WO2013005872A1 - Appareil pour aligner, saisir et transporter des objets en forme de plaque plate - Google Patents

Appareil pour aligner, saisir et transporter des objets en forme de plaque plate Download PDF

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Publication number
WO2013005872A1
WO2013005872A1 PCT/KR2011/004876 KR2011004876W WO2013005872A1 WO 2013005872 A1 WO2013005872 A1 WO 2013005872A1 KR 2011004876 W KR2011004876 W KR 2011004876W WO 2013005872 A1 WO2013005872 A1 WO 2013005872A1
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WO
WIPO (PCT)
Prior art keywords
flat
fluid
nozzle
flat plate
pick
Prior art date
Application number
PCT/KR2011/004876
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English (en)
Korean (ko)
Inventor
김영태
Original Assignee
Kim Young-Tae
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Filing date
Publication date
Application filed by Kim Young-Tae filed Critical Kim Young-Tae
Priority to PCT/KR2011/004876 priority Critical patent/WO2013005872A1/fr
Publication of WO2013005872A1 publication Critical patent/WO2013005872A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention is a device for transferring various flat conveyances such as glass, steel plate, semiconductor wafer, etc., soft or soft, such as film or web, comprising a plurality of vacuum suction pads arranged in a plurality of vacuum suction pads
  • the present invention relates to a flat plate transfer pick-up and transfer device which can be safely transported while at the same time suction-gripping and centering and aligning flat plate transfers, and preventing adsorption and lifting of the plate transfers.
  • flat objects such as glass, steel sheets, semiconductor wafers, etc.
  • Adsorption is necessary in the process of cutting, the process of rounding the side of cut glass, and the process of patterning a circuit on a flat glass substrate in a post-production process.
  • flat glass for displays requires high surface smoothness and parallelism, and scratches generated on the glass surface cause a problem of bad pixels in some pixels of the finished display device, and thus, a non-contact suction gripping device is used to safely invert them.
  • Korean Patent Registration No. 10-0928674 relates to a non-contact suction gripping device for suction gripping a flat object in a non-contact manner, which forms a closed curved surface when contacted with one surface of a flat object.
  • a pressure portion an R portion extending from the pressure portion so as to be convexly rounded when viewed from the flat plate object, a side portion at least partially extending in a straight line shape in a vertical direction away from the flat plate object;
  • a housing part having a connection part connected to the side part to form an air injection hole for injecting air supplied from the outside, and discharging air supplied from the air injection hole in a direction perpendicular to the flat object, and having a predetermined distance from the housing part Has a nozzle tip formed to have a from the nozzle tip toward the air inlet
  • the non-contact suction gripping device having a slope that is formed to become narrower in width and includes a nozzle portion inserted into the empty space inside the housing portion has been published.
  • the conventional suction gripping device is not provided with a separate device for centering alignment of the flat object, so when suction gripping the flat object with the suction gripping device, the flat object is placed unaligned and moved to the next process.
  • the flat objects are adsorbed to each other, so that they do not easily fall.
  • the present invention as a technical problem for solving the above problems, the upper center fixing member which is installed horizontally so as to transfer a rigid or flexible flat conveying object;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • It is a technical object of the present invention to provide an apparatus for picking up and transporting a flat plate feeder, characterized in that it comprises a fluid spray nozzle for spraying.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed around the bottom of the vacuum adsorption pad in the form of upper and lower light to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying
  • the present invention provides an upper center fixing member horizontally installed to transfer a rigid or flexible flat plate conveying material;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is a technical solution to provide a flat feed material alignment pick-up transfer device, which is supported in the direction, so as to prevent the adsorption and lift-up between the flat plate feed.
  • the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member.
  • a guide section A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; It is a technical solution to provide a flat feed object alignment pick-up transfer device comprising a coanda nozzle formed by the fluid guide portion and the nozzle block.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
  • the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
  • the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that.
  • the fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up. It is a technical solution to provide a flatbed transport pick-up transport apparatus.
  • the fluid spray nozzle is a technical solution to provide a flat feed object pickup pickup device, characterized in that formed integrally with the guide member.
  • the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that the coming off is prevented.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • the guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad.
  • a straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
  • the guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off. It is a technical solution to provide a transport arrangement for picking up the workpiece.
  • the vacuum adsorption pad when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards
  • a housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head
  • the vacuum adsorption pad the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section
  • An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section
  • a housing comprising a connecting portion forming an injection hole;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head
  • the horizontal section of the non-contact vacuum adsorption pad provides a flat conveying material sorting pickup transfer device, characterized in that a flow path connected to the fluid injection device is formed along the periphery of the horizontal section to prevent collision with the flat conveying material It is a technical solution.
  • the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
  • the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
  • the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time It works.
  • FIG. 1 is a block diagram of a flat plate feed pick-up transfer device according to a first embodiment of the present invention
  • FIG 2 is a working view of a fluid according to the horizontal alignment of the present invention.
  • Figure 3 is an action of the fluid according to the vertical alignment of the present invention
  • Figure 4 is a block diagram of a flat plate feed pick-up transfer device according to a second embodiment of the present invention
  • FIG. 5 is a perspective view showing a round horizontal portion of the present invention
  • FIG 6 and 7 are flow channel diagrams according to the first and second embodiments of the present invention.
  • FIG. 8 is a block diagram of the flat plate feed pick-up transfer device according to a third embodiment of the present invention
  • Figure 9 is a block diagram showing the separation fluid nozzle in the side downward inclined direction of the present invention.
  • 10 and 11 is a block diagram of the flat feed object alignment pickup transfer device to which the coanda nozzle is applied according to the fourth embodiment of the present invention
  • FIG. 12 is a cross-sectional view of a non-contact vacuum adsorption pad according to an embodiment of the present invention.
  • FIG. 13 and 14 are flow channel diagrams according to the third and fourth embodiments of the present invention.
  • the present invention includes an upper center fixing member installed horizontally so as to transfer a rigid or flexible flat conveying material;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • It characterized in that it comprises a fluid spray nozzle for ejecting; flat feed object alignment pickup transfer device characterized in that it comprises a feature of the technical configuration.
  • the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is characterized by the technical configuration of the flat feed material alignment pick-up device, characterized in that it is supported in the direction, so that the adsorption and lift-up between the flat material is prevented.
  • the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member.
  • a guide section A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts;
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a horizontal portion is characterized by a technical configuration.
  • the lower surface of the upper center fixing member is characterized in that the flat feed material alignment pick-up transfer device, characterized in that the flow path is connected to the fluid injection device is formed in order to prevent collision with the flat material.
  • the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
  • the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
  • the ring-shaped groove characterized in that the technical feature of the flat plate feed pick-up transfer device, characterized in that a plurality of diaphragm partitioning each pinhole is provided.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying Characterized in that the technical configuration of the flat plate feed pick-up transfer device characterized in that.
  • the fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up.
  • the flatbed feed pick-up feeder is characterized by a technical configuration.
  • the fluid spray nozzle is characterized in that the technical features of the flat plate feed pickup pickup device, characterized in that formed integrally with the guide member.
  • the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and Flat pick-up sorting transfer device, characterized in that to prevent the coming off is a feature of the technical configuration.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • the guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad.
  • a straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a horizontal portion is characterized by a technical configuration.
  • the guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off.
  • Pickup sorting The transfer device is a feature of the technical configuration.
  • the vacuum adsorption pad when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards
  • a housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction;
  • the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device characterized in that the technical configuration.
  • the vacuum adsorption pad the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section
  • An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section
  • a housing comprising a connecting portion forming an injection hole;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction;
  • the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device
  • the horizontal section of the non-contact vacuum adsorption pad is configured to form a flat plate feed pick-up transport device, characterized in that the flow path connected to the fluid spraying device is formed along the periphery of the horizontal section to prevent collision with the flat material It is characterized by.
  • the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
  • the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
  • the ring-shaped groove is characterized in that the flat plate feed sorting pickup device, characterized in that a plurality of diaphragm for partitioning each pinhole is installed.
  • the flat plate transfer alignment pickup transfer apparatus As a first embodiment of the present invention, as shown in Figure 1, the flat plate transfer alignment pickup transfer apparatus according to the present invention, the upper center fixing member for transferring while maintaining the center by gripping the flat plate (40) ( 10) and a guide member 30 installed in the form of upper and lower beams widening downward along the lower circumference of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member. do.
  • the guide member 30 is supported in the center of the upper center fixing member 10 while the plate feed is centered in the direction of the center of the upper center fixing member, and the adsorption and lifting of the plate feed in the direction of the plate feed are prevented.
  • It comprises a fluid spray nozzle 32 for injecting the horizontal and lateral upward inclination fluid, the fluid spray nozzle 32 is formed in a horizontal plane and the top surface is inclined upward from the fluid spray nozzle The discharged fluid is simultaneously sprayed in the horizontal and upward directions so that the flat conveyance is centered and floated toward the center of the upper center fixing member, and the adsorption and lifting of the flat conveyance are prevented.
  • the centering of the plate feed is fixed to the upper center because the fluid resistance force is inversely proportional to the distance between the upper center fixing member or the vacuum suction pad and the plate feed in the behavior of the fluid flow in the guide member 30 as shown in FIG.
  • Near the edges (A) of the plate feed 40 away from the center of the member or the vacuum adsorption pad are subjected to the force P of the fluid in the horizontal and upward directions, and thus, toward the center of the upper center fixing member or the vacuum adsorption pad.
  • the horizontal component of the force P of the fluid is greater than the horizontal component of the force Q on the opposite side, which causes a force to go toward the center of the upper center fixing member or the vacuum suction pad.
  • the area A near the edge of the plate feed 40 away from the center of the upper center fixing member or the vacuum adsorption pad is subjected to the force P of the horizontal and upward directions. Therefore, the vertical component of the force P of the fluid toward the center of the upper center fixing member or the vacuum adsorption pad is larger than the vertical component of the force Q on the opposite side, thereby generating a force to maintain the horizontal force.
  • the force to go in the center direction of the upper center fixing member or the vacuum adsorption pad and the force to maintain the horizontal is applied at the same time to achieve the centering of the flat plate conveying.
  • the flat conveyance is centered by the horizontal and upward fluid force P only without the vacuum suction force of the vacuum adsorption pad, and is supported in the center direction of the upper center fixing member, and the suction between the flat conveyances And coming off is prevented to be able to transport the plate conveyance stably.
  • the upper center fixing member 10 is installed horizontally so as to transport a rigid or flexible flat conveying object;
  • the guide member 25 is installed around the lower side of the upper center fixing member in the form of upper and lower beams to guide the centering of the flat conveying material toward the center of the upper center fixing member, and the guide member 25 is a flat plate.
  • a straight line portion 261 formed in a vertical or right downward inclination direction with respect to the horizontal plane of the conveyance 40, and a round portion 262 formed so that the lower portion of the straight portion 261 is rounded toward the upper center fixing member 10.
  • a fluid guide part 26 formed of an inclined part 263 extending inclined upwardly from the round part 262 toward the upper center fixing member.
  • a nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
  • the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
  • the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
  • the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263.
  • At least one round horizontal portion 264 is formed in which the inclined portion is broken and the inclined portion is not formed at the end of the round portion 262.
  • the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
  • the upper center fixing member lower surface 111 is formed with a flow path 131 connected to the fluid spraying device to prevent collision with the plate feed.
  • the pocket structure has a ring-shaped groove 135 is formed around the lower surface of the upper center fixing member, the ring-shaped groove has a plurality of pin holes
  • a plurality of diaphragms 137 are formed in the ring-shaped grooves to partition each pinhole, thereby stably maintaining the gap between the upper center fixing member and the plate feed.
  • the flat plate transfer alignment pickup transfer device includes a vacuum suction pad 10 for suction gripping the flat plate 40, and It is installed in the form of a vertical narrow light that is widened downward toward the lower periphery of the vacuum adsorption pad is configured to include a guide member 30 to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad.
  • the guide member 30 has a fluid spray nozzle for injecting a horizontal fluid in the direction of the flat plate and the horizontal inclined upward direction to prevent the adsorption and lift-up between the flat conveying material is centered in the vacuum suction pad center direction, It comprises a (32), the fluid injection nozzle 32 is formed in the bottom surface is horizontal plane and the top surface is inclined upward so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time flat plate transfer The water is centered so as to prevent adsorption and uplift between the plate feeds.
  • the separation fluid 50 of the side downward inclination direction for separating the plate conveyance is further sprayed so that the flat plate conveyance is not adsorbed to come up
  • the side downward inclination fluid nozzle 51 is shown in FIG. It may be formed integrally with the lower end of the guide member, as may be formed separately from the guide member.
  • the flat plate feed sorting pick-up apparatus is provided with one or more horizontally arranged to adsorb and transfer a hard or flexible flat plate feed.
  • the guide member 25 is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad.
  • a nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
  • the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
  • the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
  • the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263.
  • the inclined portion is cut off at the point where the round portion 262 ends, so that the inclined portion is formed, and includes one or more round horizontal portions 264.
  • the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
  • the guide member as shown in Figure 9, the separation fluid nozzle in the side-down inclination direction to inject the separation fluid 50 in the side-down inclination direction to separate the plate-feed so that the flat plate is not adsorbed to come up It further comprises 51.
  • the vacuum adsorption pad may use both a contact vacuum adsorption pad and a non-contact vacuum adsorption pad, and since the contact vacuum adsorption pad is generally used as a known configuration, the description thereof will be omitted and will be described below. .
  • Non-contact vacuum adsorption pad is divided into acute inclination type and vertical type.
  • the vertical non-contact vacuum adsorption pad has a horizontal section consisting of a horizontal plane parallel to the planar transport object so as to form a closed curved surface when it comes into contact with one surface of the flat conveyance, and an inner diameter thereof is narrowed upward from the horizontal section while being connected to the horizontal section.
  • An acute inclined section formed of an acute inclined surface that forms an acute angle with a center line, an arc section formed of an arc surface formed between the horizontal section and an acute inclined section, and connected to the acute inclined section to inject fluid supplied from the outside
  • a housing comprising a connecting portion forming a fluid inlet;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head And a coanda nozzle made of a nozzle neck extending in the injection hole direction.
  • the non-contact vacuum adsorption pad 10 may be installed at least one to prevent the flat conveyance from being inclined to either side and collide with the non-contact vacuum adsorption pad 10 during suction gripping of the flat transport.
  • Non-contact vacuum adsorption pad 10 rather than one large force
  • a plurality of small forces are advantageous for the non-contact suction grip and collision prevention of the plate carrier. That is, when one or more non-contact vacuum adsorption pads 10 are installed, the attraction and repulsive force of each non-contact vacuum adsorption pad 10 evenly act on the entire surface of the flat conveyance, so that the suction grip of the non-contact vacuum adsorption pad 10 is flat. Since the conveyed material is not horizontally inclined in either direction, it is possible to prevent the non-contact vacuum adsorption pad 10 from colliding with the flat conveyance.
  • the non-contact vacuum pad 10 is a non-contact gripping to transport the flatbed to the Coanda jet. It consists of a housing 11 formed of a structure capable of obtaining a vacuum by the nozzle, and a nozzle 12 coupled to the inside of the housing 11.
  • the housing 11 has a horizontal section 111 consisting of a horizontal plane parallel to the flat conveyance 40 so as to form a closed curved surface when the housing 11 is in contact with one surface of the flat conveyance 40, and upwards from the horizontal section 111.
  • An acute inclined section 112 formed of an inclined surface extending to narrow the width of the inner diameter gradually, an arc section 115 consisting of an arc surface formed between the horizontal section 111 and the acute inclined section 112, and an acute inclination Is connected to the section 112 is composed of a connection portion 113 is provided with a fluid inlet 114 for injecting fluid supplied from the outside.
  • the acute inclination section 112 is an acute inclined surface that forms an acute angle when the center line is vertically drawn from the center of the housing 11 to a smaller angle than the right angle, and the fluid supplied to the fluid inlet 114 of the connection portion 113.
  • the acute inclination section 112 the arc section 115 and the horizontal section 111 flows along, the acute inclination section 112 and the angle formed by the housing 11 center line an acute angle of 90 ° or less Since it is formed to be inclined to the vertical structure and the horizontal section of the housing perpendicular to the housing structure forming a right angle can be shortened the moving distance of the fluid can minimize the loss of the fluid.
  • the radius of the circular arc section 115 formed between the acute inclination section 112 and the horizontal section 111 is also increased, so that the horizontal section 111 and the flat conveyance 40
  • the non-contact distance between the maximum possible distance it is possible to transport the flat plate 40 more stably without damaging the flat plate transfer object 40 and the horizontal section 111 and the acute inclination section 112 is perpendicular
  • the thickness of the housing 11 can be reduced.
  • the flow rate of the fluid flowing along the circular section 115 and the horizontal section 111 increases as the radius of the circular section 115 increases.
  • the force of the fluid flowing out due to the change in the momentum (momentum) is greater, it is possible to significantly improve the vacuum adsorption force of the flat plate 40.
  • the nozzle 12 is inserted into the interior space of the housing 11 so as to discharge the fluid supplied from the fluid inlet 114 in the vertical direction of the plate carrier 40, and is spaced apart from the acute inclination section 112.
  • a nozzle head 121 having a sharp tip nozzle tip 122 and a nozzle neck 123 extending from the upper center of the nozzle head 121 toward the fluid inlet 114 with a width smaller than that of the nozzle head 121. It consists of.
  • the horizontal section 111, the arc section 115, the acute inclination section 112, and the nozzle 12 is an important structure for obtaining the coanda effect, the position of the nozzle to maximize the coanda effect It is preferable to place the acute inclination section 112 before the arc section starts, and the connection portion 113 and the fluid inlet 114 are not related to the Coanda effect, and thus various modifications are possible.
  • the acute inclination section 112 of the non-contact vacuum adsorption pad is a vertical section formed vertically, all components may use the same vertical non-contact vacuum adsorption pad as the acute inclination type. Of course.
  • a non-contact vacuum adsorption pad is formed in a horizontal section 111 of the non-contact vacuum adsorption pad 10 by forming a flow path 131 connected to the fluid injection device 132 along an outer circumference thereof.
  • the interval between the horizontal section 111 and the plate transfer 40 is stably maintained. It is desirable to be able to.
  • the fluid injection device 132 may be any device capable of injecting fluid, and a relief valve may be provided to control the pressure in the pipe line 133 connecting the fluid injection device 132 and the flow path 131. It is preferable to provide a pressure control valve 134 such as a pressure reducing valve, a solenoid valve and a safety valve.
  • a plurality of flow paths 131 are formed along one circumference of the horizontal section 111 and have a structure in which fluid is discharged to the flat plate transporter 40 from the upper portion of the horizontal section 111 having a horizontal plane. do.
  • the flow path 131 may have a pinhole structure having a through hole shape as shown in FIG. 13, and a pocket structure as shown in FIG. 14.
  • the pocket structure forms a ring-shaped groove 135 along the periphery of one end of the horizontal section 111, and the ring-shaped groove communicates with the ring-shaped groove 135 on the upper surface of the corresponding horizontal section 111.
  • a plurality of through holes 136 having a size smaller than 135 are drilled along one end of the upper surface of the horizontal section 111. Therefore, the fluid supplied from the fluid injector 132 is discharged in the vertical direction of the plate carrier 40 through the through hole 136 and the ring-shaped groove 135 to the horizontal section 111 and the plate carrier 40 The distance between them can be kept stable.
  • the ring-shaped groove 135 is provided with a plurality of diaphragms 137 along the ring-shaped groove 135 to partition each through hole 136, thereby allowing the pressure to be adjusted by widening or narrowing the partition interval. That is, when the width of the diaphragm 137 is wide, the interval of partitioning the respective through holes 136 is narrowed, so that the pressure of the discharged fluid increases, and when the width of the diaphragm 137 is narrowed, each through hole 136 Since the partition interval for partitioning is widened, the pressure of the discharged fluid is reduced to adjust the repulsive force to push the flat plate 40.
  • the cause is the guide member. It occurs when the coefficient of friction between the plate and the plate conveyance is large or the inclination angle of the guide member is small.
  • vibration and vacuum adsorption of the vacuum adsorption pad 10 and / or the guide members 25 and 30 are performed.
  • the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time Because of the effects, there is industrial applicability in the process of transferring various flat conveyances, such as glass, steel sheets, wafers for semiconductors, or soft soft films or webs.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

La présente invention porte sur un appareil pour aligner, saisir et transférer des objets en forme de plaque plate tels que du verre, des plaques d'acier, des tranches pour semi-conducteurs, et analogues. Dans l'appareil pour transférer les objets en forme de plaque plate, une pluralité de tampons d'absorption à vide peuvent être disposés pour saisir par aspiration les objets en forme de plaque plate à l'aide des tampons d'absorptions à vide, et, simultanément, pour aligner de façon centrale les objets en forme de plaque plate. Egalement, les objets en forme de plaque plate peuvent être transférés de façon sûre tandis qu'ils sont empêchés d'être aspirés et soulevés ensemble les uns avec les autres. De façon plus détaillée, l'appareil pour aligner, saisir et transporter des objets en forme de plaque plate comprend : au moins un tampon d'absorption à vide disposé horizontalement de telle sorte que des objets en forme de plaque plate sont absorbés et transférés à travers celui-ci ; un élément de guidage disposé le long d'une périphérie inférieure des tampons d'absorption à vide sous une forme ayant une largeur qui augmente graduellement vers le bas de façon à induire le centrage des objets en forme de plaque plate dans une direction centrale du tampon d'absorption à vide ; et une buse d'injection de fluide disposée sur des surfaces latérales des objets en forme de plaque plate afin d'injecter un fluide dans une direction horizontale et dans une direction inclinée vers le haut par rapport aux surfaces latérales des objets en forme de plaque plate, de telle sorte que les objets en forme de plaque plate sont centrés, et de façon à empêcher les objets en forme de plaque plate d'être absorbés et soulevés ensemble les uns avec les autres.
PCT/KR2011/004876 2011-07-04 2011-07-04 Appareil pour aligner, saisir et transporter des objets en forme de plaque plate WO2013005872A1 (fr)

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Application Number Priority Date Filing Date Title
PCT/KR2011/004876 WO2013005872A1 (fr) 2011-07-04 2011-07-04 Appareil pour aligner, saisir et transporter des objets en forme de plaque plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2011/004876 WO2013005872A1 (fr) 2011-07-04 2011-07-04 Appareil pour aligner, saisir et transporter des objets en forme de plaque plate

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084944A (zh) * 2014-06-26 2014-10-08 孙硕添 一种注塑叶片拾取机械手装置

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KR200401259Y1 (ko) * 2005-08-12 2005-11-15 주식회사 엠앤엘 비접촉식 물류이송 유니트의 그립퍼
KR20070003260A (ko) * 2005-07-01 2007-01-05 오성엘에스티(주) 기판 정렬장치
JP4175988B2 (ja) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 基板アライメント装置及び基板処理装置及び基板搬送装置
KR100876558B1 (ko) * 2007-10-31 2008-12-31 주식회사 홍성엠아이티 평판 이송장치의 비접촉식 이송방향 전환 장치
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임

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Publication number Priority date Publication date Assignee Title
JP4175988B2 (ja) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 基板アライメント装置及び基板処理装置及び基板搬送装置
KR20070003260A (ko) * 2005-07-01 2007-01-05 오성엘에스티(주) 기판 정렬장치
KR200401259Y1 (ko) * 2005-08-12 2005-11-15 주식회사 엠앤엘 비접촉식 물류이송 유니트의 그립퍼
KR100876558B1 (ko) * 2007-10-31 2008-12-31 주식회사 홍성엠아이티 평판 이송장치의 비접촉식 이송방향 전환 장치
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084944A (zh) * 2014-06-26 2014-10-08 孙硕添 一种注塑叶片拾取机械手装置

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