WO2011128001A3 - Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul - Google Patents

Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul Download PDF

Info

Publication number
WO2011128001A3
WO2011128001A3 PCT/EP2010/066122 EP2010066122W WO2011128001A3 WO 2011128001 A3 WO2011128001 A3 WO 2011128001A3 EP 2010066122 W EP2010066122 W EP 2010066122W WO 2011128001 A3 WO2011128001 A3 WO 2011128001A3
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
contact
photovoltaic module
semiconductor cells
producing
Prior art date
Application number
PCT/EP2010/066122
Other languages
English (en)
French (fr)
Other versions
WO2011128001A2 (de
Inventor
Ulrich Schaaf
Andreas Kugler
Patrick Zerrer
Martin Zippel
Patrick Stihler
Metin Koyuncu
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to CN2010800661451A priority Critical patent/CN102834924A/zh
Priority to EP10774178A priority patent/EP2559058A2/de
Priority to KR1020127029692A priority patent/KR101676078B1/ko
Priority to JP2013504137A priority patent/JP5655212B2/ja
Priority to US13/640,878 priority patent/US20130104957A1/en
Publication of WO2011128001A2 publication Critical patent/WO2011128001A2/de
Publication of WO2011128001A3 publication Critical patent/WO2011128001A3/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/05Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/268Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433Particular geometry of the grid contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/05Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H01L31/0504Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
    • H01L31/0516Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module specially adapted for interconnection of back-contact solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Optics & Photonics (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Di e Erfindung betrifft ein Verfahren zur Herstellung eines Photovoltaikmoduls mit rückseitenkontaktierten Halbleiterzellen (1) mit jeweils auf einer Kontaktseite (2) vorgesehenen Kontaktbereichen (3) mit den Verfahrensschritten : Bereitstellen eines folienartigen nichtleitenden Trägers (4) mit einer mindestens einseitigen und mindestens abschnittsweisen elektrisch leitfähigen Trägerbeschichtung (5) auf einer ersten Trägerseite, Auf setzen der Kontakt seit en der Halbleiterzellen auf eine zweite Trägerseite, Ausführen einer den Träger und die Trägerbeschichtung durchbrechenden lokalen Perforation zum Erzeugen von Durchbrüchen (10) an den Kontaktbereichen (3) der Halbleiterzellen (1), Aufbringen eines Kontaktiermittels (11) zum Verfüllen der Durchbrüche (10) und zum Ausbilden einer Kontaktierung zwischen der Trägerbeschichtung auf der ersten Trägerseite und den Halbleiterzellen auf der zweit en Trägerseite.
PCT/EP2010/066122 2010-04-14 2010-10-26 Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul WO2011128001A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2010800661451A CN102834924A (zh) 2010-04-14 2010-10-26 制造带有背侧接触的半导体电池的光伏模块的方法和光伏模块
EP10774178A EP2559058A2 (de) 2010-04-14 2010-10-26 Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul
KR1020127029692A KR101676078B1 (ko) 2010-04-14 2010-10-26 후면 접촉식 반도체 셀을 포함하는 태양 전지 모듈의 제조 방법 및 태양 전지 모듈
JP2013504137A JP5655212B2 (ja) 2010-04-14 2010-10-26 裏面接続された半導体セルを備える光電池モジュールの製造方法および光電池モジュール
US13/640,878 US20130104957A1 (en) 2010-04-14 2010-10-26 Method for producing a photovoltaic module having backside-contacted semiconductor cells, and photovoltaic module

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010027747A DE102010027747A1 (de) 2010-04-14 2010-04-14 Verfahren zur Herstellung eines Photovoltaikmoduls mit rückseitenkontaktierten Halbleiterzellen und Photovoltaikmodul
DE102010027747.9 2010-04-14

Publications (2)

Publication Number Publication Date
WO2011128001A2 WO2011128001A2 (de) 2011-10-20
WO2011128001A3 true WO2011128001A3 (de) 2011-12-22

Family

ID=44259584

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/066122 WO2011128001A2 (de) 2010-04-14 2010-10-26 Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul

Country Status (7)

Country Link
US (1) US20130104957A1 (de)
EP (1) EP2559058A2 (de)
JP (1) JP5655212B2 (de)
KR (1) KR101676078B1 (de)
CN (1) CN102834924A (de)
DE (1) DE102010027747A1 (de)
WO (1) WO2011128001A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011000418A1 (de) * 2011-01-31 2012-08-02 Azur Space Solar Power Gmbh Photovoltaik-Baugruppe
DE102011088538A1 (de) * 2011-12-14 2013-06-20 Robert Bosch Gmbh Verfahren und Anordnung zur Herstellung oder Reparatur eines Solarmoduls
DE102011088476A1 (de) * 2011-12-14 2013-06-20 Robert Bosch Gmbh Solarmodul und Verfahren zur Herstellung eines solchen
JP5876379B2 (ja) * 2012-06-19 2016-03-02 本田技研工業株式会社 ガラス基板の穿孔方法および穿孔補助治具
JP2014067999A (ja) * 2012-09-04 2014-04-17 Toyo Aluminium Kk 太陽電池用リボン線及びそれを用いた太陽電池モジュール
DE102013205094A1 (de) 2013-03-22 2014-09-25 Robert Bosch Gmbh Solarmodul und Verfahren zur Herstellung eines solchen
CN104183666B (zh) * 2013-05-26 2017-06-16 苏州易益新能源科技有限公司 一种激光焊接联接晶体硅太阳能电池的方法
ITTV20130211A1 (it) * 2013-12-23 2015-06-24 Vismunda Srl "metodo d'assemblaggio di un pannello fotovoltaico di tipo back-contact con prefissaggio delle celle, e stazione combinata di carico e pre-fissaggio".
CN104753600A (zh) * 2013-12-31 2015-07-01 深圳新飞通光电子技术有限公司 一种金属封装的光收发模块
JP7337838B2 (ja) * 2018-11-13 2023-09-04 株式会社カネカ 太陽電池モジュールの製造方法
CN110148640A (zh) * 2019-05-30 2019-08-20 江苏欧达丰新能源科技发展有限公司 喷绘烧结制作光伏电池片栅线电极的方法
DE102019122213A1 (de) * 2019-08-19 2021-02-25 Heliatek Gmbh Verfahren zur elektrisch leitenden Kontaktierung eines mindestens eine Schutzschicht aufweisenden optoelektronischen Bauelements und optoelektronisches Bauelement mit einer solchen Kontaktierung
KR102554432B1 (ko) * 2021-05-12 2023-07-11 (주)선진환경 바이패스 핀이 접촉된 태양전지 모듈 및 이의 공정 방법
NL2028545B1 (en) * 2021-06-25 2023-01-02 Atlas Technologies Holding Bv Solar module with improved bonding
KR102639167B1 (ko) * 2021-12-02 2024-02-20 한화솔루션 주식회사 과솔더가 방지되는 태양전지 모듈 제조용 태빙 장치
CN115588716B (zh) 2022-11-24 2023-04-07 晶科能源(海宁)有限公司 光伏组件的制造方法和光伏组件

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584956A (en) * 1992-12-09 1996-12-17 University Of Iowa Research Foundation Method for producing conductive or insulating feedthroughs in a substrate
JP2000196116A (ja) * 1998-12-28 2000-07-14 Sony Corp 集積型薄膜素子およびその製造方法
DE102006052018A1 (de) * 2006-11-03 2008-05-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Solarzellenmodul mit verbesserten Rückseiten-Elektroden sowie Verfahren und Herstellung
US20090065043A1 (en) * 2006-02-22 2009-03-12 Jean-Christophe Hadorn Method of coupling photovoltaic cells and film for implementing it
DE102008044910A1 (de) * 2008-08-30 2010-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Solarzellenmodul mit einseitiger Verschaltung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3168811B2 (ja) * 1994-03-23 2001-05-21 富士電機株式会社 薄膜光電変換装置およびその製造方法
JP3328878B2 (ja) * 1998-10-26 2002-09-30 澁谷工業株式会社 ボンディング装置
JP2001352084A (ja) * 2000-06-09 2001-12-21 Fuji Electric Co Ltd 薄膜太陽電池とその製造方法
JP4352644B2 (ja) * 2001-09-26 2009-10-28 コニカミノルタホールディングス株式会社 X線画像撮像システム
JP2004261924A (ja) * 2003-03-03 2004-09-24 Seiko Precision Inc 板状ワークの穴明け装置および穴明け方法
US20070137692A1 (en) * 2005-12-16 2007-06-21 Bp Corporation North America Inc. Back-Contact Photovoltaic Cells
JP2007315834A (ja) * 2006-05-24 2007-12-06 Shimadzu Corp X線透視装置
WO2008049006A2 (en) * 2006-10-17 2008-04-24 Fry's Metals, Inc. Materials for use with interconnects of electrical devices and related methods
US20100018565A1 (en) * 2007-01-25 2010-01-28 Yasushi Funakoshi Solar cell, solar cell array and solar cell module, and method of fabricating solar cell array
TW200905901A (en) * 2007-03-29 2009-02-01 Daniel F Baldwin Solar module manufacturing processes
US8115096B2 (en) * 2007-06-18 2012-02-14 E-Cube Technologies, Ltd. Methods and apparatuses for improving power extraction from solar cells
JP4989549B2 (ja) * 2007-08-24 2012-08-01 三洋電機株式会社 太陽電池及び太陽電池モジュール
DE102007052971A1 (de) * 2007-11-07 2009-06-10 Solarion Ag Kontaktierung und Modulverschaltung von Dünnschichtsolarzellen auf polymeren Trägern
EP2073269A1 (de) * 2007-12-21 2009-06-24 Helianthos B.V. Verfahren zur Herstellung einer seriellen Verbindung in einem Solarzellensystem
JP2010062393A (ja) * 2008-09-04 2010-03-18 Sharp Corp 多層配線板の孔あけ加工装置
JP5440010B2 (ja) * 2008-09-09 2014-03-12 日亜化学工業株式会社 光半導体装置及びその製造方法
DE102008037613A1 (de) * 2008-11-28 2010-06-02 Schott Solar Ag Verfahren zur Herstellung eines Metallkontakts
JP5323250B2 (ja) * 2010-02-24 2013-10-23 京セラ株式会社 太陽電池モジュールおよびその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584956A (en) * 1992-12-09 1996-12-17 University Of Iowa Research Foundation Method for producing conductive or insulating feedthroughs in a substrate
JP2000196116A (ja) * 1998-12-28 2000-07-14 Sony Corp 集積型薄膜素子およびその製造方法
US20090065043A1 (en) * 2006-02-22 2009-03-12 Jean-Christophe Hadorn Method of coupling photovoltaic cells and film for implementing it
DE102006052018A1 (de) * 2006-11-03 2008-05-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Solarzellenmodul mit verbesserten Rückseiten-Elektroden sowie Verfahren und Herstellung
DE102008044910A1 (de) * 2008-08-30 2010-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Solarzelle und Solarzellenmodul mit einseitiger Verschaltung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
VAN KERSCHAVER E ET AL: "Back-contact solar cells: a review", PROGRESS IN PHOTOVOLTAICS. RESEARCH AND APPLICATIONS, JOHN WILEY AND SONS, CHICHESTER, GB, vol. 14, no. 2, 1 March 2006 (2006-03-01), pages 107 - 123, XP002577679, ISSN: 1062-7995, [retrieved on 20051220], DOI: 10.1002/PIP.657 *

Also Published As

Publication number Publication date
US20130104957A1 (en) 2013-05-02
KR101676078B1 (ko) 2016-11-14
WO2011128001A2 (de) 2011-10-20
DE102010027747A1 (de) 2011-10-20
CN102834924A (zh) 2012-12-19
JP5655212B2 (ja) 2015-01-21
EP2559058A2 (de) 2013-02-20
JP2013524543A (ja) 2013-06-17
KR20130059346A (ko) 2013-06-05

Similar Documents

Publication Publication Date Title
WO2011128001A3 (de) Verfahren zur herstellung eines photovoltaikmoduls mit rückseitenkontaktierten halbleiterzellen und photovoltaikmodul
WO2011124716A3 (de) Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen
WO2012006063A3 (en) Microelectronic package and method of manufacturing same
WO2009146007A3 (en) Microelectronic package containing silicon patches for high density interconnects, and method of manufacturing same
WO2008093110A3 (en) Method of preparing a primary electrode array for photovoltaic electrochemical cell arrays
WO2010044645A3 (en) Semiconductor light emitting device and method for manufacturing the same
WO2009023148A3 (en) Nanowire electronic devices and method for producing the same
WO2011078521A3 (ko) 후면전계형 이종접합 태양전지 및 그 제조방법
WO2011003969A3 (de) Verbundsystem für photovoltaik-module
WO2012140050A3 (de) Verfahren zur herstellung eines licht emittierenden halbleiterbauelements und licht emittierendes halbleiterbauelement
EP2139050A3 (de) Verfahren zur Herstellung eines Sonnenkollektors und Halbfabrikat
EP2551914A3 (de) Solarzelle und Verfahren zu ihrer Herstellung
WO2014025722A3 (en) Method and system for gallium nitride electronic devices using engineered substrates
WO2008147113A3 (en) High efficiency solar cell, method of fabricating the same and apparatus for fabricating the same
EP2172978A3 (de) Struktur eines Solarzellenpaneels und Herstellungsverfahren für die Elektrode eines Solarzellenpaneels
WO2011040781A3 (ko) 태양광 발전장치 및 이의 제조방법
WO2010015310A3 (de) Solarzelle und verfahren zur herstellung einer solarzelle
WO2011091959A8 (de) Verfahren zur lokalen hochdotierung und kontaktierung einer halbleiterstruktur, welche eine solarzelle oder eine vorstufe einer solarzelle ist
WO2007117829A3 (en) Method for bonding a semiconductor substrate to a metal substrate
WO2011157420A3 (de) Verfahren zur herstellung einer metallischen kontaktstruktur einer photovoltaischen solarzelle
WO2011055946A3 (ko) 태양전지 및 이의 제조방법
EP2075851A3 (de) Solarzellenmodul und Verfahren zur Herstellung eines Solarzellenmoduls
EP2605296A3 (de) Lichtemittierende Vorrichtung
WO2009136719A3 (ko) 발광 소자 및 그 제조방법
WO2012143460A3 (de) Verfahren zur herstellung einer solarzelle

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201080066145.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10774178

Country of ref document: EP

Kind code of ref document: A2

REEP Request for entry into the european phase

Ref document number: 2010774178

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2010774178

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2013504137

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 20127029692

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 13640878

Country of ref document: US