WO2013065143A1 - 液晶アレイ検査装置および液晶アレイ検査装置の撮像画像取得方法 - Google Patents

液晶アレイ検査装置および液晶アレイ検査装置の撮像画像取得方法 Download PDF

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Publication number
WO2013065143A1
WO2013065143A1 PCT/JP2011/075288 JP2011075288W WO2013065143A1 WO 2013065143 A1 WO2013065143 A1 WO 2013065143A1 JP 2011075288 W JP2011075288 W JP 2011075288W WO 2013065143 A1 WO2013065143 A1 WO 2013065143A1
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Prior art keywords
correction
liquid crystal
imaging
movement
moving
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PCT/JP2011/075288
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English (en)
French (fr)
Japanese (ja)
Inventor
正道 永井
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株式会社島津製作所
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Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP2013541527A priority Critical patent/JP5692669B2/ja
Priority to CN201180073905.6A priority patent/CN103907017B/zh
Priority to PCT/JP2011/075288 priority patent/WO2013065143A1/ja
Publication of WO2013065143A1 publication Critical patent/WO2013065143A1/ja

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2330/00—Aspects of power supply; Aspects of display protection and defect management
    • G09G2330/10—Dealing with defective pixels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2360/00—Aspects of the architecture of display systems
    • G09G2360/14—Detecting light within display terminals, e.g. using a single or a plurality of photosensors
    • G09G2360/145—Detecting light within display terminals, e.g. using a single or a plurality of photosensors the light originating from the display screen
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals

Definitions

  • the present invention relates to a liquid crystal array inspection apparatus that inspects a liquid crystal array using a captured image obtained by capturing an image on a liquid crystal substrate, and more particularly to acquisition of a captured image.
  • a scanning image obtained by two-dimensionally scanning a charged particle beam such as an electron beam or an ion beam on a substrate can be used.
  • an inspection is performed as to whether or not the manufactured TFT array substrate is driven correctly.
  • the TFT array substrate is scanned using, for example, an electron beam as a charged particle beam, and the inspection is performed based on a captured image obtained by scanning.
  • an inspection signal is applied to an array of a liquid crystal substrate to be inspected, and a charged particle beam such as an electron beam or an ion beam is scanned two-dimensionally on the substrate, and a captured image obtained by beam scanning
  • a charged particle beam such as an electron beam or an ion beam
  • An array inspection apparatus that performs substrate inspection based on the above is known.
  • array inspection secondary electrons emitted by electron beam irradiation are detected by converting them into analog signals using a photomultiplier or the like, and array defects are determined based on the signal intensity of the detection signals.
  • the array inspection is performed on the basis of the signal intensity of the captured image at the detected pixel position by detecting the pixel position on the captured image obtained by scanning.
  • the pixel position is detected by performing image processing on the captured image to detect pixel coordinates, and arranging the detected pixel coordinates in accordance with the pixel arrangement set on the liquid crystal substrate.
  • the pixel position on the picked-up image may be displaced due to the movement error of the stage on which the liquid crystal substrate is placed.
  • a pixel position is detected based on a captured image that has been displaced in this way, a deviation occurs between the pixel position set with respect to the substrate and the detected pixel position, and a different pixel is associated with the set pixel position. Inconvenience may occur.
  • the displacement of the detected pixel position becomes a factor that decreases the accuracy of defect detection, and an erroneous determination that a defective pixel is determined to be normal or that a normal pixel is determined to be defective occurs.
  • the captured image of the liquid crystal substrate is performed by scanning the liquid crystal substrate with charged particles while moving the moving stage on which the liquid crystal substrate is placed.
  • an imaging range acquired by an imaging operation by a single scan is limited.
  • each captured image is required to have no positional deviation.
  • a mark is provided at a predetermined position on the moving stage, and this mark is recognized by an imaging means such as a camera fixed on the inspection apparatus side during the operation of the moving stage. It is conceivable to detect a positional deviation by comparing the mark position detected on the captured image with the reference position of the mark and correct the imaging operation based on the detected positional deviation.
  • the actual moving distance of the moving stage is calculated based on the positional deviation obtained from the recognition of the mark, and the moving speed and imaging range of the moving stage are corrected using the calculated actual moving interval. Can be considered.
  • 11 and 12 are diagrams for explaining misalignment correction by correcting the moving speed of the moving stage and the imaging range.
  • FIG. 11 shows an example when the moving stage is not displaced
  • FIG. 12 shows an example when the moving stage is displaced.
  • the movement interval of the stage position for performing each imaging operation is a constant Lo (FIG. 11C).
  • an imaging trigger is generated based on the constant movement interval Lo (FIG. 11D), and imaging is performed based on each imaging trigger.
  • the imaging trigger can be generated when the moving amount of the moving stage is monitored and the moving amount becomes the moving interval Lo.
  • the imaging range of each imaging is determined corresponding to the movement interval Lo of the moving stage (FIG. 11 (e)), and a captured image is acquired by imaging within this imaging range (FIG. 11 (f)).
  • the moving speed of the moving stage is corrected and the imaging range is corrected.
  • the imaging range By correcting the imaging range, the movement interval of the stage position where each imaging operation is performed is corrected to Lc (FIG. 12C).
  • an imaging trigger is generated based on the corrected correction movement interval Lc (FIG. 12D), and imaging is performed based on each imaging trigger.
  • the imaging trigger can be generated when the moving amount of the moving stage is monitored and the moving amount reaches the correction moving interval Lc.
  • the imaging range of each imaging is determined corresponding to the correction movement interval Lc of the moving stage (FIG. 12 (e)), and all the captured images are acquired by connecting the captured images obtained in each imaging range (FIG. 12). (F)).
  • the inventors of the present application may not be able to sufficiently correct the displacement of the moving stage by correcting the moving speed and imaging range of the moving stage. It has been found that there is a cumulative correction error caused by a deviation from the moving resolution of.
  • the position of the moving stage is corrected using the moving resolution as the minimum unit. Therefore, the correction amount can be accurately corrected if the positional deviation correction amount is an integral multiple of the movement resolution. However, if the positional deviation correction amount is not an integral multiple of the movement resolution, there is a correction error in each imaging range. As a result, the correction error of each imaging range is accumulated for the entire imaging range and an accumulated error occurs.
  • the accumulated error of the positional deviation caused by the moving resolution of the driving mechanism of the moving stage is a position error that is not corrected even if the moving speed of the moving stage and the imaging range are corrected.
  • FIG. 13 and 14 are diagrams for explaining the accumulated error.
  • FIG. 13 shows an example of a positive accumulated error
  • FIG. 14 shows an example of a negative accumulated error.
  • the displacement of the moving stage is determined by setting the mark position (FIGS. 13A and 14A) and the mark position detected by photographing with a fixed camera (FIG. 13B). , FIG. 14 (b)) is detected by the positional deviation ⁇ l. Based on this positional deviation ⁇ l, the moving speed of the moving stage is corrected and the imaging range is corrected. In the correction of the imaging range, the correction amount of the movement interval that can be corrected by the moving stage is an integer multiple N of the moving resolution s of the moving stage.
  • FIG. 13C shows a case where the corrected moving interval Lc + of the actual moving stage is longer than the corrected moving interval Lc obtained in the calculation
  • FIG. 14C shows the corrected moving interval of the actual moving stage.
  • Lc - is a movement distance after correction obtained by calculation shorter than Lc.
  • an imaging trigger is generated based on the corrected correction movement intervals Lc + and Lc ⁇ (FIGS. 13D and 14D), and imaging is performed based on each imaging trigger.
  • the imaging trigger can be generated when the moving amount of the moving stage is monitored and the moving amount becomes the correction moving interval Lc + , Lc ⁇ .
  • the imaging range of each imaging is determined corresponding to the correction movement intervals Lc + and Lc ⁇ of the moving stage (FIGS. 13 (e) and 14 (e)), and the captured images obtained in each imaging range are joined together. All captured images are acquired (FIGS. 13 (f) and 14 (f)).
  • All the captured images obtained by joining the captured images have an accumulated error in which the error dl generated in each captured image is accumulated.
  • the accumulated error is longer than the imaging range, and in the case shown in FIG. 14, the entire captured image is shorter than the target imaging range by the accumulated error.
  • FIG. 15 is a diagram for explaining the accumulated error.
  • FIG. 15A shows a case where there is no cumulative error of the moving mechanism of the moving stage
  • FIG. 15B shows a case where a positive cumulative error occurs
  • FIG. 15C shows a negative cumulative error. Shows the case.
  • the imaging range captured by each imaging trigger is Lo
  • the entire imaging range is M ⁇ Lo.
  • M represents the number of times of imaging for acquiring the entire imaging range.
  • the present invention solves the above-described conventional problems, eliminates the accumulated error of the imaging range that occurs based on the moving resolution of the moving stage, and improves the position accuracy of defect detection in the liquid crystal array inspection.
  • the present invention applies an inspection signal of a predetermined voltage to a liquid crystal substrate to drive the array, and images the liquid crystal substrate based on a secondary electron signal obtained by irradiating the liquid crystal substrate with charged particles such as an electron beam.
  • a liquid crystal array inspection apparatus that inspects an array of liquid crystal substrates based on a captured image obtained by the imaging, a movement variation of a moving unit that moves the liquid crystal substrate is detected, and a moving speed of the moving unit is detected based on the movement variation. And the movement interval at the time of each imaging are corrected, and the accumulated error generated by accumulating errors generated based on the movement resolution accompanying the correction of the movement interval is corrected.
  • the correction of the accumulated error is performed by correcting the movement interval by the moving resolution of the moving unit every predetermined number of times of imaging performed a plurality of times.
  • the movement interval is corrected by, for example, calculating the number of corrections by dividing the accumulated error occurring in the entire imaging range by the movement resolution, and correcting the movement interval by dividing the total number of imagings by the calculated number of corrections.
  • the interval can be determined.
  • the present invention can be an aspect of a liquid crystal array inspection apparatus and an aspect of a liquid crystal array inspection method.
  • the aspect of the liquid crystal array inspection apparatus of the present invention drives the array by applying an inspection signal of a predetermined voltage to the liquid crystal substrate, images the liquid crystal substrate based on a signal obtained by irradiating the liquid crystal substrate with a charged particle beam,
  • a liquid crystal array inspection apparatus that inspects an array of liquid crystal substrates based on a captured image obtained by the imaging includes a moving unit, an imaging unit, a captured image forming unit, a fluctuation detecting unit, and an imaging correction unit.
  • the charged particles can be electron beams, and secondary electrons obtained at this time are detected as detection signals.
  • the moving unit is a component that moves the liquid crystal substrate, and can be, for example, a moving stage on which the liquid crystal substrate is placed and moved.
  • the moving stage may be a stage mechanism that can move in the two-dimensional direction in the XY directions, or a stage mechanism that can move in the three-dimensional direction by adding movement in the Z direction to movement in the XY directions.
  • the imaging unit is a component that divides and images the liquid crystal substrate, and starts imaging whenever the liquid crystal substrate moves a distance corresponding to a predetermined movement interval as the liquid crystal substrate is moved by the moving unit. Every time imaging starts, the imaging unit performs imaging with the moving interval as an imaging range, and repeats the imaging operation with the moving interval as the imaging range in each imaging operation. A plurality of divided captured images are acquired by repeated imaging operations.
  • the captured image forming unit connects a plurality of divided captured images acquired by the imaging unit to form one combined captured image.
  • the fluctuation detector detects movement fluctuations of the moving part.
  • the movement fluctuation includes fluctuation caused by expansion of the movement mechanism of the moving unit.
  • the imaging correction unit corrects imaging conditions when the imaging unit acquires a captured image based on the fluctuation range and fluctuation direction of the movement fluctuation of the moving unit detected by the fluctuation detection unit.
  • the moving unit has a moving stage on which the liquid crystal substrate is mounted and moved, and the imaging correction unit uses the moving interval that defines the imaging range as an imaging condition, and the moving unit moves Correct based on fluctuations.
  • the imaging correction unit includes a movement interval correction unit that corrects the movement interval, and a cumulative error correction unit that corrects an accumulated error caused by accumulating correction errors of the movement interval by the movement interval correction unit.
  • the movement interval correction unit calculates the corrected movement interval based on the fluctuation range and fluctuation direction of the movement fluctuation detected by the fluctuation detection unit.
  • the cumulative error correction unit corrects the cumulative error by using the minimum resolution of the moving stage as a correction amount and increasing or decreasing the correction amount to the correction movement interval calculated by the movement interval correction unit.
  • the cumulative error correction unit increases or decreases the correction amount with respect to the correction movement interval for every predetermined number of times of imaging.
  • the amount of increase / decrease in the correction amount and the number of times of increase / decrease are calculated based on the fluctuation range and direction of movement fluctuation.
  • the fluctuation detection unit includes a photographing means fixed on the liquid crystal array inspection apparatus.
  • the photographing unit photographs a mark provided on the moving stage, and detects a movement variation of the moving unit based on a positional deviation of the mark image in the photographed image.
  • the imaging correction unit can include a speed correction unit that corrects the moving speed of the moving stage in addition to the movement interval correction unit and the cumulative error correction unit.
  • the speed correction unit calculates a correction speed based on the fluctuation range and fluctuation direction of the movement fluctuation detected by the fluctuation detection unit.
  • the liquid crystal array inspection apparatus of the present invention is characterized in that the imaging correction unit includes a cumulative error correction unit, and the correction amount is set to the correction movement interval calculated by the movement interval correction unit, with the minimum resolution of the moving stage as the correction amount.
  • an aspect of the liquid crystal array inspection method of the present invention is a secondary electron obtained by applying an inspection signal of a predetermined voltage to the liquid crystal substrate to drive the array and irradiating the liquid crystal substrate with charged particles such as an electron beam.
  • a picked-up image acquisition method of a liquid crystal array inspection apparatus that picks up an image of a liquid crystal substrate based on the signal of the liquid crystal and inspects an array of the liquid crystal substrate based on a picked-up image obtained by the picking, And a variation detection step and an imaging correction step.
  • the moving process moves the liquid crystal substrate.
  • the imaging process starts imaging every time the liquid crystal substrate moves by a predetermined movement interval in accordance with the movement of the liquid crystal substrate by the moving process. Each time imaging is started, the moving interval is imaged as an imaging range, and a one-division captured image is acquired. A plurality of divided captured images are acquired by repeating the imaging operation with the movement interval as the imaging range in each imaging operation.
  • a plurality of divided captured images acquired in the imaging process are connected to form one combined captured image.
  • the fluctuation detection process detects movement fluctuation of the liquid crystal substrate that moves in the movement process.
  • the imaging correction process corrects imaging conditions when the imaging process acquires a captured image based on the fluctuation range and fluctuation direction of the movement fluctuation of the liquid crystal substrate in the movement process detected in the fluctuation detection process.
  • the moving step moves the liquid crystal substrate placed on a moving stage, and the imaging correction step corrects the imaging operation using the moving interval that defines the imaging range as an imaging condition.
  • the imaging correction step includes a movement interval correction step that corrects the movement interval, and a cumulative error correction step that corrects a cumulative error caused by accumulating correction errors of the movement interval in the movement interval correction step.
  • the correction movement interval is calculated based on the fluctuation width and fluctuation direction of the movement fluctuation detected by the fluctuation detection step.
  • the cumulative error correction step the magnitude of the minimum resolution of the moving stage is used as a correction amount, and this correction amount is increased or decreased to the correction movement interval calculated in the movement interval correction step to correct the cumulative error.
  • the correction amount is increased or decreased with respect to the correction movement interval every predetermined number of times of imaging.
  • the amount of increase / decrease in the correction amount and the number of times of increase / decrease can be calculated based on the fluctuation range and fluctuation direction of the movement fluctuation.
  • a mark provided on the moving stage is photographed by photographing means fixed on the liquid crystal array inspection apparatus, and movement fluctuation in the movement process is detected based on the positional deviation of the mark image in the photographed image.
  • the imaging correction process can include a speed correction process for correcting the moving speed of the moving stage in addition to the movement interval correction process and the cumulative error correction process.
  • a correction speed is calculated based on the fluctuation range and fluctuation direction of the movement fluctuation detected by the fluctuation detection step to perform speed correction.
  • the present invention it is possible to eliminate the accumulated error of the imaging range that occurs based on the moving resolution of the moving stage and improve the position accuracy of the liquid crystal substrate defect detection.
  • FIG. 1 is a schematic block diagram for explaining a configuration example of a liquid crystal array inspection apparatus of the present invention. It is a flowchart for demonstrating the schematic process by the liquid crystal test
  • FIG. 1 is a schematic block diagram for explaining a configuration example of a liquid crystal array inspection apparatus of the present invention. Note that the example shown in FIG. 1 shows a configuration example in which an electron beam is irradiated on the liquid crystal substrate, secondary electrons emitted from the liquid crystal substrate are detected, and a captured image is acquired from the detected intensity.
  • a liquid crystal array inspection apparatus 1 includes a moving stage 2 on which a liquid crystal substrate 100 is placed and can be conveyed in the X and Y directions, and an electron gun 3A disposed above the moving stage 2 and away from the moving stage 2. And a detector 3B that detects secondary electrons emitted from pixels (not shown) of the panel 101 of the liquid crystal substrate 100.
  • the movement of the moving stage 2 is controlled by the stage drive control unit 4, and the electron gun 3A is controlled by the imaging control unit 3C to irradiate an electron beam and scan on the liquid crystal substrate 100.
  • the detection signal of the secondary electrons detected by the detector 3B is processed by the signal processing unit 10 and used for inspection such as pixel defect determination in the inspection unit 20.
  • the electron gun 3A, the detector 3B, and the imaging control unit 3C constitute the imaging unit 3, and acquire a captured image of the liquid crystal substrate.
  • the control unit 9 has a function of performing control including the entire operation of the liquid crystal array inspection apparatus 1, and can be configured by a CPU that performs these controls and a memory that stores a program that controls the CPU.
  • the moving stage 2 mounts the liquid crystal substrate 100 and is movable in the X-axis direction and the Y-axis direction by the stage drive control unit 4. Further, the electron beam emitted from the electron gun 3A can be swung in the X-axis direction or the Y-axis direction by the imaging control unit 3C.
  • the stage drive control unit 4 and the imaging control unit 3C independently or cooperatively scan the electron beam on the liquid crystal substrate 100 to obtain a captured image of the liquid crystal substrate 100.
  • the fixed camera 5 images a mark provided on the moving stage 2.
  • FIGS. 2 and 3 are a flowchart and an explanatory diagram for explaining a procedure for calculating a correction amount for correcting a displacement of the moving stage in acquiring a captured image in the liquid crystal array inspection of the present invention.
  • the displacement amount ⁇ L of the moving stage is obtained by the steps S1 to S4, and the moving speed of the moving stage is corrected based on the displacement ⁇ L obtained in the steps S1 to S4 by the step S5.
  • the correction speed is calculated, the correction movement interval for correcting the movement interval L of the movement stage that determines the imaging interval by the steps S6 and S7, and the frequency of the correction operation for correcting the accumulated error are calculated.
  • step S6 a corrected moving interval Lc for correcting the moving interval L of the moving stage that determines the imaging interval is calculated based on the positional deviation ⁇ L obtained in steps S1 to S4.
  • step S7 when the movement interval is corrected by the correction movement interval Lc calculated in the step S6, the frequency of the correction operation performed to correct the accumulated error caused by the moving resolution of the moving stage is calculated.
  • the moving stage generates an imaging trigger every time the moving stage moves the moving distance Lo while moving at the set stage speed vo, and performs an imaging operation in response to the imaging trigger to perform imaging corresponding to the moving distance Lo.
  • a captured image of the range is acquired.
  • FIG. 3A is a diagram showing an outline of the imaging operation.
  • the panel 101 on the substrate 100 is scanned and imaged while moving the moving stage 2, and the entire imaging range is obtained by a plurality of imaging operations. Are obtained by stitching together the captured images.
  • an imaging trigger is generated every time the moving stage moves by the moving distance Lo, and an imaging operation is performed.
  • a mark for detecting displacement is provided at a predetermined position of the moving stage, and based on this mark, fluctuations in moving speed of the moving stage and displacement of the moving stage are detected. To detect.
  • the moving stage After positioning the moving stage at a reference position such as the end position, the moving stage starts to move (S1). After starting to move the moving stage, the moving amount of the moving stage is monitored.
  • the moving amount of the moving stage can be monitored based on, for example, the output of an encoder provided in the moving stage or the rotation amount of a motor that drives the moving mechanism of the moving stage.
  • the set movement distance La can be set to a distance between the reference position and the mark, for example, and is set to a position where the mark can be imaged by the fixed camera.
  • a mark provided on the moving stage is photographed by a fixed camera fixed on the liquid crystal array inspection apparatus side (S3), and a difference between the mark position on the photographed image and a preset mark position is obtained.
  • FIG. 3A the mark 102 provided on the moving stage 2 is photographed by the fixed camera 5.
  • FIG. 3B shows an example of an image obtained by a fixed camera. In the image example, the mark position on the image is shifted from the predetermined mark position by a positional shift ⁇ l.
  • the mark position on the captured image is the same as the preset mark position.
  • the mark position on the captured image is shifted from a preset mark position, and the shift amount depends on the moving speed and the position shift amount.
  • the positional deviation amount ⁇ l between the mark position on the captured image and the preset mark position is a positional deviation amount with respect to the movement distance La from the reference position
  • the positional deviation amount ⁇ L with respect to the entire imaging range is calculated.
  • This positional deviation amount ⁇ L can be obtained, for example, by adding the ratio of (length of entire imaging range / movement distance La) to the positional deviation amount ⁇ l of the mark position.
  • the relationship between the positional deviation amount ⁇ l of the mark position and the positional deviation amount ⁇ L with respect to the entire imaging range is expressed by an arithmetic expression or a data table. It can be obtained in advance by calculating and reading out the ratio as a parameter (S4).
  • Lo is a predetermined moving distance of the moving stage
  • ⁇ l is the amount of displacement of the mark position
  • ⁇ t is a time required for the moving stage to move the predetermined moving distance Lo
  • vo is a set stage speed
  • ⁇ v is a speed. It is a fluctuation.
  • step S6 a corrected movement interval obtained by correcting the movement interval L is calculated.
  • the positional deviation amount ⁇ L calculated in the step S4 is a positional deviation amount with respect to the entire imaging range.
  • the positional deviation amount ⁇ L is divided by M times to calculate a correction amount ⁇ L / M for each imaging, and the movement interval of each imaging is calculated as a correction amount ⁇ L.
  • the correction movement interval Lc is calculated by correcting for / M.
  • M is the number of captured images.
  • ⁇ L / M represents a correction amount for correcting each imaging range.
  • FIG. 3C shows the relationship among the set movement interval Lo, the correction movement interval Lc, and the correction amount ⁇ L / M.
  • the correction movement interval Lc can be corrected by shifting the imaging trigger for starting the imaging operation by the correction amount ⁇ L / M (S6).
  • the moving stage has a moving resolution capable of accurately moving the correction amount ⁇ L / M
  • the moving interval can be corrected without excess or deficiency.
  • the moving stage is driven. Since the moving resolution of the drive mechanism is limited, if the correction amount ⁇ L / M is not an integral multiple of the moving resolution, a correction error occurs for each correction.
  • the cumulative error in the + direction and the cumulative error in the-direction have the same size with a half size of one imaging range as a boundary, so the maximum cumulative error is half the size of one imaging range.
  • the imaging range is set by a corrected moving interval Lcc obtained by correcting the corrected moving interval Lc calculated in step S6 by the moving resolution s of the stage every predetermined number of times in a plurality of imaging operations. Do that.
  • the movement interval that determines each imaging range by correcting the correction movement interval is a combination of the correction movement interval Lc calculated in S6 and the correction movement interval Lcc.
  • the frequency of changing to the corrected moving interval Lc and the corrected moving interval Lcc can be calculated from the magnitude of the accumulated error and the moving resolution.
  • the accumulated error is eliminated by changing the corrected movement interval Lc to the corrected movement interval Lcc every predetermined number of times.
  • FIG. 3D shows a state where the correction movement interval Lcc is introduced (S7).
  • FIG. 4 shows a case where a positive cumulative error is eliminated
  • FIG. 5 shows a case where a negative cumulative error is eliminated.
  • the entire imaging range is longer than the imaging range when there is no cumulative error. This increase is corrected by setting the correction movement interval Lc to the correction movement interval Lcc ( ⁇ Lc).
  • a correction movement interval Lcc ⁇ Lc) is introduced after a predetermined number of correction movement intervals Lc, and an imaging trigger is generated based on the correction movement intervals Lc and Lcc (FIG. 4D). Imaging is performed for the imaging range (FIG. 4E). As a result, the entire imaging range in which the accumulated error is eliminated is acquired (FIG. 4 (f)).
  • the entire imaging range is shorter than the imaging range when there is no cumulative error. This decrease is corrected by setting the correction movement interval Lc to the correction movement interval Lcc (> Lc).
  • FIG. 15D shows a case where the accumulated error is corrected.
  • the accumulated error in FIGS. 15B and 15C is corrected, and the imaging range based on the captured image is the same as that without the accumulated error shown in FIG. 15A. ing.
  • a correction movement interval Lcc (> Lc) is introduced after a predetermined number of correction movement intervals Lc, and an imaging trigger is generated based on the correction movement intervals Lc and Lcc (FIG. 5D). Then, imaging is performed for the imaging range (FIG. 5E). As a result, the entire imaging range in which the accumulated error is eliminated is acquired (FIG. 5 (f)).
  • a first correction example of the accumulated error will be described with reference to FIGS.
  • a correction error dL generated in one imaging is calculated.
  • ⁇ L is a positional deviation amount with respect to the entire imaging range, and as shown in the step of S4, the positional deviation amount ⁇ L is set to the positional deviation amount ⁇ l of the mark position (length of entire imaging range / movement distance La). It can obtain
  • M is the number of a plurality of captured images, and ⁇ L / M obtained by dividing the positional deviation amount ⁇ L by M represents a correction amount per imaging (FIG. 7A).
  • the cumulative error dLL is corrected by switching the correction movement interval Lc to the correction movement interval Lcc.
  • switching to the corrected movement interval Lcc is performed uniformly with respect to all the movement intervals, and the corrected movement interval Lc is switched to the corrected movement interval Lcc every predetermined number of times.
  • the correction of one correction movement interval Lcc is performed by increasing or decreasing the movement resolution s by the correction movement interval Lc. Accordingly, by switching one correction movement interval Lc to the correction movement interval Lcc, the accumulated error dLL is corrected by the movement resolution s.
  • a second correction example of the accumulated error will be described with reference to FIGS.
  • a correction error dL that occurs in one imaging is calculated.
  • ⁇ L is a positional deviation amount with respect to the entire imaging range, and as shown in the step of S4, the positional deviation amount ⁇ L is set to the positional deviation amount ⁇ l of the mark position (length of entire imaging range / movement distance La). It can obtain
  • M is the number of the plurality of captured images, and ⁇ L / M obtained by dividing the positional deviation amount ⁇ L by M represents the correction amount per image capture (FIG. 9A).
  • the accumulated error can be corrected by switching the correction movement interval Lc to the correction movement interval Lcc for every s / dL times of imaging (FIGS. 9C to 9E) and (S8C).
  • the signal processing unit 10 corrects the imaging condition when the imaging unit acquires a captured image based on the variation detection unit 10A that detects the movement variation of the moving stage and the movement variation of the moving stage detected by the variation detection unit 10A.
  • the imaging correction unit 10B and a captured image forming unit 10C that joins a plurality of divided captured images to form one combined captured image.
  • the fluctuation detection unit 10A is configured so that the fixed camera that captures the photographing signal of the fixed camera 5 and forms a photographed image uses the forming unit 10a and the shift amount of the mark provided on the moving stage based on the photographed image. And a stage mark deviation amount detection unit 10b that detects the variation.
  • the imaging correction unit 10B includes a speed correction unit 10c, a movement interval correction unit 10d, an accumulated error correction unit 10e, and a correction data storage unit 10f.
  • the imaging interval is set as an imaging condition with a moving stage speed and a movement interval forming an imaging trigger. These imaging conditions are corrected based on the amount of deviation formed by the variation detector 10A.
  • the speed correction unit 10c corrects the speed of the moving stage based on the deviation amount.
  • the stage drive control unit 4 performs speed control based on the correction speed of the speed correction unit 10c.
  • the movement interval correction unit 10d corrects the movement interval based on the shift amount, corrects the timing of the imaging trigger for performing imaging, and corrects the imaging range.
  • the imaging control unit 3C performs imaging control based on the corrected movement interval of the movement interval correction unit 10d.
  • the cumulative error is corrected by the cumulative error correction unit 10e.
  • the correction processing of the movement interval correction unit 10d and the cumulative error correction unit 10e can be performed using data stored in the correction data storage unit 10f.
  • the captured image forming unit 10C includes a detection signal acquisition unit 10g that receives a detection signal of the detection unit 3B and a captured image formation unit 10h that forms a captured image from the acquired detection signal.
  • the captured image forming unit 10h performs an imaging operation based on the imaging trigger formed by the imaging control unit 3C.
  • the calculation process of the present invention can be applied not only to a liquid crystal array inspection apparatus but also to a semiconductor element substrate inspection.
PCT/JP2011/075288 2011-11-02 2011-11-02 液晶アレイ検査装置および液晶アレイ検査装置の撮像画像取得方法 WO2013065143A1 (ja)

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CN201180073905.6A CN103907017B (zh) 2011-11-02 2011-11-02 液晶阵列检查装置以及液晶阵列检查装置的拍摄图像获取方法
PCT/JP2011/075288 WO2013065143A1 (ja) 2011-11-02 2011-11-02 液晶アレイ検査装置および液晶アレイ検査装置の撮像画像取得方法

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CN106679570A (zh) * 2017-02-23 2017-05-17 苏州坤镥光电科技有限公司 Oled平面显示行业大尺寸超精密全自动坐标量测设备

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