WO2012160747A1 - 光源装置、分析装置、及び光生成方法 - Google Patents
光源装置、分析装置、及び光生成方法 Download PDFInfo
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- WO2012160747A1 WO2012160747A1 PCT/JP2012/002435 JP2012002435W WO2012160747A1 WO 2012160747 A1 WO2012160747 A1 WO 2012160747A1 JP 2012002435 W JP2012002435 W JP 2012002435W WO 2012160747 A1 WO2012160747 A1 WO 2012160747A1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3544—Particular phase matching techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/0675—Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
- H01S3/2391—Parallel arrangements emitting at different wavelengths
Definitions
- the present invention relates to a light source device, an analyzer, and a light generation method.
- the wavelength conversion element described in Patent Document 1 has the following configuration.
- a plurality of waveguides and a combining portion are formed on a substrate made of a nonlinear optical crystal. Furthermore, a second harmonic generation unit is formed in each of the plurality of waveguides. The plurality of second harmonic generation units have mutually different phase matching wavelengths.
- Patent Document 2 also describes that two fiber Bragg gradings are provided between a laser diode and a wavelength conversion element. These two fiber Bragg gradings constitute a laser resonator.
- the laser resonator described in Patent Document 3 has the following configuration.
- the semiconductor laser has a plurality of light emitting points.
- the light emitted from each light emitting point enters the non-linear optical element through the Bragg reflection structure.
- the Bragg reflection structure changes the reflection wavelength along the arrangement direction of the light emitting points.
- the polarization inversion direction changes along the light propagation direction. According to this, it is described that the wavelength width of the laser light can be expanded to several nm.
- the width of the gas absorption line is generally narrow. Therefore, when the sample is a gas such as the atmosphere and the substance to be detected is a gas, it is necessary to make the wavelength width of the laser light narrower than the width of the absorption line in order to perform the laser spectroscopy measurement with high accuracy. There is. Further, for laser spectroscopy, it is required to emit a plurality of wavelengths from the same optical axis, to be able to independently modulate each wavelength, and to be inexpensive.
- the present invention has been made in view of the above-mentioned circumstances, and the object of the present invention is to be able to emit a plurality of wavelengths from the same optical axis, to be able to perform modulation independently for each wavelength, and further to An object of the present invention is to provide an inexpensive light source device, an analyzer, and a light generation method.
- a light source device includes a plurality of laser light sources, a plurality of wavelength conversion elements, a multiplexer, and a first Bragg reflector.
- the plurality of laser light sources output laser light.
- the wavelength conversion element is provided for each of the plurality of laser light sources, and has wavelength conversion characteristics different from one another. Each wavelength conversion element converts the wavelength of the laser beam incident on the wavelength conversion element. The wavelengths of the laser light after wavelength conversion are mutually different.
- the coupler combines a plurality of laser beams output from the plurality of wavelength conversion elements and outputs the combined light as coaxial light.
- the first Bragg reflector is provided between each of the plurality of laser light sources and each of the plurality of wavelength conversion elements, and constitutes at least a part of a resonator of laser light.
- a plurality of wavelengths can be emitted from the same optical axis. Further, by controlling each of the plurality of laser light sources, modulation can be performed independently for each wavelength. In addition, since the wavelength conversion elements are independent of each other, it is possible to suppress an increase in the manufacturing cost of the wavelength conversion elements.
- An analyzer includes the light source device described above and an analyzer.
- the analysis unit irradiates the sample with the light output from the light source device, and measures the amount of absorption of the light in the sample.
- each of the plurality of laser light sources outputs laser light.
- the plurality of laser beams are input to wavelength conversion elements different from each other.
- the plurality of wavelength conversion elements have wavelength conversion characteristics different from each other, and convert the input laser light into wavelengths different from each other.
- a laser light resonator is provided closer to the laser light source than the plurality of wavelength conversion elements. Then, by using the multiplexer, the plurality of laser beams output from the plurality of wavelength conversion elements are combined and output as coaxial light.
- a plurality of wavelengths can be emitted from the same optical axis, modulation can be performed independently for each wavelength, and an inexpensive light source device, an analyzer, and a light generation method are provided. can do.
- FIG. 1 is a view showing the configuration of a light source device 100 according to the first embodiment.
- the light source device 100 includes a plurality of laser light sources 110, a plurality of wavelength conversion elements 130, a multiplexer 150, and a VBG (Volume Bragg Grating) 120 (first Bragg reflector).
- the wavelength conversion element 130 is provided for each of the plurality of laser light sources 110 and has wavelength conversion characteristics different from one another. Each wavelength conversion element 130 converts the wavelength of the laser light incident on the wavelength conversion element. The wavelengths of the laser light after wavelength conversion are mutually different.
- the coupler 150 combines the plurality of laser beams output from the plurality of wavelength conversion elements 130 and outputs the combined light as coaxial light.
- the VBG 120 is provided between the plurality of laser light sources 110 and the plurality of wavelength conversion elements 130, and constitutes at least a part of a resonator of laser light. The details will be described below.
- the plurality of laser light sources 110 are all semiconductor lasers.
- the frequencies of the laser light (pump light) oscillated by the laser light source 110 may be the same as or different from each other.
- the frequency at which the laser light source 110 is used depends on the application of the light source device.
- the output of each of the plurality of laser light sources 110 is controlled by the control unit 160.
- the control unit 160 directly controls the output of the laser light source 110 by controlling the current input to the laser light source 110.
- the frequency of the laser light output from the laser light source 110 is, for example, in the near infrared region. In this case, the wavelength of light output from the multiplexer 150 is 490 nm or more and 630 nm or less.
- a lens 172 is provided between the laser light source 110 and the VBG 120.
- the surface facing the lens 172 is non-reflective coated, and the opposite surface is reflective coated.
- the VBG 120 and the laser light source 110 form a resonator of the laser light oscillated by the laser light source 110.
- the gain medium of this resonator is a semiconductor laser as the laser light source 110.
- the VBG 120 is a bulk element internally containing a portion where the refractive index changes periodically.
- the VBG 120 is formed of, for example, an inorganic material mainly composed of silica glass.
- the raw material of VBG120 is not limited to this.
- the periodic change of the refractive index in the VBG 120 is formed, for example, by performing ultraviolet irradiation and heat treatment.
- One VBG 120 is provided for a plurality of laser light sources 110.
- the reflection wavelength of the VBG 120 changes in a direction perpendicular to the traveling direction of the laser light.
- the plurality of laser light sources 110 all have the same oscillation frequency.
- the wavelength of the light output from the laser light source 110 has a certain width. Which wavelength of light is output from the VBG 120 depends on which position of the VBG 120 the laser light source 110 is made to face. That is, the plurality of laser light sources 110 are opposed to the position of the VBG 120 where the desired frequency is the reflection frequency.
- the wavelength conversion element 130 is a quasi phase matching element, and is formed of, for example, a ferroelectric crystal such as LiNbO 3 or LiTaO 3 .
- the laser beam output from the VBG 120 is incident on the wavelength conversion element 130 via the lens 174.
- the wavelength conversion element 130 periodically has a polarization inversion region.
- the polarization inversion periods of the plurality of wavelength conversion elements 130 are different from one another.
- the wavelength conversion element 130 generates and emits high-order harmonics of the incident laser light, for example, second-order harmonics.
- the period of polarization inversion of the wavelength conversion element 130 is determined by the wavelength of the laser light incident on the wavelength conversion element 130 and the wavelength of the light to be output by the wavelength conversion element 130.
- the temperature of the wavelength conversion element 130 is controlled, for example, using a Peltier element.
- the laser light output from the wavelength conversion element 130 enters the coupler 150 via the optical filter 140 and the lens 176.
- the optical filter 140 cuts light having a wavelength of the oscillation frequency of the laser light source 110.
- waveguides are formed at positions facing the wavelength conversion elements 130. These waveguides are integrated at the output side. For this reason, in the multiplexer 150, a plurality of laser beams output from the plurality of wavelength conversion elements 130 are output as coaxial light.
- the control unit 160 controls the outputs of the laser light source 110 independently of each other. For this reason, when modulating the output of one of the laser light sources 110, the output of the other laser light sources 110 may not be affected.
- wavelength conversion elements 130 are configured to be independent of each other, an increase in the manufacturing cost of the wavelength conversion elements 130 can be suppressed.
- the resonator of the laser light source 110 is formed of the VBG 120 and a reflective coating formed on one surface of the laser light source 110.
- the resonator has a fixed resonant frequency. For this reason, even if the output of the laser light source 110 is modulated, the wavelength of the laser light incident on the wavelength conversion element 130 does not change. Therefore, when the output of the laser light source 110 is modulated, it is possible to suppress that the light incident on the wavelength conversion element 130 is phase mismatched with the wavelength conversion element 130.
- FIG. 2 is a view showing the configuration of the light source device 100 according to the second embodiment.
- the light source device 100 according to the present embodiment has the same configuration as the light source device 100 according to the first embodiment except for the following points.
- a plurality of optical fibers 180 are provided instead of the VBG 120.
- An optical fiber 180 is provided for each of the laser light sources 110.
- the laser light source 110 and the optical fiber 180 may be directly coupled or may be coupled via a lens.
- the optical fiber 180 is provided with an FBG (Fiber Bragg Grating) 182.
- the reflection frequency of the FBG 182 coincides with the oscillation frequency of the laser light source 110 corresponding to the optical fiber 180.
- the resonator of the laser light source 110 is formed of the FBG 182 and a reflective coating provided on one end of the laser light source 110.
- the multiplexer 150 is of the optical fiber type.
- FIG. 3 is a view showing the configuration of a light source device 100 according to the third embodiment.
- the light source device 100 according to the present embodiment has the same configuration as the light source device 100 according to the second embodiment except for the following points.
- the optical fiber 180 is provided with an FBG 184 in addition to the FBG 182.
- the FBG 184 is located closer to the laser light source 110 than the FBG 182.
- the reflection frequency of the FBG 182 coincides with the oscillation frequency of the laser light source 110 corresponding to the optical fiber 180.
- at least a part of the optical fiber 180 is a rare earth doped fiber 186.
- the rare earth doped fiber 186 is located between the FBG 182 and the FBG 184. That is, in the present embodiment, the FBG 182 and the FBG 184 form a resonator of the laser light output from the laser light source 110.
- the gain medium of this resonator is a rare earth doped fiber 186.
- FIG. 4 is a view showing the configuration of a light source device 100 according to the fourth embodiment.
- the VBG 120 is provided corresponding to a part of the laser light sources 110, and the other laser light sources 110 are provided except for the optical fiber 180 and the FBG 182.
- the configuration is the same as that of the light source device 100 according to the first embodiment.
- the configurations of the optical fiber 180 and the FBG 182 are as described in the second embodiment. Also according to this embodiment, the same effect as that of the first embodiment can be obtained.
- FIG. 5 is a view showing the configuration of an analyzer according to the fifth embodiment.
- the analyzer includes a light source device 100 and an analyzer 200.
- the light source device 100 has the configuration shown in any of the first to fourth embodiments.
- the analysis unit 200 irradiates the sample with the light output from the light source device 100, and measures the amount of absorption of the light in the sample.
- the sample is, for example, a gas such as the atmosphere.
- the analysis unit 200 detects the amount of absorption of light in the sample to detect the amount of a specific component (for example, a radical or a dilute gas such as carbon dioxide contained in the atmosphere) contained in the sample.
- a specific component for example, a radical or a dilute gas such as carbon dioxide contained in the atmosphere
- the light output from the light source device 100 is variable at 490 nm or more and 630 nm or less.
- the laser light source 110 shown in FIGS. 1 to 4 of the light source device 100 outputs light in the near infrared region.
- the light source device 100 can output laser light from the plurality of laser light sources 110 simultaneously, and can output high-order harmonics of these laser lights as coaxial light. Therefore, by simultaneously irradiating different laser beams to the sample, analysis of the sample by a plurality of wavelengths can be performed simultaneously. This makes it possible to analyze the sample at high speed. This effect is particularly noticeable when scanning a sample with light to perform two-dimensional or three-dimensional mapping.
- the light source device 100 shown in FIG. 1 was manufactured using two laser light sources 110.
- the laser light source 110 a semiconductor laser containing InP as a main component was used.
- the first laser light source 110 was made to face the portion of the VBG 120 having a reflection frequency of 1080 nm, and the second laser light source 110 was made to face the portion of the VBG 120 having a reflection frequency of 1100 nm.
- the wavelength conversion element 130 a quasi phase matching element made of Mg-doped LiNbO 3 was used.
- a laser beam with a wavelength of 540 nm and a laser beam with a wavelength of 550 nm were output.
- the optical axes of these two laser beams are coaxial.
- the current input to the two laser light sources 110 was changed independently of each other using the control unit 160.
- the intensities of the two laser beams output from the multiplexer 150 also change independently of each other.
- the light source device 100 may be used as a light source for measurement in the measurement field such as medical and bio, or as a light source for plasma measurement.
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Abstract
Description
図1は、第1の実施形態に係る光源装置100の構成を示す図である。光源装置100は、複数のレーザ光源110、複数の波長変換素子130、合波器150、及びVBG(Volume Bragg Grating)120(第1ブラッグ反射部)を備えている。波長変換素子130は、複数のレーザ光源110それぞれに設けられ、互いに異なる波長変換特性を有している。各波長変換素子130は、その波長変換素子に入射されるレーザ光の波長を変換する。波長変換後のレーザ光の波長は、互いに異なる。合波器150は、複数の波長変換素子130から出力された複数のレーザ光を結合して同軸の光として出力する。そしてVBG120は、複数のレーザ光源110と複数の波長変換素子130の間に設けられ、レーザ光の共振器の少なくとも一部を構成している。以下、詳細に説明する。
図2は、第2の実施形態に係る光源装置100の構成を示す図である。本実施形態に係る光源装置100は、以下の点を除いて、第1の実施形態に係る光源装置100と同様の構成である。
図3は、第3の実施形態に係る光源装置100の構成を示す図である。本実施形態に係る光源装置100は、以下の点を除いて、第2の実施形態に係る光源装置100と同様の構成である。
図4は、第4の実施形態に係る光源装置100の構成を示す図である。本実施形態に係る光源装置100は、一部のレーザ光源110に対応してVBG120が設けられており、他のレーザ光源110に対しては光ファイバ180及びFBG182が設けられている点を除いて、第1の実施形態に係る光源装置100と同様の構成である。光ファイバ180及びFBG182の構成は、第2の実施形態で説明したとおりである。
本実施形態によっても、第1の実施形態と同様の効果を得ることができる。
図5は、第5の実施形態に係る分析装置の構成を示す図である。この分析装置は、光源装置100及び分析部200を有している。光源装置100は、第1~第4の実施形態のいずれかに示した構成を有している。分析部200は、光源装置100から出力された光を試料に照射し、この試料における光の吸収量を測定する。試料は、例えば大気などの気体である。そして分析部200は、試料における光の吸収量を測定することにより、試料に含まれる特定の成分(例えばラジカル、又は大気中に含まれる二酸化炭素などの希薄ガス)の量を検出する。検出対象の成分が二酸化炭素である場合、光源装置100が出力する光は、490nm以上630nm以下で可変である。この場合、光源装置100のレーザ光源110(図1~4に図示)は、近赤外域の光を出力する。
図1に示した光源装置100を、2つのレーザ光源110を用いて作製した。レーザ光源110には、InPを主成分とする半導体レーザを使用した。第1のレーザ光源110を、VBG120のうち反射周波数が1080nmになっている部分に対向させ、第2のレーザ光源110を、VBG120のうち反射周波数が1100nmになっている部分に対向させた。波長変換素子130には、MgをドープしたLiNbO3からなる擬似位相整合素子を用いた。
Claims (11)
- 複数のレーザ光源と、
前記複数のレーザ光源それぞれに設けられ、互いに異なる波長変換特性を有しており、レーザ光を互いに異なる波長に変換する複数の波長変換素子と、
前記複数の波長変換素子から出力された複数の前記レーザ光を結合して同軸の光として出力する合波器と、
前記複数のレーザ光源と前記複数の波長変換素子それぞれの間に設けられ、前記レーザ光の共振器の少なくとも一部を構成する第1ブラッグ反射部と、
を備える光源装置。 - 請求項1に記載の光源装置において、
前記複数のレーザ光源の少なくとも一つは、半導体レーザであり、
前記半導体レーザは、前記第1ブラッグ反射部側の面が無反射コーティングされており、かつ逆側の面が反射コーティングされており、
前記半導体レーザに対応する前記共振器は、前記第1ブラッグ反射部と、前記半導体レーザにより形成されている光源装置。 - 請求項2に記載の光源装置において、
前記第1ブラッグ反射部は、VBG(Volume Bragg Grating)素子である光源装置。 - 請求項3に記載の光源装置において、
前記複数のレーザ光源は、いずれも前記半導体レーザであり、
前記VBGは、前記レーザ光の進行方向に対して垂直な方向に、反射波長が変化している光源装置。 - 請求項2に記載の光源装置において、
前記半導体レーザと、当該レーザ光源に対応する前記波長変換素子の間には、光ファイバーが設けられており、
前記第1ブラッグ反射部は、前記光ファイバーに設けられたFBG(Fiber Bragg Grating)である光源装置。 - 請求項1に記載の光源装置において、
前記複数のレーザ光源の少なくとも一つと、当該レーザ光源に対応する前記波長変換素子の間には、光ファイバーが設けられており、
前記光ファイバーは、前記第1ブラッグ反射部である第1FBGと、第2FBGとを有しており、
前記光ファイバーが設けられている前記レーザ光源に対応する前記共振器は、前記第1FBG及び前記第2FBGを含んでいる光源装置。 - 請求項1~6のいずれか一項に記載の光源装置において、
前記複数の波長変換素子は、分極反転周期が互いに異なる擬似位相整合素子である光源装置。 - 請求項1~7のいずれか一項に記載の光源装置において、
前記複数のレーザ光源を互いに独立して制御する制御部を備える光源装置。 - 請求項1~8のいずれか一項に記載の光源装置において、
前記レーザ光の波長は、近赤外域にあり、
前記光源装置から出力される光の波長は、490nm以上630nm以下である光源装置。 - 光源装置と、
前記光源装置から出力された光を試料に照射し、前記試料における前記光の吸収量を測定する分析部と、
を備え、
前記光源装置は、
複数のレーザ光源と、
前記複数のレーザ光源それぞれに設けられ、互いに異なる波長変換特性を有しており、レーザ光を互いに異なる波長に変換する複数の波長変換素子と、
前記複数の波長変換素子から出力された複数の前記レーザ光を結合して同軸の光として出力する合波器と、
前記複数のレーザ光源と前記複数の波長変換素子それぞれの間に設けられ、前記レーザ光の共振器の少なくとも一部を構成する第1ブラッグ反射部と、
を備える分析装置。 - 互いに異なる波長のレーザ光を出力する複数のレーザ光源を準備し、
前記複数のレーザ光源それぞれに、互いに異なる波長変換特性を有しており、前記レーザ光を互いに異なる波長に変換する複数の波長変換素子を設け、
前記複数の波長変換素子よりも前記レーザ光源側に、前記レーザ光の共振器を設け、
合波器を用いることにより、前記複数の波長変換素子から出力された複数の前記レーザ光を結合して同軸の光として出力する光生成方法。
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JP2013516176A JP5689955B2 (ja) | 2011-05-26 | 2012-04-06 | 光源装置、分析装置、及び光生成方法 |
CA2814389A CA2814389A1 (en) | 2011-05-26 | 2012-04-06 | Light source device, analysis device, and light generation method |
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CN104062235A (zh) * | 2014-07-16 | 2014-09-24 | 北京佰纯润宇生物科技有限公司 | 基于光纤的单流通池的多波长在线检测设备 |
KR20150086719A (ko) * | 2014-01-20 | 2015-07-29 | 주식회사 이오테크닉스 | 레이저 빔 형성 방법 및 이를 적용하는 레이저 시스템 |
JP2015152698A (ja) * | 2014-02-13 | 2015-08-24 | スペクトロニクス株式会社 | レーザ光源装置 |
JP2016219712A (ja) * | 2015-05-25 | 2016-12-22 | 株式会社メガオプト | 多波長レーザー発振装置および多波長レーザー発振方法 |
JP2018018946A (ja) * | 2016-07-27 | 2018-02-01 | 富士ゼロックス株式会社 | レーザ部品、レーザ光発生装置及び光干渉断層計 |
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FR3024633B1 (fr) * | 2014-07-30 | 2016-07-29 | Onera (Office Nat D'etudes Et De Rech Aerospatiales) | Source laser, appareil et procede pour interagir simultanement avec plusieurs especes atomiques |
CN110380326B (zh) * | 2019-07-29 | 2020-10-23 | 武汉电信器件有限公司 | 一种光信号输出装置及方法、存储介质 |
CN112485272B (zh) * | 2020-12-14 | 2021-11-09 | 紫创(南京)科技有限公司 | 半导体检测装置及检测方法 |
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- 2012-04-06 WO PCT/JP2012/002435 patent/WO2012160747A1/ja active Application Filing
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CA2814389A1 (en) | 2012-11-29 |
US20130293895A1 (en) | 2013-11-07 |
DE112012000164T5 (de) | 2013-07-18 |
JPWO2012160747A1 (ja) | 2014-07-31 |
JP5689955B2 (ja) | 2015-03-25 |
TWI567471B (zh) | 2017-01-21 |
TW201303466A (zh) | 2013-01-16 |
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