WO2012139498A1

WO2012139498A1 - Three roller multi-wire saw

Info

Publication number: WO2012139498A1
Application number: PCT/CN2012/073806
Authority: WO
Inventors: 黄禹宁; 刘宇宁; 潘勇涛
Original assignee: Huang Yuning; Liu Yuning; Pan Yongtao
Priority date: 2011-04-11
Filing date: 2012-04-11
Publication date: 2012-10-18
Also published as: CN202016131U

Abstract

A three roller multi-wire saw for cutting wafers includes two cutting rollers (11, 12) provided parallel to each other in a cutting chamber (71), and an auxiliary cutting roller (13) which is provided at or above the symmetry center of the two cutting rollers, such that the included angle α between cutting lines (31, 32) on the two sides of the auxiliary cutting roller and the plane (14) where the axes of the two cutting rollers are located is in the range of 0-30°; there are two sets of working stations (4, 5) and feeding systems thereof, which are configured symmetrically, with linear guide rails (43) thereof being perpendicular to the cutting lines on the two sides of the auxiliary cutting roller respectively. The cutting saw can cut two monocrystalline or twin-crystalline silicon rods simultaneously with stable cutting quality; and the device has small size, light weight, low power consumption, high production efficiency, great versatility and lower cutting production cost.

Description

Three-roll multi-wire cutting machine

Technical field

The present invention relates to a multi-wire cutting machine for cutting a wafer, in particular to a three-roll multi-wire cutting machine. Further, the three-roll multi-wire cutting machine of the present invention can employ both the widely used slurry cutting method. A new diamond wire cutting method can also be used, and the multi-wire cutting machine of the present invention is suitable for cutting all brittle and high hardness materials. Background technique

At present, solar-grade silicon wafers and LED sapphire and silicon carbide single crystal substrates are produced on a large scale by multi-wire cutting machines. As shown in FIG. 1 and FIG. 1A, it shows a cutting working principle diagram of the current Japanese NTC MWM442DM model, and a plurality of cutting lines 3 are wound on two parallelly disposed cutting rolls 11, 12, and the cutting rolls 11 and 12 are simultaneously processed. When moving at high speed or counterclockwise, the steel wire is in a high-speed linear motion. At this time, the following two cutting methods can be used: a. Slurry cutting: The cutting slurry is evenly lowered to both ends of the steel wire to make the steel The surface layer of the wire is uniformly wrapped with a slurry film for dicing, wherein the dicing slurry contains silicon carbide fine powder. b. New diamond wire cutting method: The coolant is hooked down to both ends of the steel wire. The steel wire is plated with a thin layer of diamond powder, and the workpieces 21 and 22 are driven downward by the table, and the cutting roller The cutting line 3 of high-speed linear motion between 11 and 12 is in contact. Because the surface of the steel wire is covered with cutting slurry or diamond powder, the high-speed linear motion of the steel wire drives the cutting slurry or diamond. The coating cuts the workpiece quickly and the workpiece is cut into pieces. Referring to Fig. 1 and Fig. 1A, this structure can simultaneously mount two single crystal silicon rods 21 and 22 on the same workbench for cutting, and the cutting effect is good. However, when cutting two polycrystalline silicon rods, as shown in Fig. 2 and Fig. 2A, since the hardness of polycrystalline silicon is slightly harder and less uniform than single crystal silicon, the distance L between the two cutting rolls during cutting is too large, causing the cutting steel wire to be cut. During the process, the bending deformation and the shaking phenomenon are serious, and defects such as line marks, chipping, and chipping occur in the cutting process, the cutting yield is lowered, and the production cost is increased. Therefore, this method focuses on cutting single crystal silicon, is not suitable for cutting polycrystalline silicon rods, and has poor versatility, so it has certain limitations in use. In general, the above structural forms have the following drawbacks: 1. The distance L between the two cutting rolls 11, 12 is too large, and is not suitable for cutting polycrystalline silicon rods, and is only suitable for cutting single crystal silicon rods, has poor versatility, is limited in use, and is produced. Inconvenient management. 2. The above structure is limited in the total length of the cut silicon rod. Since the effective length of the cutting rolls 11, 12 is only 300 mm, the total length of the two silicon rods is 600mm, if the effective length of the cutting roller is increased in design, the cutting quality will drop rapidly, which results in the limitation of the total length of the silicon cut by the structural model, low output and unstable quality, which increases the production cost.

In order to overcome these problems, the following measures have been taken: a. In order to improve the cutting quality and the versatility of the dicing and polysilicon, only one silicon rod is mounted on the same workbench. As shown in FIG. 3 and FIG. 3A, the distance L2 between the two cutting rolls 11, 12 can be greatly shortened, overcoming the cutting process of the cutting steel wire due to the excessive spacing L2 between the two cutting rolls 11, 12. Bending deformation and jitter phenomenon, improve cutting quality and versatility of singulation and polysilicon. b. In order to increase the cutting yield, the effective length L1 of the cutting rolls 11, 12 is designed to be lengthened to 800 mm, which can increase the cutting efficiency by 1.33 times compared with the cutting roll having a length of 600 mm, but due to the length of the cutting rolls 11, 12 After the increase, the number of turns of the winding wire increases, and the tensile force between the cutting rolls 11, 12 is increased. The design is to increase the strength of the cutting rolls 11, 12, so that the diameter of the cutting roll is increased to be large enough. With the above improvements, the structure improves the cutting quality, productivity and versatility, and both the single crystal silicon and the polycrystalline silicon are suitable, thus achieving the design goal. However, this design structure also has other deficiencies: a. Due to the increased diameter of the cutting rolls 11, 12, the length L is lengthened, making the manufacturing of the device more difficult, the manufacturing cost is greatly increased, the equipment is bulky, and each weight is Up to 17 tons or more, each power is above 160KW, which consumes a lot of energy. b. The single and polycrystalline silicon rods that can be cut at one time are only 800mm long. If the design is lengthened, the equipment is more difficult to manufacture, the cost is higher, the equipment is larger, the weight is heavier, and the energy consumption is more amazing. Therefore, the design structure 4 Difficult to have a better price/performance ratio. c. Reasons for the above The equipment is expensive, bulky, weighs 17 tons, has low production efficiency, high energy consumption, and wastes manpower and resources, resulting in high production costs. Summary of the invention

The technical problem to be solved by the present invention is to provide a three-axis multi-wire cutting machine with small equipment and low processing cost in view of the deficiencies in the prior art, which not only has high cutting efficiency, but also can be passed through two independent The table feed system and the three rolls are separated into two separate cutting sections, which can cut two single and polycrystalline silicon rods at the same time, and the cutting quality is good.

In order to achieve the above object, the present invention adopts the following technical solution: two parallel cutting rolls are arranged in the cutting chamber, and one auxiliary set above the symmetry center or the symmetry center of the two cutting rolls Cutting roller; The angle a between the cutting line on both sides of the auxiliary cutting roller and the plane of the axes of the two cutting rollers is zero. ~ 30. Within the range; two separate cutting zones are formed, namely zone A and zone B; two independent tables and feed systems are arranged in the middle of the two cutting rolls, two of which are symmetric with the feed system Set, and the linear guides of the two sets of feed systems are perpendicular to the cutting lines on both sides of the auxiliary cutting rolls.

Since the auxiliary cutting roller is disposed between the two cutting rollers, the cutting area between the two cutting rollers is divided into two sections, and each cutting section can independently cut a single, polycrystalline silicon rod, so that each cutting section is cut. The span can be minimized, which can effectively solve the instability, bending and jitter of the cutting line tension during the cutting process due to the large span of the cutting line during the cutting process. Moreover, due to the support and fixing action of the intermediate auxiliary cutting roller, the single and polycrystalline silicon rods are subjected to force and uniformity during the cutting process, and the cutting quality can be improved.

The three-cutting roller is designed to separate the cutting chamber into two separate cutting sections. Each cutting section has a separate table and feed system. It can cut one silicon rod independently, and two sections can cut two silicon rods. Therefore, it is relatively easy to design a machine for cutting long silicon rods. The three-roll multi-wire cutting machine of the present invention can cut a silicon rod by 1000 mm in a small volume, small weight, about 13 tons, and low energy consumption.

If the angle α is too large, the amount of sand in the cutting line will be insufficient, which will affect the cutting quality. Therefore, the above angle α is selected from 0° to 30°. Within the range, the angle α is selected from 0° to 15°. The range is better.

According to the above technical solution, the present invention has the following technical effects:

An auxiliary cutting roller is disposed above the center of symmetry of the two cutting rolls, and the angle α between the cutting line on the two sides of the auxiliary cutting roller and the plane of the axes of the two cutting rolls is 0° to 30°. Within the range, the angle α is selected from 0° to 15°. The range is better.

By setting the auxiliary cutting roller to divide the cutting area into two sections, each cutting section independently cuts a single and polycrystalline silicon rod, and the cutting span of each cutting section can be minimized, which can effectively solve the cutting line during the cutting process. The tension of the cutting line caused by the large span is unstable, curved and shaken during the securing process, improving the cutting quality and the versatility of the singulation and polysilicon.

And due to the support and fixation of the intermediate auxiliary cutting roller, the silicon rod is subjected to a reasonable force during the cutting process, the balance is stable, and the cutting quality is stable.

The device is small in size, light in weight, low in manufacturing cost, large in output, low in energy consumption, and can greatly reduce cutting. Cutting production costs.

The present invention employs an angle α at 0. ~ 30. The design of the three-roll multi-wire cutting structure in the range can find a cutting silicon rod with a length of more than 800mm, even more than 1200mm, and the manufacturing difficulty is low, the manufacturing cost is low, the volume is small, the energy consumption is low, the weight is light, and the output is low. The design and manufacture of large, low-cut models with good cutting quality and versatility. DRAWINGS

Figure 1 and Figure 1A show the working principle of the existing multi-wire cutting machine;

Figure 2, Figure 2A is a schematic diagram of the force analysis of the multi-wire cutting machine shown in Figure 1;

Figure 3 and Figure 3A are diagrams showing the working principle of another multi-wire cutting machine;

Figure 3B is a schematic diagram of the force analysis of the multi-wire cutting machine shown in Figure 3;

4 and FIG. 4A are schematic structural views of a three-roll multi-wire cutting machine of the present invention; FIG.

4B is a schematic diagram of the force analysis of the multi-wire cutting machine shown in FIG. 4;

Figure 5 is a cross-sectional view taken along line A - A of Figure 4;

detailed description

As shown in FIGS. 4, 4A, 4B and 5, the two cutting rolls 11, 12 and the auxiliary cutting rolls 13 are respectively erected in the cutting chamber 71, and the surfaces of the two cutting rolls 11, 12 and the auxiliary cutting rolls 13 are opened. A wire groove through which the cutting line passes (not shown in FIGS. 4 and 5), and the auxiliary cutting roller 13 is disposed above the center of symmetry or the center of symmetry of the two cutting rolls 11, 12, between the two cutting rolls 11, 12 The cutting line 3 is supported such that two separate cutting zones are formed between the two sides of the auxiliary cutting roller 13 and the two cutting rolls 11, 12, the cutting lines 31, 32 on both sides of the auxiliary cutting roller 13 and the two cutting roller axes The angle α between the planes 14 is at zero. ~ 30. Within the range, the angle α is preferably at zero. ~ 15. Within the range; two sets of symmetrically arranged worktables 4, 5 and their feed system are arranged above the two cutting rolls 11, 12, and the feed system of the worktable 4 is composed of a motor 41, a lead screw 42, a linear guide 43, and a slider 44 and the slider bracket 46, the motor 41 is fixed on the box body 7, the screw rod 42 is coaxially fixed with the shaft of the motor 41, the linear guide rail 43 is fixed on the box body 7 through the rail bracket 47, and the slider 44 is fixed on the slider bracket 46, the table is fixed under the slider bracket 46, and the slider bracket 46 is provided with a nut 45 matched with the screw rod 42 When the motor 41 drives the screw 42 to rotate, the nut 45 moves up and down along the screw rod 42, so that the slider 44 moves along the linear guide 43, thereby driving the table 5 for the feeding motion. The two linear guides of the above-described table 4, 5 feed system are perpendicular to the cutting lines 31, 32 on both sides of the auxiliary cutting roller 13, respectively. A drive motor 9 is provided in the casing below the cutter roller 11, and is coupled to the pulley fixed to the shaft of the cutter roller 11 via a belt 91. The part number 6 in Figs. 4 and 5 is a head which sprays a mortar to the surface of the cutting line 3 in the cutting chamber 71. The part numbers 111 and 131 in Fig. 5 are the bearing housings to which the cutting roller 11 and the auxiliary cutting roller 13 are connected to the chassis 7, respectively.

The right part of Figure 4 is the cutting line retraction line system. The cutting line 3 is discharged by the payoff wheel 82, enters the cutting chamber 71 through the guide wheel system 81, is wound around a plurality of turns in the wire grooves of the cutting rolls 11, 12 and the auxiliary cutting roll 13, and then leads to the cutting chamber 71, passing through the guide wheel system 81. Return to the take-up reel 83.

Since two auxiliary cutting zones are formed on both sides of the auxiliary cutting roller 13, each cutting zone can cut one polycrystalline bar, so that the span of each cutting zone can be minimized, and the cutting line can be effectively prevented from being spanned during the cutting process. The large cutting line tension is unstable, curved and shaken, and the volume of the device does not increase.

The present invention has been described with reference to the preferred embodiments of the present invention, but it should be understood that the detailed description of the invention should not be construed Various modifications made to the above embodiments are within the scope of the present invention.

Claims

Claim

1. A three-roll multi-wire cutting machine comprising two cutting rolls (11, 12) arranged in parallel in a cutting chamber (71), and a table disposed above the two cutting rolls (11, 12) and a feeding system; characterized in that: an auxiliary cutting roller (13) is further disposed in the cutting chamber (71), and the auxiliary cutting roller (13) is disposed at a symmetrical center or a symmetrical center of the two cutting rollers (11, 12) Above, the angle between the cutting line (31, 32) on both sides of the auxiliary cutting roller (13) and the plane (14) of the axis of the two cutting rolls (11, 12) is zero. ~ 30. Within the scope; the workbench and its feed system have two sets, two sets of worktables (4, 5) and their feed systems are symmetrically arranged, and the linear guides of the two sets of feed systems are perpendicular to the auxiliary cutting rolls (13 ) Cutting lines on both sides (31, 32).

2. A three-roll multi-wire cutting machine according to claim 1, characterized in that between the cutting lines (31, 32) on both sides of the auxiliary cutting roll (13) and the plane (14) of the axes of the two cutting rolls The angle α is at 0. ~ 30° range.

3. A three-roll multi-wire cutting machine according to claim 2, characterized in that between the cutting lines (31, 32) on both sides of the auxiliary cutting roller (13) and the plane (14) of the axes of the two cutting rolls The angle α is at 0. ~ 15° range.