WO2012014561A1 - Système de transport - Google Patents

Système de transport Download PDF

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Publication number
WO2012014561A1
WO2012014561A1 PCT/JP2011/062355 JP2011062355W WO2012014561A1 WO 2012014561 A1 WO2012014561 A1 WO 2012014561A1 JP 2011062355 W JP2011062355 W JP 2011062355W WO 2012014561 A1 WO2012014561 A1 WO 2012014561A1
Authority
WO
WIPO (PCT)
Prior art keywords
temporary storage
track
storage shelf
transport vehicle
article
Prior art date
Application number
PCT/JP2011/062355
Other languages
English (en)
Japanese (ja)
Inventor
椿達雄
久米橋達也
Original Assignee
ムラテックオートメーション株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ムラテックオートメーション株式会社 filed Critical ムラテックオートメーション株式会社
Publication of WO2012014561A1 publication Critical patent/WO2012014561A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Definitions

  • the present invention relates to a technical field of a transport system that transports articles such as containers containing various substrates for manufacturing semiconductor devices, for example, by a transport vehicle that travels along a track.
  • transport system for example, there is a system that transports articles by running a plurality of transport vehicles on a track laid on a ceiling.
  • the transport vehicle can deliver (i.e., transfer) articles to and from a temporary storage shelf (e.g., a buffer) provided along the track.
  • a temporary storage shelf e.g., a buffer
  • Patent Document 1 proposes a technique of providing a temporary storage shelf between two tracks provided in parallel.
  • the size of the article is increased with the increase in the diameter of the semiconductor wafer. For this reason, the enlargement of the conveyance vehicle which conveys goods is also calculated
  • the present invention has been made in view of the above-described problems, for example, and an object of the present invention is to provide a transport system capable of suitably transferring articles to a temporary storage shelf provided between tracks. .
  • a transport system includes a track, a first temporary storage shelf, and a transport vehicle.
  • the track has a first track and a second track provided side by side.
  • the first temporary storage shelf is provided at a position that appears to be provided between the first track and the second track when viewed in the vertical direction.
  • the transport vehicle includes a main body that travels on the track and a transfer unit that transfers articles between the first temporary storage shelf.
  • the first temporary storage shelf is located at a position where a part of the first temporary storage shelf overlaps with the main body of the transporting vehicle performing the transfer operation of the article between the first temporary storage shelf and the first temporary storage shelf.
  • the article loaded on the storage shelf is provided at a height that does not interfere with the main body of the transport vehicle traveling on the first track.
  • an article such as FOUP (Front Opening Unified Unified Pod) is transported by a transport vehicle such as OHT (Overhead Hoist Transport) traveling along a track laid on the ceiling, for example.
  • a transport vehicle such as OHT (Overhead Hoist Transport) traveling along a track laid on the ceiling, for example.
  • a plurality of transport vehicles are arranged on the track, and each transport vehicle transports an article based on a transport command given to each track.
  • the track has a first track and a second track that are arranged side by side.
  • the two tracks are arranged in parallel with each other and at a relatively narrow interval.
  • a first temporary storage shelf capable of transferring articles is provided between the two tracks.
  • the 1st temporary storage shelf is provided so that it may be located in the side of a track, and a conveyance vehicle transfers goods to the 1st temporary storage shelf using the transfer mechanism which can be extended to the side, for example. .
  • the above-mentioned first temporary storage shelf is located at a position that overlaps at least partially when viewed in the vertical direction with the transporting vehicle transferring the article on the first track, and the article loaded on the first temporary storage shelf.
  • the height is set so as not to interfere with the transport vehicle traveling on the first track.
  • the first temporary storage shelf is provided at a position shifted by a width smaller than the width of the article on the side of the transport vehicle, and further, the transport vehicle traveling on the first track and the second track is the first.
  • the height on the first temporary storage shelf side is adjusted so as not to interfere with the articles loaded on the one temporary storage shelf.
  • the first temporary storage shelf is provided at a height similar to the traveling height of the transport vehicle, in order not to interfere with the goods transferred to the transport vehicle and the first temporary storage shelf. It is required that the two tracks are provided at least apart from the width of the article. More precisely, the two tracks are required to be separated by a total distance including the distance from the track to the end of the transport vehicle, the width of the article, the margin at the time of transfer, and the like.
  • the first temporary storage shelf is provided at a height at which the transferred article does not interfere with the transport vehicle.
  • the first temporary storage shelf is provided on the lower side until the transport vehicle and the article loaded on the first temporary storage shelf do not overlap each other. For this reason, even if it is provided in a position where the transport vehicle and the first temporary storage shelf overlap each other, interference between the transport vehicle and the article loaded on the first temporary storage shelf can be reliably prevented.
  • the article is preferably used with respect to the first temporary storage shelf provided between the tracks while preventing interference between the traveling carriage and the article. Can be transferred.
  • the 1st temporary storage shelf may be provided in the position which does not overlap with the main-body part of the conveyance vehicle which is performing the transfer operation
  • the track is provided such that a horizontal distance perpendicular to the extending direction of the track between the transport vehicle on the first track and the transport vehicle on the second track is narrower than the width of the article. Also good.
  • the track of the first temporary storage shelf side end portion of the first transport vehicle traveling on the first track and the first temporary storage shelf side end portion of the second transport vehicle traveling on the second track is narrower than the width of the article.
  • “the distance in the horizontal direction perpendicular to the extending direction of the track” means the distance at which the transport vehicles traveling on different tracks approach each other closest to each other.
  • the first temporary storage shelf is provided at such a height that the transport vehicle and the transferred article do not interfere with each other. That is, even when the distance between the tracks is set narrow, interference can be prevented because the height of the first temporary storage shelf is adjusted. Accordingly, it is possible to flexibly cope with an increase in the size of the transport vehicle.
  • the first temporary storage shelf may be provided so as to satisfy the relationship of G ⁇ D.
  • B is the width of the transport vehicle
  • C is the width of the article
  • D is the horizontal direction between the end of the first temporary storage shelf side of the transport vehicle on the first track and the article loaded on the transport vehicle.
  • Distance is the horizontal distance from the end of the transport vehicle on the second track on the first temporary storage shelf side to the article loaded on the first temporary storage shelf
  • G is the transport vehicle on the first track. Is the horizontal distance from the article loaded on the item to the article loaded on the first temporary storage shelf.
  • the distance to the end of the transport vehicle on the first temporary storage shelf side (that is, the distance D) is equal to the product transferred to the first temporary storage shelf.
  • the position of the first temporary storage shelf is set to be greater than the distance (that is, the distance G). That is, the article loaded on the first temporary storage shelf is positioned so as to be located inside the transport vehicle from the end of the transport vehicle. Therefore, the distance between the first track and the second track is relatively narrow.
  • the first temporary storage shelf is provided at such a height that the transport vehicle and the articles loaded on the first temporary storage shelf do not interfere with each other, so that no particular problem occurs. . That is, even when the distance between the tracks is set narrow, the height of the first temporary storage shelf is adjusted, so that interference can be prevented. Accordingly, it is possible to flexibly cope with an increase in the size of the transport vehicle.
  • the transport system may further include a second temporary storage shelf provided immediately below at least one of the first track and the second track.
  • the first temporary storage shelf is provided at the same height as the second temporary storage shelf.
  • a second temporary storage shelf located immediately below the transport vehicle is provided, and the transport vehicle transfers articles to the second temporary storage shelf in the same manner as the first temporary storage shelf.
  • the first temporary storage shelf is provided at the same height as the second temporary storage shelf described above. Therefore, the configuration of each buffer can be simplified compared to the case where the first temporary storage shelf and the second temporary storage shelf are provided at different heights.
  • the “same height” in this aspect does not indicate only the case where the height of the first temporary storage shelf and the height of the second temporary storage shelf are completely the same. It means that they are close to each other before they can be used.
  • a transport system includes a track, a first temporary storage shelf, and a ceiling transport vehicle.
  • the track has a first track and a second track provided side by side.
  • the first temporary storage shelf is provided at a position that appears to be between the first track and the second track when viewed in the vertical direction, and below the first track and the second track.
  • the overhead conveyance vehicle has a main body portion that travels while being suspended from the track, and a transfer portion that can transfer articles between the first temporary storage shelf.
  • the first temporary storage shelf partially overlaps with the main body of the transport vehicle that is performing the transfer operation of the article with the first temporary storage shelf in the first track, and the first temporary storage shelf is in the second track.
  • the first temporary storage shelf is provided at a height at which the articles loaded on the first temporary storage shelf do not interfere with the main body of the transport vehicle traveling on the first track.
  • the transfer unit may include a side moving unit that moves the article to the side and a lifting unit that is provided in the side moving unit and moves the article up and down.
  • FIG. 1 is a plan view showing the overall configuration of the transport system according to this embodiment.
  • the transport system includes a track 100, a transport vehicle 200, and a controller 300.
  • the track 100 is laid on the ceiling, for example, and is made of a metal such as aluminum or stainless steel.
  • a plurality of transport vehicles 200 are arranged on the track 100, and the FOUP that is an article can be transported by traveling on the track 100.
  • the front portion of the transport vehicle 200 is conceptually illustrated as an acute angle.
  • the transport vehicle 200 further includes an on-board controller 205.
  • the on-vehicle controller 205 receives a conveyance command from the controller 300 and controls the traveling of the conveyance vehicle 200.
  • the on-board controller 205 not only controls the travel of the transport vehicle 200 but also has a function of comprehensively controlling each device provided in the transport vehicle 200.
  • the controller 300 includes, for example, an arithmetic circuit, a memory, and the like, and is configured to be able to give a transport command to the transport vehicle 200 via the on-vehicle controller 205.
  • a plurality of buffers for temporarily storing the FOUP are provided at positions along the track 100.
  • the configuration of this buffer will be described in detail later.
  • FIG. 2 is a side view showing the configuration of the transport vehicle.
  • the transport vehicle 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, a lifting control unit 235, a lifting belt 240, and a gripping unit 250.
  • the transport vehicle 200 travels along the track 100 while the traveling roller 215 rolls as the traveling unit 210 applies a propulsive force by, for example, a linear motor.
  • a main body 220 is attached to the lower surface of the traveling unit 210 so as to hang.
  • the moving part 230 is attached to the main body part 220.
  • the moving unit 230 can move to the side of the track 100 (that is, the horizontal direction in the drawing).
  • a lifting control unit 235 is attached to the lower surface of the moving unit 230.
  • a holding unit 250 that holds the FOUP is attached by an elevating belt 240.
  • the gripping part 250 can be raised and lowered with respect to the main body part 220 by unwinding or winding up the lifting belt 240.
  • FIGS. 3 and 4 are perspective views showing a FOUP transfer method.
  • the lifting / lowering belt 240 is unwound by the lifting / lowering control unit 235 so that the gripping unit 250 is lowered to the position of the FOUP 400. And the fine adjustment of the position of the holding part 250 and the FOUP 400 is performed, and the FOUP 400 is held.
  • the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are moved up to the position of the main body portion 220. Then, the transport vehicle 200 travels again on the track 100, and the FOUP 400 is transported.
  • the FOUP 400 is installed on the temporary storage shelf 520 at a position deviated to the side of the track 100.
  • the elevating belt 240 is unwound by the elevating control unit 235, and the gripping unit 250 is lowered to the position of the FOUP 400.
  • the FOUP 400 can be laterally transferred from the track unit 100.
  • FIG. 5 is a top view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to this embodiment
  • FIG. 6 is the track, the transport vehicle, and the temporary track of the transport system according to the present embodiment.
  • It is a side view which shows the positional relationship of a storage shelf.
  • FIG. 7 is a side view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to the comparative example.
  • a temporary storage shelf 520 is an example of a temporary storage shelf, and is provided between the first track 100a and the second track 100b that are provided side by side. It has been.
  • the FOUP 400 can be transferred to the temporary storage shelf 520 by a transport vehicle 200a traveling on the first track 100a.
  • the temporary storage shelf 520 is provided so as to at least partially overlap the carrier vehicle 200a to which the FOUP 400 can be transferred as viewed in the vertical direction.
  • the conveyance vehicle 200b traveling on the track 100b opposite to the conveyance vehicle 200a is provided so as not to overlap (that is, to be separated).
  • the temporary storage shelf 520 is provided at the same height as the temporary storage shelf 530. For this reason, the FOUP 400 transferred to the temporary storage shelf 520 has a height that does not interfere with the transport vehicle 200.
  • the temporary storage shelf 520 is a temporary storage shelf that is provided on the side of the track and needs to be moved by the moving unit 230 for transferring articles, and is referred to as, for example, an STU (Side Truck Buffer).
  • the temporary storage shelf 530 is a temporary storage shelf that is provided on the lower side of the track and does not need to be moved by the moving unit 230 for transferring articles, and is referred to as, for example, UTB (Under Truck Buffer).
  • the distance A1 between the first track 1100a and the second track 1100b according to the comparative example can be expressed by the following formula (1).
  • the width of the transport vehicle 1200a is B
  • the width of the FOUP 400 is C
  • the distance between the end of the transport vehicle 1200a and the FOUP 1400 loaded on the transport vehicle 1200a is D
  • the temporary storage shelf is extended from the end of the transport vehicle 1200a.
  • E is the distance to the FOUP 1400 transferred to 1520
  • F is the distance from the end of the transport vehicle 1200b to the FOUP transferred to the temporary storage shelf 1520.
  • distances D, E, and F are determined by the configuration of the transport vehicle 200 and the like.
  • the distance A2 between the first track 100a and the second track 100b according to the present embodiment is expressed by the following formula (2) with respect to the comparative example described above. expressed.
  • G is the distance from the FOUP 400 loaded on the transport vehicle 200a to the FOUP transferred to the temporary storage shelf 520.
  • the temporary storage shelf 520 is provided at such a height that the transferred FOUP 400 does not interfere with the transport vehicle 200. For this reason, even when the distance between the first track 100a and the second track 100b is relatively narrow, interference between the transport vehicle 200 and the FOUP 400 of the temporary storage shelf 520 can be reliably prevented.
  • interference between the transport vehicle 200 and the FOUP 400 of the temporary storage shelf 520 can also be prevented by increasing the distance between the first track 100a and the second track 100b.
  • changing the laying position of the track 100 is extremely expensive.
  • the transport system according to the present embodiment also has an effect of preventing such an increase in cost.
  • the temporary storage shelf 520 is further provided at the same height as the temporary storage shelf 530. Therefore, the configuration of each buffer can be simplified as compared with the case where the temporary storage shelf 520 and the temporary storage shelf 530 are provided at different heights (see FIG. 7).
  • the FOUP 400 is suitably transferred to the temporary storage shelf 520 provided between the tracks 100 while preventing the traveling transport vehicle 200 and the FOUP 400 from interfering with each other. Is possible.

Abstract

La présente invention concerne le transfert d'un article de façon adéquate à une étagère de stockage temporaire présente entre les rails d'un système de transport. Le système de transport selon l'invention comprend : des rails (100), deux rails (100a, 100b) étant disposés parallèlement l'un à l'autre ; une étagère de stockage temporaire (520) présente entre les deux rails ; et des véhicules de transport (200) qui se déplacent le long des rails respectifs et qui peuvent chacun transférer un article (400) à l'étagère de stockage temporaire. L'étagère de stockage temporaire se trouve dans une position, vue dans la direction verticale, où l'étagère de stockage temporaire chevauche au moins en partie le véhicule de transport qui est sur le point de transférer l'article, et se trouve à une hauteur où l'article transféré n'entrave pas le déplacement des véhicules de transport.
PCT/JP2011/062355 2010-07-27 2011-05-30 Système de transport WO2012014561A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010168087A JP2012025573A (ja) 2010-07-27 2010-07-27 搬送システム
JP2010-168087 2010-07-27

Publications (1)

Publication Number Publication Date
WO2012014561A1 true WO2012014561A1 (fr) 2012-02-02

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Application Number Title Priority Date Filing Date
PCT/JP2011/062355 WO2012014561A1 (fr) 2010-07-27 2011-05-30 Système de transport

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JP (1) JP2012025573A (fr)
TW (1) TW201212149A (fr)
WO (1) WO2012014561A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109791906A (zh) * 2016-09-26 2019-05-21 村田机械株式会社 顶棚搬运系统以及顶棚搬运车

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
WO2019021708A1 (fr) * 2017-07-24 2019-01-31 村田機械株式会社 Système d'entrepôt automatisé et procédé de commande de système d'entrepôt automatisé
WO2020195240A1 (fr) * 2019-03-22 2020-10-01 村田機械株式会社 Système de véhicule de transport

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62269892A (ja) * 1986-05-15 1987-11-24 三菱重工業株式会社 立体コンテナヤ−ド
JP2008100835A (ja) * 2006-10-20 2008-05-01 Asyst Technologies Japan Inc 搬送システム
JP2009120299A (ja) * 2007-11-13 2009-06-04 Murata Mach Ltd 天井走行車システムとそのバッファの施工方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62269892A (ja) * 1986-05-15 1987-11-24 三菱重工業株式会社 立体コンテナヤ−ド
JP2008100835A (ja) * 2006-10-20 2008-05-01 Asyst Technologies Japan Inc 搬送システム
JP2009120299A (ja) * 2007-11-13 2009-06-04 Murata Mach Ltd 天井走行車システムとそのバッファの施工方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109791906A (zh) * 2016-09-26 2019-05-21 村田机械株式会社 顶棚搬运系统以及顶棚搬运车
JPWO2018055883A1 (ja) * 2016-09-26 2019-10-03 村田機械株式会社 天井搬送システム、及び天井搬送車
US11052926B2 (en) 2016-09-26 2021-07-06 Murata Machinery, Ltd. Overhead transport system and overhead transport vehicle
CN109791906B (zh) * 2016-09-26 2023-11-24 村田机械株式会社 顶棚搬运系统以及顶棚搬运车

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JP2012025573A (ja) 2012-02-09
TW201212149A (en) 2012-03-16

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