WO2013005872A1 - Apparatus for aligning, picking up, and transporting flat plate-like objects - Google Patents

Apparatus for aligning, picking up, and transporting flat plate-like objects Download PDF

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Publication number
WO2013005872A1
WO2013005872A1 PCT/KR2011/004876 KR2011004876W WO2013005872A1 WO 2013005872 A1 WO2013005872 A1 WO 2013005872A1 KR 2011004876 W KR2011004876 W KR 2011004876W WO 2013005872 A1 WO2013005872 A1 WO 2013005872A1
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WO
WIPO (PCT)
Prior art keywords
flat
fluid
nozzle
flat plate
pick
Prior art date
Application number
PCT/KR2011/004876
Other languages
French (fr)
Korean (ko)
Inventor
김영태
Original Assignee
Kim Young-Tae
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kim Young-Tae filed Critical Kim Young-Tae
Priority to PCT/KR2011/004876 priority Critical patent/WO2013005872A1/en
Publication of WO2013005872A1 publication Critical patent/WO2013005872A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention is a device for transferring various flat conveyances such as glass, steel plate, semiconductor wafer, etc., soft or soft, such as film or web, comprising a plurality of vacuum suction pads arranged in a plurality of vacuum suction pads
  • the present invention relates to a flat plate transfer pick-up and transfer device which can be safely transported while at the same time suction-gripping and centering and aligning flat plate transfers, and preventing adsorption and lifting of the plate transfers.
  • flat objects such as glass, steel sheets, semiconductor wafers, etc.
  • Adsorption is necessary in the process of cutting, the process of rounding the side of cut glass, and the process of patterning a circuit on a flat glass substrate in a post-production process.
  • flat glass for displays requires high surface smoothness and parallelism, and scratches generated on the glass surface cause a problem of bad pixels in some pixels of the finished display device, and thus, a non-contact suction gripping device is used to safely invert them.
  • Korean Patent Registration No. 10-0928674 relates to a non-contact suction gripping device for suction gripping a flat object in a non-contact manner, which forms a closed curved surface when contacted with one surface of a flat object.
  • a pressure portion an R portion extending from the pressure portion so as to be convexly rounded when viewed from the flat plate object, a side portion at least partially extending in a straight line shape in a vertical direction away from the flat plate object;
  • a housing part having a connection part connected to the side part to form an air injection hole for injecting air supplied from the outside, and discharging air supplied from the air injection hole in a direction perpendicular to the flat object, and having a predetermined distance from the housing part Has a nozzle tip formed to have a from the nozzle tip toward the air inlet
  • the non-contact suction gripping device having a slope that is formed to become narrower in width and includes a nozzle portion inserted into the empty space inside the housing portion has been published.
  • the conventional suction gripping device is not provided with a separate device for centering alignment of the flat object, so when suction gripping the flat object with the suction gripping device, the flat object is placed unaligned and moved to the next process.
  • the flat objects are adsorbed to each other, so that they do not easily fall.
  • the present invention as a technical problem for solving the above problems, the upper center fixing member which is installed horizontally so as to transfer a rigid or flexible flat conveying object;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • It is a technical object of the present invention to provide an apparatus for picking up and transporting a flat plate feeder, characterized in that it comprises a fluid spray nozzle for spraying.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed around the bottom of the vacuum adsorption pad in the form of upper and lower light to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying
  • the present invention provides an upper center fixing member horizontally installed to transfer a rigid or flexible flat plate conveying material;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is a technical solution to provide a flat feed material alignment pick-up transfer device, which is supported in the direction, so as to prevent the adsorption and lift-up between the flat plate feed.
  • the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member.
  • a guide section A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; It is a technical solution to provide a flat feed object alignment pick-up transfer device comprising a coanda nozzle formed by the fluid guide portion and the nozzle block.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
  • the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
  • the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that.
  • the fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up. It is a technical solution to provide a flatbed transport pick-up transport apparatus.
  • the fluid spray nozzle is a technical solution to provide a flat feed object pickup pickup device, characterized in that formed integrally with the guide member.
  • the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that the coming off is prevented.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • the guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad.
  • a straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
  • the guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off. It is a technical solution to provide a transport arrangement for picking up the workpiece.
  • the vacuum adsorption pad when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards
  • a housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head
  • the vacuum adsorption pad the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section
  • An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section
  • a housing comprising a connecting portion forming an injection hole;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head
  • the horizontal section of the non-contact vacuum adsorption pad provides a flat conveying material sorting pickup transfer device, characterized in that a flow path connected to the fluid injection device is formed along the periphery of the horizontal section to prevent collision with the flat conveying material It is a technical solution.
  • the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
  • the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
  • the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time It works.
  • FIG. 1 is a block diagram of a flat plate feed pick-up transfer device according to a first embodiment of the present invention
  • FIG 2 is a working view of a fluid according to the horizontal alignment of the present invention.
  • Figure 3 is an action of the fluid according to the vertical alignment of the present invention
  • Figure 4 is a block diagram of a flat plate feed pick-up transfer device according to a second embodiment of the present invention
  • FIG. 5 is a perspective view showing a round horizontal portion of the present invention
  • FIG 6 and 7 are flow channel diagrams according to the first and second embodiments of the present invention.
  • FIG. 8 is a block diagram of the flat plate feed pick-up transfer device according to a third embodiment of the present invention
  • Figure 9 is a block diagram showing the separation fluid nozzle in the side downward inclined direction of the present invention.
  • 10 and 11 is a block diagram of the flat feed object alignment pickup transfer device to which the coanda nozzle is applied according to the fourth embodiment of the present invention
  • FIG. 12 is a cross-sectional view of a non-contact vacuum adsorption pad according to an embodiment of the present invention.
  • FIG. 13 and 14 are flow channel diagrams according to the third and fourth embodiments of the present invention.
  • the present invention includes an upper center fixing member installed horizontally so as to transfer a rigid or flexible flat conveying material;
  • a guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances.
  • It characterized in that it comprises a fluid spray nozzle for ejecting; flat feed object alignment pickup transfer device characterized in that it comprises a feature of the technical configuration.
  • the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is characterized by the technical configuration of the flat feed material alignment pick-up device, characterized in that it is supported in the direction, so that the adsorption and lift-up between the flat material is prevented.
  • the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member.
  • a guide section A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts;
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a horizontal portion is characterized by a technical configuration.
  • the lower surface of the upper center fixing member is characterized in that the flat feed material alignment pick-up transfer device, characterized in that the flow path is connected to the fluid injection device is formed in order to prevent collision with the flat material.
  • the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
  • the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
  • the ring-shaped groove characterized in that the technical feature of the flat plate feed pick-up transfer device, characterized in that a plurality of diaphragm partitioning each pinhole is provided.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • a guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying Characterized in that the technical configuration of the flat plate feed pick-up transfer device characterized in that.
  • the fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up.
  • the flatbed feed pick-up feeder is characterized by a technical configuration.
  • the fluid spray nozzle is characterized in that the technical features of the flat plate feed pickup pickup device, characterized in that formed integrally with the guide member.
  • the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and Flat pick-up sorting transfer device, characterized in that to prevent the coming off is a feature of the technical configuration.
  • one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance;
  • the guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad.
  • a straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
  • the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance.
  • the flat feeder alignment pick-up transfer device characterized in that it comprises a horizontal portion is characterized by a technical configuration.
  • the guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off.
  • Pickup sorting The transfer device is a feature of the technical configuration.
  • the vacuum adsorption pad when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards
  • a housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction;
  • the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device characterized in that the technical configuration.
  • the vacuum adsorption pad the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section
  • An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section
  • a housing comprising a connecting portion forming an injection hole;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction;
  • the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device
  • the horizontal section of the non-contact vacuum adsorption pad is configured to form a flat plate feed pick-up transport device, characterized in that the flow path connected to the fluid spraying device is formed along the periphery of the horizontal section to prevent collision with the flat material It is characterized by.
  • the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
  • the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
  • the ring-shaped groove is characterized in that the flat plate feed sorting pickup device, characterized in that a plurality of diaphragm for partitioning each pinhole is installed.
  • the flat plate transfer alignment pickup transfer apparatus As a first embodiment of the present invention, as shown in Figure 1, the flat plate transfer alignment pickup transfer apparatus according to the present invention, the upper center fixing member for transferring while maintaining the center by gripping the flat plate (40) ( 10) and a guide member 30 installed in the form of upper and lower beams widening downward along the lower circumference of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member. do.
  • the guide member 30 is supported in the center of the upper center fixing member 10 while the plate feed is centered in the direction of the center of the upper center fixing member, and the adsorption and lifting of the plate feed in the direction of the plate feed are prevented.
  • It comprises a fluid spray nozzle 32 for injecting the horizontal and lateral upward inclination fluid, the fluid spray nozzle 32 is formed in a horizontal plane and the top surface is inclined upward from the fluid spray nozzle The discharged fluid is simultaneously sprayed in the horizontal and upward directions so that the flat conveyance is centered and floated toward the center of the upper center fixing member, and the adsorption and lifting of the flat conveyance are prevented.
  • the centering of the plate feed is fixed to the upper center because the fluid resistance force is inversely proportional to the distance between the upper center fixing member or the vacuum suction pad and the plate feed in the behavior of the fluid flow in the guide member 30 as shown in FIG.
  • Near the edges (A) of the plate feed 40 away from the center of the member or the vacuum adsorption pad are subjected to the force P of the fluid in the horizontal and upward directions, and thus, toward the center of the upper center fixing member or the vacuum adsorption pad.
  • the horizontal component of the force P of the fluid is greater than the horizontal component of the force Q on the opposite side, which causes a force to go toward the center of the upper center fixing member or the vacuum suction pad.
  • the area A near the edge of the plate feed 40 away from the center of the upper center fixing member or the vacuum adsorption pad is subjected to the force P of the horizontal and upward directions. Therefore, the vertical component of the force P of the fluid toward the center of the upper center fixing member or the vacuum adsorption pad is larger than the vertical component of the force Q on the opposite side, thereby generating a force to maintain the horizontal force.
  • the force to go in the center direction of the upper center fixing member or the vacuum adsorption pad and the force to maintain the horizontal is applied at the same time to achieve the centering of the flat plate conveying.
  • the flat conveyance is centered by the horizontal and upward fluid force P only without the vacuum suction force of the vacuum adsorption pad, and is supported in the center direction of the upper center fixing member, and the suction between the flat conveyances And coming off is prevented to be able to transport the plate conveyance stably.
  • the upper center fixing member 10 is installed horizontally so as to transport a rigid or flexible flat conveying object;
  • the guide member 25 is installed around the lower side of the upper center fixing member in the form of upper and lower beams to guide the centering of the flat conveying material toward the center of the upper center fixing member, and the guide member 25 is a flat plate.
  • a straight line portion 261 formed in a vertical or right downward inclination direction with respect to the horizontal plane of the conveyance 40, and a round portion 262 formed so that the lower portion of the straight portion 261 is rounded toward the upper center fixing member 10.
  • a fluid guide part 26 formed of an inclined part 263 extending inclined upwardly from the round part 262 toward the upper center fixing member.
  • a nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
  • the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
  • the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
  • the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263.
  • At least one round horizontal portion 264 is formed in which the inclined portion is broken and the inclined portion is not formed at the end of the round portion 262.
  • the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
  • the upper center fixing member lower surface 111 is formed with a flow path 131 connected to the fluid spraying device to prevent collision with the plate feed.
  • the pocket structure has a ring-shaped groove 135 is formed around the lower surface of the upper center fixing member, the ring-shaped groove has a plurality of pin holes
  • a plurality of diaphragms 137 are formed in the ring-shaped grooves to partition each pinhole, thereby stably maintaining the gap between the upper center fixing member and the plate feed.
  • the flat plate transfer alignment pickup transfer device includes a vacuum suction pad 10 for suction gripping the flat plate 40, and It is installed in the form of a vertical narrow light that is widened downward toward the lower periphery of the vacuum adsorption pad is configured to include a guide member 30 to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad.
  • the guide member 30 has a fluid spray nozzle for injecting a horizontal fluid in the direction of the flat plate and the horizontal inclined upward direction to prevent the adsorption and lift-up between the flat conveying material is centered in the vacuum suction pad center direction, It comprises a (32), the fluid injection nozzle 32 is formed in the bottom surface is horizontal plane and the top surface is inclined upward so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time flat plate transfer The water is centered so as to prevent adsorption and uplift between the plate feeds.
  • the separation fluid 50 of the side downward inclination direction for separating the plate conveyance is further sprayed so that the flat plate conveyance is not adsorbed to come up
  • the side downward inclination fluid nozzle 51 is shown in FIG. It may be formed integrally with the lower end of the guide member, as may be formed separately from the guide member.
  • the flat plate feed sorting pick-up apparatus is provided with one or more horizontally arranged to adsorb and transfer a hard or flexible flat plate feed.
  • the guide member 25 is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad.
  • a nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
  • the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
  • the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
  • the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263.
  • the inclined portion is cut off at the point where the round portion 262 ends, so that the inclined portion is formed, and includes one or more round horizontal portions 264.
  • the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
  • the guide member as shown in Figure 9, the separation fluid nozzle in the side-down inclination direction to inject the separation fluid 50 in the side-down inclination direction to separate the plate-feed so that the flat plate is not adsorbed to come up It further comprises 51.
  • the vacuum adsorption pad may use both a contact vacuum adsorption pad and a non-contact vacuum adsorption pad, and since the contact vacuum adsorption pad is generally used as a known configuration, the description thereof will be omitted and will be described below. .
  • Non-contact vacuum adsorption pad is divided into acute inclination type and vertical type.
  • the vertical non-contact vacuum adsorption pad has a horizontal section consisting of a horizontal plane parallel to the planar transport object so as to form a closed curved surface when it comes into contact with one surface of the flat conveyance, and an inner diameter thereof is narrowed upward from the horizontal section while being connected to the horizontal section.
  • An acute inclined section formed of an acute inclined surface that forms an acute angle with a center line, an arc section formed of an arc surface formed between the horizontal section and an acute inclined section, and connected to the acute inclined section to inject fluid supplied from the outside
  • a housing comprising a connecting portion forming a fluid inlet;
  • a nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head And a coanda nozzle made of a nozzle neck extending in the injection hole direction.
  • the non-contact vacuum adsorption pad 10 may be installed at least one to prevent the flat conveyance from being inclined to either side and collide with the non-contact vacuum adsorption pad 10 during suction gripping of the flat transport.
  • Non-contact vacuum adsorption pad 10 rather than one large force
  • a plurality of small forces are advantageous for the non-contact suction grip and collision prevention of the plate carrier. That is, when one or more non-contact vacuum adsorption pads 10 are installed, the attraction and repulsive force of each non-contact vacuum adsorption pad 10 evenly act on the entire surface of the flat conveyance, so that the suction grip of the non-contact vacuum adsorption pad 10 is flat. Since the conveyed material is not horizontally inclined in either direction, it is possible to prevent the non-contact vacuum adsorption pad 10 from colliding with the flat conveyance.
  • the non-contact vacuum pad 10 is a non-contact gripping to transport the flatbed to the Coanda jet. It consists of a housing 11 formed of a structure capable of obtaining a vacuum by the nozzle, and a nozzle 12 coupled to the inside of the housing 11.
  • the housing 11 has a horizontal section 111 consisting of a horizontal plane parallel to the flat conveyance 40 so as to form a closed curved surface when the housing 11 is in contact with one surface of the flat conveyance 40, and upwards from the horizontal section 111.
  • An acute inclined section 112 formed of an inclined surface extending to narrow the width of the inner diameter gradually, an arc section 115 consisting of an arc surface formed between the horizontal section 111 and the acute inclined section 112, and an acute inclination Is connected to the section 112 is composed of a connection portion 113 is provided with a fluid inlet 114 for injecting fluid supplied from the outside.
  • the acute inclination section 112 is an acute inclined surface that forms an acute angle when the center line is vertically drawn from the center of the housing 11 to a smaller angle than the right angle, and the fluid supplied to the fluid inlet 114 of the connection portion 113.
  • the acute inclination section 112 the arc section 115 and the horizontal section 111 flows along, the acute inclination section 112 and the angle formed by the housing 11 center line an acute angle of 90 ° or less Since it is formed to be inclined to the vertical structure and the horizontal section of the housing perpendicular to the housing structure forming a right angle can be shortened the moving distance of the fluid can minimize the loss of the fluid.
  • the radius of the circular arc section 115 formed between the acute inclination section 112 and the horizontal section 111 is also increased, so that the horizontal section 111 and the flat conveyance 40
  • the non-contact distance between the maximum possible distance it is possible to transport the flat plate 40 more stably without damaging the flat plate transfer object 40 and the horizontal section 111 and the acute inclination section 112 is perpendicular
  • the thickness of the housing 11 can be reduced.
  • the flow rate of the fluid flowing along the circular section 115 and the horizontal section 111 increases as the radius of the circular section 115 increases.
  • the force of the fluid flowing out due to the change in the momentum (momentum) is greater, it is possible to significantly improve the vacuum adsorption force of the flat plate 40.
  • the nozzle 12 is inserted into the interior space of the housing 11 so as to discharge the fluid supplied from the fluid inlet 114 in the vertical direction of the plate carrier 40, and is spaced apart from the acute inclination section 112.
  • a nozzle head 121 having a sharp tip nozzle tip 122 and a nozzle neck 123 extending from the upper center of the nozzle head 121 toward the fluid inlet 114 with a width smaller than that of the nozzle head 121. It consists of.
  • the horizontal section 111, the arc section 115, the acute inclination section 112, and the nozzle 12 is an important structure for obtaining the coanda effect, the position of the nozzle to maximize the coanda effect It is preferable to place the acute inclination section 112 before the arc section starts, and the connection portion 113 and the fluid inlet 114 are not related to the Coanda effect, and thus various modifications are possible.
  • the acute inclination section 112 of the non-contact vacuum adsorption pad is a vertical section formed vertically, all components may use the same vertical non-contact vacuum adsorption pad as the acute inclination type. Of course.
  • a non-contact vacuum adsorption pad is formed in a horizontal section 111 of the non-contact vacuum adsorption pad 10 by forming a flow path 131 connected to the fluid injection device 132 along an outer circumference thereof.
  • the interval between the horizontal section 111 and the plate transfer 40 is stably maintained. It is desirable to be able to.
  • the fluid injection device 132 may be any device capable of injecting fluid, and a relief valve may be provided to control the pressure in the pipe line 133 connecting the fluid injection device 132 and the flow path 131. It is preferable to provide a pressure control valve 134 such as a pressure reducing valve, a solenoid valve and a safety valve.
  • a plurality of flow paths 131 are formed along one circumference of the horizontal section 111 and have a structure in which fluid is discharged to the flat plate transporter 40 from the upper portion of the horizontal section 111 having a horizontal plane. do.
  • the flow path 131 may have a pinhole structure having a through hole shape as shown in FIG. 13, and a pocket structure as shown in FIG. 14.
  • the pocket structure forms a ring-shaped groove 135 along the periphery of one end of the horizontal section 111, and the ring-shaped groove communicates with the ring-shaped groove 135 on the upper surface of the corresponding horizontal section 111.
  • a plurality of through holes 136 having a size smaller than 135 are drilled along one end of the upper surface of the horizontal section 111. Therefore, the fluid supplied from the fluid injector 132 is discharged in the vertical direction of the plate carrier 40 through the through hole 136 and the ring-shaped groove 135 to the horizontal section 111 and the plate carrier 40 The distance between them can be kept stable.
  • the ring-shaped groove 135 is provided with a plurality of diaphragms 137 along the ring-shaped groove 135 to partition each through hole 136, thereby allowing the pressure to be adjusted by widening or narrowing the partition interval. That is, when the width of the diaphragm 137 is wide, the interval of partitioning the respective through holes 136 is narrowed, so that the pressure of the discharged fluid increases, and when the width of the diaphragm 137 is narrowed, each through hole 136 Since the partition interval for partitioning is widened, the pressure of the discharged fluid is reduced to adjust the repulsive force to push the flat plate 40.
  • the cause is the guide member. It occurs when the coefficient of friction between the plate and the plate conveyance is large or the inclination angle of the guide member is small.
  • vibration and vacuum adsorption of the vacuum adsorption pad 10 and / or the guide members 25 and 30 are performed.
  • the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time Because of the effects, there is industrial applicability in the process of transferring various flat conveyances, such as glass, steel sheets, wafers for semiconductors, or soft soft films or webs.

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Abstract

The present invention relates to an apparatus for aligning, picking up, and transferring flat plate-like objects such as glass, steel plates, wafers for semiconductors, and the like. In the apparatus for transferring the flat plate-like objects, a plurality of vacuum absorption pads may be arranged to suction-grip the flat plate-like objects using the vacuum absorption pads, and simultaneously, to centrally align the flat plate-like objects. Also, the flat plate-like objects may be safely transferred while they are prevented from being suctioned and lifted together with each other. In more detail, the apparatus for aligning, picking up, and transporting flat plate-like objects includes: at least one vacuum absorption pad horizontally arranged so that flat plate-like objects are absorbed and transferred therethrough; a guide member disposed along a lower circumference of the vacuum absorption pads in a shape having a width that gradually increases downward to induce the centering of the flat plate-like objects in a central direction of the vacuum absorption pad; and a fluid injection nozzle disposed on side surfaces of the flat plate-like objects to inject a fluid in a horizontal direction and an upwardly inclined direction with respect to the side surfaces of the flat plate-like objects so that the flat plate-like objects are centered and to prevent the flat plate-like objects from being absorbed and lifted together with each other.

Description

평판 이송물 정렬픽업 이송장치Flatbed Feed Pickup Transfer Device
본 발명은 유리, 강판, 반도체용 웨이퍼 등과 같이 딱딱하거나 필름 또는 웹 등과 같이 소프트한 각종 평판 이송물을 이송하는 장치에 있어서, 진공흡착패드를 복수로 배열설치하여 진공흡착패드에 의해 평판 이송물을 석션 그립핑함과 동시에 평판 이송물을 센터링 정렬하고, 평판 이송물 간의 흡착 및 딸려올라감을 방지하면서 안전하게 이송할 수 있도록 한 평판 이송물 정렬픽업 이송장치에 관한 것이다.The present invention is a device for transferring various flat conveyances such as glass, steel plate, semiconductor wafer, etc., soft or soft, such as film or web, comprising a plurality of vacuum suction pads arranged in a plurality of vacuum suction pads The present invention relates to a flat plate transfer pick-up and transfer device which can be safely transported while at the same time suction-gripping and centering and aligning flat plate transfers, and preventing adsorption and lifting of the plate transfers.
일반적으로 유리, 강판, 반도체용 웨이퍼 등과 같은 평판 물체는 생산공정 및 생산 후공정에서 평판의 양면 중의 어느 일면을 흡착하여 이송하는데, 예를 들면 디스플레이용 평판유리의 생산공정에서 평판유리를 적합한 사이즈로 절단하는 공정과 절단된 유리의 측면을 라운드로 가공하는 공정 및 생산 후공정에서 평판유리 기판상에 회로를 패터닝하는 공정에서 흡착이 필요하다.In general, flat objects such as glass, steel sheets, semiconductor wafers, etc., absorb and transfer one surface of both surfaces of the flat plate in the production process and the post-production process. Adsorption is necessary in the process of cutting, the process of rounding the side of cut glass, and the process of patterning a circuit on a flat glass substrate in a post-production process.
또한, 디스플레이용 평판 유리는 높은 표면 평활도 및 평행도를 필요로 하며 유리 표면에 발생한 스크래치는 완성된 디스플레이 장치의 일부 화소에 불량 화소 문제점을 야기하므로 안전하게 반전시키기 위해 비접촉 석션 그립핑 장치가 사용되고 있다.In addition, flat glass for displays requires high surface smoothness and parallelism, and scratches generated on the glass surface cause a problem of bad pixels in some pixels of the finished display device, and thus, a non-contact suction gripping device is used to safely invert them.
비접촉 석션 그립핑 장치의 실시예로 대한민국 특허등록 제10-0928674호에 『평판 물체를 비접촉으로 석션 그립핑하는 비접촉 석션 그립핑 장치에 관한 것으로서, 평판 물체의 일 면과 접할 경우 폐곡면을 형성하는 압력부와, 상기 평판 물체에서 보았을 때 볼록하게 라운드지도록 상기 압력부로부터 연장 형성되는 R부와, 상기 R부로부터 상기 평판 물체와 멀어지는 수직 방향으로 적어도 일부가 직선 형상으로 연장 형성되는 측부와, 상기 측부와 연결되어 외부에서 공급되는 공기를 주입하는 공기 주입구를 형성하는 연결부를 구비하는 하우징부와, 상기 공기 주입구로부터 공급되는 공기를 상기 평판 물체와 수직되는 방향으로 토출시키며, 상기 하우징부와 일정한 간격을 두고 형성되는 노즐팁을 가지며 상기 노즐팁으로부터 상기 공기주입구 방향으로 갈수록 폭이 좁아지도록 형성되는 경사면을 가지며, 상기 하우징부 내부 빈 공간에 삽입되는 노즐부를 포함하는 것을 특징으로 하는 비접촉 석션 그립핑 장치』관한 기술이 게시된 바 있다.As an example of a non-contact suction gripping device, Korean Patent Registration No. 10-0928674 relates to a non-contact suction gripping device for suction gripping a flat object in a non-contact manner, which forms a closed curved surface when contacted with one surface of a flat object. A pressure portion, an R portion extending from the pressure portion so as to be convexly rounded when viewed from the flat plate object, a side portion at least partially extending in a straight line shape in a vertical direction away from the flat plate object; A housing part having a connection part connected to the side part to form an air injection hole for injecting air supplied from the outside, and discharging air supplied from the air injection hole in a direction perpendicular to the flat object, and having a predetermined distance from the housing part Has a nozzle tip formed to have a from the nozzle tip toward the air inlet The non-contact suction gripping device having a slope that is formed to become narrower in width and includes a nozzle portion inserted into the empty space inside the housing portion has been published.
그러나 종래의 석션 그립핑 장치에는 평판물체를 센터링 정렬할 수 있는 별도의 장치가 마련되어 있지 않아 석션 그립핑 장치로 평판물체를 석션 그립핑할 경우 평판물체가 센터링 정렬되지 않은 상태로 올려져 다음 공정으로의 이동과 작업진행에 불편함을 줄 뿐만 아니라 여러 장의 평판물체가 겹친 상태로 올려짐에 따라 평판물체가 서로 흡착되어 쉽게 떨어지지 않는 문제점이 발생하였다.However, the conventional suction gripping device is not provided with a separate device for centering alignment of the flat object, so when suction gripping the flat object with the suction gripping device, the flat object is placed unaligned and moved to the next process. As well as inconvenient to move and work in progress, as the flat plate is placed in an overlapping state, the flat objects are adsorbed to each other, so that they do not easily fall.
본 발명은 상기와 같은 문제점을 해결하기 위한 기술적 과제로서, 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 상기 가이드부재에 일체로 형성되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 과제로 한다.The present invention as a technical problem for solving the above problems, the upper center fixing member which is installed horizontally so as to transfer a rigid or flexible flat conveying object; A guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances. It is a technical object of the present invention to provide an apparatus for picking up and transporting a flat plate feeder, characterized in that it comprises a fluid spray nozzle for spraying.
또한, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레로 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 평판 이송물의 측면에 설치되어 평판 이송물이 센터링되거나, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 과제로 한다.In addition, one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance; A guide member installed around the bottom of the vacuum adsorption pad in the form of upper and lower light to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying It is a technical object of the present invention to provide a flat plate feed pick-up transfer device.
본 발명은 상기와 같은 기술적 과제를 해결하기 위해, 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 상기 가이드부재에 일체로 형성되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐;을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In order to solve the above technical problem, the present invention provides an upper center fixing member horizontally installed to transfer a rigid or flexible flat plate conveying material; A guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances. It is a technical solution to provide a flat feed material alignment pick-up transfer device, characterized in that it comprises a;
또한, 상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is a technical solution to provide a flat feed material alignment pick-up transfer device, which is supported in the direction, so as to prevent the adsorption and lift-up between the flat plate feed.
또한, 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 상부센터고정부재 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 상부센터고정부재 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member. A guide section; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; It is a technical solution to provide a flat feed object alignment pick-up transfer device comprising a coanda nozzle formed by the fluid guide portion and the nozzle block.
또한, 상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
또한, 상기 상부센터고정부재 하부 표면에는 평판 이송물과의 충돌을 방지하기 위하여 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, it is a technical solution to provide a flat feed material alignment pickup transport device, characterized in that the flow path is connected to the fluid spray device is formed on the lower surface of the upper center fixing member to prevent a collision with the flat material.
또한, 상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
또한, 상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
또한, 상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판이송물 정렬픽업이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, it is a technical solution to provide a flat-sheet material alignment pick-up transfer device characterized in that a plurality of diaphragm partitioning each pin hole is installed in the ring-shaped groove.
또한, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 평판 이송물의 측면에 설치되어 평판 이송물이 센터링되거나, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance; A guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that.
또한, 상기 유체분사노즐은 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판이송물 정렬픽업이송장치를 제공하는 것을 기술적 해결방법으로 한다.The fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up. It is a technical solution to provide a flatbed transport pick-up transport apparatus.
또한, 상기 유체분사노즐은 상기 가이드부재에 일체로 형성된 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the fluid spray nozzle is a technical solution to provide a flat feed object pickup pickup device, characterized in that formed integrally with the guide member.
또한, 상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that the coming off is prevented.
또한, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 진공흡착패드 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 진공흡착패드 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance; The guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad. A straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction. A fluid guide portion formed; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; It is a technical solution to provide a flat feed object alignment pick-up transfer device comprising a coanda nozzle formed by the fluid guide portion and the nozzle block.
또한, 상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. It is a technical solution to provide a flat plate feed pick-up transfer device characterized in that it comprises a horizontal portion.
또한, 상기 가이드부재는 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.The guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off. It is a technical solution to provide a transport arrangement for picking up the workpiece.
또한, 상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 수직면으로 형성되는 수직구간과, 상기 수평구간과 수직구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 수직구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the vacuum adsorption pad, when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards A housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head It is a technical solution to provide a flat feed material alignment pickup transfer device, characterized in that the non-contact vacuum adsorption pad comprising a; nozzle made of a nozzle neck extending in the inlet direction.
또한, 상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 내경이 좁아지고 중심선과 예각을 이루는 예각 경사면으로 형성되는 예각 경사구간과, 상기 수평구간과 예각 경사구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 예각 경사구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the vacuum adsorption pad, the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section A housing comprising a connecting portion forming an injection hole; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head It is a technical solution to provide a flat feed material alignment pickup transfer device, characterized in that the non-contact vacuum adsorption pad comprising a; nozzle made of a nozzle neck extending in the inlet direction.
또한, 상기 비접촉 진공흡착패드의 수평구간에는 평판 이송물과의 충돌을 방지하기 위하여 수평구간의 가장자리 둘레를 따라 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, in the horizontal section of the non-contact vacuum adsorption pad provides a flat conveying material sorting pickup transfer device, characterized in that a flow path connected to the fluid injection device is formed along the periphery of the horizontal section to prevent collision with the flat conveying material It is a technical solution.
또한, 상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the flow path is a technical solution to provide a flat-plate material alignment pick-up transfer device, characterized in that it is configured in any one form selected from the pinhole or pocket through which the fluid can pass.
또한, 상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, the pocket structure has a ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is a technical solution to provide a flat feed material alignment pickup transport device characterized in that a plurality of pin holes are formed. do.
또한, 상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판이송물 정렬픽업이송장치를 제공하는 것을 기술적 해결방법으로 한다.In addition, it is a technical solution to provide a flat-sheet material alignment pick-up transfer device characterized in that a plurality of diaphragm partitioning each pin hole is installed in the ring-shaped groove.
본 발명에 따른 평판 이송물 정렬픽업 이송장치는 상부센터고정부재 또는 진공흡착패드를 1개 이상 배열설치하여 상부센터고정부재 또는 진공흡착패드에 의해 평판 이송물을 그립핑 또는 석션 그립핑함과 동시에 평판 이송물을 센터링 정렬하고, 평판 이송물 간의 흡착 및 딸려올라감을 방지하면서 안전하고 정밀하게 평판 이송물을 이송할 수 있으며, 비접촉 진공흡착패드를 사용하는 경우에는 평판의 표면도 동시에 보호할 수 있는 획기적인 효과가 있다.According to the present invention, the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time It works.
도 1은 본 발명의 제1실시예에 따른 평판 이송물 정렬픽업 이송장치 구성도1 is a block diagram of a flat plate feed pick-up transfer device according to a first embodiment of the present invention
도 2는 본 발명의 수평방향 정렬에 따른 유체의 작용도.2 is a working view of a fluid according to the horizontal alignment of the present invention.
도 3은 본 발명의 수직방향 정렬에 따른 유체의 작용도Figure 3 is an action of the fluid according to the vertical alignment of the present invention
도 4는 본 발명의 제2실시예에 따른 평판 이송물 정렬픽업 이송장치 구성도Figure 4 is a block diagram of a flat plate feed pick-up transfer device according to a second embodiment of the present invention
도 5는 본 발명의 라운드수평부를 나타낸 사시도5 is a perspective view showing a round horizontal portion of the present invention
도 6 및 도 7은 본 발명의 제1실시예 및 제2실시예에 따른 유로 구성도6 and 7 are flow channel diagrams according to the first and second embodiments of the present invention.
도 8은 본 발명의 제3실시예에 따른 평판 이송물 정렬픽업 이송장치 구성도8 is a block diagram of the flat plate feed pick-up transfer device according to a third embodiment of the present invention
도 9는 본 발명 측면하향경사방향의 분리유체노즐을 나타낸 구성도Figure 9 is a block diagram showing the separation fluid nozzle in the side downward inclined direction of the present invention
도 10 및 도 11은 본 발명의 제4실시예에 따른 코안다노즐이 적용된 평판 이송물 정렬픽업 이송장치 구성도10 and 11 is a block diagram of the flat feed object alignment pickup transfer device to which the coanda nozzle is applied according to the fourth embodiment of the present invention
도 12는 본 발명의 실시예에 따른 비접촉 진공흡착패드 단면도12 is a cross-sectional view of a non-contact vacuum adsorption pad according to an embodiment of the present invention.
도 13 및 도 14는 본 발명의 제3실시예 및 제4실시예에 따른 유로 구성도13 and 14 are flow channel diagrams according to the third and fourth embodiments of the present invention.
본 발명은 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 상기 가이드부재에 일체로 형성되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐;을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.The present invention includes an upper center fixing member installed horizontally so as to transfer a rigid or flexible flat conveying material; A guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances. It characterized in that it comprises a fluid spray nozzle for ejecting; flat feed object alignment pickup transfer device characterized in that it comprises a feature of the technical configuration.
또한, 상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the fluid spray nozzle has a bottom surface formed in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying member and the center of the upper center fixing member. It is characterized by the technical configuration of the flat feed material alignment pick-up device, characterized in that it is supported in the direction, so that the adsorption and lift-up between the flat material is prevented.
또한, 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 상부센터고정부재 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 상부센터고정부재 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the upper center fixing member which is horizontally installed so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material in the center direction of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a straight portion formed in a right downward slope direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending inclined upwardly from the round portion toward the upper center fixing member. A guide section; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; The flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
또한, 상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. The flat feeder alignment pick-up transfer device, characterized in that it comprises a horizontal portion is characterized by a technical configuration.
또한, 상기 상부센터고정부재 하부 표면에는 평판 이송물과의 충돌을 방지하기 위하여 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the lower surface of the upper center fixing member is characterized in that the flat feed material alignment pick-up transfer device, characterized in that the flow path is connected to the fluid injection device is formed in order to prevent collision with the flat material.
또한, 상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
또한, 상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
또한, 상기 링형 홈에는, 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the ring-shaped groove, characterized in that the technical feature of the flat plate feed pick-up transfer device, characterized in that a plurality of diaphragm partitioning each pinhole is provided.
또한, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 평판 이송물의 측면에 설치되어 평판 이송물이 센터링되거나, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance; A guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying Characterized in that the technical configuration of the flat plate feed pick-up transfer device characterized in that.
또한, 상기 유체분사노즐은 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판이송물 정렬픽업이송장치를 기술구성의 특징으로 한다.The fluid spray nozzle may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the flat conveyance so that the flat conveyance is not sucked up. The flatbed feed pick-up feeder is characterized by a technical configuration.
또한, 상기 유체분사노즐은 상기 가이드부재에 일체로 형성된 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the fluid spray nozzle is characterized in that the technical features of the flat plate feed pickup pickup device, characterized in that formed integrally with the guide member.
또한, 상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the fluid injection nozzle is formed in the horizontal plane of the bottom surface and the top surface is inclined upwardly so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time centering the flat conveying material adsorption between the flat conveying and Flat pick-up sorting transfer device, characterized in that to prevent the coming off is a feature of the technical configuration.
또한, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 진공흡착패드 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 진공흡착패드 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, one or more vacuum adsorption pads arranged horizontally so as to absorb and transport a rigid or flexible plate conveyance; The guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad. A straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction. A fluid guide portion formed; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; The flat feeder alignment pick-up transfer device characterized in that it comprises a coanda nozzle formed by the fluid guide portion and the nozzle block is characterized by a technical configuration.
또한, 상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the fluid guide portion at least one round in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. The flat feeder alignment pick-up transfer device, characterized in that it comprises a horizontal portion is characterized by a technical configuration.
또한, 상기 가이드부재는 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.The guide member may further include a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction for separating the flat conveyance so that the flat conveyance is not adsorbed and lifted off. Pickup sorting The transfer device is a feature of the technical configuration.
또한, 상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 수직면으로 형성되는 수직구간과, 상기 수평구간과 수직구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 수직구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the vacuum adsorption pad, when contacted with one surface of the flat plate is formed in a horizontal section consisting of a horizontal plane parallel to the flat plate to form a closed curved surface, and connected to the horizontal section is formed in a vertical plane from the horizontal section upwards A housing comprising a vertical section, an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connecting part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction; characterized in that the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device characterized in that the technical configuration.
또한, 상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 내경이 좁아지고 중심선과 예각을 이루는 예각 경사면으로 형성되는 예각 경사구간과, 상기 수평구간과 예각 경사구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 예각 경사구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the vacuum adsorption pad, the horizontal section consisting of a horizontal plane parallel to the flat plate material to form a closed curved surface when in contact with one surface of the flat plate, and the inner diameter is narrowed toward the upper side from the horizontal section connected to the horizontal section An acute inclined section formed of an acute inclined surface forming an acute angle with a center line, an arc section consisting of an arc surface formed between the horizontal section and an acute inclined section, and a fluid injecting fluid supplied from the outside in connection with the acute inclined section A housing comprising a connecting portion forming an injection hole; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the inlet direction; characterized in that the non-contact vacuum adsorption pad is configured to include a flat-sheet conveyance alignment pick-up device characterized in that the technical configuration.
또한, 상기 비접촉 진공흡착패드의 수평구간에는 평판 이송물과의 충돌을 방지하기 위하여 수평구간의 가장자리 둘레를 따라 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 구성의 특징으로 한다.In addition, the horizontal section of the non-contact vacuum adsorption pad is configured to form a flat plate feed pick-up transport device, characterized in that the flow path connected to the fluid spraying device is formed along the periphery of the horizontal section to prevent collision with the flat material It is characterized by.
또한, 상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the flow path is characterized in that the technical features of the flat plate feed pick-up transfer device characterized in that the fluid is configured in any one form selected from the pinhole or the pocket that can pass.
또한, 상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the pocket structure is characterized in that the ring-shaped groove is formed around the lower surface of the upper center fixing member, the ring-shaped groove is characterized in that the flat plate transfer arrangement pick-up device characterized in that a plurality of pin holes are formed.
또한, 상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치를 기술구성의 특징으로 한다.In addition, the ring-shaped groove is characterized in that the flat plate feed sorting pickup device, characterized in that a plurality of diaphragm for partitioning each pinhole is installed.
이하 첨부되는 도면을 참조하여 본 발명의 평판 이송물 정렬픽업 이송장치의 구성에 대해 설명하면 다음과 같다.Hereinafter, with reference to the accompanying drawings will be described the configuration of the flat plate feed sorting pickup transport apparatus of the present invention.
본 발명의 제1실시예로서, 도 1에 도시된 바와 같이 본 발명에 따른 평판 이송물 정렬픽업 이송장치는, 평판이송물(40)을 그립핑하여 중심을 유지하면서 이송하는 상부센터고정부재(10)와, 상기 상부센터고정부재의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재(30)을 포함하여 구성된다.As a first embodiment of the present invention, as shown in Figure 1, the flat plate transfer alignment pickup transfer apparatus according to the present invention, the upper center fixing member for transferring while maintaining the center by gripping the flat plate (40) ( 10) and a guide member 30 installed in the form of upper and lower beams widening downward along the lower circumference of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member. do.
상기 가이드부재(30)에는 평판 이송물이 상부센터고정부재(10) 중앙방향으로 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐(32)을 포함하여 구성되는데, 상기 유체분사노즐(32)은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 구성된다.The guide member 30 is supported in the center of the upper center fixing member 10 while the plate feed is centered in the direction of the center of the upper center fixing member, and the adsorption and lifting of the plate feed in the direction of the plate feed are prevented. It comprises a fluid spray nozzle 32 for injecting the horizontal and lateral upward inclination fluid, the fluid spray nozzle 32 is formed in a horizontal plane and the top surface is inclined upward from the fluid spray nozzle The discharged fluid is simultaneously sprayed in the horizontal and upward directions so that the flat conveyance is centered and floated toward the center of the upper center fixing member, and the adsorption and lifting of the flat conveyance are prevented.
상기 가이드부재(30)에서 수평 및 상향방향의 유체가 평판 이송물을 상부센터고정부재 또는 진공흡착패드 중앙방향으로 센터링하거나, 평판 이송물 간의 흡착 및 딸려올라감을 방지하는 메카니즘에 대하여 상세히 설명한다.The mechanism in which the horizontal and upward fluid in the guide member 30 centers the flat conveyance to the center of the upper center fixing member or the vacuum adsorption pad or prevents adsorption and entrapment between the flat conveyances will be described in detail.
먼저, 평판 이송물의 센터링은 도 2에 도시한 바와 같이 가이드부재(30) 내의 유체흐름의 거동에서 상부센터고정부재 또는 진공흡착패드와 평판 이송물 사이 거리에 반비례한 유체저항력이 발생되므로 상부센터고정부재 또는 진공흡착패드 중앙에서 멀어져 있는 평판 이송물(40)의 가장자리 부근(A)이 수평 및 상향방향의 유체의 힘(P)을 받게 되고, 따라서, 상부센터고정부재 또는 진공흡착패드 중앙방향으로의 유체의 힘(P)의 수평방향 분력이 반대편의 힘(Q)의 수평방향 분력 보다 커서 상부센터고정부재 또는 진공흡착패드 중앙방향으로 가려는 힘을 발생시키게 된다.First, the centering of the plate feed is fixed to the upper center because the fluid resistance force is inversely proportional to the distance between the upper center fixing member or the vacuum suction pad and the plate feed in the behavior of the fluid flow in the guide member 30 as shown in FIG. Near the edges (A) of the plate feed 40 away from the center of the member or the vacuum adsorption pad are subjected to the force P of the fluid in the horizontal and upward directions, and thus, toward the center of the upper center fixing member or the vacuum adsorption pad. The horizontal component of the force P of the fluid is greater than the horizontal component of the force Q on the opposite side, which causes a force to go toward the center of the upper center fixing member or the vacuum suction pad.
또한, 마찬가지로 도 3에 도시한 바와 같이, 상부센터고정부재 또는 진공흡착패드 중앙에서 멀어져 있는 평판 이송물(40)의 가장자리 부근(A)이 수평 및 상향방향의 유체의 힘(P)을 받게 되고, 따라서, 상부센터고정부재 또는 진공흡착패드 중앙방향으로의 유체의 힘(P)의 수직방향 분력이 반대편의 힘(Q)의 수직방향 분력 보다는 커서 수평을 유지하려는 힘을 발생시키게 되므로 결국, 상기 상부센터고정부재 또는 진공흡착패드 중앙방향으로 가려는 힘과 수평을 유지하려는 힘이 동시에 가해져 평판 이송물의 센터링이 이루어지게 된다.In addition, as shown in FIG. 3, the area A near the edge of the plate feed 40 away from the center of the upper center fixing member or the vacuum adsorption pad is subjected to the force P of the horizontal and upward directions. Therefore, the vertical component of the force P of the fluid toward the center of the upper center fixing member or the vacuum adsorption pad is larger than the vertical component of the force Q on the opposite side, thereby generating a force to maintain the horizontal force. The force to go in the center direction of the upper center fixing member or the vacuum adsorption pad and the force to maintain the horizontal is applied at the same time to achieve the centering of the flat plate conveying.
따라서, 상부센터고정부재의 경우 진공흡착패드의 진공흡착 인력없이 수평 및 상향방향의 유체의 힘(P)만으로도 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되어 안정적으로 평판 이송물을 이송할 수 있게 된다.Accordingly, in the case of the upper center fixing member, the flat conveyance is centered by the horizontal and upward fluid force P only without the vacuum suction force of the vacuum adsorption pad, and is supported in the center direction of the upper center fixing member, and the suction between the flat conveyances And coming off is prevented to be able to transport the plate conveyance stably.
또한, 본 발명의 제2실시예로서, 도 4에 도시한 바와 같이, 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재(10)와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재(25)를 포함하여 구성되고, 상기 가이드부재(25)는 평판 이송물(40)의 수평면에 대하여 수직또는 우하향경사 방향으로 형성되는 진선부(261)와, 상기 직선부(261) 하부가 상부센터고정부재(10) 방향으로 라운드지도록 형성되는 라운드부(262)와, 상기 라운드부(262)로부터 상부센터고정부재 방향으로 상향 경사지도록 연장형성되는 경사부(263)로 이루어진 유체가이드부(26)와; 상기 유체가이드부(26)의 라운드부(262)가 시작되는 직선부(261) 하부면에 근접하여 설치되는 노즐블럭(27)과; 상기 유체가이드부(26)와 노즐블럭(27)에 의해 형성되는 코안다노즐(271)을 포함하여 구성된다.In addition, as a second embodiment of the present invention, as shown in Figure 4, the upper center fixing member 10 is installed horizontally so as to transport a rigid or flexible flat conveying object; The guide member 25 is installed around the lower side of the upper center fixing member in the form of upper and lower beams to guide the centering of the flat conveying material toward the center of the upper center fixing member, and the guide member 25 is a flat plate. A straight line portion 261 formed in a vertical or right downward inclination direction with respect to the horizontal plane of the conveyance 40, and a round portion 262 formed so that the lower portion of the straight portion 261 is rounded toward the upper center fixing member 10. And a fluid guide part 26 formed of an inclined part 263 extending inclined upwardly from the round part 262 toward the upper center fixing member. A nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
상기 코안다노즐(271)에서 토출된 유체는 라운드부(262)와 경사부(263)를 따라 흐르므로 유체의 분사력이 평판이송물(40)의 측면에 대해 상향방향으로 작용하여 평판 이송물이 센터링된다.Since the fluid discharged from the coanda nozzle 271 flows along the round portion 262 and the inclined portion 263, the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
그러나 이 경우에 코안다노즐 유체는 코안다효과로 라운드부(262)와 경사부(263)를 따라 흐르는 상향력만 작용하여 평판 이송물 간의 흡착 및 딸려올라감을 방지하는 분리기능을 수행할 수 없게 된다.However, in this case, the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
따라서, 도 5에 도시한 바와 같이, 상기 유체가이드부(26)는 코안다노즐(271)로부터 토출된 코안다제트가 경사부(263)를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부(262)가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부(264)를 포함하여 구성된다.Accordingly, as shown in FIG. 5, the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263. At least one round horizontal portion 264 is formed in which the inclined portion is broken and the inclined portion is not formed at the end of the round portion 262.
상기 라운드수평부(264)에서는 코안다노즐(271)로부터 토출된 코안다제트가 상기 라운드부(262)가 끝나는 지점에서 상기 경사부가 끊어지게 되므로 상기 경사부(263)를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되므로 평판 이송물 간의 흡착 및 딸려올라감을 방지하는 분리기능을 수행할 수 있게 된다.In the round horizontal portion 264, since the inclined portion is cut off at the point where the round portion 262 ends, the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
또한, 도 6 내지 도 7에 도시한 바와 같이, 상기 상부센터고정부재 하부 표면(111)에는 평판 이송물과의 충돌을 방지하기 위하여 유체분사장치와 연결되는 유로(131)가 형성되고, 상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성되며, 상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈(135)이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성되고, 상기 링형 홈에는 각 핀홀을 구획하는 격막(137)이 다수개 설치되어 상부센터고정부재와 평판이송물 사이의 간격을 안정적으로 유지할 수 있다.6 to 7, the upper center fixing member lower surface 111 is formed with a flow path 131 connected to the fluid spraying device to prevent collision with the plate feed. Is formed of any one of the pin hole or the pocket through which the fluid can pass, the pocket structure has a ring-shaped groove 135 is formed around the lower surface of the upper center fixing member, the ring-shaped groove has a plurality of pin holes A plurality of diaphragms 137 are formed in the ring-shaped grooves to partition each pinhole, thereby stably maintaining the gap between the upper center fixing member and the plate feed.
본 발명의 제3실시예로서, 도 8에 도시된 바와 같이 본 발명에 따른 평판 이송물 정렬픽업 이송장치는, 평판이송물(40)을 석션 그립핑하여 이송하는 진공흡착패드(10)와, 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재(30)을 포함하여 구성된다.As a third embodiment of the present invention, as shown in FIG. 8, the flat plate transfer alignment pickup transfer device according to the present invention includes a vacuum suction pad 10 for suction gripping the flat plate 40, and It is installed in the form of a vertical narrow light that is widened downward toward the lower periphery of the vacuum adsorption pad is configured to include a guide member 30 to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad.
상기 가이드부재(30)에는 평판 이송물이 진공흡착패드 중앙방향으로 센터링되거나, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐(32)을 포함하여 구성되는데, 상기 유체분사노즐(32)은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 구성된다.The guide member 30 has a fluid spray nozzle for injecting a horizontal fluid in the direction of the flat plate and the horizontal inclined upward direction to prevent the adsorption and lift-up between the flat conveying material is centered in the vacuum suction pad center direction, It comprises a (32), the fluid injection nozzle 32 is formed in the bottom surface is horizontal plane and the top surface is inclined upward so that the fluid discharged from the fluid injection nozzle is sprayed in the horizontal and upward direction at the same time flat plate transfer The water is centered so as to prevent adsorption and uplift between the plate feeds.
또한, 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체(50)가 더 분사하는 것을 특징으로 하는 바, 상기 측면하향경사방향 유체노즐(51)은 도 9와 같이 상기 가이드부재 하단부위에 일체로 형성될 수있으며, 가이드부재와 별도로 형성될 수도 있다.In addition, the separation fluid 50 of the side downward inclination direction for separating the plate conveyance is further sprayed so that the flat plate conveyance is not adsorbed to come up, the side downward inclination fluid nozzle 51 is shown in FIG. It may be formed integrally with the lower end of the guide member, as may be formed separately from the guide member.
본 발명의 제4실시예로서, 도 10 및 도 11에 도시된 바와 같이 평판 이송물 정렬픽업 이송장치는, 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드(10)와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재(25)를 포함하여 구성되고, 상기 가이드부재(25)는 평판 이송물(40)의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부(261)와, 상기 직선부(261) 하부가 진공흡착패드(10) 방향으로 라운드지도록 형성되는 라운드부(262)와, 상기 라운드부(262)로부터 진공흡착패드 방향으로 상향 경사지도록 연장형성되는 경사부(263)로 이루어진 유체가이드부(26)와; 상기 유체가이드부(26)의 라운드부(262)가 시작되는 직선부(261) 하부면에 근접하여 설치되는 노즐블럭(27)과; 상기 유체가이드부(26)와 노즐블럭(27)에 의해 형성되는 코안다노즐(271)을 포함하여 구성된다.As a fourth embodiment of the present invention, as shown in Figs. 10 and 11, the flat plate feed sorting pick-up apparatus is provided with one or more horizontally arranged to adsorb and transfer a hard or flexible flat plate feed. A vacuum suction pad 10; The guide member 25 is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveying material toward the center of the vacuum adsorption pad. 25 is a straight portion 261 formed in the vertical or right inclined direction with respect to the horizontal plane of the flat plate 40, and the round portion formed so that the lower portion of the straight portion 261 is rounded in the direction of the vacuum suction pad 10 262 and a fluid guide portion 26 including an inclined portion 263 extending inclined upwardly from the round portion 262 in a vacuum suction pad direction; A nozzle block (27) installed close to a lower surface of the straight portion (261) at which the round portion (262) of the fluid guide portion (26) starts; It comprises a coanda nozzle (271) formed by the fluid guide portion 26 and the nozzle block (27).
상기 코안다노즐(271)에서 토출된 유체는 라운드부(262)와 경사부(263)를 따라 흐르므로 유체의 분사력이 평판이송물(40)의 측면에 대해 상향방향으로 작용하여 평판 이송물이 센터링된다.Since the fluid discharged from the coanda nozzle 271 flows along the round portion 262 and the inclined portion 263, the jetting force of the fluid acts upward with respect to the side surface of the flat conveyance 40 so that the flat conveyance is Is centered.
그러나 이 경우에 코안다노즐 유체는 코안다효과로 라운드부(262)와 경사부(263)를 따라 흐르는 상향력만 작용하여 평판 이송물 간의 흡착 및 딸려올라감을 방지하는 분리기능을 수행할 수 없게 된다.However, in this case, the coanda nozzle fluid cannot cope with the separation function to prevent adsorption and entrapment between the plate feeds by acting only the upward force flowing along the round portion 262 and the inclined portion 263 due to the coanda effect. do.
따라서, 도 5에 도시한 바와 같이, 상기 유체가이드부(26)는 코안다노즐(271)로부터 토출된 코안다제트가 경사부(263)를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부(262)가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 1개 이상의 라운드수평부(264)를 포함하여 구성된다.Accordingly, as shown in FIG. 5, the fluid guide part 26 may allow the coanda jet discharged from the coanda nozzle 271 to be sprayed in the horizontal direction of the flat conveyance without flowing along the inclined portion 263. The inclined portion is cut off at the point where the round portion 262 ends, so that the inclined portion is formed, and includes one or more round horizontal portions 264.
상기 라운드수평부(264)에서는 코안다노즐(271)로부터 토출된 코안다제트가 상기 라운드부(262)가 끝나는 지점에서 상기 경사부가 끊어지게 되므로 상기 경사부(263)를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되므로 평판 이송물 간의 흡착 및 딸려올라감을 방지하는 분리기능을 수행할 수 있게 된다.In the round horizontal portion 264, since the inclined portion is cut off at the point where the round portion 262 ends, the coanda jet discharged from the coanda nozzle 271 is transferred to the flat plate without flowing along the inclined portion 263. Since the water is sprayed in the horizontal direction, the separation function to prevent the adsorption and the lifting of the flat plate can be performed.
또한, 상기 가이드부재는 도 9에 도시한 바와 같이, 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체(50)를 분사하는 측면하향경사방향의 분리유체노즐(51)을 더 포함하여 구성된다.In addition, the guide member, as shown in Figure 9, the separation fluid nozzle in the side-down inclination direction to inject the separation fluid 50 in the side-down inclination direction to separate the plate-feed so that the flat plate is not adsorbed to come up It further comprises 51.
여기서, 상기 진공흡착패드는 접촉 진공흡착패드와 비접촉 진공흡착 패드를 모두 사용할 수 있으며, 접촉 진공흡착패드는 일반적으로 사용되는 것으로서 이미 공지된 구성이므로 설명을 생략하고 이하 비접촉 진공흡착패드에 대하여 설명한다.Here, the vacuum adsorption pad may use both a contact vacuum adsorption pad and a non-contact vacuum adsorption pad, and since the contact vacuum adsorption pad is generally used as a known configuration, the description thereof will be omitted and will be described below. .
비접촉 진공흡착패드는 예각경사형과 수직형으로 구분하여 사용한다. 먼저, 수직형 비접촉 진공흡착패드는 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 내경이 좁아지고 중심선과 예각을 이루는 예각 경사면으로 형성되는 예각 경사구간과, 상기 수평구간과 예각 경사구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 예각 경사구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성된다.Non-contact vacuum adsorption pad is divided into acute inclination type and vertical type. First, the vertical non-contact vacuum adsorption pad has a horizontal section consisting of a horizontal plane parallel to the planar transport object so as to form a closed curved surface when it comes into contact with one surface of the flat conveyance, and an inner diameter thereof is narrowed upward from the horizontal section while being connected to the horizontal section. An acute inclined section formed of an acute inclined surface that forms an acute angle with a center line, an arc section formed of an arc surface formed between the horizontal section and an acute inclined section, and connected to the acute inclined section to inject fluid supplied from the outside A housing comprising a connecting portion forming a fluid inlet; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head And a coanda nozzle made of a nozzle neck extending in the injection hole direction.
비접촉 진공흡착패드(10)는 평판이송물의 석션 그립핑시 평판이송물이 어느 한쪽으로 기울어지면서 비접촉 진공흡착패드(10)에 충돌하는 것을 방지하기 위해 1개 이상 설치하는데, 비접촉 진공흡착패드(10) 한개의 큰 힘보다는 비접촉 진공흡착패드(10) 다수개의 작은 힘이 평판이송물의 비접촉 석션그립 및 충돌방지에 유리하다. 즉 비접촉 진공흡착패드(10)를 1개 이상 설치할 경우 각 비접촉 진공흡착패드(10)의 인력과 척력이 평판이송물의 전체 면에 골고루 작용하기 때문에 비접촉 진공흡착패드(10)의 석션 그립핑 시 평판이송물이 어느 한쪽 방향으로 기울어지지 않고 수평을 유지하므로 비접촉 진공흡착패드(10)와 평판이송물의 충돌을 방지할 수 있다. The non-contact vacuum adsorption pad 10 may be installed at least one to prevent the flat conveyance from being inclined to either side and collide with the non-contact vacuum adsorption pad 10 during suction gripping of the flat transport. Non-contact vacuum adsorption pad 10 rather than one large force A plurality of small forces are advantageous for the non-contact suction grip and collision prevention of the plate carrier. That is, when one or more non-contact vacuum adsorption pads 10 are installed, the attraction and repulsive force of each non-contact vacuum adsorption pad 10 evenly act on the entire surface of the flat conveyance, so that the suction grip of the non-contact vacuum adsorption pad 10 is flat. Since the conveyed material is not horizontally inclined in either direction, it is possible to prevent the non-contact vacuum adsorption pad 10 from colliding with the flat conveyance.
상기 비접촉 진공흡착패드의 구성을 구체적으로 살펴보면, 도 12에 도시된 바와 같이 비접촉 진공패드(10, NCP:non-contact vacuum pad)는 평판이송물을 비접촉으로 그리핑하여 이송하기 위해 코안다 제트에 의한 진공을 얻을 수 있는 구조로 형성되는 하우징(11)과, 하우징(11)의 내부에 결합되는 노즐(12)로 구성된다.Referring to the configuration of the non-contact vacuum adsorption pad in detail, as shown in FIG. 12, the non-contact vacuum pad 10 (NCP: non-contact vacuum pad) is a non-contact gripping to transport the flatbed to the Coanda jet. It consists of a housing 11 formed of a structure capable of obtaining a vacuum by the nozzle, and a nozzle 12 coupled to the inside of the housing 11.
하우징(11)은, 평판이송물(40)의 일면과 접할 경우 폐곡면을 형성하도록 평판 이송물(40)과 평행을 이루는 수평면으로 이루어지는 수평구간(111)과, 수평구간(111)으로부터 상측으로 갈수록 내경 폭이 좁아지도록 연장 형성되는 경사면으로 형성되는 예각 경사구간(112)과, 수평구간(111)과 예각 경사구간(112) 사이에 형성되는 원호면으로 이루어지는 원호구간(115)과, 예각 경사구간(112)과 연결되면서 외부에서 공급되는 유체를 주입하는 유체주입구(114)가 구비된 연결부(113)로 구성된다.The housing 11 has a horizontal section 111 consisting of a horizontal plane parallel to the flat conveyance 40 so as to form a closed curved surface when the housing 11 is in contact with one surface of the flat conveyance 40, and upwards from the horizontal section 111. An acute inclined section 112 formed of an inclined surface extending to narrow the width of the inner diameter gradually, an arc section 115 consisting of an arc surface formed between the horizontal section 111 and the acute inclined section 112, and an acute inclination Is connected to the section 112 is composed of a connection portion 113 is provided with a fluid inlet 114 for injecting fluid supplied from the outside.
예각 경사구간(112)은, 하우징(11)의 중심에서 수직으로 중심선을 그었을 때 중심선과 이루는 각도가 직각보다 작은 예각을 이루는 예각 경사면으로서, 연결부(113)의 유체주입구(114)로 공급된 유체는 코안다 효과에 의해 예각 경사구간(112)과 원호구간(115)과 수평구간(111)을 따라 흐르게 되는데, 예각 경사구간(112)이 하우징(11) 중심선과 이루는 각도가 90°이하의 예각으로 경사지게 형성되기 때문에 종래의 수직구간과 수평구간이 직각을 이루는 하우징 구조일 때보다 유체의 이동거리가 짧아져 유체의 손실을 최소화할 수 있다.The acute inclination section 112 is an acute inclined surface that forms an acute angle when the center line is vertically drawn from the center of the housing 11 to a smaller angle than the right angle, and the fluid supplied to the fluid inlet 114 of the connection portion 113. By the Coanda effect, the acute inclination section 112, the arc section 115 and the horizontal section 111 flows along, the acute inclination section 112 and the angle formed by the housing 11 center line an acute angle of 90 ° or less Since it is formed to be inclined to the vertical structure and the horizontal section of the housing perpendicular to the housing structure forming a right angle can be shortened the moving distance of the fluid can minimize the loss of the fluid.
즉, 종래의 수직구간과 수평구간이 직각을 이루는 하우징(11) 구조일 경우 유체가 수직의 직각구간에서 수평구간으로 흐르려 할 때 흐름이 직각으로 급속도록 전환되기 때문에 수평구간으로 흐르는 유체의 성분도 있지만 직각으로 전환되는 과정에서 소실되는 유체의 성분 또한 많아 유체 손실이 커지는 단점이 있다. That is, in the case of the conventional housing 11 structure in which the vertical section and the horizontal section are perpendicular to each other, when the fluid tries to flow from the vertical perpendicular section to the horizontal section, the flow of the fluid flowing in the horizontal section also changes rapidly. However, there is a disadvantage in that the fluid loss is also large because the components of the fluid lost in the conversion process to the right angle.
그러나 본 발명과 같이 예각 경사구간(112)과 수평구간(111)의 연결구조일 경우 유체가 예각 경사구간(112)에서 수평구간(111)으로 흐를 때 완만한 전환이 이루어지므로 직각 구조일 때보다 많은 량의 유체가 수평구간(111)으로 흐르기 때문에 유체의 손실이 그만큼 적다.However, in the case of the connection structure between the acute inclination section 112 and the horizontal section 111 as in the present invention, since the fluid is smoothly switched when the fluid flows from the acute inclination section 112 to the horizontal section 111, it is more than a right angle structure. Since a large amount of fluid flows in the horizontal section 111, the loss of the fluid is so small.
또한, 예각 경사구간(112)이 형성될 경우 예각 경사구간(112)과 수평구간(111) 사이에 형성되는 원호구간(115)의 반경도 커지게 되어 수평구간(111)과 평판이송물(40) 사이의 비접촉 간격을 최대한 멀어지게 함으로써, 평판 이송물체(40)에 손상을 주지 않고 더욱 안정적으로 평판이송물(40)을 이송할 수 있으며 수평구간(111)과 예각 경사구간(112)이 직각을 이룰 때보다 하우징(11)의 두께를 줄일 수 있다.In addition, when the acute inclination section 112 is formed, the radius of the circular arc section 115 formed between the acute inclination section 112 and the horizontal section 111 is also increased, so that the horizontal section 111 and the flat conveyance 40 By making the non-contact distance between the maximum possible distance, it is possible to transport the flat plate 40 more stably without damaging the flat plate transfer object 40 and the horizontal section 111 and the acute inclination section 112 is perpendicular When the thickness of the housing 11 can be reduced.
이와 같이 수평구간(111)과 평판이송물(40) 사이의 비접촉 간격이 커지는 것은 원호구간(115)의 반경이 커질수록 원호구간(115)과 수평구간(111)을 따라 흐르는 유체의 유량이 증가하기 때문이며, 또한, 예각 경사구간(112)을 형성할 경우 모멘텀(momentum)의 변화로 인해 유체가 밖으로 빠져나가는 힘이 더 커져 평판이송물(40)의 진공 흡착력을 대폭 향상시킬 수 있다.As the non-contact interval between the horizontal section 111 and the plate carrier 40 increases, the flow rate of the fluid flowing along the circular section 115 and the horizontal section 111 increases as the radius of the circular section 115 increases. In addition, when the acute inclination section 112 is formed, the force of the fluid flowing out due to the change in the momentum (momentum) is greater, it is possible to significantly improve the vacuum adsorption force of the flat plate 40.
노즐(12)은 유체주입구(114)로부터 공급되는 유체를 평판이송물(40)의 수직방향으로 토출할 수 있도록 하우징(11) 내부 공간에 삽입설치되는 것으로서, 예각 경사구간(112)과 이격되는 끝이 뾰족한 노즐팁(122)으로 이루어지는 노즐머리(121)와, 노즐머리(121)보다 작은 폭으로 노즐머리(121)의 상부 중앙으로부터 유체주입구(114) 방향으로 연장형성되는 노즐목(123)으로 구성된다.The nozzle 12 is inserted into the interior space of the housing 11 so as to discharge the fluid supplied from the fluid inlet 114 in the vertical direction of the plate carrier 40, and is spaced apart from the acute inclination section 112. A nozzle head 121 having a sharp tip nozzle tip 122 and a nozzle neck 123 extending from the upper center of the nozzle head 121 toward the fluid inlet 114 with a width smaller than that of the nozzle head 121. It consists of.
여기서, 수평구간(111)과, 원호구간(115)과, 예각 경사구간(112)과, 노즐(12)은 코안다 효과를 얻기 위한 중요한 구조로서, 노즐의 위치는 코안다효과를 극대화하기 위하여 원호구간이 시작되기 전의 예각 경사구간(112)에 두는 것이 바람직하며, 연결부(113) 및 유체주입구(114)는 코안다 효과와는 무관하므로 다양한 변형이 가능하다.Here, the horizontal section 111, the arc section 115, the acute inclination section 112, and the nozzle 12 is an important structure for obtaining the coanda effect, the position of the nozzle to maximize the coanda effect It is preferable to place the acute inclination section 112 before the arc section starts, and the connection portion 113 and the fluid inlet 114 are not related to the Coanda effect, and thus various modifications are possible.
또한, 도면에는 도시하지 않았지만, 상기 비접촉 진공흡착패드의 예각경사구간(112)이 수직으로 형성된 수직구간인 것을 제외하고는 모든 구성요소가 예각경사형과 동일한 수직형 비접촉 진공흡착패드를 사용할 수 있음은 물론이다.In addition, although not shown in the drawing, except that the acute inclination section 112 of the non-contact vacuum adsorption pad is a vertical section formed vertically, all components may use the same vertical non-contact vacuum adsorption pad as the acute inclination type. Of course.
또한, 도 13 내지 도 14에 도시한 바와 같이, 비접촉 진공흡착패드(10)의 수평구간(111) 에는 외주를 따라 유체분사장치(132)와 연결되는 유로(131)를 형성하여 비접촉 진공흡착패드(10)로 평판이송물(40)을 석션 그립핑할 때 비접촉 진공흡착패드와 평판이송물이 서로 충돌하는 방지하기 위하여 수평구간(111)과 평판이송물(40) 사이의 간격을 안정적으로 유지할 수 있도록 하는 것이 바람직하다.13 to 14, a non-contact vacuum adsorption pad is formed in a horizontal section 111 of the non-contact vacuum adsorption pad 10 by forming a flow path 131 connected to the fluid injection device 132 along an outer circumference thereof. In order to prevent the non-contact vacuum adsorption pad and the plate transfer from colliding with each other when suction gripping the plate transfer 40 to 10, the interval between the horizontal section 111 and the plate transfer 40 is stably maintained. It is desirable to be able to.
유체분사장치(132)는 유체를 분사할 수 있는 장치이면 모두 가능하며, 또한, 유체분사장치(132)와 유로(131)를 연결하는 배관라인(133)에는 압력을 제어할 수 있도록 릴리프 밸브, 감압밸브, 솔레노이드밸브 및 안전밸브 등과 같은 압력제어밸브(134)를 설치하는 것이 바람직하다. The fluid injection device 132 may be any device capable of injecting fluid, and a relief valve may be provided to control the pressure in the pipe line 133 connecting the fluid injection device 132 and the flow path 131. It is preferable to provide a pressure control valve 134 such as a pressure reducing valve, a solenoid valve and a safety valve.
유로(131)는 수평구간(111)의 일단 둘레를 따라 다수개 형성되는 것으로서, 유체가 수평면으로 이루어지는 수평구간(111)의 상부에서 하부를 통과하여 평판이송물(40)에 토출되는 구조로 형성된다.A plurality of flow paths 131 are formed along one circumference of the horizontal section 111 and have a structure in which fluid is discharged to the flat plate transporter 40 from the upper portion of the horizontal section 111 having a horizontal plane. do.
유로(131)는 도 13에 도시된 바와 같은 관통공 형태의 핀홀 구조, 도 14에 도시된 바와 같은 포켓 구조로 형성할 수 있다.The flow path 131 may have a pinhole structure having a through hole shape as shown in FIG. 13, and a pocket structure as shown in FIG. 14.
포켓 구조는 도 14에 도시된 같이 수평구간(111)의 저면 일단 둘레를 따라 링형 홈(135)을 형성하고, 이에 대응하는 수평구간(111)의 상면에는 링형 홈(135)과 연통되도록 링형 홈(135)보다 작은 크기의 관통공(136)이 수평구간(111)의 상면 일단 둘레를 따라 다수개 천공된다. 따라서, 유체분사장치(132)로부터 공급된 유체는 관통공(136)과 링형 홈(135)을 거쳐 평판이송물(40)의 수직방향으로 토출되어 수평구간(111)과 평판이송물(40) 사이와의 간격을 안정적으로 유지할 수 있다.As shown in FIG. 14, the pocket structure forms a ring-shaped groove 135 along the periphery of one end of the horizontal section 111, and the ring-shaped groove communicates with the ring-shaped groove 135 on the upper surface of the corresponding horizontal section 111. A plurality of through holes 136 having a size smaller than 135 are drilled along one end of the upper surface of the horizontal section 111. Therefore, the fluid supplied from the fluid injector 132 is discharged in the vertical direction of the plate carrier 40 through the through hole 136 and the ring-shaped groove 135 to the horizontal section 111 and the plate carrier 40 The distance between them can be kept stable.
여기서, 상기 링형 홈(135)에는 링형 홈(135)을 따라 다수개의 격막(137)을 설치하여 각 관통공(136)을 구획함으로써, 구획간격을 넓이거나 좁혀 압력을 조절할 수 있도록 한다. 즉, 격막(137)의 폭이 넓을 경우 각 관통공(136)을 구획하는 구획간격이 좁아지므로 토출되는 유체의 압력이 증가하고, 격막(137)의 폭이 좁아질 경우 각 관통공(136)을 구획하는 구획간격이 넓어지므로 토출되는 유체의 압력이 감소되어 평판이송물(40)을 밀어내는 척력을 조절할 수 있다.In this case, the ring-shaped groove 135 is provided with a plurality of diaphragms 137 along the ring-shaped groove 135 to partition each through hole 136, thereby allowing the pressure to be adjusted by widening or narrowing the partition interval. That is, when the width of the diaphragm 137 is wide, the interval of partitioning the respective through holes 136 is narrowed, so that the pressure of the discharged fluid increases, and when the width of the diaphragm 137 is narrowed, each through hole 136 Since the partition interval for partitioning is widened, the pressure of the discharged fluid is reduced to adjust the repulsive force to push the flat plate 40.
또한, 도면에 도시하지는 않았지만, 상기 평판 이송물 정렬픽업 이송장치에서 진공흡착패드(10)와 가이드부재(25, 30) 사이에 평판이송물(40)이 끼워져 걸리는 경우에 있어서는 그 원인이 가이드부재와 평판이송물 간의 마찰계수가 크거나 가이드부재의 경사각이 작은 경우에 발생하는 바, 이를 해결하기 위한 수단으로는 진공흡착패드(10) 및/또는 가이드부재(25, 30)의 진동, 진공흡착패드 또는 비접촉 진공흡착패드의 진공 또는 유체밸브의 on/off 진동, 유체분사노즐(32) 또는 코안다노즐(271)의 유체밸브의 on/off 진동, 가이드부재의 경사부(263)에 일정간격의 리브를 형성하여 접촉면적을 적게 함에 의하여 진공흡착패드와 가이드부재 사이에 평판이송물이 끼워져 걸리는 문제를 해소하는 것을 특징으로 한다.In addition, although not shown in the drawing, in the case where the flat sheet transporter 40 is sandwiched between the vacuum suction pad 10 and the guide members 25 and 30 in the flat sheet transport pick-up transport device, the cause is the guide member. It occurs when the coefficient of friction between the plate and the plate conveyance is large or the inclination angle of the guide member is small. As a means for solving the problem, vibration and vacuum adsorption of the vacuum adsorption pad 10 and / or the guide members 25 and 30 are performed. On / off vibration of the pad or non-contact vacuum adsorption pad or on / off vibration of the fluid valve, on / off vibration of the fluid valve of the fluid injection nozzle 32 or the coanda nozzle 271, and a predetermined interval to the inclined portion 263 of the guide member. By forming a rib of the contact area is reduced by the elimination of the problem that the plate feed is sandwiched between the vacuum suction pad and the guide member.
이상에서 설명한 본 발명은 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 있어 본 발명의 기술적 사상을 벗어나지 않는 범위내에서 여러 가지 치환, 변경이 가능하므로 전술한 실시내용 및 도면에 한정되는 것은 아니다.The present invention described above can be variously substituted and changed within the scope without departing from the spirit of the present invention for those skilled in the art to which the present invention pertains, which is not limited to the above-described embodiments and drawings. no.
본 발명에 따른 평판 이송물 정렬픽업 이송장치는 상부센터고정부재 또는 진공흡착패드를 1개 이상 배열설치하여 상부센터고정부재 또는 진공흡착패드에 의해 평판 이송물을 그립핑 또는 석션 그립핑함과 동시에 평판 이송물을 센터링 정렬하고, 평판 이송물 간의 흡착 및 딸려올라감을 방지하면서 안전하고 정밀하게 평판 이송물을 이송할 수 있으며, 비접촉 진공흡착패드를 사용하는 경우에는 평판의 표면도 동시에 보호할 수 있는 획기적인 효과가 있으므로, 유리, 강판, 반도체용 웨이퍼 등과 같이 딱딱하거나 필름 또는 웹 등과 같이 소프트한 각종 평판 이송물을 이송하는 공정 및 그 산업분야에서 산업상 이용가능성이 있다.According to the present invention, the flat plate transfer pick-up transfer device is provided by arranging one or more upper center fixing members or vacuum suction pads to grip or suction grip flat plate transfers by the upper center fixing member or vacuum suction pads. Centering and aligning the feeds, transporting plate feeds safely and precisely while preventing adsorption and drift between the plate feeds, and in the case of non-contact vacuum adsorption pads, can also protect the surface of the plate at the same time Because of the effects, there is industrial applicability in the process of transferring various flat conveyances, such as glass, steel sheets, wafers for semiconductors, or soft soft films or webs.

Claims (27)

  1. 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 상기 가이드부재에 일체로 형성되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐;을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치An upper center fixing member installed horizontally so as to transfer a rigid or flexible flat conveyance; A guide member installed in the upper and lower light circumferences around the lower direction of the upper center fixing member to guide centering of the flat conveying material toward the center of the upper center fixing member; It is formed integrally with the guide member and the flat conveyance is centered, and is supported in the center direction of the upper center fixing member, and the horizontal and lateral upward inclined fluids in the direction of the flat conveyance are prevented from being sucked and lifted between the flat conveyances. Flat feed object alignment pickup transfer device comprising a;
  2. 제1항에 있어서,The method of claim 1,
    상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 상기 상부센터고정부재 중앙방향으로 부양되고, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The fluid spray nozzle is formed at the bottom surface in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time to center the flat conveying material toward the center of the upper center fixing member. Lifting, flat plate feed sorting pickup device, characterized in that the adsorption and lift-up between the plate feed is prevented
  3. 딱딱하거나 플렉시블한 평판 이송물을 이송할 수 있도록 수평으로 설치되는 상부센터고정부재와; 상기 상부센터고정부재의 하측방향 둘레로 상협하광형태로 설치되어 상기 상부센터고정부재 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 상부센터고정부재 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 상부센터고정부재 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치An upper center fixing member installed horizontally so as to transfer a rigid or flexible flat conveyance; And a guide member installed in the form of upper and lower beams around the lower direction of the upper center fixing member to guide the centering of the flat conveying material toward the center of the upper center fixing member, wherein the guide member is perpendicular to the horizontal plane of the flat conveying material. Or a fluid comprising a straight portion formed in a right downward direction, a round portion formed so that the lower portion of the straight portion is rounded toward the upper center fixing member, and an inclined portion extending upwardly inclined from the round portion toward the upper center fixing member. A guide section; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; Flat conveyer alignment pickup pick-up apparatus comprising a coanda nozzle formed by the fluid guide portion and the nozzle block
  4. 제3항에 있어서,The method of claim 3,
    상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The fluid guide part may include at least one round horizontal portion in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. Flatbed feed sorting pickup device, characterized in that configured to include
  5. 제1항 내지 제4항중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,
    상기 상부센터고정부재 하부 표면에는 평판 이송물과의 충돌을 방지하기 위하여 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치Flat conveyer alignment pick-up transfer device, characterized in that the lower surface of the upper center fixing member is formed with a flow path connected to the fluid injection device in order to prevent collision with the flat conveyance
  6. 제5항에 있어서,The method of claim 5,
    상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The flow path is flat plate transfer pick-up transfer device, characterized in that formed in any one form selected from the pinhole or pocket through which the fluid can pass
  7. 제6항에 있어서,The method of claim 6,
    상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The pocket structure has a ring-shaped groove formed around a lower surface of the upper center fixing member, and the ring-shaped groove has a plurality of pin holes, characterized in that the flat pick-up transfer device
  8. 제7항에 있어서, The method of claim 7, wherein
    상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치Flat-type material transfer pick-up transfer device, characterized in that a plurality of diaphragm for partitioning each pin hole is installed in the ring-shaped groove
  9. 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재와; 평판 이송물의 측면에 설치되어 평판 이송물이 센터링되거나, 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 평판 이송물 방향으로 측면수평 및 측면상향경사방향 유체를 분사하는 유체분사노즐을 포함하여 구성되는 것을 특징으로 하는 평판이송물정렬픽업 이송장치One or more vacuum adsorption pads arranged horizontally so as to adsorb and transport rigid or flexible flat conveying materials; A guide member installed in a vertical narrow light form widening downward along a lower circumference of the vacuum adsorption pad to guide centering of the flat conveying material toward the center of the vacuum adsorption pad; It is installed on the side of the flat conveyance to include a fluid spray nozzle for injecting the horizontal and lateral upward inclination fluid in the direction of the flat conveying to prevent the center of the flat conveying, adsorption and lift up between the flat conveying Flatbed transfer sorting transfer device
  10. 제9항에 있어서, The method of claim 9,
    상기 유체분사노즐은 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판이송물 정렬픽업이송장치The fluid spray nozzle further comprises a flat fluid transfer nozzle comprising a separation fluid nozzle in a side downward inclination direction for injecting a separation fluid in a side downward inclination direction separating the flat conveyance so that the flat conveyance is not absorbed by the flat conveyance. Water Alignment Pickup Transfer Unit
  11. 제9항에 있어서,The method of claim 9,
    상기 유체분사노즐은 상기 가이드부재에 일체로 형성된 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치Flat fluid transfer pick-up transfer device, characterized in that the fluid injection nozzle is formed integrally with the guide member
  12. 제9항에 있어서,The method of claim 9,
    상기 유체분사노즐은 하단면은 수평면으로 형성하고 상단면은 상향으로 경사지게 형성하여 유체분사노즐로부터 토출되는 유체가 수평 및 상향방향으로 동시에 분사되어 평판 이송물이 센터링되면서 평판 이송물 간의 흡착 및 딸려올라감이 방지되도록 한 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The fluid spray nozzle is formed with the bottom surface in a horizontal plane and the top surface is inclined upwardly so that the fluid discharged from the fluid spray nozzle is sprayed in the horizontal and upward directions at the same time so that the flat feed material is centered and the suction and lift up between the flat feed materials are carried out. Flattening material transfer pickup device, characterized in that the prevention
  13. 딱딱하거나 플렉시블한 평판 이송물을 흡착하여 이송할 수 있도록 수평으로 배열 설치되는 1개 이상의 진공흡착패드와; 상기 진공흡착패드의 하측방향 둘레를 따라 하향으로 갈수록 넓어지는 상협하광형태로 설치되어 상기 진공흡착패드 중앙방향으로 평판 이송물의 센터링을 유도하는 가이드부재를 포함하여 구성되고, 상기 가이드부재는 평판 이송물의 수평면에 대하여 수직 또는 우하향경사 방향으로 형성되는 직선부와, 상기 직선부 하부가 진공흡착패드 방향으로 라운드지도록 형성되는 라운드부와, 상기 라운드부로부터 진공흡착패드 방향으로 상향 경사지도록 연장형성되는 경사부로 이루어진 유체가이드부와; 상기 유체가이드부의 라운드부가 시작되는 직선부 하부면에 근접하여 설치되는 노즐블럭과; 상기 유체가이드부와 노즐블럭에 의해 형성되는 코안다노즐을 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치One or more vacuum adsorption pads arranged horizontally so as to adsorb and transport rigid or flexible flat conveying materials; The guide suction member is installed in the form of upper and lower beams widening downward along the lower circumference of the vacuum adsorption pad to guide the centering of the flat conveyance to the center of the vacuum adsorption pad. A straight portion formed in a vertical or right downward slope with respect to a horizontal plane, a round portion formed so that the lower portion of the straight portion is rounded in the vacuum suction pad direction, and an inclined portion extending from the round portion to be inclined upward in the vacuum suction pad direction. A fluid guide portion formed; A nozzle block installed in proximity to a lower surface of the straight portion at which the round portion of the fluid guide portion starts; Flat conveyer alignment pickup pick-up apparatus comprising a coanda nozzle formed by the fluid guide portion and the nozzle block
  14. 제13항에 있어서, The method of claim 13,
    상기 유체가이드부는 코안다노즐로부터 토출된 코안다제트가 경사부를 따라 흘러가지 않고 평판 이송물 측면수평방향으로 분사되도록 상기 라운드부가 끝나는 지점에서 상기 경사부가 끊어져 경사부가 형성되지 않는 1개 이상의 라운드수평부를 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The fluid guide part may include at least one round horizontal portion in which the inclined portion is broken and the inclined portion is not formed at the point where the round portion ends so that the coanda jet discharged from the coanda nozzle does not flow along the inclined portion and is sprayed in the horizontal direction of the flat conveyance. Flatbed feed sorting pickup device, characterized in that configured to include
  15. 제13항에 있어서,The method of claim 13,
    상기 가이드부재는 평판 이송물이 흡착되어 딸려올라가지 않도록 평판 이송물을 분리시키는 측면하향경사방향의 분리유체를 분사하는 측면하향경사방향의 분리유체노즐을 더 포함하여 구성되는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The guide member may further include a plate fluid of a side downward inclination direction for injecting a separation fluid in a side downward inclination direction to separate the plate conveyance so that the plate conveyance is not adsorbed and lifted up. Alignment Pickup Transfer Device
  16. 제9항 내지 제15항중 어느 한 항에 있어서,The method according to any one of claims 9 to 15,
    상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 수직면으로 형성되는 수직구간과, 상기 수평구간과 수직구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 수직구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The vacuum suction pad may include a horizontal section formed in a horizontal plane so as to form a closed curved surface in contact with one surface of the flat plate transport, and a vertical section formed in a vertical plane from the horizontal section upward while being connected to the horizontal section. And a housing comprising an arc section formed of an arc surface formed between the horizontal section and the vertical section, and a connection part connected to the vertical section to form a fluid inlet for injecting fluid supplied from the outside; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the direction of the injection port; Flat conveyer aligned pick-up transfer device, characterized in that the non-contact vacuum suction pad comprising a
  17. 제9항 내지 제15항중 어느 한 항에 있어서,The method according to any one of claims 9 to 15,
    상기 진공흡착패드는, 평판이송물의 일면과 접할 경우 폐곡면을 형성하도록 평판이송물과 평행을 이루도록 수평면으로 이루어지는 수평구간과, 상기 수평구간과 연결되면서 수평구간으로부터 상측으로 갈수록 내경이 좁아지고 중심선과 예각을 이루는 예각 경사면으로 형성되는 예각 경사구간과, 상기 수평구간과 예각 경사구간 사이에 형성되는 원호 면으로 이루어지는 원호구간과, 상기 예각 경사구간과 연결되어 외부에서 공급되는 유체를 주입하는 유체주입구를 형성하는 연결부로 이루어지는 하우징과; 상기 유체주입구로부터 공급되는 유체를 평판이송물의 수직방향으로 토출할 수 있도록 하우징 내부 공간에 삽입 설치되는 것으로서 상기 하우징과 간격을 두고 형성되는 노즐팁으로 이루어지는 노즐머리와, 상기 노즐머리의 상부 중앙으로부터 유체주입구 방향으로 연장형성되는 노즐목으로 이루어지는 코안다 노즐;을 포함하여 구성되는 비접촉 진공흡착패드인 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치The vacuum suction pad has a horizontal section consisting of a horizontal plane so as to be in parallel with the flat conveyer to form a closed curved surface when it comes into contact with one surface of the flat conveyance, and an inner diameter is narrowed from the horizontal section toward the upper side while being connected to the horizontal section. An acute inclined section formed of an acute inclined section that forms an acute angle, an arc section formed of an arc surface formed between the horizontal section and an acute inclined section, and a fluid inlet connected to the acute inclined section to inject fluid supplied from the outside; A housing comprising a connecting portion to form; A nozzle head which is inserted into the housing inner space so as to discharge the fluid supplied from the fluid inlet in the vertical direction of the flat plate transport body and is formed with a nozzle tip spaced from the housing, and the fluid from the upper center of the nozzle head Coanda nozzle made of a nozzle neck extending in the direction of the injection port; Flat conveyer aligned pick-up transfer device, characterized in that the non-contact vacuum suction pad comprising a
  18. 제16항에 있어서,The method of claim 16,
    상기 비접촉 진공흡착패드의 수평구간에는 평판 이송물과의 충돌을 방지하기 위하여 수평구간의 가장자리 둘레를 따라 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치In the horizontal section of the non-contact vacuum adsorption pads, a flow path connected to the fluid spraying device is formed along the periphery of the horizontal section to prevent collision with the flat conveying object.
  19. 제18항에 있어서,The method of claim 18,
    상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The flow path is flat plate transfer pick-up transfer device, characterized in that formed in any one form selected from the pinhole or pocket through which the fluid can pass
  20. 제19항에 있어서,The method of claim 19,
    상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The pocket structure has a ring-shaped groove formed around a lower surface of the upper center fixing member, and the ring-shaped groove has a plurality of pin holes, characterized in that the flat pick-up transfer device
  21. 제20항에 있어서,The method of claim 20,
    상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치Flat-type material transfer pick-up transfer device, characterized in that a plurality of diaphragm for partitioning each pin hole is installed in the ring-shaped groove
  22. 제17항에 있어서,The method of claim 17,
    상기 비접촉 진공흡착패드의 수평구간에는 평판 이송물과의 충돌을 방지하기 위하여 수평구간의 가장자리 둘레를 따라 유체분사장치와 연결되는 유로가 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치In the horizontal section of the non-contact vacuum adsorption pads, a flow path connected to the fluid spraying device is formed along the periphery of the horizontal section to prevent collision with the flat conveying object.
  23. 제22항에 있어서,The method of claim 22,
    상기 유로는 유체가 통과할 수 있는 핀홀 또는 포켓 중 선택되는 어느 한 형태로 구성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The flow path is flat plate transfer pick-up transfer device, characterized in that formed in any one form selected from the pinhole or pocket through which the fluid can pass
  24. 제23항에 있어서,The method of claim 23, wherein
    상기 포켓 구조는 상기 상부센터고정부재 하부 표면 둘레를 따라 링형 홈이 형성되며, 상기 링형홈에는 핀홀이 다수개 형성됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치The pocket structure has a ring-shaped groove formed around a lower surface of the upper center fixing member, and the ring-shaped groove has a plurality of pin holes, characterized in that the flat pick-up transfer device
  25. 제24항에 있어서,The method of claim 24,
    상기 링형 홈에는 각 핀홀을 구획하는 격막이 다수개 설치됨을 특징으로 하는 평판 이송물 정렬픽업 이송장치Flat-type material transfer pick-up transfer device, characterized in that a plurality of diaphragm for partitioning each pin hole is installed in the ring-shaped groove
  26. 제16항에 있어서,The method of claim 16,
    상기 평판 이송물 정렬픽업 이송장치에서 진공흡착패드와 가이드부재 사이에 평판이송물이 끼워져 걸리는 경우에 있어서는 진공흡착패드 및/또는 가이드부재를 진동시키는 방법, 진공흡착패드 또는 비접촉 진공흡착패드의 진공 또는 유체밸브를 on/off 진동하는 방법, 유체분사노즐 또는 코안다노즐의 유체밸브를 on/off 진동하는 방법, 가이드부재의 경사부에 일정간격의 리브를 형성하여 접촉면적을 적게 함으로서 접촉저항을 적게 하는 방법중에서 선택되는 어느 한 방법에 의하여 진공흡착패드와 가이드부재 사이에 평판이송물이 끼워져 걸리는 문제를 해소하는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치In the case where the plate feed material is sandwiched between the vacuum suction pad and the guide member in the flat plate feed pick-up transfer device, a method of vibrating the vacuum suction pad and / or the guide member, the vacuum of the vacuum suction pad or the non-contact vacuum suction pad, or The method of vibrating the fluid valve on / off, the method of vibrating the fluid valve of the fluid injection nozzle or the coanda nozzle, and the contact area by reducing the contact area by forming ribs at regular intervals on the inclined portion of the guide member to reduce the contact resistance. Flat feed object alignment pick-up transfer device, characterized in that to solve the problem that the flat plate is sandwiched between the vacuum suction pad and the guide member by any one method selected from the
  27. 제17항에 있어서,The method of claim 17,
    상기 평판 이송물 정렬픽업 이송장치에서 진공흡착패드와 가이드부재 사이에 평판이송물이 끼워져 걸리는 경우에 있어서는 진공흡착패드 및/또는 가이드부재를 진동시키는 방법, 진공흡착패드 또는 비접촉 진공흡착패드의 진공 또는 유체밸브를 on/off 진동하는 방법, 유체분사노즐 또는 코안다노즐의 유체밸브를 on/off 진동하는 방법, 가이드부재의 경사부에 일정간격의 리브를 형성하여 접촉면적을 적게 함으로서 접촉저항을 적게 하는 방법중에서 선택되는 어느 한 방법에 의하여 진공흡착패드와 가이드부재 사이에 평판이송물이 끼워져 걸리는 문제를 해소하는 것을 특징으로 하는 평판 이송물 정렬픽업 이송장치In the case where the plate feed material is sandwiched between the vacuum suction pad and the guide member in the flat plate feed pick-up transfer device, a method of vibrating the vacuum suction pad and / or the guide member, the vacuum of the vacuum suction pad or the non-contact vacuum suction pad, or The method of vibrating the fluid valve on / off, the method of vibrating the fluid valve of the fluid injection nozzle or the coanda nozzle, and the contact area by reducing the contact area by forming ribs at regular intervals on the inclined portion of the guide member to reduce the contact resistance. Flat feed object alignment pick-up transfer device, characterized in that to solve the problem that the flat plate is sandwiched between the vacuum suction pad and the guide member by any one method selected from the
PCT/KR2011/004876 2011-07-04 2011-07-04 Apparatus for aligning, picking up, and transporting flat plate-like objects WO2013005872A1 (en)

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Publication number Priority date Publication date Assignee Title
CN104084944A (en) * 2014-06-26 2014-10-08 孙硕添 Picking manipulator device for injection-molded blades
CN113581829A (en) * 2021-08-03 2021-11-02 合肥商德应用材料有限公司 Automatic feeding system and inverted automatic feeding device

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KR200401259Y1 (en) * 2005-08-12 2005-11-15 주식회사 엠앤엘 The Grtpper of a Physical Distribution Transport Unit not to be the Contact
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JP4175988B2 (en) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 Substrate alignment apparatus, substrate processing apparatus, and substrate transfer apparatus
KR100876558B1 (en) * 2007-10-31 2008-12-31 주식회사 홍성엠아이티 Changing unit of transfer direction for a plate transfer system
KR100928674B1 (en) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 Noncontact type suction gripping device and noncontact type suction gripping flame with the same

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JP4175988B2 (en) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 Substrate alignment apparatus, substrate processing apparatus, and substrate transfer apparatus
KR20070003260A (en) * 2005-07-01 2007-01-05 오성엘에스티(주) Substrates aligning apparatus
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KR100876558B1 (en) * 2007-10-31 2008-12-31 주식회사 홍성엠아이티 Changing unit of transfer direction for a plate transfer system
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104084944A (en) * 2014-06-26 2014-10-08 孙硕添 Picking manipulator device for injection-molded blades
CN113581829A (en) * 2021-08-03 2021-11-02 合肥商德应用材料有限公司 Automatic feeding system and inverted automatic feeding device

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