WO2013143064A1 - 液晶显示面板以及其制造方法 - Google Patents
液晶显示面板以及其制造方法 Download PDFInfo
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- WO2013143064A1 WO2013143064A1 PCT/CN2012/073091 CN2012073091W WO2013143064A1 WO 2013143064 A1 WO2013143064 A1 WO 2013143064A1 CN 2012073091 W CN2012073091 W CN 2012073091W WO 2013143064 A1 WO2013143064 A1 WO 2013143064A1
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13624—Active matrix addressed cells having more than one switching element per pixel
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/13629—Multilayer wirings
Definitions
- the present invention relates to a liquid crystal display panel and a method of fabricating the same, and, in particular, to a liquid crystal display panel which can increase a pixel aperture ratio without lowering a storage capacitor value, and a method of fabricating the same.
- LCD monitors have become widely used in a variety of electronic devices such as televisions, mobile phones, personal digital assistants (PDAs), digital cameras, computer screens or notebook screens.
- PDAs personal digital assistants
- a display with a high resolution color screen is a display with a high resolution color screen.
- Transistor liquid crystal displays have become the mainstream of the market due to their high image quality, good space utilization efficiency, low power consumption, and no radiation. At present, the market's performance requirements for liquid crystal displays are toward high contrast (High Contrast Ratio), fast response and large viewing angle.
- FIG. 1 is a design diagram of a pixel capable of reducing color shift.
- the pixel 10 employs a design of two sub-pixel electrodes 11, 12.
- the storage capacitor 17 of the conventional pixel 10 is disposed between the sub-pixel electrode 12 and the control voltage line 16, thus causing the aperture ratio of the sub-pixel electrode 12 to be affected.
- An object of the present invention is to provide a liquid crystal display panel and a method of fabricating the same that a storage capacitor is disposed between a scan line and a control voltage line to increase an aperture ratio to solve the problems of the prior art.
- the present invention discloses a liquid crystal display panel comprising a scan line, which is composed of a first metal layer and is disposed on the glass substrate for transmitting a scan signal, and a control voltage line formed by the first metal layer. And on the glass substrate for transmitting a control signal; an insulating layer above the scan line and the control voltage line; and a data line formed by a second metal layer and located on the insulating layer Above, for transmitting a data signal; a first transistor electrically connected to the first sub-pixel electrode; a second transistor electrically connected to the control voltage line and the first transistor; a sub-pixel electrode and a second sub-pixel electrode are both formed by a transparent conductive layer, the second sub-pixel electrode comprises a first conductive region; a common electrode, composed of the first metal layer and located at the a common conductive signal is transmitted on the glass substrate; a second conductive region is formed by the transparent conductive layer, electrically connected to the common electrode; and a lower electrode sheet is formed by the second metal layer and located at the Above
- the liquid crystal display panel further includes: a protective layer over the second metal layer; a first opening formed in the protective layer and located on the scan line and Between the control voltage lines, the first sub-pixel electrode is electrically connected to the first transistor through the first opening; and a second opening through the protective layer and the insulating layer And being located between the control voltage line and the second sub-pixel electrode such that the common electrode is electrically connected to the second conductive region through the second opening.
- the first storage capacitor and the second storage capacitor are projected on the glass substrate at a position where the scan line and the control voltage line are projected on the glass substrate. between.
- the material of the transparent conductive layer is indium tin oxide.
- the first transistor, the second transistor, the scan line, and the control voltage line are located between the first sub-pixel electrode and the second sub-pixel electrode.
- the invention further discloses a method for manufacturing a liquid crystal display panel, the manufacturing method comprising: providing a glass substrate; forming a first metal layer on the glass substrate; etching the first metal layer to form a first a gate of the transistor, a gate of a second transistor, a control voltage line, a common voltage line, and a scan line; a gate of the first transistor, a gate of the second transistor, the control voltage Forming an insulating layer on the line, the common voltage line, and the scan line; forming a second metal layer, and etching the second metal layer to form a source and a drain of the first transistor, a source and a drain of the second transistor, a lower electrode tab, and a data line, the lower electrode tab being electrically connected to the drain of the second transistor and located between the control voltage line and the scan line Forming a protective layer over the second metal layer; etching the protective layer to form a first opening and a second opening; forming a transparent conductive layer, and etching the transparent conductive
- the first storage capacitor and the second storage capacitor are projected on the glass substrate at a position where the scan line and the control voltage line are projected on the glass substrate. between.
- the material of the transparent conductive layer is indium tin oxide.
- the first transistor, the second transistor, the scan line, and the control voltage line are located between the first sub-pixel electrode and the second sub-pixel electrode.
- the liquid crystal display panel of the present invention and the method of fabricating the same are disposed between a scan line and a control voltage line as a lower electrode sheet of an electrode of a storage capacitor, and are the first electrode as another electrode of the storage capacitor.
- the conductive region and the second conductive region are formed of a transparent conductive layer. Therefore, the position at which the storage capacitor is formed is located between the scan line and the control signal line, so that the second sub-pixel electrode has a larger layout space, and thus the aperture ratio of the second sub-pixel electrode can be increased.
- FIG. 1 is a design diagram of a pixel which can reduce color shift.
- FIG. 2 is a simplified schematic view of a liquid crystal display panel of the present invention.
- Fig. 3 is a partial enlarged view of Fig. 2;
- 4 to 7 are schematic views showing a method of forming a flat display panel of the present invention.
- FIG. 2 is a simplified schematic view of a liquid crystal display panel 300 of the present invention
- FIG. 3 is a partial enlarged view of a region B of FIG.
- the liquid crystal display panel 300 includes a plurality of data lines, a plurality of scanning lines, a plurality of control voltage lines, a plurality of transistors, and a plurality of pixel units.
- Each of the pixel units includes transistors 303, 323, a first sub-pixel electrode 331, and a second sub-pixel electrode 332.
- To simplify the drawing in the following embodiments, only one data line 302, one scan line 301, one common voltage line 305, and one control voltage line 307 are shown.
- the gate of the first transistor 303 is coupled to the scan line 301, and the source of the first transistor 303 is coupled to the data line 302.
- the gate of the second transistor 323 is coupled to the control voltage line 307, the source of the second transistor 323 is coupled to the drain of the first transistor 303, and the drain of the second transistor 323 is coupled to the lower electrode plate 308.
- the drain of the first transistor 303 is coupled to the first sub-pixel electrode 331 and the second sub-pixel electrode 332.
- Control voltage line 307 is used to provide a control signal.
- the driving manner of the liquid crystal display panel 300 is as follows: a scan signal output from a gate driver (not shown) is input through the scan line 301, so that the first transistor 303 connected to the scan line 301 is sequentially turned on, and the source driver (not shown) The corresponding data signal is outputted to the first transistor 303 through the data line 302, and the first transistor 303 transmits the data signal to the first sub-pixel electrode 331 and the second sub-pixel electrode 332 to charge the device.
- the liquid crystal above the first sub-pixel electrode 331 and the second sub-pixel electrode 332 is twisted according to the voltage difference between the data signal and the common voltage of the common voltage line 305, thereby displaying different gray levels.
- the gate driver outputs the scan signals row by row through a plurality of scan lines to turn on the first transistor 303 of each row, and then the source driver drives the first sub-pixel electrode 331 and the second sub-pixel electrode 332 of each row. Discharge. In this way, the complete display of the liquid crystal display panel 300 can be completed.
- FIG. 4 to FIG. 7 are schematic diagrams showing a method of forming the flat display panel 300 of the present invention. 4 to 7 are also sectional views of the flat display panel 300 shown in Fig. 3 along the line segment A-A' and the line segment C-C'.
- a glass substrate 350 is provided as a lower substrate, and then a metal thin film deposition process is performed to form a first metal layer (not shown) on the surface of the glass substrate 350, and a first mask is used.
- the film is subjected to a first lithography etching to etch the gate 371 of the first transistor 303, the common voltage line 305, the control voltage line 307, and the scan line 301.
- FIG. 4 does not depict scan line 301, those skilled in the art will appreciate that gate 371 is substantially a portion of scan line 301.
- an insulating layer 351 made of silicon nitride (SiNx) is deposited to cover the gate electrode 371, the common voltage line 305, the control voltage line 307, and the scan line 301. Continuous deposition of amorphous silicon on the insulating layer 351 (a-Si, Amorphous) Si) layer and a high electron doping concentration of N+ amorphous silicon layer. And then an amorphous silicon layer and a high electron doping concentration of N+ The amorphous silicon layer is covered with a second metal layer (not shown).
- the amorphous silicon layer is formed to constitute the semiconductor layer 372 while the second metal layer is etched to form the source 373, the drain 374, the lower electrode plate 308, and the data line 302 of the thin film transistor 303.
- the semiconductor layer 372 includes an amorphous silicon layer 372a as a channel of the transistor 303 and an ohmic contact layer for reducing the impedance (Ohmic) Contact layer) 372b.
- FIG. 5 does not identify data line 302, those skilled in the art will appreciate that source 373 is substantially part of data line 302.
- the structure of FIG. 5 is to simultaneously etch the amorphous silicon layer with a second mask, N+ An amorphous silicon layer and a second metal layer.
- an amorphous silicon layer and an N+ amorphous silicon layer may be formed on the insulating layer 351, and the amorphous silicon layer is first etched by the second mask, N+.
- An amorphous silicon layer is formed to form the semiconductor layer 372; thereafter, a second metal layer is formed over the semiconductor layer 372 and the insulating layer 351, and the second metal layer is etched by another mask to form a source 373 and a drain of the thin film transistor 303.
- FIGS. 4 to 6 Please refer to Figure 3 and Figure 6, and then deposit a protective layer of silicon nitride (passivation). Layer 375, and then using a third mask for third lithography etching to remove a portion of the protective layer 375 over the drain 374 up to the surface of the drain 374 to form a first opening (Via) 531, a second The opening 532 and the third opening 533.
- the position at which the first opening 531 is projected on the glass substrate 350 is between the position where the scanning line 301 / the control voltage line 307 is projected on the glass substrate 350.
- the second opening 532 extends through the protective layer 375 and the insulating layer 351 and is located between the control voltage line 307 and the second sub-pixel electrode 332.
- the transistor 323 is not illustrated in FIGS. 4 to 6 , the field The skilled person can understand that the order of formation of the transistor 303 and the transistor 323 is the same, and will not be further described herein.
- Figure 7 is also a cross-sectional view of the flat display panel 300 of Figure 3 taken along line A-A' and line C-C'.
- Indium tin oxide is formed on the protective layer 375 (Indium Tin Oxide, ITO) is a transparent conductive layer of material, and then the transparent conductive layer is etched by a fourth mask to form a first sub-pixel electrode 331, a second sub-pixel electrode 332, and a second conductive region 334.
- the first sub-pixel electrode 331 is electrically connected to the drain 374 of the transistor 303 through the first opening 531.
- the second sub-pixel electrode 332 is electrically connected to the drain 374 of the transistor 303 through the third opening 533.
- the common electrode 305 is electrically connected to the second conductive region 334 through the second opening 532.
- the second sub-pixel electrode 332 includes a first conductive region 332a that spans the control signal line 306.
- the first conductive region 332a and the second conductive region 334 are both located above the lower electrode tab 308 to form a first storage capacitor Cs1 and a second storage capacitor Cs2.
- the first storage capacitor Cs1 and the second storage capacitor Cs2 formed by the first conductive region 332a of the lower electrode tab 308 and the second subpixel electrode 332 and the second conductive region 334 are located on the scan line 301 and The voltage line 306 is controlled, so the layout area of the second sub-pixel electrode 332 can be increased.
- the aperture ratio of the second sub-pixel electrode 332 of the present invention can be increased from 67.17% to 69.9%.
Abstract
Description
Claims (9)
- 一种液晶显示面板,所述液晶显示面板包括一玻璃基板,其包含:一扫描线,由一第一金属层构成且位于所述玻璃基板上,用于传输一扫描信号;一控制电压线,由所述第一金属层构成且位于所述玻璃基板上,用来传输一控制信号;一绝缘层,位于所述扫描线和所述控制电压线之上;一数据线,由一第二金属层构成且位于所述绝缘层之上,用于传输一数据信号;一第一晶体管,电性连接于所述第一子像素电极;一第二晶体管,电性连接于所述控制电压线和所述第一晶体管;一第一子像素电极以及一第二子像素电极,皆由一透明导电层形成,所述第二子像素电极包含一第一导电区;一共通电极,由所述第一金属层构成且位于所述玻璃基板上,用来传输一共通信号;一第二导电区,由所述透明导电层形成,电性连接所述共通电极;一下电极片,由所述第二金属层构成且位于所述绝缘层之上且位于所述扫描线以及所述控制电压线之间,所述下电极片电性连接第二晶体管;及一第一存储电容以及一第二存储电容,所述第一存储电容是由所述下电极片以及所述第二子像素电极的所述第一导电区组成,所述第二存储电容是由所述下电极片以及所述第二导电区组成。
- 根据权利要求1所述的液晶显示面板,其中所述液晶显示面板另包含:一保护层,位于所述第二金属层之上;一第一开孔,开设于所述保护层中且位在所述扫描线和所述控制电压线之间,使得所述第一子像素电极通过所述第一开孔与所述第一晶体管电性连接;以及一第二开孔,贯穿所述保护层和所述绝缘层,且位在所述控制电压线和所述第二子像素电极之间,使得所述共通电极通过所述第二开孔与所述第二导电区电性连接。
- 根据权利要求2所述的液晶显示面板,其中所述第一存储电容和所述第二存储电容投射于所述玻璃基板的位置,是位于所述扫描线和所述控制电压线投射于所述玻璃基板的位置之间。
- 根据权利要求1所述的液晶显示面板,其中所述透明导电层的材料是氧化铟锡。
- 根据权利要求1所述的液晶显示面板,其中所述第一晶体管、所述第二晶体管、所述扫描线和所述控制电压线位于所述第一子像素电极以及所述第二子像素电极之间。
- 一种液晶显示面板的制造方法,其包含:提供一玻璃基板;形成一第一金属层于所述玻璃基板上;蚀刻所述第一金属层,以形成一晶体管的栅极、一控制电压线、一共通电压线以及一扫描线;在所述晶体管的栅极、所述控制电压线、所述共通电压线以及所述扫描线上形成一绝缘层;形成一第二金属层,并蚀刻所述第二金属层,以形成所述晶体管的源极和漏极、一下电极片以及一数据线,所述下电极片位于所述控制电压线和所述扫描线之间;形成一保护层于所述第二金属层之上;蚀刻所述保护层以形成一第一开孔和一第二开孔;形成一透明导电层,并蚀刻所述透明导电层以形成一第一子像素电极、一第二子像素电极以及一第二导电区,所述第二子像素电极包含一第一导电区,其中所述第一子像素电极通过所述第一开孔与所述晶体管电性连接,所述共通电极通过所述第二开孔与所述第二导电区电性连接,所述下电极片以及所述第二子像素电极的所述第一导电区形成一第一存储电容,所述下电极片以及所述第二导电区形成一第二存储电容。
- 根据权利要求6所述的制造方法,其中所述第一存储电容和所述第二存储电容投射于所述玻璃基板的位置,是位于所述扫描线和所述控制电压线投射于所述玻璃基板的位置之间。
- 根据权利要求6所述的制造方法,其中所述透明导电层的材料是氧化铟锡。
- 根据权利要求6所述的制造方法,其中所述晶体管、所述扫描线和所述控制电压线位于所述第一子像素电极以及所述第二子像素电极之间。
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US13/502,744 US20150009446A1 (en) | 2012-03-26 | 2012-03-27 | Lcd panel and a method of manufacturing the same |
DE112012006096.2T DE112012006096B4 (de) | 2012-03-26 | 2012-03-27 | LCD-Panel und Verfahren zur Herstellung desselben |
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CN201210081847.8A CN102608816B (zh) | 2012-03-26 | 2012-03-26 | 液晶显示面板以及其制造方法 |
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TWI683152B (zh) * | 2018-12-28 | 2020-01-21 | 友達光電股份有限公司 | 畫素結構 |
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KR102059371B1 (ko) * | 2013-05-24 | 2019-12-27 | 엘지디스플레이 주식회사 | 액정 디스플레이 장치와 이의 제조방법 |
KR102098639B1 (ko) * | 2013-09-30 | 2020-04-08 | 코오롱인더스트리 주식회사 | 고분자 전해질막, 이의 제조 방법 및 이를 포함하는 막-전극 어셈블리 |
TWI570492B (zh) * | 2015-09-18 | 2017-02-11 | 友達光電股份有限公司 | 畫素結構 |
CN105895706A (zh) * | 2016-07-01 | 2016-08-24 | 深圳市华星光电技术有限公司 | 薄膜晶体管及显示装置 |
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- 2012-03-27 DE DE112012006096.2T patent/DE112012006096B4/de not_active Expired - Fee Related
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DE112012006096B4 (de) | 2020-08-13 |
DE112012006096T5 (de) | 2015-01-22 |
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