WO2012014561A1 - Conveying system - Google Patents
Conveying system Download PDFInfo
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- WO2012014561A1 WO2012014561A1 PCT/JP2011/062355 JP2011062355W WO2012014561A1 WO 2012014561 A1 WO2012014561 A1 WO 2012014561A1 JP 2011062355 W JP2011062355 W JP 2011062355W WO 2012014561 A1 WO2012014561 A1 WO 2012014561A1
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- WIPO (PCT)
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- temporary storage
- track
- storage shelf
- transport vehicle
- article
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Abstract
The purpose of this invention is to transfer an article suitably onto a temporary storage rack provided between tracks in a conveying system. The disclosed conveying system includes: tracks (100) having two tracks (100a, 100b) provided in parallel to one another; a temporary storage rack (520) provided between the two tracks; and conveying vehicles (200) that travel along the respective tracks and that can each transfer an article (400) onto the temporary storage rack. The temporary storage rack is provided at a position, as viewed in the vertical direction, where the temporary storage rack at least partially overlaps the conveying vehicle that is about to transfer the article, and at a height where the transferred article does not interfere with the conveying vehicles.
Description
本発明は、例えば半導体装置製造用の各種基板が収容された容器等の物品を、軌道に沿って走行する搬送車によって搬送する搬送システムの技術分野に関する。
The present invention relates to a technical field of a transport system that transports articles such as containers containing various substrates for manufacturing semiconductor devices, for example, by a transport vehicle that travels along a track.
この種の搬送システムとして、例えば天井に敷設された軌道上を複数の搬送車が走行することによって、物品を搬送するものがある。搬送車は、軌道に沿うように設けられた一時保管棚（例えば、バッファ等）との間で、物品の受け渡し（即ち、移載）が可能である。
As this type of transport system, for example, there is a system that transports articles by running a plurality of transport vehicles on a track laid on a ceiling. The transport vehicle can deliver (i.e., transfer) articles to and from a temporary storage shelf (e.g., a buffer) provided along the track.
物品の移載は、軌道の真下に位置するバッファに対してのみならず、軌道から見て横方向に位置するバッファに対しても行うことが可能である。例えば特許文献１では、平行に設けられた２本の軌道の間に一時保管棚を設けるという技術が提案されている。
Articles can be transferred not only to the buffer located directly under the track, but also to the buffer positioned laterally as viewed from the track. For example, Patent Document 1 proposes a technique of providing a temporary storage shelf between two tracks provided in parallel.
上述したような搬送システムでは、半導体ウェハの大径化等に伴い物品が大型化している。このため、物品を搬送する搬送車の大型化も求められている。
In the transfer system as described above, the size of the article is increased with the increase in the diameter of the semiconductor wafer. For this reason, the enlargement of the conveyance vehicle which conveys goods is also calculated | required.
しかしながら、上述した特許文献１に係る技術のような構成では、単に搬送車を大型化すると、搬送車と一時保管棚とが干渉してしまうおそれがある。これに対し、軌道の間隔を広げることで干渉を防止しようとすると、膨大なコストがかかってしまう。即ち、特許文献１に係る技術には、搬送車の大型化に柔軟に対応することができないという技術的問題点がある。
However, in the configuration like the technique according to Patent Document 1 described above, if the transport vehicle is simply enlarged, the transport vehicle and the temporary storage shelf may interfere with each other. On the other hand, if it is attempted to prevent interference by widening the interval between the tracks, a huge cost is required. That is, the technique according to Patent Document 1 has a technical problem that it cannot flexibly cope with the increase in size of the transport vehicle.
本発明は、例えば上述した問題点に鑑みなされたものであり、軌道間に設けられた一時保管棚に対して好適に物品を移載することが可能な搬送システムを提供することを課題とする。
The present invention has been made in view of the above-described problems, for example, and an object of the present invention is to provide a transport system capable of suitably transferring articles to a temporary storage shelf provided between tracks. .
本発明の一見地に係る搬送システムは上記課題を解決するために、軌道と、第１一時保管棚と、搬送車とを備えている。軌道は、互いに並んで設けられた第１軌道及び第２軌道を有する。第１一時保管棚は、鉛直方向で見て第１軌道及び第２軌道の間に設けられているように見える位置に設けられている。搬送車は、軌道を走行する本体部と、第１一時保管棚との間で物品を移載する移載部とを有している。第１一時保管棚は、第１軌道において第１一時保管棚との間で物品の移載作業を行っている搬送車の本体部と鉛直方向で見て一部が重なる位置、且つ第１一時保管棚に積載されている物品が第１軌道を走行する搬送車の本体部に干渉しない高さに設けられている。
In order to solve the above problems, a transport system according to an aspect of the present invention includes a track, a first temporary storage shelf, and a transport vehicle. The track has a first track and a second track provided side by side. The first temporary storage shelf is provided at a position that appears to be provided between the first track and the second track when viewed in the vertical direction. The transport vehicle includes a main body that travels on the track and a transfer unit that transfers articles between the first temporary storage shelf. The first temporary storage shelf is located at a position where a part of the first temporary storage shelf overlaps with the main body of the transporting vehicle performing the transfer operation of the article between the first temporary storage shelf and the first temporary storage shelf. The article loaded on the storage shelf is provided at a height that does not interfere with the main body of the transport vehicle traveling on the first track.
この搬送システムによれば、その動作時には、例えば天井に敷設された軌道に沿って走行するＯＨＴ（Overhead Hoist Transport）等の搬送車によって、ＦＯＵＰ（Front Opening Unified Pod）等の物品が搬送される。軌道上には、複数の搬送車が配置されており、各搬送車は各々に与えられた搬送命令に基づいて物品を搬送する。
According to this transport system, an article such as FOUP (Front Opening Unified Unified Pod) is transported by a transport vehicle such as OHT (Overhead Hoist Transport) traveling along a track laid on the ceiling, for example. A plurality of transport vehicles are arranged on the track, and each transport vehicle transports an article based on a transport command given to each track.
軌道は、互いに並ぶように設けられる第１軌道及び第２軌道を有している。例えば両軌道は、互いに平行に並ぶと共に比較的狭い間隔で設けられる。この両軌道の間には、物品を移載することが可能な第１一時保管棚が設けられている。第１一時保管棚は、軌道の側方に位置するように設けられており、搬送車は、例えば側方に伸長可能な移載機構を用いて、第１一時保管棚に物品を移載する。
The track has a first track and a second track that are arranged side by side. For example, the two tracks are arranged in parallel with each other and at a relatively narrow interval. A first temporary storage shelf capable of transferring articles is provided between the two tracks. The 1st temporary storage shelf is provided so that it may be located in the side of a track, and a conveyance vehicle transfers goods to the 1st temporary storage shelf using the transfer mechanism which can be extended to the side, for example. .
特に、上述した第１一時保管棚は、第１軌道において物品を移載している搬送車と鉛直方向で見て少なくとも部分的に重なる位置、且つ第１一時保管棚に積載されている物品が、第１軌道を走行する搬送車に干渉しない高さに設けられている。例えば、第１一時保管棚は、搬送車の側方側に物品の幅より小さい幅だけずれた位置に設けられており、更には第１の軌道及び第２の軌道を走行する搬送車が第１一時保管棚に積載されている物品に干渉しないように、第１一時保管棚側の高さが調整されている。
In particular, the above-mentioned first temporary storage shelf is located at a position that overlaps at least partially when viewed in the vertical direction with the transporting vehicle transferring the article on the first track, and the article loaded on the first temporary storage shelf. The height is set so as not to interfere with the transport vehicle traveling on the first track. For example, the first temporary storage shelf is provided at a position shifted by a width smaller than the width of the article on the side of the transport vehicle, and further, the transport vehicle traveling on the first track and the second track is the first. The height on the first temporary storage shelf side is adjusted so as not to interfere with the articles loaded on the one temporary storage shelf.
ここで仮に、第１一時保管棚が搬送車の走行する高さと同じような高さに設けられているとすると、搬送車と第１一時保管棚に移載された物品に干渉しないためには、２本の軌道が、少なくとも物品の幅より離れて設けられることが求められる。より正確に言えば、２本の軌道間は、軌道から搬送車の端部までの距離、物品の幅及び移載時のマージン等を合計した距離だけ離れていることが求められる。
Assuming that the first temporary storage shelf is provided at a height similar to the traveling height of the transport vehicle, in order not to interfere with the goods transferred to the transport vehicle and the first temporary storage shelf. It is required that the two tracks are provided at least apart from the width of the article. More precisely, the two tracks are required to be separated by a total distance including the distance from the track to the end of the transport vehicle, the width of the article, the margin at the time of transfer, and the like.
このような軌道間の距離は、敷設した当初では十分な距離（即ち、搬送車と第１一時保管棚に積載された物品とが互いに干渉しないような距離）とされていたとしても、例えば搬送車を大型化しようとすると十分な距離とは言えなくなってしまう。即ち、搬送車が大型化した分だけ第１一時保管棚側に近づくため、搬送車と第１一時保管棚に移載された物品とが互いに干渉するおそれが出てくる。
Even if such a distance between the tracks is a sufficient distance at the beginning of laying (that is, a distance in which the transport vehicle and the article loaded on the first temporary storage shelf do not interfere with each other), for example, the transport If you try to enlarge the car, it will not be enough distance. That is, since the transport vehicle approaches the first temporary storage shelf side as the size of the transport vehicle increases, the transport vehicle and the article transferred to the first temporary storage shelf may interfere with each other.
しかるに、上述したように、第１一時保管棚は、移載された物品が搬送車に干渉しない高さに設けられている。例えば、第１一時保管棚は、側方から見て、搬送車と第１一時保管棚に積載されている物品とが互いに重ならないまでに下方側に設けられている。このため、搬送車と第１一時保管棚とが互いに重なるような位置に設けられていたとしても、搬送車と第１一時保管棚に積載されている物品との干渉を確実に防止できる。
However, as described above, the first temporary storage shelf is provided at a height at which the transferred article does not interfere with the transport vehicle. For example, when viewed from the side, the first temporary storage shelf is provided on the lower side until the transport vehicle and the article loaded on the first temporary storage shelf do not overlap each other. For this reason, even if it is provided in a position where the transport vehicle and the first temporary storage shelf overlap each other, interference between the transport vehicle and the article loaded on the first temporary storage shelf can be reliably prevented.
なお、第１軌道と第２軌道の間隔を広げることによっても、搬送車と第１一時保管棚の物品との干渉を防止できると考えられるが、軌道の敷設位置の変更には極めて大きなコストがかかってしまう。本発明は、このようなコストの増大を防止するという効果も有している。
In addition, it is thought that interference with the goods of a conveyance vehicle and a 1st temporary storage shelf can also be prevented by expanding the space | interval of a 1st track | truck and a 2nd track | truck, However, A very big cost is required for the change of the track laying position. It will take. The present invention also has an effect of preventing such an increase in cost.
以上説明したように、本発明の一見地に係る搬送システムによれば、走行する搬送車と物品との干渉を防止しつつ、軌道間に設けられた第１一時保管棚に対して好適に物品を移載することが可能である。
As described above, according to the conveyance system according to an aspect of the present invention, the article is preferably used with respect to the first temporary storage shelf provided between the tracks while preventing interference between the traveling carriage and the article. Can be transferred.
第１一時保管棚は、第２軌道において第１一時保管棚との間で物品の移載作業を行っている搬送車の本体部と鉛直方向で見て重ならない位置に設けられていてもよい。
The 1st temporary storage shelf may be provided in the position which does not overlap with the main-body part of the conveyance vehicle which is performing the transfer operation | work of an article between the 1st temporary storage shelves in a 2nd track | truck, and perpendicularly. .
軌道は、第１軌道にある搬送車と、第２軌道にある搬送車との間の、軌道の延在方向に直交する水平方向の距離が、物品の幅より狭くなるように設けられていてもよい。
The track is provided such that a horizontal distance perpendicular to the extending direction of the track between the transport vehicle on the first track and the transport vehicle on the second track is narrower than the width of the article. Also good.
この場合、第１軌道を走行する第１搬送車の第１一時保管棚側の端部と、第２軌道を走行する第２搬送車の第１一時保管棚側の端部との、軌道の延在方向に直交する水平方向の距離が、物品の幅より狭くされる。なお、ここでの「軌道の延在方向に直交する水平方向の距離」とは、異なる軌道を走行する搬送車同士が、互いに最も近づく際の距離を意味している。
In this case, the track of the first temporary storage shelf side end portion of the first transport vehicle traveling on the first track and the first temporary storage shelf side end portion of the second transport vehicle traveling on the second track. The distance in the horizontal direction perpendicular to the extending direction is narrower than the width of the article. Here, “the distance in the horizontal direction perpendicular to the extending direction of the track” means the distance at which the transport vehicles traveling on different tracks approach each other closest to each other.
このような場合であっても、第１一時保管棚は、搬送車と移載された物品とが互いに干渉しないような高さに設けられているため、何ら問題は生じない。即ち、軌道間の距離が狭く設定されている場合であっても、第１一時保管棚の高さが調整されているため、干渉を防止できる。従って、搬送車の大型化等に柔軟に対応することが可能である。
Even in such a case, the first temporary storage shelf is provided at such a height that the transport vehicle and the transferred article do not interfere with each other. That is, even when the distance between the tracks is set narrow, interference can be prevented because the height of the first temporary storage shelf is adjusted. Accordingly, it is possible to flexibly cope with an increase in the size of the transport vehicle.
第１軌道及び第２軌道間の距離Ａが、Ａ＝Ｂ＋Ｃ－Ｄ＋Ｇ＋Ｆと表せる場合に、第１一時保管棚は、Ｇ＜Ｄの関係を満たすように設けられてもよい。なお、Ｂは搬送車の幅であり、Ｃは物品の幅であり、Ｄは第１軌道にある搬送車の第１一時保管棚側の端部と搬送車に積載された物品との水平方向距離である。さらに、Ｆは第２軌道にある搬送車の第１一時保管棚側の端部から第１一時保管棚に積載されている物品までの水平方向距離であり、Ｇは第１軌道にある搬送車に積載された物品から第１一時保管棚に積載されている物品までの水平方向距離である。
When the distance A between the first track and the second track can be expressed as A = B + C−D + G + F, the first temporary storage shelf may be provided so as to satisfy the relationship of G <D. B is the width of the transport vehicle, C is the width of the article, D is the horizontal direction between the end of the first temporary storage shelf side of the transport vehicle on the first track and the article loaded on the transport vehicle. Distance. Further, F is the horizontal distance from the end of the transport vehicle on the second track on the first temporary storage shelf side to the article loaded on the first temporary storage shelf, and G is the transport vehicle on the first track. Is the horizontal distance from the article loaded on the item to the article loaded on the first temporary storage shelf.
この場合は、搬送車に積載された物品から見て、搬送車の第１一時保管棚側の端部までの距離（即ち、距離Ｄ）が、第１一時保管棚に移載された物品までの距離（即ち、距離Ｇ）より大きくなるように、第１一時保管棚の位置が設定されている。即ち、第１一時保管棚に積載されている物品が、搬送車の端部よりも搬送車内側に位置するような位置とされている。よって、第１軌道と第２軌道の間の距離は比較的狭いものとなる。
In this case, when viewed from the article loaded on the transport vehicle, the distance to the end of the transport vehicle on the first temporary storage shelf side (that is, the distance D) is equal to the product transferred to the first temporary storage shelf. The position of the first temporary storage shelf is set to be greater than the distance (that is, the distance G). That is, the article loaded on the first temporary storage shelf is positioned so as to be located inside the transport vehicle from the end of the transport vehicle. Therefore, the distance between the first track and the second track is relatively narrow.
このような場合であっても、第１一時保管棚は、搬送車と第１一時保管棚に積載された物品とが互いに干渉しないような高さに設けられているので、特に問題は生じない。即ち、軌道間の距離が狭く設定されている場合であっても、第１一時保管棚の高さが調整されているので、干渉を防止できる。従って、搬送車の大型化等に柔軟に対応できる。
Even in such a case, the first temporary storage shelf is provided at such a height that the transport vehicle and the articles loaded on the first temporary storage shelf do not interfere with each other, so that no particular problem occurs. . That is, even when the distance between the tracks is set narrow, the height of the first temporary storage shelf is adjusted, so that interference can be prevented. Accordingly, it is possible to flexibly cope with an increase in the size of the transport vehicle.
搬送システムは、第１軌道及び第２軌道の少なくとも一方の真下に設けられた第２一時保管棚を更に備えていてもよい。その場合、第１一時保管棚は、第２一時保管棚と同じ高さに設けられている。
The transport system may further include a second temporary storage shelf provided immediately below at least one of the first track and the second track. In that case, the first temporary storage shelf is provided at the same height as the second temporary storage shelf.
この場合、搬送車の真下に位置する第２一時保管棚が設けられており、搬送車は、第１一時保管棚と同様に、第２一時保管棚に対しても物品の移載を行う。
In this case, a second temporary storage shelf located immediately below the transport vehicle is provided, and the transport vehicle transfers articles to the second temporary storage shelf in the same manner as the first temporary storage shelf.
そして特に、第１一時保管棚は、上述した第２一時保管棚と同じ高さに設けられている。従って、第１一時保管棚及び第２一時保管棚を互いに異なる高さに設ける場合と比べて、各バッファの構成を簡単にできる。
In particular, the first temporary storage shelf is provided at the same height as the second temporary storage shelf described above. Therefore, the configuration of each buffer can be simplified compared to the case where the first temporary storage shelf and the second temporary storage shelf are provided at different heights.
なお、本態様の「同じ高さ」とは、第１一時保管棚の高さと第２一時保管棚の高さとが完全に同一になる場合のみを指すものではなく、上述した本態様の効果が発揮できるまでに、互いの高さが近いことを意味している。
The “same height” in this aspect does not indicate only the case where the height of the first temporary storage shelf and the height of the second temporary storage shelf are completely the same. It means that they are close to each other before they can be used.
本発明の他の見地に係る搬送システムは、軌道と、第１一時保管棚と、天井搬送車とを備えている。軌道は、互いに並んで設けられた第１軌道及び第２軌道を有する。第１一時保管棚は、鉛直方向で見て第１軌道及び第２軌道の間にあるように見える位置で、かつ、第１軌道及び第２軌道の下方に設けられている。天井搬送車は、軌道から吊り下げられた状態で走行する本体部と、第１一時保管棚との間で物品を移載可能な移載部とを有している。第１一時保管棚は、第１軌道において第１一時保管棚との間で物品の移載作業を行っている搬送車の本体部と鉛直方向で見て一部が重なり、第２軌道において第１一時保管棚との間で物品の移載作業を行っている搬送車の本体部と鉛直方向で見て重ならない位置に配置されている。第１一時保管棚は、第１一時保管棚に積載されている物品が第１軌道を走行する搬送車の本体部に干渉しない高さに設けられている。
A transport system according to another aspect of the present invention includes a track, a first temporary storage shelf, and a ceiling transport vehicle. The track has a first track and a second track provided side by side. The first temporary storage shelf is provided at a position that appears to be between the first track and the second track when viewed in the vertical direction, and below the first track and the second track. The overhead conveyance vehicle has a main body portion that travels while being suspended from the track, and a transfer portion that can transfer articles between the first temporary storage shelf. The first temporary storage shelf partially overlaps with the main body of the transport vehicle that is performing the transfer operation of the article with the first temporary storage shelf in the first track, and the first temporary storage shelf is in the second track. It is arrange | positioned in the position which does not overlap with the main-body part of the conveyance vehicle which is performing the transfer operation | work of articles | goods between 1 temporary storage shelves. The first temporary storage shelf is provided at a height at which the articles loaded on the first temporary storage shelf do not interfere with the main body of the transport vehicle traveling on the first track.
移載部は、物品を側方に移動させる側方移動部と、側方移動部に設けられ物品を昇降させる昇降部とを有していてもよい。
The transfer unit may include a side moving unit that moves the article to the side and a lifting unit that is provided in the side moving unit and moves the article up and down.
本発明の作用及び他の利得は次に説明する発明を実施するための形態から明らかにされる。
The operation and other advantages of the present invention will be clarified from embodiments for carrying out the invention described below.
以下では、本発明の実施形態について図を参照しつつ説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
１．搬送システムの全体構成
先ず、本実施形態に係る搬送システムの全体構成について、図１を参照して説明する。ここに図１は、本実施形態に係る搬送システムの全体構成を示す平面図である。 1. First, the overall configuration of the transport system according to the present embodiment will be described with reference to FIG. FIG. 1 is a plan view showing the overall configuration of the transport system according to this embodiment.
先ず、本実施形態に係る搬送システムの全体構成について、図１を参照して説明する。ここに図１は、本実施形態に係る搬送システムの全体構成を示す平面図である。 1. First, the overall configuration of the transport system according to the present embodiment will be described with reference to FIG. FIG. 1 is a plan view showing the overall configuration of the transport system according to this embodiment.
図１において、本実施形態に係る搬送システムは、軌道１００と、搬送車２００と、コントローラ３００とを備えて構成されている。
1, the transport system according to the present embodiment includes a track 100, a transport vehicle 200, and a controller 300.
軌道１００は、例えば天井に敷設されており、アルミニウムやステンレス等の金属から構成される。
The track 100 is laid on the ceiling, for example, and is made of a metal such as aluminum or stainless steel.
搬送車２００は、軌道１００上に複数配置されており、軌道１００上を走行することによって物品であるＦＯＵＰを搬送することが可能である。尚、ここでは搬送車２００の進行方向を明確にするため、搬送車２００の前方部分を鋭角なものとして概念的に図示している。
A plurality of transport vehicles 200 are arranged on the track 100, and the FOUP that is an article can be transported by traveling on the track 100. Here, in order to clarify the traveling direction of the transport vehicle 200, the front portion of the transport vehicle 200 is conceptually illustrated as an acute angle.
搬送車２００は更に、車上コントローラ２０５を夫々有している。車上コントローラ２０５は、コントローラ３００から搬送指令を受け取り、搬送車２００の走行を制御する。尚、車上コントローラ２０５は、搬送車２００の走行を制御するだけでなく、搬送車２００に備えられた各機器を総括的に制御するという機能も有している。
The transport vehicle 200 further includes an on-board controller 205. The on-vehicle controller 205 receives a conveyance command from the controller 300 and controls the traveling of the conveyance vehicle 200. The on-board controller 205 not only controls the travel of the transport vehicle 200 but also has a function of comprehensively controlling each device provided in the transport vehicle 200.
コントローラ３００は、例えば演算回路やメモリ等を含んで構成されており、車上コントローラ２０５を介して、搬送車２００に搬送指令を与えることが可能に構成されている。
The controller 300 includes, for example, an arithmetic circuit, a memory, and the like, and is configured to be able to give a transport command to the transport vehicle 200 via the on-vehicle controller 205.
尚、ここでの図示は省略しているが、軌道１００に沿った位置には、ＦＯＵＰを一時的に保管するバッファが複数設けられている。このバッファの構成については、後に詳述する。
Although illustration is omitted here, a plurality of buffers for temporarily storing the FOUP are provided at positions along the track 100. The configuration of this buffer will be described in detail later.
２．搬送車の具体的な構成
次に、搬送車のより具体的な構成について、図２を参照して説明する。ここに図２は、搬送車の構成を示す側面図である 2. Next, a more specific configuration of the transport vehicle will be described with reference to FIG. FIG. 2 is a side view showing the configuration of the transport vehicle.
次に、搬送車のより具体的な構成について、図２を参照して説明する。ここに図２は、搬送車の構成を示す側面図である 2. Next, a more specific configuration of the transport vehicle will be described with reference to FIG. FIG. 2 is a side view showing the configuration of the transport vehicle.
図２において、搬送車２００は、走行部２１０、本体部２２０、移動部２３０、昇降制御部２３５、昇降ベルト２４０及び把持部２５０を備えて構成されている。
In FIG. 2, the transport vehicle 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, a lifting control unit 235, a lifting belt 240, and a gripping unit 250.
搬送車２００は、走行部２１０が例えばリニアモータ等によって推進力を与えることで、走行ローラ２１５が転動されつつ、軌道１００に沿って走行する。走行部２１０の下面には、本体部２２０が吊り下がる形で取り付けられている。
The transport vehicle 200 travels along the track 100 while the traveling roller 215 rolls as the traveling unit 210 applies a propulsive force by, for example, a linear motor. A main body 220 is attached to the lower surface of the traveling unit 210 so as to hang.
本体部２２０には、移動部２３０が取り付けられている。移動部２３０は、軌道１００の側方（即ち、図における左右方向）に移動することが可能である。移動部２３０の下面には、昇降制御部２３５が取り付けられている。
The moving part 230 is attached to the main body part 220. The moving unit 230 can move to the side of the track 100 (that is, the horizontal direction in the drawing). A lifting control unit 235 is attached to the lower surface of the moving unit 230.
昇降制御部２３５の下面には、ＦＯＵＰを把持する把持部２５０が昇降ベルト２４０によって取り付けられている。把持部２５０は、昇降ベルト２４０を巻き出す或いは巻き取ることで、本体部２２０に対し昇降可能である。
On the lower surface of the elevating control unit 235, a holding unit 250 that holds the FOUP is attached by an elevating belt 240. The gripping part 250 can be raised and lowered with respect to the main body part 220 by unwinding or winding up the lifting belt 240.
３．搬送車によるＦＯＵＰの移載方法
次に、搬送車によるＦＯＵＰの移載方法について、図３及び図４を参照して説明する。ここに図３及び図４は夫々、ＦＯＵＰの移載方法を示す斜視図である。 3. Next, a FOUP transfer method using a transport vehicle will be described with reference to FIGS. 3 and 4. FIG. Here, FIGS. 3 and 4 are perspective views showing a FOUP transfer method.
次に、搬送車によるＦＯＵＰの移載方法について、図３及び図４を参照して説明する。ここに図３及び図４は夫々、ＦＯＵＰの移載方法を示す斜視図である。 3. Next, a FOUP transfer method using a transport vehicle will be described with reference to FIGS. 3 and 4. FIG. Here, FIGS. 3 and 4 are perspective views showing a FOUP transfer method.
図３において、搬送車２００が軌道１００の真下に位置するポート５１０上のＦＯＵＰ４００を移載する際には、先ず搬送車２００が軌道１００上を走行して、ポート５１０上に設置されたＦＯＵＰ４００の上方に停止する。
In FIG. 3, when the transport vehicle 200 transfers the FOUP 400 on the port 510 located directly below the track 100, first, the transport vehicle 200 travels on the track 100 and the FOUP 400 installed on the port 510 is moved. Stop upward.
続いて、図に示すように、昇降制御部２３５によって昇降ベルト２４０が巻き出されることで把持部２５０がＦＯＵＰ４００の位置まで降下する。そして、把持部２５０とＦＯＵＰ４００との位置の微調整が行われ、ＦＯＵＰ４００が把持される。
Subsequently, as shown in the figure, the lifting / lowering belt 240 is unwound by the lifting / lowering control unit 235 so that the gripping unit 250 is lowered to the position of the FOUP 400. And the fine adjustment of the position of the holding part 250 and the FOUP 400 is performed, and the FOUP 400 is held.
ＦＯＵＰ４００が把持されると、昇降ベルト２４０が巻き取られ、把持部２５０及び把持されたＦＯＵＰ４００が本体部２２０の位置まで上昇する。そして、再び搬送車２００が軌道１００上を走行して、ＦＯＵＰ４００が搬送される。
When the FOUP 400 is gripped, the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are moved up to the position of the main body portion 220. Then, the transport vehicle 200 travels again on the track 100, and the FOUP 400 is transported.
図４において、ＦＯＵＰ４００が軌道１００の側方にそれた位置にある一時保管棚５２０に設置されている場合を説明する。移動部２３０が軌道１００の側方に移動した後に、昇降制御部２３５によって昇降ベルト２４０が巻き出され、把持部２５０がＦＯＵＰ４００の位置まで降下する。このように動作することで、軌道部１００からＦＯＵＰ４００の横移載を行うことが可能となる。
Referring to FIG. 4, the case where the FOUP 400 is installed on the temporary storage shelf 520 at a position deviated to the side of the track 100 will be described. After the moving unit 230 moves to the side of the track 100, the elevating belt 240 is unwound by the elevating control unit 235, and the gripping unit 250 is lowered to the position of the FOUP 400. By operating in this way, the FOUP 400 can be laterally transferred from the track unit 100.
４．搬送システムのバッファの構成
次に、本実施形態に係る搬送システムのバッファの構成について、図５から図７を参照して詳細に説明する。ここに図５は、本実施形態に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す上面図であり、図６は、本実施形態に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す側面図である。また図７は、比較例に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す側面図である。 4). Next, the configuration of the buffer of the transport system according to the present embodiment will be described in detail with reference to FIGS. FIG. 5 is a top view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to this embodiment, and FIG. 6 is the track, the transport vehicle, and the temporary track of the transport system according to the present embodiment. It is a side view which shows the positional relationship of a storage shelf. FIG. 7 is a side view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to the comparative example.
次に、本実施形態に係る搬送システムのバッファの構成について、図５から図７を参照して詳細に説明する。ここに図５は、本実施形態に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す上面図であり、図６は、本実施形態に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す側面図である。また図７は、比較例に係る搬送システムの軌道、搬送車及び一時保管棚の位置関係を示す側面図である。 4). Next, the configuration of the buffer of the transport system according to the present embodiment will be described in detail with reference to FIGS. FIG. 5 is a top view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to this embodiment, and FIG. 6 is the track, the transport vehicle, and the temporary track of the transport system according to the present embodiment. It is a side view which shows the positional relationship of a storage shelf. FIG. 7 is a side view showing the positional relationship between the track, the transport vehicle, and the temporary storage shelf of the transport system according to the comparative example.
４．１．本実施形態の一時保管棚の位置
図５において、本実施形態に係る一時保管棚５２０は、一時保管棚の一例であり、互いに並んで設けられた第１軌道１００ａ及び第２軌道１００ｂ間に設けられている。一時保管棚５２０には、第１軌道１００ａを走行する搬送車２００ａによって、ＦＯＵＰ４００が移載可能とされている。尚、一時保管棚５２０は、図を見ても分かるように、ＦＯＵＰ４００を移載可能である搬送車２００ａに対して、鉛直方向で見て、少なくとも部分的に重なるように設けられている。一方で、搬送車２００ａとは反対側の軌道１００ｂを走行する搬送車２００ｂに対しては、重ならないように（即ち、離間するように）設けられている。 4.1. Position of Temporary Storage Shelf According to this Embodiment In FIG. 5, atemporary storage shelf 520 according to this embodiment is an example of a temporary storage shelf, and is provided between the first track 100a and the second track 100b that are provided side by side. It has been. The FOUP 400 can be transferred to the temporary storage shelf 520 by a transport vehicle 200a traveling on the first track 100a. As can be seen from the drawing, the temporary storage shelf 520 is provided so as to at least partially overlap the carrier vehicle 200a to which the FOUP 400 can be transferred as viewed in the vertical direction. On the other hand, the conveyance vehicle 200b traveling on the track 100b opposite to the conveyance vehicle 200a is provided so as not to overlap (that is, to be separated).
図５において、本実施形態に係る一時保管棚５２０は、一時保管棚の一例であり、互いに並んで設けられた第１軌道１００ａ及び第２軌道１００ｂ間に設けられている。一時保管棚５２０には、第１軌道１００ａを走行する搬送車２００ａによって、ＦＯＵＰ４００が移載可能とされている。尚、一時保管棚５２０は、図を見ても分かるように、ＦＯＵＰ４００を移載可能である搬送車２００ａに対して、鉛直方向で見て、少なくとも部分的に重なるように設けられている。一方で、搬送車２００ａとは反対側の軌道１００ｂを走行する搬送車２００ｂに対しては、重ならないように（即ち、離間するように）設けられている。 4.1. Position of Temporary Storage Shelf According to this Embodiment In FIG. 5, a
図６において、本実施形態に係る一時保管棚５２０は、一時保管棚５３０と同じ高さに設けられている。このため、一時保管棚５２０に移載されたＦＯＵＰ４００は、搬送車２００とは干渉しない高さとなる。
なお、一時保管棚５２０は、軌道側方に設けられ、物品の移載に移動部２３０による移動が必要な一時保管棚であり、例えば、ＳＴＵ（Ｓｉｄｅ Ｔｒｕｃｋ Ｂｕｆｆｅｒ）と称する。また、一時保管棚５３０は、軌道下側に設けられ、物品の移載に移動部２３０による移動が不要な一時保管棚であり、例えば、ＵＴＢ（Ｕｎｄｅｒ Ｔｒｕｃｋ Ｂｕｆｆｅｒ）と称する。 In FIG. 6, thetemporary storage shelf 520 according to the present embodiment is provided at the same height as the temporary storage shelf 530. For this reason, the FOUP 400 transferred to the temporary storage shelf 520 has a height that does not interfere with the transport vehicle 200.
Thetemporary storage shelf 520 is a temporary storage shelf that is provided on the side of the track and needs to be moved by the moving unit 230 for transferring articles, and is referred to as, for example, an STU (Side Truck Buffer). The temporary storage shelf 530 is a temporary storage shelf that is provided on the lower side of the track and does not need to be moved by the moving unit 230 for transferring articles, and is referred to as, for example, UTB (Under Truck Buffer).
なお、一時保管棚５２０は、軌道側方に設けられ、物品の移載に移動部２３０による移動が必要な一時保管棚であり、例えば、ＳＴＵ（Ｓｉｄｅ Ｔｒｕｃｋ Ｂｕｆｆｅｒ）と称する。また、一時保管棚５３０は、軌道下側に設けられ、物品の移載に移動部２３０による移動が不要な一時保管棚であり、例えば、ＵＴＢ（Ｕｎｄｅｒ Ｔｒｕｃｋ Ｂｕｆｆｅｒ）と称する。 In FIG. 6, the
The
４．２．比較例における一時保管棚の位置及び寸法関係
図７において、仮に一時保管棚１５２０が、より高い位置に設けられていたとすると、一時保管棚１５２０に移載されたＦＯＵＰ１４００及び搬送車１２００ａ及び１２００ｂは、水平方向で見て、互いに重なる位置に存在することになる。よって、ＦＯＵＰ１４００と搬送車１２００ａ又は搬送車１２００ｂとが干渉しないようにするためには、第１軌道１１００ａ及び第２軌道１１００ｂ間の距離が比較的大きいことが求められる。 4.2. Position and Dimensional Relationship of Temporary Storage Shelf in Comparative Example In FIG. 7, if thetemporary storage shelf 1520 is provided at a higher position, the FOUP 1400 and the transport vehicles 1200a and 1200b transferred to the temporary storage shelf 1520 are When viewed in the horizontal direction, they exist at positions overlapping each other. Therefore, in order to prevent interference between the FOUP 1400 and the transport vehicle 1200a or the transport vehicle 1200b, the distance between the first track 1100a and the second track 1100b is required to be relatively large.
図７において、仮に一時保管棚１５２０が、より高い位置に設けられていたとすると、一時保管棚１５２０に移載されたＦＯＵＰ１４００及び搬送車１２００ａ及び１２００ｂは、水平方向で見て、互いに重なる位置に存在することになる。よって、ＦＯＵＰ１４００と搬送車１２００ａ又は搬送車１２００ｂとが干渉しないようにするためには、第１軌道１１００ａ及び第２軌道１１００ｂ間の距離が比較的大きいことが求められる。 4.2. Position and Dimensional Relationship of Temporary Storage Shelf in Comparative Example In FIG. 7, if the
具体的には、比較例に係る第１軌道１１００ａ及び第２軌道１１００ｂ間の距離Ａ１は、以下の数式（１）で表すことができる。なお、この場合、搬送車１２００ａの幅をＢ、ＦＯＵＰ４００の幅をＣ、搬送車１２００ａの端部と搬送車１２００ａに積載されたＦＯＵＰ１４００との間隔をＤ、搬送車１２００ａの端部から一時保管棚１５２０に移載されたＦＯＵＰ１４００までの距離をＥ、搬送車１２００ｂの端部から一時保管棚１５２０に移載されたＦＯＵＰまでの距離をＦとしている。
Specifically, the distance A1 between the first track 1100a and the second track 1100b according to the comparative example can be expressed by the following formula (1). In this case, the width of the transport vehicle 1200a is B, the width of the FOUP 400 is C, the distance between the end of the transport vehicle 1200a and the FOUP 1400 loaded on the transport vehicle 1200a is D, and the temporary storage shelf is extended from the end of the transport vehicle 1200a. E is the distance to the FOUP 1400 transferred to 1520, and F is the distance from the end of the transport vehicle 1200b to the FOUP transferred to the temporary storage shelf 1520.
Ａ１＝Ｂ＋Ｃ＋Ｅ＋Ｆ ・・・（１）
A1 = B + C + E + F (1)
尚、距離Ｄ、Ｅ及びＦは、夫々搬送車２００の構成等によって決定される。
Note that the distances D, E, and F are determined by the configuration of the transport vehicle 200 and the like.
４．３．本実施例における一時保管棚の寸法関係
図６に戻り、上述した比較例に対して、本実施形態に係る第１軌道１００ａ及び第２軌道１００ｂ間の距離Ａ２は、以下の数式（２）で表される。なお、Ｇは、搬送車２００ａに積載されたＦＯＵＰ４００から一時保管棚５２０に移載されたＦＯＵＰまでの距離である。 4.3. Dimensional Relationship of Temporary Storage Shelf in the Present Example Returning to FIG. 6, the distance A2 between thefirst track 100a and the second track 100b according to the present embodiment is expressed by the following formula (2) with respect to the comparative example described above. expressed. Note that G is the distance from the FOUP 400 loaded on the transport vehicle 200a to the FOUP transferred to the temporary storage shelf 520.
図６に戻り、上述した比較例に対して、本実施形態に係る第１軌道１００ａ及び第２軌道１００ｂ間の距離Ａ２は、以下の数式（２）で表される。なお、Ｇは、搬送車２００ａに積載されたＦＯＵＰ４００から一時保管棚５２０に移載されたＦＯＵＰまでの距離である。 4.3. Dimensional Relationship of Temporary Storage Shelf in the Present Example Returning to FIG. 6, the distance A2 between the
Ａ２＝Ｂ＋Ｃ－Ｄ＋Ｇ＋Ｆ ・・・（２）
A2 = B + C-D + G + F (2)
数式（２）に、数式（１）を代入すると、以下の数式（３）が成り立つ。
When the formula (1) is substituted into the formula (2), the following formula (3) is established.
Ａ２＝Ａ１－Ｅ－Ｄ＋Ｇ ・・・（３）
A2 = A1-ED-G (3)
ここで、図からも分かるように、Ｇ＜Ｄなので、Ａ２＜Ａ１の関係が成り立つ。即ち、本実施形態に係る搬送システムによれば、一時保管棚５２０の位置を下側にずらすことによって、第１軌道１００ａ及び第２軌道１００ｂ間の距離を小さくできる。
Here, as can be seen from the figure, since G <D, the relationship of A2 <A1 is established. That is, according to the transport system according to the present embodiment, the distance between the first track 100a and the second track 100b can be reduced by shifting the position of the temporary storage shelf 520 downward.
このような軌道間の距離は、敷設した当初では十分な距離とされていたとしても、例えば搬送車２００を大型化しようとすると十分な距離とは言えなくなってしまう。即ち、搬送車２００が大型化した分だけ一時保管棚５２０側に近づくため、搬送車２００と一時保管棚５２０に移載されたＦＯＵＰ４００とが干渉するおそれが出てくる。
Even if such a distance between the tracks is a sufficient distance at the beginning of laying, for example, if the size of the transport vehicle 200 is increased, it cannot be said to be a sufficient distance. That is, the transport vehicle 200 approaches the temporary storage shelf 520 as much as the size of the transport vehicle 200 increases, so that the transport vehicle 200 and the FOUP 400 transferred to the temporary storage shelf 520 may interfere with each other.
これに対し本実施形態では、上述したように、一時保管棚５２０は、移載されたＦＯＵＰ４００が搬送車２００と干渉しないような高さに設けられている。このため、第１軌道１００ａ及び第２軌道１００ｂ間の距離が比較的狭い場合であっても、搬送車２００と一時保管棚５２０のＦＯＵＰ４００との干渉を確実に防止できる。
On the other hand, in the present embodiment, as described above, the temporary storage shelf 520 is provided at such a height that the transferred FOUP 400 does not interfere with the transport vehicle 200. For this reason, even when the distance between the first track 100a and the second track 100b is relatively narrow, interference between the transport vehicle 200 and the FOUP 400 of the temporary storage shelf 520 can be reliably prevented.
なお、第１軌道１００ａ及び第２軌道１００ｂ間の距離を広げることによっても、搬送車２００と一時保管棚５２０のＦＯＵＰ４００との干渉を防止できると考えられるかもしれない。しかし、軌道１００の敷設位置の変更には極めて大きなコストがかかってしまう。本実施形態に係る搬送システムは、このようなコストの増大を防止するという効果も有している。
It may be considered that interference between the transport vehicle 200 and the FOUP 400 of the temporary storage shelf 520 can also be prevented by increasing the distance between the first track 100a and the second track 100b. However, changing the laying position of the track 100 is extremely expensive. The transport system according to the present embodiment also has an effect of preventing such an increase in cost.
本実施形態では更に、一時保管棚５２０は、一時保管棚５３０と同じ高さに設けられている。このため、一時保管棚５２０及び一時保管棚５３０を互いに異なる高さに設ける場合（図７参照）と比べて、各バッファの構成を簡単にできる。
In this embodiment, the temporary storage shelf 520 is further provided at the same height as the temporary storage shelf 530. Therefore, the configuration of each buffer can be simplified as compared with the case where the temporary storage shelf 520 and the temporary storage shelf 530 are provided at different heights (see FIG. 7).
以上説明したように、本発明の搬送システムによれば、走行する搬送車２００とＦＯＵＰ４００との干渉を防止しつつ、軌道１００間に設けられた一時保管棚５２０に対して好適にＦＯＵＰ４００を移載することが可能である。
As described above, according to the transport system of the present invention, the FOUP 400 is suitably transferred to the temporary storage shelf 520 provided between the tracks 100 while preventing the traveling transport vehicle 200 and the FOUP 400 from interfering with each other. Is possible.
本発明は、上述した実施形態に限られるものではなく、特許請求の範囲及び明細書全体から読み取れる発明の要旨或いは思想に反しない範囲で適宜変更可能であり、そのような変更を伴う搬送システムもまた本発明の技術的範囲に含まれるものである。
The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. Moreover, it is included in the technical scope of the present invention.
１００ 軌道
１００ａ 第１軌道
１００ｂ 第２軌道
２００ 搬送車
２１０ 走行部
２１５ 走行ローラ
２２０ 本体部
２３０ 移動部
２４０ 昇降ベルト
２５０ 把持部
３００ コントローラ
４００ ＦＯＵＰ
５１０ ポート
５２０ 一時保管棚
５３０ 一時保管棚 100track 100a first track 100b second track 200 transport vehicle 210 travel unit 215 travel roller 220 main body unit 230 moving unit 240 lifting belt 250 gripping unit 300 controller 400 FOUP
510Port 520 Temporary storage shelf 530 Temporary storage shelf
１００ａ 第１軌道
１００ｂ 第２軌道
２００ 搬送車
２１０ 走行部
２１５ 走行ローラ
２２０ 本体部
２３０ 移動部
２４０ 昇降ベルト
２５０ 把持部
３００ コントローラ
４００ ＦＯＵＰ
５１０ ポート
５２０ 一時保管棚
５３０ 一時保管棚 100
510
Claims (15)
- 互いに並んで設けられた第１軌道及び第２軌道を有する軌道と、
鉛直方向で見て前記第１軌道及び前記第２軌道の間にある位置に設けられた第１一時保管棚と、
前記軌道を走行する本体部と、前記第１一時保管棚との間で物品を移載する移載部とを有している搬送車と、
を備え、
前記第１一時保管棚は、前記第１軌道において前記第１一時保管棚との間で前記物品の移載作業を行っているときに搬送車の前記本体部と鉛直方向で見て一部が重なる位置、且つ前記第１一時保管棚に積載されている物品が前記第１軌道を走行する搬送車の前記本体部に干渉しない高さに設けられている
搬送システム。 A trajectory having a first trajectory and a second trajectory provided side by side;
A first temporary storage shelf provided at a position between the first track and the second track as viewed in the vertical direction;
A transport vehicle having a main body that travels on the track, and a transfer unit that transfers articles between the first temporary storage shelf; and
With
A part of the first temporary storage shelf is viewed in a vertical direction with respect to the main body portion of the transport vehicle when the article is transferred to and from the first temporary storage shelf in the first track. The conveyance system provided in the position which does not interfere with the said main-body part of the conveyance position which the position which overlaps and the said 1st temporary storage shelf and which drive | works the 1st track | orbit travels. - 前記第１一時保管棚は、前記第２軌道において前記第１一時保管棚との間で前記物品の移載作業を行っているときの搬送車の本体部と鉛直方向で見て重ならない位置に設けられている、請求項１に記載の搬送システム。 The first temporary storage shelf is in a position that does not overlap with the main body of the transport vehicle in the vertical direction when the article is being transferred to and from the first temporary storage shelf in the second track. The conveyance system according to claim 1, wherein the conveyance system is provided.
- 前記軌道は、前記第１軌道にある搬送車と、前記第２軌道にある搬送車との間の、前記軌道に直交する水平方向の距離が、前記物品の幅より狭くなるように設けられている、請求項２に記載の搬送システム。 The track is provided such that a horizontal distance perpendicular to the track between the transport vehicle in the first track and the transport vehicle in the second track is narrower than the width of the article. The transfer system according to claim 2.
- 前記第１軌道及び前記第２軌道間の距離Ａが、前記搬送車の幅をＢ、前記物品の幅をＣ、前記第１軌道にある搬送車の前記第１一時保管棚側の端部と当該搬送車に積載された前記物品との水平方向距離をＤ、前記第２軌道にある搬送車の前記第１一時保管棚側の端部と前記第１一時保管棚に積載されている前記物品との間の水平方向距離をＦ、前記第１軌道にある搬送車に積載された前記物品と前記第１一時保管棚に積載されている物品との間の水平方向距離をＧとして、
Ａ＝Ｂ＋Ｃ－Ｄ＋Ｇ＋Ｆ
と表せる場合に、
前記第１一時保管棚は、
Ｇ＜Ｄ
の関係を満たすように設けられている、請求項３に記載の搬送システム。 The distance A between the first track and the second track is such that the width of the transport vehicle is B, the width of the article is C, and the end of the transport vehicle on the first track on the first temporary storage shelf side The horizontal distance from the article loaded on the transport vehicle is D, the first temporary storage shelf side end of the transport vehicle on the second track, and the article loaded on the first temporary storage shelf. F as the horizontal distance between and G as the horizontal distance between the article loaded on the transport vehicle in the first track and the article loaded on the first temporary storage shelf,
A = B + C−D + G + F
Can be expressed as
The first temporary storage shelf is:
G <D
The conveyance system according to claim 3, which is provided so as to satisfy the relationship. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項４に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 4, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項２に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 2, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項３に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 3, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記軌道は、前記第１軌道にある搬送車と、前記第２軌道にある搬送車との間の、前記軌道に直交する水平方向の距離が、前記物品の幅より狭くなるように設けられている、請求項１に記載の搬送システム。 The track is provided such that a horizontal distance perpendicular to the track between the transport vehicle in the first track and the transport vehicle in the second track is narrower than the width of the article. The transfer system according to claim 1.
- 前記第１軌道及び前記第２軌道間の距離Ａが、前記搬送車の幅をＢ、前記物品の幅をＣ、前記第１軌道にある搬送車の前記第１一時保管棚側の端部と当該搬送車に積載された前記物品との水平方向距離をＤ、前記第２軌道にある搬送車の前記第１一時保管棚側の端部と前記第１一時保管棚に積載されている前記物品との間の水平方向距離をＦ、前記第１軌道にある搬送車に積載された前記物品と前記第１一時保管棚に積載されている物品との間の水平方向距離をＧとして、
Ａ＝Ｂ＋Ｃ－Ｄ＋Ｇ＋Ｆ
と表せる場合に、
前記第１一時保管棚は、
Ｇ＜Ｄ
の関係を満たすように設けられている、請求項８に記載の搬送システム。 The distance A between the first track and the second track is such that the width of the transport vehicle is B, the width of the article is C, and the end of the transport vehicle on the first track on the first temporary storage shelf side The horizontal distance from the article loaded on the transport vehicle is D, the first temporary storage shelf side end of the transport vehicle on the second track, and the article loaded on the first temporary storage shelf. F as the horizontal distance between and G as the horizontal distance between the article loaded on the transport vehicle in the first track and the article loaded on the first temporary storage shelf,
A = B + C−D + G + F
Can be expressed as
The first temporary storage shelf is:
G <D
The conveyance system according to claim 8, which is provided so as to satisfy the relationship. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項９に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 9, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項８に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 8, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項９に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 9, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 前記第１軌道及び前記第２軌道の一方の真下に設けられた第２一時保管棚を更に備え、
前記第１一時保管棚は、前記第２一時保管棚と同じ高さに設けられている、請求項１に記載の搬送システム。 A second temporary storage shelf provided directly below one of the first track and the second track;
The transport system according to claim 1, wherein the first temporary storage shelf is provided at the same height as the second temporary storage shelf. - 互いに並んで設けられた第１軌道及び第２軌道を有する軌道と、
鉛直方向で見て前記第１軌道及び前記第２軌道の間にあるように見える位置で、かつ、前記第１軌道及び前記第２軌道の下方に設けられた第１一時保管棚と、
前記軌道から吊り下げられた状態で走行する本体部と、前記第１一時保管棚との間で物品を移載可能な移載部とを有している天井搬送車と
を備え、
前記第１一時保管棚は、前記第１軌道において前記第１一時保管棚との間で前記物品の移載作業を行っている搬送車の前記本体部と鉛直方向で見て一部が重なり、前記第２軌道において前記第１一時保管棚との間で前記物品の移載作業を行っている搬送車の前記本体部と鉛直方向で見て重ならない位置に配置されており、
前記第１一時保管棚は、前記第１一時保管棚に積載されている物品が前記第１軌道を走行する搬送車の前記本体部に干渉しない高さに設けられている、
搬送システム。 A trajectory having a first trajectory and a second trajectory provided side by side;
A first temporary storage shelf provided at a position that appears to be between the first track and the second track when viewed in the vertical direction and below the first track and the second track;
A ceiling transport vehicle having a main body that travels in a state suspended from the track, and a transfer unit that can transfer an article between the first temporary storage shelf,
The first temporary storage shelf partially overlaps the main body portion of the transport vehicle that is performing the transfer operation of the article between the first temporary storage shelf and the first temporary storage shelf in the first track, Arranged in a position that does not overlap with the main body of the transport vehicle performing the transfer operation of the article with the first temporary storage shelf in the second track when viewed in the vertical direction;
The first temporary storage shelf is provided at a height at which articles loaded on the first temporary storage shelf do not interfere with the main body of the transport vehicle traveling on the first track.
Conveying system. - 前記移載部は、前記物品を側方に移動させる側方移動部と、前記側方移動部に設けられ物品を昇降させる昇降部とを有している、請求項１４に記載の搬送システム。 The transfer system according to claim 14, wherein the transfer unit includes a side moving unit that moves the article to the side and a lifting unit that is provided in the side moving unit and raises and lowers the article.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010168087A JP2012025573A (en) | 2010-07-27 | 2010-07-27 | Conveying system |
| JP2010-168087 | 2010-07-27 |
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|---|---|
| WO2012014561A1 true WO2012014561A1 (en) | 2012-02-02 |
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| PCT/JP2011/062355 WO2012014561A1 (en) | 2010-07-27 | 2011-05-30 | Conveying system |
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| JP (1) | JP2012025573A (en) |
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| JP2009120299A (en) * | 2007-11-13 | 2009-06-04 | Murata Mach Ltd | Overhead traveling vehicle system and construction method of its buffer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109791906A (en) * | 2016-09-26 | 2019-05-21 | 村田机械株式会社 | Overhead transfer system and overhead transfer vehicle |
| JPWO2018055883A1 (en) * | 2016-09-26 | 2019-10-03 | 村田機械株式会社 | Ceiling transport system and ceiling transport vehicle |
| US11052926B2 (en) | 2016-09-26 | 2021-07-06 | Murata Machinery, Ltd. | Overhead transport system and overhead transport vehicle |
| CN109791906B (en) * | 2016-09-26 | 2023-11-24 | 村田机械株式会社 | Ceiling conveying system and ceiling conveying vehicle |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201212149A (en) | 2012-03-16 |
| JP2012025573A (en) | 2012-02-09 |
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