WO2013071491A1 - 空间立体式在线搬送系统 - Google Patents

空间立体式在线搬送系统 Download PDF

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Publication number
WO2013071491A1
WO2013071491A1 PCT/CN2011/082243 CN2011082243W WO2013071491A1 WO 2013071491 A1 WO2013071491 A1 WO 2013071491A1 CN 2011082243 W CN2011082243 W CN 2011082243W WO 2013071491 A1 WO2013071491 A1 WO 2013071491A1
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WIPO (PCT)
Prior art keywords
ceiling
substrate
mechanical gripper
central portion
cassette
Prior art date
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Ceased
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PCT/CN2011/082243
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English (en)
French (fr)
Inventor
王赟
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to US13/377,533 priority Critical patent/US20130123966A1/en
Publication of WO2013071491A1 publication Critical patent/WO2013071491A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3222—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

Definitions

  • the present invention relates to the field of liquid crystal display technologies, and in particular, to a spatial stereoscopic inline (Inline) transport system.
  • Inline inline
  • the inside of the inline device is generally carried out by means of a robot arranged on the ground to carry out the loading and loading of the glass substrate.
  • a primary object of the present invention is to provide a spatial three-dimensional in-line transport system that aims to reduce the footprint of a substrate transport system and improve transport efficiency.
  • the present invention provides a space stereoscopic online transport system, comprising: a ceiling with a guide rail, a plurality of cassettes disposed on the bottom surface of the ceiling for temporarily storing the substrate, located under the cassette, for use And a plurality of processing devices for processing the substrate, and an air transport device for transporting the substrate between the cassette and the processing device, the air transport device being slidably coupled to the rail.
  • the air transport device comprises a mechanical gripper, a telescopic mechanism and a controller for controlling the mechanical gripper and the telescopic mechanism;
  • the mechanical gripper has a central portion and is outwardly outward from the central portion a plurality of mechanical arms with hand grips; the mechanical gripper being rotatably coupled to the bottom end of the telescopic mechanism through the central portion, the top end of the telescopic mechanism being slidably coupled to the rail of the ceiling.
  • the guide rail is disposed in a mesh shape on a bottom surface of the ceiling.
  • the telescopic mechanism is a telescopic shaft, and the telescopic shaft is perpendicular to a bottom surface of the ceiling.
  • the mechanical gripper comprises four of the mechanical arms, the four mechanical arms are symmetrically distributed along the edge of the central portion, the processing device is four, and each of the processing devices corresponds to one The robotic arm.
  • the processing device has an opening for the gripper of the robotic arm to pick up the substrate.
  • the mechanical gripper has a rotation angle of ⁇ 180°.
  • the controller is a servo motor controller.
  • the system further comprises a fan filter unit, the fan filter unit being disposed on the ceiling and located on the side of the cassette.
  • the spatial three-dimensional online conveying system proposed by the invention adopts a three-dimensional conveying method to place a mechanical arm originally located on the ground at a high altitude, reduce the floor space of the conveying system, and centrally place the processing equipment of the substrate production line process.
  • the space utilization rate is greatly improved, and the robot arm is transported in the air, thereby avoiding obstacles between the devices and greatly improving the transport efficiency; in addition, the air transport device is close to the FFU, so that the substrate is more clean and can improve the product qualification rate.
  • FIG. 1 is a schematic perspective structural view of a preferred embodiment of a spatial stereoscopic online transport system of the present invention.
  • the solution of the embodiment of the invention is mainly: adopting a three-dimensional transport mode, the mechanical arm originally located on the ground is set at a high altitude, and the processing equipment of the production line process is centralized, thereby reducing the floor space of the transport system and improving the space utilization rate. Since the robot arm transports the substrate in the air, the obstacle between the devices is avoided, and the transport efficiency can be greatly improved.
  • FIG. 1 is a schematic perspective structural view of a preferred embodiment of a spatial three-dimensional online transport system according to the present invention.
  • the spatial three-dimensional online transport system of the present embodiment comprises: a ceiling 1 with a guide rail 2, a plurality of cassettes 3 disposed on the bottom surface of the ceiling 1 for temporarily storing the substrate, and a plurality of treatments for processing the substrate under the cassette 3
  • the device 4 and a telescopic air transport device 6 for transporting a substrate between the cassette 3 and the processing device 4.
  • the air transport device 6 is slidably coupled to the guide rail 2, and is movable along the corresponding guide rail 2 on the bottom surface of the ceiling.
  • the guide rail 2 is fixed or suspended on the bottom surface of the ceiling 1 and is disposed in a mesh shape on the bottom surface of the ceiling 1 .
  • the air transporting device 6 is movable forward and backward and left and right along the moving direction of the guide rail 2 in the direction indicated by the arrow at C in FIG.
  • the air transport device 6 includes a mechanical gripper 62, a telescopic mechanism 61, and a controller (not shown) that controls the mechanical gripper 62 and the telescopic mechanism 61.
  • the mechanical gripper 62 has a central portion 621 and a plurality of robot arms 622 extending outwardly from the central portion 621 with a gripper (not shown) through which the mechanical gripper 62 passes through the central portion 621 and the telescopic mechanism 61
  • the bottom end is rotatably connected, and the top end of the telescopic mechanism 61 is slidably coupled to the guide rail 2 on the ceiling 1.
  • the telescopic mechanism 61 is a telescopic shaft which is perpendicular to the bottom surface of the ceiling 1 and can be vertically expanded and contracted in the direction indicated by the arrow at Z in the figure.
  • the top end of the telescopic shaft is slidably coupled to the guide rail 2 on the bottom surface of the ceiling 1, whereby the telescopic shaft can be moved to the corresponding cassette 3 in the direction of the arrow C in the figure.
  • the mechanical gripper 62 can be rotated relative to the telescopic shaft in a horizontal plane under the control of the above-mentioned controller, and the rotation angle thereof can be set. It is ⁇ 180°, and its rotation direction is shown as A and B in Fig. 1.
  • the rotational connection of the bottom end of the telescopic shaft to the central portion 621 of the mechanical gripper 62 may be a bearing connection or other rotating structure.
  • the mechanical gripper 62 includes four robot arms 622 that are symmetrically distributed along the edges of the central portion 621 of the mechanical gripper 62.
  • the end of each robot arm 622 is provided with a human hand-like grip for picking up the substrate from the opening 41 of the processing device 4 corresponding to the grip.
  • the robot arm 622 After the gripper of the robot arm 622 is picked up to the substrate, the robot arm 622 is driven by the telescopic shaft to transport the substrate to the corresponding cassette 3 on the bottom surface of the ceiling 1 .
  • the processing device 4 may be provided in plurality, and the number of the cassettes 3 for buffering the substrate may also be multiple.
  • the processing device 4 and the cassette 3 can be classified according to different substrate processing processes, and one, two or more processing devices 4 can be used to process the substrate of the same process, and one, two or more cassettes 3 can be used.
  • the cached substrate is processed in the same process.
  • the processing device 4 finishes processing the substrate and needs to send the substrate to the buffer in the cassette 3, the substrate in the corresponding processing device 4 is transported to the corresponding cassette 3 for buffering by the air transfer device 6.
  • the four robot arms 622 can simultaneously pick up the substrates from the four corresponding processing devices 4, and then place the substrates in the corresponding cassettes 3 through the telescopic shafts.
  • processing device 4 can be placed on the ground or the machine, and the processing device 4 can be in one-to-one correspondence with the robot arm 622, or the position of the processing device 4 on the ground or the machine can be symmetrically distributed. It can also be placed at any angle.
  • the controller for controlling the mechanical gripper 62 and the telescopic mechanism 61 in this embodiment may be a servo motor controller.
  • a fan filter unit (FFU, Fan Filter) may be disposed on the side of the cassette 3 Units) (not shown), since the fan filter unit has the function of purifying air, when the air transport device 6 transports the substrate from the processing device 4 to the cassette 3, it will contribute to improving the cleanliness of the substrate during transport. Further, the pass rate of the substrate product can be improved.
  • FFU Fan Filter
  • the air transport device 6 can transfer the substrate in the processing device 4 to the corresponding cassette 3 for buffering according to the production line process, and can also transfer the substrate from the corresponding cassette 3 to the corresponding one.
  • the processing device 4 performs processing.
  • the air transport device 6 transports the substrate in the processing device 4 to the corresponding cassette 3 for buffering as follows:
  • the air transport device 6 controls the telescopic shaft by the controller, and the telescopic shaft is moved from the initial position (movable left and right and back and forth) to the preset by the guide rail 2 in the direction of the arrow C in FIG. Above the pick-up position, then moving down in the direction shown at Z in Figure 1, lowering the mechanical gripper 62 to the pick-up position, the robotic arm 622 being controlled by the controller to pick up the substrate from the respective processing device 4. .
  • the controller adjusts the expansion and contraction of the telescopic axis, and at the same time, the telescopic shaft moves along the predetermined guide rail 2 to the corresponding cassette 3 position, and then the robot arm 622 The picked-up substrate is placed in the cassette 3, thereby completing the transfer process of the substrate from the processing apparatus 4 to the cassette 3.
  • the robot arm 622 of four or more claws is used in the embodiment, four or more substrates can be taken or transported at one time, which greatly improves the transport efficiency of the air transport device 6.
  • the processing device 4 of the process is centralized, and the spatial three-dimensional transport mode is utilized to greatly improve the space utilization rate; and the obstacle between the devices is avoided, and the number of the guide rails 2 and the mechanical arms 622 can be distributed reasonably.
  • the transportation efficiency of the substrate is greatly improved; since the traveling shaft is eliminated, the processing equipment 4 can be placed in a centralized manner, the floor space is greatly shortened, and the factory space is compressed, which can greatly save the initial investment cost of the factory.
  • the substrate is transported in the air in the embodiment, the influence of the ground dust on the substrate is avoided, and the FFU is disposed on the side of the cassette 3, which can greatly improve the cleanliness of the substrate and further improve the product yield.

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

公开了一种空间立体式在线搬送系统，其包括：带有导轨（2）的天棚（1），设置在天棚（1）底面，用于暂存基板的若干卡匣（3），位于卡匣（3）下方，用于处理基板的若干处理设备（4），以及用于在卡匣（3）与处理设备（4）之间搬送基板的空中搬送装置。该空中搬送装置与导轨（2）滑动连接，导轨（2）在天棚（1）底面呈网状设置。该系统采用立体式搬送方式，将原本位于地面的机械手臂放置于高空，将基板处理设备集中放置，减少了搬送系统的占地面积，提高了空间利用率，同时，机械手臂在空中搬送，避免了设备间的障碍，提高了搬送效率；此外，空中搬送装置靠近风机过滤单元，使得基板洁净度更高，提高了产品合格率。

Description

空间立体式在线搬送系统
技术领域
本发明涉及液晶显示器技术领域，尤其涉及一种空间立体式在线（Inline）搬送系统。
背景技术
在液晶面板的制造过程中，在线Inline设备内部一般采用在地面配置机械手搬送的方式进行玻璃基板的搬送与装载工作。
随着液晶面板逐渐增大，对机械手的体积和速度提出了更高的要求。在设计组建在线Inline设备时，必须要考虑到机械手的占地面积、旋转半径、走形轴、冲程以及搬送能力等。比如一条普通G8.5 ODF（One Drop Filling，液晶滴入制程)）线，因其往往需要在地面配置8~12支机械手，使得其线程通常达到120m左右。由此，现有的在地面配置机械手搬送的方式占地，此外，现有的在地面配置的机械手搬送玻璃基板时，还会受到往返时间的影响，搬送效率不高。
发明内容
本发明的主要目的在于提供一种空间立体式在线搬送系统，旨在减少基板搬送系统的占地面积，提高搬送效率。
为了达到上述目的，本发明提出一种空间立体式在线搬送系统，包括：带有导轨的天棚，设置在所述天棚底面、用于暂存基板的若干卡匣，位于所述卡匣下方、用于处理基板的若干处理设备，以及用于在所述卡匣与所述处理设备之间搬送基板的空中搬送装置，所述空中搬送装置与所述导轨滑动连接。
优选地，所述空中搬送装置包括一机械抓取器、一伸缩机构以及控制所述机械抓取器和伸缩机构的控制器；所述机械抓取器具有中心部以及由所述中心部向外延伸的若干带有手爪的机械手臂；所述机械抓取器通过所述中心部与所述伸缩机构的底端可旋转连接，所述伸缩机构的顶端与所述天棚的导轨滑动连接。
优选地，所述导轨在所述天棚的底面呈网状设置。
优选地，所述伸缩机构为伸缩轴，所述伸缩轴与所述天棚底面垂直。
优选地，所述机械抓取器包括四个所述机械手臂，所述四个机械手臂沿所述中心部的边缘对称分布，所述处理设备为四个，每个所述处理设备对应一个所述机械手臂。
优选地，所述处理设备具有供所述机械手臂的手爪拾取基板的开口。
优选地，所述机械抓取器旋转角度为±180°。
优选地，所述控制器为伺服电机控制器。
优选地，该系统还包括风机过滤单元，所述风机过滤单元设置在所述天棚上，且位于所述卡匣旁侧。
本发明提出的一种空间立体式在线搬送系统，采用立体式搬送方式，将原本位于地面的机械手臂放置于高空，减少搬送系统的占地面积，将基板产线制程的处理设备集中放置，极大提高空间利用率，同时机械手臂在空中搬送，避免了设备间的阻碍，极大的提高搬送效率；此外，空中搬送装置靠近FFU，使得基板洁净度更高，可提高产品合格率。
附图说明
图1是本发明空间立体式在线搬送系统较佳实施例的透视结构示意图。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
以下将结合附图及实施例，对实现发明目的的技术方案作详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
本发明实施例解决方案主要是：采用立体式搬送方式，将原本位于地面的机械手臂设置于高空，将产线制程的处理设备集中放置，从而减少搬送系统的占地面积，提高空间利用率，由于机械手臂在空中搬送基板，避免了设备间的阻碍，可极大的提高搬送效率。
请参照图1所示，图1为本发明空间立体式在线搬送系统较佳实施例的透视结构示意图。
本实施例空间立体式在线搬送系统，包括：带有导轨2的天棚1，设置在天棚1底面、用于暂存基板的若干卡匣3，位于卡匣3下方、用于处理基板的若干处理设备4，以及用于在卡匣3与处理设备4之间搬送基板的可伸缩的空中搬送装置6。其中，该空中搬送装置6与导轨2滑动连接，可以在天棚1的底面上，沿着相应的导轨2移动。导轨2固定或悬挂在天棚1的底面，且在天棚1的底面呈网状设置。空中搬送装置6沿导轨2的移动方向如图1中C处箭头所示的方向，可前后移动和左右移动。
具体地，本实施例中，空中搬送装置6包括一机械抓取器62、一伸缩机构61以及控制机械抓取器62和伸缩机构61的控制器（图中未示出）。机械抓取器62具有中心部621以及由该中心部621向外延伸的若干带有手爪（图中未示出）的机械手臂622，机械抓取器62通过中心部621与伸缩机构61的底端可旋转连接，伸缩机构61的顶端与天棚1上的导轨2滑动连接。
本实施例中，伸缩机构61为伸缩轴，该伸缩轴与天棚1的底面垂直，可沿图中Z处箭头所示方向上下伸缩。伸缩轴的顶端与天棚1底面的导轨2滑动连接，由此，使得伸缩轴可以沿着图中C处箭头方向移动至相应的卡匣3。
由于伸缩轴的底端与机械抓取器62的中心部621可旋转连接，由此使得机械抓取器62在上述控制器的控制下，可在水平面上相对伸缩轴旋转，其旋转角度可以设置为±180°，其旋转方向如图1中A、B所示。
上述伸缩轴的底端与机械抓取器62的中心部621的旋转连接方式，可以采用轴承连接方式或其它旋转结构。
本实施例中，机械抓取器62包括四个机械手臂622，该四个机械手臂622沿机械抓取器62的中心部621的边缘对称分布。相应的处理设备4为四个，每个处理设备4对应一个机械手臂622，处理设备4上设有供机械手臂622的手爪拾取基板的开口41。每个机械手臂622的末端均设置有类似人手的手爪，用于从与该手爪对应的处理设备4的开口41中拾取基板。
当机械手臂622的手爪拾取到基板后，由伸缩轴带动机械手臂622，将基板搬送至天棚1底面相应的卡匣3内。
需要说明的是，根据制程需要，处理设备4可以设置多个，用于缓存基板的卡匣3也可以为多个。根据基板处理制程的不同，可以对处理设备4及卡匣3进行分类，一个、两个或多个处理设备4可以用于处理同一制程的基板，一个、两个或多个卡匣3可以用于缓存同一制程处理后的基板。
当处理设备4完成对基板的处理，需要将基板送至卡匣3中缓存时，相应的处理设备4中的基板则通过空中搬送装置6被搬送至相应的卡匣3中进行缓存。
本实施例中，四个机械手臂622可以同时从四个对应的处理设备4中拾取基板，然后将基板通过伸缩轴放置于对应的卡匣3中。
此外，上述处理设备4可以放置于地面或机台上，处理设备4与机械手臂622可以一一对应，也可以不一一对应，处理设备4在地面或机台上的放置方位可以对称分布，也可以按任意角度放置。
本实施例中用于控制机械抓取器62和伸缩机构61的控制器可以为伺服电机控制器。
此外，作为一种较佳实施方式，可以在卡匣3的旁侧设置风机过滤单元（FFU，Fan Filter Units）（图中未示出），由于风机过滤单元具有净化空气的功能，当空中搬送装置6将基板从处理设备4搬送至卡匣3时，将有利于提高基板在搬送过程中的洁净度，进一步可提高基板产品的合格率。
在搬送基板时，根据产线制程需要，空中搬送装置6可以实现将处理设备4中的基板搬送至相应的卡匣3中进行缓存，也可以实现从相应的卡匣3中拾取基板搬送至对应的处理设备4进行处理。
具体地，空中搬送装置6将处理设备4中的基板搬送至相应的卡匣3中进行缓存的搬送过程如下：
在从处理设备4中拾取基板时，空中搬送装置6由控制器控制伸缩轴，伸缩轴通过导轨2沿图1中C处箭头方向从初始位置移动（可以左右移动和前后移动）至预设的拾取位置上方，然后沿着图1中Z处所示的方向向下移动，将机械抓取器62下降至拾取位置，机械手臂622由控制器控制，即可从相应的处理设备4中拾取基板。
在将拾取的基板搬送至位于空间上层的卡匣3进行缓存时，由控制器控制伸缩轴向上收缩，同时，伸缩轴沿预定的导轨2移动至相应的卡匣3位置，然后机械手臂622将拾取的基板放置于该卡匣3中，从而完成基板从处理设备4至卡匣3的搬送过程。
基板从卡匣3至处理设备4的搬送过程与上述过程相反，在此不再赘述。
由于本实施例中采用四爪或更多爪的机械手臂622，可一次性取放或者搬送四块或更多块基板，极大的提升了空中搬送装置6的搬送效率。
同时，本实施例将制程的处理设备4集中化，利用空间立体式搬送方式，极大提高空间利用率；并避免了设备间的阻碍，通过合理分布导轨2及机械手臂622的数量，可以极大提高基板的搬送效率；由于取消了走形轴，处理设备4可以集中放置，大大缩短占地面积，压缩了工厂空间，可极大节省工厂初期投资成本。
此外，由于本实施例中基板在空中进行搬送，避免了地面扬尘对基板造成的影响，并且卡匣3的旁侧设置FFU，可极大提高基板的洁净度，进一步可提高产品合格率。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (17)

  1. 一种空间立体式在线搬送系统，其特征在于，包括：带有导轨的天棚，设置在所述天棚底面、用于暂存基板的若干卡匣，位于所述卡匣下方、用于处理基板的若干处理设备，以及用于在所述卡匣与所述处理设备之间搬送基板的空中搬送装置，所述空中搬送装置与所述导轨滑动连接；所述导轨在所述天棚的底面呈网状设置。
  2. 根据权利要求1所述的系统，其特征在于，所述空中搬送装置包括一机械抓取器、一伸缩机构以及控制所述机械抓取器和伸缩机构的控制器；所述机械抓取器具有中心部以及由所述中心部向外延伸的若干带有手爪的机械手臂；所述机械抓取器通过所述中心部与所述伸缩机构的底端可旋转连接，所述伸缩机构的顶端与所述天棚的导轨滑动连接。
  3. 根据权利要求2所述的系统，其特征在于， 所述伸缩机构为伸缩轴，所述伸缩轴与所述天棚底面垂直。
  4. 根据权利要求2所述的系统，其特征在于，所述机械抓取器包括四个所述机械手臂，所述四个机械手臂沿所述中心部的边缘对称分布，所述处理设备为四个，每个所述处理设备对应一个所述机械手臂。
  5. 根据权利要求4所述的系统，其特征在于，所述处理设备具有供所述机械手臂的手爪拾取基板的开口。
  6. 根据权利要求5所述的系统，其特征在于，所述机械抓取器旋转角度为±180°。
  7. 根据权利要求1所述的系统，其特征在于，所述控制器为伺服电机控制器。
  8. 根据权利要求1所述的系统，其特征在于，还包括风机过滤单元，所述风机过滤单元设置在所述天棚上，且位于所述卡匣旁侧。
  9. 一种空间立体式在线搬送系统，其特征在于，包括：带有导轨的天棚，设置在所述天棚底面、用于暂存基板的若干卡匣，位于所述卡匣下方、用于处理基板的若干处理设备，以及用于在所述卡匣与所述处理设备之间搬送基板的空中搬送装置，所述空中搬送装置与所述导轨滑动连接。
  10. 根据权利要求9所述的系统，其特征在于，所述空中搬送装置包括一机械抓取器、一伸缩机构以及控制所述机械抓取器和伸缩机构的控制器；所述机械抓取器具有中心部以及由所述中心部向外延伸的若干带有手爪的机械手臂；所述机械抓取器通过所述中心部与所述伸缩机构的底端可旋转连接，所述伸缩机构的顶端与所述天棚的导轨滑动连接。
  11. 根据权利要求10所述的系统，其特征在于，所述导轨在所述天棚的底面呈网状设置。
  12. 根据权利要求10所述的系统，其特征在于，所述伸缩机构为伸缩轴，所述伸缩轴与所述天棚底面垂直。
  13. 根据权利要求10所述的系统，其特征在于，所述机械抓取器包括四个所述机械手臂，所述四个机械手臂沿所述中心部的边缘对称分布，所述处理设备为四个，每个所述处理设备对应一个所述机械手臂。
  14. 根据权利要求12所述的系统，其特征在于，所述处理设备具有供所述机械手臂的手爪拾取基板的开口。
  15. 根据权利要求12所述的系统，其特征在于，所述机械抓取器旋转角度为±180°。
  16. 根据权利要求10所述的系统，其特征在于，所述控制器为伺服电机控制器。
  17. 根据权利要求10所述的系统，其特征在于，还包括风机过滤单元，所述风机过滤单元设置在所述天棚上，且位于所述卡匣旁侧。
PCT/CN2011/082243 2011-11-14 2011-11-15 空间立体式在线搬送系统 Ceased WO2013071491A1 (zh)

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CN1991473A (zh) * 2005-12-28 2007-07-04 中华映管股份有限公司 面板移载装置
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CN108328331A (zh) * 2018-01-19 2018-07-27 贵港市瑞成科技有限公司 一种前档玻璃修边机械手下片传输线的居中机构

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