WO2013153892A1 - Détecteur de position - Google Patents

Détecteur de position Download PDF

Info

Publication number
WO2013153892A1
WO2013153892A1 PCT/JP2013/056704 JP2013056704W WO2013153892A1 WO 2013153892 A1 WO2013153892 A1 WO 2013153892A1 JP 2013056704 W JP2013056704 W JP 2013056704W WO 2013153892 A1 WO2013153892 A1 WO 2013153892A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
signal processing
processing circuit
detection signal
value
Prior art date
Application number
PCT/JP2013/056704
Other languages
English (en)
Japanese (ja)
Inventor
清水哲也
寺田将吾
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Priority to JP2014510082A priority Critical patent/JP5800086B2/ja
Publication of WO2013153892A1 publication Critical patent/WO2013153892A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24485—Error correction using other sensors

Definitions

  • the present invention relates to a position detector that is used in a machine tool or other various devices to detect a linear position, a rotational position, an inclined position, etc., and more particularly to a position detector having a temperature compensation function of a detection signal processing circuit. .
  • a position detector that detects a linear position such as a highly accurate displacement sensor may be used to detect thermal displacement of a machine base.
  • a position detector generally includes a detection element that outputs a detection signal corresponding to a change in the position of a detection target, and a detection signal that processes a detection signal output from the detection element and outputs a signal of a position detection value. And a processing circuit.
  • a magnetic element includes a coil, an MI element (magnetic impedance element), an MR element (magnetoresistance element), a Hall element, and the like.
  • Patent Documents 1 and 2 Since these detection elements are affected by temperature changes, various proposals have been made to provide a temperature compensation circuit thereof (for example, Patent Documents 1 and 2).
  • Patent Documents 1 and 2 provided with the temperature compensation circuit of the detection element can compensate the temperature characteristic of the detection element itself, but cannot compensate the temperature of the detection signal processing circuit. For highly accurate detection, temperature compensation of the detection signal processing circuit is required.
  • a temperature sensor is mounted on the substrate of the detection signal processing circuit, and the temperature detection value obtained from this is compared with a table in which the temperature and the correction value are recorded correspondingly.
  • a method of canceling the temperature characteristic of the circuit there is a method of canceling the temperature characteristic of the circuit.
  • the detection signal processing circuit cannot perform accurate compensation because there are variations in individual circuit elements such as resistors and capacitors that are components of this circuit. That is, the table is created as a common table for detection signal processing circuits of the same model. However, even if detection signal processing circuits of the same model are used, and components of the same model are used as circuit components, there is variation among the components of the same model. Individual differences cannot be compensated with a common table.
  • the position detector includes a position detection element (2) that outputs a detection signal corresponding to a change in position relative to the detection object (1), A detection signal processing circuit (3) for processing a detection signal output from the detection element (2) and outputting a signal of a position detection value; A pseudo detection element that is switched from the position detection element (2) and connected to the detection signal processing circuit (3), wherein the position detection element (2) when the detection object (1) is at a specific position ) And a pseudo-detecting element (4) having a constant (resistance value) for outputting a signal having the same value as the detection signal to the detection signal processing circuit (3) and having a resistance affected by a temperature change, Connection switching means (5) for switching the connection between the position detection element (2) and the pseudo detection element (4) with respect to the detection signal processing circuit (3); Storage means for storing a position detection value (Rr) of the detection signal processing circuit (3) at a predetermined reference temperature in a state where the pseudo detection element (4) is connected to the detection signal processing circuit (3).
  • Rr position detection value
  • Before or after before detecting the position by connecting the position detection element (2) to the detection signal processing circuit (3) means “connecting the position detection element (2)”. Thus, it includes a time range that is approximately the same as the temperature of the detection signal processing circuit (3) when the position is detected and the detection signal processing circuit (3) shows substantially the same temperature. However, it is preferably immediately before or after.
  • the pseudo detection element (4) is a resistor and outputs a signal having the same value as the detection signal of the detection element (2) when the detection object (1) is at a specific position to the detection signal processing circuit (3).
  • the temperature compensation processing means (6) includes a detection signal processing circuit at a reference temperature in a state in which the connection switching means (5) is connected to the pseudo detection element (4) side before actual use as a position detector.
  • the position detection value (Rr) of (3) is stored.
  • the position detection value (Ra) of the detection signal processing circuit (3) in a state where the connection switching means (5) is switched to the pseudo detection element (4) side before each measurement is obtained. It is unknown how many times the outside air temperature during actual use is, but the difference between the position detection value (Ra) prior to this measurement and the position detection value (Rr) at the stored reference temperature (Ra ⁇ Rr) is determined to be an error due to the temperature in the detection signal processing circuit (3).
  • the connection switching means (5) is switched to the position detection element (2) side to detect the position of the detection object (1). Get the value.
  • the temperature compensation processing means (6) subtracts the temperature error (Ra-Rr) from the position detection value as a correction calculation, and outputs a position detection value as the position detector. In this correction calculation, the temperature error (Ra ⁇ Rr) may be subtracted as it is, or a value obtained by performing a process such as multiplying the temperature error (Ra ⁇ Rr) by a coefficient may be subtracted. .
  • the process of obtaining the position detection value (Ra) in the pseudo detection element (4) does not necessarily have to be performed prior to the measurement, and is performed after the position detection is performed using the detection element (2).
  • a process of subtracting (Ra ⁇ Rr) may be performed.
  • the above temperature compensation is inaccurate if the pseudo detection element (4) is affected by temperature variations, but the pseudo detection element (4) is the same as the detection signal of the detection element when in the specific position. As long as the signal of the value can be obtained, it is a component that does not require an output change with respect to a position change, and is a resistor, so it can easily be obtained from a commercial product with excellent linearity with respect to the influence on the temperature change. . Moreover, even if the linearity is somewhat low, there can be obtained a product that has little variation and can be linearized with high accuracy. Therefore, accurate temperature compensation is possible by selecting and using such components.
  • the detection object (1) there are a plurality of the pseudo-detecting elements (4), and the plurality of pseudo-detecting elements or a plurality of combinations thereof are respectively obtained when the detection object (1) is at a plurality of specific positions. It has a constant (resistance value) for outputting a signal having the same value as each of the detection signals of the position detection elements to the detection signal processing circuit (3), and the storage means (6a)
  • the position detection value (Rr) of the detection signal processing circuit (3) at a predetermined reference temperature in a state where the detection element (4) is connected is stored, and the temperature compensation processing means (6) is the detection target
  • the detection signal processing circuit (3) stored in the storage means for the specific position which is the reference of the divided range for each divided range obtained by dividing the position of the object (1) so that each specific position is a reference.
  • a position detection value (Rr) is used to calculate a difference (Ra ⁇ Rr) from a position detection value (Ra) of the detection signal processing circuit when the pseudo detection element is connected to the detection signal processing circuit; This calculated difference may be used for the correction.
  • the position detection element (2) another position detection element (2) may be used for each position classification of the detection object (1). In this case, the position detection element (2) is switched to each position detection element (2). And a pseudo detection element (4) to be connected.
  • Different position detection elements (2) are used for each section of the detectable range as the position detector, and there are variations in characteristics among the position detection elements (2), or the entire detectable range is located in one position. Even if the detection element (2) is configured to detect, the position detection output characteristic of the position detection element (2) may have low linearity. In such a case, the detection at the predetermined reference temperature when the position detection element (2) is in a specific position for each section in charge of each position detection element (2) or for each section having different characteristics of the position detection element (2). If the position detection value (Rr) of the signal processing circuit (3) is stored, temperature compensation with higher accuracy can be performed.
  • the detection object (1) may move on a straight line, and the detection signal processing circuit (3) may output a signal of a position detection value at a position on the straight line.
  • a position detector that obtains a position detection value on a straight line has many applications that require high-precision detection accuracy in machine tool applications and other applications. Therefore, the temperature compensation function is more effectively exhibited.
  • the detection object may be a magnet or a ferromagnetic material
  • the position detection element (2) may be a magnetic detection element.
  • the magnetic detection element may be a magnetoresistive element, a magnetic impedance element, a Hall element, or the like.
  • Magnetic position detectors are more resistant to dirt and the like than optical types, and highly accurate position detectors are required for machine tool applications and other applications. Therefore, the temperature compensation function of the present invention is more effectively exhibited.
  • the pseudo detection element (4) is in a temperature environment more similar to the detection signal processing circuit (3). Therefore, the temperature compensation of the detection signal processing circuit (3) can be performed with higher accuracy. Further, when the detection signal processing circuit (3), the pseudo detection element (4), and the temperature compensation processing means (6) are provided on the same circuit board, the assembly of the position detector and the production of the circuit part are achieved. Excellent in properties.
  • (A) And (B) is explanatory drawing of the process of the converter in the position detector of FIG. It is an electric circuit diagram which shows the detection element, pseudo detection element, switching means, etc. in the position detector which concerns on 2nd Embodiment of this invention. It is a flowchart of the process which the temperature compensation process means in the position detector of FIG. 5 performs. 6 is a chart showing a relationship between a phase angle and an on / off state of a switch control output unit in the position detector of FIG. 5.
  • the position detector according to this embodiment is a magnetic linear position detector.
  • This position detector is a position detector including a detection element 2 that generates a change in properties corresponding to a change in the position of the detection object 1 and outputs a detection signal, and a detection signal processing circuit 3.
  • the connection switching means 5 and the temperature compensation processing means 6 are provided.
  • the detection target 1 is made of a ferromagnetic rod such as a steel rod, for example, and has large diameter portions 1a at portions at regular intervals in the length direction.
  • the detection element 2 is composed of a ring-shaped coil surrounding the detection target 1, and the detection elements 2 (Lc +, Ls +, Lc ⁇ , Ls ⁇ ) having the same shape and the same number of turns are arranged in the axial direction of the detection target 1.
  • a cylindrical detection head portion 7 is configured together with a detection head housing (not shown) in which four detection elements 2 are arranged in a densely arranged cylindrical shape.
  • the detection object 1 made of a rod is installed in the detection head housing so as to be able to advance and retreat in the detection head part 7 in the axial direction, and the detection head part 7 and the detection object 1 constitute a detector body 8. .
  • the arrangement width La of the four detection elements 2 and the pitch L of the large diameter portion 1a of the detection target 1 are substantially the same.
  • either one of the end surfaces of the detection target object 1 serves as a detected object contact portion that is brought into contact with the detected object whose position is detected by the position detector.
  • the impedance of the detection element 2 made of the coil changes depending on the axial position of the large-diameter portion 1a of the detection target 1 made of a ferromagnetic material.
  • FIG. 2 is a diagram in which each means for temperature compensation is omitted from FIG. 1 and a configuration example of the detection signal processing circuit 3 is added.
  • the detection element 2 composed of each coil is connected in series with a balancing resistor 9. These series connection circuits are connected in parallel between the positive phase wiring 11a and the negative phase wiring 11b of the output of the excitation generation circuit 10.
  • a detection signal of each detection element 2 is output from an output extraction unit 12 connected to a portion between the detection element 2 and the balancing resistor 9 in each series connection circuit.
  • the output of the detection element 2 is a partial pressure of the impedance of the detection element 2 and the resistance value of the balancing resistor 9 with respect to the reference voltage of the AC signal applied from the excitation generation circuit 10, and is a change in the property of the detection element 2.
  • An impedance change is obtained as an output.
  • the detection signal processing circuit 3 includes the excitation generation circuit 10, an analog circuit unit 3A, and a digital processing unit 3B.
  • the digital processing unit 3B includes a cycle generation unit 13 and a phase difference detection unit 14.
  • the period generator 13 is a means for generating and outputting a reference clock for generating an excitation signal.
  • the excitation generation circuit 10 outputs a predetermined waveform, for example, a sine wave AC signal, according to the periodic signal, to excite each detection element 2.
  • the analog circuit unit 3A includes an amplification / operation stage 15, a filter stage 16, a comparator stage 17, and a phase shift stage 18.
  • the four detection elements 2 constitute two sets of coils (two sets of Lc + and Lc ⁇ , one set of Ls + and Ls ⁇ ), and two pairs of every other one in the arrangement form one set.
  • the output extraction section 12 of each pair of detection elements 2 is differentially connected and input to each differential amplifier 15 a of the amplification / operation stage 15.
  • one differential amplification output is phase-shifted by the 90 ° phase shift means 18a of the phase shift stage 18, and the difference between the value after this phase shift and the other
  • the dynamic amplification output is synthesized by the two synthesis means 19.
  • Each synthesis result is input to each comparator 17a of the comparator stage 17 through each filter circuit 16a of the filter stage 16.
  • the filter circuit 16a removes noise other than the signal frequency.
  • a plurality of filter circuits 16a may be provided.
  • the differential amplifier 15a and the filter circuit 16a are each composed of an operational amplifier 25 and a resistor, and an operational amplifier 25, a resistor and a capacitor.
  • the comparator 17a compares the AC waveform signal input from the filter circuit 16a as shown in FIG. 4A with a set voltage (for example, voltage zero), and as shown in FIG. Is converted to a square wave with a high level.
  • a set voltage for example, voltage zero
  • the excitation generation circuit 10 creates an AC excitation signal according to the reference clock generated by the period generator 13 and applies it to the detection element 2.
  • the impedance of the detection element 2 changes depending on the position of the detection target 1 in the axial direction due to the position change of the large diameter portion 1a.
  • This change in impedance appears as a change in the voltage waveform of the signal output from the output extraction unit 12 between the detection element 2 and the balancing resistor 9.
  • This change in the voltage waveform is input to the phase difference detection means 14 as a change in the phase of the rising edge of the square wave output from the comparator 17a. For this reason, the position detection value of the detection object 1 is obtained by comparing the phase of the rising edge of the square wave with the phase of the reference clock.
  • This phase shift is output from the phase difference detection means 14 as a position detection value of the detection object 1. For example, as shown in FIG. 3B, this output is output as a phase signal having a period in which the pitch L is 360 °.
  • connection switching means 5 includes a plurality of changeover switches 5a for switching and connecting individual pseudo detection elements 4 to the detection elements 2.
  • the changeover switch 5a is composed of an analog switch or the like.
  • Each pseudo detection element 4 is an element used in place of each detection element 2.
  • the output of the excitation generation circuit 10 is output.
  • the positive phase wiring 11a and the reverse phase wiring 11b are connected in parallel.
  • one end (positive-phase side end) of the pseudo detection element 4 is connected to the plus-side wiring 11a of the output of the excitation generation circuit 10 and the other end (reverse side), like the excitation input side end of the pseudo detection element 4.
  • the phase side end) is switchably connected to the detection element 2 via the change-over switch 5a.
  • each pseudo detection element 4 When each pseudo detection element 4 is switched to the detection element 2 and connected to the detection signal processing circuit 3, the pseudo detection element 4 outputs a signal having the same value as the detection signal of the detection element 4 when the detection target 1 is at a specific position. It has a constant to be output to the detection signal processing circuit 3, that is, a resistance value.
  • the specific position may be anywhere in the movable range in which the position of the detection target 1 can be detected.
  • the temperature compensation processing means 6 includes a reference temperature detected value storage 6a, a correction calculation unit 6b, and a correction / measurement mode switching unit 6c.
  • the reference temperature detection value storage 6a the position detection value (Rr) of the detection signal processing circuit 3 at a predetermined reference temperature in a state where the pseudo detection element 4 is connected to the detection signal processing circuit 3 is stored. deep.
  • this position detection value (Rr) for example, a value obtained by actual measurement by a test is stored. This storing process is performed before the actual use of the position detector.
  • the “determined reference temperature” is an arbitrary ambient temperature in which the position detector is used.
  • the correction / measurement mode switching unit 6c switches each switching switch 5a of the connection switching means 5 between a state connected to the detection element 2 and a state connected to the pseudo detection element 4 according to a predetermined condition.
  • the predetermined condition depends on time, for example, at the start of measurement, every 1 minute thereafter, every few minutes, or temporarily connected to the pseudo-detecting element 4 every hour.
  • the switching may be performed in accordance with a control command given from a machine tool or other device equipped with the position detector.
  • the correction calculation unit 6b stores the position detection value (Ra) of the detection signal processing circuit 3 in the state where the pseudo detection element 4 is connected to the previous detection signal processing circuit 3 which is the current temperature, and stores the reference temperature
  • the difference (Ra-Rr) from the position detection value (Rr) stored in the hour detection value storage 6a is calculated, and the actual position detection value output from the phase difference detection means 14, that is, the detection signal processing circuit 3 is calculated.
  • This is means for correcting the position detection value of the detection signal processing circuit 3 with the detection element 2 connected based on the difference (Ra ⁇ Rr).
  • This difference (Ra ⁇ Rr) may be used as it is, or may be used after being subjected to processing such as multiplication by a coefficient.
  • the temperature compensation means 6 constitutes a control determination section 21 together with the period generation section 13 and the phase difference detection means 14 that constitute the digital processing section 3B of the detection signal processing circuit 3.
  • the control determination unit 21 includes electronic parts such as a custom AISC (an integrated circuit manufactured specifically for a specific application), a microcomputer, and an FPGA (Field Programmable Gate Array).
  • the electronic components constituting the control determination unit 21, the analog circuit unit 3 ⁇ / b> A, and the pseudo detection element 4 are mounted on the same circuit board (not shown).
  • the position detection value (Ra) of the detection signal processing circuit 3 in a state where the connection switching means 5 is connected to the pseudo detection element 4 side is obtained prior to each measurement.
  • the pseudo detection element 4 is connected every few minutes to obtain the position detection value (Ra). It is unknown how many times the outside air temperature during actual use is, but the difference between the position detection value (Ra) prior to this measurement and the position detection value (Rr) at the stored reference temperature ( Ra ⁇ Rr) is an error with respect to temperature in the detection signal processing circuit 3.
  • the position detection value of the detection target 1 is output from the phase difference detection means 14.
  • the temperature compensation processing means 6a subtracts the temperature error (Ra ⁇ Rr) from the position detection value output from the phase difference detection means 14 as a correction calculation, and outputs a position detection value as this position detector.
  • the pseudo detection element 4 is a signal having the same value as the detection signal of the detection element 2 when the pseudo detection element 4 is at the specific position. Since it is a component that does not require an output change with respect to a change in position and is a resistor, a component that has excellent linearity with respect to an influence on a temperature change can be easily obtained from a commercial product. Moreover, even if the linearity is somewhat low, there can be obtained a product that can be linearized with high accuracy with little variation. Therefore, accurate temperature compensation is possible by selecting and using such components.
  • this embodiment is a position detector that detects a linear position
  • a position detector that obtains a position detection value on a straight line has many applications that require high-precision detection accuracy in machine tool applications and other applications. . Therefore, the temperature compensation function is more effectively exhibited.
  • the detection element 2 is a coil that is a magnetic detection element, and the coil has low linearity with respect to a temperature change. Therefore, it is difficult to compensate the temperature of the detection signal processing circuit 3 by a normal method.
  • the pseudo detection element 4 made of a resistor is used, temperature compensation can be performed easily and accurately.
  • magnetic position detectors are more resistant to dirt and the like than optical types, and there is a need for highly accurate position detectors for machine tool applications and other applications. Therefore, the temperature compensation function is more effectively exhibited.
  • the pseudo detection element 4 Since the detection signal processing circuit 3 and the pseudo detection element 4 are provided on the same circuit board, the pseudo detection element 4 is placed in a temperature environment very similar to the detection signal processing circuit 3. Temperature compensation can be performed with higher accuracy. Further, since the detection signal processing circuit 3, the pseudo detection element 4, and the temperature compensation processing means 6 are provided on the same circuit board, the assembly of the position detector and the productivity of the circuit portion are excellent.
  • FIGS. 1 to 4 A second embodiment of the present invention will be described with reference to FIGS. This embodiment is the same as the first embodiment described above with reference to FIGS. 1 to 4 except for the matters specifically described.
  • This embodiment has the same configuration as that of the first embodiment except for the means for performing temperature compensation, and the detection object 1 is changed for each section in which the characteristic of the detection element 2 changes in the stroke range of the detection object 1.
  • standard temperature is made into multiple places. Specifically, the position detection value (Rr) by the pseudo detection element 4 at the reference temperature is stored for each of the four individual detection elements 2, and each detection element 2 at the four positions is stored. In the 360 ° detection range detected at, each position having a phase angle of 0 °, 90 °, 180 °, 270 ° is the specific position.
  • the pseudo detection element 4 and the connection switching means 5 are the same as those in the first embodiment, and the four first change-over switches 5a at the right end in FIG. Between the detection element 4 and each changeover switch 5a serving as the connection changeover means 5, there are provided second changeover switches 22a to 22d and third changeover switches 23a to 23d for range changeover.
  • the detection element 2 composed of four coils has one end side (CN1 side) terminal connected to the plus side terminal of the excitation generation circuit 10 in FIG. 2, and the other end terminal in FIG. It is connected to an S + output unit, an S ⁇ output unit, a C + output unit, and a C ⁇ output unit in the output extraction unit 12 indicated by reference numeral CN2 via a rightmost selector switch 5a.
  • the right end changeover switch 5 a serves as a connection changeover means 5 for changing over the connection between the detection element 2 and the pseudo detection element 4.
  • Two pseudo detection elements 4 made of resistors are provided for each of the four detection elements 2 (a total of eight) and are selectively used.
  • the two pseudo detection elements 4 for each detection element 2 have different resistance values.
  • These pseudo detection elements 4 are selected and connected by the second selector switches 22a to 22d and the third selector switches 23a to 23d for selection, so that the 0 °, 90 °, 180 °, and 270 ° are selected.
  • the specific position that becomes the phase angle of is selected.
  • the four second change-over switches 22a to 22d on the left in the figure select which set is divided into two sets of two phase angles of 0 °, 90 °, 180 °, and 270 °.
  • the third change-over switches 23a to 23d on the right side of the drawing select which one of the selected sets is to be taken. Thereby, an arbitrary phase angle of the four is selected.
  • Each of the change-over switches 5a, 22a to 22d, 23a to 23d is an analog switch, and is switched by turning on and off (level high and low) switch control output units CONT1 to CONT4 connected in a grouped manner.
  • Each of the change-over switches 5a, 22a to 22d, and 23a to 23d is connected to the SA terminal side when the connected switch control output units CONT1 to 4 are turned on, and is connected to the SB terminal side when the switch control outputs CONT1 to 4 are turned off.
  • phase angle to be selected by turning on / off the switch control output units CONT1 to CONT4 and whether to select the detection element 2 side (coil side) are as shown in the combination shown in FIG.
  • “0” is off (low level) and “1” is on (high level).
  • “-” means possible (unquestioned) in either “0” or “1” state.
  • a timer (not shown) of the temperature compensation processing means 6 is initialized (step S1), and the measurement mode for performing normal measurement is used, or the position by the pseudo detection element 4 in the current temperature environment It is determined whether or not it is a correction mode for obtaining a detection value (S2).
  • the normal measurement mode is looped (a loop that returns to S2 via S3, S4, and S5).
  • the shift to the correction mode is, for example, at the first routine at the start of measurement and at a subsequent set time interval (once per minute, once per hour, etc.).
  • step S2 When the process proceeds from step S2 to the correction mode, the changeover switches 5a, 22a to 22d, and 23a to 23d are first switched so that the specific position becomes a value corresponding to 0 ° of the phase angle (electrical phase), and the current temperature is changed.
  • the position detection value (Ra) at is obtained (S6).
  • a position detection value (Ra) at a current temperature corresponding to a phase angle corresponding to 90 °, a phase angle corresponding to 180 °, and a phase angle corresponding to 270 ° is sequentially obtained (S7 to S9).
  • a difference (Ra-Rr) from the position detection value (Rr), which is a pre-recorded value at each reference temperature is calculated (S10). That is, the position detection value (Rr), which is a pre-recorded value, is subtracted from the phase detection value (Ra) obtained in S7 to S9, respectively.
  • This difference is an error that appears as a displacement in the output depending on the temperature environment of the detection signal processing 3.
  • the pre-recorded value (Ra) at each reference temperature is indicated as “C *** r”.
  • the position detection value (Ra) at the current temperature is indicated as “C *** n”, and the difference (Ra ⁇ Rr) is indicated as “C *** e”. Note that “000”, “090”, “180”, and “270” corresponding to the phase angles of 0 °, 90 °, 180 °, and 270 °, respectively, are substituted for “***”.
  • the connection is switched to the normal detection circuit, that is, the detection element 2 to obtain the position detection value (Dn) (S3).
  • the temperature compensation difference is corrected (S4).
  • the detected value after temperature compensation is shown as “Dt”.
  • the third value when it is in the quadrant (180 ° or more and less than ⁇ 270 °) or in the fourth quadrant (270 ° or more and less than ⁇ 360 °), the correction is performed as follows.
  • Dt Dn ⁇ ⁇ C000e ⁇ (C090e ⁇ C000e) ⁇ (Dn ⁇ “detection definition value at 0 °”) / (detection amount corresponding to 90 ° width) ⁇
  • Dt Dn ⁇ ⁇ C090e ⁇ (C180e ⁇ C090e) ⁇ (Dn ⁇ “detection defined value at 90 °”) / (detection amount corresponding to 90 ° width) ⁇
  • Dt Dn ⁇ ⁇ C180e ⁇ (C270e ⁇ C180e) ⁇ (Dn ⁇ “detection defined value at 180 °”) / (detection amount corresponding to 90 ° width) ⁇
  • Dt Dn ⁇ ⁇ C270e ⁇ (C000e ⁇ C270e) ⁇ (Dn ⁇ “detection defined value at 270 °”) / (detection amount corresponding to 90 ° width) ⁇
  • Dt Dn ⁇ ⁇ C270e ⁇ (C000e ⁇ C270e)
  • detection definition value at ⁇ ° is “values of outputs at 0 °, 90 °, 180 °, and 270 ° in FIG. 3B”.
  • the “detection amount corresponding to 90 ° width” is “amount relative to the detection amount when the output changes from 0 ° to 90 °”.
  • the detection element 2 is a coil
  • the detection element 2 is a semiconductor element such as an MR element (magnetic resistance element), an MI element (magnetic impedance element), or a Hall element.
  • the present invention can also be applied to cases where the detection element 2 is a detection element other than a magnetic type.
  • the number of Lc +, Ls +, Lc ⁇ , and Ls ⁇ coils of the detection element 2 is not limited to three. One or five may be sufficient.
  • this invention is applicable also to the position detector which detects a rotation position, and the position detector which detects an inclination angle position.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

La présente invention concerne un pseudo-élément de détection (4) comprenant des résistances qui possèdent une valeur de résistance et qui sont affectées par un changement de température, le pseudo-élément de détection (4) envoyant un signal vers un circuit de traitement de signal de détection (3) quand une commutation est effectuée vers un élément de détection (2) et qu'une connexion est établie avec le circuit de traitement de signal de détection (3), le signal ayant la même valeur que le signal de détection de l'élément de détection (2) qui correspond à une position spécifique d'un objet à détecter (1). L'invention concerne également un moyen de traitement par compensation de température (6) servant à : stocker la valeur de détection de position (Rr) du circuit de traitement de signal de détection (3) à une température de référence quand le pseudo-élément de détection (4) est dans un état connecté ; calculer la différence (Ra-Rr) entre la valeur de détection de position (Ra) du circuit de traitement de signal de détection à la température du moment quand le pseudo-élément de détection (4) est connecté au circuit de traitement de signal de détection et la valeur de détection de position (Rr) à la température de référence ; et corriger la valeur de détection de position du circuit de traitement de signal de détection (3) en fonction de la différence (Ra-Rr) quand l'élément de détection (2) est connecté au circuit de traitement de signal de détection (3).
PCT/JP2013/056704 2012-04-13 2013-03-12 Détecteur de position WO2013153892A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014510082A JP5800086B2 (ja) 2012-04-13 2013-03-12 位置検出器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012091885 2012-04-13
JP2012-091885 2012-04-13

Publications (1)

Publication Number Publication Date
WO2013153892A1 true WO2013153892A1 (fr) 2013-10-17

Family

ID=49327466

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2013/056704 WO2013153892A1 (fr) 2012-04-13 2013-03-12 Détecteur de position

Country Status (2)

Country Link
JP (1) JP5800086B2 (fr)
WO (1) WO2013153892A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017042011A (ja) * 2015-08-21 2017-02-23 村田機械株式会社 移動体
JP2018151378A (ja) * 2017-02-09 2018-09-27 プファイファー・ヴァキューム・ゲーエムベーハー 位置検出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09184702A (ja) * 1995-12-28 1997-07-15 Murata Mach Ltd 差動トランス用アンプの温度補償方法
JPH09287909A (ja) * 1996-04-23 1997-11-04 Toyota Motor Corp 磁気式位置センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09184702A (ja) * 1995-12-28 1997-07-15 Murata Mach Ltd 差動トランス用アンプの温度補償方法
JPH09287909A (ja) * 1996-04-23 1997-11-04 Toyota Motor Corp 磁気式位置センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017042011A (ja) * 2015-08-21 2017-02-23 村田機械株式会社 移動体
JP2018151378A (ja) * 2017-02-09 2018-09-27 プファイファー・ヴァキューム・ゲーエムベーハー 位置検出装置

Also Published As

Publication number Publication date
JPWO2013153892A1 (ja) 2015-12-17
JP5800086B2 (ja) 2015-10-28

Similar Documents

Publication Publication Date Title
US11300425B2 (en) Turn count decoding for multi-turn sensors
JP6359710B2 (ja) 磁界検出器のためのオフセット補償
US10859406B2 (en) Magnetic sensor position measurement with phase compensation
JP5613839B2 (ja) 移動する物体の絶対的な位置特定のための方法及び装置
KR102195533B1 (ko) 로터리 인코더 및 로터리 인코더의 각도 보정 방법
JP6190537B2 (ja) 電流センサ
JP2008139300A (ja) 回転角度検出装置
JP2006220529A (ja) 絶対回転角度およびトルク検出装置
JP6015776B2 (ja) 変位センサ及び変位の検出方法
JP6218159B2 (ja) 電流センサ
JP5800086B2 (ja) 位置検出器
JP2008139301A (ja) 回転角度検出装置
JP4429888B2 (ja) 補償機能を備えた角度検出センサ
CN113358008A (zh) 用于确定磁体位置的设备、系统和方法
KR101949054B1 (ko) 위치 검출 장치
CN115406335B (zh) 具有误差检测的磁位置传感器系统、方法和设备
CN118575058A (zh) 磁传感器系统
JP2020016439A (ja) 角度センサの補正装置および角度センサ
JP4224154B2 (ja) 自己校正型角度検出装置及び検出精度校正方法
JP5428625B2 (ja) 回転角度検出装置
JP4924825B2 (ja) 電磁誘導式リニアスケール
JP4290739B2 (ja) 磁気検出装置
JP4222892B2 (ja) 誤差補正機能付エンコーダ
JP2016080408A (ja) 回転角度検出回路
JPH0510703A (ja) ロツドの移動位置検出装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13776041

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2014510082

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13776041

Country of ref document: EP

Kind code of ref document: A1