WO2014107927A1 - 喷嘴清洁装置和具有该喷嘴清洁装置的涂布机 - Google Patents

喷嘴清洁装置和具有该喷嘴清洁装置的涂布机 Download PDF

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Publication number
WO2014107927A1
WO2014107927A1 PCT/CN2013/070980 CN2013070980W WO2014107927A1 WO 2014107927 A1 WO2014107927 A1 WO 2014107927A1 CN 2013070980 W CN2013070980 W CN 2013070980W WO 2014107927 A1 WO2014107927 A1 WO 2014107927A1
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Prior art keywords
nozzle
coater
cleaning device
holes
cleaner
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PCT/CN2013/070980
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English (en)
French (fr)
Inventor
张岳妍
黄文德
朱厚毅
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深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/824,420 priority Critical patent/US20140190532A1/en
Publication of WO2014107927A1 publication Critical patent/WO2014107927A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids

Definitions

  • the present invention relates to a coater in an optical process, and more particularly to a nozzle cleaning device for a coater and a coater having the same.
  • the object of the present invention is to provide a nozzle cleaning device for sucking away the nozzle tip and its surrounding residual glue by vacuuming and having the nozzle cleaning device, in view of the defect that the rubber cleaner cannot completely clean the nozzle of the coating machine in the prior art. Coating machine.
  • the invention provides a nozzle cleaning device comprising a cleaner, an evacuation pipe and a vacuum pump, the cleaner having a concave hole shaped to match the nozzle of the coater, wherein the coater nozzle is accommodated in the nozzle
  • the inner wall of the recessed hole is provided with a plurality of through holes; one end of the vacuuming pipe is connected to the plurality of through holes, and the other end of the vacuuming pipe is connected to the vacuum pump.
  • the through hole is opened at the bottom of the inner wall of the recessed hole.
  • the through holes are also formed on both sides of the inner wall of the recessed hole.
  • the cleaner is made of rubber.
  • a coater includes:
  • a coating liquid output device filled with a coating liquid, the coating liquid output device comprising a nozzle through which the coating liquid is ejected;
  • a nozzle cleaning device comprising a cleaner, an evacuation pipe and a vacuum pump, the cleaner having a recess having a shape matching the nozzle of the coater, wherein the coater nozzle is received in the recess, the recess
  • the inner wall of the hole is provided with a plurality of through holes; one end of the vacuuming pipe is connected to the plurality of through holes, and the other end of the vacuuming pipe is connected to the vacuum pump;
  • a transmission device is coupled to the bottom of the cleaning device to control movement of the cleaning device and to provide a transmission force to cause the cleaning device to move up and down.
  • the cleaning device of the above coating machine includes a base coupled to the base to support the cleaning device.
  • the length of the cleaner in the above coater is the same as the length of the coater nozzle.
  • the through hole is opened at the bottom of the inner wall of the recessed hole.
  • the through hole at the bottom of the recessed hole in the above coating machine is offset from the inner tube of the coater nozzle.
  • the through holes are also formed on both sides of the inner wall of the recessed holes.
  • a coater includes:
  • a coating liquid output device filled with a coating liquid, the coating liquid output device comprising a nozzle through which the coating liquid is ejected;
  • a nozzle cleaning device comprising a cleaner, an evacuation pipe, a vacuum pump and a movable base mounted on the base; the cleaner having a recess having a shape matching the nozzle of the coater for The coater nozzle is received in the recessed hole, and the inner wall of the recessed hole is provided with a plurality of through holes; one end of the vacuuming pipe is connected to the plurality of through holes, and the other end of the vacuuming pipe is connected to the vacuum pump.
  • the length of the cleaner in the above coater is the same as the length of the coater nozzle.
  • the through hole is opened at the bottom of the inner wall of the recessed hole.
  • the through hole at the bottom of the recessed hole in the above coating machine is offset from the inner tube of the coater nozzle.
  • the through holes are also formed on both sides of the inner wall of the recessed holes.
  • the utility model has the advantages that the nozzle cleaning device of the invention and the coater having the nozzle cleaning device have the advantages that: a plurality of through holes are added to the rubber cleaner, and the through holes are connected to the vacuum pump through the vacuum pipe.
  • the nozzle of the applicator is cleaned by sucking the nozzle tip and the residual glue around it to the evacuation pipe by vacuuming.
  • the nozzle cleaning device provided by the invention can conveniently remove residual photoresist to clean the nozzle, effectively improve product yield and production efficiency, and does not need to use expensive nano materials, and is low in cost.
  • FIG. 1 is a schematic view of a preferred embodiment of a coater having a nozzle cleaning device according to the present invention
  • FIG. 2 is a front elevational view of a preferred embodiment of a nozzle cleaning device provided by the present invention
  • FIG 3 is a side elevational view of a preferred embodiment of a nozzle cleaning device provided by the present invention.
  • the invention provides a nozzle cleaning device and a coating machine having the nozzle cleaning device for thoroughly cleaning the gel of the coating machine nozzle to reduce the occurrence of product quality problems and improve product yield.
  • the coater nozzle cleaning device of the present invention is preferably applied to a clean film transistor liquid crystal display ( TFT-LCD).
  • TFT-LCD clean film transistor liquid crystal display
  • the photoresist coating machine in the previous process of the process in various embodiments, it can also be applied to high-precision processes such as semiconductors or the like, or other processes that require gel formation.
  • the coater includes a coating liquid output device 10, the transmission (the transmission of Figure 1 is shielded but not shown), the cleaning device 40, a pair of guide rails 50.
  • the coating liquid output device 10 includes a nozzle 101 through which the nozzle 101 The filled coating liquid is delivered.
  • the transmission device can be an existing automatic control motor, a semi-automatic control motor, a stepping motor or the like that can output power to drive the cleaning device to rise.
  • Coating liquid output device 10 and a pair of guide rails 50 The connection can be moved back and forth by sliding on the guide rail 50.
  • the cleaning device 40 is disposed below the moving origin of the coating liquid output device 10 and aligned with the nozzle of the coating liquid output device 10 .
  • the cleaning device 40 includes a base 401, a cleaner 402, a vacuuming pipe 403 (the vacuuming pipe of Fig. 1 is shielded but not shown), and a vacuum pump 404.
  • Base 401 Connected to the transmission 20, it can be moved by the power provided by the transmission 20.
  • the nozzle 101 of the coating liquid output device 10 returns to the origin, the transmission force provided by the transmission 20 causes the cleaning device 40 is raised to conform to the nozzle 101, that is, the tip end of the nozzle 101 abuts against the cleaner 402 of the cleaning device 40.
  • the cleaner 402 of the cleaning device 40 passes through the evacuation pipe 403 It is connected to the vacuum pump 404 to form an evacuation circuit.
  • FIG. 2 to 3 are schematic views showing a preferred embodiment of the nozzle cleaning device of the present invention.
  • figure 2 For a front view of the cleaning device, Figure 3 is a side view of the cleaning device.
  • the nozzle 101 of the coater is regarded as a see-through element, but the actual structure thereof is not limited thereto.
  • Vacuum pump 404 in the figure Shaded is not shown.
  • the nozzle 101 of the coating liquid output device 10 of the coater has a nozzle face 1011 having an inner pipe 1012 therein.
  • the cleaning device 40 A cleaner 402, a base 401, an evacuation conduit 403, and a vacuum pump 404 are included.
  • the cleaner 402 is fixedly mounted to the base 401.
  • the connection between the two can be screwed together, or glued or hinged.
  • the base 401 can be made of plastic or metal.
  • the cleaner 402 and the coater nozzle 101 The length is the same, that is, the length of the short side of the glass substrate is the same.
  • the cleaner 402 A recessed hole 4021 having a shape conforming to the shape of the nozzle face 1011 of the nozzle 101, the coater nozzle 101 being received in the recessed hole 4021 Within, the two closely fit each other.
  • a row of through holes 4022 is defined in the bottom of the inner wall of the recessed hole 4021.
  • a row of through holes 4022 may be simultaneously formed on both sides and the bottom of the inner wall of the recessed hole 4021.
  • the through hole The preferred shape of the 4022 is circular or square, and may be any other shape, or may be any arrangement of through holes of different shapes.
  • the through hole 4022 at the bottom and the inner pipe 1012 in the nozzle 101 They are staggered from each other, that is, when the nozzle 101 is attached to the cleaner 402, the bottom through hole 4022 and the inner pipe 1012 are not aligned or communicated with each other, thereby preventing the nozzle 101 from being evacuated.
  • the coating liquid in the inner pipe 1012 is sucked into the vacuuming pipe together, causing waste of the coating liquid.
  • Each of the through holes 4022 has a corresponding evacuation pipe 403 and is hermetically connected thereto, and the vacuum pipe 403 The other end is connected to a vacuum pump 404.
  • the control valve of the vacuum pump is opened, and the nozzle accommodated in the recess 402 is sucked through the evacuation pipe 403.
  • the coating liquid is a photoresist, and may also be a coating liquid such as a sealant; the cleaner 40 It can be made of rubber or plastic, other petrochemical materials; the vacuum pipe 403 can be made of stainless steel.
  • the transmission 20 A drive force is provided to push the cleaning device 40 connected thereto for the ascending motion.
  • the cleaner 402 of the cleaning device 40 is raised to the recess 4021 of the cleaner 402 and the nozzle face of the nozzle 101. 1011 is completely fit.
  • the vacuum pump 404 opens the control valve through the vacuum line 403 to the dimple 4021 and the nozzle face 1011
  • the sealed space formed by lamination is subjected to a vacuuming operation. Due to the strong attraction of vacuuming, the tip of the nozzle 101 and the surrounding coating liquid are sucked into the evacuation pipe 403 to the nozzle 101. Perform effective cleaning.
  • the coating liquid residue in the evacuation pipe 403 is discharged to the outside of the coater by air pressure.

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Abstract

一种喷嘴清洁装置，用于清洁一涂布机喷嘴（101），该喷嘴清洁装置包括清洁器（402）、抽真空管道（403）与真空泵（404），该清洁器（402）具有一形状与该涂布机喷嘴（101）相吻合的凹孔（4021），供该涂布机喷嘴（101）容纳于该凹孔（4021）中，该凹孔（4021）的内壁开设有多个通孔（4022）；该抽真空管道（403）的一端与该多个通孔（4022）连接，该抽真空管道（403）的另一端接入该真空泵（404）。一种涂布机，包括该喷嘴清洁装置的。利用该喷嘴清洁装置可方便地去除喷嘴出口残留的光刻胶，有效地提高产品的成品率以及生产效率，且无需使用昂贵的纳米材料。

Description

喷嘴清洁装置和具有该喷嘴清洁装置的涂布机 技术领域
本发明涉及光学工艺流程中的涂布机，尤其涉及一种用于涂布机的喷嘴清洁装置和具有该喷嘴清洁装置的涂布机。
背景技术
显示器制作流程中使用的光刻胶涂布机台普遍存在凝胶的问题。即光阻涂布完成后，常会有部分凝固的光刻残胶残留在喷嘴的尖端和周围。当下一次使用喷嘴进行涂布时，这些残留的光刻胶会对喷出胶液的通道造成阻碍，可能导致后续加工的产品质量受到影响。因此，现有技术中一般在进行每片玻璃板的光刻胶涂布之前，通常会使用橡胶制成的清洁器来擦拭喷嘴尖端的残留光刻胶。然而由于橡胶自身存在较大的弹性，在擦拭喷嘴时往往无法与喷嘴紧密贴合，因此较难有效清洁喷嘴尖端。此外，大多数橡胶材料的吸水性很差，以橡胶擦拭喷嘴时，很难将擦拭下来的光刻胶吸附带走，反而令这些擦拭下来的光刻胶仍然残留附着在喷嘴尖端，导致喷嘴变得更脏。
针对以上问题，目前常用的另一种解决方案是在喷嘴内部和喷嘴的周围涂布特定纳米材料制成的薄膜，增加喷嘴尖端的润滑度，防止光阻材料滞留并堆积在喷嘴附近，进而保持喷嘴的清洁。但这种方式需要使用昂贵的纳米材料，成本较高。
发明内容
本发明的目的在于，针对现有技术中橡胶清洁器不能完全清洁涂布机喷嘴的缺陷，提出了一种利用抽真空吸走喷嘴尖端及其周围残胶的喷嘴清洁装置和具有该喷嘴清洁装置的涂布机。
本发明提供的一种喷嘴清洁装置，该喷嘴清洁装置包括清洁器、抽真空管道与真空泵，该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵。
上述的喷嘴清洁装置中所述通孔开设在该凹孔内壁的底部。
上述的喷嘴清洁装置中所述通孔还开设在该凹孔内壁的两侧。
上述的喷嘴清洁装置中所述清洁器为橡胶材质。
一种涂布机包括：
涂液输出装置，填充有涂液，所述涂液输出装置包括一喷嘴，通过所述涂布机喷嘴将所述涂液喷出；
喷嘴清洁装置，该喷嘴清洁装置包括清洁器、抽真空管道与真空泵，该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵；
传动装置，连接至该清洁装置的底部，以控制所述清洁装置的运动，且提供传动力使该清洁装置作升降运动。
上述的涂布机中所述清洁装置包含一底座，该传动装置与该底座连接，以支撑所述清洁装置。
上述的涂布机中所述清洁器的长度与该涂布机喷嘴的长度一致。
上述的涂布机中所述通孔开设在该凹孔内壁的底部。
上述的涂布机中所述凹孔底部的通孔与该涂布机喷嘴内管道相互错开。
上述的涂布机中所述通孔还开设在该凹孔内壁的两侧。
一种涂布机包括：
涂液输出装置，填充有涂液，所述涂液输出装置包括一喷嘴，通过所述涂布机喷嘴将所述涂液喷出；以及
喷嘴清洁装置，该喷嘴清洁装置包括清洁器、抽真空管道、真空泵与可移动的底座，该清洁器安装在该底座上；该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵。
上述的涂布机中所述清洁器的长度与该涂布机喷嘴的长度一致。
上述的涂布机中所述通孔开设在该凹孔内壁的底部。
上述的涂布机中所述凹孔底部的通孔与该涂布机喷嘴内管道相互错开。
上述的涂布机中所述通孔还开设在该凹孔内壁的两侧。
实施本发明喷嘴清洁装置和具有该喷嘴清洁装置的涂布机的有益效果在于：采用在橡胶清洁器上增加多个通孔，将通孔与真空泵通过抽真空管道连接 ，利用抽真空的方式将喷嘴尖端及其周围的残胶吸入抽真空管道，从而对该涂布机的喷嘴进行清洁。通过本发明提供的喷嘴清洁装置可方便地去除残留的光刻胶以清洁喷嘴，有效地提高产品的成品率以及生产效率，且无需使用昂贵的纳米材料，成本低廉。
附图说明
下面将结合附图及实施例对本发明一种喷嘴清洁装置和具有喷嘴清洁装置的涂布机作进一步说明，附图中：
图 1 为本发明提供的具有喷嘴清洁装置的涂布机的较佳实施例示意图；
图 2 为本发明提供的喷嘴清洁装置的较佳实施例的正面示意图；
图 3 为本发明提供的喷嘴清洁装置的较佳实施例的侧面示意图。
具体实施方式
本发明提供一种喷嘴清洁装置及具有该喷嘴清洁装置的涂布机，供彻底清洁涂布机喷嘴的凝胶以减少产品质量问题的发生，提升产品成品率。本发明的涂布机喷嘴清洁装置，较佳应用于清洁薄膜晶体管液晶显示器（ TFT-LCD ）工艺流程前段流程中的光刻胶涂布机台；在不同实施例中，也可应用于如半导体或其它类似的高精密工艺流程，或是其它需要排除凝胶形成的工艺流程。
参考图 1 是本发明提供的具有喷嘴清洁装置的涂布机的较佳实施例提供的一种涂布机。该涂布机包括涂液输出装置 10 、传动装置（图 1 的传动装置被遮蔽而未示）、清洁装置 40 、一对导轨 50 。涂液输出装置 10 包括喷嘴 101 ，通过喷嘴 101 将填充的涂液输送而出来。传动装置可为现有的自动控制马达、半自动控制马达、步进马达等可输出动力以驱动清洁装置上升的装置。涂液输出装置 10 与一对导轨 50 连接，可以通过在导轨 50 上滑动而进行前后往返移动。清洁装置 40 设于涂液输出装置 10 运动原点的下方，并对准涂液输出装置 10 的喷嘴 101 。清洁装置 40 包括一底座 401 、清洁器 402 、抽真空管道 403 （图 1 的抽真空管道被遮蔽而未示）以及真空泵 404 。底座 401 与传动装置 20 相连，可以依靠由传动装置 20 提供的动力而移动。当涂液输出装置 10 的喷嘴 101 回到原点时，传动装置 20 提供的传动力使清洁装置 40 上升至与喷嘴 101 互相贴合，即喷嘴 101 的尖端与清洁装置 40 的清洁器 402 抵接。清洁装置 40 的清洁器 402 通过抽真空管道 403 与真空泵 404 连接，形成一个抽真空回路。
参考图 2 至图 3 。图 2 至图 3 所示为本发明的喷嘴清洁装置的较佳实施例示意图。图 2 为该清洁装置的正面示意图，图 3 为该清洁装置的侧视示意图。其中，将该涂布机的喷嘴 101 绘视为可透视元件，然而其实际结构不限于此。该图中真空泵 404 被遮蔽未示出。在此实施方式中，该涂布机的涂液输出装置 10 的喷嘴 101 具有喷嘴面 1011 ，其内部具有内管道 1012 。该清洁装置 40 包括一清洁器 402 、底座 401 、抽真空管道 403 以及真空泵 404 。
如图 2 至图 3 所示的较佳实施例所示，该清洁器 402 固定安装于底座 401 之上，两者之间的连接可通过螺纹旋合连接，也可为胶粘接或者铰接。底座 401 可由塑料或金属制成。该清洁器 402 与该涂布机喷嘴 101 的长度一致，即与玻璃基板的短边长度一致，当清洁器 402 对喷嘴 101 进行清洁时，不需要再行走玻璃基板短边长度的距离，减少了清洁时间。该清洁器 402 具有一凹孔 4021 ，该凹孔 4021 的形状与喷嘴 101 的喷嘴面 1011 形状吻合，该涂布机喷嘴 101 容纳于该凹孔 4021 内，两者之间互相紧密贴合。在该凹孔 4021 的内壁底部开设一排通孔 4022 ，还可在该凹孔 4021 的内壁两侧和底部同时开设一排通孔 4022 。该通孔 4022 的较佳形状为圆形或方形，也可以其他任意形状，还可以是不同形状的通孔任意排列组合。底部的通孔 4022 与该喷嘴 101 中的内管道 1012 相互错开，即当喷嘴 101 与清洁器 402 贴合时，底部通孔 4022 与内管道 1012 不会相互对准或连通，这样可以防止抽真空时将该喷嘴 101 的内管道 1012 中的涂液一起吸入抽真空管道中，造成涂液的浪费。每一个通孔 4022 均有一个对应的抽真空管道 403 与之密闭连接，该抽真空管道 403 的另一端连接真空泵 404 。当进行清洁时，打开真空泵的控制阀门，通过抽真空管道 403 吸出该凹孔 402 中容纳的喷嘴 101 的尖端及其周围的凝固的涂液。在此较佳实施例中，该涂液为光刻胶，也可以为密封胶等涂液；所述清洁器 40 可以为橡胶材质，也可由塑料、其他石化材料所制成；所述抽真空管道 403 可以为不锈钢材质。
参考图 1 至图 3 ，涂布机的涂液输出装置 10 的喷嘴 101 运动到原点时，传动装置 20 提供传动力，推动与其连接的清洁装置 40 作上升运动。该清洁装置 40 的清洁器 402 上升至该清洁器 402 的凹坑 4021 与喷嘴 101 的喷嘴面 1011 完全贴合。真空泵 404 打开控制阀门，通过抽真空管道 403 对凹坑 4021 与喷嘴面 1011 贴合形成的密闭空间进行抽真空操作。由于抽真空形成的强大吸引力，将喷嘴 101 尖端及周围的涂液吸入抽真空管道 403 内，对喷嘴 101 进行有效的清洁。通过气压作用将抽真空管道 403 内的涂液残胶排送至涂布机的外部。
应当理解的是，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，而所有这些改进和变换都应属于本发明所附权利要求的保护范围。

Claims (15)

  1. 一种喷嘴清洁装置，用于清洁一涂布机喷嘴，其中，该喷嘴清洁装置包括清洁器、抽真空管道与真空泵，该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵。
  2. 根据权利要求 1 所述的喷嘴清洁装置，其中，所述通孔开设在该凹孔内壁的底部。
  3. 根据权利要求 2 所述的喷嘴清洁装置，其中，所述通孔还开设在该凹孔内壁的两侧。
  4. 根据权利要求 1 所述的喷嘴清洁装置，其中，所述清洁器为橡胶材质。
  5. 一种涂布机，其中，包括：
    涂液输出装置，填充有涂液，所述涂液输出装置包括一喷嘴，通过所述涂布机喷嘴将所述涂液喷出；
    喷嘴清洁装置，该喷嘴清洁装置包括清洁器、抽真空管道与真空泵，该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵；
    传动装置，连接至该喷嘴清洁装置的底部，以控制所述清洁装置的运动，且提供传动力使该喷嘴清洁装置作升降运动。
  6. 根据权利要求 5 所述的涂布机，其中，所述喷嘴清洁装置包含一底座，该传动装置与该底座连接，以支撑所述喷嘴清洁装置。
  7. 根据权利要求 5 所述的涂布机，其中，所述清洁器的长度与该涂布机喷嘴的长度一致。
  8. 根据权利要求 5 所述的涂布机，其中，所述通孔开设在该凹孔内壁的底部。
  9. 根据权利要求 8 所述的涂布机，其中，所述凹孔底部的通孔与该涂布机喷嘴内管道相互错开。
  10. 根据权利要求 8 所述的涂布机，其中，所述通孔还开设在该凹孔内壁的两侧。
  11. 一种涂布机，其中，包括：
    涂液输出装置，填充有涂液，所述涂液输出装置包括一喷嘴，通过所述涂布机喷嘴将所述涂液喷出；以及
    喷嘴清洁装置，该喷嘴清洁装置包括清洁器、抽真空管道、真空泵与可移动的底座，该清洁器安装在该底座上；该清洁器具有一形状与该涂布机喷嘴相吻合的凹孔，供该涂布机喷嘴容纳于该凹孔中，该凹孔的内壁开设有多个通孔；该抽真空管道的一端与该多个通孔连接，该抽真空管道的另一端接入该真空泵。
  12. 根据权利要求 11 所述的涂布机，其中，所述清洁器的长度与该涂布机喷嘴的长度一致。
  13. 根据权利要求 11 所述的涂布机，其中，所述通孔开设在该凹孔内壁的底部。
  14. 根据权利要求 13 所述的涂布机，其中，所述凹孔底部的通孔与该涂布机喷嘴内管道相互错开。
  15. 根据权利要求 13 所述的涂布机，其中，所述通孔还开设在该凹孔内壁的两侧。
PCT/CN2013/070980 2013-01-10 2013-01-25 喷嘴清洁装置和具有该喷嘴清洁装置的涂布机 WO2014107927A1 (zh)

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