WO2013011612A1 - 電子顕微鏡 - Google Patents
電子顕微鏡 Download PDFInfo
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- WO2013011612A1 WO2013011612A1 PCT/JP2012/003177 JP2012003177W WO2013011612A1 WO 2013011612 A1 WO2013011612 A1 WO 2013011612A1 JP 2012003177 W JP2012003177 W JP 2012003177W WO 2013011612 A1 WO2013011612 A1 WO 2013011612A1
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- electron microscope
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- repeater
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
Definitions
- the present invention relates to an electron microscope, and more particularly to an electron microscope equipped with a system that can safely apply a high voltage to a sample.
- the electron microscope focuses the primary electron beam emitted from the electron gun onto the sample by a magnetic lens, detects secondary charged particles from the sample, and obtains an enlarged image of the sample.
- the scanning electron microscope has a function of scanning a primary electron beam on the sample by a magnetic field type or electric field type deflector installed above the objective lens.
- a sample is observed with a ground potential, but a sample image may be observed by applying a voltage to the sample.
- the retarding method has become common. This is a method of observing a sample image by applying a negative voltage (retarding voltage) of about several hundred to several kV to the sample and decelerating the primary electron beam immediately before the sample.
- the retarding method if the voltage (acceleration voltage) at which the primary electron beam is accelerated by the electron gun is Vacc and the voltage applied to the sample (retarding voltage) is Vr, the voltage at the time when the primary electron beam reaches the sample.
- the irradiation voltage Vi is the same 0.5 kV, but the former has a resolution (sample image is smaller). The degree of clearness) can be improved.
- observation by the retarding method has various effects such as suppression of sample charging and reduction of sample damage.
- Scanning electron microscopes can be classified into three types: out-lens type, semi-in-lens type, and in-lens type, depending on the arrangement relationship between the objective lens and the sample.
- out-lens type scanning electron microscope the sample is disposed at a position completely separated from the lens magnetic field of the objective lens.
- in-lens type the sample is disposed in the lens magnetic field of the objective lens.
- the semi-in lens type is an intermediate between the out-lens type and the in-lens type, and the sample is arranged at a position where a part of the lens magnetic field of the objective lens leaks.
- an in-lens scanning electron microscope that can utilize the lens power of the objective lens most efficiently is advantageous in that a high-resolution image can be acquired.
- an in-lens SEM scanning electron microscope
- the retarding method is an observation method in which a voltage of the same level (same order) as the acceleration voltage of the primary electron beam is applied to the sample, and the sample loaded at the tip of a dedicated sample holder is inserted between the magnetic poles of the objective lens.
- the retarding method has not been conventionally used in the in-lens SEM due to discharge and safety problems.
- Patent Document 1 discloses an invention in which a memory is mounted on a sample holder for the purpose of discriminating a plurality of samples mounted on the sample holder, and an external power source serving as a driving power source for the memory and the sample holder are connected by a cable. Has been.
- Patent Document 1 a cable connection sensor for determining whether or not a cable is connected to a connector for introducing a high voltage is provided. Thereby, when the cable connection sensor does not detect the cable connection state, or when the main body of the electron microscope cannot recognize the memory on the sample holder, voltage application to the sample holder is prohibited.
- the power source of the scanning electron microscope is usually stored in the gantry or provided as a power source unit different from the main body. Therefore, in the in-lens SEM employing the retarding method, a long high-voltage cable must be routed and connected from the inside of the gantry or another unit to the sample holder.
- Patent Document 1 the connection state between the sample holder (connector) and the cable before the start of voltage application is a problem, and the safety during operation of the apparatus is not particularly a problem.
- the retarding method is performed with the in-lens SEM, a much larger voltage than before is applied to the sample holder. Therefore, it is necessary to carefully examine the safety of the operator as compared with the conventional case. .
- the present invention provides a scanning electron microscope that is safer than the conventional one even when the apparatus is in operation when a retarding method is adopted for a scanning electron microscope that performs observation by inserting a sample holder into an electron optical column.
- An object of the present invention is to provide an electron microscope capable of performing the above operations.
- the present invention provides a sample holder having a function of applying a voltage to a sample stage on which a sample is loaded, a voltage source for supplying a voltage to be applied to the sample stage, A voltage cable connected to the sample holder, and a repeater to which the other end of the voltage cable is connected is installed in a frame or a cover that supports the lens barrel of the electron microscope.
- the length of the voltage cable is preferably shorter than the length of the sample holder. Therefore, if the repeater is arranged in a circle whose radius is smaller than the length of the sample holder from the end of the gantry or cover in a state where the sample holder is inserted into the electron optical column, the voltage cable The length can be shorter than the length of the sample holder.
- the repeater Since the repeater is installed in the gantry or cover, there is no need to route the high-voltage cable from the power supply, so the risk of accidentally pulling out the sample holder during operation of the device is reduced.
- the length of the voltage cable is set to be shorter than the length of the sample holder, it is possible to prevent the sample holder from being inserted into the electron optical column when the retarding voltage is applied.
- FIG. 1 is an overall external view of an electron microscope of Example 1.
- FIG. 3 is an explanatory view showing a sample holder and a sample stage of Example 1. It is a top view which shows arrangement
- FIG. It is explanatory drawing which showed the detailed example of the periphery of the repeater of Example 1.
- FIG. It is explanatory drawing which showed the other detailed example of the periphery of the repeater of Example 1.
- FIG. It is the perspective view which showed the wiring structure inside the repeater concerning the detailed example shown to FIG. 3B.
- 3 is an overall external view of an electron microscope according to Example 2.
- FIG. 6 is explanatory drawing shown about arrangement
- FIG. 6 is an overall external view of an electron microscope according to Example 3.
- FIG. 6 is a diagram illustrating a positional relationship between a sample holder and an objective lens in the electron microscope of Example 3.
- Example 1 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
- a configuration example of an electron microscope including a side entry type sample holder will be described.
- FIG. 1 is a schematic diagram of an embodiment of the present invention, which is an electron microscope capable of loading a sample on a sample stage at the tip of the sample holder and applying a voltage to the sample stage via the sample holder.
- An electron optical column 1 that irradiates a sample with a primary electron beam, detects secondary charged particles obtained by the primary electron beam irradiation, and outputs it as an image signal is supported on the upper surface of a gantry 2. Furthermore, a sample stage 3 for moving the sample position is mounted on the electron optical column 1, and a sample holder 4 for applying a high voltage on which the sample is mounted is inserted.
- a high voltage source 7 for supplying a voltage to be applied to the sample is arranged inside the gantry 2 so that it cannot be directly touched by the operator.
- the voltage generated from the high voltage source 7 is introduced to the repeater 6 installed on the gantry 2 via the voltage cable 8 extending from the high voltage source 7, and from there to the sample holder 4 via the voltage cable 5. Once introduced, a voltage is applied to the sample on the sample stage.
- the repeater 6 is provided with a connection terminal to the voltage cable 5 and is used by connecting the cable to the repeater 6 when observing retarding.
- FIG. 2A A state in which the sample holder 4 is inserted into the sample stage 3 is shown in FIG. 2A.
- the sample holder 4 is mounted on a side entry type sample stage 3 that is inserted from the side surface of the electron optical column 1 into the column through a vacuum feedthrough.
- the sample holder 4 includes a grip 11, an O-ring 12 for insertion into the high-vacuum electron optical barrel 1, a guide pin 14 for guiding the insertion direction of the sample holder 4, and a sample 13. And a shaft 16 for insulating the sample table 15 from the sample holder 4 and the electron optical column 1.
- the voltage cable 5 extends from the grip 11, and a BNC connector A (male side terminal) 17 for connecting to the repeater 6 is provided at the end thereof.
- the high voltage applied from the BNC connector A 17 is supplied to the sample stage 15 through the voltage cable 5 by the voltage introduction line 18 inside the holder including the grip, thereby retarding the primary electron beam 19. Acts as a voltage.
- the length L from the grip end surface of the sample holder 4 to the end surface of the sample table 15 and the length l of the voltage cable 5 have a relationship of L> l.
- the sample holder 4 when the length L of the main body of the sample holder and the length l of the voltage cable 5 satisfy the relationship of L> l, when the sample holder 4 is mounted on the sample stage 3, the sample holder is first attached. After mounting 4, it is necessary to connect the voltage cable 5 to the repeater 6. This is because the length of the voltage cable 5 is shorter than the length of the sample holder main body, and therefore the sample holder 4 cannot be attached to the sample stage 3 if the voltage cable 5 is connected to the repeater 6 first. .
- FIG. 2B shows a top view of the electron microscope with the sample holder 4 inserted. As shown in the figure, one end of the sample holder 4 reaches almost the center of the electron optical column 1, and the other end, that is, the connecting portion of the voltage cable 5 of the grip 11 is gripped from the electron optical column 1. It is arranged at a position protruding outward by the length of eleven.
- the repeater 6 (strictly, the position of the connection terminal with the cable) is arranged on the gantry so as to be included in a circle with a radius L centering on the projection point on the gantry at the protruding position , The relationship of L> l is satisfied.
- FIG. 3A is an explanatory diagram showing a detailed example around the repeater of the first embodiment.
- FIG. 3A shows a connection diagram between the internal wiring of the repeater 6 and the sample holder 4.
- a connector mounting detection switch 24 is provided in the repeater 6, while a power source 31 is provided in the high voltage source 7 disposed in the gantry 2.
- the power supply 31 is a power supply device for generating a high voltage.
- the high voltage source 7 is a high voltage supply device that generates a high voltage based on the supply from the power supply 31, and may be provided integrally with the power supply 31 or may be provided individually. .
- the conduction between the sample holder 4 and the high voltage source 7 is controlled by a high voltage control means 32 as a high voltage control unit.
- the connector mounting detection switch 24 as a connector detection unit operates in conjunction with the power source 31 of the high voltage source 7, and when the connector mounting detection switch 24 operates (no mounting is detected), the high voltage control means 32 causes a high voltage.
- the connection between the power source 31 of the source 7 and the BNC connector, that is, the sample holder 4 is cut off.
- the high-pressure control means 32 is also linked to the vacuum monitoring means 33 for monitoring the vacuum state of the sample stage 3, and the sample holder 4 is inserted into the sample stage 3, and the degree of vacuum has not reached the threshold value.
- the high voltage control means 32 is configured to block the conduction between the high voltage source 7 and the sample holder 4.
- the connector mounting detection switch 24 may be linked to the high voltage control means 32.
- FIG. 3B is an explanatory diagram illustrating another detailed example of the vicinity of the repeater according to the first embodiment.
- FIG. 4 is a perspective view showing a wiring structure inside the repeater according to the detailed example shown in FIG. 3B.
- FIG. 3B and FIG. 4 show the configuration of a repeater that further increases safety by providing a high-pressure guard. First, the appearance of this configuration example will be described.
- FIG. 4 shows a perspective view of a repeater equipped with a high-pressure guard.
- the BNC connector A 17 provided on the voltage cable 5 is connected to the BNC connector B (female side terminal) 22 of the repeater 6 through the hole of the high voltage guard 21.
- the tip of the knob 25 provided on the high-pressure guard 21 is a tip screw 26. By turning the knob 25, the tip screw 26 is fitted to the screw 27 on the relay 6 side, and the high-pressure guard 21 is connected to the relay 6. It can be fixed to.
- the switch plate 23 When the BNC connector A17 is inserted (connected) into the BNC connector B22, the switch plate 23 is pushed and the connector mounting detection switch 24 operates. Further, when the tip screw 26 is attached to the screw 27, the pin 28 provided on the high-voltage guard 21 is inserted into the hole above the screw 27, and the high-voltage guard attachment detection switch 29 serving as the second switch of the repeater 6. To work.
- FIG. 3B shows a connection diagram between the internal wiring of the repeater 6 and the sample holder 4.
- the high voltage guard wearing detection switch 29 is linked to the high voltage control means 32 for controlling the state of the high voltage source 7 and other high voltage using parts, and the high voltage guard wearing detection switch 29 operates (no wearing is detected).
- the high voltage control means 32 is configured to cut off the conduction between the high voltage source 7 and the BNC connector.
- the connector attachment detection switch 24 and the high-voltage guard attachment detection switch 29 detect attachment, and the sample holder 4 is further inserted into the sample stage 3, and the vacuum is pulled to a certain level. It is necessary for the vacuum monitoring means 33 to detect this. At this time, the power supply 31 of the high voltage source 7 and the high voltage control means 32 are operated so that a desired high voltage is output from the high voltage source 7 and reaches the BNC connector A17 via the voltage cable 8 from there. A high voltage can be introduced into 4.
- the high voltage can be cut off by removing the connector A17 even when a high voltage is applied to the sample holder 4, but in this case, the charge charged on the sample holder 4 is transferred to the operator's hand. There is a possibility of electric discharge (electric shock).
- the high voltage can be cut off by removing the high voltage guard 21 before removing the connector A17.
- the high voltage guard 21 is removed to cut off the high voltage, and then the charge of the sample holder 4 is removed by the time lag until the connector A17 is removed, thereby preventing electric shock.
- connection diagram of the repeater 6 shows an embodiment of the connection diagram of the repeater 6, but the connection destination of the connector attachment detection switch and the high voltage guard attachment detection switch may be the same part, and is not limited to this example. .
- the switch structure and components of the repeater 6 are shown.
- the switch is not limited to a mechanical switch, and may be formed using a magnetic sensor or an optical switch.
- Example 2 In FIG. 5, the external appearance whole view of the electron microscope of a present Example is shown.
- the electron microscope of the present embodiment is an electron microscope provided with a cover 41 surrounding the electron optical column 1 and the gantry 2 in addition to the functions equivalent to the functions of the electron microscope described in the first embodiment.
- the primary electron beam may be shaken by ambient noise or air flow due to air conditioning, and may appear as noise in the sample image.
- drift image flow
- drift image flow
- FIG. 5 since the change of noise, air conditioning, and temperature can be suppressed by providing the cover 41, these adverse effects can be eliminated. Therefore, when performing the retarding method, which often obtains a high-magnification image, it is preferable to install a cover.
- a second door 43 is provided on the cover 41.
- the repeater 6 is installed in the cover 41, and is preferably installed on the mount 2 in the vicinity of the first door 42, and the connector is attached by opening the first door 42.
- the voltage supply cable 5 extending from the sample holder 4 is connected to the BNC connector B22 of the repeater 6.
- the repeater 6 uses the attachment surface of the BNC connector B22 as the attachment surface of the first door 42 or the second door 43 (door) on the cover 41.
- the repeater 6 is arranged so that the mounting surface of the BNC connector B22 faces the second door 43, and is set near the first door 42. Connection and removal of the connector from the door 42 to the repeater 6 can be easily performed.
- the repeater 6 has a box shape, but the repeater 6 may be embedded in a wall surface provided in the cover 41 as in the example illustrated in FIG. 6.
- the direction of the BNC connector B22 in FIG. 6A is the same as the direction of the BNC connector B22 shown in FIG. 5, but the BNC connector B22 is placed on the upper surface of the repeater 6 as shown in FIG. May be suitable.
- Example 3 In this embodiment, a configuration example of the in-lens SEM will be described.
- FIG. 7 shows an overall external view of the electron microscope of this example.
- the in-lens scanning electron microscope of the present embodiment is an electron microscope provided with a cover 41 surrounding the electron optical column 1 and the gantry 2 in addition to the functions equivalent to the functions of the electron microscope described in the first embodiment. .
- the cover 41 is accessed from the front of the electron optical column 1 by a first door 42 for taking out the sample holder 4 from the sample stage 3, and a first door for performing maintenance such as mechanical electron optical axis adjustment.
- a second door 43 is provided.
- a third door 44 is provided so that the operation screen 45 can be easily confirmed when maintenance is performed on the second door 43.
- the operation screen 45 is mounted and used on a table indicated by a dotted line in FIG. 7, but the orientation of the screen can be appropriately changed as shown. Therefore, if the third door 44 is opened, the operator can view the operation screen when accessing the SEM main body via the second door 43 as indicated by an arrow in FIG.
- the repeater 6 is installed on the gantry 2 near the first door 42, and a connector is attached.
- FIG. 8 shows the positional relationship between the sample holder and the objective lens in a state where the sample holder of this embodiment is inserted into the electron optical column 1.
- An objective lens having a pole piece is provided in the electron optical column 1.
- the pole piece includes an upper magnetic pole 51 and a lower magnetic pole 52.
- a sample stage 3 is provided on the side surface of the electron optical column 1, and a sample holder 4 loaded with the sample 13 is mounted between the upper magnetic pole 51 and the lower magnetic pole 52 of the objective lens.
- the electron microscope described in the examples of FIGS. 5 to 7 can realize high-resolution observation with a low irradiation voltage by the retarding method safely and easily.
- stable high-magnification observation that is hardly affected by noise around the apparatus and air conditioning can be realized.
- Electron optical column 2 Mounting base 3 Side entry type sample stage (sample stage) 4 Sample holder 5 Voltage cable (voltage supply cable) 6 Repeater 7 High voltage source 8 Voltage cable 11 Grip 12 O-ring 13 Sample 14 Guide pin 15 Sample stage 16 Shaft 17 Connector A (BNC connector A) 18 Voltage introduction line 19 Primary electron beam 21 High voltage guard 22 BNC connector B 23 Switch plate 24 Connector mounting detection switch 25 Knob 26 Tip screw (knob tip screw) 27 Screw 28 Pin 29 High voltage guard wearing detection switch 31 Power supply 32 High voltage control means (high voltage control means) 33 Vacuum monitoring means 41 Cover 42 First door 43 Second door 44 Third door 45 Operation screen 51 Upper magnetic pole 52 Lower magnetic pole
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Abstract
Description
以下、図面を参照し、本発明の実施例について詳細に説明する。本実施例では、サイドエントリー式試料ホルダーを備えた電子顕微鏡の構成例について説明する。
図5には、本実施例の電子顕微鏡の外観全体図を示す。本実施例の電子顕微鏡は、実施例1で説明した電子顕微鏡の機能と同等の機能に加えて、電子光学鏡筒1および架台2を囲むカバー41が設けられた電子顕微鏡である。
本実施例では、インレンズSEMの構成例について説明する。
2 架台
3 サイドエントリー型試料ステージ(試料ステージ)
4 試料ホルダー
5 電圧ケーブル(電圧供給ケーブル)
6 中継器
7 高電圧源
8 電圧ケーブル
11 グリップ
12 Oリング
13 試料
14 ガイドピン
15 試料台
16 シャフト
17 コネクタA(BNCコネクタA)
18 電圧導入線
19 一次電子線
21 高圧ガード
22 BNCコネクタB
23 スイッチプレート
24 コネクタ装着検知スイッチ
25 つまみ
26 先端ねじ(つまみ先端ねじ)
27 ねじ
28 ピン
29 高圧ガード装着検知スイッチ
31 電源
32 高電圧制御手段(高圧制御手段)
33 真空監視手段
41 カバー
42 第一の扉
43 第二の扉
44 第三の扉
45 操作画面
51 上磁極
52 下磁極
Claims (14)
- 一次電子線を試料に照射し、当該一次電子線照射により得られる二次荷電粒子を検出して画像信号として出力する電子光学鏡筒と、当該電子光学鏡筒を支持する架台とを備えた電子顕微鏡において、
前記試料を載置する試料台を有し、当該試料台に電圧を印加する機能を備えた試料ホルダーと、
前記試料台に印加される電圧を供給する電圧源と、
一端が前記試料ホルダーに接続される電圧ケーブルとを備え、
更に、前記電圧ケーブルの他端が接続される中継器が前記架台上に設置されたことを特徴とする電子顕微鏡。 - 請求項1に記載の電子顕微鏡において、
前記電圧ケーブルの長さが前記試料ホルダーの長さよりも短いことを特徴とする電子顕微鏡。 - 請求項1に記載の電子顕微鏡において、
前記電圧ケーブルのもう一方の端部に前記中継器との接続端子を備えたことを特徴とする電子顕微鏡。 - 請求項1に記載の電子顕微鏡において、
前記中継器が、前記ケーブルの接続を検知する検知手段を備えたことを特徴とする電子顕微鏡。 - 請求項1に記載の電子顕微鏡において、
前記中継器が、前記試料台と前記電圧源との導通をオンオフするための第1のスイッチを備えたことを特徴とする電子顕微鏡。 - 請求項5に記載の電子顕微鏡において、
前記中継器が、前記電圧源の起動をオンオフする第2のスイッチを備えたことを特徴とする電子顕微鏡。 - 請求項5に記載の電子顕微鏡において、
前記中継器および前記電圧ケーブルの前記中継器側の端部に設けられたBNC端子を備えたことを特徴とする電子顕微鏡。 - 請求項7に記載の電子顕微鏡において、
前記第2のスイッチが前記中継器側のBNC端子の根元に設けられ、
前記第1のスイッチが前記中継器側のBNC端子の近傍に設けられ、
更に、前記中継器および前記電圧ケーブルのBNC端子を締め付けるリング状のキャップを備えることにより、前記第1のスイッチおよび第2のスイッチをオンできるよう構成したことを特徴とする電子顕微鏡。 - 請求項1に記載の電子顕微鏡において、
前記電子光学鏡筒および架台を覆う多面体形状のカバーと、
当該カバーの側面に設けられた扉とを備えたことを特徴とする電子顕微鏡。 - 請求項9に記載の電子顕微鏡において、
前記カバーの側面に、第1の扉および第2の扉が設けられていることを特徴とする電子顕微鏡。 - 請求項9に記載の電子顕微鏡において、
前記中継器に設けられる前記電圧ケーブルとの接続面が、前記扉に対する前記中継器の背面以外の面に設けられることを特徴とする電子顕微鏡。 - 一次電子線を試料に走査し、当該一次電子線走査により得られる二次荷電粒子を検出して画像信号として出力する電子光学鏡筒と、当該電子光学鏡筒を支持する架台とを備えた走査電子顕微鏡において、
前記試料を載置する試料台を有し、当該試料台に電圧を印加する機能を備えた試料ホルダーと、
前記試料台に印加される電圧を供給する電圧源と、
一端が前記試料ホルダーに接続される電圧ケーブルとを備え、
更に、前記電圧ケーブルの他端が接続される中継器が前記架台上に設置されたことを特徴とする走査電子顕微鏡。 - 請求項12に記載の走査電子顕微鏡において、
前記試料ホルダーが前記電子光学鏡筒の側面から真空フィードスルーを介して鏡筒内部に挿入されるサイドエントリー型ステージであることを特徴とする走査電子顕微鏡。 - 請求項12に記載の走査電子顕微鏡において、
前記電子光学鏡筒がインレンズ型の対物レンズを備えたことを特徴とする走査電子顕微鏡。
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DE112012003028.1T DE112012003028T5 (de) | 2011-07-19 | 2012-05-16 | Elektronenmikroskop |
US14/130,919 US8853647B2 (en) | 2011-07-19 | 2012-05-16 | Electron microscope |
CN201280035541.7A CN103688335B (zh) | 2011-07-19 | 2012-05-16 | 电子显微镜 |
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JP2011157407A JP5759815B2 (ja) | 2011-07-19 | 2011-07-19 | 電子顕微鏡 |
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US11289311B2 (en) | 2018-10-23 | 2022-03-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for reducing vacuum loss in an ion implantation system |
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CN101388317B (zh) * | 2008-03-21 | 2010-08-25 | 汉民微测科技(北京)有限公司 | 扫描电子显微镜 |
JP5492405B2 (ja) * | 2008-12-02 | 2014-05-14 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP5259688B2 (ja) * | 2010-12-09 | 2013-08-07 | 本田技研工業株式会社 | 走査型電子顕微鏡 |
JP2012138324A (ja) * | 2010-12-28 | 2012-07-19 | Topcon Corp | 二次電子検出器、及び荷電粒子ビーム装置 |
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JP2000106122A (ja) * | 1998-09-30 | 2000-04-11 | Jeol Ltd | 高電圧導入機構 |
JP2001028250A (ja) * | 1999-04-05 | 2001-01-30 | Jeol Ltd | 高電圧導入機構 |
JP2005327710A (ja) * | 2004-04-16 | 2005-11-24 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料ホルダ |
JP2006185661A (ja) * | 2004-12-27 | 2006-07-13 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
JP2008243485A (ja) * | 2007-03-26 | 2008-10-09 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
JP2011013196A (ja) * | 2009-07-06 | 2011-01-20 | Hitachi High-Technologies Corp | 走査型電子顕微鏡 |
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US8853647B2 (en) | 2014-10-07 |
DE112012003028T5 (de) | 2014-04-10 |
JP2013025911A (ja) | 2013-02-04 |
US20140151555A1 (en) | 2014-06-05 |
CN103688335B (zh) | 2015-11-25 |
CN103688335A (zh) | 2014-03-26 |
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