KR101837647B1 - Semiconductor substrate carrying apparatus for loadlock chamber - Google Patents

Semiconductor substrate carrying apparatus for loadlock chamber Download PDF

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Publication number
KR101837647B1
KR101837647B1 KR1020160011544A KR20160011544A KR101837647B1 KR 101837647 B1 KR101837647 B1 KR 101837647B1 KR 1020160011544 A KR1020160011544 A KR 1020160011544A KR 20160011544 A KR20160011544 A KR 20160011544A KR 101837647 B1 KR101837647 B1 KR 101837647B1
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South Korea
Prior art keywords
guide
substrate
substrate transfer
load lock
lock chamber
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KR1020160011544A
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Korean (ko)
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KR20170091215A (en
Inventor
정재학
최재호
김순철
황인천
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(주)씨엔원
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Priority to KR1020160011544A priority Critical patent/KR101837647B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02—Sensing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/905—Control arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04—Detection means
    • B65G2203/042—Sensors

Abstract

The present invention relates to a substrate transfer apparatus for a load lock chamber, comprising: a substrate transfer unit installed in a load lock chamber for transferring a substrate in a sliding movement; A guide holder which is fastened and protruded above the substrate transfer section; A guide arm having a guide hole formed in the guide holder; And a motor driving unit installed to be spaced apart from a side surface of the substrate transfer unit and rotating the guide arm, wherein the guide holder moves linearly along the guide hole by the rotation of the guide arm, thereby linearly transferring the substrate transfer unit. do.
The present invention provides a substrate transfer apparatus for a load lock chamber capable of increasing space utilization, stably transferring a substrate, and minimizing deflection due to vibration and gravity during substrate transfer.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate transfer apparatus for a load lock chamber,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus for a load lock chamber capable of preventing or minimizing deflection due to vibration and gravity during substrate transfer, .

2. Description of the Related Art In recent years, a liquid crystal display device, a plasma display device, and a substrate processing system for manufacturing semiconductor devices have generally employed a cluster system capable of processing a plurality of jobs.

Generally, a cluster system refers to a multi-chamber type substrate processing system that includes a carrier robot (or handler) and a plurality of substrate processing modules provided therearound.

The cluster system includes a transfer chamber and a transfer robot provided freely rotatable in the transfer chamber. At each side of the transport chamber, a process chamber for carrying out the processing process of the substrate is mounted. Such a cluster system increases the throughput of the substrate by allowing a plurality of processes to be performed simultaneously or sequentially. Another effort to increase the substrate throughput is to simultaneously process a plurality of substrates in one process chamber to increase the substrate throughput per hour.

However, even if a plurality of process chambers are processed simultaneously (or continuously), a time loss occurs when the substrates before and after the process can not be efficiently exchanged in the process chamber.

The load lock chamber is a device for transferring a manually seated substrate in a manufacturing equipment such as a semiconductor, and a semiconductor transfer device in the load lock chamber is configured to transfer the substrate.

However, since the transfer distance of the substrate of the prior art is limited to the transfer distance of the outer guide block which linearly reciprocates the drive shaft, the length of the drive shaft must be long to transport the substrate at a long distance, The size of the apparatus must be increased.

The linear motion by the guide block generates a lot of vibration between the start and stop, and is transmitted according to the movement of the guide block through the motor drive, and is directly affected by the vibration of the motor driven by the direct connection of the drive block However, there is a problem in that an inadequate wearing arm which is frequently used for a long period of time is deflected by gravity, resulting in a high processing failure rate.

Korean Patent Publication No. 10-2005-0089653 (Published on September 08, 2005) Korean Patent Publication No. 10-2007-01080047 (Published on November 08, 2007)

The substrate transfer apparatus for a load lock chamber according to the present invention has the following problems.

First, it is intended to provide a substrate transfer apparatus for a load lock chamber capable of increasing space utilization and stably transferring a substrate.

Second, the present invention is to provide a substrate transfer apparatus for a load lock chamber capable of minimizing sagging due to vibration and gravity during substrate transfer.

Third, the present invention is to provide a substrate transfer apparatus for a load lock chamber capable of increasing the driving efficiency of substrate transfer and precisely and accurately transferring the substrate.

The present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus and method for controlling the same.

According to an aspect of the present invention, there is provided a substrate processing apparatus including: a substrate transfer unit installed in a load lock chamber for transferring a substrate by sliding movement; A guide holder which is fastened and protruded above the substrate transfer section; A guide arm having a guide hole formed in the guide holder; And a motor driving unit installed to be spaced apart from the side surface of the substrate transfer unit and rotating the guide arm. The guide holder moves linearly along the guide hole by the rotation of the guide arm, thereby linearly transferring the substrate transfer unit.

Here, the substrate transfer unit may include: a rail cylinder installed in the load lock chamber; A moving body slidingly moved along the rail cylinder; And a substrate seating part extending toward the front side of the moving body, and the rail cylinder is preferably a multi-stage cylinder structure capable of moving stepwise by a constant movement distance.

Preferably, the guide holder is structured such that a part of the lower end thereof is bolted to an upper portion of the moving body, and a flexible flange bearing is mounted on the outer side of the guide holder, It is preferable that at least one grip groove is formed at the edge of the cap.

In addition, the guide arm includes: a pivot arm extending in connection with the motor drive shaft; And a moving guide which is coupled to an end of the rotating arm and has a guide hole formed in the longitudinal direction thereof. The guide hole of the moving guide may be any one of a linear shape, a curved shape, and a curved shape desirable.

The motor driving unit may further include a sensor for detecting rotation of the motor, and may further include a substrate detection sensor spaced apart from a side surface of the substrate transfer unit.

The substrate transfer apparatus for a load lock chamber according to the present invention has the following effects.

First, the present invention provides a substrate transfer apparatus for a new load lock chamber that linearly transfers a substrate by the rotation of a guide arm.

Second, the present invention provides a substrate transfer apparatus for a load lock chamber capable of minimizing sagging due to vibration and gravity by a power transmission coupling structure of a moving guide and a guide holder.

Third, the present invention can improve the efficiency of space utilization in the load lock chamber, and can change the curved angle or curvature of the guide hole shape variously, A substrate transfer apparatus for a lock chamber is provided.

The effects of the present invention are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the following description.

1 is a view showing a configuration of a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention.
2 is a schematic view illustrating a driving principle of a substrate transfer apparatus according to an embodiment of the present invention.
3 is a side view showing the configuration of a substrate transferring part applied to a substrate transferring apparatus for a load lock chamber according to an embodiment of the present invention.
4 is a schematic diagram illustrating the use of a guide holder applied to a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention.
FIG. 5 is a schematic view showing the mounting of a guide holder applied to a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention.
6 is a view showing various examples of moving guides applied to a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention.
7 to 9 are schematic views of power transmission according to the shape of a moving guide applied to an embodiment of the present invention.

Further objects, features and advantages of the present invention will become more apparent from the following detailed description and the accompanying drawings.

Before describing the present invention in detail, it is to be understood that the present invention is capable of various modifications and various embodiments, and the examples described below and illustrated in the drawings are intended to limit the invention to specific embodiments It is to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Further, terms such as " part, "" unit," " module, "and the like described in the specification may mean a unit for processing at least one function or operation.

In the following description of the present invention with reference to the accompanying drawings, the same components are denoted by the same reference numerals regardless of the reference numerals, and redundant explanations thereof will be omitted. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a view showing a configuration of a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention, and FIG. 2 is a schematic view showing a principle of operation of a substrate transfer apparatus according to an embodiment of the present invention. As shown in FIG. 1, a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention includes: a substrate transfer unit 100 installed in a load lock chamber for transferring a substrate by sliding movement; A guide holder 200 fastened and protruded above the substrate transfer unit 100; A guide arm 300 having a guide hole 335 formed in the guide holder 200; And a motor driving unit 400 mounted on the side of the substrate transfer unit 100 and rotating the guide arm 300. The guide holder 200 is rotated by the rotation of the guide arm 300, And the substrate transferring unit 100 is linearly transferred while moving along the guide hole 335.

2, the embodiment of the present invention is a transfer apparatus for transferring a substrate from a load lock chamber to a process chamber or an outer chamber, in which the transfer is performed by a conventional robot or a linear transfer The motor drive unit 400 mounted on the side and the substrate transfer unit 100 are connected by a guide arm 300 so that the substrate transfer unit 100 is rotated by the rotation of the guide arm 300, To transfer the substrate to a process chamber or an outer chamber.

Here, the substrate refers to a general term of substrates such as wafers, glass, and plastics used in electronic devices in the fields of semiconductors, displays, and solar cells.

The substrate transfer apparatus according to the embodiment of the present invention minimizes sagging due to vibration and gravity which are frequently generated in the conventional substrate transfer apparatus for a load lock chamber, Providing a device capable of precisely and precisely transporting a substrate by increasing driving efficiency by various structures.

3 is a side view showing a configuration of a substrate transferring part 100 applied to a substrate transferring apparatus for a load lock chamber according to an embodiment of the present invention. 3, the substrate transfer unit 100 according to the embodiment of the present invention includes a rail cylinder 110 installed in a load lock chamber, a moving body 130 slidably moved along a rail cylinder 110, And a substrate seating part 140 extending forward from the moving body 130 to seat the substrate.

As shown in Figs. 2 and 3, the rail cylinder 110 is provided with a rod-like cylinder on both sides thereof, and both cylinders are inserted into the cylinder moving body 130, As shown in FIG. Such a cylinder guide rail structure not only stably moves linearly but also has an advantage of being simple in construction and easy to manufacture.

In addition, the rail cylinder 110 used in the embodiment of the present invention is preferably a multi-stage cylinder structure that can be moved stepwise by a constant movement distance. That is, as shown in FIG. 2 and FIG. 3, a structure in which the multi-stage rail cylinder 110 and the moving body 130 are fastened and slidingly moved is proposed instead of a single rail cylinder 110 and a moving body 130 structure do.

The structure of the multi-stage rail cylinder 110 is such that a single-stage rail cylinder 110 with a predetermined distance is provided at the bottom of the load lock chamber, a rail cylinder 110 structure is formed thereon, Sliding combined structure.

In order to transfer the substrate while the external chamber and the load lock chamber are connected and the substrate is maintained in a constant vacuum state, the moving space of the transfer apparatus for transferring the substrate in the load lock chamber is limited, and the external chamber or the process chamber and the load lock There is a dead space due to the connection space of the chamber, so that there is a problem that the cylinder rail is insufficient relative to the substrate transfer distance.

Therefore, in the embodiment of the present invention, such a multi-stage rail cylinder 110 structure has a multi-stage structure in order to transfer a predetermined distance in a stepwise manner, thereby ensuring a sufficient substrate transfer distance, It is possible to provide a transfer device capable of not only increasing the utilization of space for utilization but also stably transferring the substrate.

FIG. 4 is a schematic view illustrating the use of a guide holder 200 applied to a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention, and FIG. 5 is a cross- Is a schematic view of the attachment of the guide holder (200).

4, the guide holder 200 includes a guide arm inserted into a guide hole 335 of a guide arm 300 and having a structure in which the guide holder 200 is fastened and protruded above the substrate transferring part 100, And the moving guide 330 is linearly moved by the rotation of the guide 300.

Here, it is preferable that the guide holder 200 is structured such that a part of the lower end of the guide holder 200 is fastened to the upper part of the moving body 130. This is because the guide holder 200 is fastened to be detachable It is preferable that the bolt is bolted so that the lower end of the bolt is easily inserted into the nut groove formed at the upper end of the moving body 130 by rotation.

4, the guide holder 200 includes a cap 210 and a body 230 extending downward from the center of the cap 210, and at least one part of the cap 210 has a grip groove 215 are preferably formed. The reason why it is preferable to form the T shape in the shape of the cap 210 and the body 230 is that the lower end of the guide holder 200 is inserted into the upper end of the moving guide 330, Shaped guide hole 335 of the cap 300 so that the cap 210 performs a step function so that the guide arm 300 can be prevented from deviating to the upper end of the bolt .

The structure of the cap 210 of the guide holder 200 as described above prevents not only the upward and downward departure of the guide 210 but also the guide arm 300 stably and stably moves the moving guide 330 It is possible to prevent the moving guide 330 and the substrate seating portion 140 connected to the substrate from being sagged downward due to gravity, thereby reducing the process defects There is an advantage that can be made.

Further, as shown in FIG. 4, it is preferable that the grip groove 215 is formed in at least one part of the rim of the cap 210 of the guide holder 200. This is because it is preferable that the bolt-type guide holder 200 is formed with a grip groove 215 which is easy to grip on a part of the upper part of the cap 210 which is exposed to facilitate the detachment of the upper part of the moving body 130 .

5, it is preferable that a bearing 250 made of a soft material such as plastic is mounted on the outer surface of the guide holder 200. This is because the guide holder 200 and the guide hole 335, The friction and vibration are increased due to the sliding movement of the guide holder 200 due to the rotation of the guide arm 300 and the probability that the contact portion wears becomes higher as the operation frequency is higher, Is mounted on the side surface of the guide hole 335 and the guide holder 200 moves along the guide hole 335, friction and vibration can be minimized.

The use of a soft material such as plastic or the like is effective in that a guide arm 200 between a guide holder 200 made of a metal and a guide arm 300 is formed in a guide holder 200 The pressure is buffered and the flange bearing 250 is easily rotated, thereby minimizing the friction, thereby improving the motion conversion efficiency for converting the rotational motion into the linear motion. Further, the guide holder 200 is preferably made of stainless steel (SUS), but it can be made of any material having high durability and strength.

6 is a view showing various examples of a moving guide 330 applied to a substrate transfer apparatus for a load lock chamber according to an embodiment of the present invention. As shown in FIG. 6, the moving guide 330 applied to the embodiment of the present invention has a structure in which guide holes 335 of elliptical rings are formed in the longitudinal direction of the rod center. The structure is such that the moving body 130 is linearly moved in accordance with the rotation of the moving guide 330 on which the guide holder 200 spans through the guide hole 335 having the shape of an elliptical ring .

As shown in FIG. 6, the guide hole 335 of the moving guide 330 applied to the embodiment of the present invention may have various shapes such as a straight line, a curved line, and a curved line. In the case of the linear type, a guide hole 335 of a linear oval shape in the longitudinal direction may be formed in a part of the upper end of the rod-shaped moving guide 330, and a guide hole 335 having a curved structure in which the center part is bent in one direction And the guide hole 335 may be formed with a curved guide hole 335 having a predetermined radius of curvature.

As shown in Fig. 6, the linear moving guide 330 has an advantage of being easy to manufacture. In the case of the curved shape and the curved shape, the traveling direction and the load direction of the force are more linear than each other, There are advantages.

7 to 9 are schematic views of power transmission according to the shape of the moving guide 330 applied to the embodiment of the present invention. FIG. 8 is a power transmission model diagram when the moving guide 330 is a straight type, FIG. 8 is a power transmission model diagram when the moving guide 330 is a curved type, FIG. 9 is a power transmission model diagram when the moving guide 330 is curved, It is a schematic diagram.

7 (a) and 7 (c)), when the guide of the moving guide 330 and the guide holder 200 are not in a vertical line position, When the guide hole 335 and the axis of the moving guide 330 are positioned on a vertical line, the traveling direction and the load direction of the force are disagreed by the slope of the oblique line to disperse the force, The load direction of the power coincides with each other, and the power transmission efficiency varies greatly.

As shown in FIG. 8, in the case of the bent type, when the moving direction and the load direction of the force coincide with each other due to the bent structure at the center of the moving guide 330, they appear at specific positions inclined from the central axis (FIG. 7 (a) and 7 (b)), and the other positions (Figs. 7 (a) and 7 (b)) show the power transmission structure in which the traveling direction and the load direction of the force are shifted from each other. Such a structure is advantageous in that the deviation of the power transmission efficiency according to the traveling direction and the load direction of the force is smaller than that of the linear structure.

As shown in FIG. 9, in the case of the curved shape, when the direction of load and the direction of movement of the moving guide are the same because of the curved shape of the guide hole 335 of the moving guide 330 having a constant radius of curvature, 9 (a) and 9 (b)), but in the other positions (Figs. 9 (a) and 9 (b)) the same as in the embodiment of Fig. 8 in which the power transmission structure in which the traveling direction and the load- , And the advantage that the deviation of the power transmission efficiency according to the traveling direction and the load direction of the force is smaller than the straight type structure is also the same as the embodiment of Fig.

8 and 9, the efficiency of the power transmission for converting the rotational motion of the motor driving unit 400 into the linear motion of the moving body 130 is improved and the efficiency of the power transmission of the guide holder 200 and the moving guide 330 The shape of the guide hole 335 is curved or the curvature is changed variously, so that an optimum design suitable for the size or the environment of the apparatus can be achieved.

In another embodiment of the present invention, the substrate transfer apparatus for a load lock chamber may further include a substrate detection sensor 500 for detecting a substrate on a side of the substrate transfer section 100, as shown in FIG. 1 . This is because the substrate detection sensor 500 can accurately confirm whether the substrate is seated in the substrate seating portion 140 when the substrate is transferred and can sense the substrate even if the substrate is detached due to a specific situation and use it as a signal to stop the operation of the system Because it performs important functions in the semiconductor process. It is preferable that the substrate sensor uses a non-contact sensor such as an optical sensor or an ultrasonic sensor.

It is preferable to use a step motor or a servo motor capable of numerical control for precise control and operation in the motor driving unit 400. A sensor for detecting the rotation of the motor is provided around the driving motor, Thereby guiding the substrate transfer process through accurate and safe motor drive. It is needless to say that such a motor detection sensor can perform a locking function to perform the rotation driving only within a specific range.

The embodiments and the accompanying drawings described in the present specification are merely illustrative of some of the technical ideas included in the present invention. Accordingly, the embodiments disclosed herein are for the purpose of describing rather than limiting the technical spirit of the present invention, and it is apparent that the scope of the technical idea of the present invention is not limited by these embodiments. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: substrate transfer unit 110: rail cylinder
130: Moving body 140: Substrate seating part
200: guide holder 210: cap
230: Body 250: Flange bearing
300: guide arm 310: pivot arm:
330: Moving guide 335: Guide hole
400: motor driving part 500: substrate detection sensor

Claims (10)

A substrate transfer unit installed in the load lock chamber for transferring the substrate by sliding movement; A guide holder which is fastened and protruded above the substrate transfer section; A guide arm having a guide hole formed in the guide holder; And a motor driving unit that is installed apart from a side of the substrate transfer unit and rotates a guide arm,
The guide holder moves linearly along the guide hole by the rotation of the guide arm,
The guide arm includes: a pivoting arm connected to the motor driving shaft; And a moving guide extending from the end of the pivoting arm and having a guide hole formed in a longitudinal direction thereof. The method according to claim 1,
Wherein,
A rail cylinder installed in the load lock chamber;
A moving body slidingly moved along the rail cylinder; And
And a substrate seating part extending forward from the moving body to be seated thereon. The method of claim 2,
The rail cylinder includes:
Wherein the multi-stage cylinder structure has a multi-stage cylinder structure capable of moving stepwise by a constant movement distance. The method of claim 2,
Wherein the guide holder comprises:
And a part of the lower end is bolted to the upper part of the moving body. The method according to claim 1,
Wherein the guide holder comprises:
And a flexible flange bearing is mounted on the outer surface of the load lock chamber. The method according to claim 1,
Wherein the guide holder comprises:
And a body extending downward from the center of the cap, wherein at least one grip groove is formed in the edge of the cap. delete The method according to claim 1,
The guide hole of the moving guide includes:
Wherein the substrate is one of a straight line, a curved line, and a curved line. The method according to claim 1,
The motor drive unit includes:
And a detection sensor for detecting a rotation of the motor. The method according to claim 1,
Further comprising: a substrate detection sensor disposed on a side of the substrate transfer unit so as to be spaced apart from the substrate transfer unit.
KR1020160011544A 2016-01-29 2016-01-29 Semiconductor substrate carrying apparatus for loadlock chamber KR101837647B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102386972B1 (en) 2020-12-24 2022-04-15 (주)씨엔원 Semiconductor Substrate Carrying Apparatus for Loadlock Chamer Using Magnetic Coupling

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KR20240043461A (en) * 2022-09-27 2024-04-03 프리시스 주식회사 Up-Down Module for substrate, substrate processing module and substrate processing system having the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4364001B2 (en) * 2004-02-06 2009-11-11 株式会社ダイヘン Transfer robot
JP4959457B2 (en) * 2007-07-26 2012-06-20 東京エレクトロン株式会社 Substrate transport module and substrate processing system
KR101246362B1 (en) 2012-10-11 2013-03-25 주식회사 티이에스 Apparatus for transferring substrate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4364001B2 (en) * 2004-02-06 2009-11-11 株式会社ダイヘン Transfer robot
JP4959457B2 (en) * 2007-07-26 2012-06-20 東京エレクトロン株式会社 Substrate transport module and substrate processing system
KR101246362B1 (en) 2012-10-11 2013-03-25 주식회사 티이에스 Apparatus for transferring substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102386972B1 (en) 2020-12-24 2022-04-15 (주)씨엔원 Semiconductor Substrate Carrying Apparatus for Loadlock Chamer Using Magnetic Coupling
WO2022139178A1 (en) * 2020-12-24 2022-06-30 주식회사 씨엔원 Substrate transfer device for loadlock chamber, using magnetic coupling

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