WO2012070610A1 - 光走査装置 - Google Patents
光走査装置 Download PDFInfo
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- WO2012070610A1 WO2012070610A1 PCT/JP2011/077027 JP2011077027W WO2012070610A1 WO 2012070610 A1 WO2012070610 A1 WO 2012070610A1 JP 2011077027 W JP2011077027 W JP 2011077027W WO 2012070610 A1 WO2012070610 A1 WO 2012070610A1
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- WIPO (PCT)
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- mirror
- optical scanning
- scanning device
- main movable
- permanent magnet
- Prior art date
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
Definitions
- the present invention relates to an optical scanning device.
- Optical scanning devices that scan light by oscillating a mirror are widely used in digital copying machines, laser printers, bar code readers, scanners, projectors, and the like.
- MEMS Micro Electro Mechanical Systems
- the mirror mechanism can be integrally formed by a semiconductor process. Therefore, it is advantageous that the device can be miniaturized.
- the mirror size chip size
- the optical scanning device based on MEMS technology has the following advantages. That is, in such an optical scanning device, both ends of the mirror supported by a beam portion made of an elastic material are swung by a driving force such as an electrostatic force or an electromagnetic force with the beam portion serving as a rocking axis. Optical scanning is performed. Therefore, unlike a type of optical scanning device that rotates a polygon mirror or a galvanometer mirror by a motor, a mechanical drive mechanism such as a motor is not required. As a result, the structure becomes simple and the assemblability becomes good, which can contribute to cost reduction. Further, the deflection angle of the mirror can be made relatively large as compared with the above optical scanning device. This is important in realizing a projector capable of displaying a large screen.
- a resonance mirror that drives the mirror at the resonance frequency of the structure is used in order to increase the deflection angle of the mirror.
- k is a torsion spring constant of the torsion bar portion for supporting the mirror
- I m is the moment of inertia of the mirror.
- the resonance mirror requires high-speed vibration of about several tens of kHz as the resonance frequency fr, and accordingly, a torsion beam portion having a large torsion spring constant k, that is, a hard torsion beam portion is used ( (Refer Formula (1)).
- the deflection angle ⁇ of the resonant mirror given by the equation (2) depends on the driving force T as a result because the mirror quality factor Q is canceled by the torsion spring constant k. Therefore, a large driving force is required to increase the mirror deflection angle ⁇ .
- the mirror is configured to operate by non-resonant driving (DC driving).
- DC driving non-resonant driving
- T and k are respectively the driving force applied to the mirror and the torsion spring constant.
- Equation (3) it is possible to ensure a certain deflection angle ⁇ by increasing the driving force T or decreasing the torsion spring constant k.
- the resonance frequency fr is reduced by the equation (1).
- the resonance frequency approaches the drive frequency (usually 60 Hz) in the non-resonance mode, the resonance waveform is superimposed on the drive waveform of the mirror.
- Magnetic force type driving devices are classified into the following two types according to the arrangement of permanent magnets and coils.
- Patent Documents 1 and 2 describe an MC type drive device in which a coil is mounted on a movable part. A plurality of permanent magnets are arranged around the movable part, and the movable part is driven by utilizing the Lorentz force acting on the coil when a current is passed through the coil.
- MM type driving device a configuration in which at least one permanent magnet is mounted on the plate surface of a plate-like movable portion is often used. A coil is disposed in the vicinity of the movable part, and the movable part is driven by utilizing the magnetic interaction between the permanent magnet and the coil that is generated when a current is passed through the coil.
- Patent Document 3 discloses a driving device including a coil that is installed at a position facing a surface on which a permanent magnet of a movable plate (movable portion) is mounted, and is inclined according to the deflection angle of the movable plate. Has been. Thereby, even when the movable plate is deflected, a sufficiently large magnetic field is applied to the permanent magnet.
- Patent Document 4 discloses an optical scanner that includes a permanent magnet disposed on the back surface of a mirror plate (movable part) so that the magnetization direction is horizontal, and a fixed yoke in which a coil is housed. Yes. By disposing the permanent magnet so as to be sandwiched between the ends of the fixed yoke, the magnetic field applied to the permanent magnet through the fixed yoke can be made relatively large.
- an image display device such as a projector is required to use an optical scanning device having a large mirror size. Therefore, a driving device for that purpose is required to generate a larger driving force than before.
- the MC type driving device In order to increase the driving force generated in the MC type driving device described above, it is conceivable to increase the current flowing through the coil or increase the number of turns of the coil.
- the increase in current causes heat generation of the coil, which causes deterioration of the optical performance of the optical scanning device on which the coil is mounted.
- the number of turns of the coil is in a trade-off relationship with the wire diameter of the coil, so that it is difficult to obtain a large driving force. That is, in order to increase the number of turns of the coil, it is necessary to reduce the coil wire diameter. In this case, however, the upper limit of the current that can be energized must be lowered in order to prevent heat generation and disconnection. On the other hand, if the wire diameter of the coil is increased, the upper limit of the current that can be passed is somewhat relaxed, but the number of turns itself is reduced. Therefore, the MC type driving device has a problem that a desired driving force cannot be generated.
- the upper limit of the current that can be energized can be set high.
- the magnetic field generated by the coil can be increased as compared with the MC type driving device.
- an object of the present invention is to provide a structure capable of generating a sufficient driving force while realizing low power consumption in an optical scanning device having a large mirror size.
- an optical scanning device of the present invention is a pair of a main movable part and a torsionally deformable pair that are arranged opposite to each other at both ends of the main movable part and supports the main movable part so as to be swingable.
- a main torsion beam portion and a main drive portion that swings and drives the main movable portion.
- the main movable part includes a mirror part having a reflecting surface for reflecting light, and a pair of permanent magnets arranged opposite to each other across the mirror part, each extending along the swing axis of the main movable part.
- the main drive part has a yoke part arranged so as to surround the permanent magnet along the swing axis of the main movable part, and is wound around the yoke part and energizes the yoke part by energization to act on the permanent magnet. And a coil for generating a magnetic field.
- FIG. 1B is a schematic cross-sectional view taken along the line A-A ′ of FIG. 1A.
- FIG. 1B is a schematic sectional view taken along line B-B ′ of FIG. 1A.
- 1C is an exploded perspective view schematically showing a movable mirror of the optical scanning device of FIGS. 1A to 1C.
- FIG. 1B is a schematic cross-sectional view showing a state in which a movable mirror swings in the optical scanning device of FIG. 1B.
- 1B is a schematic cross-sectional view showing a state in which a movable mirror swings in the optical scanning device of FIG. 1B.
- FIG. 6B is a schematic sectional view taken along line A-A ′ of FIG. 6A.
- FIG. 6B is a schematic sectional view taken along line B-B ′ of FIG. 6A.
- FIG. 6B is a schematic plan view of a mirror unit in the optical scanning device of FIGS. 6A to 6C.
- FIG. 6C is a schematic cross-sectional view of a mirror portion in the optical scanning device of FIGS. 6A to 6C.
- FIG. FIG. 6B is a schematic plan view of a mirror unit in the optical scanning device of FIGS. 6A to 6C.
- FIG. 6A is a diagram in which the absolute value of the maximum swing angle of the movable mirror in FIGS. 6A to 6C is plotted against the flange width. It is a schematic plan view which shows the structure of the optical scanning device in the 3rd Embodiment of this invention.
- FIG. 9B is a schematic sectional view taken along line A-A ′ of FIG. 9A.
- FIG. 9B is a schematic sectional view taken along line B-B ′ of FIG. 9A.
- FIG. 9B is a schematic cross-sectional view showing a state in which the movable mirror swings in the optical scanning device of FIG. 9B.
- FIG. 9B is a schematic cross-sectional view showing a state in which the movable mirror swings in the optical scanning device of FIG. 9B.
- FIG. 9B is a diagram in which the absolute value of the maximum swing angle of the movable mirror in FIGS. 9A to 9C is plotted against the axial length of the permanent magnet.
- FIG. 9B is a diagram in which the absolute value of the maximum swing angle of the movable mirror in FIGS. 9A to 9C is plotted against the thickness of the permanent magnet.
- It is a schematic plan view which shows the structure of the optical scanning device in the 4th Embodiment of this invention.
- FIG. 9B is a schematic cross-sectional view showing a state in which the movable mirror swings in the optical scanning device of FIG. 9B.
- FIG. 9B is a schematic cross-sectional view
- FIG. 13B is a schematic sectional view taken along line A-A ′ of FIG. 13A.
- FIG. 13B is a schematic sectional view taken along line B-B ′ of FIG. 13A.
- FIG. 14B is a schematic sectional view taken along line A-A ′ of FIG. 14A.
- FIG. 14B is a schematic sectional view taken along line B-B ′ of FIG. 14A.
- FIG. 15B is a schematic sectional view taken along line A-A ′ of FIG. 15A.
- FIG. 15B is a schematic sectional view taken along line B-B ′ of FIG. 15A.
- the optical scanning device of this embodiment is a resonance type optical scanning device configured to operate at a resonance frequency.
- FIG. 1A to 1C are schematic views showing the configuration of the optical scanning device of the present embodiment.
- FIG. 1A is a schematic plan view of the optical scanning device according to the present embodiment as viewed from the light reflecting surface side.
- FIGS. 1B and 1C are taken along lines AA ′ and BB ′ in FIG. 1A, respectively.
- FIG. 1A is a schematic plan view of the optical scanning device according to the present embodiment as viewed from the light reflecting surface side.
- FIGS. 1B and 1C are taken along lines AA ′ and BB ′ in FIG. 1A, respectively.
- the optical scanning device 1 includes a movable mirror (main movable portion) 10 for scanning light, and is arranged to be opposed to each other at both ends of the movable mirror 10, and can be torsionally deformed connected to the movable mirror 10.
- the movable mirror 10 is connected to the support portions 41 and 42 via the main torsion beam portions 21 and 22, and is thus supported by the main torsion beam portions 21 and 22 so as to be swingable.
- the optical scanning device 1 has a main drive unit 30 that drives the movable mirror 10 to swing. As a result, the movable mirror 10 is driven by the main drive unit 30 and swings with the extending direction of the rod-shaped main torsion beam portions 21 and 22 as the swing axis XX.
- the movable mirror 10 includes a mirror part 11 having a reflecting surface 11a for reflecting light, a pair of permanent magnets 12 and 13 disposed opposite to each other with the mirror part 11 interposed therebetween, and the mirror part 11 and a pair of permanent magnets. And a movable frame portion 14 into which 12 and 13 are respectively fitted.
- the mirror part 11 and the permanent magnets 12 and 13 are respectively fitted into the movable frame part 14 and bonded by an adhesive.
- FIG. 2 is a perspective view showing a specific configuration of the movable mirror 10 and the main torsion beam portions 21 and 22 according to the present embodiment.
- the mirror portion 11 and the pair of permanent magnets 12 and 13 are fitted into the movable frame portion 14.
- the movable mirror 10 is shown before being moved.
- the movable frame portion 14 is integrally formed with the main torsion beam portions 21 and 22 with a material having appropriate rigidity and elasticity, and is connected to a support portion (not shown in FIG. 2) via the main torsion beam portions 21 and 22.
- a metal material having elasticity such as stainless steel or molybdenum, or single crystal silicon is preferably used.
- the mirror section 11 has an elliptical reflecting surface 11a and is arranged so that the minor axis direction thereof is substantially coaxial with the swing axis XX of the movable mirror 10.
- the mirror unit 11 is arranged so as to be substantially rotationally symmetric with respect to the swing axis XX of the movable mirror 10.
- the moment of inertia of the mirror part 11 can be lowered.
- This can lower the torsion spring constants of the main torsion beam portions 21 and 22 for obtaining a predetermined resonance frequency (here, 4 kHz) (see equation (1)). This is advantageous in that the deflection angle can be realized.
- a mirror surface made of a sufficiently flat metal thin film or dielectric multilayer film made of a material having a sufficiently high reflectivity with respect to light to be used is formed on the reflecting surface 11a of the mirror part 11.
- the mirror part 11 provided with such a mirror surface is formed separately from the movable frame part 14 as described above, and is fitted into the opening of the movable frame part 14.
- Such a configuration not only contributes to cost reduction due to the ease of assembly of the movable mirror 10 and the ease of processing of the mirror portion 11 itself, but also constitutes the movable frame portion 14 and the main torsion beam portions 21 and 22.
- the mirror portion 11 can be formed of a material different from the material. That is, the moment of inertia of the movable mirror 10 can be reduced by forming the mirror part 11 with a material having a density smaller than that of the material constituting the movable frame part 14 and the main torsion beam parts 21 and 22.
- the dimensions of the mirror part 11 are, for example, that the major axis (mirror width) of the reflecting surface 11a is 6 mm, the minor axis (mirror length) is 3 mm, and the thickness is 0.3 mm.
- the dimensions of the movable frame portion 14 at this time are, for example, such that the thickness of the elliptical portion into which the mirror portion 11 is fitted is 0.3 mm and the frame width is 0.7 mm.
- the mirror portion may be configured by directly forming the mirror surface as described above on the plate-shaped movable frame portion, instead of being formed separately from the movable frame portion.
- the permanent magnets 12 and 13 are arranged at both ends of the mirror portion 11 so as to extend along the swing axis XX of the movable mirror 10. At this time, as shown in FIG. 1A to FIG. 2, the permanent magnets 12 and 13 have their side surfaces extending along the swing axis XX of the movable mirror 10 magnetized to the N pole and the S pole, respectively.
- the magnetization direction is substantially perpendicular to the swing axis XX of the movable mirror 10.
- the permanent magnets 12 and 13 are arranged with respect to the mirror unit 11 so that the magnetization direction is substantially parallel to the reflecting surface 11 a of the mirror unit 11. Depending on the arrangement of the permanent magnets 12 and 13 and the mirror unit 11, the configuration of the main drive unit 30 to be described later is determined.
- the permanent magnets 12 and 13 may be arranged so as to be rotationally symmetric with respect to the swing axis XX of the movable mirror 10 as in the case of the mirror section 11. preferable.
- the main torsion beam portions 21 and 22 are integrally formed with the movable frame portion 14 and support the movable mirror 10 so as to be swingable.
- the dimensions of the main torsion beam portions 21 and 22 are determined according to the dimensions of the movable mirror 10. That is, the torsion spring constant is determined from the equation (1) so that the movable mirror 10 having the moment of inertia obtained from the dimensions of the mirror unit 11 and the permanent magnets 12 and 13 used is swung at a predetermined resonance frequency. Accordingly, the dimensions of the main torsion beam portions 21 and 22 are determined.
- the main drive unit 30 has yoke parts 31, 32, 33 composed of three parts, and these are permanent magnets 12 along the swing axis XX of the movable mirror 10. , 13 are arranged so as to surround them.
- the three portions 31, 32, and 33 of the yoke portion have end portions that face the permanent magnets 12 and 13, respectively.
- the first and second yokes 31 and 32 have first and second end portions 31 a and 32 a that face each other with the permanent magnets 12 and 13 interposed therebetween.
- the third yoke 33 has a third end 33 a that faces the permanent magnets 12 and 13 in a direction substantially perpendicular to the magnetization direction of the permanent magnets 12 and 13.
- the yoke portions 31, 32, and 33 configured in this manner are symmetrical with respect to a plane YY that includes the swing axis XX of the movable mirror 10 and that is substantially orthogonal to the magnetization direction of the permanent magnets 12 and 13. Has been placed.
- the dimensions of the yoke parts 31, 32, 33 are, for example, that the gap between the first and third end parts 31a, 33a and the gap between the second and third end parts 32a, 33a are 1 to 3, respectively.
- the range is 2
- the main drive unit 30 is wound around the first yoke 31, and energizes the yoke units 31, 32, 33 by energization to generate a coil 34 that generates a magnetic field that acts on the permanent magnets 12, 13 of the movable mirror 10.
- the coil 34 of the present embodiment is configured to form different magnetic poles at the first and second end portions 31a, 32a and the third end portion 33a by energization. .
- the number of turns of the coil 34 is 200 as an example.
- the gap between the first and third end portions 31a and 33a and the gap between the second and third end portions 32a and 33a are g, and the number of turns and current of the coil 34 are N and I, respectively.
- H NI / g.
- the magnetic field H acting on the permanent magnets 12 and 13 is 2 ⁇ 10 4 A / m (250 Oe).
- Such dimensions and the magnitude of the magnetic field are values that can be practically designed.
- 3A and 3B are schematic cross-sectional views of the optical scanning device 1 for explaining the operation of the movable mirror 10 of the present embodiment, and are diagrams corresponding to FIG. 1B, respectively.
- the first and second end portions 31a and 32a have S poles, and the third end portion 33a has N poles. Each pole is generated.
- magnetic fields are generated from the third end portion 33a toward the first and second end portions 31a and 32a, respectively.
- This magnetic field acts on the permanent magnet 13, and the permanent magnet 13 (that is, the movable mirror) is tilted to the right side in the drawing so that the north pole of the permanent magnet 13 attracts the south pole of the first end portion 31a.
- each permanent magnet 12, 13 (length in the direction perpendicular to the reflecting surface 11 a) is constant, and the axis of the permanent magnet 12, 13.
- the calculation result of the swing angle of the movable mirror 10 when the direction length (the length along the swing axis XX of the movable mirror 10) is changed is shown.
- the vertical axis represents the absolute value of the maximum swing angle of the movable mirror 10.
- the resonance frequency of the movable mirror 10 was 4 kHz
- the volume and thickness of the permanent magnets 12 and 13 were 3.6 mm 3 and 0.3 mm, respectively
- the magnetization of the permanent magnets 12 and 13 was 1.3 T.
- the magnetic field applied to the permanent magnets 12 and 13 was 10 4 A / m, and the mechanical quality factor was 50.
- a magnetic field of this magnitude can be generated by a coil 34 of 200 turns wound around the main drive unit 30 with a gap of 1 mm (current is 50 mA), and the mechanical quality factor is also a reasonable magnitude.
- the maximum swing angle of the movable mirror 10 increases as the axial length of the permanent magnets 12 and 13 increases.
- the moment of inertia of the permanent magnets 12 and 13 is reduced by decreasing the width of the permanent magnets 12 and 13 (the length along the major axis direction of the reflecting surface 11a) in inverse proportion to the axial length.
- the torsion spring constants of the main torsion beam portions 21 and 22 for obtaining a predetermined resonance frequency (4 kHz in this case) can be lowered in accordance with the change in the moment of inertia (see equation (1)), and as a result.
- the movable mirror 10 can be greatly swung. Along with this, the length of the main drive unit 30 in the axial direction also becomes longer, and a slight increase in volume and increase in DC resistance occur, but this is not a big problem.
- the permanent magnets 12 and 13 are preferably flat rectangular parallelepipeds that are long in the axial direction.
- the dimensions of the permanent magnets 12 and 13 are 6 mm in the axial direction, 2 mm in width, and 0.3 mm in thickness.
- the swing angle ⁇ (t) from the stationary position of the movable mirror 10 is derived by the following equation of motion.
- the clockwise direction is positive, and the magnitude of the applied magnetic field H (t) is uniform for simplicity.
- the moment of inertia I of the movable mirror 10 is the moment of inertia of the mirror portion 11 including the material forming the mirror surface and the permanent magnets 12 and 13.
- ⁇ (t) (QMH 0 / k ⁇ ) sin ( ⁇ t + ⁇ ) (5)
- ⁇ and ⁇ are the angular frequency and phase shift of the alternating current flowing through the coil 34, respectively.
- Q is a mechanical quality factor of the system, and is usually about several tens to 100 in air.
- the resonance frequency fr of the movable mirror 10 is 4 kHz
- neodymium magnets are used as the permanent magnets 12 and 13
- the dimensions are 2 ⁇ 6 ⁇ 0.3 mm 3
- the applied magnetic field H 0 is 2 ⁇ 10 4 A / m.
- the swing angle of the movable mirror 10 is ⁇ 7 ° at the maximum. This makes it possible to scan light in a range of ⁇ 14 °.
- the magnitude of the applied magnetic field required is about 2 ⁇ 10 4 A / m, so that the current flowing through the coil 34 is relatively small. As a result, power consumption is reduced. Further, when an alternating current having a predetermined frequency (for example, 4 kHz) flows through the coil 34, an impedance corresponding to the inductance of the coil 34 is generated in addition to the wiring resistance (for example, 1 ⁇ ) of the coil 34. Even in such a case, by inserting a capacitor in series with the current circuit to form an LCR resonance circuit, the impedance of the current circuit can be lowered to the wiring resistance and the power consumption can be reduced.
- a predetermined frequency for example, 4 kHz
- a pair of permanent magnets are disposed at both ends of the mirror portion along the swing axis of the movable mirror so that the yoke around which the coil is wound surrounds the permanent magnet. Can be arranged. As a result, not only the interval between the yoke end where the magnetic pole is formed and the permanent magnet, but also the interval between the yoke ends can be reduced. In addition, since the permanent magnet is disposed along the swing axis of the movable mirror, the gap between the yoke end and the permanent magnet can be maintained even when the movable mirror swings greatly. .
- FIG. 5 shows a configuration example of an image display device provided with the optical scanning device of the present embodiment.
- the image display device includes a light beam generation device P1 that generates a light beam of each color modulated according to a video signal supplied from the outside, and a collimating optical system for collimating each light beam generated by the light beam generation device P1. P2 and a combining optical system P3 for combining the collimated light beams. Further, the image display device scans in the vertical direction the horizontal scanning unit P4 that scans in the horizontal direction in order to display the image of the light beam synthesized by the synthesis optical system P3, and the light beam scanned in the horizontal direction in the horizontal scanning unit P4. And an optical system (not shown) for emitting light beams scanned in the horizontal and vertical directions onto the screen.
- the optical scanning device of this embodiment is incorporated in an image display device as a scanning mirror P41 of the horizontal scanning unit P4.
- the luminous flux generation device P1 receives a video signal, generates a signal as an element for constructing an image based on the input signal, and uses a horizontal synchronization signal used in the horizontal scanning unit and a vertical scanning unit. Signal processing circuits for outputting the vertical synchronizing signals respectively. In this signal processing circuit, red (R), green (G), and blue (B) video signals are generated.
- the light flux generation device P1 has a light source part P11 for making three video signals (R, G, B) output from the signal processing circuit into light fluxes, respectively.
- the light source unit P11 includes a laser P12 that generates a light beam for each color of the video signal and a laser drive system P13 that drives the laser P12.
- a semiconductor laser or a solid-state laser with a harmonic generation mechanism (SHG) is preferably used as each laser.
- the light beams of the respective colors emitted from the respective lasers P12 of the light beam generation device P1 are collimated by the collimating optical system P2, and then enter the dichroic mirrors corresponding to the respective colors of the combining optical system P3.
- the light beams of the respective colors incident on these three dichroic mirrors are reflected or transmitted in a wavelength-selective manner and output to the horizontal scanning unit P4.
- the horizontal scanning unit P4 and the vertical scanning unit P5 project the light beam incident on the horizontal operation unit P4 as an image by scanning the scanning mirrors P41 and P51 in the horizontal direction and the vertical direction.
- Each scanning mirror P41, P51 is driven by a scanning drive circuit based on a synchronization signal output from the signal processing circuit and input through the scanning synchronization circuit.
- FIG. 6A to 6C are schematic views showing the configuration of the optical scanning device according to the second embodiment of the present invention.
- FIG. 6A is a schematic plan view of the optical scanning device of the present embodiment as viewed from the light reflecting surface side, and corresponds to FIG. 1A.
- 6B and 6C are schematic cross-sectional views taken along lines AA ′ and BB ′ in FIG. 6A, respectively.
- This embodiment is a modification in which the configuration of the mirror part (and the movable frame part associated therewith) is changed with respect to the first embodiment.
- the mirror unit 11 in the first embodiment has a rectangular cross section perpendicular to the reflecting surface 11a
- the mirror unit 111 in the present embodiment includes
- the flange part 111b is provided in the outer peripheral part of the reflective surface 111a.
- the size of the elliptical portion of the movable frame portion 114 into which the mirror portion 111 is fitted is changed.
- the configuration other than these is the same as that of the first embodiment, and the operation method is also the same as that of the first embodiment.
- the same members as those in the first embodiment are denoted by the same reference numerals in each drawing, and description thereof is omitted.
- FIG. 7A to 7C are schematic views showing the mirror unit 111 of the present embodiment.
- 7A and 7C are schematic plan views of the mirror part 111 as viewed from above and below, and
- FIG. 7A shows the reflecting surface 111a side.
- FIG. 7B is a schematic cross-sectional view similar to FIG. 6C.
- the mirror part 111 of this embodiment has the flange part 111b provided in the outer peripheral part of the reflective surface 111a as mentioned above.
- the flange portion 111 b can be formed by an etching process that is normally performed on glass, and engages with an elliptical portion of the movable frame portion 114 when the mirror portion 111 is fitted into the movable frame portion 114.
- the mirror part 111 is fixed by bonding the flange part 111b to the elliptical part of the movable frame part 114 with an adhesive.
- an elastic metal material such as stainless steel or molybdenum or single crystal silicon can be used as in the first embodiment, but molybdenum is preferably used in this embodiment. .
- FIG. 8 is a result of calculating the swing angle of the movable mirror 110 when the size (mirror length and mirror width) of the reflecting surface 111a is constant and the width (flange width) of the flange portion 111b is changed. is there.
- the vertical axis is the absolute value of the maximum swing angle of the movable mirror 110.
- the mirror length of the mirror part 111 is 3 mm
- the mirror width is 6 mm
- the thickness of the flange part 111b is 0.05 mm
- the thickness of the mirror part 111 in the part where the flange part 111b is not formed is 0.3 mm. did. Therefore, the case where the flange width is 0 mm corresponds to the case of the first embodiment.
- the calculation was performed under the same conditions as in the calculation of FIG. 4, and the axial lengths of the permanent magnets 12 and 13 were 6 mm, the width was 2 mm, and the thickness was 0.3 mm.
- the maximum swing angle of the movable mirror 110 increases as the flange width increases.
- the maximum swing angle of the movable mirror 110 is ⁇ 14 ° (scanning angle ⁇ 28 °), which is about twice that of 0 mm (first embodiment). Reach.
- the flange width be as large as possible.
- the strength of the reflecting surface is lowered to induce deflection or the like, and therefore, in practice, it may be selected according to the optical characteristics required for the scanning light.
- the flange portion 111b is formed, so that the size of the reflecting surface 111a is the same as that of the first embodiment, but the mirror portion 111 is different from the first embodiment.
- the moment of inertia of the movable frame portion 114 can be reduced.
- the torsion spring constants of the main torsion beam portions 21 and 22 for obtaining a predetermined resonance frequency can be lowered, and the swing angle of the movable mirror can be further increased.
- FIG. 9A to 9C are schematic views showing the configuration of the optical scanning device according to the third embodiment of the present invention.
- FIG. 9A is a schematic plan view of the optical scanning device of the present embodiment as viewed from the light reflecting surface side, and corresponds to FIG. 1A.
- 9B and 9C are schematic cross-sectional views taken along lines AA ′ and BB ′ in FIG. 9A, respectively.
- This embodiment is a modified example in which the configuration of the permanent magnet and the main drive unit is changed with respect to the first embodiment. Specifically, the magnetization direction of the permanent magnet in the present embodiment is rotated by 90 ° about the swing axis of the movable mirror with respect to the magnetization direction in the first embodiment, and accordingly, the permanent magnet
- the shape of the magnet (and the movable frame portion associated therewith) and the configuration of the yoke portion have been changed.
- the configuration other than these is the same as in the first embodiment, but molybdenum is preferably used as the material of the movable frame portion, as in the second embodiment.
- the permanent magnets 212 and 213 of the present embodiment are arranged so that their magnetization directions are substantially perpendicular to the reflecting surface 11a of the mirror portion 11, that is, substantially the plane YY. Are arranged parallel to each other. Accordingly, in the main drive unit 230, only the first and second yokes 231 and 232 have end portions 231a and 232a facing each other with the permanent magnets 212 and 213 interposed therebetween, respectively.
- the coil 234 is wound around the first and second yokes 231 and 232, respectively, and forms different magnetic poles at the first end 231a and the second end 232a by energization, as will be described later. It is configured as follows.
- the number of turns of the coil 234 is 200 as an example. Also in this embodiment, the first to third yokes 231, 232, and 233 are arranged symmetrically with respect to the plane YY including the swing axis XX of the movable mirror 210.
- FIG. 10A and 10B are schematic cross-sectional views of the optical scanning device 201 for explaining the operation of the movable mirror 210 of the present embodiment, and are diagrams corresponding to FIG. 9B, respectively.
- FIGS. 10A and 10B When the coil 234 of the main drive unit 230 is energized, magnetic flux is generated in the first to third yokes 231, 232, 233, and the first and second end portions 231a, 232a are shown in FIGS. 10A and 10B. As shown, different magnetic poles are formed. As a result, a magnetic field is generated between the end portions 231a and 232a.
- FIG. 11 shows the axial lengths of the permanent magnets 212 and 213 with respect to the different thicknesses of the permanent magnets 212 and 213, with the volumes of the permanent magnets 212 and 213 being constant for the movable mirror 210 shown in FIGS. 9A to 9C.
- This is a result of calculating the swing angle of the movable mirror 210 when the height is changed.
- the calculation conditions such as the resonance frequency (4 kHz) of the movable mirror 210 and the volumes (3.6 mm 3 ) of the permanent magnets 213 and 213 are the same as those in the calculation of FIG.
- the torsion spring constants of the main torsion beam portions 21 and 22 for obtaining a predetermined resonance frequency (4 kHz in this case) can be lowered in accordance with the change in the moment of inertia (see equation (1)), and as a result.
- the movable mirror 210 can be swung greatly.
- FIG. 12 is a plot of the calculation results similar to FIG. 11 plotted against the thicknesses of the permanent magnets 212 and 213, and shows the calculation results when the axial length of the permanent magnets 212 and 213 is 6 mm. Yes.
- the maximum swing angle of the movable mirror 210 shows a maximum value when the thickness of the permanent magnets 212 and 213 is around 0.8 mm.
- the angle (about 9 °) at this time is about 20% larger than that when the thickness is 0.3 mm. This indicates that the moment of inertia of the permanent magnets 212 and 213 is the smallest in this vicinity. Therefore, the thickness of the permanent magnets 212 and 213 is preferably in the range of 0.7 to 0.9 mm under the above conditions.
- FIG. 13A to 13C are schematic views illustrating the configuration of an optical scanning device according to the fourth embodiment of the present invention.
- FIG. 13A is a schematic plan view of the optical scanning device of the present embodiment as viewed from the light reflecting surface side, and corresponds to FIG. 1A.
- 13B and 13C are schematic cross-sectional views taken along lines AA ′ and BB ′ in FIG. 13A, respectively.
- This embodiment is a modification in which the configuration change made in the second embodiment with respect to the first embodiment is made in the third embodiment. That is, in this embodiment, the mirror unit 11 of the third embodiment (that is, the first embodiment) is replaced with the mirror unit 111 provided with the flange portion 111b of the second embodiment. Accordingly, the size of the oval portion of the movable frame portion 314 into which the mirror portion 111 is fitted is also changed with respect to the third embodiment.
- the configuration other than these is the same as that of the third embodiment, and the operation method is also the same as that of the third embodiment.
- the effect obtained by this embodiment is the same as that of the second embodiment. That is, when the flange width is 0.8 mm in the present embodiment, the maximum swing angle of the movable mirror 310 is about twice that in the case of 0 mm (third embodiment). For example, when the thickness of the permanent magnets 212 and 213 is 0.8 mm (the moment of inertia is the smallest), in the third embodiment, the maximum swing angle of the movable mirror 310 is ⁇ 9 ° as described above. However, in the present embodiment, it reaches about double ⁇ 18 ° (scan angle ⁇ 36 °).
- FIG. 14A to 14C are schematic views showing the configuration of the optical scanning device according to the fifth embodiment of the present invention.
- FIG. 14A is a schematic plan view of the optical scanning device of the present embodiment as viewed from the light reflecting surface side, and corresponds to FIG. 1A.
- 14B and 14C are schematic cross-sectional views taken along lines AA ′ and BB ′ in FIG. 14A, respectively.
- This embodiment is a modified example in which the shape of the mirror part (and the movable frame part associated therewith) of the fourth embodiment is changed from an ellipse to a rectangle.
- the optical scanning device 401 of the present embodiment is a non-resonant optical scanning device configured to operate at a non-resonant frequency, and is the vertical direction of the image display device illustrated in FIG. Used as a scanning mirror P51 of the scanning unit P5. Therefore, the reflection surface 411a of the mirror part 411 is formed in a rectangular shape.
- the dimensions of the mirror part 411 are such that the short side (mirror width) of the reflecting surface 411a is 4 mm, the long side (mirror length) is 8 mm, and the thickness is 0.3 mm.
- the optical scanning device 401 of this embodiment is required to operate with non-resonant driving (DC driving, driving frequency 60 Hz) as described above, it is necessary to effectively eliminate the resonance mode with a low-pass filter. . Therefore, it is desirable that the movable mirror 410 of this embodiment is configured so that the resonance frequency is about 1 kHz.
- molybdenum is preferably used as a material for the movable frame portion 414.
- the dimensions of the permanent magnets 212 and 213 are an axial length of 5 mm, a width of 1 mm, and a thickness of 0.5 mm.
- the maximum oscillation of the movable mirror 410 when the mechanical quality factor is 1.
- the angle is calculated, it reaches ⁇ 13.5 ° when the flange width is 0.8 mm. This is about 4 times or more the maximum swing angle ( ⁇ 3.3 °) when the flange width is 0 mm.
- FIG. 15A to 15C are schematic views showing the configuration of the optical scanning device according to the sixth embodiment of the present invention.
- FIG. 15A is a schematic plan view of the optical scanning device according to the present embodiment as viewed from the light reflecting surface side, and corresponds to FIG. 1A.
- 15B and 15C are schematic cross-sectional views taken along lines AA ′ and CC ′ in FIG. 15A, respectively.
- the optical scanning device 501 of this embodiment is a biaxial optical scanning device. That is, the entire movable mirror 510 swings in the non-resonant mode with the main torsion beam portions 21 and 22 as the swing axes XX, as in the fifth embodiment.
- the mirror unit 511 swings with respect to the movable mirror 510 in the resonance mode with the axis ZZ extending in the direction substantially orthogonal to the swing axis XX as the swing axis. Yes. Therefore, in this embodiment, the mirror part 511 can be swung two-dimensionally, and light can be scanned two-dimensionally.
- the configuration in which the entire movable mirror 510 is swung in the non-resonant mode is the same as that of the fifth embodiment except for the thickness of the permanent magnet (and the distance between the gaps of the yoke portion associated therewith).
- the movable mirror 510 of this embodiment has a configuration in which the mirror unit 511 is oscillated between two permanent magnets 212 and 213 in a resonance mode. Specifically, the movable mirror 510 is disposed at both ends of the mirror portion 511 so as to face each other, and a pair of torsionally deformable sub-twisted beam portions 515 and 516 that support the mirror portion 511 so as to be able to swing, And a sub drive unit 517 for swinging and driving the 511.
- the secondary torsion beam portions 515 and 516 extend in a direction substantially perpendicular to the swing axis XX of the movable mirror 510. With this direction as the swing axis ZZ, the mirror section 511 is driven to swing by the sub drive section 517.
- the sub-drive unit 517 includes a piezoelectric layer 517a made of a piezoelectric material (piezoelectric element), and lower and upper electrodes 517b and 517c formed of another material such as an Al thin film or Pt as an electrode pad. Yes.
- the lower electrode 517b, the piezoelectric layer 517a, and the upper electrode 517c are laminated on the movable frame portion 514 in this order as shown in FIG. 15C.
- a total of four sub-driving units 517 are provided, two each with the swing axis ZZ interposed therebetween.
- the two sub-driving units 517 on the right side (as viewed in FIG. 15A) with respect to the swing axis ZZ are connected to voltage application means 518a provided on the support unit 41 by wiring.
- the same voltage V1 is applied to each piezoelectric layer 517a.
- the two sub-driving units 517 on the left side (as viewed in FIG. 14A) with respect to the swing axis ZZ are connected to voltage application means 518b provided on the support unit 42 by wiring.
- the same voltage V2 is applied to each piezoelectric layer 517a.
- the mirror unit 511 can be efficiently driven in the resonance mode.
- the mirror portion 511, the pair of auxiliary torsion beam portions 515, 516, the movable frame portion 514, and the support portions 41, 42 are made of a material (such as single crystal silicon, spring steel, molybdenum, etc.) that can be finely processed and has appropriate rigidity. It is integrally molded.
- these members are: It is preferably formed from a metal material.
- the dimensions of the mirror portion 511 and the pair of auxiliary torsion beam portions 515 and 516 are designed so as to obtain a desired resonance frequency.
- a mirror surface such as a metal thin film having a sufficient reflectance with respect to the light to be used is formed.
- the deforming force of the piezoelectric material (piezoelectric element) is used as the driving force for swinging the mirror unit 511, but an electromagnetic force or an electrostatic force can also be used.
- Optical scanning device 10 110, 210, 310, 410, 510 Movable mirror 11, 111, 411, 511 Mirror part 11a, 111a, 411a Reflecting surface 12, 13, 212, 213 Permanent magnets 14, 114, 214, 314, 414, 514 Movable frame portion 21, 22 Main torsion beam portion 30, 230 Main drive portion 31, 231 First yoke 31a, 231a First end portion 32, 232 Second Yoke 32a, 232a Second end portion 33, 233 Third yoke 33a Third end portion 34, 234 Coil 41, 42 Support portion 111b Flange portion 515, 516 Secondary torsion beam portion 517 Secondary drive portion 517a Piezoelectric layer 517b Lower portion Electrode 517c Upper electrode 518a, 518b Voltage application means
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Abstract
Description
fr=(2π)-1(k/Im)1/2 (1)
で与えられる。ここで、kはミラーを支持するねじり梁部のねじりばね定数、Imはミラーの慣性モーメントである。
θ=QT/k (2)
で与えられる。ここで、Qは系の品質係数であり、空気中および真空中での典型的な値は、それぞれ約100および約1000である。
θ=T/k (3)
で与えられる。ここで、Tおよびkはそれぞれ同様に、ミラーに加わる駆動力およびねじりばね定数である。
例えば、特許文献1および2には、可動部にコイルが搭載されたMC型の駆動装置が記載されている。可動部の周囲に複数の永久磁石が配置され、コイルに電流を流した時にコイルに働くローレンツ力を利用して、可動部が駆動されるようになっている。
MM型の駆動装置としては、板状の可動部の板面に少なくとも1つの永久磁石が搭載されている構成が多く用いられている。この可動部の近傍にコイルが配置され、コイルに電流を流した時に発生する、永久磁石とコイルとの磁気的相互作用を利用して、可動部が駆動されるようになっている。
まず、本発明の第1の実施形態における光走査装置について説明する。本実施形態の光走査装置は、共振周波数で動作するように構成された共振型の光走査装置である。
-MH(t)cos(θ0-θ(t))=0 (4)
I:可動ミラー10の慣性モーメント
H(t):永久磁石12,13の位置での印加磁場
M:可動ミラー10の磁気モーメント(水平方向左向き)
kθ:主ねじり梁部21,22のねじりばね定数
b:ダンピング係数
θ0:鉛直方向に対する印加磁場H(t)の傾斜角度
θ(t)およびθ0は、図3Aおよび図3Bで見て時計回りの方向を正とし、印加磁場H(t)の大きさは、簡単のため一様とする。また、可動ミラー10の慣性モーメントIは、鏡面を形成する材料を含むミラー部11と永久磁石12,13の慣性モーメントとする。
θ(t)=(QMH0/kθ)sin(ωt+φ) (5)
で与えられる。ここで、ωおよびφは、それぞれコイル34に流れる交流電流の角周波数および位相のずれである。また、Qは系の機械品質係数であり、通常空気中で数10~100程度である。
図6Aから図6Cは、本発明の第2の実施形態における光走査装置の構成を示す概略図である。図6Aは、本実施形態の光走査装置を光の反射面側から見た概略平面図であり、図1Aに対応する図である。図6Bおよび図6Cは、それぞれ図6AのA-A’線およびB-B’線に沿った概略断面図である。
図9Aから図9Cは、本発明の第3の実施形態における光走査装置の構成を示す概略図である。図9Aは、本実施形態の光走査装置を光の反射面側から見た概略平面図であり、図1Aに対応する図である。図9Bおよび図9Cは、それぞれ図9AのA-A’線およびB-B’線に沿った概略断面図である。
図13Aから図13Cは、本発明の第4の実施形態における光走査装置の構成を示す概略図である。図13Aは、本実施形態の光走査装置を光の反射面側から見た概略平面図であり、図1Aに対応する図である。図13Bおよび図13Cは、それぞれ図13AのA-A’線およびB-B’線に沿った概略断面図である。
図14Aから図14Cは、本発明の第5の実施形態における光走査装置の構成を示す概略図である。図14Aは、本実施形態の光走査装置を光の反射面側から見た概略平面図であり、図1Aに対応する図である。図14Bおよび図14Cは、それぞれ図14AのA-A’線およびB-B’線に沿った概略断面図である。
図15Aから図15Cは、本発明の第6の実施形態における光走査装置の構成を示す概略図である。図15Aは、本実施形態の光走査装置を光の反射面側から見た概略平面図であり、図1Aに対応する図である。図15Bおよび図15Cは、それぞれ図15AのA-A’線およびC-C’線に沿った概略断面図である。
10,110,210,310,410,510 可動ミラー
11,111,411,511 ミラー部
11a,111a,411a 反射面
12,13,212,213 永久磁石
14,114,214,314,414,514 可動枠部
21,22 主ねじり梁部
30,230 主駆動部
31,231 第1のヨーク
31a,231a 第1の端部
32,232 第2のヨーク
32a,232a 第2の端部
33,233 第3のヨーク
33a 第3の端部
34,234 コイル
41,42 支持部
111b フランジ部
515,516 副ねじり梁部
517 副駆動部
517a 圧電層
517b 下部電極
517c 上部電極
518a,518b 電圧印加手段
Claims (10)
- 主可動部と、該主可動部の両端に互いに対向して配置され、該主可動部を揺動可能に支持するねじれ変形可能な一対の主ねじり梁部と、前記主可動部を揺動駆動する主駆動部と、を有する光走査装置であって、
前記主可動部が、
光を反射する反射面を備えたミラー部と、
前記ミラー部を挟んで互いに対向して配置され、それぞれが前記主可動部の揺動軸に沿って延びる一対の永久磁石と、
を有し、
前記主駆動部が、
前記主可動部の揺動軸に沿って前記永久磁石を囲むように配置されたヨーク部と、
前記ヨーク部に巻き付けられ、通電によって前記ヨーク部を励磁して、前記永久磁石に作用する磁場を発生させるコイルと、
を有する、光走査装置。 - 前記永久磁石は、前記主可動部の揺動軸に対して実質的に回転対称に配置されているとともに、磁化方向が前記主可動部の揺動軸と実質的に直交するように配置されている、請求項1に記載の光走査装置。
- 前記ヨーク部が、前記主可動部の揺動軸を含む平面に対して実質的に対称に配置されている、請求項2に記載の光走査装置。
- 前記永久磁石は、磁化方向が前記平面と実質的に直交するように配置され、
前記ヨーク部が、前記永久磁石を挟んで互いに対向する2つの端部と、前記永久磁石の磁化方向と実質的に直交する方向で該永久磁石に対向する1つの端部と、を有し、
前記コイルが、通電によって前記2つの端部と前記1つの端部とに異なる磁極を形成するように、前記ヨーク部に巻き付けられている、請求項3に記載の光走査装置。 - 前記永久磁石は、磁化方向が前記平面と実質的に平行になるように配置され、
前記ヨーク部が、前記永久磁石を挟んで互いに対向する2つの端部を有し、
前記コイルが、通電によって前記2つの端部にそれぞれ異なる磁極を形成するように、前記ヨーク部に巻き付けられている、請求項3に記載の光走査装置。 - 前記ミラー部が、前記一対の主ねじり梁部を構成する材料の密度より小さい密度の材料で構成されている、請求項1から5のいずれか1項に記載の光走査装置。
- 前記ミラー部が、前記主可動部の揺動軸に対して実質的に回転対称に配置されている、請求項1から6のいずれか1項に記載の光走査装置。
- 前記ミラー部は、前記反射面の周縁部がフランジ状に形成されている、請求項1から6のいずれか1項に記載の光走査装置。
- 前記主可動部が、
前記ミラー部の両端に互いに対向して配置され、該ミラー部を揺動可能に支持するねじれ変形可能な一対の副ねじり梁部であって、該各副ねじり梁部が、前記主可動部の揺動軸と実質的に直交する方向に延びる、一対の副ねじり梁部と、
前記ミラー部を揺動駆動する副駆動部と、
を有する、請求項1から5のいずれか1項に記載の光走査装置。 - 前記副駆動部が圧電材料を有する、請求項9に記載の光走査装置。
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Also Published As
Publication number | Publication date |
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CN103180772A (zh) | 2013-06-26 |
US20130229698A1 (en) | 2013-09-05 |
JPWO2012070610A1 (ja) | 2014-05-19 |
US9122059B2 (en) | 2015-09-01 |
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