WO2012151769A1 - 狭缝涂布机喷嘴的清洗装置 - Google Patents

狭缝涂布机喷嘴的清洗装置 Download PDF

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Publication number
WO2012151769A1
WO2012151769A1 PCT/CN2011/075262 CN2011075262W WO2012151769A1 WO 2012151769 A1 WO2012151769 A1 WO 2012151769A1 CN 2011075262 W CN2011075262 W CN 2011075262W WO 2012151769 A1 WO2012151769 A1 WO 2012151769A1
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WO
WIPO (PCT)
Prior art keywords
slit coater
cleaning device
socket
coater nozzle
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/CN2011/075262
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English (en)
French (fr)
Inventor
王江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Publication date
Application filed by Shenzhen China Star Optoelectronics Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Technology Co Ltd
Priority to US13/145,698 priority Critical patent/US20140053883A1/en
Publication of WO2012151769A1 publication Critical patent/WO2012151769A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
    • B05B15/522—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles using cleaning elements penetrating the discharge openings
    • B05B15/5223—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles using cleaning elements penetrating the discharge openings the cleaning element, e.g. a needle, and the discharge opening being movable relative to each other in a direction substantially parallel to the flow of liquid or other fluent material through said opening
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet

Definitions

  • the present invention relates to a cleaning device, and more particularly to a cleaning device for a nozzle of a slit coater.
  • TFT-LCD Thin Film Transistor-Liquid Crystal Display
  • slit coater nozzle needs to be cleaned after a period of coating operation.
  • Existing slot coater nozzles include two ramps and a nozzle face.
  • a slit for applying a photoresist is provided on the nozzle surface.
  • the two inclined faces of the slit coater nozzle are cleaned by using a cleaning device, and the photoresist of the slit needs to be manually used to clear the film.
  • a primary object of the present invention is to provide a cleaning device for a slit coater nozzle which is intended to reduce contamination and save man-hours.
  • the invention provides a cleaning device for a slit coater nozzle, comprising a body, the body is provided with a receiving groove for receiving a slot coater nozzle, the receiving groove comprises a first inclined surface, a a second inclined surface and a connecting surface connecting the two inclined surfaces, wherein the first inclined surface and the second inclined surface are respectively formed with a plurality of injection holes for discharging the cleaning agent, and the connecting surface is provided with a socket.
  • a dredging film for unblocking the slit coater nozzle is inserted into the socket; the cleaning device further includes a motor and a guiding frame, the motor driving the body to move along a length direction of the receiving groove, the guiding frame Used to guide the slit coater nozzle to move vertically down into the receiving slot.
  • the socket has a depth of 2 to 5 mm.
  • the width of the socket is 40 to 100 um, and the thickness of the above-mentioned clearing film is adapted to the width of the socket.
  • the width of the socket and the thickness of the unblocking film are both 50 um.
  • the invention further provides a cleaning device for a slit coater nozzle, comprising a body, the body being provided with a receiving groove for receiving a slit coater nozzle, the receiving groove comprising a first inclined surface, a second inclined surface and a connecting surface connecting the two inclined surfaces, wherein the first inclined surface and the second inclined surface are respectively formed with a plurality of injection holes for discharging the cleaning agent, and the connecting surface is formed with a socket, A dredging film for unblocking the slit coater nozzle is inserted into the socket.
  • the socket is formed at an intermediate position of the connecting face.
  • the dredging film is inserted into the socket perpendicular to the connecting surface.
  • the cleaning device further includes a guide frame for guiding the slit coater nozzle to move vertically downward into the receiving groove.
  • the cleaning device further includes a motor that drives the body to move along the length of the receiving slot.
  • the receiving groove has an inverted trapezoidal cross section.
  • the socket has a depth of 2 to 5 mm.
  • the width of the socket is 40 to 100 um, and the thickness of the above-mentioned clearing film is adapted to the width of the socket.
  • the width of the socket and the thickness of the unblocking film are both 50 um.
  • the two inclined faces of the cleaning device of the present invention can be used to clean the two inclined faces of the nozzle of the slit coater, and the dredging film in the socket can be used to dredge the slit of the nozzle of the slit coater, eliminating the need for manual dredging.
  • the coating machine nozzle can avoid the generation of more particles and particles due to opening the protective door of the equipment.
  • the cleaning device of the present invention can simultaneously perform the cleaning of the two inclined faces of the slit coater nozzle and the unblocking slit, thereby saving man-hours.
  • FIG. 1 is a schematic perspective view showing a first embodiment of a cleaning device for a nozzle of a slit coater according to the present invention
  • FIG. 2 is a schematic perspective structural view of a slit coater nozzle cleaned by the cleaning device shown in FIG. 1;
  • Fig. 3 is a cross-sectional structural view showing the nozzle of the cleaning device for cleaning the slit coater shown in Fig. 1.
  • the cleaning device includes a body 100.
  • the body 100 is formed with a receiving slot 101 for receiving a slit coater nozzle.
  • the receiving slot 101 includes a first slope 102, a second slope 103, and a first slope 102.
  • the connecting surface 104 of the second inclined surface 103, the connecting surface 104 is disposed at the bottom of the receiving groove 101, and the first inclined surface 102 and the second inclined surface 103 are respectively formed with a plurality of injection holes 105 for discharging the cleaning agent.
  • a socket 106 for inserting the dredging film 107 is formed on the connecting surface 104.
  • the socket 106 is formed at an intermediate position of the joint surface 104.
  • the dredging film 107 is inserted into the socket 106 by a manual or machine device perpendicular to the above-mentioned connecting surface 104.
  • the cleaning device further includes a motor (not shown) for driving the body 100 to move along the length of the receiving slot 101.
  • the socket 106 has a depth of 2 to 5 mm and a width of 40 to 100. Um; the thickness of the dredging film 107 is adapted to the width of the socket 106, and the dredging film 107 can be inserted just inside the socket 106.
  • the width of the socket 106 and the thickness of the dredging film 107 are preferably 50 um.
  • the dredging film 107 is made of a metal material having a relatively high hardness, such as a steel sheet or a copper sheet.
  • the thickness of the dredge film 107 and the width of the socket 106 can be determined based on the slit of the nozzle that is actually cleaned so as to provide a better cleaning action.
  • FIG. 2 is a schematic perspective view of a slit coater nozzle cleaned by the cleaning device shown in FIG. 1, and FIG. 3 is a cross-sectional view of the nozzle of the slit coater cleaning machine shown in FIG. Schematic.
  • the bottom of the slit coater nozzle 200 includes a third slope 201, a fourth slope 202, and a nozzle surface 203.
  • the top of the slit coater nozzle 200 is provided with a hole 204, and a cavity 205 communicating with the hole 204 and a slit 206 communicating with the cavity 205 are disposed therein, and the photoresist is injected into the slit from the hole 204.
  • the machine nozzle 200 is stored in a cavity 205 in the slit coater nozzle 200 for cleaning the slit 206.
  • the third inclined surface 201, the fourth inclined surface 202, and the nozzle surface 203 of the slit coater nozzle 200 are respectively adapted to the first inclined surface 102, the second inclined surface 103, and the connecting surface 104 of the cleaning device.
  • the cross section of the receiving groove 101 of the cleaning device and the cross section of the slit coater nozzle 200 are both inverted trapezoids and are connected to each other.
  • the unblocking film 107 is first inserted into the socket 106 on the bottom of the receiving groove 101 of the cleaning device, and the bottom of the slit coater nozzle 200 to be cleaned is placed in the receiving groove 101 of the cleaning device.
  • the unblocking film 107 is inserted into the slit 206 of the slit coater nozzle, and the first inclined surface 102 and the injection hole 105 on the second inclined surface 103 eject the cleaning agent to clean the third inclined surface 201 of the slit coater nozzle 200 and The fourth slope 202, during the cleaning process, the photoresist flows out from the slit 206 of the slit coater nozzle 200, and the motor drives the body 100 to move back and forth along the length direction of the receiving groove 101, so that the dredging film 107 is The slit 206 moves back and forth to unblock the slit 206.
  • the cleaning device of the present invention can directly clean and unblock the slit coater nozzle 200, and no need to manually unblock the slit coater nozzle, thereby avoiding the generation of more particles and particles by opening the protective door of the device. Further, the cleaning device of the present invention can simultaneously perform the cleaning of the two inclined faces 201, 202 and the unblocking slits 206 of the slit coater nozzle 200, thereby saving man-hours.
  • the cleaning device of the slit coater nozzle of the second embodiment of the present invention is substantially the same as the cleaning device of the first embodiment, and the difference is that the cleaning device of the second embodiment further includes a guide frame (not shown).
  • the guide frame is used to guide the slit coater nozzle 200 to move vertically downward into the receiving groove 101, so that the dredging film 107 is just inserted into the slit 206.

Landscapes

  • Coating Apparatus (AREA)
  • Nozzles (AREA)

Description

狭缝涂布机喷嘴的清洗装置
技术领域
本发明涉及清洗装置，特别涉及一种狭缝涂布机喷嘴的清洗装置。
背景技术
在TFT-LCD（Thin Film Transistor-Liquid Crystal Display，薄膜场效应晶体管显示器）面板制造行业当中，面板制造流程通常需要用到狭缝涂布机喷嘴来涂布光刻胶，狭缝涂布机喷嘴经过一段时间涂布动作之后都需要进行清洗。现有的狭缝涂布机喷嘴包括两个斜面和一喷嘴面。上述喷嘴面上设有用于涂布光阻剂的狭缝。目前，狭缝涂布机喷嘴的两个斜面是使用清洗装置清洗，而狭缝的光阻剂是需要人工使用疏通薄膜进行疏通。然而，人工疏通时，需要打开设备防护门，导致产生微粒和颗粒污染狭缝涂布机喷嘴，清洗起来工时也较长。
发明内容
本发明的主要目的是提供一种狭缝涂布机喷嘴的清洗装置，旨在可以减少污染，节省工时。
本发明提出一种狭缝涂布机喷嘴的清洗装置，包括一本体，所述本体上设置有一用于接收一狭缝涂布机喷嘴的接收槽，所述接收槽包括一第一斜面、一第二斜面和连接所述两个斜面的一连接面，所述第一斜面、第二斜面上分别形成有多个用于清洗剂喷出的注入孔，所述连接面上设置一插口，所述插口中插接有一用于疏通狭缝涂布机喷嘴的疏通薄膜；上述清洗装置还包括一电机和一引导架，所述电机驱动所述本体沿接收槽的长度方向运动，所述引导架用于引导狭缝涂布机喷嘴垂直下移到接收槽中。
优选地，所述插口的深度为2~5mm。
优选地，所述插口的宽度为40至100 um，上述疏通薄膜的厚度与插口的宽度相适配。
优选地，所述插口的宽度与所述疏通薄膜的厚度均为50um。
本发明又提出一种狭缝涂布机喷嘴的清洗装置，包括一本体，所述本体上设置有一用于接收一狭缝涂布机喷嘴的接收槽，所述接收槽包括一第一斜面、一第二斜面和连接上述两个斜面的一连接面，所述第一斜面、第二斜面上分别形成有多个用于清洗剂喷出的注入孔，所述连接面上形成有一插口，上述插口中插接有一用于疏通狭缝涂布机喷嘴的疏通薄膜。
优选地，所述插口形成于连接面的中间位置。
优选地，所述疏通薄膜垂直于上述连接面插接在插口内。
优选地，所述清洗装置还包括一引导架，上述引导架用于引导狭缝涂布机喷嘴垂直下移到接收槽中。
优选地，上述清洗装置还包括一驱动所述本体沿接收槽的长度方向运动的电机。
优选地，所述接收槽的截面为倒梯形。
优选地，所述插口的深度为2~5mm。
优选地，所述插口的宽度为40至100 um，上述疏通薄膜的厚度与插口的宽度相适配。
优选地，所述插口的宽度与所述疏通薄膜的厚度均为50um。
本发明的清洗装置的两个斜面可以用来清洗狭缝涂布机喷嘴的两个斜面，插口内的疏通薄膜可以用来疏通狭缝涂布机喷嘴的狭缝，不再需要人工来疏通狭缝涂布机喷嘴，可避免因打开设备防护门而产生较多的微粒、颗粒。另外，本发明的清洗装置清洗狭缝涂布机喷嘴的两个斜面和疏通狭缝可同时进行，节省工时。
附图说明
图1为本发明的狭缝涂布机喷嘴的清洗装置第一实施例的立体结构示意图；
图2为图1所示的清洗装置所清洗的狭缝涂布机喷嘴的立体结构示意图；
图3为图1所示的清洗装置清洗狭缝涂布机喷嘴的剖面结构示意图。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
参照图1，图1为本发明的狭缝涂布机喷嘴的清洗装置的第一实施例的立体结构示意图。该清洗装置包括一本体100，本体100上形成有一用于接收狭缝涂布机喷嘴的接收槽101，接收槽101包括一第一斜面102、一第二斜面103和一连接第一斜面102与第二斜面103的连接面104，连接面104设置在接收槽101的底部，第一斜面102、第二斜面103上分别形成有多个用于喷出清洗剂的注入孔105。连接面104上形成有一用于插接疏通薄膜107的插口106。插口106形成于连接面104的中间位置。疏通薄膜107通过人工或机器设备垂直于上述连接面104插接在插口106内。
上述清洗装置还包括一电机（图未示），用于驱动所述本体100沿所述接收槽101的长度方向运动。
本实施例中，插口106的深度为2~5mm，宽度为40至100 um；疏通薄膜107的厚度与插口106的宽度是相对应适配的，疏通薄膜107能刚刚好插紧在插口106内。插口106的宽度与疏通薄膜107的厚度优选为50um。疏通薄膜107采用的是硬度较强的金属材料制成，如钢片、铜片等。在其它实施例中，疏通薄膜107的厚度和插口106的宽度可根据实际清洗的喷嘴的狭缝来确定，以便于能起到更好的清洗作用。
参照图2和图3，图2为图1所示的清洗装置所清洗的狭缝涂布机喷嘴的立体结构示意图，图3为图1所示的清洗装置清洗狭缝涂布机喷嘴的剖面结构示意图。狭缝涂布机喷嘴200的底部包括一第三斜面201、一第四斜面202和一喷嘴面203。狭缝涂布机喷嘴200的顶部设有一孔洞204，内部设有一与该孔洞204相通的腔体205和一与腔体205相通的狭缝206，光阻剂从该孔洞204注入狭缝涂布机喷嘴200内，被存放于狭缝涂布机喷嘴200内的腔体205中，以供清洗狭缝206用。
所述狭缝涂布机喷嘴200的第三斜面201、第四斜面202和喷嘴面203分别与所述清洗装置的第一斜面102、第二斜面103、连接面104相适配。上述清洗装置的接收槽101的横截面和狭缝涂布机喷嘴200的横截面均为倒梯形，相适配连接。
使用本发明的清洗装置时，先在清洗装置的接收槽101底部上的插口106插接上述疏通薄膜107，再将需清洗的狭缝涂布机喷嘴200的底部放至清洗装置的接收槽101内，同时疏通薄膜107插入狭缝涂布机喷嘴的狭缝206，第一斜面102、第二斜面103上的注入孔105喷出清洗剂清洗狭缝涂布机喷嘴200的第三斜面201和第四斜面202，在清洗的过程中，光阻剂从狭缝涂布机喷嘴200的狭缝206中流出，同时电机带动本体100沿着接收槽101的长度方向来回移动，使得疏通薄膜107在狭缝206内来回移动，以便疏通狭缝206。
本发明的清洗装置可直接清洗和疏通狭缝涂布机喷嘴200，不再需要人工来疏通狭缝涂布机喷嘴，可避免因打开设备防护门而产生较多的微粒、颗粒。另外，本发明的清洗装置清洗狭缝涂布机喷嘴200的两个斜面201、202和疏通狭缝206可同时进行，节省工时。
本发明第二实施例的狭缝涂布机喷嘴的清洗装置与第一实施例的清洗装置大致相同，其区别之处在于：第二实施例的清洗装置进一步包括一引导架（图未示），上述引导架用于引导狭缝涂布机喷嘴200垂直下移到接收槽101中，使疏通薄膜107刚好插进狭缝206内。
以上所述仅为本发明的优选实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (13)

  1. 一种狭缝涂布机喷嘴的清洗装置，包括一本体，其特征在于，所述本体上设置有一用于接收一狭缝涂布机喷嘴的接收槽，所述接收槽包括一第一斜面、一第二斜面和连接所述两个斜面的一连接面，所述第一斜面、第二斜面上分别形成有多个用于清洗剂喷出的注入孔，所述连接面上设置一插口，所述插口中插接有一用于疏通狭缝涂布机喷嘴的疏通薄膜；上述清洗装置还包括一电机和一引导架，所述电机驱动所述本体沿接收槽的长度方向运动，所述引导架用于引导狭缝涂布机喷嘴垂直下移到接收槽中。
  2. 根据权利要求1所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的深度为2~5mm。
  3. 根据权利要求1所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的宽度为40至100 um，上述疏通薄膜的厚度与插口的宽度相适配。
  4. 根据权利要求3所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的宽度与所述疏通薄膜的厚度均为50um。
  5. 一种狭缝涂布机喷嘴的清洗装置，包括一本体，其特征在于，所述本体上设置有一用于接收一狭缝涂布机喷嘴的接收槽，所述接收槽包括一第一斜面、一第二斜面和连接上述两个斜面的一连接面，所述第一斜面、第二斜面上分别形成有多个用于清洗剂喷出的注入孔，所述连接面上形成有一插口，上述插口中插接有一用于疏通狭缝涂布机喷嘴的疏通薄膜。
  6. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口形成于连接面的中间位置。
  7. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述疏通薄膜垂直于上述连接面插接在插口内。
  8. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述清洗装置还包括一引导架，上述引导架用于引导狭缝涂布机喷嘴垂直下移到接收槽中。
  9. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，上述清洗装置还包括一驱动所述本体沿接收槽的长度方向运动的电机。
  10. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述接收槽的截面为倒梯形。
  11. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的深度为2~5mm。
  12. 根据权利要求5所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的宽度为40至100 um，上述疏通薄膜的厚度与插口的宽度相适配。
  13. 根据权利要求12所述的狭缝涂布机喷嘴的清洗装置，其特征在于，所述插口的宽度与所述疏通薄膜的厚度均为50um。
PCT/CN2011/075262 2011-05-10 2011-06-03 狭缝涂布机喷嘴的清洗装置 Ceased WO2012151769A1 (zh)

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Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5701822B2 (ja) * 2012-06-20 2015-04-15 東レエンジニアリング株式会社 洗浄装置および洗浄方法
CN103663375B (zh) * 2012-08-30 2015-09-23 宝山钢铁股份有限公司 一种预浓缩器喷嘴的免拆解在线疏通装置及疏通方法
CN103286030B (zh) * 2013-06-28 2016-08-31 深圳市华星光电技术有限公司 一种狭缝喷嘴清洁装置
CN103846183A (zh) * 2013-12-20 2014-06-11 深圳市华星光电技术有限公司 一种涂布机喷嘴清洁装置
CN103741096B (zh) * 2013-12-27 2015-11-11 深圳市华星光电技术有限公司 Oled蒸镀机的蒸发源组件
US10327605B2 (en) * 2014-12-18 2019-06-25 Durr Megtec, Llc Air bar cleaning tool, system and method
CN106076744B (zh) * 2016-08-26 2018-11-23 武汉华星光电技术有限公司 光阻涂布设备及涂布设备用喷嘴
CN106622808B (zh) * 2016-12-30 2019-01-22 武汉华星光电技术有限公司 刮条和显影装置
CN107694811B (zh) * 2017-09-25 2019-08-20 武汉华星光电技术有限公司 清洁装置
JP6904583B2 (ja) * 2018-12-18 2021-07-21 株式会社飯沼ゲージ製作所 スリットコーター
JP6975754B2 (ja) * 2019-09-10 2021-12-01 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
CN111570161B (zh) * 2020-05-14 2021-11-02 时代一汽动力电池有限公司 一种锂电池电极涂布设备
CN111805715B (zh) * 2020-07-23 2021-09-03 内蒙古元史文化传媒有限公司 一种陶瓷喷釉机

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4480789A (en) * 1980-05-20 1984-11-06 Bergwerksverband Gmbh Water nozzle
US5845357A (en) * 1996-11-18 1998-12-08 Motoman, Inc. Nozzle cleaning device
JPH11300261A (ja) * 1998-04-22 1999-11-02 Toray Ind Inc 塗布用ダイ清掃装置およびこれを用いた塗布方法並びにカラーフィルターの製造装置および製造方法
JP2004172629A (ja) * 2003-12-15 2004-06-17 Dainippon Screen Mfg Co Ltd 塗布装置及び塗布方法
CN1669680A (zh) * 2004-03-19 2005-09-21 大日本网目版制造株式会社 喷嘴清洗装置及基板处理装置
CN101362123A (zh) * 2007-08-10 2009-02-11 K.C.科技股份有限公司 喷嘴清洗装置及清洗方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4392613A (en) * 1980-12-22 1983-07-12 Armco Inc. Discharge gap cleaning device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4480789A (en) * 1980-05-20 1984-11-06 Bergwerksverband Gmbh Water nozzle
US5845357A (en) * 1996-11-18 1998-12-08 Motoman, Inc. Nozzle cleaning device
JPH11300261A (ja) * 1998-04-22 1999-11-02 Toray Ind Inc 塗布用ダイ清掃装置およびこれを用いた塗布方法並びにカラーフィルターの製造装置および製造方法
JP2004172629A (ja) * 2003-12-15 2004-06-17 Dainippon Screen Mfg Co Ltd 塗布装置及び塗布方法
CN1669680A (zh) * 2004-03-19 2005-09-21 大日本网目版制造株式会社 喷嘴清洗装置及基板处理装置
CN101362123A (zh) * 2007-08-10 2009-02-11 K.C.科技股份有限公司 喷嘴清洗装置及清洗方法

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