.
  • Temporary pasting was performed 500 times each at different heating temperatures, and the number of binder sticking errors and the number of base film chucking errors due to chucking pieces were counted.
  • ACF CP6920F3 manufactured by Dexerials Co., Ltd. was wound around a reel wound body having a width of 1 mm was used. Moreover, it was 1.6 mN / cm when the peeling force of the adhesive bond layer of an adhesive film and a base film was measured.
  • Example 1 a sticking device using an adhesive tape (see FIG. 1) was used as the removing member. It was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured. Moreover, the sticking temperature by a heating press head was 30 degreeC.
  • Example 2 the conditions were the same as in Example 1 except that the application temperature by the heating and pressing head was 60 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
  • Example 3 the conditions were the same as in Example 1 except that the sticking temperature by the heating and pressing head was 90 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
  • Example 4 the conditions were the same as in Example 1 except that the sticking temperature by the heating and pressing head was 120 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
  • Example 5 a sticking device using a roll (see FIG. 3) was used as the removing member. Moreover, it heated so that the temperature of the roll surface might be set to 50 degreeC. It was 640 mN / cm when the adhesive force of the binder of an adhesive film and a roll was measured on these conditions. Moreover, the sticking temperature by a heating press head was 30 degreeC.
  • Example 6 the conditions were the same as in Example 5 except that the sticking temperature by the heating and pressing head was 60 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
  • Example 7 the conditions were the same as in Example 5 except that the application temperature by the heating and pressing head was 90 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
  • Example 8 the conditions were the same as in Example 5 except that the sticking temperature by the heating and pressing head was 120 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
  • Comparative Example 1 a conventional sticking apparatus (see FIG. 8) that does not include a removal member was used, and the sticking temperature by the heating press head was set to 30 ° C.
  • Comparative Example 2 the conditions were the same as those in Comparative Example 1 except that the application temperature by the heating and pressing head was 60 ° C.
  • the number of chucking errors due to the chucking piece was zero, and there was no influence on the production line.
  • the number of chucking errors due to the chucking pieces increased in proportion to the number of binder sticking errors.

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  • Adhesives Or Adhesive Processes (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Adhesive Tapes (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

A device for applying an adhesive film, the device being provided with: a conveyance mechanism for conveying an adhesive film tape with a base film and an adhesive layer supported on the base film; a support section for supporting an application object on which the adhesive layer is to be applied; a head, which is provided facing the support section and presses the adhesive film that has been conveyed above the application object onto the application object to apply the adhesive layer on the application object; and a removing member, which is provided on the downstream side of the support section and the head in the direction of adhesive film conveyance and removes adhesive film layer remaining on the base film.

Description

接着フィルムの貼着装置、接着フィルムの貼着方法、及び接続構造体Adhesive film sticking device, adhesive film sticking method, and connection structure
 本発明は、テープ状の接着フィルムを貼着対象物に貼着する貼着装置に関し、特に、接着フィルム搬送工程に改良を施した接着フィルムの貼着装置、接着フィルムの貼着方法、及び接続構造体に関する。 The present invention relates to a bonding apparatus for bonding a tape-shaped adhesive film to an object to be bonded, and in particular, an adhesive film bonding apparatus, an adhesive film bonding method, and a connection that have been improved in the adhesive film transport process. Concerning the structure.
 従来より、ガラス基板等の接続対象物に接着フィルムを用いて電子部品を実装する実装法が用いられている。例えば、液晶表示パネル(LCDパネル)の周縁部に導電性の接着フィルムを介して液晶駆動回路であるICチップを実装するCOG(Chip on Glass)実装法や、太陽電池セルにインターコネクタとなるタブ線を接続する接続法が挙げられる。 Conventionally, a mounting method has been used in which an electronic component is mounted on an object to be connected such as a glass substrate using an adhesive film. For example, a COG (Chip on Glass) mounting method in which an IC chip that is a liquid crystal driving circuit is mounted on the periphery of a liquid crystal display panel (LCD panel) via a conductive adhesive film, or a tab that serves as an interconnector in a solar cell The connection method which connects a line is mentioned.
 導電性接着フィルム50は、バインダー樹脂に導電性粒子が分散された接着剤層50aが、支持体となるベースフィルム50b上に形成されたものである。このような導電性接着フィルム50は、例えば、図7に示すように、一対のリールフランジ52を有するリール部材51の巻芯53に巻回されたフィルム巻装体の形状で使用される(例えば、特許文献1参照)。 The conductive adhesive film 50 is obtained by forming an adhesive layer 50a in which conductive particles are dispersed in a binder resin on a base film 50b serving as a support. Such a conductive adhesive film 50 is used in the form of a film wound body wound around a core 53 of a reel member 51 having a pair of reel flanges 52 as shown in FIG. , See Patent Document 1).
 リール部材51より巻き出された導電性接着フィルム50は、図8Aに示すように、複数のガイドローラ54にガイドされながら、ガラス基板等の接続対象物55が支持された支持台56上に搬送され、接続対象物55に形成された端子電極領域に接着剤層50a側が仮貼りされる。このとき、導電性接着フィルム50は、支持台56上に昇降自在に設けられ、所定の温度に加熱された加熱押圧ヘッド57によってベースフィルム50b側から、所定の圧力及び所定の時間で、熱加圧される。これにより、導電性接着フィルム50は、接着剤層50aがベースフィルム50bから剥離し、接続対象物55側に貼着する(例えば、特許文献2参照)。 As shown in FIG. 8A, the conductive adhesive film 50 unwound from the reel member 51 is conveyed onto a support base 56 on which a connection object 55 such as a glass substrate is supported while being guided by a plurality of guide rollers 54. Then, the adhesive layer 50 a side is temporarily attached to the terminal electrode region formed on the connection object 55. At this time, the conductive adhesive film 50 is provided on the support base 56 so as to be movable up and down, and is heated from the base film 50b side at a predetermined pressure and a predetermined time by a heating and pressing head 57 heated to a predetermined temperature. Pressed. Thereby, as for the electroconductive adhesive film 50, the adhesive bond layer 50a peels from the base film 50b, and it sticks on the connection target object 55 side (for example, refer patent document 2).
 次いで、図8Bに示すように、導電性接着フィルム50は、加熱押圧ヘッド57が離間すると、接着剤層50aが剥離されたベースフィルム50bが一対のチャッキング片58によって挟持され、このチャッキング片58に牽引されることにより下流側へ所定の長さ分、搬送されていく。これにより、図8Cに示すように、支持台56には、新たな導電性接着フィルム50が搬送され、接続対象物55への貼着に供される。 Next, as shown in FIG. 8B, when the heating and pressing head 57 is separated from the conductive adhesive film 50, the base film 50b from which the adhesive layer 50a has been peeled is sandwiched between a pair of chucking pieces 58. By being pulled by 58, it is conveyed downstream by a predetermined length. As a result, as shown in FIG. 8C, a new conductive adhesive film 50 is transported to the support base 56 and used for sticking to the connection object 55.
特開2001-171033号公報JP 2001-171033 A 特開2010-114301号公報JP 2010-114301 A
 ところで、近年の導電性接着フィルム50に対する低温低圧による接着の要請から、導電性接着フィルム50の仮貼り温度や圧力もさらなる低温化、低圧化が求められている。
 しかし、低温での仮貼りを行うと、導電性接着フィルム50の接着剤層50aがベースフィルム50bから充分に剥離されず、接続対象物55への貼着エラーを起こす場合がある。
By the way, due to the recent demand for adhesion to the conductive adhesive film 50 at a low temperature and low pressure, the temperature and pressure for temporarily attaching the conductive adhesive film 50 are also required to be further reduced in temperature and pressure.
However, if temporary bonding is performed at a low temperature, the adhesive layer 50a of the conductive adhesive film 50 may not be sufficiently peeled off from the base film 50b, and an error in sticking to the connection object 55 may occur.
 そして、図9に示すように、ベースフィルム50bは、接着剤層50aが残存した状態でチャッキング片58によって挟持されると、チャッキング片58に接着剤層50aのバインダー樹脂が付着し、以降のベースフィルム50bの挟持及び搬送時にエラーが発生する。このため、いったん製造ラインを停止し、チャッキング片58に付着したバインダー樹脂を除去するなど、COG実装等の工程において大きなタイムロスとなることがある。 As shown in FIG. 9, when the base film 50b is sandwiched between the chucking pieces 58 with the adhesive layer 50a remaining, the binder resin of the adhesive layer 50a adheres to the chucking pieces 58. An error occurs when the base film 50b is sandwiched and conveyed. For this reason, there may be a large time loss in processes such as COG mounting, such as once stopping the production line and removing the binder resin adhering to the chucking piece 58.
 本発明は、従来における前記諸問題を解決し、以下の目的を達成することを課題とする。即ち、本発明は、接着フィルムの接着剤層がベースフィルムから充分に剥離されず、貼着エラーを起こした場合にも、製造ラインを停止することなく以降の仮貼り工程を続行することができる接着フィルムの貼着装置、接着フィルムの貼着方法、及びこれにより製造された接続構造体を提供することを目的とする。 This invention makes it a subject to solve the said various problems in the past and to achieve the following objectives. That is, according to the present invention, even when the adhesive layer of the adhesive film is not sufficiently peeled from the base film and a sticking error occurs, the subsequent temporary sticking process can be continued without stopping the production line. An object of the present invention is to provide an adhesive film sticking apparatus, an adhesive film sticking method, and a connection structure manufactured thereby.
 前記課題を解決するための手段としては、以下の通りである。即ち、
 <1> ベースフィルムと該ベースフィルム上に支持された接着剤層とを有するテープ状の接着フィルムを搬送する搬送機構と、
 前記接着剤層が貼着される貼着対象物を支持する支持部と、
 前記支持部と対向して設けられ、前記貼着対象物上に搬送された前記接着フィルムを前記貼着対象物に対して押圧し、前記接着剤層を前記貼着対象物に貼着させるヘッドと、
 前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側に設けられ、前記ベースフィルム上に残存する前記接着剤層を除去する除去部材とを備える接着フィルムの貼着装置である。
 <2> 前記除去部材は、粘着テープである前記<1>に記載の接着フィルムの貼着装置である。
 <3> 前記除去部材は、ロールである前記<1>に記載の接着フィルムの貼着装置である。
 <4> 前記搬送機構は、前記接着フィルムをガイドする複数のガイドローラと、前記接着剤層が剥離された前記ベースフィルムを挟持して牽引するチャッキング片とを有する前記<1>から<3>のいずれかに記載の接着フィルムの貼着装置である。
 <5> 前記接着フィルムが前記貼着対象物上に搬送された後、前記接着剤層側をハーフカットするカット機構を備える前記<1>から<4>のいずれかに記載の接着フィルムの貼着装置である。
 <6> 前記接着フィルムは、前記接着剤層に導電性粒子が分散された導電性接着フィルム、又は前記接着剤層に導電性粒子が含有されていない絶縁性接着フィルムである前記<1>から<4>のいずれかに記載の接着フィルムの貼着装置である。
 <7> 搬送機構によって、ベースフィルムと該ベースフィルム上に支持された接着剤層とを有するテープ状の接着フィルムを、支持部に支持された貼着対象物上に搬送する搬送工程と、
 前記支持部と対向して設けられたヘッドによって、前記接着剤層を前記貼着対象物に押圧し、前記接着剤層を前記貼着対象物に貼着する貼着工程と、
 前記搬送機構によって、前記ベースフィルムを前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側に搬送する下流側搬送工程とを有し、
 前記下流側搬送工程では、前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側において、除去部材によって、前記ベースフィルム上に残存する前記接着剤層を除去する接着フィルムの貼着方法である。
 <8> 前記除去部材は、粘着テープである前記<7>に記載の接着フィルムの貼着方法である。
 <9> 前記除去部材は、ロールである前記<7>に記載の接着フィルムの貼着方法である。
 <10> 前記搬送機構は、前記接着フィルムをガイドする複数のガイドローラと、前記接着剤層が剥離された前記ベースフィルムを挟持して牽引するチャッキング片とを有する前記<7>から<9>のいずれかに記載の接着フィルムの貼着方法である。
 <11> 前記<7>から<10>のいずれかに記載の接着フィルムの貼着方法を用いて製造された接続構造体である。
Means for solving the problems are as follows. That is,
<1> A transport mechanism for transporting a tape-like adhesive film having a base film and an adhesive layer supported on the base film;
A support part for supporting an object to be adhered to which the adhesive layer is adhered;
A head that is provided facing the support portion and presses the adhesive film conveyed onto the sticking object against the sticking object, and causes the adhesive layer to stick to the sticking object. When,
It is an adhesive film sticking device provided with the removal member which removes the adhesive layer which is provided in the conveyance direction of the adhesive film rather than the support part and the head, and which remains on the base film.
<2> The adhesive film sticking apparatus according to <1>, wherein the removal member is an adhesive tape.
<3> The adhesive film sticking apparatus according to <1>, wherein the removal member is a roll.
<4> The transport mechanism includes a plurality of guide rollers that guide the adhesive film, and chucking pieces that sandwich and pull the base film from which the adhesive layer has been peeled. > An adhesive film sticking apparatus according to any one of the above.
<5> After the adhesive film has been transported onto the object to be adhered, the adhesive film according to any one of <1> to <4>, including a cut mechanism that half-cuts the adhesive layer side. Landing gear.
<6> From the above <1>, the adhesive film is a conductive adhesive film in which conductive particles are dispersed in the adhesive layer, or an insulating adhesive film in which conductive particles are not contained in the adhesive layer. <4> An adhesive film sticking apparatus according to any one of the above.
<7> A transporting step of transporting a tape-like adhesive film having a base film and an adhesive layer supported on the base film onto an object to be bonded supported by a support part by a transport mechanism;
A sticking step of pressing the adhesive layer against the sticking object, and sticking the adhesive layer to the sticking object, by a head provided facing the support part;
A downstream transport step of transporting the base film to the downstream side in the transport direction of the adhesive film from the support and the head by the transport mechanism;
In the downstream conveying step, an adhesive film sticking method for removing the adhesive layer remaining on the base film by a removing member at a downstream side of the supporting portion and the head in the conveying direction of the adhesive film. is there.
<8> The method for attaching an adhesive film according to <7>, wherein the removing member is an adhesive tape.
<9> The adhesive film sticking method according to <7>, wherein the removing member is a roll.
<10> From the above <7> to <9, the transport mechanism includes a plurality of guide rollers that guide the adhesive film, and a chucking piece that sandwiches and pulls the base film from which the adhesive layer has been peeled off. > An adhesive film sticking method according to any one of the above.
<11> A connection structure manufactured using the adhesive film sticking method according to any one of <7> to <10>.
 本発明によると、従来における前記諸問題を解決することができ、ベースフィルムに接着剤層が残存することなく、搬送機構に接着剤層が付着することがない。したがって、接着剤層によって以降のベースフィルムの挟持や牽引を行う際にエラーを生じることがなく、製造ラインの停止によるタイムロスを防止することができる。 According to the present invention, the above-described problems can be solved, the adhesive layer does not remain on the base film, and the adhesive layer does not adhere to the transport mechanism. Therefore, an error does not occur when the base film is sandwiched or pulled by the adhesive layer, and time loss due to the stop of the production line can be prevented.
図1は、本発明が適用された貼着装置の一例を示す側面図である。FIG. 1 is a side view showing an example of a sticking apparatus to which the present invention is applied. 図2は、接着フィルムの構成の一例を示す断面図である。FIG. 2 is a cross-sectional view showing an example of the configuration of the adhesive film. 図3は、本発明が適用された他の貼着装置の他の一例を示す側面図である。FIG. 3 is a side view showing another example of another sticking apparatus to which the present invention is applied. 図4Aは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムを熱加圧する工程を示す側面図である。FIG. 4A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film. 図4Bは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムの接着剤層が基板に貼着された状態を示す側面図である。FIG. 4B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate. 図4Cは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、ベースフィルムをチャッキング片で挟持し牽引するとともに除去部材(粘着テープ)によってベースフィルム上に残存するバインダーを除去する状態を示す側面図である。FIG. 4C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied. The base film is sandwiched and pulled by a chucking piece and is removed onto the base film by a removing member (adhesive tape). It is a side view which shows the state which removes the remaining binder. 図5Aは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムを熱加圧する工程を示す側面図である。FIG. 5A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film. 図5Bは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムの接着剤層が基板に貼着された状態を示す側面図である。FIG. 5B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate. 図5Cは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、ベースフィルムをチャッキング片で挟持し牽引するとともに除去部材(ロール)によってベースフィルム上に残存するバインダーを除去する状態を示す側面図である。FIG. 5C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied. The base film is sandwiched and pulled by a chucking piece and remains on the base film by a removing member (roll). It is a side view which shows the state which removes the binder to perform. 図6Aは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムを熱加圧する工程を示す側面図である。FIG. 6A is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a process of heat-pressing an adhesive film. 図6Bは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、接着フィルムの接着剤層が基板に貼着された状態を示す側面図である。FIG. 6B is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate. 図6Cは、本発明が適用された一例の貼着装置による貼着工程を示す側面図であって、ベースフィルムをチャッキング片で挟持し牽引するとともに除去部材(ロール)によってベースフィルム上に残存するバインダーを除去する状態を示す側面図である。FIG. 6C is a side view showing a sticking process by an example sticking apparatus to which the present invention is applied. The base film is sandwiched and pulled by a chucking piece and remains on the base film by a removing member (roll). It is a side view which shows the state which removes the binder to perform. 図7は、接着フィルムが巻回されたリール部材を示す斜視図である。FIG. 7 is a perspective view showing a reel member around which an adhesive film is wound. 図8Aは、従来の貼着装置による貼着工程を示す側面図であって、接着フィルムを熱加圧する工程を示す側面図である。FIG. 8A is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a process of heat-pressing an adhesive film. 図8Bは、従来の貼着装置による貼着工程を示す側面図であって、接着フィルムの接着剤層が基板に貼着された状態を示す側面図である。FIG. 8B is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a state where an adhesive layer of an adhesive film is stuck to a substrate. 図8Cは、従来の貼着装置による貼着工程を示す側面図であって、ベースフィルムをチャッキング片で挟持し牽引する状態を示す側面図である。FIG. 8C is a side view showing a sticking process by a conventional sticking apparatus, and is a side view showing a state in which the base film is sandwiched and pulled by a chucking piece. 図9は、従来の貼着装置において、仮貼り不良によって、ベースフィルムに接着剤層が残存したままチャッキング片で挟持し牽引する状態を示す側面図である。FIG. 9 is a side view showing a state in which a conventional sticking apparatus is held and pulled by a chucking piece while an adhesive layer remains on the base film due to a temporary sticking failure.
 以下、本発明が適用された接着フィルムの貼着装置、接着フィルムの貼着方法、及びこれにより製造された接続構造体について、図面を参照しながら詳細に説明する。なお、本発明は、以下の実施形態のみに限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々の変更が可能であることは勿論である。また、図面は模式的なものであり、各寸法の比率等は現実のものとは異なることがある。具体的な寸法等は以下の説明を参酌して判断すべきものである。また、図面相互間においても互いの寸法の関係や比率が異なる部分が含まれていることは勿論である。 Hereinafter, an adhesive film sticking apparatus to which the present invention is applied, an adhesive film sticking method, and a connection structure manufactured thereby will be described in detail with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments, and various modifications can be made without departing from the scope of the present invention. Further, the drawings are schematic, and the ratio of each dimension may be different from the actual one. Specific dimensions should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.
 本発明が適用された接着フィルム20の貼着装置1は、ガラス基板やプリント配線板等の貼着対象物にICチップやフレキシブル基板等の電子部品を実装する際に、予め貼着対象物に設けられた端子電極上に異方性導電接着フィルム(ACF)等の接着フィルム20を仮貼りするものである。以下では、貼着対象物としてガラス基板やプリント配線板等の基板10を例に説明する。 The attachment device 1 for the adhesive film 20 to which the present invention is applied is preliminarily applied to an object to be attached when an electronic component such as an IC chip or a flexible substrate is mounted on an object to be attached such as a glass substrate or a printed wiring board. An adhesive film 20 such as an anisotropic conductive adhesive film (ACF) is temporarily attached on the provided terminal electrode. Below, the board | substrates 10, such as a glass substrate and a printed wiring board, are demonstrated to an example as a sticking target object.
 この貼着装置1は、図1に示すように、テープ状の接着フィルム20を搬送する搬送機構2と、接着剤層21が貼着される基板10を支持する支持台3と、支持台3と対向して設けられ、基板10上に搬送された接着フィルム20を基板10に対して押圧し、接着剤層を基板10に貼着させる加熱押圧ヘッド4と、支持台3及び加熱押圧ヘッド4よりも接着フィルム20の搬送方向下流側に設けられ、ベースフィルム22上に残存する接着剤層21を除去する除去部材5とを備える。なお、貼着装置1によって仮貼りされる接着フィルム20は、図2に示すように、導電性粒子23が含有されたバインダー(絶縁性接着剤組成物)21aからなる接着剤層21と接着剤層21を支持する支持体となるベースフィルム22とを備える。この接着フィルム20については後に詳述する。 As shown in FIG. 1, the sticking apparatus 1 includes a transport mechanism 2 that transports a tape-like adhesive film 20, a support base 3 that supports a substrate 10 to which an adhesive layer 21 is pasted, and a support base 3. The heating press head 4 that presses the adhesive film 20 conveyed on the substrate 10 against the substrate 10 and attaches the adhesive layer to the substrate 10, the support base 3, and the heating press head 4. The removal member 5 is provided further on the downstream side in the transport direction of the adhesive film 20 and removes the adhesive layer 21 remaining on the base film 22. In addition, as shown in FIG. 2, the adhesive film 20 temporarily attached by the sticking apparatus 1 includes an adhesive layer 21 made of a binder (insulating adhesive composition) 21a containing conductive particles 23 and an adhesive. And a base film 22 serving as a support for supporting the layer 21. The adhesive film 20 will be described in detail later.
 [支持部/加熱押圧ヘッド]
 支持台3は、接着フィルム20が仮貼りされる基板10を支持するものである。支持台3は、基板10を位置決めする図示しない位置決め機構が設けられている。また、支持台3は、XYステージに支持され、接着フィルム20や加熱押圧ヘッド4に対する基板10の端子電極の位置合わせを行うことができる。支持台3の上方には、接着フィルム20を基板10に対して熱加圧する加熱押圧ヘッド4が設けられている。
[Supporting part / Heat pressing head]
The support base 3 supports the substrate 10 to which the adhesive film 20 is temporarily attached. The support 3 is provided with a positioning mechanism (not shown) for positioning the substrate 10. The support 3 is supported by an XY stage and can align the terminal electrodes of the substrate 10 with respect to the adhesive film 20 and the heating and pressing head 4. Above the support 3, a heating and pressing head 4 that heat-presses the adhesive film 20 against the substrate 10 is provided.
 加熱押圧ヘッド4には、接着フィルム20を加熱するためのヒータ4aが内蔵されている。加熱押圧ヘッド4は、昇降機構6によって、上下方向に昇降可能とされている。昇降機構6は、例えば駆動シリンダと、加熱押圧ヘッド4が取り付けられたロッドとを備え、ロッドの動作に応じて加熱押圧ヘッド4を昇降させる。なお、昇降機構6は、駆動シリンダ及びロッドからなる機構を用いる他、公知の機構によって構成することができる。 The heater 4a for heating the adhesive film 20 is built in the heating and pressing head 4. The heating and pressing head 4 can be moved up and down by an elevating mechanism 6. The elevating mechanism 6 includes, for example, a drive cylinder and a rod to which the heating and pressing head 4 is attached, and raises and lowers the heating and pressing head 4 according to the operation of the rod. In addition, the raising / lowering mechanism 6 can be comprised by a well-known mechanism other than using the mechanism which consists of a drive cylinder and a rod.
 貼着装置1は、この支持台3及び加熱押圧ヘッド4の間を、接着フィルム20の接着剤層21を基板10に仮貼りする仮貼り位置とする。 The adhering apparatus 1 is a temporary adhering position where the adhesive layer 21 of the adhesive film 20 is temporarily adhering to the substrate 10 between the support 3 and the heating and pressing head 4.
 [搬送機構]
 支持台3及び加熱押圧ヘッド4の間に接着フィルム20を搬送する搬送機構2は、テープ状の接着フィルム20が巻回された供給リール11と、接着剤層21が剥離されたベースフィルム22を巻き取る巻き取りリール12と、供給リール11及び巻き取りリール12間に亘って接着フィルム20をガイドする複数のガイドローラ13と、仮貼り位置より搬送方向下流側に設けられベースフィルム22を挟持、牽引する一対のチャッキング片14とを備える。
[Transport mechanism]
The conveyance mechanism 2 that conveys the adhesive film 20 between the support 3 and the heating and pressing head 4 includes a supply reel 11 around which the tape-like adhesive film 20 is wound and a base film 22 from which the adhesive layer 21 has been peeled off. A take-up reel 12, a plurality of guide rollers 13 for guiding the adhesive film 20 between the supply reel 11 and the take-up reel 12, and a base film 22 provided on the downstream side in the transport direction from the temporary attachment position; A pair of chucking pieces 14 to be pulled.
 供給リール11は、図2に示すように、テープ状の接着フィルム20が巻回される巻芯16と、巻芯16の両側に設けられたリールフランジ17とを備える。供給リール11に巻回された接着フィルム20は、巻芯16に巻回されることによりフィルム巻装体18を形成する。同様に、巻き取りリール12も、接着剤層21が剥離されたベースフィルム22が巻回される巻芯と、巻芯の両側に設けられたリールフランジとを備える。 As shown in FIG. 2, the supply reel 11 includes a winding core 16 around which a tape-like adhesive film 20 is wound, and reel flanges 17 provided on both sides of the winding core 16. The adhesive film 20 wound around the supply reel 11 forms a film winding body 18 by being wound around the core 16. Similarly, the take-up reel 12 also includes a core around which the base film 22 from which the adhesive layer 21 has been peeled is wound, and reel flanges provided on both sides of the core.
 また、供給リール11及び巻き取りリール12は、いずれも図示しない回転駆動源に係合され、該回転駆動源に回転されることにより、接着フィルム20を巻き出し、あるいは接着剤層21が剥離されたベースフィルム22を巻き取る。 Further, the supply reel 11 and the take-up reel 12 are both engaged with a rotational drive source (not shown), and are rotated by the rotational drive source to unwind the adhesive film 20 or peel off the adhesive layer 21. The base film 22 is wound up.
 一対のチャッキング片14は、ベースフィルム22を挟持するとともに、図1中矢印A方向に牽引する。これにより、一対のチャッキング片14は、ベースフィルム22を巻き取りリール12へ搬送するとともに、新たな接着フィルム20を仮貼り位置へ搬送する。 The pair of chucking pieces 14 sandwich the base film 22 and pull it in the direction of arrow A in FIG. Thus, the pair of chucking pieces 14 conveys the base film 22 to the take-up reel 12 and conveys a new adhesive film 20 to the temporary attachment position.
 チャッキング片14は、牽引駆動源19によって近接離間可能とされ、ベースフィルム22を挟持し、またリリースする。また、チャッキング片14は、牽引駆動源19によって、図1に実線で示す位置と破線で示す位置との間で上下方向に直線駆動されるようになっている。 The chucking piece 14 can be moved close to and away from the traction drive source 19 to sandwich and release the base film 22. The chucking piece 14 is linearly driven in the vertical direction between the position indicated by the solid line and the position indicated by the broken line in FIG.
 牽引駆動源19、供給リール11を回転させる回転駆動源、巻き取りリール12を回転させる回転駆動源は、共に同期して動作される。したがって、搬送機構2は、接着フィルム20の巻き出し、接着剤層21が剥離されたベースフィルム22の牽引、及びベースフィルム22の巻き取りが同期して行われ、これにより接着フィルム20の搬送を行うことができる。 The traction drive source 19, the rotation drive source that rotates the supply reel 11, and the rotation drive source that rotates the take-up reel 12 are all operated in synchronization. Therefore, the transport mechanism 2 performs unwinding of the adhesive film 20, pulling of the base film 22 from which the adhesive layer 21 has been peeled, and winding of the base film 22 in synchronism, thereby transporting the adhesive film 20. It can be carried out.
 [除去部材・粘着テープ]
 除去部材5は、ベースフィルム22がチャッキング片14に挟持される前に、予めベースフィルム22に残存するバインダー21aを除去し、チャッキング片14による挟持エラーや牽引エラーを防止するためのものである。この除去部材5は、仮貼り位置より接着フィルム20の搬送方向下流側に設けられ、かつチャッキング片14より接着フィルム20の搬送方向上流側に設けられている。
[Removal member / Adhesive tape]
The removing member 5 is for removing the binder 21a remaining in the base film 22 in advance before the base film 22 is sandwiched between the chucking pieces 14 and preventing a pinching error and a traction error due to the chucking pieces 14. is there. The removal member 5 is provided on the downstream side in the transport direction of the adhesive film 20 from the temporary attachment position, and is provided on the upstream side in the transport direction of the adhesive film 20 from the chucking piece 14.
 除去部材5は、例えば、図1に示すように、粘着テープ30によって構成される。粘着テープ30は、接着剤層21との間で、ベースフィルム22との接着力より大きな接着力を有するものであれば、公知の粘着テープを用いることができる。この接着剤層21とベースフィルム22との接着力は、例えば1.6mN/cmとされ、したがって、粘着テープ30は、バインダー21aとの接着力が1.6mN/cm以上とされる。 The removal member 5 is constituted by an adhesive tape 30, for example, as shown in FIG. As the pressure-sensitive adhesive tape 30, a known pressure-sensitive adhesive tape can be used as long as it has an adhesive force larger than the adhesive force with the base film 22 between the adhesive layer 21. The adhesive force between the adhesive layer 21 and the base film 22 is, for example, 1.6 mN / cm. Therefore, the adhesive tape 30 has an adhesive force with the binder 21a of 1.6 mN / cm or more.
 粘着テープ30は、第1の巻芯31に巻回され、この第1の巻芯31より巻き出された後、ベースフィルム22の搬送ルート上に沿って引き回され、第2の巻芯32に巻き取られる。また、粘着テープ30は、ベースフィルム22の搬送ルート上の仮貼り位置とチャッキング片14との間に設けられた押圧部材35によってベースフィルム22と対向して支持されている。押圧部材35は、粘着テープ30の粘着面をベースフィルム22に押圧するものであり、図示しない駆動機構によって駆動されることにより、粘着テープ30をベースフィルム22側へ押圧可能とされている。 The adhesive tape 30 is wound around the first winding core 31, unwound from the first winding core 31, then drawn along the transport route of the base film 22, and the second winding core 32. Rolled up. The adhesive tape 30 is supported to face the base film 22 by a pressing member 35 provided between the temporary attachment position on the transport route of the base film 22 and the chucking piece 14. The pressing member 35 presses the adhesive surface of the adhesive tape 30 against the base film 22, and is driven by a driving mechanism (not shown) so that the adhesive tape 30 can be pressed toward the base film 22 side.
 貼着装置1は、通常、押圧部材35を下方に退避させ、粘着テープ30をベースフィルム22から離間させている。また、貼着装置1は、仮貼り位置の下流側にカメラやセンサー等の検出手段25を設置し、ベースフィルム22上にバインダー21aが残存しているか否かをモニタリングしている。そして、貼着装置1は、接着フィルム20の接着剤層21がベースフィルム22から充分に剥離されず、貼着エラーを起こした結果、ベースフィルム22上に残存するバインダー21aを検知すると、押圧部材35を駆動して粘着テープ30をベースフィルム22に押し当てて、残存するバインダー21aをベースフィルム22から除去する。 The sticking apparatus 1 normally retracts the pressing member 35 downward and separates the adhesive tape 30 from the base film 22. In addition, the sticking apparatus 1 is provided with a detection means 25 such as a camera or a sensor on the downstream side of the temporary sticking position, and monitors whether or not the binder 21a remains on the base film 22. When the adhesive layer 21 of the adhesive film 20 is not sufficiently peeled off from the base film 22 and causes a sticking error, the sticking device 1 detects the binder 21a remaining on the base film 22 and then presses the pressing member. 35 is driven to press the adhesive tape 30 against the base film 22, and the remaining binder 21 a is removed from the base film 22.
 これにより、ベースフィルム22にはバインダー21aが残存することなく、チャッキング片14で挟持した場合にも、チャッキング片14にバインダー21aが付着することがない。したがって、チャッキング片14が、以降のベースフィルム22の挟持や牽引を行う際にも、バインダー21aの付着に伴うチャッキングエラーを生じることがなく、製造ラインの停止によるタイムロスを防止することができる。 Thus, the binder 21a does not remain on the base film 22, and the binder 21a does not adhere to the chucking piece 14 even when the chucking piece 14 holds the binder 21a. Therefore, even when the chucking piece 14 holds and pulls the base film 22 thereafter, a chucking error due to the attachment of the binder 21a does not occur, and time loss due to the stop of the production line can be prevented. .
 [除去部材・ロール]
 また、除去部材5は、図3に示すように、バインダー21aが付着するロール40によって構成してもよい。ロール40は、特に剥離処理などを施すことなく、接着剤層21との間で、ベースフィルム22との接着力より大きな力でバインダー21aが貼着可能であれば、あらゆる材料のロールを用いることができる。
[Removal member / roll]
Moreover, you may comprise the removal member 5 with the roll 40 to which the binder 21a adheres, as shown in FIG. As long as the roll 40 can be stuck to the adhesive layer 21 with a force larger than the adhesive force to the base film 22 without particularly performing a peeling treatment, a roll of any material is used. Can do.
 ロール40は、ベースフィルム22の搬送ルート上の仮貼り位置とチャッキング片14との間に、転動方向をベースフィルム22の搬送方向と平行にして支持されている。また、ロール40は、常時ベースフィルム22と接触する位置に支持され、常時ベースフィルム22の搬送に追従して転動するようにしてもよく、あるいはベースフィルム22と近接離間可能に支持し、ベースフィルム22上にバインダー21aの残存が検出されるとベースフィルム22に摺接するようにしてもよい。 The roll 40 is supported between the temporary attachment position on the transport route of the base film 22 and the chucking piece 14 with the rolling direction parallel to the transport direction of the base film 22. The roll 40 is always supported at a position in contact with the base film 22 and may always roll following the conveyance of the base film 22, or may be supported so as to be close to and away from the base film 22. When the remaining of the binder 21a is detected on the film 22, the base film 22 may be slidably contacted.
 除去部材5としてロール40を備えた貼着装置1は、ベースフィルム22がロール40を転動することにより、ベースフィルム22に残存するバインダー21aをロール40に貼着させて除去することができる。 The sticking apparatus 1 provided with the roll 40 as the removing member 5 can stick the binder 21a remaining on the base film 22 to the roll 40 and remove the base film 22 by rolling the roll 40.
 なお、貼着装置1は、ロール40に図示しないスクレーパを当接させ、あるいは他のロールを転動させることにより、貼着されたバインダー21aをロール40より払拭し、バインダー21aの除去性能を維持するようにしてもよい。また、貼着装置1は、ベースフィルム22上に残存するバインダー21aを検知する毎にロール40をベースフィルム22に当接させ、バインダー21aの除去を行う度に清浄なロール40に交換するようにしてもよい。 In addition, the sticking apparatus 1 wipes the stuck binder 21a from the roll 40 by bringing a scraper (not shown) into contact with the roll 40 or rolling another roll, and maintains the removal performance of the binder 21a. You may make it do. Further, every time the binder 21a remaining on the base film 22 is detected, the sticking apparatus 1 makes the roll 40 contact with the base film 22 and replaces it with a clean roll 40 each time the binder 21a is removed. May be.
 [接着フィルム]
 ここで、貼着装置1に搬送される接着フィルム20について説明する。接着フィルム20は、図2に示すように、接着剤層21と接着剤層21を支持する支持体となるベースフィルム22とを備える。
[Adhesive film]
Here, the adhesive film 20 conveyed to the sticking apparatus 1 will be described. As shown in FIG. 2, the adhesive film 20 includes an adhesive layer 21 and a base film 22 serving as a support that supports the adhesive layer 21.
 接着剤層21は、バインダー(絶縁性接着剤組成物)21aに導電性粒子23を含有する異方性導電フィルム(ACF:Anisotropic Conductive Film)とすることができるが、これに限定されず、バインダー21aに導電性粒子23を含有しない絶縁性接着フィルム(NCF:Non-Conductive Film)であってもよい。 The adhesive layer 21 can be an anisotropic conductive film (ACF: Anisotropic Conductive Film) containing conductive particles 23 in a binder (insulating adhesive composition) 21a, but is not limited thereto. An insulating adhesive film (NCF: Non-Conductive Film) that does not contain the conductive particles 23 in 21a may be used.
 接着フィルム20のバインダー21aは、例えば、膜形成樹脂、熱硬化性樹脂、潜在性硬化剤、シランカップリング剤等を含有する通常のバインダーを用いることができる。接着フィルム20は、バインダー21aに導電性粒子23が分散された異方性導電組成物、又は、バインダー21aに導電性粒子23を含有しない絶縁性接着剤組成物を、ベースフィルム22上に塗布することにより、ベースフィルム22上に形成される。 As the binder 21a of the adhesive film 20, for example, a normal binder containing a film-forming resin, a thermosetting resin, a latent curing agent, a silane coupling agent, or the like can be used. For the adhesive film 20, an anisotropic conductive composition in which conductive particles 23 are dispersed in a binder 21 a or an insulating adhesive composition that does not contain the conductive particles 23 in a binder 21 a is applied on the base film 22. Thus, the film is formed on the base film 22.
 ベースフィルム22は、バインダー21aをフィルム状に支持するものであり、例えば、PET(Poly Ethylene Terephthalate)、OPP(Oriented Polypropylene)、PMP(Poly-4-methlpentene-1)、PTFE(Polytetrafluoroethylene)等にシリコーン等の剥離剤を塗布することにより形成される。 The base film 22 supports the binder 21a in the form of a film. For example, PET (Poly Ethylene Terephthalate), OPP (Oriented Polypropylene), PMP (Poly-4-methylpentene-1), PTFE (Polytetrafluoroethylene), and the like. It is formed by applying a release agent such as.
 バインダー21aに含有される膜形成樹脂としては、平均分子量が10,000~80,000程度の樹脂が好ましい。膜形成樹脂としては、エポキシ樹脂、変形エポキシ樹脂、ウレタン樹脂、フェノキシ樹脂等の各種の樹脂が挙げられる。中でも、膜形成状態、接続信頼性等の観点からフェノキシ樹脂が特に好ましい。 The film forming resin contained in the binder 21a is preferably a resin having an average molecular weight of about 10,000 to 80,000. Examples of the film forming resin include various resins such as an epoxy resin, a modified epoxy resin, a urethane resin, and a phenoxy resin. Among these, phenoxy resin is particularly preferable from the viewpoint of film formation state, connection reliability, and the like.
 熱硬化性樹脂としては、常温で流動性を有していれば特に限定されず、例えば、市販のエポキシ樹脂、アクリル樹脂等が挙げられる。 The thermosetting resin is not particularly limited as long as it has fluidity at room temperature, and examples thereof include commercially available epoxy resins and acrylic resins.
 エポキシ樹脂としては、特に限定されないが、例えば、ナフタレン型エポキシ樹脂、ビフェニル型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、ビスフェノール型エポキシ樹脂、スチルベン型エポキシ樹脂、トリフェノールメタン型エポキシ樹脂、フェノールアラルキル型エポキシ樹脂、ナフトール型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、トリフェニルメタン型エポキシ樹脂等が挙げられる。これらは単独でも、2種以上の組み合わせであってもよい。 The epoxy resin is not particularly limited. For example, naphthalene type epoxy resin, biphenyl type epoxy resin, phenol novolac type epoxy resin, bisphenol type epoxy resin, stilbene type epoxy resin, triphenolmethane type epoxy resin, phenol aralkyl type epoxy resin. Naphthol type epoxy resin, dicyclopentadiene type epoxy resin, triphenylmethane type epoxy resin and the like. These may be used alone or in combination of two or more.
 アクリル樹脂としては、特に制限はなく、目的に応じてアクリル化合物、液状アクリレート等を適宜選択することができる。例えば、メチルアクリレート、エチルアクリレート、イソプロピルアクリレート、イソブチルアクリレート、エポキシアクリレート、エチレングリコールジアクリレート、ジエチレングリコールジアクリレート、トリメチロールプロパントリアクリレート、ジメチロールトリシクロデカンジアクリレート、テトラメチレングリコールテトラアクリレート、2-ヒドロキシ-1,3-ジアクリロキシプロパン、2,2-ビス[4-(アクリロキシメトキシ)フェニル]プロパン、2,2-ビス[4-(アクリロキシエトキシ)フェニル]プロパン、ジシクロペンテニルアクリレート、トリシクロデカニルアクリレート、トリス(アクリロキシエチル)イソシアヌレート、ウレタンアクリレート、エポキシアクリレート等を挙げることができる。なお、アクリレートをメタクリレートにしたものを用いることもできる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。 There is no restriction | limiting in particular as an acrylic resin, According to the objective, an acrylic compound, liquid acrylate, etc. can be selected suitably. For example, methyl acrylate, ethyl acrylate, isopropyl acrylate, isobutyl acrylate, epoxy acrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, trimethylolpropane triacrylate, dimethylol tricyclodecane diacrylate, tetramethylene glycol tetraacrylate, 2-hydroxy- 1,3-diacryloxypropane, 2,2-bis [4- (acryloxymethoxy) phenyl] propane, 2,2-bis [4- (acryloxyethoxy) phenyl] propane, dicyclopentenyl acrylate, tricyclo Examples include decanyl acrylate, tris (acryloxyethyl) isocyanurate, urethane acrylate, and epoxy acrylate. In addition, what made acrylate the methacrylate can also be used. These may be used individually by 1 type and may use 2 or more types together.
 潜在性硬化剤としては、特に限定されないが、例えば、加熱硬化型、UV硬化型等の各種硬化剤が挙げられる。潜在性硬化剤は、通常では反応せず、熱、光、加圧等の用途に応じて選択される各種のトリガにより活性化し、反応を開始する。熱活性型潜在性硬化剤の活性化方法には、加熱による解離反応などで活性種(カチオンやアニオン)を生成する方法、室温付近ではエポキシ樹脂中に安定に分散しており高温でエポキシ樹脂と相溶又は溶解し、硬化反応を開始する方法、モレキュラーシーブ封入タイプの硬化剤を高温で溶出して硬化反応を開始する方法、マイクロカプセルからの溶出による硬化方法等が存在する。熱活性型潜在性硬化剤としては、イミダゾール系、ヒドラジド系、三フッ化ホウ素-アミン錯体、スルホニウム塩、アミンイミド、ポリアミン塩、ジシアンジアミド等や、これらの変性物があり、これらは単独でも、2種以上の混合体であってもよい。中でも、マイクロカプセル型イミダゾール系潜在性硬化剤が好適である。 The latent curing agent is not particularly limited, and examples thereof include various curing agents such as a heat curing type and a UV curing type. The latent curing agent does not normally react, but is activated by various triggers selected according to applications such as heat, light, and pressure, and starts the reaction. The activation method of the thermally activated latent curing agent includes a method of generating active species (cations and anions) by a dissociation reaction by heating, and the like. There are a method in which a curing reaction is started by dissolving or dissolving, a method in which a molecular sieve encapsulated type curing agent is eluted at a high temperature to start a curing reaction, a curing method by elution from a microcapsule, and the like. Thermally active latent curing agents include imidazole series, hydrazide series, boron trifluoride-amine complex, sulfonium salt, amine imide, polyamine salt, dicyandiamide, and modified products thereof. The above mixture may be sufficient. Among these, a microcapsule type imidazole-based latent curing agent is preferable.
 シランカップリング剤としては、特に限定されないが、例えば、エポキシ系、アミノ系、メルカプト・スルフィド系、ウレイド系等を挙げることができる。シランカップリング剤を添加することにより、有機材料と無機材料との界面における接着性が向上される。 The silane coupling agent is not particularly limited, and examples thereof include an epoxy type, an amino type, a mercapto sulfide type, and a ureido type. By adding the silane coupling agent, the adhesion at the interface between the organic material and the inorganic material is improved.
 導電性粒子23としては、異方性導電フィルムにおいて使用されている公知の何れの導電性粒子を挙げることができる。導電性粒子23としては、例えば、ニッケル、鉄、銅、アルミニウム、錫、鉛、クロム、コバルト、銀、金等の各種金属や金属合金の粒子、金属酸化物、カーボン、グラファイト、ガラス、セラミック、プラスチック等の粒子の表面に金属をコートしたもの、或いは、これらの粒子の表面に更に絶縁薄膜をコートしたもの等が挙げられる。樹脂粒子の表面に金属をコートしたものである場合、樹脂粒子としては、例えば、エポキシ樹脂、フェノール樹脂、アクリル樹脂、アクリロニトリル・スチレン(AS)樹脂、ベンゾグアナミン樹脂、ジビニルベンゼン系樹脂、スチレン系樹脂等の粒子を挙げることができる。 Examples of the conductive particles 23 include any known conductive particles used in anisotropic conductive films. Examples of the conductive particles 23 include particles of various metals and metal alloys such as nickel, iron, copper, aluminum, tin, lead, chromium, cobalt, silver, gold, metal oxide, carbon, graphite, glass, ceramic, Examples thereof include those in which the surface of particles such as plastic is coated with metal, or those in which the surface of these particles is further coated with an insulating thin film. In the case where the surface of the resin particle is coated with metal, examples of the resin particle include an epoxy resin, a phenol resin, an acrylic resin, an acrylonitrile / styrene (AS) resin, a benzoguanamine resin, a divinylbenzene resin, a styrene resin, and the like. Can be mentioned.
 なお、上述した説明では、ベースフィルム22上にACF又はNCFからなる接着剤層21が積層されてなる接着フィルム20を用いたが、この例に限定されるものではない。例えば、フィルム積層体は、ACFとNCFとが積層された2層以上の異方性導電フィルムとしてもよい。 In the above description, the adhesive film 20 in which the adhesive layer 21 made of ACF or NCF is laminated on the base film 22 is used. However, the present invention is not limited to this example. For example, the film laminate may be an anisotropic conductive film having two or more layers in which ACF and NCF are laminated.
 また、接着フィルム20は、接着剤層21のベースフィルム22が積層された面とは反対の面側にもカバーフィルムを設ける構成としてもよい。また、例えば、太陽電池セルとタブ線とを電気的に接続するための導電性接着フィルムとしてもよい。 Further, the adhesive film 20 may have a configuration in which a cover film is provided on the side of the adhesive layer 21 opposite to the side on which the base film 22 is laminated. For example, it is good also as a conductive adhesive film for electrically connecting a photovoltaic cell and a tab wire.
 [接着方法]
 次いで、貼着装置1を用いて接着剤層21を基板10に貼着する工程について説明する。先ず、供給リール11より接着フィルム20を巻き出し、貼着装置1にセットする。接着フィルム20は、複数のガイドローラ13にベースフィルム22側を支持されることにより、支持台3と加熱押圧ヘッド4間の仮貼り位置を経て巻き取りリールまで引き回される。これにより、接着フィルム20は、接着剤層21が支持台3側に向けて支持される。
[Adhesion method]
Next, a process of sticking the adhesive layer 21 to the substrate 10 using the sticking apparatus 1 will be described. First, the adhesive film 20 is unwound from the supply reel 11 and set in the sticking device 1. The adhesive film 20 is supported by the plurality of guide rollers 13 on the side of the base film 22, so that the adhesive film 20 is drawn to the take-up reel through the temporary attachment position between the support base 3 and the heating and pressing head 4. Thereby, as for the adhesive film 20, the adhesive bond layer 21 is supported toward the support stand 3 side.
 なお、このとき接着フィルム20は、仮貼り位置からチャッキング片14に亘って、除去部材5により、あるいはその他の方法で、予めベースフィルム22より接着剤層21を剥離させておくことが望ましい。これによりチャッキング片14へのバインダー21aの付着を防止することができる。また、粘着テープ30あるいはロール40からなる除去部材5はベースフィルム22から離間されていることが望ましい。また、チャッキング片14は、互いに離間され、図1中反矢印A方向へ下降されている。 At this time, it is desirable that the adhesive layer 20 is peeled off from the base film 22 in advance by the removing member 5 or other methods from the temporary attachment position to the chucking piece 14. Thereby, adhesion of the binder 21a to the chucking piece 14 can be prevented. Further, it is desirable that the removing member 5 made of the adhesive tape 30 or the roll 40 is separated from the base film 22. Further, the chucking pieces 14 are separated from each other and are lowered in the direction of the arrow A in FIG.
 次いで、基板10が支持台3に載置され、接着フィルム20とのアライメント調整が行われる。また、接着フィルム20がカット機構41によって、接着剤層21を基板10への貼着長さに応じた所定の長さにハーフカットされる。このとき、接着フィルム20は、ベースフィルム22まではカットされない。 Next, the substrate 10 is placed on the support 3 and alignment adjustment with the adhesive film 20 is performed. Further, the adhesive film 20 is half-cut by the cutting mechanism 41 to a predetermined length corresponding to the length of the adhesive layer 21 attached to the substrate 10. At this time, the adhesive film 20 is not cut up to the base film 22.
 次いで、図4Aに示すように、所定の温度に加熱された加熱押圧ヘッド4が昇降機構6によって下降し、接着フィルム20のベースフィルム22側から所定の圧力、時間で熱加圧を行う。加熱押圧ヘッド4による加熱温度は、接着剤層21のバインダー21aが熱硬化しないが流動性を示す所定の温度とされ、また、低温化の要請から例えば30℃~120℃の範囲に設定される。これにより、図4Bに示すように、接着フィルム20は、接着剤層21がベースフィルム22より剥離され、基板10へ仮貼りされる。 Next, as shown in FIG. 4A, the heating and pressing head 4 heated to a predetermined temperature is lowered by the elevating mechanism 6 and heat-pressed at a predetermined pressure and time from the base film 22 side of the adhesive film 20. The heating temperature by the heating and pressing head 4 is set to a predetermined temperature that exhibits fluidity although the binder 21a of the adhesive layer 21 is not thermally cured, and is set within a range of, for example, 30 ° C. to 120 ° C. due to a demand for low temperature. . As a result, as shown in FIG. 4B, the adhesive film 20 is temporarily attached to the substrate 10 with the adhesive layer 21 peeled off from the base film 22.
 接着剤層21の仮貼りが終了すると、牽引駆動源19に駆動されたチャッキング片14がベースフィルム22を挟持するとともに図4C中矢印A方向へ牽引する。これにより、接着剤層21が剥離したベースフィルム22が仮貼り位置より下流側へ搬送される。 When the temporary sticking of the adhesive layer 21 is completed, the chucking piece 14 driven by the pulling drive source 19 sandwiches the base film 22 and pulls in the direction of arrow A in FIG. 4C. Thereby, the base film 22 from which the adhesive layer 21 has been peeled is conveyed downstream from the temporary attachment position.
 このとき、貼着装置1は、ベースフィルム22に接着剤層21のバインダー21aが残存しているか否かを検出手段25によってモニタする。その結果、ベースフィルム22にバインダー21aが残存している場合には、除去部材5によってバインダー21aの残滓を除去する。 At this time, the sticking apparatus 1 monitors whether or not the binder 21a of the adhesive layer 21 remains on the base film 22 by the detecting means 25. As a result, when the binder 21a remains on the base film 22, the residue of the binder 21a is removed by the removing member 5.
 具体的に、除去部材5として粘着テープ30を用いる場合には、図4Cに示すように、貼着装置1は、押圧部材35を駆動して粘着テープ30をベースフィルム22に押し当てて、残存するバインダー21aをベースフィルム22から除去する。このとき、粘着テープ30は、バインダー21aとの接着力を、バインダー21aとベースフィルム22との間の接着力よりも大きな接着力、例えば1.6mN/cm以上有するため、ベースフィルム22に残存するバインダー21aを確実に貼着させることができる。 Specifically, when the adhesive tape 30 is used as the removing member 5, as shown in FIG. 4C, the sticking device 1 drives the pressing member 35 to press the adhesive tape 30 against the base film 22 and remains. The binder 21a to be removed is removed from the base film 22. At this time, since the adhesive tape 30 has an adhesive force with the binder 21a that is larger than the adhesive force between the binder 21a and the base film 22, for example, 1.6 mN / cm or more, it remains on the base film 22. The binder 21a can be reliably adhered.
 粘着テープ30は、バインダー21aを貼着させると、押圧部材35によってベースフィルム22より離間され、第2の巻芯32に巻き取られる。これにより、粘着テープ30は、第1の巻芯31より未使用部分が貼着させることにより除去する。このとき、ロール40は、表面に剥離処理が施されておらず、シリコーン等の剥離剤を塗布されたベースフィルム22と接着剤層21との間の接着力よりも、ロール表面と接着剤層21との接着力を大きく、例えば1.6mN/cm以上とし、ベースフィルム22に残存するバインダー21aを確実に貼着させることができる。 When the binder 21 a is adhered, the adhesive tape 30 is separated from the base film 22 by the pressing member 35 and wound around the second core 32. Thereby, the adhesive tape 30 is removed by attaching an unused part from the first core 31. At this time, the roll 40 is not subjected to a peeling treatment on the surface, and the roll surface and the adhesive layer are more than the adhesive force between the base film 22 coated with a release agent such as silicone and the adhesive layer 21. The binder 21a remaining on the base film 22 can be reliably adhered by making the adhesive strength with the substrate 21 large, for example, 1.6 mN / cm or more.
 ロール40は、スクレーパや他のロールとの摺接によって、貼着されたバインダー21aが払拭され、次回以降の使用に備える。 The roll 40 is prepared for subsequent use by wiping the adhered binder 21a by sliding contact with a scraper or another roll.
 あるいは、図6A及び図6Bに示すように、貼着装置1は、通常の状態ではロール40をベースフィルム22より離間させ、図6Cに示すように、ベースフィルム22にバインダー21aが残存していることが検出されると、ベースフィルム22より離間して待機していたロール40をベースフィルム22に当接させ、残存するバインダー21aを貼着させることにより除去する。ロール40は、バインダー21aを貼着させると、ベースフィルム22より離間される。また、ロール40は、スクレーパや他のロールによって貼着されたバインダー21aを払拭され、あるいは新しいロール40に交換されることにより次回以降の使用に備える。 Alternatively, as illustrated in FIGS. 6A and 6B, the sticking apparatus 1 causes the roll 40 to be separated from the base film 22 in a normal state, and the binder 21a remains on the base film 22 as illustrated in FIG. 6C. When this is detected, the roll 40 that has been waiting after being separated from the base film 22 is brought into contact with the base film 22 and is removed by adhering the remaining binder 21a. The roll 40 is separated from the base film 22 when the binder 21a is adhered. Moreover, the roll 40 is prepared for use after the next time by wiping away the binder 21a stuck by a scraper or another roll, or replacing the roll 40 with a new roll 40.
 このように、貼着装置1を用いた貼着方法によれば、ベースフィルム22にバインダー21aが残存することなく、後の工程でチャッキング片14によって挟持した場合にも、チャッキング片14にバインダー21aが付着することがない。したがって、チャッキング片14が、以降のベースフィルム22の挟持や牽引を行う際にチャッキングエラーを生じることがなく、製造ラインの停止によるタイムロスを防止することができる。 Thus, according to the sticking method using the sticking apparatus 1, the binder 21 a does not remain on the base film 22, and even when the chucking piece 14 is sandwiched in the subsequent process, The binder 21a does not adhere. Therefore, the chucking piece 14 does not cause a chucking error when holding or towing the base film 22 thereafter, and time loss due to the stop of the production line can be prevented.
 接着フィルム20の接着剤層21が仮貼りされた基板10は、その後、ICチップやフレキシブル基板等の電子部品が載置され、加熱押圧ヘッドによって電子部品の上から熱加圧される。これにより、接着剤層21は、バインダー21aが基板10と電子部品の各電極端子間から流出するとともに、各電極端子間に導電性粒子が挟持され、この状態で熱硬化され、接続構造体が製造される。 The substrate 10 on which the adhesive layer 21 of the adhesive film 20 is temporarily attached is placed on an electronic component such as an IC chip or a flexible substrate, and is heated and pressed from above the electronic component by a heating and pressing head. As a result, the adhesive layer 21 has the binder 21a flowing out from between the electrode terminals of the substrate 10 and the electronic component, and the conductive particles are sandwiched between the electrode terminals. Manufactured.
 上記では、基板10に接着フィルム20の接着剤層21を仮貼りする工程について説明したが、貼着装置1による接着剤層21の除去工程は、供給リール11の交換の際など、接着剤層21が基板に貼着されないで、そのまま搬送される場合にも適用することができる。この場合も、除去部材5によってベースフィルム22から接着剤層21を除去することにより、チャッキング片14にバインダー21aが付着することなく接着フィルム20の搬送を行うことができ、製造ラインを停止することなく供給リール11の交換に引き続いて接着フィルム20の仮貼り工程を行うことができる。 In the above description, the process of temporarily bonding the adhesive layer 21 of the adhesive film 20 to the substrate 10 has been described. However, the process of removing the adhesive layer 21 by the bonding apparatus 1 is performed when the supply reel 11 is replaced. The present invention can also be applied to a case where 21 is not attached to the substrate and is conveyed as it is. Also in this case, by removing the adhesive layer 21 from the base film 22 by the removing member 5, the adhesive film 20 can be transported without the binder 21a adhering to the chucking piece 14, and the production line is stopped. The temporary sticking process of the adhesive film 20 can be performed following the replacement of the supply reel 11 without any change.
 次いで、本発明の実施例について説明する。本実施例では、除去部材5を有する貼着装置1と、除去部材5を有しない従来の貼着装置とを用いて、評価用ガラス基板の端子電極上に接着フィルムを仮貼りした。仮貼りは、加熱温度を変えて各500回ずつ実行し、バインダーの貼着エラー数、及びチャッキング片によるベースフィルムのチャッキングエラー数をカウントした。 Next, examples of the present invention will be described. In this example, an adhesive film was temporarily pasted on the terminal electrode of the glass substrate for evaluation using the pasting apparatus 1 having the removing member 5 and the conventional pasting apparatus not having the removing member 5. Temporary pasting was performed 500 times each at different heating temperatures, and the number of binder sticking errors and the number of base film chucking errors due to chucking pieces were counted.
 使用する接着フィルムは、デクセリアルズ株式会社製ACF:CP6920F3を幅1mmのリール巻装体に巻回された供給リールを使用した。
 また、接着フィルムの接着剤層とベースフィルムとの剥離力を測定したところ、1.6mN/cmであった。
As the adhesive film to be used, a supply reel in which ACF: CP6920F3 manufactured by Dexerials Co., Ltd. was wound around a reel wound body having a width of 1 mm was used.
Moreover, it was 1.6 mN / cm when the peeling force of the adhesive bond layer of an adhesive film and a base film was measured.
 実施例1では、除去部材として、粘着テープを用いた貼着装置(図1参照)を使用した。粘着テープと接着フィルムのバインダーとの接着力を測定したところ、5,600mN/cmであった。また、加熱押圧ヘッドによる貼付温度を30℃とした。 In Example 1, a sticking device using an adhesive tape (see FIG. 1) was used as the removing member. It was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured. Moreover, the sticking temperature by a heating press head was 30 degreeC.
 実施例2では、加熱押圧ヘッドによる貼付温度を60℃とした他は、実施例1と同様の条件とした。また、粘着テープと接着フィルムのバインダーとの接着力を測定したところ、5,600mN/cmであった。 In Example 2, the conditions were the same as in Example 1 except that the application temperature by the heating and pressing head was 60 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
 実施例3では、加熱押圧ヘッドによる貼付温度を90℃とした他は、実施例1と同様の条件とした。また、粘着テープと接着フィルムのバインダーとの接着力を測定したところ、5,600mN/cmであった。 In Example 3, the conditions were the same as in Example 1 except that the sticking temperature by the heating and pressing head was 90 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
 実施例4では、加熱押圧ヘッドによる貼付温度を120℃とした他は、実施例1と同様の条件とした。また、粘着テープと接着フィルムのバインダーとの接着力を測定したところ、5,600mN/cmであった。 In Example 4, the conditions were the same as in Example 1 except that the sticking temperature by the heating and pressing head was 120 ° C. Moreover, it was 5,600 mN / cm when the adhesive force of an adhesive tape and the binder of an adhesive film was measured.
 実施例5では、除去部材として、ロールを用いた貼着装置(図3参照)を使用した。また、ロール表面の温度を50℃となるように加温した。この条件で接着フィルムのバインダーとロールとの接着力を測定したところ、640mN/cmであった。また、加熱押圧ヘッドによる貼付温度を30℃とした。 In Example 5, a sticking device using a roll (see FIG. 3) was used as the removing member. Moreover, it heated so that the temperature of the roll surface might be set to 50 degreeC. It was 640 mN / cm when the adhesive force of the binder of an adhesive film and a roll was measured on these conditions. Moreover, the sticking temperature by a heating press head was 30 degreeC.
 実施例6では、加熱押圧ヘッドによる貼付温度を60℃とした他は、実施例5と同様の条件とした。また、接着フィルムのバインダーとロールとの接着力を測定したところ、640mN/cmであった。 In Example 6, the conditions were the same as in Example 5 except that the sticking temperature by the heating and pressing head was 60 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
 実施例7では、加熱押圧ヘッドによる貼付温度を90℃とした他は、実施例5と同様の条件とした。また、接着フィルムのバインダーとロールとの接着力を測定したところ、640mN/cmであった。 In Example 7, the conditions were the same as in Example 5 except that the application temperature by the heating and pressing head was 90 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
 実施例8では、加熱押圧ヘッドによる貼付温度を120℃とした他は、実施例5と同様の条件とした。また、接着フィルムのバインダーとロールとの接着力を測定したところ、640mN/cmであった。 In Example 8, the conditions were the same as in Example 5 except that the sticking temperature by the heating and pressing head was 120 ° C. Moreover, it was 640 mN / cm when the adhesive force of the binder and roll of an adhesive film was measured.
 比較例1では、除去部材を備えない従来の貼着装置(図8参照)を使用し、加熱押圧ヘッドによる貼付温度を30℃とした。 In Comparative Example 1, a conventional sticking apparatus (see FIG. 8) that does not include a removal member was used, and the sticking temperature by the heating press head was set to 30 ° C.
 比較例2では、加熱押圧ヘッドによる貼付温度を60℃とした他は、比較例1と同様の条件とした。 In Comparative Example 2, the conditions were the same as those in Comparative Example 1 except that the application temperature by the heating and pressing head was 60 ° C.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表1及び2に示すように、実施例及び比較例ともに、貼付温度が低温化するほどバインダーの貼着エラー数が増加した。これは、加熱温度が低く、接着剤層の粘度が高いため、ベースフィルムからの剥離が不十分となるためである。 As shown in Tables 1 and 2, in both Examples and Comparative Examples, the number of binder sticking errors increased as the sticking temperature decreased. This is because the heating temperature is low and the viscosity of the adhesive layer is high, so that peeling from the base film becomes insufficient.
 しかし、除去部材を備えた実施例では、チャッキング片によるチャッキングエラー数はいずれも0であり、製造ラインに与える影響は皆無であった。一方、除去部材を備えていない比較例では、バインダーの貼着エラー数に比例してチャッキング片によるチャッキングエラーの数も増加した。 However, in the example provided with the removal member, the number of chucking errors due to the chucking piece was zero, and there was no influence on the production line. On the other hand, in the comparative example having no removal member, the number of chucking errors due to the chucking pieces increased in proportion to the number of binder sticking errors.
  1  貼着装置
  2  搬送機構
  3  支持台
  4  加熱押圧ヘッド
  4a ヒータ
  5  除去部材
  6  昇降機構
  10 基板
  11 供給リール
  12 巻き取りリール
  13 ガイドローラ
  14 チャッキング片
  16 巻芯
  17 リールフランジ
  18 フィルム巻装体
  19 牽引駆動源
  20 接着フィルム
  21 接着剤層
  22 ベースフィルム
  23 導電性粒子
  25 検出手段
  30 粘着テープ
  31 第1の巻芯
  32 第2の巻芯
  35 押圧部材
  40 ロール
  41 カット機構
DESCRIPTION OF SYMBOLS 1 Sticking apparatus 2 Conveyance mechanism 3 Support stand 4 Heating press head 4a Heater 5 Removal member 6 Elevating mechanism 10 Substrate 11 Supply reel 12 Take-up reel 13 Guide roller 14 Chucking piece 16 Winding core 17 Reel flange 18 Film winding body 19 Pulling drive source 20 Adhesive film 21 Adhesive layer 22 Base film 23 Conductive particles 25 Detection means 30 Adhesive tape 31 First winding core 32 Second winding core 35 Press member 40 Roll 41 Cut mechanism

Claims (11)

  1.  ベースフィルムと該ベースフィルム上に支持された接着剤層とを有するテープ状の接着フィルムを搬送する搬送機構と、
     前記接着剤層が貼着される貼着対象物を支持する支持部と、
     前記支持部と対向して設けられ、前記貼着対象物上に搬送された前記接着フィルムを前記貼着対象物に対して押圧し、前記接着剤層を前記貼着対象物に貼着させるヘッドと、
     前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側に設けられ、前記ベースフィルム上に残存する前記接着剤層を除去する除去部材とを備える接着フィルムの貼着装置。
    A transport mechanism for transporting a tape-like adhesive film having a base film and an adhesive layer supported on the base film;
    A support part for supporting an object to be adhered to which the adhesive layer is adhered;
    A head that is provided facing the support portion and presses the adhesive film conveyed onto the sticking object against the sticking object, and causes the adhesive layer to stick to the sticking object. When,
    An adhesive film sticking apparatus comprising: a removing member that is provided on the downstream side of the support portion and the head in the transport direction of the adhesive film and removes the adhesive layer remaining on the base film.
  2.  前記除去部材は、粘着テープである請求項1に記載の接着フィルムの貼着装置。 The adhesive film sticking apparatus according to claim 1, wherein the removing member is an adhesive tape.
  3.  前記除去部材は、ロールである請求項1に記載の接着フィルムの貼着装置。 The adhesive film sticking apparatus according to claim 1, wherein the removing member is a roll.
  4.  前記搬送機構は、前記接着フィルムをガイドする複数のガイドローラと、前記接着剤層が剥離された前記ベースフィルムを挟持して牽引するチャッキング片とを有する請求項1から3のいずれかに記載の接着フィルムの貼着装置。 The said conveyance mechanism has a several guide roller which guides the said adhesive film, and the chucking piece which pinches and pulls the said base film from which the said adhesive bond layer peeled. Adhesive film sticking device.
  5.  前記接着フィルムが前記貼着対象物上に搬送された後、前記接着剤層側をハーフカットするカット機構を備える請求項1から4のいずれかに記載の接着フィルムの貼着装置。 The adhesive film sticking apparatus according to any one of claims 1 to 4, further comprising a cutting mechanism that half-cuts the adhesive layer side after the adhesive film is conveyed onto the sticking object.
  6.  前記接着フィルムは、前記接着剤層に導電性粒子が分散された導電性接着フィルム、又は前記接着剤層に導電性粒子が含有されていない絶縁性接着フィルムである請求項1から4のいずれかに記載の接着フィルムの貼着装置。 5. The adhesive film according to claim 1, wherein the adhesive film is a conductive adhesive film in which conductive particles are dispersed in the adhesive layer, or an insulating adhesive film in which conductive particles are not contained in the adhesive layer. The adhesive film sticking apparatus described in 1.
  7.  搬送機構によって、ベースフィルムと該ベースフィルム上に支持された接着剤層とを有するテープ状の接着フィルムを、支持部に支持された貼着対象物上に搬送する搬送工程と、
     前記支持部と対向して設けられたヘッドによって、前記接着剤層を前記貼着対象物に押圧し、前記接着剤層を前記貼着対象物に貼着する貼着工程と、
     前記搬送機構によって、前記ベースフィルムを前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側に搬送する下流側搬送工程とを有し、
     前記下流側搬送工程では、前記支持部及び前記ヘッドよりも前記接着フィルムの搬送方向下流側において、除去部材によって、前記ベースフィルム上に残存する前記接着剤層を除去する接着フィルムの貼着方法。
    A transporting step of transporting a tape-like adhesive film having a base film and an adhesive layer supported on the base film onto a sticking object supported by a support unit by a transport mechanism;
    A sticking step of pressing the adhesive layer against the sticking object, and sticking the adhesive layer to the sticking object, by a head provided facing the support part;
    A downstream transport step of transporting the base film to the downstream side in the transport direction of the adhesive film from the support and the head by the transport mechanism;
    In the downstream conveying step, an adhesive film sticking method in which the adhesive layer remaining on the base film is removed by a removing member on the downstream side of the supporting portion and the head in the conveying direction of the adhesive film.
  8.  前記除去部材は、粘着テープである請求項7に記載の接着フィルムの貼着方法。 The adhesive film sticking method according to claim 7, wherein the removing member is an adhesive tape.
  9.  前記除去部材は、ロールである請求項7に記載の接着フィルムの貼着方法。 The adhesive film sticking method according to claim 7, wherein the removing member is a roll.
  10.  前記搬送機構は、前記接着フィルムをガイドする複数のガイドローラと、前記接着剤層が剥離された前記ベースフィルムを挟持して牽引するチャッキング片とを有する請求項7から9のいずれかに記載の接着フィルムの貼着方法。 The said conveyance mechanism has a several guide roller which guides the said adhesive film, and the chucking piece which pinches and pulls the said base film from which the said adhesive bond layer was peeled. To attach the adhesive film.
  11.  請求項7から10のいずれかに記載の接着フィルムの貼着方法を用いて製造された接続構造体。 A connection structure manufactured using the method for attaching an adhesive film according to any one of claims 7 to 10.
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