WO2022139178A1 - Substrate transfer device for loadlock chamber, using magnetic coupling - Google Patents

Substrate transfer device for loadlock chamber, using magnetic coupling Download PDF

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Publication number
WO2022139178A1
WO2022139178A1 PCT/KR2021/016690 KR2021016690W WO2022139178A1 WO 2022139178 A1 WO2022139178 A1 WO 2022139178A1 KR 2021016690 W KR2021016690 W KR 2021016690W WO 2022139178 A1 WO2022139178 A1 WO 2022139178A1
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Prior art keywords
magnetic coupling
coupling part
load lock
lock chamber
moving
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PCT/KR2021/016690
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French (fr)
Korean (ko)
Inventor
정재학
최재호
강기안
이대원
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주식회사 씨엔원
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Publication of WO2022139178A1 publication Critical patent/WO2022139178A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Definitions

  • the present invention relates to a substrate transfer apparatus for a load lock chamber. Specifically, it relates to a substrate transfer apparatus for a load lock chamber using magnetic coupling.
  • the present invention was carried out with the support of the Gyeonggi-do semiconductor/display material/part/equipment industry independence research support project.
  • a cluster system capable of consistently processing a plurality of sheets is generally employed.
  • a cluster system refers to a multi-chamber type substrate processing system including a transfer robot (or handler) and a plurality of substrate processing modules provided therearound.
  • the cluster system includes a transfer chamber and a transfer robot rotatably provided in the transfer chamber.
  • a process chamber for performing a substrate processing process is mounted on each side of the transfer chamber.
  • Such a cluster system increases the substrate throughput by simultaneously processing a plurality of processes or continuously performing several processes. Another effort to increase the substrate throughput is to increase the substrate throughput per hour by simultaneously processing a plurality of sheets in one process chamber.
  • a loadlock chamber is a device responsible for transferring a manually seated substrate in a semiconductor manufacturing equipment, and a semiconductor transfer device in the load lock chamber is configured to transfer the substrate.
  • the transport distance of the substrate is limited to the transport distance of the outer guide block reciprocating the driving shaft in a linear motion
  • the length of the driving shaft must be increased in order to transport the substrate over a long distance, and the substrate transport is proportional thereto.
  • the size of the device must also be increased.
  • linear driving by such a guide block generates a lot of vibration between the start and stop of the operation, and it is transported according to the movement of the guide block through motor driving and is greatly affected by vibration by motor driving due to direct connection of the driving unit. Rather, there is a problem in that the seating arm, which is frequently used for a long period of time, sags due to gravity, resulting in a high process defect rate.
  • the present invention aims to solve this problem by improving Korean Patent Registration No. 10-18376471 and suggesting a sliding movement structure using magnetic coupling.
  • the substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention has the following problems.
  • the upper moving part and the lower moving part are moved together to prevent sagging.
  • the present invention provides a substrate transfer device for a load lock chamber that is installed inside a load lock chamber and transfers a seated substrate to the outside of the chamber, comprising: a lower moving part having a lower magnetic coupling part slidingly moving a lower rail part; and an upper moving part disposed on the lower moving part and having an upper magnetic coupling part that slides the upper rail part and a substrate seating part coupled to the upper magnetic coupling part, and when the upper magnetic coupling part slides outward, the lower magnetic coupling part It is moved to a preset position along the lower rail in a state in which the upper magnetic coupling part is magnetically coupled, the lower magnetic coupling part stops at the preset position, and the upper magnetic coupling part may continue to slide outward along the upper rail part.
  • At least a portion of the lower magnetically coupled portion and the upper magnetically coupled portion may be made of a magnetic material.
  • the lower magnetic coupling portion and the upper magnetic coupling portion is provided with a magnetic body seating portion, respectively, the magnetic body may be seated in the magnetic body seating portion.
  • an electromagnet is provided in the lower magnetic coupling part and the upper magnetic coupling part, so that the time of generation of magnetic force and the strength of the magnetic force are adjustable.
  • the stopper magnetic body is provided at a preset position, which is either the outer end of the lower moving part or one side of the load lock chamber, and the lower magnetic coupling part sliding to the outside may be magnetically coupled to the stopper magnetic body and stopped.
  • the lower magnetic coupling portion and the upper magnetic coupling portion may be provided in any one of a structure in contact with each other or a non-contact structure.
  • the upper magnetic coupling part of the upper moving part when the upper moving part sliding outwardly moves in the reverse direction along the upper rail part, the upper magnetic coupling part of the upper moving part is magnetically coupled to each other when positioned on the lower magnetic coupling part of the lower moving part, the lower rail It can slide inward together along the part.
  • the magnetic force of the lower magnetic coupling part and the upper magnetic coupling part is generated, so that they can be moved together.
  • a protrusion is provided on one side of the upper surface of the upper moving part
  • a moving guide having a guide groove in the longitudinal direction inserted into the protrusion and a guide arm having a rotating arm rotatably coupled to the moving guide may be provided.
  • a driving unit coupled to the guide arm to rotate the guide arm may be provided.
  • the substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention has the following effects.
  • FIG. 1 is a perspective view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
  • FIG. 2 is a front view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
  • FIG. 3A is an upper moving part according to the present invention
  • FIG. 3B shows a lower moving part according to the present invention.
  • FIG. 4A is a plan view of the lower moving part according to the present invention
  • FIG. 4B is an upper perspective view of the lower moving part
  • FIG. 4C is a front view of the lower moving part.
  • FIG. 5A is a plan view of the upper moving part according to the present invention
  • FIG. 5B is a lower perspective view of the upper moving part
  • FIG. 5C is a front view of the upper moving part.
  • FIG. 6 shows a state in which the substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention is mounted in the load lock chamber.
  • FIG. 7 shows a cross-sectional state of FIG. 6 .
  • FIGS. 8A and 8B show a state in which the upper moving part and the lower moving part are slid to the outside according to the present invention.
  • 11 and 12 show that in a state in which the lower moving unit is stopped, the upper moving unit continues to slide outward.
  • FIG. 13 shows a state in which the driving unit and the guide arm according to the present invention are coupled to the upper moving unit.
  • the present invention provides a substrate transfer device for a load lock chamber that is installed inside a load lock chamber and transfers a seated substrate to the outside of the chamber, comprising: a lower moving part having a lower magnetic coupling part slidingly moving a lower rail part; and an upper moving part disposed on the lower moving part and having an upper magnetic coupling part that slides the upper rail part and a substrate seating part coupled to the upper magnetic coupling part, and when the upper magnetic coupling part slides outward, the lower magnetic coupling part It is moved to a preset position along the lower rail in a state in which the upper magnetic coupling part is magnetically coupled, the lower magnetic coupling part stops at the preset position, and the upper magnetic coupling part may continue to slide outward along the upper rail part.
  • FIG. 1 is a perspective view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
  • 2 is a front view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
  • the present invention relates to a substrate transfer apparatus for a load lock chamber using magnetic coupling installed inside the load lock chamber 10 and transferring the seated substrate 20 to a main chamber disposed outside the load lock chamber.
  • the present invention includes a lower moving unit 100 having a lower magnetic coupling unit 120 slidingly moving the lower rail unit 110; and an upper moving unit disposed on the lower moving unit 100 and having an upper magnetic coupling unit 220 that slides the upper rail unit 210 and a substrate seating unit 230 coupled to the upper magnetic coupling unit 220 . (200).
  • the lower magnetic coupling unit 120 when the upper magnetic coupling unit 220 and the substrate moving unit 230 coupled thereto slide to the outside, the lower magnetic coupling unit 120 is magnetically coupled to the upper magnetic coupling unit 220. It may move to a preset position along the lower rail part 110 .
  • the lower magnetic coupling unit 120 may stop at a preset position, and the upper magnetic coupling unit 220 may continue to slide outward along the upper rail unit 210 .
  • the present invention is different from the conventional structure in that the upper moving part and the lower moving part are moved together during the first stage operation, and the upper moving part is moved alone during the second stage operation.
  • the moving length moved together and the single moving length of the upper moving part can be adjusted and used according to the situation, such as the weight of the substrate. Due to this structure, it will be possible to minimize the deflection phenomenon due to the gravitational effect of the weight of the substrate.
  • At least a portion of the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 may be formed of a magnetic material.
  • magnetic body seating parts 121 and 221 are provided in the lower magnetic coupling part 120 and the upper magnetic coupling part 220, respectively, and a magnetic body (not shown) may be mounted inside the magnetic body seating part (FIG. 3). Reference).
  • an electromagnet is provided in the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 , so that the generation time of the magnetic force and the strength of the magnetic force are adjustable.
  • a control unit (not shown) for controlling the application of current may be provided. That is, an approach sensor that detects that the substrate approaches or a position sensor that detects that a predetermined position has been reached may be utilized.
  • the stopper magnetic body 130 may be provided at a preset position, which is either the outer end 101 of the lower moving part 100 or one side of the load lock chamber.
  • the lower magnetic coupling unit 120 sliding to the outside may be magnetically coupled to the stopper magnetic body 130 to be stopped.
  • the preset position may be changed in consideration of the weight of the substrate, the simultaneous movement distance of the upper and lower moving parts, the independent movement distance of the upper moving part, and the like.
  • the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 may be provided in any one of a structure that is in contact with each other or a non-contact structure.
  • the non-contact magnetic coupling embodiment is more preferable.
  • the upper magnetic coupling part 220 of the upper moving part is the lower magnetic coupling part of the lower moving part.
  • they are magnetically coupled to each other, and may be slid inward along the lower rail part 110 .
  • the magnetic coupling according to the present invention is performed with an electromagnet
  • the upper moving part 200 having the substrate seating part 230 slides outward
  • the lower magnetic coupling part 120 reaches a preset position.
  • the upper magnetic coupling part 220 can be moved independently.
  • the magnetic coupling according to the present invention is performed with an electromagnet
  • the upper moving part 200 having the substrate seating part 230 moves inward in the reverse direction
  • the upper magnetic coupling part 220 reaches a preset position , by generating a magnetic force of the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220, it is possible to move together.
  • the upper moving unit substrate transfer unit 230 is magnetically coupled.
  • a substrate (not shown) is mounted on the . After the substrate is seated, as shown in FIG. 9 , the lower magnetic coupling part 120 moves to the right (outside the chamber) along the lower rail part 110 in a state magnetically coupled to the upper magnetic coupling part 220 . do.
  • the upper magnetic coupling part 220 does not move alone, but moves together with the lower magnetic coupling part 120, it is possible to more easily support the sagging phenomenon due to gravity of the substrate.
  • the lower magnetic coupling unit 120 is stopped after moving to a preset location.
  • the stopper magnetic body 130 By providing the stopper magnetic body 130 at a preset position, it can be magnetically coupled to the lower magnetic coupling unit 120 to stop it.
  • the preset position may be the outer end 101 of the lower moving unit 100 or one side of the load lock chamber.
  • 11 and 12 show that the upper moving unit continues to slide to the outside of the chamber 10 while the lower moving unit is stopped.
  • the lower magnetic coupling part 120 is in a stationary state, and the upper magnetic coupling part 220 is slidingly moved to the outside of the chamber 10 alone (see FIG. 11 ).
  • the upper magnetic coupling unit 220 continues to move up to a preset independent movement distance.
  • FIG. 13 shows a state in which the driving unit and the guide arm according to the present invention are coupled to the upper moving unit.
  • a protrusion 240 is provided on one side of the upper surface of the upper moving part 200 according to the present invention, and the moving guide 320 and the moving guide 320 having a guide groove 330 in the longitudinal direction inserted into the protrusion 240 .
  • a guide arm 300 having a pivot arm 310 rotatably coupled thereto may be provided.
  • a driving unit 400 coupled to the guide arm 300 to rotate the guide arm may be provided.

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  • Condensed Matter Physics & Semiconductors (AREA)
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Abstract

The present invention relates to a substrate transfer device for a loadlock chamber, using magnetic coupling, wherein the substrate transfer device is installed inside a loadlock chamber (10) and transfers a seated substrate (20) out of the chamber, the substrate transfer device comprising: a lower moving unit (100) including a lower magnetic coupling portion (120) which slidably moves on a lower rail portion (110); and an upper moving unit (200) arranged on the lower moving unit (100) and having an upper magnetic coupling portion (220) sliding on an upper rail portion (210), and a substrate seating portion (230) coupled to the upper magnetic coupling portion (220), wherein, when the upper magnetic coupling portion (220) slides outwards, the lower magnetic coupling portion (120) is moved, while being magnetically coupled to the upper magnetic coupling portion (220), along the lower rail portion (110) to a preset position, and the lower magnetic coupling portion (120) is stopped at the preset position, and the upper magnetic coupling portion (220) continues to slide outwards along the upper rail portion (210).

Description

자력결합을 이용하는 로드락 챔버용 기판 이송 장치Substrate transfer device for load lock chamber using magnetic coupling
본 발명은 로드락 챔버용 기판 이송 장치에 관한 것이다. 구체적으로는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치에 관한 것이다.The present invention relates to a substrate transfer apparatus for a load lock chamber. Specifically, it relates to a substrate transfer apparatus for a load lock chamber using magnetic coupling.
참고로, 본 발명은 경기도 반도체·디스플레이 소재·부품·장비산업 자립화 연구지원사업의 지원으로 수행되었다.For reference, the present invention was carried out with the support of the Gyeonggi-do semiconductor/display material/part/equipment industry independence research support project.
액정 디스플레이 장치, 플라즈마 디스플레이 장치, 반도체 장치들의 제조를 위한 기판 처리 시스템들은 복수 매의 일관해서 처리할 수 있는 클러스터 시스템이 일반적으로 채용되고 있다.In substrate processing systems for manufacturing liquid crystal display devices, plasma display devices, and semiconductor devices, a cluster system capable of consistently processing a plurality of sheets is generally employed.
일반적으로, 클러스터(cluster) 시스템은 반송 로봇(또는 핸들러; handler)과 그 주위에 마련된 복수의 기판 처리 모듈을 포함하는 멀티 챔버형 기판 처리 시스템을 지칭한다. 클러스터 시스템은 반송실(transfer chamber)과 반송실내에 회동이 자유롭게 마련된 반송 로봇을 구비한다. 반송실의 각 변에는 기판의 처리 공정을 수행하기 위한 공정 챔버가 장착된다. In general, a cluster system refers to a multi-chamber type substrate processing system including a transfer robot (or handler) and a plurality of substrate processing modules provided therearound. The cluster system includes a transfer chamber and a transfer robot rotatably provided in the transfer chamber. A process chamber for performing a substrate processing process is mounted on each side of the transfer chamber.
이와 같은 클러스터 시스템은 복수 개의 동시에 처리하거나 또는 여러 공정을 연속해서 진행 할 수 있도록 함으로 기판 처리량을 높이고 있다. 기판 처리량을 높이기 위한 또 다른 노력으로는 하나의 공정 챔버에서 복수 매의 동시에 처리하도록 하여 시간당 기판 처리량을 높이도록 하고 있다.Such a cluster system increases the substrate throughput by simultaneously processing a plurality of processes or continuously performing several processes. Another effort to increase the substrate throughput is to increase the substrate throughput per hour by simultaneously processing a plurality of sheets in one process chamber.
그런데, 공정 챔버가 복수 매의 동시(또는 연속적으로)에 처리하더라도 공정 챔버에 처리 전후의 기판들이 효율적으로 교환되지 못하는 경우 시간적 손실이 발생하게 된다. However, even if the process chamber processes a plurality of sheets simultaneously (or sequentially), time loss occurs when the substrates before and after the process are not efficiently exchanged in the process chamber.
로드락 챔버(loadlock chamber)는 반도체 등의 제조장비 내에서 수동으로 안착된 기판을 이송시키는 역할을 담당하는 장치로서, 기판을 이송하도록 로드락 챔버 내의 반도체 이송장치가 구성된다.A loadlock chamber is a device responsible for transferring a manually seated substrate in a semiconductor manufacturing equipment, and a semiconductor transfer device in the load lock chamber is configured to transfer the substrate.
그러나, 종래기술의 기판 이송장치는 기판의 이송거리가 구동 축을 직선 왕복 운동하는 외측 가이드 블록의 이송거리로 한정되기 때문에, 기판을 원거리 이송하기 위해서는 구동축의 길이가 길어져야 하고, 그에 비례하여 기판 이송장치의 크기도 커져야 하는 문제점이 있다.However, in the prior art substrate transport device, since the transport distance of the substrate is limited to the transport distance of the outer guide block reciprocating the driving shaft in a linear motion, the length of the driving shaft must be increased in order to transport the substrate over a long distance, and the substrate transport is proportional thereto. There is a problem in that the size of the device must also be increased.
그리고, 이와 같은 가이드 블록에 의한 직선 구동은 동작 시작과 멈춤 사이에 진동이 많이 발생하고, 모터구동을 통해 가이드 블록의 이동에 따라 이송되어 구동부의 직접적인 연결로 모터구동에 의한 진동영향을 많이 받을 뿐만 아니라, 오랜 기간 동안 자주 사용되는 안착용 암이 중력에 의해 처짐 현상이 발생되어 공정 불량처리율이 많이 발생하는 문제점이 있다.In addition, linear driving by such a guide block generates a lot of vibration between the start and stop of the operation, and it is transported according to the movement of the guide block through motor driving and is greatly affected by vibration by motor driving due to direct connection of the driving unit. Rather, there is a problem in that the seating arm, which is frequently used for a long period of time, sags due to gravity, resulting in a high process defect rate.
이러한 문제점을 해결하기 위하여, 본 출원인은 한국등록특허 제10-18376471호를 통해, 슬라이딩 이동되는 기판 이동부 구조를 제시한 바 있다.In order to solve this problem, the present applicant has proposed a structure of a sliding-moving substrate moving part through Korean Patent Registration No. 10-18376471.
하지만, 슬라이딩 구조의 경우, 슬라이딩 되는 길이가 길어지면, 먼저 슬라이딩된 부분이 중력의 영향으로 처질 수 있는 문제점이 예상되었다.However, in the case of the sliding structure, if the sliding length is increased, a problem that the first slid portion may sag under the influence of gravity was expected.
이에 본 발명은 한국등록특허 제10-18376471호를 개량하여, 자력결합을 이용한 슬라이딩 이동 구조를 제시하여 이러한 문제점을 해결하고자 한다.Accordingly, the present invention aims to solve this problem by improving Korean Patent Registration No. 10-18376471 and suggesting a sliding movement structure using magnetic coupling.
본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치는 다음과 같은 해결과제를 가진다.The substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention has the following problems.
첫째, 자력결합을 통해, 상부 이동부와 하부 이동부의 결합과 이탈을 용이하게 하고자 한다.First, through magnetic coupling, it is intended to facilitate the coupling and separation of the upper moving part and the lower moving part.
둘째, 일정 구간은 상부 이동부와 하부 이동부를 함께 이동하게 하여, 처짐현상을 방지하고자 한다.Second, in a certain section, the upper moving part and the lower moving part are moved together to prevent sagging.
본 발명의 해결과제는 이상에서 언급한 것들에 한정되지 않으며, 언급되지 아니한 다른 해결과제들은 아래의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다. The problems to be solved of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the following description.
본 발명은 로드락 챔버 내부에 설치되어, 안착된 기판을 챔버 외측으로 이송시키는 로드락 챔버용 기판 이송 장치로서, 하부 레일부를 슬라이딩 이동하는 하부 자력결합부를 갖는 하부 이동부; 및 하부 이동부 위에 배치되며, 상부 레일부를 슬라이딩 이동하는 상부 자력결합부 및 상부 자력결합부와 결합된 기판 안착부를 갖는 상부 이동부를 포함하며, 상부 자력결합부가 외측으로 슬라이딩 이동되면, 하부 자력결합부는 상부 자력결합부와 자력결합된 상태로 하부 레일부를 따라 기 설정된 위치까지 이동되며, 기 설정된 위치에서 하부 자력결합부는 정지하고, 상부 자력결합부는 상부 레일부를 따라 외측으로 계속 슬라이딩 이동될 수 있다.The present invention provides a substrate transfer device for a load lock chamber that is installed inside a load lock chamber and transfers a seated substrate to the outside of the chamber, comprising: a lower moving part having a lower magnetic coupling part slidingly moving a lower rail part; and an upper moving part disposed on the lower moving part and having an upper magnetic coupling part that slides the upper rail part and a substrate seating part coupled to the upper magnetic coupling part, and when the upper magnetic coupling part slides outward, the lower magnetic coupling part It is moved to a preset position along the lower rail in a state in which the upper magnetic coupling part is magnetically coupled, the lower magnetic coupling part stops at the preset position, and the upper magnetic coupling part may continue to slide outward along the upper rail part.
본 발명에 있어서, 상기 하부 자력결합부와 상기 상부 자력결합부는 적어도 일부가 자성체 재질로 구비될 수 있다.In the present invention, at least a portion of the lower magnetically coupled portion and the upper magnetically coupled portion may be made of a magnetic material.
본 발명에 있어서, 상기 하부 자력결합부와 상기 상부 자력결합부에는 각각 자성체 안착부가 구비되고, 상기 자성체 안착부에 자성체가 안착될 수 있다.In the present invention, the lower magnetic coupling portion and the upper magnetic coupling portion is provided with a magnetic body seating portion, respectively, the magnetic body may be seated in the magnetic body seating portion.
본 발명에 있어서, 상기 하부 자력결합부와 상기 상부 자력결합부에는 전자석이 구비되어, 자력의 발생시기와 자력의 강도가 조절가능하다.In the present invention, an electromagnet is provided in the lower magnetic coupling part and the upper magnetic coupling part, so that the time of generation of magnetic force and the strength of the magnetic force are adjustable.
본 발명에 있어서, 하부 이동부의 외측 단부 또는 로드락 챔버의 일측 중 어느 한 쪽인 기 설정된 위치에 스토퍼 자성체가 구비되며, 외측으로 슬라이딩 이동되는 하부 자력결합부는 스토퍼 자성체와 자력결합되어 정지될 수 있다.In the present invention, the stopper magnetic body is provided at a preset position, which is either the outer end of the lower moving part or one side of the load lock chamber, and the lower magnetic coupling part sliding to the outside may be magnetically coupled to the stopper magnetic body and stopped.
본 발명에 있어서, 하부 자력결합부와 상부 자력결합부는 상호 접촉되는 구조 또는 비접촉 구조 중 어느 하나의 구조로 구비될 수 있다.In the present invention, the lower magnetic coupling portion and the upper magnetic coupling portion may be provided in any one of a structure in contact with each other or a non-contact structure.
본 발명에 있어서, 외측으로 슬라이딩 이동된 상부 이동부가 상부 레일부를 따라 내측으로 역 방향 이동되면, 상부 이동부의 상부 자력결합부가 하부 이동부의 하부 자력결합부 상에 위치할 때 상호 자력결합되어, 하부 레일부를 따라 함께 내측으로 슬라이딩 이동될 수 있다.In the present invention, when the upper moving part sliding outwardly moves in the reverse direction along the upper rail part, the upper magnetic coupling part of the upper moving part is magnetically coupled to each other when positioned on the lower magnetic coupling part of the lower moving part, the lower rail It can slide inward together along the part.
청구항 4에 있어서, 기판 안착부를 갖는 상부 이동부가 외측으로 슬라이딩 이동할 때, 상기 하부 자력결합부가 기 설정된 위치에 도달하면, 하부 자력결합부와 상부 자력결합부의 자력을 해제시켜, 상부 자력결합부가 단독 이동되도록 할 수 있다.The method according to claim 4, When the upper moving part having the substrate seating part slides outward, when the lower magnetic coupling part reaches a preset position, the magnetic force of the lower magnetic coupling part and the upper magnetic coupling part is released, and the upper magnetic coupling part moves alone. can make it happen
본 발명에 있어서, 기판 안착부를 갖는 상부 이동부가 내측으로 역방향 이동할 때, 상기 상부 자력결합부가 기 설정된 위치에 도달하면, 하부 자력결합부와 상부 자력결합부의 자력을 발생시켜, 함께 이동되도록 할 수 있다.In the present invention, when the upper moving part having the substrate seating part moves backward inward, when the upper magnetic coupling part reaches a preset position, the magnetic force of the lower magnetic coupling part and the upper magnetic coupling part is generated, so that they can be moved together. .
본 발명에 있어서, 상기 상부 이동부의 상면 일측에는 돌출부가 구비되고, In the present invention, a protrusion is provided on one side of the upper surface of the upper moving part,
상기 돌출부에 삽입되는 길이방향의 가이드 홈을 가진 무빙 가이드 및 무빙 가이드와 회전가능하게 결합된 회동암을 갖는 가이드 암이 구비될 수 있다.A moving guide having a guide groove in the longitudinal direction inserted into the protrusion and a guide arm having a rotating arm rotatably coupled to the moving guide may be provided.
본 발명에 있어서, 상기 가이드 암과 결합되어, 가이드 암을 회동시키는 구동부가 구비될 수 있다.In the present invention, a driving unit coupled to the guide arm to rotate the guide arm may be provided.
본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치는 다음과 같은 효과를 가진다.The substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention has the following effects.
첫째, 자력결합과 모터구동부의 구동력을 이용하여, 상부 이동부와 하부 이동부의 결합과 이탈이 용이한 효과가 있다.First, by using the magnetic force coupling and the driving force of the motor driving part, there is an effect that the coupling and detachment of the upper moving part and the lower moving part are easy.
둘째, 일정 구간은 상부 이동부와 하부 이동부를 함께 이동함으로써, 처짐현상을 방지하는 효과가 있다.Second, by moving the upper moving part and the lower moving part together in a certain section, there is an effect of preventing sagging.
본 발명의 효과는 이상에서 언급된 것들에 한정되지 않으며, 언급되지 아니한 다른 효과들은 아래의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다.Effects of the present invention are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.
도 1은 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치의 사시도이다.1 is a perspective view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
도 2는 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치의 정면도이다.2 is a front view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
도 3a는 본 발명에 따른 상부 이동부이며, 도 3b는 본 발명에 따른 하부 이동부를 나타낸다.3A is an upper moving part according to the present invention, and FIG. 3B shows a lower moving part according to the present invention.
도 4a는 본 발명에 따른 하부 이동부의 평면도이고, 도 4b는 하부 이동부의 상측 사시도이고, 도 4c는 하부 이동부의 정면도이다.4A is a plan view of the lower moving part according to the present invention, FIG. 4B is an upper perspective view of the lower moving part, and FIG. 4C is a front view of the lower moving part.
도 5a는 본 발명에 따른 상부 이동부의 평면도이고, 도 5b는 상부 이동부의 하측 사시도이고, 도 5c는 상부 이동부의 정면도이다.5A is a plan view of the upper moving part according to the present invention, FIG. 5B is a lower perspective view of the upper moving part, and FIG. 5C is a front view of the upper moving part.
도 6은 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치가 로드락 챔버에 장착된 상태를 나타낸다.6 shows a state in which the substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention is mounted in the load lock chamber.
도 7은 도 6의 단면 상태를 나타낸다.FIG. 7 shows a cross-sectional state of FIG. 6 .
도 8a 및 도 8b는 본 발명에 따른 상부 이동부와 하부 이동부가 외측으로 슬라이딩 이동된 상태를 나타낸다.8A and 8B show a state in which the upper moving part and the lower moving part are slid to the outside according to the present invention.
도 9는 상부 이동부와 자력결합된 하부 이동부가 하부 레일부를 따라 외측으로 슬라이딩 이동되는 상태를 나타낸다.9 shows a state in which the upper moving part and the lower moving part magnetically coupled to the upper moving part slide outward along the lower rail part.
도 10은 하부 이동부가 기 설정된 위치에서 정지되는 상태를 나타낸다.10 shows a state in which the lower moving part is stopped at a preset position.
도 11 및 도 12는 하부 이동부가 정지된 상태에서, 상부 이동부는 계속하여 외측으로 슬라이딩 이동되는 것을 나타낸다.11 and 12 show that in a state in which the lower moving unit is stopped, the upper moving unit continues to slide outward.
도 13은 본 발명에 따른 구동부와 가이드 암이 상부 이동부와 결합되는 상태를 나타낸다.13 shows a state in which the driving unit and the guide arm according to the present invention are coupled to the upper moving unit.
본 발명은 로드락 챔버 내부에 설치되어, 안착된 기판을 챔버 외측으로 이송시키는 로드락 챔버용 기판 이송 장치로서, 하부 레일부를 슬라이딩 이동하는 하부 자력결합부를 갖는 하부 이동부; 및 하부 이동부 위에 배치되며, 상부 레일부를 슬라이딩 이동하는 상부 자력결합부 및 상부 자력결합부와 결합된 기판 안착부를 갖는 상부 이동부를 포함하며, 상부 자력결합부가 외측으로 슬라이딩 이동되면, 하부 자력결합부는 상부 자력결합부와 자력결합된 상태로 하부 레일부를 따라 기 설정된 위치까지 이동되며, 기 설정된 위치에서 하부 자력결합부는 정지하고, 상부 자력결합부는 상부 레일부를 따라 외측으로 계속 슬라이딩 이동될 수 있다.The present invention provides a substrate transfer device for a load lock chamber that is installed inside a load lock chamber and transfers a seated substrate to the outside of the chamber, comprising: a lower moving part having a lower magnetic coupling part slidingly moving a lower rail part; and an upper moving part disposed on the lower moving part and having an upper magnetic coupling part that slides the upper rail part and a substrate seating part coupled to the upper magnetic coupling part, and when the upper magnetic coupling part slides outward, the lower magnetic coupling part It is moved to a preset position along the lower rail in a state in which the upper magnetic coupling part is magnetically coupled, the lower magnetic coupling part stops at the preset position, and the upper magnetic coupling part may continue to slide outward along the upper rail part.
이하, 첨부한 도면을 참조하여, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있도록 본 발명의 실시예를 설명한다. 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 용이하게 이해할 수 있는 바와 같이, 후술하는 실시예는 본 발명의 개념과 범위를 벗어나지 않는 한도 내에서 다양한 형태로 변형될 수 있다. 가능한 한 동일하거나 유사한 부분은 도면에서 동일한 도면부호를 사용하여 나타낸다.Hereinafter, with reference to the accompanying drawings, embodiments of the present invention will be described so that those of ordinary skill in the art can easily carry out the present invention. As can be easily understood by those of ordinary skill in the art to which the present invention pertains, the embodiments described below may be modified in various forms without departing from the concept and scope of the present invention. Wherever possible, identical or similar parts are denoted by the same reference numerals in the drawings.
본 명세서에서 사용되는 전문용어는 단지 특정 실시예를 언급하기 위한 것이며, 본 발명을 한정하는 것을 의도하지는 않는다. 여기서 사용되는 단수 형태들은 문구들이 이와 명백히 반대의 의미를 나타내지 않는 한 복수 형태들도 포함한다.The terminology used herein is for the purpose of referring to specific embodiments only, and is not intended to limit the present invention. As used herein, the singular forms also include the plural forms unless the phrases clearly indicate the opposite.
본 명세서에서 사용되는 "포함하는"의 의미는 특정 특성, 영역, 정수, 단계, 동작, 요소 및/또는 성분을 구체화하며, 다른 특정 특성, 영역, 정수, 단계, 동작, 요소, 성분 및/또는 군의 존재나 부가를 제외시키는 것은 아니다.The meaning of "comprising," as used herein, specifies a particular characteristic, region, integer, step, operation, element and/or component, and other specific characteristic, region, integer, step, operation, element, component and/or It does not exclude the presence or addition of groups.
본 명세서에서 사용되는 기술용어 및 과학용어를 포함하는 모든 용어들은 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 일반적으로 이해하는 의미와 동일한 의미를 가진다. 사전에 정의된 용어들은 관련기술문헌과 현재 개시된 내용에 부합하는 의미를 가지는 것으로 추가 해석되고, 정의되지 않는 한 이상적이거나 매우 공식적인 의미로 해석되지 않는다.All terms including technical terms and scientific terms used in this specification have the same meaning as those commonly understood by those of ordinary skill in the art to which the present invention belongs. Terms defined in the dictionary are additionally interpreted as having a meaning consistent with the related art literature and the presently disclosed content, and unless defined, are not interpreted in an ideal or very formal meaning.
이하에서는 도면을 참고하여 본 발명을 설명하고자 한다. 참고로, 도면은 본 발명의 특징을 설명하기 위하여, 일부 과장되게 표현될 수도 있다. 이 경우, 본 명세서의 전 취지에 비추어 해석되는 것이 바람직하다.Hereinafter, the present invention will be described with reference to the drawings. For reference, the drawings may be partially exaggerated in order to explain the features of the present invention. In this case, it is preferable to be interpreted in light of the whole meaning of this specification.
도 1은 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치의 사시도이다. 도 2는 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치의 정면도이다.1 is a perspective view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention. 2 is a front view of a substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention.
본 발명은 로드락 챔버(10) 내부에 설치되어, 안착된 기판(20)을 로드락 챔버 외부에 배치된 메인 챔버로 이송시키는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치에 관한 것이다.The present invention relates to a substrate transfer apparatus for a load lock chamber using magnetic coupling installed inside the load lock chamber 10 and transferring the seated substrate 20 to a main chamber disposed outside the load lock chamber.
본 발명은 하부 레일부(110)를 슬라이딩 이동하는 하부 자력결합부(120)를 갖는 하부 이동부(100); 및 하부 이동부(100) 위에 배치되며, 상부 레일부(210)를 슬라이딩 이동하는 상부 자력결합부(220) 및 상부 자력결합부(220)와 결합된 기판 안착부(230)를 갖는 상부 이동부(200)를 포함한다.The present invention includes a lower moving unit 100 having a lower magnetic coupling unit 120 slidingly moving the lower rail unit 110; and an upper moving unit disposed on the lower moving unit 100 and having an upper magnetic coupling unit 220 that slides the upper rail unit 210 and a substrate seating unit 230 coupled to the upper magnetic coupling unit 220 . (200).
본 발명에 있어서, 상부 자력결합부(220) 및 그에 결합된 기판 이동부(230)가 외측으로 슬라이딩 이동되면, 하부 자력결합부(120)는 상부 자력결합부(220)와 자력결합된 상태로 하부 레일부(110)를 따라 기 설정된 위치까지 이동될 수 있다.In the present invention, when the upper magnetic coupling unit 220 and the substrate moving unit 230 coupled thereto slide to the outside, the lower magnetic coupling unit 120 is magnetically coupled to the upper magnetic coupling unit 220. It may move to a preset position along the lower rail part 110 .
이 경우, 기 설정된 위치에서 하부 자력결합부(120)는 정지하고, 상부 자력결합부(220)는 상부 레일부(210)를 따라 외측으로 계속 슬라이딩 이동될 수 있다.In this case, the lower magnetic coupling unit 120 may stop at a preset position, and the upper magnetic coupling unit 220 may continue to slide outward along the upper rail unit 210 .
종래에는 1단계 동작시 상부 이동부가 일정 위치까지 단독으로 이동된 후, 2단계 동작시 길이연장을 위해 하부 이동부가 이동되는 구조가 있었다. 이러한 종래 구조는 일정한 무게를 가진 기판에 의해 중력이 가해지는 상황에서, 이송길이가 길어지면 이동부가 아래로 처져서, 기판도 아래로 처지는 현상이 발생되었다.In the prior art, there was a structure in which the upper moving part was moved alone to a predetermined position during the first stage operation, and then the lower moving part was moved to extend the length during the second stage operation. In this conventional structure, in a situation in which gravity is applied by a substrate having a constant weight, when the transport length is increased, the moving part sags downward, and a phenomenon in which the substrate sags has occurred.
이에 본 발명은 1단계 동작시 상부 이동부와 하부 이동부를 함께 이동시키고, 2단계 동작시 상부 이동부가 단독으로 이동되는 구조로서 종래 구조와는 차별성을 가진다. 함께 이동시키는 이동길이와 상부 이동부의 단독 이동길이를 기판 무게 등 상황에 따라 조절하여 사용할 수 있을 것이다. 이러한 구조로 인하여, 기판 무게의 중력효과에 기인한 처짐현상을 최소화할 수 있을 것이다.Accordingly, the present invention is different from the conventional structure in that the upper moving part and the lower moving part are moved together during the first stage operation, and the upper moving part is moved alone during the second stage operation. The moving length moved together and the single moving length of the upper moving part can be adjusted and used according to the situation, such as the weight of the substrate. Due to this structure, it will be possible to minimize the deflection phenomenon due to the gravitational effect of the weight of the substrate.
본 발명에 있어서, 하부 자력결합부(120)와 상부 자력결합부(220)는 적어도 일부가 자성체 재질로 구비될 수 있다. In the present invention, at least a portion of the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 may be formed of a magnetic material.
또한, 하부 자력결합부(120)와 상부 자력결합부(220)에는 각각 자성체 안착부(121)(221)가 구비되고, 자성체 안착부 내부에 자성체(미도시)가 안착될 수 있다(도 3 참조).In addition, magnetic body seating parts 121 and 221 are provided in the lower magnetic coupling part 120 and the upper magnetic coupling part 220, respectively, and a magnetic body (not shown) may be mounted inside the magnetic body seating part (FIG. 3). Reference).
나아가, 하부 자력결합부(120)와 상부 자력결합부(220)에는 전자석이 구비되어, 자력의 발생시기와 자력의 강도가 조절가능하다. 전자석 실시예에서는 전류인가를 조절하는 컨트롤부(미도시)가 구비될 수 있다. 즉, 기판이 다가오는 것을 감지하는 접근센서 또는 일정한 위치에 도달한 것을 감지하는 위치센서 등이 활용될 수 있을 것이다.Furthermore, an electromagnet is provided in the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 , so that the generation time of the magnetic force and the strength of the magnetic force are adjustable. In the electromagnet embodiment, a control unit (not shown) for controlling the application of current may be provided. That is, an approach sensor that detects that the substrate approaches or a position sensor that detects that a predetermined position has been reached may be utilized.
본 발명에 있어서, 하부 이동부(100)의 외측 단부(101) 또는 로드락 챔버의 일측 중 어느 한 쪽인 기 설정된 위치에 스토퍼 자성체(130)가 구비될 수 있다. 이 경우, 외측으로 슬라이딩 이동되는 하부 자력결합부(120)는 스토퍼 자성체(130)와 자력결합되어 정지될 수 있다. 기 설정 위치는 기판의 무게, 상부 이동부와 하부 이동부의 동시이동거리, 상부 이동부의 단독이동거리 등을 고려하여 설정값이 변경될 수 있을 것이다.In the present invention, the stopper magnetic body 130 may be provided at a preset position, which is either the outer end 101 of the lower moving part 100 or one side of the load lock chamber. In this case, the lower magnetic coupling unit 120 sliding to the outside may be magnetically coupled to the stopper magnetic body 130 to be stopped. The preset position may be changed in consideration of the weight of the substrate, the simultaneous movement distance of the upper and lower moving parts, the independent movement distance of the upper moving part, and the like.
본 발명에 있어서, 하부 자력결합부(120)와 상부 자력결합부(220)는 상호 접촉되는 구조 또는 비접촉 구조 중 어느 하나의 구조로 구비될 수 있다. 다만, 접촉 자력결합시, 접촉에 따른 충격 또는 마모 등의 문제가 있을 수 있으므로, 비접촉 자력결합 실시예가 더욱 바람직하다.In the present invention, the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220 may be provided in any one of a structure that is in contact with each other or a non-contact structure. However, since there may be problems such as impact or wear due to contact during contact magnetic coupling, the non-contact magnetic coupling embodiment is more preferable.
본 발명에 있어서, 외측으로 슬라이딩 이동된 상부 이동부(200)가 상부 레일부(210)를 따라 내측으로 역 방향 이동되면, 상부 이동부의 상부 자력결합부(220)가 하부 이동부의 하부 자력결합부(120) 상에 위치할 때 상호 자력결합되어, 하부 레일부(110)를 따라 함께 내측으로 슬라이딩 이동될 수 있다.In the present invention, when the upper moving part 200 slid to the outside moves in the reverse direction along the upper rail part 210, the upper magnetic coupling part 220 of the upper moving part is the lower magnetic coupling part of the lower moving part. When positioned on the 120 , they are magnetically coupled to each other, and may be slid inward along the lower rail part 110 .
본 발명에 따른 자력결합이 전자석으로 수행되는 실시예의 경우, 기판 안착부(230)를 갖는 상부 이동부(200)가 외측으로 슬라이딩 이동할 때, 상기 하부 자력결합부(120)가 기 설정된 위치에 도달하면, 하부 자력결합부(120)와 상부 자력결합부(220)의 자력을 해제시켜, 상부 자력결합부(220)가 단독 이동되도록 할 수 있다.In the case of the embodiment in which the magnetic coupling according to the present invention is performed with an electromagnet, when the upper moving part 200 having the substrate seating part 230 slides outward, the lower magnetic coupling part 120 reaches a preset position. When the magnetic force of the lower magnetic coupling part 120 and the upper magnetic coupling part 220 is released, the upper magnetic coupling part 220 can be moved independently.
본 발명에 따른 자력결합이 전자석으로 수행되는 실시예의 경우, 기판 안착부(230)를 갖는 상부 이동부(200)가 내측으로 역방향 이동할 때, 상부 자력결합부(220)가 기 설정된 위치에 도달하면, 하부 자력결합부(120)와 상부 자력결합부(220)의 자력을 발생시켜, 함께 이동되도록 할 수 있다. In the case of the embodiment in which the magnetic coupling according to the present invention is performed with an electromagnet, when the upper moving part 200 having the substrate seating part 230 moves inward in the reverse direction, the upper magnetic coupling part 220 reaches a preset position , by generating a magnetic force of the lower magnetic coupling unit 120 and the upper magnetic coupling unit 220, it is possible to move together.
이하에서는 본 발명에 따른 자력결합을 이용하는 로드락 챔버용 기판 이송 장치의 작동을 일 실시예를 통해, 보다 상세히 살펴보고자 한다.Hereinafter, the operation of the substrate transfer apparatus for a load lock chamber using magnetic coupling according to the present invention will be described in more detail through an embodiment.
도 9는 상부 이동부와 자력결합된 하부 이동부가 하부 레일부를 따라 외측으로 슬라이딩 이동되는 상태를 나타낸다. 9 shows a state in which the upper moving part and the lower moving part magnetically coupled to the upper moving part slide outward along the lower rail part.
도 9의 왼쪽에 상부 이동부(200)의 상부 자력결합부(220)와 하부 이동부(100)의 하부 자력결합부(120)가 상호 자력결합된 상태에서, 상부 이동부의 기판 이송부(230)에 기판(미도시)이 안착된다. 기판이 안착된 후, 도 9에 도시된 바와 같이, 하부 자력결합부(120)는 상부 자력결합부(220)와 자력결합된 상태로 하부 레일부(110)를 따라 우측(챔버외측)으로 이동된다.In a state where the upper magnetic coupling unit 220 of the upper moving unit 200 and the lower magnetic coupling unit 120 of the lower moving unit 100 are magnetically coupled to each other on the left side of FIG. 9 , the upper moving unit substrate transfer unit 230 is magnetically coupled. A substrate (not shown) is mounted on the . After the substrate is seated, as shown in FIG. 9 , the lower magnetic coupling part 120 moves to the right (outside the chamber) along the lower rail part 110 in a state magnetically coupled to the upper magnetic coupling part 220 . do.
상부 자력결합부(220)가 단독 이동되지 않고, 하부 자력결합부(120)와 함께 이동되므로, 기판의 중력에 의한 처짐 현상을 더욱 용이하게 지지할 수 있게 된다.Since the upper magnetic coupling part 220 does not move alone, but moves together with the lower magnetic coupling part 120, it is possible to more easily support the sagging phenomenon due to gravity of the substrate.
도 10은 하부 이동부가 기 설정된 위치에서 정지되는 상태를 나타낸다.10 shows a state in which the lower moving part is stopped at a preset position.
하부 자력결합부(120)는 기 설정된 위치(pre-set location)까지 이동된 후 정지하게 된다. 기 설정된 위치에 스토퍼 자성체(130)를 구비하여, 하부 자력결합부(120)와 자력결합을 시켜 정지시킬 수 있다. 여기서 기 설정된 위치는 하부 이동부(100)의 외측 단부(101) 또는 로드락 챔버의 일측이 가능할 수 있다.The lower magnetic coupling unit 120 is stopped after moving to a preset location. By providing the stopper magnetic body 130 at a preset position, it can be magnetically coupled to the lower magnetic coupling unit 120 to stop it. Here, the preset position may be the outer end 101 of the lower moving unit 100 or one side of the load lock chamber.
이 상태까지 하부 자력결합부(120)와 상부 자력결합부(220)는 자력결합으로 함께 이동되었다.Up to this state, the lower magnetic coupling part 120 and the upper magnetic coupling part 220 were moved together by magnetic coupling.
도 11 및 도 12는 하부 이동부가 정지된 상태에서, 상부 이동부는 계속하여 챔버(10) 외측으로 슬라이딩 이동되는 것을 나타낸다.11 and 12 show that the upper moving unit continues to slide to the outside of the chamber 10 while the lower moving unit is stopped.
기 설정된 위치에서, 하부 자력결합부(120)는 정지한 상태이고, 상부 자력결합부(220)는 단독으로 챔버(10) 외측으로 슬라이딩 이동된다(도 11 참조). 상부 자력결합부(220)는 기 설정된 단독 이동거리까지 계속 이동된다.At the preset position, the lower magnetic coupling part 120 is in a stationary state, and the upper magnetic coupling part 220 is slidingly moved to the outside of the chamber 10 alone (see FIG. 11 ). The upper magnetic coupling unit 220 continues to move up to a preset independent movement distance.
한편, 본 발명에 따른 상부 이동부를 이동시키는 다양한 실시예가 가능하다. 본 명세서에서는 길이방향의 가이드 홈을 가진 가이드 암을 구동부로 구동시켜, 상부 이동부를 이동시키는 실시예를 설명하고자 한다.On the other hand, various embodiments of moving the upper moving part according to the present invention are possible. In this specification, an embodiment in which the upper moving part is moved by driving a guide arm having a guide groove in the longitudinal direction with a driving part will be described.
도 13은 본 발명에 따른 구동부와 가이드 암이 상부 이동부와 결합되는 상태를 나타낸다.13 shows a state in which the driving unit and the guide arm according to the present invention are coupled to the upper moving unit.
본 발명에 따른 상부 이동부(200)의 상면 일측에는 돌출부(240)가 구비되고, 상기 돌출부(240)에 삽입되는 길이방향의 가이드 홈(330)을 가진 무빙 가이드(320) 및 무빙 가이드(320)와 회전가능하게 결합된 회동암(310)을 갖는 가이드 암(300)이 구비될 수 있다.A protrusion 240 is provided on one side of the upper surface of the upper moving part 200 according to the present invention, and the moving guide 320 and the moving guide 320 having a guide groove 330 in the longitudinal direction inserted into the protrusion 240 . ) and a guide arm 300 having a pivot arm 310 rotatably coupled thereto may be provided.
또한, 가이드 암(300)과 결합되어, 가이드 암을 회동시키는 구동부(400)가 구비될 수 있다.In addition, a driving unit 400 coupled to the guide arm 300 to rotate the guide arm may be provided.
본 명세서에서 설명되는 실시예와 첨부된 도면은 본 발명에 포함되는 기술적 사상의 일부를 예시적으로 설명하는 것에 불과하다. 따라서, 본 명세서에 개시된 실시예들은 본 발명의 기술적 사상을 한정하기 위한 것이 아니라 설명하기 위한 것이므로, 이러한 실시예에 의하여 본 발명의 기술 사상의 범위가 한정되는 것은 아님은 자명하다. 본 발명의 명세서 및 도면에 포함된 기술적 사상의 범위 내에서 당업자가 용이하게 유추할 수 있는 변형 예와 구체적인 실시 예는 모두 본 발명의 권리범위에 포함되는 것으로 해석되어야 할 것이다.The embodiments described in this specification and the accompanying drawings are merely illustrative of some of the technical ideas included in the present invention. Accordingly, since the embodiments disclosed in the present specification are for explanation rather than limitation of the technical spirit of the present invention, it is obvious that the scope of the technical spirit of the present invention is not limited by these embodiments. Modifications and specific embodiments that can be easily inferred by those skilled in the art within the scope of the technical spirit included in the specification and drawings of the present invention should be interpreted as being included in the scope of the present invention.

Claims (11)

  1. 로드락 챔버 내부에 설치되어, 안착된 기판을 챔버 외측으로 이송시키는 로드락 챔버용 기판 이송 장치로서, A substrate transfer device for a load lock chamber that is installed inside the load lock chamber and transfers a seated substrate to the outside of the chamber, comprising:
    하부 레일부를 슬라이딩 이동하는 하부 자력결합부를 갖는 하부 이동부; 및 a lower moving part having a lower magnetic coupling part slidingly moving the lower rail part; and
    하부 이동부 위에 배치되며, 상부 레일부를 슬라이딩 이동하는 상부 자력결합부 및 상부 자력결합부와 결합된 기판 안착부를 갖는 상부 이동부를 포함하며,It is disposed on the lower moving part, and includes an upper moving part having an upper magnetic coupling part slidingly moving the upper rail part and a substrate seating part coupled to the upper magnetic coupling part,
    상부 자력결합부가 외측으로 슬라이딩 이동되면, 하부 자력결합부는 상부 자력결합부와 자력결합된 상태로 하부 레일부를 따라 기 설정된 위치까지 이동되며, When the upper magnetic coupling part is slid to the outside, the lower magnetic coupling part is moved to a preset position along the lower rail in a state magnetically coupled to the upper magnetic coupling part,
    기 설정된 위치에서 하부 자력결합부는 정지하고, 상부 자력결합부는 상부 레일부를 따라 외측으로 계속 슬라이딩 이동되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that the lower magnetic coupling part stops at a preset position, and the upper magnetic coupling part continues to slide outward along the upper rail part.
  2. 청구항 1에 있어서, The method according to claim 1,
    상기 하부 자력결합부와 상기 상부 자력결합부는 적어도 일부가 자성체 재질로 구비되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.The substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that at least a portion of the lower magnetic coupling part and the upper magnetic coupling part are made of a magnetic material.
  3. 청구항 1에 있어서, The method according to claim 1,
    상기 하부 자력결합부와 상기 상부 자력결합부에는 각각 자성체 안착부가 구비되고, 상기 자성체 안착부에 자성체가 안착되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that the lower magnetic coupling part and the upper magnetic coupling part are provided with a magnetic body seating part, respectively, and a magnetic body is mounted in the magnetic body seating part.
  4. 청구항 1에 있어서, The method according to claim 1,
    상기 하부 자력결합부와 상기 상부 자력결합부에는 전자석이 구비되어, 자력의 발생시기와 자력의 강도가 조절가능한 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.Electromagnets are provided in the lower magnetic coupling part and the upper magnetic coupling part, so that the generation time and strength of magnetic force can be adjusted.
  5. 청구항 1에 있어서, The method according to claim 1,
    하부 이동부의 외측 단부 또는 로드락 챔버의 일측 중 어느 한 쪽인 기 설정된 위치에 스토퍼 자성체가 구비되며,A stopper magnetic body is provided at a preset position that is either the outer end of the lower moving part or one side of the load lock chamber,
    외측으로 슬라이딩 이동되는 하부 자력결합부는 스토퍼 자성체와 자력결합되어 정지되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transport apparatus for a load lock chamber using magnetic coupling, characterized in that the lower magnetic coupling part sliding outward is magnetically coupled to the stopper magnetic body and stopped.
  6. 청구항 1에 있어서, The method according to claim 1,
    하부 자력결합부와 상부 자력결합부는 상호 접촉되는 구조 또는 비접촉 구조 중 어느 하나의 구조로 구비되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that the lower magnetic coupling part and the upper magnetic coupling part are provided in any one of a mutually contacting structure and a non-contacting structure.
  7. 청구항 1에 있어서, The method according to claim 1,
    외측으로 슬라이딩 이동된 상부 이동부가 상부 레일부를 따라 내측으로 역 방향 이동되면,When the upper moving part slid to the outside moves in the reverse direction along the upper rail part,
    상부 이동부의 상부 자력결합부가 하부 이동부의 하부 자력결합부 상에 위치할 때 상호 자력결합되어, 하부 레일부를 따라 함께 내측으로 슬라이딩 이동되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.When the upper magnetic coupling part of the upper moving part is positioned on the lower magnetic coupling part of the lower moving part, they are magnetically coupled to each other and slide inward along the lower rail part.
  8. 청구항 4에 있어서,5. The method of claim 4,
    기판 안착부를 갖는 상부 이동부가 외측으로 슬라이딩 이동할 때,When the upper moving part having the substrate seating part slides outward,
    상기 하부 자력결합부가 기 설정된 위치에 도달하면, When the lower magnetic coupling part reaches a preset position,
    하부 자력결합부와 상부 자력결합부의 자력을 해제시켜, 상부 자력결합부가 단독 이동되도록 하는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that by releasing the magnetic force of the lower magnetic coupling part and the upper magnetic coupling part, the upper magnetic coupling part is moved independently.
  9. 청구항 4에 있어서,5. The method of claim 4,
    기판 안착부를 갖는 상부 이동부가 내측으로 역방향 이동할 때,When the upper moving part having the substrate seating part moves backward inward,
    상기 상부 자력결합부가 기 설정된 위치에 도달하면, When the upper magnetic coupling part reaches a preset position,
    하부 자력결합부와 상부 자력결합부의 자력을 발생시켜, 함께 이동되도록 하는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that the lower magnetic coupling part and the upper magnetic coupling part generate magnetic force to move together.
  10. 청구항 1에 있어서,The method according to claim 1,
    상기 상부 이동부의 상면 일측에는 돌출부가 구비되고, A protrusion is provided on one side of the upper surface of the upper moving part,
    상기 돌출부에 삽입되는 길이방향의 가이드 홈을 가진 무빙 가이드 및 무빙 가이드와 회전가능하게 결합된 회동암을 갖는 가이드 암이 구비되는 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that it comprises a moving guide having a guide groove in the longitudinal direction inserted into the protrusion and a guide arm having a pivot arm rotatably coupled to the moving guide.
  11. 청구항 10에 있어서,11. The method of claim 10,
    상기 가이드 암과 결합되어, 가이드 암을 회동시키는 구동부가 구비된 것을 특징으로 하는 자력결합을 이용하는 로드락 챔버용 기판 이송 장치.A substrate transfer apparatus for a load lock chamber using magnetic coupling, characterized in that it is coupled to the guide arm and provided with a driving unit for rotating the guide arm.
PCT/KR2021/016690 2020-12-24 2021-11-16 Substrate transfer device for loadlock chamber, using magnetic coupling WO2022139178A1 (en)

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KR1020200183131A KR102386972B1 (en) 2020-12-24 2020-12-24 Semiconductor Substrate Carrying Apparatus for Loadlock Chamer Using Magnetic Coupling
KR10-2020-0183131 2020-12-24

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