WO2012014507A1 - チタン金属製耐摩耗性部材 - Google Patents
チタン金属製耐摩耗性部材 Download PDFInfo
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- WO2012014507A1 WO2012014507A1 PCT/JP2011/053246 JP2011053246W WO2012014507A1 WO 2012014507 A1 WO2012014507 A1 WO 2012014507A1 JP 2011053246 W JP2011053246 W JP 2011053246W WO 2012014507 A1 WO2012014507 A1 WO 2012014507A1
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- titanium metal
- wear
- layer
- titanium
- resistant member
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Definitions
- the present invention relates to a titanium metal wear-resistant member applied to a fastening member such as a screw or a sliding member such as a sliding bearing, and a manufacturing method thereof.
- titanium alloys have higher strength than pure titanium and have excellent properties such as specific strength, fracture toughness, heat resistance, and corrosion resistance. Therefore, in addition to aircraft materials, marine fields, power generation fields, automobile fields, etc. Is also of high practical value.
- titanium alloys as aircraft materials are used for primary structural members such as outer plates, frames, coupling fittings and fastening members (also referred to as fasteners) as the speed and size of aircraft increase.
- primary structural members such as outer plates, frames, coupling fittings and fastening members (also referred to as fasteners) as the speed and size of aircraft increase.
- fasteners also referred to as fasteners
- fasteners such as bolts and nuts are used under severe conditions that receive repeated stresses including thermal stress. Titanium alloys have a small contact potential difference with carbon fibers of carbon fiber reinforced plastics, and corrode. It is also used for fastening parts (also called fasteners) such as bolts and nuts for fixing carbon fiber reinforced plastic laminates used in aircraft center wings and main wings and tail wings. ing.
- activated carbon ions collide with and adhere to the surface of the titanium metal, and then diffuse inside, or accelerated activated carbon ions are deposited on the surface of the metal treatment product. Simultaneously with the collision, it is driven into the interior, and a hardened layer of metal carbide such as TiC is formed on the surface.
- Patent Document 1 As an example of carburizing treatment, after the surface of titanium metal is cleaned, plasma carburizing treatment is performed in an atmosphere of 0.5 to 15 torr and 700 to 1100 ° C. containing hydrocarbon gas, thereby impairing the original strength of titanium metal. It is known to avoid (Patent Document 1).
- Patent Document 2 A method for efficiently forming a high-quality glassy carbon film by performing plasma heat treatment in an atmosphere at ⁇ 1100 ° C. is known (Patent Document 2).
- glassy carbon is a non-crystalline structure in which hexagonal mesh surfaces of several nanometers, which is the basic structure of graphite-based materials, are gathered without directionality, and the graphite structure does not develop even when heat-treated up to a high temperature around 3000 ° C. It is also called qualitative carbon (non-graphitizable carbon).
- titanium alloys are difficult to use as wear-resistant members for applications that can withstand severe sliding wear conditions that are in sliding contact with, for example, carbon fiber reinforced plastic materials, such as fastening members such as bolts and nuts and sliding bearings.
- carbon fiber reinforced plastic materials such as fastening members such as bolts and nuts and sliding bearings.
- fastening members such as bolts and nuts and sliding bearings.
- a sliding member, etc. it was not sufficiently resistant to sliding wear applications by repeated contact with a high-strength filler such as carbon fiber.
- an object of the present invention is to provide a titanium metal wear-resistant member that solves the above-described problems and further improves the wear resistance so as to withstand even severe sliding wear conditions, and in particular, carbon fiber.
- a titanium metal wear-resistant member that can be used as a fastening member or sliding member that can exhibit the mechanical strength inherent in titanium alloys, with less wear even under severe sliding wear conditions such as sliding contact with reinforced plastic materials. is there.
- a carburized layer by plasma carburizing treatment is provided on the surface of a titanium metal member, and the surface roughness Ra (arithmetic surface roughness) 0.01 is provided on the surface of the carburized layer.
- a polished surface of ⁇ 0.80 ⁇ m is provided, a titanium oxide layer is provided on the polished surface, and an amorphous carbon (hereinafter also abbreviated as GLC) layer is provided on the surface of the titanium oxide layer.
- GLC amorphous carbon
- the titanium metal wear-resistant member of the present invention configured as described above has titanium metal as a base material, a polished surface having a predetermined surface roughness is formed on the surface, and an appropriate dense layer is formed on the polished surface.
- a polished surface having a predetermined surface roughness is formed on the surface, and an appropriate dense layer is formed on the polished surface.
- the above-described strong and uneven flat GLC layer can be brought into sliding contact with the friction surface without concentration of stress, so that the wear resistance of the surface of the wear-resistant member is high, and the carburized layer deeper than the polished surface is also used.
- the slidability acts supplementarily, and the necessary wear resistance can be sufficiently secured for a long time.
- the GLC layer described above is a GLC layer having a hardness of 640 mHV or more because the wear resistance of the titanium metal wear-resistant member is sufficiently improved.
- the surface roughness Ra of the polished surface is 0.01 to 0.80 ⁇ m, an oxide film can be formed smoothly and necessary.
- the lower the Ra the more dense the GLC and the more the hardness is improved.
- Ra is smoothed until it falls below the predetermined numerical range, an extremely dense GLC layer will be formed.
- the permeability of the activated carbon ions is too hindered, so that even if the plasma carburizing conditions are selectively adjusted, carburization deeper than the oxide film becomes difficult, which is not preferable.
- the Ra of the polished surface is a rough surface exceeding the predetermined numerical range, the GLC layer formed on the surface is not dense, and a GLC layer having the desired hardness cannot be formed.
- the titanium metal wear-resistant member is a wear-resistant member dedicated to sliding parts with a synthetic resin (hereinafter abbreviated as CFRP) reinforced with carbon fiber or titanium metal, and the titanium metal wear-resistant member described above. If it is an abradable member, it will be hard to receive damage from CFRP which carries out frictional contact in a sliding state, and will not damage CFRP. Also, such titanium metal wear-resistant members are extremely compatible and excellent in wear resistance as a fastening member material such as a screw that comes into sliding contact with CFRP, that is, a fastening member that needs to be securely fixed under vibration conditions. Demonstrate the characteristics.
- CFRP synthetic resin
- the titanium metal wear-resistant member of the present invention which is assumed to be used in such a manner, reliably exhibits its excellent wear-resistant characteristics as a screw (bolt) of a fastening part.
- the titanium metal wear resistant member is a sliding bearing, it exhibits excellent wear resistance properties against the mating material in frictional contact in a sliding state while receiving a bearing load.
- Such an excellent titanium metal wear-resistant member can be used for aircraft wear-resistant parts that require particularly high safety, particularly when fixing CFRP parts that vibrate as described above.
- This application is very suitable because it is less susceptible to damage from CFRP in frictional contact and does not damage CFRP.
- a polished surface having a surface roughness Ra of 0.01 to 0.80 ⁇ m is formed on the surface of the titanium metal member, and then this polished surface is exposed to the air in the air.
- a titanium oxide layer is formed, and the surface of the titanium oxide layer is subjected to plasma carburizing treatment in an atmospheric gas temperature range of 350 to 850 ° C., and then superimposed on the titanium oxide layer by plasma heat treatment at 400 to 1100 ° C. It is preferable to employ a titanium metal wear-resistant member manufacturing method comprising forming a crystalline carbon layer.
- the titanium oxide layer can transmit carbon ions by plasma carburization at a relatively low temperature of 350 to 850 ° C.
- the carburized layer is formed deeper than the titanium oxide layer without inhibiting the corrosion resistance of the titanium metal
- a high-quality GLC layer can be provided on the surface of the titanium oxide layer by adjusting the temperature of plasma carburizing at a relatively high temperature of 400 to 1100 ° C. and the carburizing gas concentration.
- the GLC layer is formed on a polished surface having a surface roughness Ra of 0.01 to 0.80 ⁇ m, so that the GLC layer is densely and firmly formed, has high wear resistance, and causes stress concentration. A flat GLC layer without such unevenness can be formed. In this way, it is possible to efficiently produce a titanium metal wear-resistant member with improved wear resistance so that it can withstand even severe sliding wear conditions.
- the titanium metal wear-resistant member of the present invention is provided with a polished surface having a predetermined surface roughness on the surface of the plasma carburized layer, and a titanium oxide layer and an amorphous carbon layer are sequentially provided on the polished surface.
- Titanium metal wear-resistant parts with improved wear resistance so that they can withstand even severe sliding wear conditions, especially severe sliding wear conditions such as sliding contact with carbon fiber reinforced plastic materials
- it becomes difficult to wear and there is an advantage that it becomes a titanium metal wear-resistant member that can be used as a fastening member or a sliding member that can exhibit the mechanical strength inherent to the titanium alloy.
- a polished surface having a predetermined surface roughness is formed on the surface of the titanium metal member, and the surface of the titanium oxide layer formed thereon After the plasma carburizing process in the atmospheric gas temperature range of a relatively low temperature range, the amorphous carbon layer is formed by plasma heat treatment in a relatively high temperature constant temperature range.
- Sectional drawing which expands and shows the trunk
- FIG. 1 is an enlarged view of a part of the surface layer portion of a titanium metal member 1 that is a “screw” of the embodiment.
- a carburized layer 2 is provided on the material 1a of the titanium metal member 1 by plasma carburizing treatment. 2 is provided with a polished surface 2a having a surface roughness Ra of 0.01 to 0.80 ⁇ m, a titanium oxide layer 3 is provided on the polished surface 2a, and an amorphous layer is provided on the surface of the titanium oxide layer 3.
- This is a titanium metal wear-resistant member provided with a conductive carbon layer (also referred to as glass-like carbon or GLC) 4.
- a conductive carbon layer also referred to as glass-like carbon or GLC
- a polished surface 2a having a surface roughness Ra of 0.01 to 0.80 ⁇ m is formed on the surface of a rod-shaped titanium metal material 1a that can be used as a screw material or the like. Then, the titanium oxide layer 3 was formed in the air on the polished surface 2a, and the surface of the titanium oxide layer 3 was subjected to plasma carburizing treatment in an atmospheric gas temperature range of 350 to 850 ° C., whereby the carburized layer 2 was formed. Thereafter, it is efficient to form the amorphous carbon layer 4 overlying the titanium oxide layer 3 by plasma heat treatment at 400 to 1100 ° C.
- the titanium metal material used in the present invention may be pure titanium, a titanium alloy, or an intermetallic compound of titanium and other metals, subjected to solution treatment, and further subjected to aging treatment at 480 to 690 ° C. In order to increase the strength as a screw, it is preferable to adopt the above-described one.
- the polishing referred to in the present invention is a surface roughness Ra (arithmetic surface roughness) of 0.01 to 0.80 ⁇ m, preferably 0.01 to 0.50 ⁇ m, more preferably 0.01 on the surface of the titanium metal material. Forming a polished surface of .about.0.40 .mu.m.
- a titanium oxide layer is formed moderately smoothly and densely by air oxidation, so that an amorphous carbon layer (glass) provided on the coating is formed.
- a carbon-like carbon layer which is homogeneous and has a required hardness (for example, a hardness of 640 mHV or more) and no unevenness. The degree of density is adjusted so that carbon atom ions activated during the plasma carburizing treatment can be transmitted, and the tightness is firmly adhered to the polished surface.
- the titanium metal material polishing method may be a well-known polishing method for metal.
- buffing or other mechanical polishing or chemical polishing may be employed. It should be noted that preferable results are also obtained when buffing using emery paper and alumina suspension or chromium oxide suspension is employed as an abrasive during polishing.
- An apparatus (manufactured by JEOL Ltd.) used for the plasma carburizing process is surrounded by a heat insulating material attached to the inner peripheral surface of the furnace shell of the heating furnace, and a processing chamber is formed therein.
- This is a so-called vacuum device that is heated by a heating element made of a graphite rod.
- the heat insulating material in the upper part of the processing chamber has conductivity and is connected to the anode of the DC power source, the work table is connected to the cathode of the DC power source, and a DC voltage is applied between both electrodes. Glow discharge is generated, and activated carbon ions are generated by ionizing the hydrocarbon-based carburizing gas introduced from the manifolds provided at the main points of the processing chamber. The activated carbon ions collide with the surface of the workpiece. Carburizing treatment is performed.
- a vacuum pump is connected to the processing chamber in order to make the inside of the processing chamber into a vacuum state.
- the hydrocarbon-based carburizing gas used in the present invention is a general term for gases consisting of only carbon and hydrogen, which may be either chain hydrocarbons or cyclic hydrocarbons, such as methane, ethane, propane, etc.
- methane-based hydrocarbons ethylene-based and acetylene-based hydrocarbons may be mentioned, which may be linear, side-chained, or cyclic hydrocarbons.
- the titanium metal material is subjected to a cleaning process using an organic solvent or an ultrasonic wave, and the titanium metal material placed on the mounting table in the processing chamber is subjected to a carburizing temperature by a heating element.
- the surface of the material is cleaned with a cleaning gas made of an inert gas mixed with hydrogen gas that has been heated to a predetermined temperature in the temperature range of 350 to 850 ° C. equivalent to that of plasma and then converted into plasma by glow discharge.
- the oxide film forming the titanium oxide layer has a dense and smooth surface, and is firmly fixed to the polished surface of the titanium metal material. Even when subjected to the action of sputtering such as hydrogen, it remains without being removed.
- a mixed gas of propane gas as a carburizing gas and hydrogen gas having a cleaning action as a dilution gas is introduced into the processing chamber.
- the gas pressure in the processing chamber is set to a vacuum of about 10 Pa to 2000 Pa. The flow rate is adjusted so that
- the mixed gas that is, the atmospheric gas
- the heating element so that the titanium alloy material can maintain the carburizing temperature.
- the temperature level is the same as the temperature range of the aging treatment, and precipitates generated by the aging treatment are aggregated and coarsened in the carburizing treatment process. There is no risk of material deterioration such as lowering of tensile strength, shear strength and fatigue strength. Further, it becomes easy to control the thickness of the TiC hardened layer to a level necessary for improving the sliding characteristics, for example, to a thin layer of about 10 ⁇ m or less, for example, 1 ⁇ m or less.
- the step of forming the amorphous carbon layer is performed as follows. It is preferable that the pressure of the hydrocarbon gas is 13 to 4000 Pa under the plasma heat treatment conditions. Such a pressure of the hydrocarbon gas is preferable for efficiently forming an amorphous carbon (glassy carbon) film mainly on the titanium metal surface, and the carbon content of the film formation layer is small at a low pressure of less than 13 Pa. Film formation is not sufficient, which is not preferable. Moreover, at high pressures exceeding 4000 Pa, practicality may be impaired. From this tendency, the more preferable pressure of the hydrocarbon gas is 13 to 2666 Pa.
- the atmospheric temperature of the plasma heat treatment for forming the amorphous carbon layer is preferably 400 to 1100 ° C., more preferably 500 to 1100 ° C., and further preferably 530 to 1100 ° C.
- the adhesion of glassy carbon to the titanium metal surface is low.
- a treatment temperature higher than this is not practical in order to ensure the strength characteristics of titanium.
- the bolt material is reheated to a temperature range of 150 ° C. to 350 ° C. in an atmosphere of an inert gas such as argon with a heating device installed adjacent to the plasma carburizing apparatus, and then quickly dies. Or, it is supplied to a well-known screw rolling device such as a round die rolling machine, and a required screw rolling process is preferably performed in a temperature range of 150 ° C. to 350 ° C. Thereafter, in order to prevent cracking in the cooling process, the titanium metal wear-resistant member is obtained as a threaded part by quickly putting it into a cylindrical container filled with an inert gas and performing slow cooling.
- an inert gas such as argon
- a heating device installed adjacent to the plasma carburizing apparatus
- the titanium metal wear-resistant member is not only a fastening part made of a screw, but can also be adopted as a fastening part such as a pin, a rivet-like part, a clip, a washer, or a part of the fastening part.
- the titanium metal wear-resistant member may be a sliding member that forms a sliding surface such as a sliding bearing, and may be employed as a known sliding member such as a pin, a collar, or a roller. . It is recommended that these titanium metal wear-resistant members are wear-resistant parts for aircraft, particularly as a target product that can sufficiently exhibit the effects of the present invention.
- a screw head (for a 12-volt bolt) 5 is formed by hot forging on a screw material that is a titanium metal member 1 made of Ti-6Al-4V. After the solution treatment was applied to the entire screw, the lower part for forming the screw body 6 and the screw surface 7 was formed by cutting.
- a polished surface having a surface roughness Ra of 0.01 to 0.80 ⁇ m (including 0.01 ⁇ m or 0.80 ⁇ m) is formed on the surface, and after aging treatment at 480 to 690 ° C., A titanium oxide layer is formed by exposure to air, and the surface of the titanium oxide layer is plasma carburized in an atmosphere gas temperature range of 400 to 500 ° C. in a vacuum apparatus, and then the titanium oxide layer is subjected to plasma heat treatment at 530 to 800 ° C. An amorphous carbon layer is formed on top of the oxide layer, hydrogen removal (baking treatment) is performed in the same vacuum device, fretting processing under the neck and thread rolling processing are performed, and cesyl alcohol is applied. Then, a lubrication treatment was performed to obtain a plurality of titanium alloy bolts (Example 1) that were to be tested for metal wear-resistant members.
- a titanium oxide layer is formed by exposure to air, and the surface of the titanium oxide layer is plasma carburized in an atmosphere gas temperature range of 400 to 500 ° C
- the titanium alloy bolt of Example 1 obtained, a titanium alloy bolt (Comparative Example 1) and plasma manufactured in the same manner except that no plasma heat treatment was performed so as to have only a carburized layer without forming a GLC.
- the following joint fatigue tests were performed on titanium alloy bolts (Comparative Example 2) that were not carburized or plasma heat treated.
- Example 1 The bolt of Example 1 was subjected to a Raman spectroscopic analysis result for the bolt body, and a hard (700 mHV) amorphous carbon (GLC) film was present, and the bolt body was protected, so damage was suppressed. it was thought.
- a hard (700 mHV) amorphous carbon (GLC) film was present, and the bolt body was protected, so damage was suppressed. it was thought.
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Abstract
Description
このようにして、厳しい摺動摩耗条件においても耐えられるように耐摩耗性をさらに改善したチタン金属製耐摩耗性部材を効率よく製造することができる。
図1は実施形態の「ねじ」であるチタン金属製部材1の一部表層部分を拡大して説明し、チタン金属製部材1の素材1aにプラズマ浸炭処理による浸炭層2を設け、この浸炭層2の表面に表面粗さRa0.01~0.80μmの研磨面2aを設け、この研磨面2aに重ねてチタン酸化物層3を設け、このチタン酸化物層3の表面に重ねて非晶質性カーボン層(ガラスライクカーボンまたはGLCとも別称する。)4を設けたチタン金属製耐摩耗性部材である。
この発明でいう研磨は、上記したチタン金属製素材の表面に表面粗さRa(算術表面粗さ)0.01~0.80μm、好ましくは0.01~0.50μm、より好ましくは0.01~0.40μmの研磨面を形成することである。
次いで、処理室内に浸炭用ガスとしてのプロパンガスと希釈ガスとしてのクリーニング作用を有する水素ガスとの混合ガスが導入されるが、その際には処理室内のガス圧力が10Pa~2000Pa程度の真空になるように流量調節される。
プラズマ熱処理の条件における炭化水素系ガスの圧力13~4000Paとすることが好ましい。このような炭化水素系ガスの圧力は、チタン金属表面に主に非晶質性カーボン(ガラス状カーボン)膜を効率よく形成するために好ましく、13Pa未満の低圧では成膜層の炭素量が少なく成膜が充分でなくて好ましくない。また、4000Paを越える高圧では、実用性が損なわれる可能性がある。このような傾向から、より好ましい炭化水素系ガスの圧力は13~2666Paである。
その後、冷却過程での割れを防止するため、速やかに不活性ガスを充満させた円筒型容器に投入して緩速冷却を行ってチタン金属製耐摩耗性部材はねじ部品として得られる。
これらのチタン金属製耐摩耗性部材が、航空機用耐摩耗性部品であることは、特にこの発明の作用効果を充分に発揮できる対象品として推奨される。
図2に示すように前述の実施形態に従って、Ti-6Al-4Vからなるチタン金属製部材1であるねじの素材に対し、熱間鍛造によりねじ頭部(12角ボルト用)5を形成し、ねじ全体に溶体化処理を施してから、ねじ胴部6およびねじ面7を形成するための下部を切削加工により形成した。
MIL-HANDBOOK-17-1Fに準拠し、航空機用の炭素繊維強化エポキシ樹脂(CFRP)板8のボルト孔8aを形成した端部同士を重ね合わせ、実施例1または比較例1、2のねじを同質の座金9およびナット10を用いて締結したボルト接合継手の試験片を作製し、これらに対して引張圧縮荷重による繰返し応力疲労試験を行った。
1000万回の繰返し応力疲労を受けても破壊しなかった疲労試験後の継手を分解し、CFRPの結合部およびボルトの損傷状況を調査した。
これに対し、実施例1のボルトは、非常に微小なすり傷は存在するが、ほぼ健全な状態を保っていた。
1a 素材
2 浸炭層
2a 研磨面
3 チタン酸化物層
4 非晶質性カーボン層
5 ねじ頭部
6 ねじ胴部
7 ねじ面
8 炭素繊維強化エポキシ樹脂板
8a ボルト孔
9 座金
10 ナット
Claims (7)
- チタン金属製部材にプラズマ浸炭処理による浸炭層を設け、この浸炭層の表面に表面粗さRa0.01~0.80μmの研磨面を設け、この研磨面を酸化させてチタン酸化物層を設け、このチタン酸化物層に重ねて非晶質性カーボン層を設けてなるチタン金属製耐摩耗性部材。
- 非晶質性カーボン層が、640mHV以上の硬さの非晶質性カーボン層である請求項1に記載のチタン金属製耐摩耗性部材。
- チタン金属製耐摩耗性部材が、炭素繊維で強化された合成樹脂またはチタン金属と摺接する摺動部材である請求項1または2に記載のチタン金属製耐摩耗性部材。
- チタン金属製耐摩耗性部材が、ねじからなる締結部品である請求項1~3のいずれかに記載のチタン金属製耐摩耗性部材。
- チタン金属製耐摩耗性部材が、滑り軸受である請求項1~3のいずれかに記載のチタン金属製耐摩耗性部材。
- チタン金属製耐摩耗性部材が、航空機用耐摩耗性部品である請求項1~4のいずれかに記載のチタン金属製耐摩耗性部材。
- チタン金属製素材の表面に、表面粗さRa0.01~0.80μmの研磨面を形成し、次いでこの研磨面に空気中でチタン酸化物層を形成し、このチタン酸化物層の表面を350~850℃の雰囲気ガス温度範囲でプラズマ浸炭処理した後、400~1100℃でのプラズマ熱処理により前記チタン酸化物層に重ねて非晶質性カーボン層を形成することからなるチタン金属製耐摩耗性部材の製造方法。
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US13/812,531 US9376742B2 (en) | 2010-07-29 | 2011-02-16 | Wear-resistant member made of titanium metal |
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JP2010170707A JP5657940B2 (ja) | 2010-07-29 | 2010-07-29 | チタン金属製耐摩耗性部材 |
JP2010-170707 | 2010-07-29 |
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JP6485859B2 (ja) * | 2015-02-27 | 2019-03-20 | 国立大学法人東北大学 | 表面被覆が形成されたチタン銅合金材及びその製造方法 |
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JPH02122075A (ja) * | 1988-10-31 | 1990-05-09 | Nippon Steel Corp | 硬質炭素膜のコーティング方法 |
JPH1143770A (ja) * | 1997-05-28 | 1999-02-16 | Tanaka:Kk | チタン金属へのガラス状カーボンの被覆方法 |
JP2000119842A (ja) * | 1998-10-16 | 2000-04-25 | Nippon Pillar Packing Co Ltd | 耐摩耗性材料、および摺動部材 |
JP2006307348A (ja) * | 2006-06-26 | 2006-11-09 | Tanaka:Kk | チタン合金ねじ部品の製造方法を用いたチタン合金ねじ部品 |
JP2008231520A (ja) * | 2007-03-22 | 2008-10-02 | Tocalo Co Ltd | アモルファス状炭素水素固形物皮膜被覆部材およびその製造方法 |
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JP2909361B2 (ja) | 1993-09-21 | 1999-06-23 | 大阪府 | チタン金属の表面処理方法 |
JP4216497B2 (ja) * | 2001-10-17 | 2009-01-28 | 株式会社田中 | チタン合金ねじ部品の製造方法とそれを用いたチタン合金ねじ部品 |
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JPH02122075A (ja) * | 1988-10-31 | 1990-05-09 | Nippon Steel Corp | 硬質炭素膜のコーティング方法 |
JPH1143770A (ja) * | 1997-05-28 | 1999-02-16 | Tanaka:Kk | チタン金属へのガラス状カーボンの被覆方法 |
JP2000119842A (ja) * | 1998-10-16 | 2000-04-25 | Nippon Pillar Packing Co Ltd | 耐摩耗性材料、および摺動部材 |
JP2006307348A (ja) * | 2006-06-26 | 2006-11-09 | Tanaka:Kk | チタン合金ねじ部品の製造方法を用いたチタン合金ねじ部品 |
JP2008231520A (ja) * | 2007-03-22 | 2008-10-02 | Tocalo Co Ltd | アモルファス状炭素水素固形物皮膜被覆部材およびその製造方法 |
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JP2012031459A (ja) | 2012-02-16 |
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