201212149 六、發明說明： 【發明所屬之技術領域】 本發明，是有關於將收容例如半導體裝置製造用各種 基板用的容器等的物品，藉由沿著軌道行走的搬運車進行 搬運的搬運系統的技術領域。 【先前技術】 這種的搬運系統，具有例如藉由在被舖設於頂棚的軌 道上行走的複數搬運車，將物品搬運者。搬運車，是在與 沿著軌道設置的一時保管棚（例如暫存器等）之間，可進 行物品的收授（即移載）。 物品的移載，不只對於位於軌道的正下方的暫存器， 對於從軌道所見橫方向設置的暫存器也可進行。在例如專 利文獻1中，被提案在平行設置的2條軌道之間設置一時保 管棚的技術。 〔先行技術文獻〕 〔專利文獻〕專利文獻1:日本特開2009-120299號公 報 【發明內容】 (本發明所.欲解決的課題） 在如上述的搬運系統中，隨著半導體晶圓的大徑化等 使物品大型化。因此’也要求搬運物品用搬運車的大型化 -5- 201212149 但是在如上述的專利文獻1的技術的構成中’只是將 搬運車大型化的話，搬運車及一時保管棚之間有可能干涉 。對於此，藉由擴大軌道的間隔來防止干涉的話，會花費 膨大的成本。即，在專利文獻1的技術中，具有對於搬運 車的大型化無法柔軟對應的技術上的問題點。 本發明，是鑑於例如上述的問題點，其課題是提供一 種搬運系統，對於設在軌道之間的一時保管棚可最佳地移 載物品。 (用以解決課題的手段） 本發明的一觀點的搬運系統是爲了解決上述課題，具 備：軌道、及第1—時保管棚、及搬運車》軌道，具有彼 此並列設置的第1軌道及第2軌道。第1一時保管棚，是從 鉛直方向所見被設在第1軌道及第2軌道之間的位置。搬運 車，具有：在軌道行走的本體部、及在與第1一時保管棚 之間移載物品的移載部。第1一時保管棚的設置位置及高 度，是從鉛直方向所見一部分是與在第1軌道中的搬運車 與第1一時保管棚之間正進行物品的移載作業的搬運車的 本體部重疊的位置，且被積載於第1 一時保管棚的物品是 不與行走在第1軌道的搬運車的本體部干涉的高度。 依據此搬運系統，在其動作時，藉由例如沿著被舖設 在頂棚的軌道行走的OHT (懸掛式搬運系統、〇verhead Hoist Transport)等的搬運車’使f〇UP (前開口式通用容 器、Front Opening Unified Pod)等的物品被搬運❶在軌 -6- 201212149 道上，配置有複數搬運車，各搬運車是各依據被下達的搬 運命令將物品搬運。 軌道，具有彼此並列設置的第1軌道及第2軌道。例如 兩軌道，是彼此平行地並列並且設成比較狹窄的間隔。此 兩軌道之間，設有可移載物品的第1 一時保管棚。第1一時 保管棚，是被設成位於軌道的側方，搬運車，是使用例如 可朝側方伸長的移載機構，朝第1一時保管棚移載物品。 特別是，上述的第1 一時保管棚的設置位置及高度， 是從鉛直方向所見至少部分是與第1軌道由移載物品的搬 運車重疊的位置，且在第1 一時保管棚被積載的物品，是 不與行走在第1軌道的搬運車干涉的高度。例如，第1一時 保管棚，是設在與搬運車的側方側只有比物品的寬度小的 寬度偏離的位置，進一步第1一時保管棚側的高度是被調 整成：使在第1軌道及第2軌道行走的搬運車不與被積載於 第1 一時保管棚的物品千涉。 在此假設：第1一時保管棚是設成與搬運車的行走的 高度相同的高度的話，爲了使搬運車及移載至第1 一時保 管棚的物品不相互干涉，2條的軌道之間距離，是要求至 少比物品的寬度更遠離。更正確地說明的話，2條軌道之 間的距離，是要求只有遠離：從軌道直到搬運車的端部爲 止的距離、物品的寬度及移載時的界限等合計的距離。 這種軌道間的距離，是在舖設的當初雖即使被作成具 有充分的距離（即在搬運車及被積載於第1一時保管棚物 品之間不干涉的距離），但欲將例如搬運車大型化的話， 201212149 就無法具有充分的距離。即，搬運車大型化的部分因爲會 更接近第1 一時保管棚側，所以搬運車及移載至第1一時保 管棚的物品彼此之間有可能干涉。 然而，如上述，第1一時保管棚的設置高度，是被移 載物品不與搬運車干涉的高度。例如，第1一時保管棚， 是從側方所見，設在搬運車及被積載於第1 一時保管棚的 物品彼此不重疊爲止的下方側。因此，即使設在搬運車及 第1—時保管棚彼此重疊的位置，仍可確實地防止搬運車 及被積載於第1 一時保管棚的物品之間的干涉。 又，即使擴大第1軌道及第2軌道的間隔，雖可防止搬 運車及第1 一時保管棚的物品之間的干涉，但是在軌道的 舖設位置的變更時需花費非常大的成本。本發明，也具有 可防止這種成本增大的效果。 如以上說明’依據本發明的一觀點的搬運系統，可防 止行走的搬運車及物品之間的干涉，且對於設在軌道之間 的第1 一時保管棚可最佳地移載物品。 第1 一時保管棚的設置位置，是在第2軌道中從鉛直方 向所見不與在與第1—時保管棚之間正進行物品的移載作 業的搬運車的本體部重疊的位置也可以。 軌道，其第1軌道中的搬運車、及與第2軌道中的搬運 車之間的與軌道的延伸方向垂直的水平方向的距離，是設 成比物品的寬度更窄也可以。 此情況’在第1軌道行走的第1搬運車的第1 —時保管 棚側的端部、及在第2軌道行走的第2搬運車的第1—時保 201212149 管棚側的端部的、與軌道的延伸方向垂直的水平方向的距 離，是比物品的寬度更窄。又’在此的「與軌道的延伸方 向垂直的水平方向的距離」’是指行走在不同的軌道的搬 運車彼此最接近時的距離的意思。 這種情況，第〗一時保管棚，因爲是設在搬運車及被 移載的物品彼此不干涉的高度’所以不會產生任何問題。 即，即使軌道之間的距離被設定成較窄的情況’因爲第1 一時保管棚的高度被調整，所以可防止干涉。因此’可柔 軟對應搬運車的大型化等。 第1軌道及第2軌道間的距離A，是表示成A = B + C-D + G + F的情況時，第1一時保管棚，是設成滿足G<D的關係 也可以。又，B是搬運車的寬度，C是物品的寬度’ D是在 第1軌道中的搬運車的第1一時保管棚側的端部及被積載於 搬運車的物品之間的水平方向距離。進一步，F是從第2軌 道中的搬運車的第1—時保管棚側的端部直到被積載於第1 一時保管棚的物品爲止的水平方向的距離，G是在第1軌道 中的從被積載於搬運車的物品直到被積載於第1 一時保管 棚的物品爲止的水平方向的距離。 此情況時，第1一時保管棚的位置是被設定成：從被 積載於搬運車的物品所見，搬運車的第1 一時保管棚側的 端部爲止的距離（即距離D)，是比被移載至第1 一時保管 棚的物品爲止的距離（即距離G)大。即，被積載於第1 一 時保管棚的物品，是被作成比搬運車的端部更位於搬運車 內側的位置。因此，第1軌道及第2軌道之間的距離是成爲 -9- 201212149 較狹窄者。 即使這種情況，因爲第1 一時保管棚的設置高度，是 在搬運車及被積載於第1 一時保管棚的物品彼此不干涉的 高度’所以特別不會產生問題。即，即使軌道之間的距離 被設定成較窄的情況，第1一時保管棚的高度因爲也被調 整，所以可防止干涉。因此，可以柔軟對應搬運車的大型 化等。 搬運系統，是進一步具備設在第〗軌道及第2軌道的至 少一方的正下方的第2—時保管棚也可以。該情況，第1 — 時保管棚，是設在與第2—時保管棚相同的高度。 此情況，設有位於搬運車的正下方的第2—時保管棚 ，搬運車’是與第1—時保管棚同樣，也對於第2 —時保管 棚進行物品的移載。 且特別是，第1一時保管棚，是設在與上述的第2—時 保管棚相同的高度。因此，與將第1—時保管棚及第2—時 保管棚設在彼此不同高度的情況相比，可以簡單地構成各 暫存器。 又’本態樣的「相同高度」，並非只指第1 一時保管 棚的高度及第2—時保管棚的高度成爲完全地相同的情況 ，而是可以發揮上述的本態樣的效果爲止，使彼此的高度 接近的意思。 本發明的其他的觀點的搬運系統，具備：軌道、及第 1—時保管棚、及高架行走車。軌道，具有彼此並列設置 的第1軌道及第2軌道。第1—時保管棚，是設在從鉛直方 -10- 201212149 向所見位於第1軌道及第2軌道之間的位置，且，設在第！ 軌道及第2軌道的下方。高架行走車，具有：在從軌道吊 下的狀態下行走的本體部、及在與第1 一時保管棚之間可 移載物品的移載部。第1一時保管棚的設置位置，是從鉛 直方向所見一部分是與在第1軌道中的搬運車與第1 一時保 管棚之間正進行物品的移載作業的搬運車的本體部重疊， 從鉛直方向所見不與在第2軌道中的搬運車與第1 一時保管 棚之間正進行物品的移載作業的搬運車的本體部重疊的位 置。第1一時保管棚，是設在被積載於第1—時保管棚的物 品是不與行走在第1軌道的搬運車的本體部干涉的高度。 移載部’具有：使物品朝側方移動的側方移動部、及 設在側方移動部並使物品昇降的昇降部也可以。 對於本發明的作用及其他的增益可從以下說明的實施 發明用的形態明白。 【實施方式】 以下，一邊參照圖一邊說明本發明的實施例。 1.搬運系統的整體構成 首先，對於本實施例的搬運系統的整體構成，參照第 1圖說明。在此第1圖，是顯示本實施例的搬運系統的整體 構成的平面圖。 在第1圖中，本實施例的搬運系統，具備：軌道100、 及搬運車200、及控制器300。 -11 - 201212149 軌道100，是被舖設在例如頂棚，由鋁和不銹鋼等的 金屬所構成。 搬運車200，是複數被配置在軌道100上，藉由行走在 軌道1 00上可將物品也就是FOUP搬運。且，在此爲了明確 搬運車200的進行方向，將搬運車200的前方部分以銳角槪 念地圖示。 搬運車200是進一步分別具有車上控制器205。車上控 制器205，是從控制器3 00收取搬運指令，控制搬運車200 的行走。且，車上控制器205，不是只有控制搬運車200的 行走，也具有總括地控制搬運車200中的各機器的功能。 控制器3 00，包含例如計算電路和記億體等，可透過 車上控制器205對於搬運車200施加搬運指令》 且，在此的圖示雖省略，但是在沿著軌道1〇〇的位置 中，將FOUP暫時地保管用的暫存器是被複數設置。對於 此暫存器的構成，是如後詳述。 2.搬運車的具體的構成 接著，參照第2圖說明搬運車的更具體的構成。在此 第2圖，是顯示搬運車的構成的側面圖。 在第2圖中’搬運車200，具備：行走部210、本體部 220、移動部230、昇降控制部235、昇降皮帶240及把持部 2 50 ° 搬運車200，是行走部2 1 0藉由例如線性馬達等施加推 進力，使行走滾子215被轉動，且沿著軌道1〇〇行走。在行 -12- 201212149 走部21 0的下面，本體部220是由懸吊下垂的形態被安裝。 在本體部220中，安裝有移動部230。移動部230，是 可朝軌道100的側方（即在圖中的左右方向）移動。在移 動部23 0的下面，安裝有昇降控制部23 5。 在昇降控制部23 5的下面，將FOUP把持的把持部250 是藉由昇降皮帶240被安裝。把持部250，是藉由將昇降皮 帶240捲出或捲取，對於本體部220可昇降。 3.搬運車的FOUP的移載方法 接著，參照第3圖及第4圖說明搬運車的FOUP的移載 方法。在此第3圖及第4圖是分別顯示FOUP的移載方法的 立體圖。 在第3圖中，搬運車200是移載位於軌道1〇〇的正下方 的埠510上的FOUP400時，首先搬運車200是走行於軌道 100上，並停止於被設在埠510上的FOUP400的上方。 接著，如圖所示，藉由昇降控制部23 5使昇降皮帶24〇 被捲出並使把持部250降下直到FOUP 4 00的位置爲止。且 ，把持部250及FOUP400的位置的微調整被進行，FOUP400 被把持。 FOUP400被把持的話，昇降皮帶240被捲取，把持部 250及被把持的FOUP400是上昇直到本體部220的位置爲止 。且，再度使搬運車200走行於軌道100上，使FOUP400被 搬運。 在第4圖中，說明FOUP400被設在徧離位於軌道1〇〇的 -13- 201212149 側方的位置中的一時保管棚5 2 0的情況。移動部2 3 0朝軌道 100的側方移動之後，藉由昇降控制部23 5使昇降皮帶240 被捲出，使把持部250降下直到FOUP400的位置爲止。藉 由如此動作，可從軌道部1〇〇進行FOUP400的橫移載。 4.搬運系統的暫存器的構成 接著，對於本實施例的搬運系統的暫存器的構成，參 照第5圖〜第7圖詳細說明。在此第5圖，是顯示本實施例 的搬運系統的軌道、搬運車及一時保管棚的位置關係的俯 視圖，第6圖，是顯示本實施例的搬運系統的軌道、搬運 車及一時保管棚的位置關係的側面圖。且第7圖，是顯示 比較例的搬運系統的軌道、搬運車及一時保管棚的位置關 係的側面圖。 4.1.本實施例的一時保管棚的位置 在第5圖中，本實施例的一時保管棚520，是一時保管 棚的一例，設在彼此並列設置的第1軌道100a及第2軌道 l〇〇b之間。在一時保管棚520中，藉由在第1軌道100a行走 的搬運車200a，使FOUP400可移載。且，一時保管棚520 的設置位置，從圖示可知，對於可移載FOUP400的搬運車 2 00a，從鉛直方向所見，至少部分地重疊。另一方面，對 於在搬運車200a相反側的軌道i〇〇b行走的搬運車200b不重 疊（即分離）。 在第6圖中，本實施例的一時保管棚5 20，是設在與一 -14- 201212149 時保管棚530相同的高度。因此，被移載至一時保管棚520 的FOUP400，是成爲不與搬運車200干涉的高度。 又，一時保管棚520，是設在軌道側方，在物品的移 載時需要由移動部23 0移動的一時保管棚，例如稱爲STU ( Side Truck Buffer )。且，一時保管棚530，是設在軌道下 側，在物品的移載時不需要由移動部230移動的一時保管 棚，例如稱爲 UTB ( Under Truck Buffer)。 4.2.比較例中的一時保管棚的位置及尺寸關係 在第7圖中，假設一時保管棚1 520，是設在較高的位 置的話，被移載至一時保管棚1 520的FOUP 1400及搬運車 1200a及120 0b，從水平方向所見，是成爲存在於彼此重疊 的位置。因此，爲了使FOUP 1 400及搬運車1 200a或搬運車 1 200b是不干涉，要求第1軌道1100a及第2軌道1100b之間 的距離要比較大。 具體而言，比較例的第1軌道ll〇〇a及第2軌道1100b之 間的距離A1，可以由以下的數式（1 )表示。又，此情況 ，搬運車1200a的寬度爲B，FOUP400的寬度爲C，搬運車 1200a的端部及被積載於搬運車1200a的FOUP1400之間的 間隔爲D，從搬運車1200 a的端部直到被移載至一時保管棚 1520的FOUP 1400爲止的距離爲E，從搬運車120 0b的端部 直到被移載至一時保管棚1 520的FOUP爲止的距離爲F。 A1=B + C + E + F …(1 ) -15- 201212149 且，距離D、E及F，是分別藉由各搬運車2 00的構成等 決定》 4.3.本實施例中的一時保管棚的尺寸關係 返回至第6圖，對於上述的比較例，本實施例的第1軌 道l〇〇a及第2軌道l〇〇b之間的距離A2，可由以下的數式（2 )表示。又，G是從被積載於搬運車200a的FOUP400直到 被移載至一時保管棚520的FOUP爲止的距離。 A2 = B + C-D + G + F ··· ( 2 ) 對於數式（2)，代入數式（1)的話，以下的數式（ 3 )成立。 A2 = A 1-E-D + G ... ( 3 ) 在此，從圖可知，因爲G<D，所以A2<A 1的關係成立 。即’依據本實施例的搬運系統，藉由將一時保管棚520 的位置朝下側偏離，就可以減小第1軌道1 〇 〇 a及第2軌道 100b之間的距離。 這種軌道間的距離，即使在舖設的當初被作成充分的 距離，例如欲將搬運車200大型化的話就無法具有充分的 距離。即，因爲搬運車200大型化的部分會更接近一時保 -16- 201212149 管棚520側，而可能使搬運車200及被移載至一時保管棚 520的FOUP400相互干涉。 對於此在本實施例中，如上述，一時保管棚5 20，是 設成使被移載的FOUP400不會與搬運車200干涉的高度。 因此，第1軌道l〇〇a及第2軌道100b之間的距離即使是比較 狹窄的情況，也可確實地防止搬運車200及一時保管棚520 的FOUP400之間的干涉。 又，藉由擴大第1軌道l〇〇a及第2軌道100b之間的距離 ，也許可防止搬運車200及一時保管棚520的FOUP400之間 的干涉。但是，軌道100的舖設位置的變更會花費非常大 的成本。本實施例的搬運系統，也具有可防止這種成本增 大的效果。 在本實施例中，一時保管棚520，是進一步設在與一 時保管棚5 3 0相同的高度。因此，與將一時保管棚520及一 時保管棚5 3 0設成彼此不同高度的情況（第7圖參照）相比 ，可以簡單地構成各暫存器。 如以上說明，依據本發明的搬運系統，可防止行走的 搬運車200及FOUP400之間的干涉，且對於被設在軌道1〇〇 之間的一時保管棚52〇可最佳地移載FOUP400。 本發明，並非限定上述的實施例，在不違反可從申請 專利範圍及說明書整體讀取的發明的實質或思想的範圍可 適宜地變更，隨著如此的變更的搬運系統也包含於本發明 的技術的範圍。 -17- 201212149 【圖式簡單說明】 〔第1圖〕顯示實施例的搬運系統的整體構成的平面 圖。 〔第2圖〕顯示搬運車的構成的側面圖。 〔第3圖〕顯示FOUP的移載方法的立體圖（其1)。 〔第4圖〕顯示FOUP的移載方法的立體圖（其2)。 〔第5圖〕顯示實施例的搬運系統的軌道、搬運車及 —時保管棚的位置關係的俯視圖。 〔第6圖〕顯示實施例的搬運系統的軌道、搬運車及 一時保管棚的位置關係的側面圖。 1 〔第7圖〕顯示比較例的搬運系統的軌道、搬運車及 —時保管棚的位置關係的側面圖。 【主要元件符號說明】 100 :軌道 100a :第1軌道 100b :第2軌道 200 :搬運車 2 0 0a:搬運車 200b :搬運車 205 :車上控制器 2 1 〇 :行走部 2 1 5 :行走滾子 220 :本體部 -18- 201212149 2 3 0 :移動部 23 5 :昇降控制部 240 :昇降皮帶 2 5 0 :把持部 3 0 0 :控制器 400 ：物品（F Ο U Ρ ) 5 1 0 :埠 520 : —時保管棚 5 3 0 : —時保管棚 1 1 0 0 a :第1軌道 1 1 00b :第2軌道 1 200a :搬運車 1 200b :搬運車 1 520 :—時保管棚[Technical Field] The present invention relates to a transport system that transports articles such as containers for various substrates for semiconductor device manufacturing by a transport vehicle that travels along a track. Technical field. [Prior Art] Such a transport system has a carrier who transports articles, for example, by a plurality of transport vehicles that are traveling on a rail that is laid on a ceiling. The truck is transported (i.e., transferred) between a temporary storage shed (e.g., a register, etc.) disposed along the track. The transfer of the item is not only for the register located directly below the track, but also for the register placed in the horizontal direction as seen from the track. In, for example, Patent Document 1, it is proposed to provide a technique for temporarily maintaining a shed between two rails arranged in parallel. [Prior Art Document] [Patent Document] Patent Document 1: JP-A-2009-120299 SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) In the above-described transport system, as the semiconductor wafer is large The size of the article increases the size of the article. Therefore, the size of the transporting vehicle is also required to be increased. -5-201212149 However, in the configuration of the technique of Patent Document 1 described above, it is possible to interfere with each other between the transport vehicle and the temporary storage booth only when the transport vehicle is increased in size. In this case, if the interference is prevented by increasing the interval of the tracks, the cost of expansion will be incurred. In other words, in the technique of Patent Document 1, there is a technical problem that the enlargement of the transport vehicle cannot be made soft. The present invention has been made in view of the above problems, and it is an object of the invention to provide a transport system capable of optimally transporting articles for a temporary storage shed provided between rails. (Means for Solving the Problem) In order to solve the above-described problems, the transportation system according to the first aspect of the present invention includes a rail, a first-time storage booth, and a carrier rail, and has a first rail and a first rail that are arranged in parallel with each other. 2 tracks. The first-time storage shed is located between the first track and the second track as seen from the vertical direction. The transport vehicle includes a main body portion that travels on a track and a transfer portion that transfers articles between the first and second time storage booths. In the first place, the installation position and the height of the storage shed are partially overlapped from the main body of the transportation vehicle that is being transferred between the transportation vehicle in the first rail and the first storage shed. The article that is placed in the storage compartment at the first time is not at a height that interferes with the main body of the transport vehicle that is traveling on the first rail. According to the transport system, the front end type general-purpose container is made by, for example, a transport vehicle such as an OHT (suspended transport system, 〇verhead Hoist Transport) that travels along a track laid on the ceiling. Items such as the Front Opening Unified Pod) are transported on the rails -6-201212149, and a plurality of transport vehicles are arranged, and each transport vehicle transports the articles according to the dispatched order. The track has a first track and a second track that are arranged in parallel with each other. For example, the two tracks are juxtaposed parallel to each other and are set to be relatively narrow intervals. Between the two tracks, there is a first-time storage shed for transporting articles. The first storage compartment is placed on the side of the rail. The transport vehicle uses a transfer mechanism that can be extended laterally, for example, to transfer the articles to the first storage compartment. In particular, the installation position and height of the first-time storage shed are at least partially overlapped with the transport vehicle in which the first rail is transferred from the transport vehicle, and are stored in the storage shed at the first time. It is the height that does not interfere with the carriage that walks on the first track. For example, the first storage compartment is provided at a position that is different from the width of the article on the side of the transportation vehicle, and the height of the first storage compartment is adjusted to be the first rail and the first rail. The transport vehicle that travels on the second track is not involved in the items that are stored in the first-time storage shed. Here, it is assumed that the distance between the two tracks is not to interfere with each other when the storage vehicle and the articles transported to the first storage compartment do not interfere with each other. Is required to be at least farther away than the width of the item. More precisely, the distance between the two tracks is required to be far from the total distance from the track to the end of the transport vehicle, the width of the article, and the limit at the time of transfer. The distance between the rails is such that, even if it is made to have a sufficient distance (that is, a distance that does not interfere between the transporter and the storage article when it is stowed on the first one), it is intended to be large, for example, a transport vehicle. If it is, 201212149 will not be able to have sufficient distance. In other words, since the portion where the transport vehicle is enlarged is closer to the storage compartment side at the first time, there is a possibility that the transport vehicle and the articles transferred to the first-time storage shed may interfere with each other. However, as described above, the installation height of the storage compartment at the first time is the height at which the transported article does not interfere with the transport vehicle. For example, the first-time storage shed is seen from the side, and is disposed on the lower side of the transport vehicle and the articles stacked in the first storage compartment without overlapping each other. Therefore, even if the transportation vehicle and the first storage compartment are overlapped with each other, it is possible to reliably prevent interference between the transportation vehicle and the articles stacked in the first storage compartment. Further, even if the interval between the first rail and the second rail is increased, it is possible to prevent interference between the transporting vehicle and the articles in the first storage compartment, but it takes a very large cost to change the laying position of the rail. The present invention also has an effect of preventing such an increase in cost. As described above, the transportation system according to the aspect of the present invention can prevent interference between the traveling vehicle and the article, and can optimally transfer the articles to the first storage compartment provided between the rails. The installation position of the storage shed at the first time may be a position that is not overlapped with the main body of the transport vehicle that is being transported between the first and second storage sheds in the vertical direction. In the track, the distance between the transport vehicle in the first track and the transport vehicle in the second track perpendicular to the direction in which the track extends is set to be narrower than the width of the article. In this case, the first end of the first transport vehicle that travels on the first track, the end on the storage side, and the end of the second transport vehicle that is traveling on the second track, the first end of the 201212149 The distance in the horizontal direction perpendicular to the extending direction of the track is narrower than the width of the article. Further, "the distance in the horizontal direction perpendicular to the extending direction of the track" herein means the distance when the traveling vehicles traveling on different tracks are closest to each other. In this case, the first time the storage shed is because the height of the truck and the articles to be transported do not interfere with each other, so there is no problem. That is, even if the distance between the tracks is set to be narrow, the height of the storage shed is adjusted since the first time, so that interference can be prevented. Therefore, it can be softened to correspond to the enlargement of the transport vehicle. When the distance A between the first track and the second track is expressed as A = B + C - D + G + F, the first time storage booth may be set to satisfy the relationship of G < D. Further, B is the width of the transport vehicle, and C is the width ‘D of the article is the horizontal distance between the end portion on the storage side of the first one of the transport vehicles on the first rail and the articles stacked on the transport vehicle. Further, F is a distance in the horizontal direction from the end of the first to the storage compartment side of the transport vehicle in the second track until the article stored in the first storage compartment, and G is the slave in the first track. The distance in the horizontal direction from the articles that are stowed in the transport vehicle until they are stowed in the first-time storage shed. In this case, the position of the first-time storage shed is set such that the distance (ie, the distance D) from the end of the first-time storage shed of the transport vehicle is as seen from the article that is carried on the transport vehicle. The distance (ie, distance G) that is transferred to the item at the first storage compartment is large. In other words, the article stored in the storage compartment at the first time is placed at a position inside the transport vehicle more than the end of the transport vehicle. Therefore, the distance between the first track and the second track is narrower than -9-201212149. Even in such a case, the height of the storage shed at the first time is a height that does not interfere with each other in the transportation vehicle and the articles stored in the first storage compartment. Therefore, there is no particular problem. That is, even if the distance between the tracks is set to be narrow, the height of the storage shed at the first time is also adjusted, so that interference can be prevented. Therefore, it is possible to soften the size of the transport truck and the like. The transport system may further include a second-time storage booth provided directly under at least one of the first track and the second track. In this case, the first storage compartment is at the same height as the second storage compartment. In this case, a second-time storage shed located directly below the transport vehicle is provided, and the transport vehicle ′ is the same as the first-time storage shed, and the second-time storage shed is also carried out. In particular, the first-time storage shed is provided at the same height as the second-time storage shed described above. Therefore, it is possible to easily configure each of the registers in comparison with the case where the first-time storage shed and the second-time storage shed are provided at different heights from each other. In addition, the "same height" of the present aspect is not only the case where the height of the storage shed at the first time and the height of the storage shed at the second time are completely the same, but the effects of the above-described aspects can be exerted to each other. The height is close to the meaning. A conveyance system according to another aspect of the present invention includes a rail, a first-time storage booth, and an overhead traveling vehicle. The track has a first track and a second track which are arranged in parallel with each other. The first-time storage shed is located between the first track and the second track from the vertical side -10- 201212149, and is located at the first! Below the track and the second track. The overhead traveling vehicle has a main body portion that travels in a state of being suspended from a rail, and a transfer portion that can transfer articles between the storage compartment and the first storage compartment. In the first position, the storage position of the storage shed is partially overlapped from the main body of the transportation vehicle that is being transferred between the transportation vehicle in the first rail and the first storage shed. It is seen that the direction does not overlap with the main body of the transport vehicle that is carrying out the transfer of the article between the transport vehicle in the second rail and the first storage compartment. The storage shed at the first time is a height that does not interfere with the main body of the transport vehicle that travels on the first rail. The transfer unit 'haves a side moving portion that moves the article sideways, and a lifting portion that is provided in the side moving portion to move the article up and down. The effects of the present invention and other gains can be understood from the form of the invention described below. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1. Overall configuration of the conveyance system First, the overall configuration of the conveyance system of the present embodiment will be described with reference to Fig. 1 . Fig. 1 is a plan view showing the overall configuration of the conveyance system of the embodiment. In the first embodiment, the transport system of the present embodiment includes a rail 100, a transport vehicle 200, and a controller 300. -11 - 201212149 Track 100, which is laid on, for example, a ceiling, is made of metal such as aluminum and stainless steel. The truck 200 is disposed on the track 100 in multiple numbers, and the article, that is, the FOUP, can be carried by walking on the track 100. Here, in order to clarify the direction in which the transport vehicle 200 is traveling, the front portion of the transport vehicle 200 is illustrated with an acute angle. The truck 200 further has an onboard controller 205, respectively. The on-vehicle controller 205 receives a conveyance command from the controller 300 to control the travel of the truck 200. Further, the on-vehicle controller 205 does not only control the traveling of the transport vehicle 200, but also functions to collectively control each of the devices in the transport vehicle 200. The controller 300 includes, for example, a calculation circuit, a syllabus, and the like, and the transport command can be applied to the transport vehicle 200 via the on-board controller 205. However, although the illustration here is omitted, the position along the track 1〇〇 is omitted. In the middle, the temporary storage for the FOUP is temporarily set. The composition of this register is as detailed later. 2. Specific Configuration of Transport Vehicle Next, a more specific configuration of the transport vehicle will be described with reference to Fig. 2 . Here, Fig. 2 is a side view showing the configuration of the transport vehicle. In the second drawing, the "transport vehicle 200 includes a traveling portion 210, a main body portion 220, a moving portion 230, a lifting control portion 235, a lifting belt 240, and a grip portion 2 50 °. The transport vehicle 200 is a traveling portion 2 1 0 by For example, a linear motor or the like applies a propulsive force to cause the traveling roller 215 to be rotated and travel along the rail 1 . Below the row -12-201212149, the main body portion 220 is mounted in a suspended manner. In the body portion 220, a moving portion 230 is attached. The moving portion 230 is movable toward the side of the rail 100 (i.e., in the left-right direction in the drawing). A lowering control unit 253 is attached to the lower surface of the moving portion 203. Below the lift control unit 253, the grip portion 250 that the FOUP grips is attached by the lift belt 240. The grip portion 250 can be raised and lowered with respect to the main body portion 220 by winding up or unwinding the elevating belt 240. 3. Transfer method of FOUP of the transport vehicle Next, the transfer method of the FOUP of the transport vehicle will be described with reference to Figs. 3 and 4 . Here, Fig. 3 and Fig. 4 are perspective views showing the transfer method of the FOUP, respectively. In the third diagram, when the transport vehicle 200 is a FOUP 400 that is transported on the cymbal 510 directly below the track 1〇〇, first, the transport vehicle 200 travels on the track 100 and stops at the FOUP 400 provided on the 埠510. Above. Next, as shown in the figure, the elevating belt 24 is ejected by the elevating control unit 25 5 and the grip portion 250 is lowered until the position of the FOUP 4 00. Further, the fine adjustment of the positions of the grip portion 250 and the FOUP 400 is performed, and the FOUP 400 is held. When the FOUP 400 is gripped, the lift belt 240 is taken up, and the grip portion 250 and the held FOUP 400 are raised up to the position of the main body portion 220. Further, the transport vehicle 200 is again moved on the rail 100, and the FOUP 400 is transported. In Fig. 4, the case where the FOUP 400 is placed in the storage compartment 520 located at a position on the side of -13 - 201212149 located on the track 1A will be described. After the moving portion 203 moves toward the side of the rail 100, the elevating belt 240 is ejected by the elevating control unit 25 5, and the grip portion 250 is lowered until the position of the FOUP 400. By doing so, the traverse of the FOUP 400 can be performed from the rail portion 1A. 4. Configuration of the register of the transport system Next, the configuration of the register of the transport system of the present embodiment will be described in detail with reference to Figs. 5 to 7 . Fig. 5 is a plan view showing the positional relationship between the rail, the transport vehicle, and the temporary storage shed of the transport system of the present embodiment, and Fig. 6 is a view showing the rail, the transport vehicle, and the temporary storage shed of the transport system of the present embodiment. Side view of the positional relationship. Further, Fig. 7 is a side view showing the positional relationship between the rails of the transport system of the comparative example, the transport vehicle, and the temporary storage shed. 4.1. The position of the temporary storage shed of the present embodiment is shown in Fig. 5. The temporary storage shed 520 of the present embodiment is an example of a temporary storage shed, and is provided on the first rail 100a and the second rail 并 arranged in parallel with each other. Between b. In the temporary storage shed 520, the FOUP 400 can be transferred by the transport vehicle 200a that travels on the first rail 100a. Further, the installation position of the storage shed 520 at a time is as shown in the drawing, and the transport vehicle 200a that can transfer the FOUP 400 is at least partially overlapped as seen from the vertical direction. On the other hand, the transport vehicle 200b that travels on the track i〇〇b on the opposite side of the transport vehicle 200a does not overlap (i.e., separate). In Fig. 6, the temporary storage shed 5 20 of the present embodiment is disposed at the same height as the storage shed 530 when it is one -14 - 201212149. Therefore, the FOUP 400 that is transferred to the temporary storage shed 520 is at a height that does not interfere with the transport vehicle 200. Further, the storage shed 520 is a temporary storage shed which is provided on the side of the rail and which needs to be moved by the moving unit 203 during the movement of the article, and is called, for example, STU (Side Truck Buffer). Further, the storage shed 530 is a temporary storage shed which is provided on the lower side of the rail and does not need to be moved by the moving unit 230 when the article is transferred, and is called, for example, UTB (Under Truck Buffer). 4.2. Position and size relationship of the temporary storage shed in the comparative example In Fig. 7, it is assumed that the storage shed 1 520 is temporarily placed at a higher position, and is transferred to the FOUP 1400 of the temporary storage shed 1 520 and transported. The cars 1200a and 120b, as seen from the horizontal direction, are located at positions overlapping each other. Therefore, in order to prevent the FOUP 1 400 and the transport vehicle 1 200a or the transport vehicle 1 200b from interfering, the distance between the first rail 1100a and the second rail 1100b is required to be relatively large. Specifically, the distance A1 between the first track 11a and the second track 1100b of the comparative example can be expressed by the following formula (1). Further, in this case, the width of the transport vehicle 1200a is B, the width of the FOUP 400 is C, and the interval between the end of the transport vehicle 1200a and the FOUP 1400 that is stowed in the transport vehicle 1200a is D, from the end of the transport vehicle 1200a to the end. The distance to be transferred to the FOUP 1400 of the temporary storage shed 1520 is E, and the distance from the end of the transport vehicle 120 0b to the FOUP of the storage shed 1 520 is F. A1=B + C + E + F (1) -15- 201212149 Further, the distances D, E, and F are determined by the configuration of each transport vehicle 200, etc. 4.3. The temporary storage booth in this embodiment The dimensional relationship is returned to Fig. 6. For the above comparative example, the distance A2 between the first track 10a and the second track 10b of the present embodiment can be expressed by the following formula (2). Further, G is the distance from the FOUP 400 stowed in the transport vehicle 200a until it is transferred to the FOUP of the storage shed 520. A2 = B + C-D + G + F · (2) For the equation (2), when the equation (1) is substituted, the following equation (3) holds. A2 = A 1-E-D + G (3) Here, as is clear from the figure, since G<D, the relationship of A2<A1 is established. That is, the transportation system according to the present embodiment can reduce the distance between the first rail 1 〇 a and the second rail 100b by shifting the position of the storage shed 520 downward. Such a distance between the rails does not have a sufficient distance even if the truck 200 is to be enlarged in size at the time of laying. That is, since the enlarged portion of the transport vehicle 200 is closer to the side of the shed 520, it is possible to cause the transport vehicle 200 and the FOUP 400 that is transferred to the temporary storage 520 to interfere with each other. In this embodiment, as described above, the storage compartment 5 20 is provided at a height such that the transferred FOUP 400 does not interfere with the transport vehicle 200. Therefore, even if the distance between the first rail 100a and the second rail 100b is relatively narrow, it is possible to reliably prevent interference between the transport vehicle 200 and the FOUP 400 of the temporary storage 520. Further, by enlarging the distance between the first rail 100a and the second rail 100b, it is possible to prevent interference between the transport vehicle 200 and the FOUP 400 of the storage compartment 520 at one time. However, the change in the laying position of the rail 100 can be very costly. The transport system of this embodiment also has an effect of preventing such an increase in cost. In the present embodiment, the temporary storage shed 520 is further provided at the same height as the temporary storage shed 530. Therefore, it is possible to easily configure each of the registers in comparison with the case where the temporary storage shed 520 and the temporary storage shed 530 are set to have different heights from each other (see Fig. 7). As described above, according to the transport system of the present invention, it is possible to prevent interference between the traveling vehicle 200 and the FOUP 400, and to optimally transfer the FOUP 400 to the temporary storage compartment 52 provided between the rails 1〇〇. The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit and scope of the invention, which can be read from the scope of the patent application and the entire specification. The scope of technology. -17-201212149 [Brief Description of the Drawings] [Fig. 1] is a plan view showing the overall configuration of the conveying system of the embodiment. [Fig. 2] A side view showing the configuration of the transport vehicle. [Fig. 3] A perspective view showing a transfer method of the FOUP (1). [Fig. 4] A perspective view showing a transfer method of the FOUP (2). [Fig. 5] A plan view showing the positional relationship between the rails of the transport system of the embodiment, the transport vehicle, and the storage compartment. [Fig. 6] A side view showing the positional relationship between the rails of the transport system of the embodiment, the transport vehicle, and the temporary storage shed. 1 [Fig. 7] A side view showing the positional relationship between the rails of the transport system of the comparative example, the transport vehicle, and the storage compartment. [Description of main component symbols] 100: Track 100a: First rail 100b: Second rail 200: Transport vehicle 2 0 0a: Transport vehicle 200b: Transport vehicle 205: On-board controller 2 1 〇: Traveling unit 2 1 5: Walking Roller 220: Main body portion-18- 201212149 2 3 0 : Moving portion 23 5 : Lifting control unit 240 : Lifting belt 2 5 0 : Holding unit 300 0 : Controller 400 : Item (F Ο U Ρ ) 5 1 0 :埠520 : —hour storage shed 5 3 0 : — time storage shed 1 1 0 0 a : first track 1 1 00b : second track 1 200a : transporter 1 200b : transporter 1 520 : — storage shed