CN102962904B - A kind of three station multi-wire saw workbench - Google Patents
A kind of three station multi-wire saw workbench Download PDFInfo
- Publication number
- CN102962904B CN102962904B CN201210497266.2A CN201210497266A CN102962904B CN 102962904 B CN102962904 B CN 102962904B CN 201210497266 A CN201210497266 A CN 201210497266A CN 102962904 B CN102962904 B CN 102962904B
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- China
- Prior art keywords
- workbench
- work station
- cutting work
- flitch
- holding screw
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- 239000007921 spray Substances 0.000 claims description 11
- 229910000831 Steel Inorganic materials 0.000 claims description 8
- 239000004570 mortar (masonry) Substances 0.000 claims description 8
- 239000010959 steel Substances 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000004677 Nylon Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229920001778 nylon Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The invention provides a kind of three station multi-wire saw workbench, comprise three cutting work station, described three cutting work station are fixed with flitch respectively, each described flitch can be equipped with a workpiece to be cut respectively, described workbench is furnished with four nozzles, described four nozzles can have a workpiece to be cut between any two respectively, and the diameter of described workpiece to be cut and the width sum of a described nozzle are less than the distance between described adjacent cutting work station central axis.The invention has the beneficial effects as follows: the production capacity that improve multi-line cutting machine, have structure simple, easy to maintenance, processing cost is low, production efficiency advantages of higher.
Description
Technical field
The invention belongs to crystal line cutting technology field, especially relate to a kind of workbench realizing semiconductor monocrystal three station multi-wire saw.
Background technology
Through the fast development of decades, the cutting of semiconductor monocrystal develops into by (outward) circle cutting technique in initial the multi-wire saw technology generally adopted at present, reduces and all obtain great progress in product quality raising at cost.
Cutting steel wire, under the home roll of high-speed rotation drives, carries the mortar sprayed by nozzle and carries out grinding and cutting to crystalline material.The multi-line cutting machine of current employing mainly contains two kinds: single station cutting machine and double cutting machine.Early stage multi-line cutting machine generally adopts single station to cut, and namely once can only process a monocrystalline; The multi-line cutting machine employing double cutting that later stage is comparatively advanced, namely once can process two monocrystalline.At present when the monocrystalline of processing more than 8 inches or 8 inches, used multi-line cutting machine is generally the cutting of single station.In existing monocrystalline cutting equipment, limited cutting work station constrains the production capacity of equipment largely.
Summary of the invention
The problem to be solved in the present invention is to provide a kind of three station multi-wire saw workbench, is especially suitable for the output improving multi-line cutting machine.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of three station multi-wire saw workbench, comprise three cutting work station, described three cutting work station are fixed with flitch respectively, each described flitch can be equipped with a workpiece to be cut respectively, described workbench is furnished with four nozzles, described four nozzles can have a workpiece to be cut between any two respectively, and the diameter of described workpiece to be cut and the width sum of a described nozzle are less than the distance between described adjacent cutting work station central axis.
The present invention can also adopt following technical measures:
Described three cutting work station are the horizontal bar shaped inner groovy on described workbench lower surface, and include upper part and lower part, described three cutting work station are parallel to each other and highly equal, the minimum widith of described three cutting work station upper part is all greater than the Breadth Maximum of respective lower part, the side of described flitch is work shape, the upper part of described three cutting work station all allows the upper part of described flitch to insert, and described flitch is separately fixed in described three cutting work station by flitch holding screw.
Middle flitch holding screw hole is positioned at the middle cutting work station left side, comprise screw cap aperture and screw rod aperture, described screw cap aperture communicates with the upper part of left side cutting work station, and its length is greater than the length of the cap nut of described middle flitch holding screw, it is highly more than or equal to the diameter of described cap nut.
Middle flitch holding screw hole is positioned on the right of middle cutting work station, comprise screw cap aperture and screw rod aperture, described screw cap aperture communicates with the upper part of the right cutting work station, and its length is greater than the length of the cap nut of described middle flitch holding screw, it is highly more than or equal to the diameter of described cap nut.
Described workbench is fixed on the connecting plate of top by workbench holding screw, high rigidity insulation sleeve is accompanied between described workbench holding screw and described workbench, be used for ensureing that described workbench holding screw and described workbench insulate, in the lead screw of described workbench holding screw, cover has annulus steel pad, be affixed with the cap nut of described workbench holding screw, for avoiding the wearing and tearing between screw and high rigidity insulation sleeve, the thickness of described annulus steel pad is for being more than or equal to 0.5 millimeter and being less than or equal to 3 millimeters.
Described workbench holding screw is distributed in described three cutting work station tops, the quantity of the described workbench holding screw in each described cutting work station is for being more than or equal to three and being less than or equal to nine, and described workbench holding screw is uniformly distributed in each described cutting work station.
Described four nozzles distribute side by side, described each nozzle be positioned at the spacing of workpiece to be cut on its side for being more than or equal to 1 millimeter and being less than or equal to 10 millimeters.
The below laying respectively at two described nozzles at described workbench two ends all has a spray orifice, the below being positioned at two described nozzles in the middle of described workbench all has two spray orifices, described each spray orifice sprays the direction of mortar respectively towards the vertical central axis of the described cutting work station be adjacent, and with vertical direction angulation for being greater than 0 degree and being less than 90 degree.
The advantage that the present invention has and good effect are: technique scheme improves the production capacity of multi-line cutting machine, and have structure simple, easy to maintenance, processing cost is low, production efficiency advantages of higher.
Accompanying drawing explanation
Fig. 1 is the schematic diagram with three cutting work station workbench
Fig. 2 is the upward view of workbench
Fig. 3 is the fastener schematic diagram of workbench
Fig. 4 is mortar emission direction schematic diagram
In figure:
1, flitch holding screw 2, flitch 3, screw cap aperture
4, workbench 5, cutting work station 6, nozzle
7, monocrystalline silicon 8, workbench holding screw 9, nylon jacket
10, annulus steel pad 11, top connecting plate 12, mortar
Detailed description of the invention
As shown in Figure 1, the invention provides a kind of three station multi-wire saw workbench, comprise three cutting work station 5, three cutting work station 5 are fixed with flitch 2 respectively, each flitch 2 can be equipped with respectively the monocrystalline silicon 7 that a diameter is 3 inches, workbench 4 is furnished with four nozzles, 6, four nozzles 6 can have a monocrystalline silicon 7 between any two respectively, the width sum of the diameter of monocrystalline silicon 7 and a nozzle 6 is less than the distance between adjacent cutting work station 5 central axis, and the silicon wafer thickness after cutting is 300 microns.
Three cutting work station 5 are the horizontal bar shaped inner groovy on workbench 4 lower surface, and include upper part and lower part, three cutting work station 5 are parallel to each other and highly equal, the minimum widith of three cutting work station 5 upper part is all greater than the Breadth Maximum of respective lower part, the side of flitch 2 is work shape, the upper part of three cutting work station 5 all allows the upper part of flitch 2 to insert, and flitch 2 is separately fixed in three cutting work station 5 by flitch holding screw 1.
Middle flitch holding screw hole is positioned at middle cutting work station 5 left side, comprise screw cap aperture 3 and screw rod aperture, screw cap aperture 3 communicates with the upper part of left side cutting work station 5, and its length is greater than the length of the cap nut of middle flitch holding screw, and it highly equals the diameter of cap nut.
As Fig. 2, shown in 3, workbench 4 is fixed on top connecting plate 11 by workbench holding screw 8, nylon jacket 9 is accompanied between workbench holding screw 8 and workbench 4, be used for ensureing that workbench holding screw 8 and workbench 4 insulate, the thickness of nylon jacket 9 is 1 millimeter, the internal diameter of its Upper cylindrical ring is 6 millimeters, the internal diameter of lower cylindrical ring is 10 millimeters, in the lead screw of workbench holding screw 8, cover has annulus steel pad 10, be affixed with the cap nut of workbench holding screw 8, for avoiding the wearing and tearing between screw and nylon jacket 9, the thickness of annulus steel pad 10 is 1.5 millimeters, its internal diameter is 6.2 millimeters, external diameter is 9.8 millimeters.
Workbench holding screw 8 is distributed in three cutting work station 5 tops, and the quantity of the workbench holding screw 8 in each cutting work station 5 is four, and workbench holding screw 8 is uniformly distributed in each cutting work station 5.
As shown in Figure 4, four nozzles 6 distribute side by side, and each nozzle 6 is 5 millimeters with the spacing of the monocrystalline silicon being positioned at its side.
The below laying respectively at two nozzles 6 at workbench 4 two ends all has a spray orifice, the below being positioned at two nozzles 6 in the middle of workbench 4 all has two spray orifices, the direction of each spray orifice ejection mortar 12 respectively towards the vertical central axis of the cutting work station 5 be adjacent, and is 15 degree with vertical direction angulation.
The implementation of above embodiment is, by type be 442 double-station multiwire cutting machine based on, increase a cutting work station and a corresponding mortar nozzle between two stations on which bench.
Improved multi-line cutting machine, be equipped with according to knowing the method known in industry and carry out cutting work after pouring into mortar, coiling, the corresponding technological parameter of input, complete final monocrystalline silicon processing, improved equipment capacity improves 25%-50%.
Above one embodiment of the present of invention have been described in detail, but described content being only preferred embodiment of the present invention, can not being considered to for limiting practical range of the present invention.All equalizations done according to the present patent application scope change and improve, and all should still belong within patent covering scope of the present invention.
Claims (7)
1. a station multi-wire saw workbench, it is characterized in that: comprise three cutting work station, three described cutting work station are fixed with flitch respectively, a workpiece to be cut each described flitch is equipped with respectively, described workbench is furnished with four nozzles, have a workpiece to be cut respectively between every two adjacent described nozzles, the diameter of described workpiece to be cut and the width sum of a described nozzle are less than the distance between adjacent described cutting work station central axis;
Three described cutting work station are the horizontal bar shaped inner groovy on described workbench lower surface, and include upper part and lower part, three described cutting work station are parallel to each other and highly equal, the minimum widith of three described cutting work station upper part is all greater than the Breadth Maximum of respective lower part, the side of described flitch is work shape, the upper part of three described cutting work station all allows the upper part of described flitch to insert, and described flitch is separately fixed in three described cutting work station by flitch holding screw.
2. workbench according to claim 1, it is characterized in that: middle flitch holding screw hole is positioned at the middle cutting work station left side, comprise screw cap aperture and screw rod aperture, described screw cap aperture communicates with the upper part of left side cutting work station, and its length is greater than the length of the cap nut of described middle flitch holding screw, it is highly more than or equal to the diameter of described cap nut.
3. workbench according to claim 1, it is characterized in that: middle flitch holding screw hole is positioned on the right of middle cutting work station, comprise screw cap aperture and screw rod aperture, described screw cap aperture communicates with the upper part of the right cutting work station, and its length is greater than the length of the cap nut of described middle flitch holding screw, it is highly more than or equal to the diameter of described cap nut.
4. workbench according to claim 1, it is characterized in that: described workbench is fixed on the connecting plate of top by workbench holding screw, high rigidity insulation sleeve is accompanied between described workbench holding screw and described workbench, be used for ensureing that described workbench holding screw and described workbench insulate, in the lead screw of described workbench holding screw, cover has annulus steel pad, be affixed with the cap nut of described workbench holding screw, for avoiding the wearing and tearing between screw and high rigidity insulation sleeve, the thickness of described annulus steel pad is for being more than or equal to 0.5 millimeter and being less than or equal to 3 millimeters.
5. workbench according to claim 4, it is characterized in that: described workbench holding screw is distributed in three described cutting work station tops, the quantity of the described workbench holding screw in each described cutting work station is for being more than or equal to three and being less than or equal to nine, and described workbench holding screw is uniformly distributed in each described cutting work station.
6. workbench according to claim 1, is characterized in that: four described nozzles distribute side by side, each described nozzle be positioned at the spacing of workpiece to be cut on its side for being more than or equal to 1 millimeter and being less than or equal to 10 millimeters.
7. the workbench according to claim 1 or 6, it is characterized in that: the below laying respectively at two described nozzles at described workbench two ends all has a spray orifice, the below being positioned at two described nozzles in the middle of described workbench all has two spray orifices, each described spray orifice sprays the direction of mortar respectively towards the vertical central axis of the described cutting work station be adjacent, and with vertical direction angulation for being greater than 0 degree and being less than 90 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210497266.2A CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210497266.2A CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102962904A CN102962904A (en) | 2013-03-13 |
| CN102962904B true CN102962904B (en) | 2015-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210497266.2A Active CN102962904B (en) | 2012-11-28 | 2012-11-28 | A kind of three station multi-wire saw workbench |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5424251B2 (en) * | 2009-11-20 | 2014-02-26 | コマツＮｔｃ株式会社 | Thin wafer processing method |
| CN102398314B (en) * | 2010-09-17 | 2014-05-21 | 上海日进机床有限公司 | Diamond cutting line slicing machine |
| CN202016131U (en) * | 2011-04-11 | 2011-10-26 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN102211362A (en) * | 2011-04-11 | 2011-10-12 | 黄禹宁 | Three-roller multi-wire cutting machine |
| CN102555091B (en) * | 2012-02-29 | 2015-04-08 | 无锡斯达新能源科技股份有限公司 | Multi-station sapphire single-wire swinging cutting machine |
| CN203046012U (en) * | 2012-11-28 | 2013-07-10 | 天津市环欧半导体材料技术有限公司 | Three-position multi-line cutting working platform |
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| CN102962904A (en) | 2013-03-13 |
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Effective date of registration: 20181224 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191225 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |