WO2013118306A1 - Dispositif de détection de défauts, procédé de détection de défauts, support d'enregistrement lisible par ordinateur pour enregistrer un programme de détection de défauts - Google Patents

Dispositif de détection de défauts, procédé de détection de défauts, support d'enregistrement lisible par ordinateur pour enregistrer un programme de détection de défauts Download PDF

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Publication number
WO2013118306A1
WO2013118306A1 PCT/JP2012/053191 JP2012053191W WO2013118306A1 WO 2013118306 A1 WO2013118306 A1 WO 2013118306A1 JP 2012053191 W JP2012053191 W JP 2012053191W WO 2013118306 A1 WO2013118306 A1 WO 2013118306A1
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WIPO (PCT)
Prior art keywords
resolution
imaging
defect
image
display panel
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Application number
PCT/JP2012/053191
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English (en)
Japanese (ja)
Inventor
山本　修平
慎太郎 田畑
秀信 中西
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シャープ株式会社
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Priority to PCT/JP2012/053191 priority Critical patent/WO2013118306A1/fr
Publication of WO2013118306A1 publication Critical patent/WO2013118306A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00—Geometric image transformations in the plane of the image
    • G06T3/40—Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4053—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution
    • G06T3/4069—Scaling of whole images or parts thereof, e.g. expanding or contracting based on super-resolution, i.e. the output image resolution being higher than the sensor resolution by subpixel displacements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Definitions

  • the present invention relates to a defect detection apparatus for detecting defects in a flat display panel such as a liquid crystal panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix, a defect detection method, and a computer reading in which a defect detection program is recorded.
  • the present invention relates to a possible recording medium.
  • a flat panel display (abbreviated as “Flat Panel ⁇ Display”), which is equipped with a flat display panel such as a liquid crystal panel in which pixels of the three primary colors, ie, R (red), G (green), and B (blue), constituting the picture element are arranged in a matrix.
  • a flat display panel such as a liquid crystal panel in which pixels of the three primary colors, ie, R (red), G (green), and B (blue), constituting the picture element are arranged in a matrix.
  • FPD flat panel display
  • an assembled flat display panel has a defect due to electrical disconnection or short circuit, a minute defect due to foreign matter mixing into the liquid crystal, a minute defect due to partial alignment failure of the liquid crystal, and A defect detection process for detecting defects such as spots and unevenness is included. The quality of the flat display panel is ensured by this defect detection process.
  • a display pattern for inspection is displayed on the flat display panel to be inspected, and the inspector visually checks the display screen of the flat display panel to inspect for the presence or absence of defects.
  • the defect detection device includes an image pickup device equipped with an image pickup device such as a CCD (Charge-Coupled Device) area sensor, picks up a flat display panel on which an inspection display pattern is displayed, and picks up an image of the picked-up image. It is configured to detect defects by analyzing the data by a computer.
  • an image pickup device such as a CCD (Charge-Coupled Device) area sensor
  • the imaging resolution of the image sensor used for imaging is set to be equal to or smaller than the size of the defect to be detected.
  • Patent Documents 1 and 2 propose a technique for reducing the imaging resolution of the imaging element without installing such an expensive imaging device in the defect detection device.
  • Patent Document 1 a plurality of image pickup devices each equipped with an image pickup device having a normal resolution are arranged along the display surface of a flat display panel to be inspected, and image data of a picked-up image output from each image pickup device.
  • a technique for reducing the imaging resolution of the imaging device by combining the above is disclosed.
  • an imaging device is installed movably along the two arrangement directions with respect to a flat display panel in which pixels are arranged in a matrix along two arrangement directions orthogonal to each other.
  • a technique for generating a high-resolution image from a plurality of captured images obtained by imaging a flat display panel at predetermined imaging positions different from each other is disclosed. This is a technique called pixel shifting, and is a technique for artificially improving the resolution of a captured image.
  • the pixels in the image sensor are arranged in a matrix along a first direction u and a second direction v that are orthogonal to each other. It is assumed that each pixel in the imaging element has a square shape with a side length of a. 11, FIG. 12A to FIG. 12D, and FIG. 13 show a case where the letter “A” is captured by the image sensor for easy understanding.
  • imaging tact In order to capture images at a plurality of imaging positions, it is necessary to move the imaging device (or the flat display panel to be inspected) many times. , Which is referred to as “imaging tact”).
  • An object of the present invention is to detect a defect that can shorten an imaging tact when detecting a defect in a flat display panel such as a liquid crystal panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix.
  • the present invention provides an image sensor that images a flat display panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix along first and second arrangement directions orthogonal to each other, and the flat display panel.
  • a defect detection device that detects a defect in the flat display panel based on image data of the flat display panel imaged by the image pickup device.
  • An imaging condition acquisition unit for acquiring a predetermined defect size to be detected and an imaging resolution of the imaging element; Based on the defect size and the imaging resolution acquired by the imaging condition acquisition unit, the higher resolution magnification Vx (where Vx is a positive integer) in the first arrangement direction and the higher resolution in the second arrangement direction.
  • a high-resolution magnification calculator that individually calculates a magnification Vy (where Vy is a positive integer); Based on the high resolution magnifications Vx and Vy calculated by the high resolution magnification calculation unit, a plurality of imaging positions indicating a relative positional relationship between the flat display panel and the image sensor to be satisfied at the time of imaging are represented by Vxx.
  • An imaging position setting unit for setting only Vy points;
  • a device control unit that controls the moving device and the image sensor so that the flat display panel is imaged at each imaging position set by the imaging position setting unit;
  • a high-resolution image generation unit that generates a high-resolution image that is higher in resolution than each captured image based on each captured image captured at the plurality of imaging positions;
  • the defect detection apparatus includes a defect detection unit that detects a defect in the flat display panel based on the resolution-enhanced image generated by the resolution-enhanced image generation unit.
  • the defect size to be detected is a pixel size in the first and second arrangement directions of the flat display panel.
  • the high-resolution magnification calculation unit may be configured such that the pixel size in the first arrangement direction acquired by the imaging condition acquisition unit is Tx, the pixel size in the second arrangement direction is Ty,
  • the imaging resolution of the imaging device is R
  • the present invention provides an imaging device for imaging a flat display panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix along first and second arrangement directions orthogonal to each other, and the flat display panel Detection method for detecting a defect in the flat display panel based on image data of the flat display panel imaged by the image pickup device using a moving device that changes a relative positional relationship between the image pickup device and the image pickup device Because An imaging condition acquisition step for acquiring a predetermined defect size to be detected and an imaging resolution of the imaging device; Based on the defect size and the imaging resolution acquired in the imaging condition acquisition step, the resolution increasing magnification Vx (where Vx is a positive integer) in the first arrangement direction and the resolution in the second arrangement direction.
  • a high-resolution magnification calculation step for individually calculating the magnification Vy (where Vy is a positive integer); Based on the high resolution magnifications Vx and Vy calculated in the high resolution magnification calculation step, a plurality of imaging positions indicating the relative positional relationship between the flat display panel and the imaging device to be satisfied at the time of imaging are represented by Vxx.
  • An imaging position setting step for setting only Vy points;
  • An apparatus control step for controlling the moving device and the image sensor so that the flat display panel is imaged at each imaging position set by the imaging position setting step;
  • a high-resolution image generation step for generating a high-resolution image having a higher resolution than each captured image based on each captured image captured at the plurality of imaging positions;
  • a defect detection step of detecting a defect in the flat display panel based on the high-resolution image generated by the high-resolution image generation step.
  • the defect size to be detected is a pixel size in the first and second arrangement directions of the flat display panel.
  • the high-resolution magnification calculation step includes a pixel size in the first arrangement direction acquired by the imaging condition acquisition step as Tx, a pixel size in the second arrangement direction as Ty,
  • the imaging resolution of the imaging device is R
  • the present invention is also a computer-readable recording medium on which a defect detection program for causing a computer to execute the defect detection method is recorded.
  • a defect in a flat display panel such as a liquid crystal panel in which pixels of a plurality of colors constituting a picture element are arranged in a matrix is detected by pixel shifting, imaging is performed while ensuring necessary inspection accuracy. Tact can be shortened.
  • FIG. It is a figure which shows the imaging resolution r of the image pick-up element installed in an imaging device. It is a figure which shows each imaging position in the case of doubling the resolution of a captured image by pixel shifting.
  • the actuator 40 which is a moving device changes the relative positional relationship between the liquid crystal panel L placed on the inspection table 20 and the area sensor 30 by moving the area sensor 30.
  • the actuator 40 moves the area sensor 30 in the first direction u and the second direction v, which are pixel arrangement directions in the area sensor 30, and the third direction perpendicular to the first direction u and the second direction v. It is configured to be movable along w.
  • the actuator 40 moves the area sensor 30 to a predetermined position according to the imaging position control signal transmitted from the computer 50.
  • the computer 50 includes a defect due to an electrical disconnection or short circuit in the liquid crystal panel L placed on the inspection table 20, a minute defect due to foreign matter mixed into the liquid crystal, a minute defect due to partial alignment failure of the liquid crystal, A control device 51 that executes a defect detection process for detecting defects such as unevenness is provided.
  • the control device 51 executes defect detection processing by reading a defect detection program stored in a ROM (Read Only Memory) (not shown).
  • the control device 51 controls driving of the liquid crystal panel L by transmitting a pattern designation signal to the liquid crystal panel L placed on the inspection table 20. Further, the control device 51 controls the driving of the area sensor 30 by transmitting an imaging timing control signal to the area sensor 30.
  • control device 51 controls the operation of the actuator 40 by transmitting an imaging position control signal to the actuator 40.
  • the control device 51 is configured to detect a defect in the liquid crystal panel L by performing a predetermined process based on image data input from the area sensor 30.
  • the liquid crystal panel L is formed in a rectangular shape when viewed in the thickness direction, and includes a rectangular display area A 1 capable of displaying an image and a rectangular frame-shaped peripheral area A 2 surrounding the display area A 1. Have. In the display area A 1 , a plurality of picture elements P are arranged in a matrix along the long side direction X and the short side direction Y of the liquid crystal panel L.
  • Each picture element P forming the display area A 1 is composed of a plurality of colors of pixels, in the present embodiment, the three primary colors R ⁇ G ⁇ B pixels, i.e., red pixel S R, a green pixel S G and blue It is constituted by the pixel S B.
  • each row includes three primary color pixels S R , S G , S B is periodically and repeatedly arranged.
  • pixels of the same color are continuously arranged in each column.
  • the pixels S R , S G , and S B of the three primary colors are arranged in a matrix along the long side direction X and the short side direction Y in the display area A 1 .
  • a black matrix that is a light shielding region for preventing color mixture is provided between adjacent pixels.
  • the display pattern designating unit 61 outputs a pattern designating signal for displaying various display patterns preset for defect inspection on the liquid crystal panel L to be inspected placed on the inspection table 20. Thus, the drive of the liquid crystal panel L is controlled.
  • the orientation of liquid crystal molecules changes in response to the pattern designation signal.
  • a controlled amount transmitted through each pixel of the liquid crystal panel L of the light emitted by the backlight 10, in the display area A 1, the display pattern corresponding to the pattern designation signal is displayed.
  • the display pattern for defect detection differs depending on the type of defect to be detected. For example, non-lighting pattern on the whole surface black display by all the pixels included in the display area A 1 to the non-lighting state is used to detect a pixel to be displayed by the luminescent spot as a bright spot defect.
  • the total lighting pattern to all white display of all pixels is the lighting states included in the display area A 1 is used to detect a pixel to be displayed by black dots as black spot defect.
  • the halftone pattern that lowers the brightness compared to the full white display with the full lighting pattern and displays the full white display is used to detect weak defects that are difficult to detect with the full lighting pattern and uneven luminance on the entire display screen. It is done.
  • single-color lighting pattern to red pixels S R only is only to all lit green pixel S G only or blue pixel S B are entirely monochromatic display is used to determine a defective pixel for each color It is done.
  • the even column lighting pattern that turns on all the pixels in the column is used to detect a defect in which adjacent pixels electrically leak.
  • the apparatus control unit 62 includes an actuator control unit 63 and an imaging control unit 64 so that the liquid crystal panel L to be inspected is imaged at each imaging position set by an imaging position setting unit 76 described later.
  • the area sensor 30 and the actuator 40 are controlled.
  • the actuator controller 63 controls the imaging position for sequentially moving the area sensor 30 to each imaging position so that the liquid crystal panel L to be inspected is imaged at each imaging position set by an imaging position setting unit 76 described later. A signal is generated, and the imaging position control signal is transmitted to the actuator 40 at a predetermined timing. Accordingly, the area sensor 30 sequentially moves to each imaging position set by the imaging position setting unit 76 at a predetermined timing.
  • the imaging control unit 64 transmits an imaging timing control signal for starting an imaging operation to the area sensor 30 after the area sensor 30 is moved to a predetermined imaging position by the actuator 40. Further, the imaging control unit 64 transmits an imaging timing control signal for stopping the imaging operation to the area sensor 30 after a predetermined time has elapsed from the start of imaging.
  • the captured image acquisition unit 65 acquires image data of a captured image input from the area sensor 30, and stores the acquired image data in a captured image storage unit 68 described later.
  • the data storage unit 66 includes an imaging condition storage unit 67, a captured image storage unit 68, and a high resolution image storage unit 69.
  • the imaging condition storage unit 67 stores dimension information of defects to be detected.
  • the defect dimension information may be set based on the model information of the liquid crystal panel L to be inspected, or may be set by an operator via an input device (not shown).
  • the pixel region is obtained as dimension information in the long side direction X of the defect based on the model information of the liquid crystal panel L to be inspected.
  • the dimension Tx in the long side direction X of the pixel area is stored in advance in the data storage unit 66 as the dimension information in the short side direction Y of the defect.
  • a defect due to foreign matter mixing into the liquid crystal or a defect due to partial alignment failure of the liquid crystal causes luminance abnormality only in a part of the pixel area of one pixel. Therefore, when the defect to be detected is a defect due to foreign matters mixed into the liquid crystal or a defect due to partial alignment failure of the liquid crystal, as dimension information in the long side direction X of the defect, the dimension Tx of the pixel region is used.
  • the dimension Dx that is smaller than the dimension Ty of the pixel region is stored in advance in the data storage unit 66 as dimension information in the short side direction Y of the defect. In this case, the dimensions Dx and Dy are set to appropriate values by the operator.
  • the imaging condition storage unit 67 stores imaging resolution information of the area sensor 30 when imaging the liquid crystal panel L to be inspected. This imaging resolution information is automatically calculated and stored based on, for example, the number of pixels of the area sensor 30, the separation distance between the area sensor 30 and the liquid crystal panel L, the setting state of the optical system, and the like. In the present embodiment, it is assumed that the imaging resolution of the area sensor 30 is R.
  • the imaging range by one pixel of the area sensor 30 matches the size of one picture element P of the liquid crystal panel L, that is, the imaging resolution R of the area sensor 30 and the liquid crystal
  • the captured image storage unit 68 stores the image data acquired by the captured image acquisition unit 65.
  • the high-resolution image storage unit 69 stores the image data of the high-resolution image generated by the high-resolution image generation unit 71 described later.
  • the image processing unit 70 includes a high resolution image generation unit 71 and a defect detection unit 72.
  • the high-resolution image generation unit 71 reconstructs image data for each imaging position stored in the captured image storage unit 68 according to each imaging position, that is, by using a pixel shifting method. A high-resolution image having a higher resolution than the captured image is generated.
  • the high resolution image generation unit 71 stores the generated image data of the high resolution image in the high resolution image storage unit 69.
  • step s3 the high resolution magnification calculation unit 75 satisfies the relational expressions Vx ⁇ R / Tx and Vy ⁇ R / Ty based on the data Tx, Ty, R acquired in step s2.
  • step s8 it is determined whether a defect should be detected using another display pattern. If it is determined that another display pattern should be used, the process returns to step s1. For example, when the defect detection process is performed using the all lighting pattern as described above and the defect detection process using the non-lighting pattern is not performed, the process returns to step s1 to return to the non-lighting pattern. The defect detection process is performed using. If it is determined that it is not necessary to use another display pattern, the defect detection process is terminated.
  • the present invention is not limited to this, and a defect due to foreign matter mixing in the liquid crystal or a defect due to partial alignment failure of the liquid crystal. Even when a defect smaller than the pixel size is detected, by appropriately setting the dimension information of the defect to be detected, the imaging tact time can be shortened while ensuring the required inspection accuracy. .
  • FIG. 9 is a diagram showing the relationship between the pixel dimensions Tx and Ty of the liquid crystal panel L to be inspected and the imaging resolution R of the area sensor 30 in another embodiment of the present invention.
  • FIG. 9 only a part of the liquid crystal panel L is shown, and the imaging range by one pixel of the area sensor 30 is indicated by a circle instead of a rectangle for ease of viewing.
  • the imaging range by one pixel of the area sensor 30 is 2/3 times as large as one picture element P of the liquid crystal panel L, that is, the imaging resolution of the area sensor 30.
  • FIG. 10B is a diagram illustrating the resolutions Rxa and Rya in X and the short side direction Y.
  • FIG. 10A and 10B are diagrams showing a difference in resolution in a high-resolution image due to a difference in resolution-enhancing magnification
  • FIG. 10B is a diagram illustrating the resolutions Rxa and Rya in X and the short side direction Y.
  • FIG. 10B shows the resolutions Rxb and Ryb in the long side direction
  • one attention area Ga in each area indicating the resolution and the resolution are set.
  • the distance between the peripheral region Gb adjacent to the target region Ga in the long side direction X and the target region Ga Is a dimension 3Tx in the long side direction X of one picture element.
  • the control device 51 of the computer 50 includes a CPU that executes instructions of a defect detection program that realizes each function, a ROM that stores the program, a RAM (Random Access Memory) that expands the program, the program, and various data.
  • a storage device such as a memory for storing the.
  • An object of the present invention is to provide a computer 50 with a recording medium in which a program code (execution format program, intermediate code program, source program) of a defect detection program, which is software that realizes the functions described above, is recorded so as to be readable by a computer. It can also be achieved by supplying and executing the program code recorded on the recording medium by the computer 50.

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Abstract

La présente invention concerne un dispositif de détection de défauts. Le dispositif de détection de défauts (100) calcule individuellement un facteur de grossissement haute résolution Vx associé à une première direction de matrice (X) et un facteur de grossissement haute résolution Vy associé à une seconde direction de matrice (Y) sur la base des dimensions Tx, Ty des pixels dans les première et seconde directions de matrice (X, Y) du panneau à cristaux liquides (L) inspecté et de la résolution d'imagerie R du capteur de zone (30), puis définit, seulement aux emplacements Vx x Vy, une pluralité de positions d'imagerie indiquant la relation de position relative entre le panneau à cristaux liquides (L) et le capteur de zone (30) sur la base des facteurs de grossissement haute résolution calculés Vx, Vy. Une image haute résolution est ensuite générée par décalage de pixel sur la base des images prises à chaque position d'imagerie, et tout défaut dans le panneau à cristaux liquides (L) est détecté sur la base de l'image haute résolution.
PCT/JP2012/053191 2012-02-10 2012-02-10 Dispositif de détection de défauts, procédé de détection de défauts, support d'enregistrement lisible par ordinateur pour enregistrer un programme de détection de défauts WO2013118306A1 (fr)

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WO2016207703A1 (fr) * 2015-06-23 2016-12-29 Bosch Car Multimedia Portugal, S.A. Appareil et procédé pour détection de défauts fonctionnels de pixels ou de sous-pixels d'un dispositif d'affichage d'image
CN106353900A (zh) * 2016-08-30 2017-01-25 武汉精测电子技术股份有限公司 一种带有坐标获取功能的图像信号生成方法及装置
CN107664642A (zh) * 2017-11-01 2018-02-06 航天新长征大道科技有限公司 一种外观瑕疵快速检测装置
WO2018230164A1 (fr) * 2017-06-14 2018-12-20 コニカミノルタ株式会社 Dispositif de mesure de couleur bidimensionnelle, et procédé de mesure de couleur bidimensionnelle
CN112562507A (zh) * 2020-12-03 2021-03-26 Tcl华星光电技术有限公司 一种显示面板及其检测方法
CN117456168A (zh) * 2023-11-08 2024-01-26 珠海瑞杰电子科技有限公司 一种基于数据分析的pcba智能检测系统及方法

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JPH1093871A (ja) * 1996-06-28 1998-04-10 Matsushita Electric Ind Co Ltd 高解像度撮像方法及びその装置
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CN112562507B (zh) * 2020-12-03 2022-07-12 Tcl华星光电技术有限公司 一种显示面板及其检测方法
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