WO2012060057A1 - 欠陥検査方法、微弱光検出方法および微弱光検出器 - Google Patents
欠陥検査方法、微弱光検出方法および微弱光検出器 Download PDFInfo
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Abstract
Description
5…ビームエキスパンダ
6…偏光制御部
7…照明強度分布制御部
24…照明強度分布モニタ
53…制御部
54…表示部
55…入力部
101…照明部
102…検出部
103…ステージ部
105…信号処理部
201…対物レンズ
202…偏光フィルタ
203…結像レンズ
204…複数画素センサ
224…アレイセンサ
Claims (9)
- 光源から出射した光を、所望の光量、位置、ビーム径、および偏光状態を持った光束に調整する照明光調整工程と、
前記照明光調整工程により得られる光束を所望の入射角をもって試料表面に導き、前記試料表面においてある一方向について長くそれに直交する方向について短い照明強度分布を形成する照明強度分布制御工程と、
前記照明強度分布制御工程による前記試料面上の照明光照射位置において、前記照明強度分布の長手方向に対して実質的に垂直な方向に試料を変位させる試料走査工程と、
前記試料走査工程において前記照明強度分布制御工程によって照明光が照射される領域内の複数の小領域各々から出射される散乱光の光子数を計数して対応する複数の散乱光検出信号を出力する散乱光検出工程と、
前記散乱光検出工程において得られる複数の散乱光検出信号を処理して欠陥の存在を判定する欠陥判定工程と、
前記欠陥判定工程において欠陥と判定される箇所各々について対応する散乱光検出信号を処理して欠陥の寸法を判定する欠陥寸法判定工程と、
前記欠陥判定工程において欠陥と判定される箇所各々について、前記試料表面上における位置および前記欠陥寸法判定工程において得られる欠陥寸法を表示する表示工程と、
を有することを特徴とする欠陥検査方法。 - 前記散乱光検出工程において、前記試料走査工程において試料上にて発生する散乱光のうち互い異なる複数の方向に出射する複数の散乱光成分を検出して対応する複数の散乱光検出信号を出力し、
前記欠陥判定工程において、前記散乱光検出工程において得られる複数の散乱光検出信号のうち少なくとも一つの信号を処理して欠陥の存在を判定することを特徴とする請求項1に記載の欠陥検査方法。 - 前記散乱光検出工程において、二次元に配列したガイガーモードで動作するアバランシェフォトダイオード画素に散乱光を導き、前記複数の小領域から出射される散乱光の各々を複数のアバランシェフォトダイオード画素で受光し、対応する小領域毎に該複数のアバランシェフォトダイオード画素の信号を加算した信号を出力することを特徴とする請求項1または2に記載の欠陥検査方法。
- 前記散乱光検出工程において、微小欠陥の像が前記照明強度分布の長手方向に対して実質的に垂直な方向に関して複数のアバランシェフォトダイオード画素にまたがることを特徴とする請求項3に記載の欠陥検査方法。
- 前記散乱光検出工程において、微小欠陥の像が前記照明強度分布の長手方向に対して実質的に垂直な方向に関して複数のアバランシェフォトダイオード画素にまたがることを特徴とする請求項3に記載の欠陥検査方法。
- 試料面内の一方向(X方向)に長く、それに直交する方向(Y方向)に短い領域から発する微弱光による像を、Y方向に拡大して再結像する再結像工程と、
前記再結像工程において再結像した像面を受光面とする二次元のアレイセンサで再結像した像面の光強度分布を検出し、アレイセンサのY方向に並ぶ画素の検出信号の合計を出力する信号出力工程と、
を有することを特徴とする微弱光検出方法。 - 前記信号出力工程におけるアレイセンサを構成する光検出画素の電子増倍率が104以上であることを特徴とする請求項6に記載の微弱光検出方法。
- 前記信号出力工程におけるアレイセンサを構成する光検出画素がガイガーモードで動作するアバランシェフォトダイオードで構成されることを特徴とする請求項6に記載の微弱光検出方法。
- 二次元の格子状(X、Y方向)に配列したガイガーモードで動作するアバランシェフォトダイオードを有し、
該アバランシェフォトダイオードのY方向の行毎に、X方向のアバランシェフォトダイオード列の検出信号の合計を出力することを特徴とする微弱光検出器。
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WO2013168557A1 (ja) * | 2012-05-11 | 2013-11-14 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法および欠陥検査装置 |
JP2013234966A (ja) * | 2012-05-11 | 2013-11-21 | Hitachi High-Technologies Corp | 欠陥検査方法および欠陥検査装置 |
WO2015186202A1 (ja) * | 2014-06-04 | 2015-12-10 | 株式会社日立製作所 | 走査型電子顕微鏡装置 |
CN105891230A (zh) * | 2014-09-05 | 2016-08-24 | 熊菊莲 | 基于光谱图像分析的水果外表检测方法 |
US20220074868A1 (en) * | 2018-12-27 | 2022-03-10 | Hitachi High-Tech Corporation | Defect inspection device and inspection method, and optical module |
Also Published As
Publication number | Publication date |
---|---|
US10261026B2 (en) | 2019-04-16 |
JP2012098103A (ja) | 2012-05-24 |
US20170115231A1 (en) | 2017-04-27 |
KR20130060351A (ko) | 2013-06-07 |
JP5568444B2 (ja) | 2014-08-06 |
KR101478476B1 (ko) | 2014-12-31 |
US20130321798A1 (en) | 2013-12-05 |
US9588054B2 (en) | 2017-03-07 |
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