WO2013129297A1 - 化合物太陽電池の製法 - Google Patents
化合物太陽電池の製法 Download PDFInfo
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- WO2013129297A1 WO2013129297A1 PCT/JP2013/054721 JP2013054721W WO2013129297A1 WO 2013129297 A1 WO2013129297 A1 WO 2013129297A1 JP 2013054721 W JP2013054721 W JP 2013054721W WO 2013129297 A1 WO2013129297 A1 WO 2013129297A1
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- 150000001875 compounds Chemical class 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000004544 sputter deposition Methods 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 44
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 abstract description 17
- 238000005477 sputtering target Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 131
- 230000031700 light absorption Effects 0.000 description 32
- 230000015572 biosynthetic process Effects 0.000 description 16
- 239000010949 copper Substances 0.000 description 12
- 238000007740 vapor deposition Methods 0.000 description 11
- 239000000203 mixture Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011669 selenium Substances 0.000 description 7
- 239000011701 zinc Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052733 gallium Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000003513 alkali Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910003363 ZnMgO Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- JYMITAMFTJDTAE-UHFFFAOYSA-N aluminum zinc oxygen(2-) Chemical compound [O-2].[Al+3].[Zn+2] JYMITAMFTJDTAE-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052951 chalcopyrite Inorganic materials 0.000 description 1
- -1 chalcopyrite compound Chemical class 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000009388 chemical precipitation Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
Description
(裏面電極層の形成)
まず、脱脂したSUS430(幅20mm×長さ20mm×厚み50μm)からなる基板の表面に、マグネトロンスパッタ装置(アルバック社製、SH-450)を用いて、放電ガスにはアルゴンを使用し、スパッタリング圧力が1Paとなるよう直流(DC)電源を用い、スパッタリングレート60nm/minの条件で、厚み0.8μmのMoからなる裏面電極層を形成した。
つぎに、上記で形成された裏面電極層の上に、CIGS光吸収層を形成した。すなわち、真空蒸着装置のチャンバー内に、Ga(950℃),In(780℃),Cu(1100℃),Se(140℃)のそれぞれを蒸着源として配置し、このチャンバー内を真空度1×10-4Paとし、基板を昇温速度550℃/hにて550℃まで加熱した。このとき、上記蒸着源をそれぞれ括弧内の温度になるよう加熱し、これらの元素を同時に蒸発させることにより、上記裏面電極層の上にカルコパイライト化合物からなるCIGS光吸収層を形成した。得られたCIGS光吸収層の組成(原子数%)は、Cu/III族=0.89、Ga/III族=0.31であり、その厚みは2.1μmであった。
つづいて、上記で形成されたCIGS光吸収層の上に、厚み70mmのバッファ層を形成した。バッファ層は、図2に示す2枚の陰極ターゲットが略V字状に配置された対向ターゲットスパッタ装置(角度θ=10°)を用い、以下の条件により形成した。すなわち、陰極ターゲットとして、Zn0.85Mg0.15Oからなる組成のものを使用し、スパッタリングの際の放電ガスにArを用い、スパッタリング圧力0.3Pa、スパッタリングレート15nm/minの条件で、高周波(RF)電源を用いるようにした。なお、上記陰極ターゲットを組成分析したところ、Mgに対しCaが約3%(原子数%)混在していた。
さらに、上記で形成されたバッファ層の上に、透明電極層を形成した。透明電極層は、マグネトロンスパッタ装置(アルバック社製、SH-450)を用い、下記の条件にて形成した。すなわち、陰極ターゲットとして、ITO(In2O3:90〔原子数%〕SnO2:10〔原子数%〕)なる組成のものを用い、スパッタリングの際の放電ガスにはArおよびAr流量の1/10のO2ガスを併用した。そして、電力密度1.6W/cm2、スパッタリング圧力0.3Pa、スパッタリングレート20nm/min、高周波(RF)電源を用いて、厚み200nmの透明電極層を形成し、実施例1のCIGS太陽電池を得た。
バッファ層の形成における、スパッタリングレートを下記の表1に示すように変更した他は、実施例1と同様にして、実施例2および3のCIGS太陽電池を得た。
バッファ層の形成を、直流(DC)電源を重畳した高周波(RF)電源を用い、そのスパッタリングレートを下記の表1に示すように変更した他は、実施例1と同様にして、実施例4~6のCIGS太陽電池を得た。
バッファ層の形成において、図2に示す2枚の陰極ターゲットの略V字の程度(角度θ)を、下記の表1に示すように変更した他は、実施例1と同様にして、実施例7および8のCIGS太陽電池を得た。
バッファ層の形成を、図3に示す2枚の陰極ターゲットが平行に配置された対向ターゲットスパッタ装置を用いるように変更した他は、実施例1と同様にして、実施例9のCIGS太陽電池を得た。
バッファ層の形成を、汎用のマグネトロンスパッタ装置(アルバック社製、SH-450:基板の層形成面に平行となるよう1枚の陰極ターゲットが配置されている)を用い、印加電源およびスパッタリングレートを下記の表1に示すように変更した他は、実施例1と同様にして、比較例1~6のCIGS太陽電池を得た。
バッファ層の形成を、直流(DC)電源を用い、スパッタリングレートを下記の表1に示すように変更した他は、実施例1と同様にして、比較例7~9のCIGS太陽電池を得た。
上記実施例1~9、比較例1~9のCIGS太陽電池をそれぞれ20個準備し、これらに擬似太陽光(AM1.5)を照射し、IV計測システム(山下電装社製)を用いて、それぞれの変換効率を測定した。得られた変換効率の平均と、比較例4を基準(100)とした場合における変換効率比をそれぞれ算出し、下記の表1に併せて示す。
6,6’ 陰極ターゲット
X 仮想中心軸
Claims (3)
- 基板上に、少なくともI-III-VI族化合物半導体層と、バッファ層と、透明電極層とをこの順で備えた化合物太陽電池の製法であって、上記基板の層形成面に対して垂直状に延びる仮想中心軸を想定したときに、その仮想中心軸の両側に、2枚のスパッタリング用の陰極ターゲットを対向させた状態で配置し、高周波(RF)電源、もしくは直流(DC)電源を重畳した高周波(RF)電源を用いるスパッタリング法により、上記バッファ層の形成を行うことを特徴とする化合物太陽電池の製法。
- 上記2枚の対向する陰極ターゲットが、基板側に向かって広がる略V字状に配置されている請求項1記載の化合物太陽電池の製法。
- 上記2枚の対向する陰極ターゲットが、平行に配置されている請求項1記載の化合物太陽電池の製法。
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CN201380010237.1A CN104137273A (zh) | 2012-02-27 | 2013-02-25 | 化合物太阳能电池的制造方法 |
EP13754351.8A EP2808904A4 (en) | 2012-02-27 | 2013-02-25 | METHOD FOR MANUFACTURING A COMPOUND SOLAR CELL |
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CN105355716A (zh) * | 2015-11-18 | 2016-02-24 | 北京四方创能光电科技有限公司 | 一种利用干法缓冲层制作cigs薄膜太阳能电池的方法 |
CN105714262A (zh) * | 2016-05-05 | 2016-06-29 | 常州工学院 | 一种择优生长ito透明导电薄膜的制备方法 |
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