WO2012141436A2 - 플라즈마 전처리를 이용한 ｒｇｂ 인쇄 방법 및 이를 위한 플라즈마 장치 - Google Patents

플라즈마 전처리를 이용한 ｒｇｂ 인쇄 방법 및 이를 위한 플라즈마 장치 Download PDF

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Publication number
WO2012141436A2
WO2012141436A2 PCT/KR2012/002208 KR2012002208W WO2012141436A2 WO 2012141436 A2 WO2012141436 A2 WO 2012141436A2 KR 2012002208 W KR2012002208 W KR 2012002208W WO 2012141436 A2 WO2012141436 A2 WO 2012141436A2
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WO
WIPO (PCT)
Prior art keywords
plasma
rgb
substrate
gas
organic
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Application number
PCT/KR2012/002208
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English (en)
French (fr)
Korean (ko)
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WO2012141436A3 (ko
Inventor
이상로
김윤환
임찬주
Original Assignee
(주)에스이피
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by (주)에스이피 filed Critical (주)에스이피
Priority to CN2012800180287A priority Critical patent/CN103476594A/zh
Publication of WO2012141436A2 publication Critical patent/WO2012141436A2/ko
Publication of WO2012141436A3 publication Critical patent/WO2012141436A3/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/0011—Pre-treatment or treatment during printing of the recording material, e.g. heating, irradiating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00—Inking and printing with a printer's forme
    • B41M1/14—Multicolour printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M1/00—Inking and printing with a printer's forme
    • B41M1/26—Printing on other surfaces than ordinary paper
    • B41M1/30—Printing on other surfaces than ordinary paper on organic plastics, horn or similar materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M3/00—Printing processes to produce particular kinds of printed work, e.g. patterns
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels

Definitions

  • the present invention relates to an RGB printing method using a plasma pretreatment and a plasma apparatus for the same, in detail, a) forming an organic partition on an inorganic substrate, b) cleaning the surface of the substrate on which the organic partition is formed using plasma. Hydration treatment; c) hydrophobizing the surface of the hydrophilized substrate using plasma; and d) inkjet printing an RGB organic solvent between organic partitions on the hydrophobized substrate. RGB printing method using the same, and a plasma apparatus for the same.
  • the RGB printing method and the atmospheric pressure plasma apparatus using the plasma pretreatment of the present invention it is possible to easily and efficiently prevent the phenomenon of interference and spreading between printing solutions when inkjet printing the RGB organic solvent, thereby using the RGB organic solvent.
  • the quality of display devices can be significantly increased.
  • barrier ribs are formed on a substrate using various materials such as polymers or photoresist (PR) materials, and then different Organic solvents are sprayed.
  • the present invention has developed a method that can easily and efficiently prevent the occurrence of interference between printing solutions when inkjet printing the RGB organic solvent in the entire display manufacturing process.
  • An object of the present invention in the step of inkjet printing the RGB organic solvent on the display substrate, the interference between the printing solutions and the spreading of the solvent in the barrier ribs and the like efficiently suppresses the RGB organic solvent to be deposited on the substrate, RGB To provide an RGB printing method and an apparatus therefor that can significantly improve the quality of display devices using organic solvents.
  • the present invention for achieving the object as described above, a) forming an organic barrier on the inorganic substrate, b) hydrophilization treatment of the surface of the substrate formed with the organic barrier using plasma, c) the hydrophilization And hydrophobizing the treated substrate surface using plasma, and d) inkjet printing an RGB organic solvent between the organic partitions on the hydrophobized substrate.
  • the organic barrier ribs are hydrophobic to suppress the spread of the organic solvent, and the substrates between the organic barrier ribs are hydrophilic, so that the organic solvent is deposited on the substrate.
  • the organic partition wall may be made of a polymer or a photoresist material, in the hydrophilization treatment using an atmospheric plasma, using O 2 , CDA or CH 4 as a process gas, the hydrophobization At the time of treatment, atmospheric plasma is used, and it is preferable to use a compound having a fluorine group such as SF 6 , CF 4 , NF 3 , and HF as the process gas.
  • a fluorine group such as SF 6 , CF 4 , NF 3 , and HF
  • the present invention for achieving the above object is a) atmospheric plasma module consisting of a cathode, an anode, a housing, b) a first gas supply and control for supplying a hydrophilic gas to the atmospheric plasma module and controls the gas supply amount Apparatus, c) a second gas supply and control device for supplying hydrophobic gas to the atmospheric plasma module and controlling a gas supply amount, d) an exhaust device for exhausting the process gas in the atmospheric plasma module, and e) the atmospheric plasma module. And a cooling device for cooling, and f) a power supply device for supplying power to the atmospheric plasma module.
  • the hydrophilization gas supplied from the first gas supply and control device includes a process gas of O 2 , CDA or CH 4
  • the hydrophobization gas supplied from the second gas supply and control device is SF 6 , CF. 4, NF 3, preferably includes a process gas consisting of a compound having fluorine as HF.
  • the present invention adds a hydrophilization and hydrophobicization process using an atmospheric plasma apparatus prior to inkjet printing an RGB organic solvent on a display substrate, thereby simplifying and efficiently eliminating interference between printing solutions through a very simple process addition. In this way, the quality of display devices using the RGB organic solvent can be significantly increased.
  • FIG. 1 is a flowchart illustrating an RGB printing method using plasma pretreatment according to the present invention.
  • FIG. 2 shows a hydrophilization module of an atmospheric plasma apparatus for RGB printing pretreatment according to the invention.
  • FIG. 3 shows a hydrophobicization module of an atmospheric plasma apparatus for RGB printing pretreatment according to the present invention.
  • RGB printing method using the plasma pretreatment of the present invention comprises the steps of a) forming an organic barrier on an inorganic substrate, b) hydrophilizing the surface of the substrate formed with the organic barrier using plasma, c) the hydrophilization treatment Hydrophobizing the surface of the substrate using plasma; and d) inkjet printing an RGB organic solvent between organic partitions on the hydrophobized substrate.
  • barrier ribs are formed using various materials such as polymer or PR material, and then different organic solvents are sprayed between the barrier ribs.
  • the organic barrier is hydrophobic to suppress the spread of the organic solvent
  • organic The substrate between the barrier ribs is hydrophilic, and the organic solvent is deposited on the substrate.
  • the organic partition wall may be formed of various organic materials such as a polymer or a photoresist material.
  • the hydrophilization treatment may use a general atmospheric plasma process, a material capable of hydrophilizing the surface, such as O 2 , CDA or CH 4 may be used as the process gas.
  • a general atmospheric pressure plasma process may be used, except that SF 6 , CF may be used as a process gas. 4, NF 3, it is preferred to use a compound having a group F exhibit hydrophobic characteristics such as HF.
  • the F groups exhibiting hydrophobicity react only with the surface of the organic material based on the C component.
  • the organic bulkhead shows hydrophobicity and the inorganic substrate between the organic bulkheads is still hydrophilic. It is worn.
  • the organic barrier ribs are hydrophobic to suppress interference and spreading of the organic solvent, and the substrates between the organic barrier ribs are hydrophilic to allow the organic solvent to be deposited on the substrate.
  • the atmospheric pressure plasma apparatus for RGB printing pre-processing described above, as shown in Figures 2 and 3, a) an atmospheric plasma module consisting of a cathode, an anode, a housing, b) supplying a hydrophilic gas to the atmospheric plasma module and gas A first gas supply and control device for controlling a supply amount, c) a second gas supply and control device for supplying a hydrophobic gas to the atmospheric plasma module and controlling a gas supply amount, and d) exhausting a process gas in the atmospheric plasma module. And an exhaust device, e) a cooling device for cooling the atmospheric plasma module, and f) a power supply device for supplying power to the atmospheric plasma module.
  • the hydrophilization gas supplied from the first gas supply and control device may include N 2 gas and a process gas of O 2 , CDA or CH 4 , and for the hydrophobization supply from the second gas supply and control device.
  • the gas may include a process gas consisting of a N 2 gas and a compound having a fluorine group such as SF 6 , CF 4 , NF 3 , and HF.
  • the interference between printing solutions and the solvent spreading in the barrier ribs and the like in the inkjet printing step of the RGB organic solvent in the display manufacturing process can be effectively suppressed, and each RGB on the substrate By allowing the organic solvent to be settled, the quality of display devices using the RGB organic solvent can be significantly increased.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/KR2012/002208 2011-04-12 2012-03-27 플라즈마 전처리를 이용한 ｒｇｂ 인쇄 방법 및 이를 위한 플라즈마 장치 WO2012141436A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012800180287A CN103476594A (zh) 2011-04-12 2012-03-27 利用等离子体预处理的rgb印刷方法及用于其的等离子体装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020110033857A KR20120116237A (ko) 2011-04-12 2011-04-12 플라즈마 전처리를 이용한 ｒｇｂ 인쇄 방법 및 이를 위한 플라즈마 장치
KR10-2011-0033857 2011-04-12

Publications (2)

Publication Number Publication Date
WO2012141436A2 true WO2012141436A2 (ko) 2012-10-18
WO2012141436A3 WO2012141436A3 (ko) 2012-12-13

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PCT/KR2012/002208 WO2012141436A2 (ko) 2011-04-12 2012-03-27 플라즈마 전처리를 이용한 ｒｇｂ 인쇄 방법 및 이를 위한 플라즈마 장치

Country Status (3)

Country Link
KR (1) KR20120116237A (zh)
CN (1) CN103476594A (zh)
WO (1) WO2012141436A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11802337B1 (en) * 2014-01-28 2023-10-31 United States of America as Administrator of NASA Atmospheric pressure plasma based fabrication process of printable electronics and functional coatings

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* Cited by examiner, † Cited by third party
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CN110176477A (zh) * 2019-05-20 2019-08-27 深圳市华星光电半导体显示技术有限公司 基于喷墨打印技术的有机发光显示装置及其制作方法
CN111063816A (zh) * 2019-12-19 2020-04-24 深圳市华星光电半导体显示技术有限公司 一种有机发光二极管、制备方法及显示装置
KR102567505B1 (ko) * 2020-09-14 2023-08-16 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN114905855B (zh) * 2022-05-30 2023-05-26 华中科技大学 一种微圆周曲面共形敏感结构及其制备方法和装置
CN114919289B (zh) * 2022-05-31 2023-06-27 苏州华星光电技术有限公司 一种喷墨打印设备及喷墨打印方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000301711A (ja) * 1999-02-15 2000-10-31 Konica Corp 表面処理方法、インクジェット記録媒体の製造方法及びインクジェット記録媒体
JP2003103895A (ja) * 2001-09-28 2003-04-09 Fuji Photo Film Co Ltd パターンシート製造方法およびパターンシート製造装置
KR100426680B1 (ko) * 2002-02-26 2004-04-13 엘지.필립스 엘시디 주식회사 잉크젯 프린팅 방식 유기전계발광 소자 및 그의 제조방법
JP2005072034A (ja) * 2003-08-22 2005-03-17 Shibaura Mechatronics Corp プラズマ処理装置
KR20060001859A (ko) * 2005-11-25 2006-01-06 송석균 상압 플라즈마 발생장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW507500B (en) * 2001-01-09 2002-10-21 Sumitomo Rubber Ind Electrode plate for plasma display panel and manufacturing method thereof
US20030124265A1 (en) * 2001-12-04 2003-07-03 3M Innovative Properties Company Method and materials for transferring a material onto a plasma treated surface according to a pattern
JP2005190999A (ja) * 2003-12-05 2005-07-14 Tokai Shoji Kk プラズマディスプレー蛍光材印刷用マスク版及びこれを使用したプラズマディスプレー蛍光材の充填供給方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000301711A (ja) * 1999-02-15 2000-10-31 Konica Corp 表面処理方法、インクジェット記録媒体の製造方法及びインクジェット記録媒体
JP2003103895A (ja) * 2001-09-28 2003-04-09 Fuji Photo Film Co Ltd パターンシート製造方法およびパターンシート製造装置
KR100426680B1 (ko) * 2002-02-26 2004-04-13 엘지.필립스 엘시디 주식회사 잉크젯 프린팅 방식 유기전계발광 소자 및 그의 제조방법
JP2005072034A (ja) * 2003-08-22 2005-03-17 Shibaura Mechatronics Corp プラズマ処理装置
KR20060001859A (ko) * 2005-11-25 2006-01-06 송석균 상압 플라즈마 발생장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11802337B1 (en) * 2014-01-28 2023-10-31 United States of America as Administrator of NASA Atmospheric pressure plasma based fabrication process of printable electronics and functional coatings

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Publication number Publication date
KR20120116237A (ko) 2012-10-22
WO2012141436A3 (ko) 2012-12-13
CN103476594A (zh) 2013-12-25

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