WO2012157915A1 - 신규한 화합물 반도체 및 그 활용 - Google Patents
신규한 화합물 반도체 및 그 활용 Download PDFInfo
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- WO2012157915A1 WO2012157915A1 PCT/KR2012/003738 KR2012003738W WO2012157915A1 WO 2012157915 A1 WO2012157915 A1 WO 2012157915A1 KR 2012003738 W KR2012003738 W KR 2012003738W WO 2012157915 A1 WO2012157915 A1 WO 2012157915A1
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- compound semiconductor
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- heat treatment
- thermoelectric conversion
- solar cell
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- 150000001875 compounds Chemical class 0.000 title claims abstract description 60
- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 7
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 6
- 239000000126 substance Substances 0.000 claims abstract 5
- 238000006243 chemical reaction Methods 0.000 claims description 33
- 238000010438 heat treatment Methods 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- 229910052714 tellurium Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 18
- 230000000052 comparative effect Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000872 buffer Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000000224 chemical solution deposition Methods 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004570 mortar (masonry) Substances 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- -1 CdS Inorganic materials 0.000 description 1
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 229910020599 Co 3 O 4 Inorganic materials 0.000 description 1
- 229940126062 Compound A Drugs 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F11/00—Compounds containing elements of Groups 6 or 16 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G51/00—Compounds of cobalt
- C01G51/006—Compounds containing, besides cobalt, two or more other elements, with the exception of oxygen or hydrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
- C01B19/002—Compounds containing, besides selenium or tellurium, more than one other element, with -O- and -OH not being considered as anions
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
- C07F15/06—Cobalt compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
- C07F9/90—Antimony compounds
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/853—Thermoelectric active materials comprising inorganic compositions comprising arsenic, antimony or bismuth
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a novel compound semiconductor material that can be used for solar cells, thermoelectric materials and the like, a method for producing the same, and a use thereof.
- Compound A semiconductor is a compound which acts as a semiconductor by combining two or more elements rather than a single element such as silicon or germanium.
- Various kinds of such compound semiconductors are currently developed and used in various fields.
- a compound semiconductor may be used in a thermoelectric conversion element using a Peltier effect, a light emitting element such as a light emitting diode or a laser diode using the photoelectric conversion effect, and a solar cell.
- thermoelectric conversion element may be applied to thermoelectric conversion power generation, thermoelectric conversion cooling, etc.
- thermoelectric conversion power generation uses a thermoelectric power generated by providing a temperature difference to the thermoelectric conversion element, and converts thermal energy into electrical energy. to be.
- thermoelectric conversion element The energy conversion efficiency of such a thermoelectric conversion element depends on ZT, which is a figure of merit value of the thermoelectric conversion material.
- ZT is determined according to Seebeck coefficient, electrical conductivity and thermal conductivity, and more specifically, is proportional to the square of the Seebeck coefficient and electrical conductivity and inversely proportional to the thermal conductivity. Therefore, in order to increase the energy conversion efficiency of the thermoelectric conversion element, it is necessary to develop a thermoelectric conversion material having a high Seebeck coefficient or high electrical conductivity or low thermal conductivity.
- the solar cell is a tandem solar cell in which two or more layers of a silicon solar cell mainly using a single element of silicon, a compound semiconductor solar cell using a compound semiconductor, and a solar cell having different bandgap energy are stacked. And the like.
- compound semiconductor solar cells use compound semiconductors in the light absorption layer that absorbs sunlight to generate electron-hole pairs.
- group III-V compound semiconductors such as GaAs, InP, GaAlAs, GaInAs, CdS, CdTe, Group II-VI compound semiconductors, such as ZnS, the group I-III-VI compound semiconductor represented by CuInSe 2 , etc. can be used.
- the light absorbing layer of the solar cell is required to be excellent in long-term electrical and optical stability, high in photoelectric conversion efficiency, and to easily control band gap energy or conductivity by changing composition or doping.
- requirements such as manufacturing cost and yield must also be satisfied.
- many conventional compound semiconductors do not meet all of these requirements together.
- thermoelectric conversion materials such as thermoelectric conversion materials, solar cells, etc. of thermoelectric conversion elements
- thermoelectrics using the same It aims at providing a conversion element, a solar cell, etc.
- the present inventors have succeeded in synthesizing the compound semiconductor represented by the following formula (1) after repeated studies on the compound semiconductor, and the compound is a thermoelectric conversion material of a thermoelectric conversion element, a light absorbing layer of a solar cell, It was confirmed that it can be used to complete the present invention.
- Q ' is at least one selected from the group consisting of O, S, and Se, and 0 ⁇ x ⁇ 0.5, 0 ⁇ n ⁇ 2, and 0 ⁇ z ⁇ 2.
- x is 0 ⁇ x ⁇ 0.4.
- x is 0 ⁇ x ⁇ 0.25.
- the compound semiconductor manufacturing method according to the present invention for achieving the above object is any one selected from the group consisting of In, Co, Sb and Te, O, S and Se or two or more elements thereof or oxides thereof Mixing the; And heat treating the mixture formed in the mixing step.
- the heat treatment step is performed at 400 °C to 800 °C.
- the heat treatment step may include two or more heat treatment steps.
- thermoelectric conversion element according to the present invention for achieving the above object includes the compound semiconductor described above.
- the solar cell according to the present invention for achieving the above object includes the compound semiconductor described above.
- a novel compound semiconductor material is provided.
- such a novel compound semiconductor can be used as another material in place of or in addition to the conventional compound semiconductor.
- thermoelectric conversion performance of the compound semiconductor is good, it can be usefully used in the thermoelectric conversion element.
- the compound semiconductor according to the present invention may be improved in the thermal conductivity characteristics, ZT value of the thermoelectric performance index can be improved. Therefore, in the case of the compound semiconductor according to the present invention, it can be suitably used as a thermoelectric conversion material of the thermoelectric conversion element.
- a compound semiconductor may be used in a solar cell.
- the compound semiconductor according to the present invention can be used as a light absorption layer of a solar cell.
- the compound semiconductor may be used in an IR window, an infrared sensor, a magnetic element, a memory, etc. for selectively passing infrared rays.
- 1 is a graph illustrating thermal conductivity values according to temperature changes of compound semiconductors of Examples and Comparative Examples manufactured according to the present invention.
- the present invention provides a novel compound semiconductor represented by the following formula (1).
- Q ' is at least one selected from the group consisting of O, S, and Se.
- x satisfies the range of 0 ⁇ x ⁇ 0.5, 0 ⁇ n ⁇ 2 and 0 ⁇ z ⁇ 2.
- x is 0 ⁇ x ⁇ 0.4.
- x is 0 ⁇ x ⁇ 0.25.
- n and z may be 0 ⁇ n + z ⁇ 3.
- the compound semiconductor represented by Formula 1 may include a part of the secondary phase, the amount may vary depending on the heat treatment conditions.
- the compound semiconductor described above may include forming a mixture including In, Co, Sb, and Te, any one selected from the group consisting of O, S, and Se or two or more elements thereof or oxides thereof; And heat-treating the mixture.
- each raw material mixed in the mixture forming step may be in powder form, but the present invention is not necessarily limited to the specific type of such mixed raw material.
- the heat treatment step may be performed while flowing a gas such as Ar, He, N 2 , which contains a part of hydrogen or does not include hydrogen in a vacuum.
- a gas such as Ar, He, N 2 , which contains a part of hydrogen or does not include hydrogen in a vacuum.
- the heat treatment temperature may be 400 °C to 800 °C.
- the heat treatment temperature may be 450 °C to 700 °C. More preferably, the heat treatment temperature may be 500 °C to 650 °C.
- the heat treatment step may include two or more heat treatment steps.
- the mixture formed in the step of forming the mixture that is, mixing the raw materials, may be subjected to a first heat treatment at a first temperature, and then to a second heat treatment at a second temperature.
- some heat treatment steps of the plurality of heat treatment steps may be performed in the mixture forming step of mixing the raw materials.
- the heat treatment step may include three heat treatment steps of a first heat treatment step, a second heat treatment step, and a third heat treatment (sintering) step.
- the first heat treatment step may be performed at a temperature range of 400 ° C. to 600 ° C.
- the second heat treatment step and the third heat treatment step may be performed at a temperature range of 600 ° C. to 800 ° C.
- FIG. the first heat treatment step may be performed during the mixture formation step of mixing the raw materials, and the second heat treatment step and the third heat treatment step may be sequentially performed thereafter.
- thermoelectric conversion element according to the present invention may include the compound semiconductor described above. That is, the compound semiconductor according to the present invention can be used as a thermoelectric conversion material of the thermoelectric conversion element.
- the compound semiconductor according to the present invention has a large ZT which is a figure of merit of a thermoelectric conversion material.
- the Seebeck coefficient and electrical conductivity are high, and the thermal conductivity is low, so the thermoelectric conversion performance is excellent. Therefore, the compound semiconductor according to the present invention can be usefully used in a thermoelectric conversion element in place of or in addition to a conventional thermoelectric conversion material.
- the solar cell according to the present invention may include the compound semiconductor described above. That is, the compound semiconductor according to the present invention can be used as a light absorbing layer of solar cells, in particular solar cells.
- the solar cell can be manufactured in a structure in which a front transparent electrode, a buffer layer, a light absorbing layer, a back electrode, a substrate, and the like are sequentially stacked from the side where sunlight is incident.
- the bottommost substrate may be made of glass, and the back electrode formed on the entire surface may be formed by depositing a metal such as Mo.
- the light absorbing layer may be formed by stacking the compound semiconductor according to the present invention on the back electrode by an electron beam deposition method, a sol-gel method, or a pulsed laser deposition (PLD) method.
- PLD pulsed laser deposition
- the buffer layer may be formed of a material such as CdS (Chemical Bath Deposition). It can be formed by depositing in the manner of.
- a front transparent electrode may be formed on the buffer layer by a layered film of ZnO or ZnO and ITO by sputtering or the like.
- the solar cell according to the present invention may be variously modified.
- stacked the solar cell using the compound semiconductor which concerns on this invention as a light absorption layer can be manufactured.
- stacked in this way can use the solar cell using silicon or another known compound semiconductor.
- the band gap of the compound semiconductor of the present invention by changing the band gap of the compound semiconductor of the present invention, a plurality of solar cells using compound semiconductors having different band gaps as light absorbing layers can be laminated.
- the band gap of the compound semiconductor according to the present invention can be controlled by changing the composition ratio of the constituent elements constituting the compound, in particular Te.
- the compound semiconductor according to the present invention may be applied to an infrared window (IR window) or an infrared sensor for selectively passing infrared rays.
- IR window infrared window
- infrared sensor for selectively passing infrared rays.
- Co and Sb were prepared as reagents, and these were mixed well using mortar to prepare a mixture of In 0.25 Co 4 Sb 12 composition in pellet form. And, H 2 (1.94%) and was sloppy the N 2 gas heated at 500 °C 15 hours at which time the temperature rising time was 1.5 hours. The mixed materials were put in a silica tube and vacuum sealed and heated at 650 ° C. for 36 hours, but the temperature rise time was 1 hour 30 minutes to obtain In 0.25 Co 4 Sb 12 powder.
- the compound semiconductor of an embodiment according to the present invention represented by In 0.25 Co 4 Sb 10.6 O 0.4 Te is compared with the compound semiconductor of the comparative example represented by In 0.25 Co 4 Sb 12 . It can be seen that the thermal conductivity ( ⁇ ) is significantly lower over. In particular, it can be seen that the gap between the thermal conductivity of the examples and the comparative example is larger in the high temperature section.
- the ZT value which is a thermoelectric performance index, may be expressed as follows.
- ⁇ electrical conductivity
- S Seebeck coefficient
- T temperature
- ⁇ thermal conductivity
- the compound semiconductor according to the present invention Since the compound semiconductor according to the present invention has low thermal conductivity, the ZT value may be improved. Therefore, the compound semiconductor according to the present invention can be said to have excellent thermoelectric performance, and can be very usefully used as a thermoelectric conversion material.
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Powder Metallurgy (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
Claims (9)
- 하기 화학식 1로 표시되는 화합물 반도체.<화학식 1>InxCo4Sb12-n-zQ'nTez상기 화학식 1에서, Q'은 O, S 및 Se로 이루어진 군으로부터 선택된 적어도 어느 하나 이상이고, 0<x≤0.5, 0<n≤2 및 0<z≤2이다.
- 제1항에 있어서,상기 화학식 1의 x는, 0<x≤0.4인 것을 특징으로 하는 화합물 반도체.
- 제1항에 있어서,상기 화학식 1의 x는, 0<x≤0.25인 것을 특징으로 하는 화합물 반도체.
- 제1항에 있어서,상기 화학식 1의 n 및 z는, 0<n+z≤3인 것을 특징으로 하는 화합물 반도체.
- In, Co, Sb 및 Te와, O, S 및 Se로 이루어진 군으로부터 선택된 어느 하나 또는 이들 중 2종 이상의 원소 또는 그 산화물을 포함하는 혼합물을 형성하는 단계; 및상기 혼합물을 열처리하는 단계를 포함하는 제1항의 화합물 반도체의 제조 방법.
- 제5항에 있어서,상기 열처리 단계는, 400℃ 내지 800℃에서 수행되는 것을 특징으로 하는 화합물 반도체의 제조 방법.
- 제5항에 있어서,상기 열처리 단계는, 둘 이상의 열처리 단계를 포함하는 것을 특징으로 하는 화합물 반도체의 제조 방법.
- 제1항 내지 제4항 중 어느 한 항에 따른 화합물 반도체를 포함하는 열전 변환 소자.
- 제1항 내지 제3항 중 어느 한 항에 따른 화합물 반도체를 포함하는 태양 전지.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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CN201280022977.2A CN103517872B (zh) | 2011-05-13 | 2012-05-11 | 化合物半导体及其用途 |
EP12786280.3A EP2708503B1 (en) | 2011-05-13 | 2012-05-11 | Novel compound semiconductor and usage for same |
JP2014506350A JP5774201B2 (ja) | 2011-05-13 | 2012-05-11 | 新規な化合物半導体及びその活用 |
US13/616,679 US8636925B2 (en) | 2011-05-13 | 2012-09-14 | Compound semiconductors and their application |
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KR20110045349 | 2011-05-13 | ||
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KR10-2011-0045348 | 2011-05-13 | ||
KR20110049609 | 2011-05-25 | ||
KR10-2011-0049609 | 2011-05-25 | ||
KR1020120050459A KR101453036B1 (ko) | 2011-05-13 | 2012-05-11 | 신규한 화합물 반도체 및 그 활용 |
KR10-2012-0050459 | 2012-05-11 |
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US13/616,679 Continuation US8636925B2 (en) | 2011-05-13 | 2012-09-14 | Compound semiconductors and their application |
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US (1) | US8636925B2 (ko) |
EP (1) | EP2708503B1 (ko) |
JP (1) | JP5774201B2 (ko) |
KR (1) | KR101453036B1 (ko) |
CN (1) | CN103517872B (ko) |
TW (1) | TWI469931B (ko) |
WO (1) | WO2012157915A1 (ko) |
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WO2012157916A1 (ko) * | 2011-05-13 | 2012-11-22 | 주식회사 엘지화학 | 신규한 화합물 반도체 및 그 활용 |
CN103534201B (zh) * | 2011-05-13 | 2016-10-19 | Lg化学株式会社 | 新的化合物半导体及其用途 |
KR102122573B1 (ko) * | 2017-03-09 | 2020-06-12 | 주식회사 엘지화학 | 신규한 화합물 반도체 및 그 활용 |
AU2023223285A1 (en) * | 2022-02-25 | 2024-07-04 | Stryker Corporation | Communication system for patient support apparatuses and temperature management devices |
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KR101453036B1 (ko) | 2014-10-22 |
CN103517872B (zh) | 2015-08-05 |
EP2708503A4 (en) | 2015-04-01 |
TW201305061A (zh) | 2013-02-01 |
US20130009106A1 (en) | 2013-01-10 |
CN103517872A (zh) | 2014-01-15 |
KR20120127321A (ko) | 2012-11-21 |
JP5774201B2 (ja) | 2015-09-09 |
JP2014519547A (ja) | 2014-08-14 |
US8636925B2 (en) | 2014-01-28 |
EP2708503A1 (en) | 2014-03-19 |
EP2708503B1 (en) | 2017-02-15 |
TWI469931B (zh) | 2015-01-21 |
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