CN103203808B - Efficient multi-line cutting device and method - Google Patents
Efficient multi-line cutting device and method Download PDFInfo
- Publication number
- CN103203808B CN103203808B CN201310132879.0A CN201310132879A CN103203808B CN 103203808 B CN103203808 B CN 103203808B CN 201310132879 A CN201310132879 A CN 201310132879A CN 103203808 B CN103203808 B CN 103203808B
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- Prior art keywords
- push rod
- crystal
- processing line
- cutting
- servomotor
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- 238000005520 cutting process Methods 0.000 title claims abstract description 38
- 239000002184 metal Substances 0.000 claims abstract description 34
- 230000001360 synchronised Effects 0.000 claims description 18
- 230000001105 regulatory Effects 0.000 claims description 6
- 238000003672 processing method Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 239000002178 crystalline material Substances 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 description 10
- 239000010980 sapphire Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000005296 abrasive Methods 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 235000019589 hardness Nutrition 0.000 description 2
- 241000960387 Torque teno virus Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing Effects 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000576 supplementary Effects 0.000 description 1
Abstract
The invention relates to crystal cutting by a rotating component, a fixing component and a cutting component. Two ends of crystal are clamped by the fixing component. The rotating component is driven to rotate by a motor to drive the crystal to rotate, so that metal wires are kept in point contact with the crystal during the whole cutting process and cutting speed is higher, about more than 50% higher than that of general cutting ways. In addition, the point contact is kept constantly, tension of the metal wires changes little, and accordingly the metal wires are thinned and are allowed to move at high speed, surface qualities (such as TTV (total thickness variation), bow and warp) of the cut surface are guaranteed and loss of the metal wires is reduced.
Description
Technical field
The present invention relates to a kind of efficient Multi-wire cutting device and method, relate in particular to a kind of processing unit (plant) and method of multi-wire saw of LED and SOS semicon industry large-size sapphire backing material.
Background technology
Due to popularizing of large-size sapphire backing material application, particularly LED and SOS semicon industry for 4 "; 6 " 8 " growth of sapphire wafer demand, facilitates the demand of industry to large-size sapphire materials processing and rises fast, simultaneously because the physics of sapphire material belongs to hard brittle material; process very difficult; inefficiency simultaneously, and therefore heavy caliber is sapphire is effectively processed into a current difficult problem fast in research, while also become the direction of industry effort.
Prior art mainly adopts the following two kinds mode to large-size sapphire material cutting processing:
Mode 1, employing fixation workpiece, the mode that line of cut presses down feeding is cut, use the wire structures of retractable cable wheel, regulating wheel, directive wheel composition, workbench transfixion in operation, cutting movement overall structure moves downward, complete cutting or workbench to upper feeding, small angle oscillation, cutting movement overall structure transfixion, completes cutting.A kind of scroll saw mode of prior art, is divided into upper and lower both sides as shown in Figure 1, 2.First, object I1 to be processed for the first volume is fixed on the upper object fixing unit 300 being arranged on wire sawing apparatus top place, and upper master rotor 10a is by axle base regulon 60, according to the distance between adjustment master rotor 10a and 10b that the size of object to be processed is suitable.Then vertical driving motor 41 makes main roller unit 10 move upward, and cuts into slices.If be fixed on rotating shaft 54 by object I2 to be processed for downside, then drive electric rotating machine 51, hollow rotates for processing object I2.This means for engaging device 56 has the drum of annular.This kind of scroll saw mode mainly contains following shortcoming: 1, different processing object is discrete, causes the complicated of equipment.2, upside machining cell, object to be processed is fixed motionless, and diamond wire and object contact area to be processed are large, not easy heat radiation, material and diamond wire loss large; 3, downside machining cell can only process hollow object, and processing object is single.
Mode 2, spindle swing cut; principle is in spindle swing process; steel wire and workpiece realize point cantact; simultaneously; steel wire and saw kerf leave enough gaps, facilitate abrasive particle to enter saw kerf, increase steel wire and carry abrasive particle chance; add the quantity of unit interval abrasive particle cut workpiece, increase the cutting speed of workpiece.But due to sapphire, to have intensity high, hardness is high, high temperature resistant, abrasion-resistant, the characteristics such as corrosion resistance is strong, especially for heavy caliber sapphire wafer (6 inches and more than), employing mode 2 is cut, although can solve the large problem of contact area, cuts spended time still longer for bigbore wafer, and equipment building block is many and complicated, processing cost is high.
Summary of the invention
This patent proposes a kind of device and processing method of new multi-wire saw, to solve the problem that current working (machining) efficiency is low and supplementary product onsumption is large.
The invention provides a kind of multi-thread rotary cutting apparatus, comprising: fixed part, rotary part, cutting part;
Described fixed part is made up of push rod, synchronous push rod, synchronous push rod latch assembly and guide rail, and this synchronous push rod latch assembly is with locking member, helical screw and bolt bar; Described bolt bar is for driving described helical screw and locking member;
Described rotary part, is made up of servomotor, rotating retaining member, a processing line roller one and two processing line rollers two;
Described cutting part is made up of metal alignment, a described processing line roller one and described two processing line rollers two, and these three processing line roller non-co-planar be arranged in parallel;
Described servomotor has two outputs, and one of them output drives push rod described in belt drive and synchronous push rod to rotate, and the other end drives the rotation of described processing line roller one;
Described metal alignment is formed through repeatedly reeling by a metal wire.
Crystal pro cessing method according to above-mentioned a kind of multi-thread rotary cutting apparatus:
Crystal is clamped by locking member and synchronous push rod by described fixed part, and according to crystal length, on guide rail, mobile locking member is to correct position, and manual rotation bolt bar clamps crystal;
Described rotary part is rotated by described driven by servomotor belt drive push rod, synchronous push rod, thus is realized Crystal Rotation;
Described cutting part utilizes retractable cable wheel, regulating wheel, directive wheel to guide metal wire to processing line roller one and two processing line rollers two, metal alignment is formed through repeatedly coiled wire, rotated by described driven by servomotor processing line roller one, the metal wire of this metal alignment is moved back and forth at a high speed or single-way moving, by pressing down the mode of feeding, crystal-cut is become multiple.
The rotating speed of described servomotor can be regulated according to crystalline material characteristic.
The present invention reduces the contact area between diamond wire and sapphire by the rotation of crystal when cutting, and cools object more fully by rotating to reach, thus reaches the minimizing consumption of raising cutting efficiency and put forward high-quality object.
The present invention has the following advantages: first, and treat processing object and adopt two ends to fix, two sections of push rods can change different size according to article size, facilitate the processing of various sizes object, no matter solid body or hollow object, push rod is with locking member, stronger than common one side adhesion firmness; Secondly, drive push rod to rotate by headstock motor (servomotor), realize object to be processed and rotate, headstock motor can according to characteristic adjusting rotary speeds such as material hardnesses.
Accompanying drawing explanation
Fig. 1 is the wire sawing apparatus top view of prior art;
The wire sawing apparatus side view of Fig. 2 prior art;
The multi-thread rotary cutting apparatus front view of Fig. 3 the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail:
Multi-thread rotary cutting apparatus of the present invention comprises: fixed part, rotary part, cutting part; Described fixed part is made up of synchronous push rod, synchronous push rod latch assembly and guide rail, and this synchronous push rod latch assembly is with locking member, helical screw and bolt bar; Described rotary part, is made up of servomotor, rotating retaining member, a processing line roller 1 and two processing line rollers 22; Described cutting part is made up of metal alignment, described processing line roller 1 and described two processing line rollers 22, and these three processing line roller non-co-planar be arranged in parallel.
Metal alignment can be formed through repeatedly reeling by a metal wire.
As Fig. 3, crystal bar is clamped by push rod, synchronous push rod and locking member by fixed part, and according to boule length, on guide rail, mobile locking member is to correct position, and synchronous push rod locking component tape has helical screw, manual rotation bolt bar clamping crystal bar.
Rotary part, is made up of servomotor and rotating retaining member, is rotated, thus realize crystal bar rotation by driven by servomotor belt drive push rod, synchronous push rod.And according to the suitable adjusting rotary speed of material behavior, can enhance productivity.
Cutting part, retractable cable wheel, regulating wheel, directive wheel is utilized to draw metal wire line to processing line roller 1 and two processing line rollers 22, these three processing line roller non-co-planar be arranged in parallel, metal alignment is formed through repeatedly coiled wire, rotated by driven by servomotor belt drive processing line roller 1, the metal wire of this metal alignment being moved back and forth at a high speed or single-way moving, by pressing down the mode of feeding, crystal-cut being become multiple.
The present invention is mainly completed by rotary part, fixed part and cutting part the cutting of crystal.Utilize fixed part to clamp the both ends of the surface of crystal, drive rotary part to drive Crystal Rotation by motor, ensure that in whole cutting process, metal wire and crystal are point cantact all the time, accelerate cutting speed like this, improve more than 50% than general cutting way speed; Simultaneously owing to being point cantact all the time, the tension change of metal wire can be very little, can realize the high speed of the attenuate of metal wire and metal wire movement, ensure that the surface quality (TTV, BOW, Warp etc.) of cut surface, decrease the loss of metal wire.Cutting part utilizes retractable cable wheel, regulating wheel, directive wheel, wire casing repeatedly coiled wire and form metal alignment, the metal wire of this metal alignment is moved back and forth or single-way moving at high speed, crystal-cut is become multiple.Compared with cutting with swing before, metal wire arrange agencie simplifies greatly, and equipment decreases unnecessary auxiliary body.
The invention is not restricted to the above description to embodiment, the content that those skilled in the art disclose according to the present invention, the improvement that basis of the present invention need not be carried out through creative work and amendment all should within protection scope of the present invention.
Claims (3)
1. a multi-thread rotary cutting apparatus, is characterized in that, comprising: fixed part, rotary part, cutting part;
Described fixed part is made up of push rod, synchronous push rod, synchronous push rod latch assembly and guide rail, and this synchronous push rod latch assembly is with locking member, helical screw and bolt bar; Described bolt bar is for driving described helical screw and locking member;
Described rotary part, is made up of servomotor, rotating retaining member, a processing line roller one (1) and two processing line rollers two (2);
Described cutting part is made up of metal alignment, a described processing line roller one (1) and described two processing line rollers two (2), and these three processing line roller non-co-planar be arranged in parallel;
Described servomotor has two outputs, and one of them output drives push rod described in belt drive and synchronous push rod to rotate, and the other end drives described processing line roller one (1) to rotate;
Described metal alignment is formed through repeatedly reeling by a metal wire.
2. the crystal pro cessing method of a kind of multi-thread rotary cutting apparatus according to claim 1, is characterized in that:
Crystal is clamped by locking member and synchronous push rod by described fixed part, and according to crystal length, on guide rail, mobile locking member is to correct position, and manual rotation bolt bar clamps crystal;
Described rotary part is rotated by described driven by servomotor belt drive push rod, synchronous push rod, thus is realized Crystal Rotation;
Described cutting part utilizes retractable cable wheel, regulating wheel, directive wheel to guide metal wire to processing line roller one (1) and two processing line rollers two (2), metal alignment is formed through repeatedly coiled wire, rotated by described driven by servomotor processing line roller one (1), the metal wire of this metal alignment is moved back and forth at a high speed or single-way moving, by pressing down the mode of feeding, crystal-cut is become multiple.
3. crystal pro cessing method as claimed in claim 2, is characterized in that, regulate the rotating speed of described servomotor according to crystalline material characteristic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310132879.0A CN103203808B (en) | 2013-04-01 | 2013-04-01 | Efficient multi-line cutting device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310132879.0A CN103203808B (en) | 2013-04-01 | 2013-04-01 | Efficient multi-line cutting device and method |
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| Publication Number | Publication Date |
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| CN103203808A CN103203808A (en) | 2013-07-17 |
| CN103203808B true CN103203808B (en) | 2015-03-11 |
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| CN201310132879.0A Expired - Fee Related CN103203808B (en) | 2013-04-01 | 2013-04-01 | Efficient multi-line cutting device and method |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103538159B (en) * | 2013-10-29 | 2016-03-16 | 苏州硅峰太阳能科技有限公司 | A kind of hard brittle material cutting equipment |
| CN103538160B (en) * | 2013-10-29 | 2016-03-16 | 苏州硅峰太阳能科技有限公司 | A kind of hard brittle material multi-line cutting method and cutter sweep |
| CN103707425B (en) * | 2013-12-12 | 2016-07-06 | 灵璧县灵磁新材料有限公司 | A kind of polyteny Magnetitum cutting machine |
| CN103895114A (en) * | 2014-03-28 | 2014-07-02 | 合肥晶桥光电材料有限公司 | Sapphire screen processing technique |
| CN105690583A (en) * | 2016-02-25 | 2016-06-22 | 赵永潮 | Power unit of multi-wire sawing machine |
| CN106113298B (en) * | 2016-07-08 | 2018-02-13 | 重庆毅美模塑有限公司 | Reciprocating-type cutting device |
| CN106965062B (en) * | 2017-04-18 | 2022-12-20 | 天津大学 | Contact type line belt grinding device |
| CN106985052B (en) * | 2017-04-18 | 2022-12-20 | 天津大学 | Multi-line grinding device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6543434B2 (en) * | 1999-12-09 | 2003-04-08 | Wacker-Chemie Gmbh | Device for simultaneously separating a multiplicity of wafers from a workpiece |
| CN102133777A (en) * | 2011-01-05 | 2011-07-27 | 镇江荣德新能源科技有限公司 | Wire-break processing device for multi-wire cutting machines |
| CN102211362A (en) * | 2011-04-11 | 2011-10-12 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN202155963U (en) * | 2010-09-17 | 2012-03-07 | 上海日进机床有限公司 | Diamond wire slicer for cutting crystal silicon rod |
| CN102975300A (en) * | 2011-09-06 | 2013-03-20 | 上海安稷实业有限公司 | Multi-thread cutting machine capable of cutting arc pieces |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5370006B2 (en) * | 2009-08-31 | 2013-12-18 | 株式会社Ｓｕｍｃｏ | Wire saw equipment |
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2013
- 2013-04-01 CN CN201310132879.0A patent/CN103203808B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6543434B2 (en) * | 1999-12-09 | 2003-04-08 | Wacker-Chemie Gmbh | Device for simultaneously separating a multiplicity of wafers from a workpiece |
| CN202155963U (en) * | 2010-09-17 | 2012-03-07 | 上海日进机床有限公司 | Diamond wire slicer for cutting crystal silicon rod |
| CN102133777A (en) * | 2011-01-05 | 2011-07-27 | 镇江荣德新能源科技有限公司 | Wire-break processing device for multi-wire cutting machines |
| CN102211362A (en) * | 2011-04-11 | 2011-10-12 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN102975300A (en) * | 2011-09-06 | 2013-03-20 | 上海安稷实业有限公司 | Multi-thread cutting machine capable of cutting arc pieces |
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| CN103203808A (en) | 2013-07-17 |
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Granted publication date: 20150311 Termination date: 20160401 |