CN202016131U - Three-roller multi-wire cutting machine - Google Patents

Three-roller multi-wire cutting machine Download PDF

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Publication number
CN202016131U
CN202016131U CN2011201035758U CN201120103575U CN202016131U CN 202016131 U CN202016131 U CN 202016131U CN 2011201035758 U CN2011201035758 U CN 2011201035758U CN 201120103575 U CN201120103575 U CN 201120103575U CN 202016131 U CN202016131 U CN 202016131U
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CN
China
Prior art keywords
cutting
roller
line
cut
auxiliary
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Expired - Fee Related
Application number
CN2011201035758U
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Chinese (zh)
Inventor
黄禹宁
刘宇宁
潘勇涛
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Individual
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Individual
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Priority to CN2011201035758U priority Critical patent/CN202016131U/en
Application granted granted Critical
Publication of CN202016131U publication Critical patent/CN202016131U/en
Priority to PCT/CN2012/073806 priority patent/WO2012139498A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work

Abstract

The utility model relates to a three-roller multi-wire cutting machine for cutting chips. The machine comprises two cutting rollers which are parallelly arranged in a cutting chamber, and an auxiliary cutting roller, wherein the auxiliary cutting roller is arranged in or above the symmetric center of the two cutting rollers, so that an included angle alpha between cutting lines on the two sides of the auxiliary cutting roller and the plane in which the axes of the two cutting rollers are positioned is 0 to 30 degrees; two sets of working platforms and two sets of feeding systems thereof are symmetrically arranged; and the linear guide rails of the two sets of feeding systems are vertical to the cutting lines on the two sides of the auxiliary cutting roller respectively. The machine can cut two polycrystalline silicon rods simultaneously, is stable in cutting quality and has small volume, a low price and high efficiency, and cutting production cost can be reduced.

Description

Three roller multi-line cutting machines
Technical field
The utility model relates to a kind of multi-line cutting machine of cut crystal, specifically a kind of three roller multi-line cutting machines.
Background technology
At present, solar energy-level silicon wafer and LED produce with Sapphire Substrate sheet wide-scale adoption multi-line cutting machine.Figure 1 shows that the cutting fundamental diagram of present Japanese NTC MWM442DM type, on two cutting rollers that be arranged in parallel 11,12, twine multiple tracks line of cut 3, workpiece 21,22 by workbench drive downwards with cutting roller 11,12 between the line of cut 3 of adjustment campaign contact be cut in blocks.This structure can be cut two silicon single crystal rods simultaneously, when two polycrystalline silicon rods of cutting, because the hardness ratio monocrystalline silicon of polysilicon omits firmly and is even inadequately, during cutting between two cutting rollers excessive line of cut flexural deformation and the jitter phenomenon of causing of span L the cutting yield is reduced, as shown in Figure 2, production cost raises, so this mode lays particular emphasis on cutting monocrystalline silicon, is subjected to certain limitation in the use.In order to overcome this problem, Figure 3 shows that Japanese NTC PV800 type multi-line cutting machine cutting fundamental diagram.In order to increase work efficiency, by cutting roller 11,12 length L 1 are doubled, make crystal bar 2 length of cutting prolong one times, cutting efficiency is constant, but because cutting roller 11,12 length cause equipment volume huge after increasing, and equipment price costliness, production efficiency are low, and equipment, manpower, the wasting of resources are big, cause production cost to raise.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art part, and a kind of three multi-line cutting machines that equipment volume is little, processing cost is low that have are provided, and not only the cutting efficiency height can cut two polycrystalline silicon rods simultaneously, and cut quality is good.
For achieving the above object, the utility model has adopted following technical scheme: comprise two cutting rollers that are set in parallel in the cutting chamber, and be arranged on two workbench and feed systems thereof in the middle of the cutting roller top; Also be provided with an auxiliary cutting roller in the cutting chamber, described auxiliary cutting roller is arranged on the top of the symmetrical centre or the symmetrical centre of two cutting rollers, makes the line of cut of auxiliary cutting roller both sides and two undercuts cut angle α between the plane, roll shaft heart place in 0 °~30 ° scopes; Described workbench and feed system thereof have two covers, and two cover workbench and feed system thereof are symmetrical arranged, and the line slideway of two cover feeding systems is respectively perpendicular to the line of cut of assisting the cutting roller both sides.
Because auxiliary cutting roller is arranged in the middle of two cutting rollers, cutting zone between two cutting rollers is separated into two intervals, can cut a polycrystalline silicon rod independently between each cutting area, thereby the cutting span between each cutting area can reduce to minimum, can effectively solve line of cut in cutting process because line of cut tension force instability, bending and jitter phenomenon that span causes greatly.And, can improve cut quality because the supporting role of middle auxiliary cutting roller makes crystal bar stressed reasonable, even weighing apparatus in cutting process stable.
Angle α is excessive, can cause cutting tape sand quantity not sufficient, influence cutting quality, and therefore, above-mentioned angle α is better in 0 °~15 ° scopes.
As shown from the above technical solution, the utility model is on the basis that does not increase equipment volume, by auxiliary cutting roller is set cutting zone is separated into two intervals, cut a polycrystalline silicon rod between each cutting area independently, cutting span between each cutting area can be reduced to minimum, can effectively solve line of cut tension force instability, bending and jitter phenomenon that line of cut causes greatly owing to span in cutting process.And because the supporting role of middle auxiliary cutting roller makes polycrystalline silicon rod stressed reasonable, even weighing apparatus in cutting process stable, cut quality is stable, make this equipment interoperability strong, and equipment volume is little, price is low, efficient is high, can reduce cutting production cost.
Description of drawings
Fig. 1 is existing multi-line cutting machine fundamental diagram;
Fig. 2 is a multi-line cutting machine force analysis schematic diagram shown in Figure 1;
Fig. 3 is an another way multi-line cutting machine fundamental diagram;
Fig. 4 is the utility model three roller multi-line cutting machine structural representations:
Fig. 5 be Fig. 4 along A-A line cutaway view.
The specific embodiment
As Fig. 4, shown in Figure 5, two cutting rollers 11,12 and auxiliary cutting roller 13 respectively parallel shelf be located in the cutting chamber 71, two cutting rollers 11,12 reach auxiliary cutting roller 13 surfaces has the wire casing (not drawing in the Figure 4 and 5) that passes through for line of cut, auxiliary cutting roller 13 is arranged on two cutting rollers 11,12 the symmetrical centre or the top of symmetrical centre, to two cutting rollers 11, line of cut 3 between 12 supports, make and assist cutting roller 13 both sides and two cutting rollers 11, form two independently cutting areas between 12, the line of cut 31 of auxiliary cutting roller 13 both sides, 32 and two undercuts cut angle α between the plane, roll shaft heart place 14 in 0 °~30 ° scopes, and angle α is preferably in 0 °~15 ° scopes; Two cutting rollers 11,12 tops are provided with the symmetrically arranged workbench 4 of two covers, 5 and feed system, the feed system of workbench 4 is by motor 41, screw mandrel 42, line slideway 43, slide block 44 and slider bracket 46 are formed, motor 41 is fixed on the casing 7, screw mandrel 42 is coaxial fixing with 41 in motor, line slideway 43 is fixed on the casing 7 by rail brackets 47, slide block 44 is fixed on the slider bracket 46, stationary table is below slider bracket 46, slider bracket 46 is provided with and screw mandrel 42 nut engaged 45, when motor 41 drives screw mandrel 42 rotations, nut 45 is done along screw mandrel 42, following motion, make slide block 44 move, do feed motion thereby drive workbench 5 along line slideway 43.Two line slideways of above-mentioned workbench 4,5 feed systems are respectively perpendicular to the line of cut 31,32 of assisting cutting roller 13 both sides.Workbench 4,5 belows are fixed with a workpiece 21,22 respectively.Be provided with drive motors 9 in the cabinet of cutting roller 11 belows, be in transmission connection by belt 91 and the belt wheel that is fixed on 11 of the cutting rollers.Piece number 6 among Fig. 4 and Fig. 5 is the shower nozzle of the line of cut 3 surface spray cutting mortars in cutting chamber 71. Piece number 111 and 131 is respectively the bearing block that cutting roller 11 and auxiliary cutting roller 13 are connected with cabinet 7 among Fig. 5.
Fig. 4 right side is divided into line of cut retractable cable system 8.Line of cut 3 is emitted by actinobacillus wheel 82, enters cutting chamber 71 by guide pulley system 81, is wrapped in some circles in the wire casing of cutting roller 11,12 and auxiliary cutting roller 13, derives cutting chamber 71 afterwards, gets back to take-up pulley 83 by guide pulley system 81.
Because auxiliary cutting roller 13 both sides form two independently cutting areas, each cutting area can cut a polycrystalline rod, thereby the span of each cutting area can be reduced to minimum, line of cut tension force instability, bending and the jitter phenomenon that can effectively avoid line of cut in cutting process, to cause greatly owing to span, and the volume of equipment does not increase.

Claims (2)

1. three roller multi-line cutting machines comprise two cutting rollers (11,12) that are set in parallel in the cutting chamber (71), and are arranged on workbench and feed system thereof in the middle of two cutting rollers (11,12) top; It is characterized in that: also be provided with an auxiliary cutting roller (13) in the cutting chamber (71), described auxiliary cutting roller (13) is arranged on the symmetrical centre of two cutting rollers (11,12) or the top of symmetrical centre, and the line of cut (31,32) of feasible auxiliary cutting roller (13) both sides and the angle α between two cutting roller (11,12) planes, place, axle center (14) are in 0 °~30 ° scopes; Described workbench and feed system thereof have two covers, and two cover workbench (4,5) and feed system thereof are symmetrical arranged, and the line slideway of two cover feeding systems is respectively perpendicular to the line of cut (31,32) of assisting cutting roller (13) both sides.
2. three roller multi-line cutting machines according to claim 1 is characterized in that: the line of cut (31,32) of auxiliary cutting roller (13) both sides and two undercuts cut angle α between the plane, roll shaft heart place (14) in 0 °~15 ° scopes.
CN2011201035758U 2011-04-11 2011-04-11 Three-roller multi-wire cutting machine Expired - Fee Related CN202016131U (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2011201035758U CN202016131U (en) 2011-04-11 2011-04-11 Three-roller multi-wire cutting machine
PCT/CN2012/073806 WO2012139498A1 (en) 2011-04-11 2012-04-11 Three roller multi-wire saw

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201035758U CN202016131U (en) 2011-04-11 2011-04-11 Three-roller multi-wire cutting machine

Publications (1)

Publication Number Publication Date
CN202016131U true CN202016131U (en) 2011-10-26

Family

ID=44809808

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011201035758U Expired - Fee Related CN202016131U (en) 2011-04-11 2011-04-11 Three-roller multi-wire cutting machine

Country Status (2)

Country Link
CN (1) CN202016131U (en)
WO (1) WO2012139498A1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102211362A (en) * 2011-04-11 2011-10-12 黄禹宁 Three-roller multi-wire cutting machine
CN102729348A (en) * 2012-07-13 2012-10-17 乐山新天源太阳能科技有限公司 Multi-wire cutting machine
WO2012139498A1 (en) * 2011-04-11 2012-10-18 Huang Yuning Three roller multi-wire saw
CN102962904A (en) * 2012-11-28 2013-03-13 天津市环欧半导体材料技术有限公司 Three-position multi-line cutting table
CN107626980A (en) * 2017-10-31 2018-01-26 乐山新天源太阳能科技有限公司 Three axles can detect the high-speed cutting machine of Buddha's warrior attendant thread breakage
CN114571618A (en) * 2022-04-21 2022-06-03 青岛高测科技股份有限公司 Method, cutting equipment and cutting system for vertically cutting silicon rod by three wires
CN114589823A (en) * 2022-04-21 2022-06-07 青岛高测科技股份有限公司 Method for single-wire cutting of silicon rod, cutting device and cutting system
CN114714226A (en) * 2022-06-01 2022-07-08 唐山晶玉科技股份有限公司 Double-station multi-wire saw inclined plane workbench
CN114750312A (en) * 2022-04-21 2022-07-15 青岛高测科技股份有限公司 Method, cutting equipment and cutting system for cutting silicon rod by single wire and three wires
CN114750311A (en) * 2022-04-21 2022-07-15 青岛高测科技股份有限公司 Method for cutting silicon rod by single wire and double wires, cutting equipment and cutting system
CN114953230A (en) * 2022-06-30 2022-08-30 青岛高测科技股份有限公司 Multi-wire cutting machine

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510343B (en) * 2013-05-30 2015-12-01 G Tech Optoelectronics Corp Diamond line cutting machine and cutting method using same
CN114012914A (en) * 2021-11-01 2022-02-08 青岛高测科技股份有限公司 Flaw-piece clamping mechanism, flaw-piece unloading device and silicon rod cutting system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570545A (en) * 1978-11-20 1980-05-28 Matsushita Electric Ind Co Ltd Multi-wire cutting device
WO1991012915A1 (en) * 1990-03-01 1991-09-05 Charles Hauser Industrial device for sawing parts into thin slices
JP3484148B2 (en) * 2000-08-08 2004-01-06 株式会社滝澤鉄工所 Wire saw
JP2004001218A (en) * 2003-06-03 2004-01-08 Takizawa Tekkosho:Kk Wire saw
CN102398317B (en) * 2010-09-17 2015-03-25 上海日进机床有限公司 Diamond cutting line slicing machine for cutting crystal silicon rod
CN202162898U (en) * 2010-09-17 2012-03-14 上海日进机床有限公司 Diamond wire slicer for cutting crystalline silicon rod
CN202016131U (en) * 2011-04-11 2011-10-26 黄禹宁 Three-roller multi-wire cutting machine
CN102211362A (en) * 2011-04-11 2011-10-12 黄禹宁 Three-roller multi-wire cutting machine

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102211362A (en) * 2011-04-11 2011-10-12 黄禹宁 Three-roller multi-wire cutting machine
WO2012139498A1 (en) * 2011-04-11 2012-10-18 Huang Yuning Three roller multi-wire saw
CN102729348A (en) * 2012-07-13 2012-10-17 乐山新天源太阳能科技有限公司 Multi-wire cutting machine
CN102962904A (en) * 2012-11-28 2013-03-13 天津市环欧半导体材料技术有限公司 Three-position multi-line cutting table
CN107626980A (en) * 2017-10-31 2018-01-26 乐山新天源太阳能科技有限公司 Three axles can detect the high-speed cutting machine of Buddha's warrior attendant thread breakage
CN107626980B (en) * 2017-10-31 2019-07-12 乐山新天源太阳能科技有限公司 Three axis can detect the high-speed cutting machine of Buddha's warrior attendant thread breakage
CN114571618A (en) * 2022-04-21 2022-06-03 青岛高测科技股份有限公司 Method, cutting equipment and cutting system for vertically cutting silicon rod by three wires
CN114589823A (en) * 2022-04-21 2022-06-07 青岛高测科技股份有限公司 Method for single-wire cutting of silicon rod, cutting device and cutting system
CN114750312A (en) * 2022-04-21 2022-07-15 青岛高测科技股份有限公司 Method, cutting equipment and cutting system for cutting silicon rod by single wire and three wires
CN114750311A (en) * 2022-04-21 2022-07-15 青岛高测科技股份有限公司 Method for cutting silicon rod by single wire and double wires, cutting equipment and cutting system
CN114714226A (en) * 2022-06-01 2022-07-08 唐山晶玉科技股份有限公司 Double-station multi-wire saw inclined plane workbench
CN114714226B (en) * 2022-06-01 2022-09-09 唐山晶玉科技股份有限公司 Double-station multi-wire saw inclined plane workbench
CN114953230A (en) * 2022-06-30 2022-08-30 青岛高测科技股份有限公司 Multi-wire cutting machine

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Publication number Publication date
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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111026

Termination date: 20190411

CF01 Termination of patent right due to non-payment of annual fee