WO2011124716A3 - Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen - Google Patents

Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen Download PDF

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Publication number
WO2011124716A3
WO2011124716A3 PCT/EP2011/055575 EP2011055575W WO2011124716A3 WO 2011124716 A3 WO2011124716 A3 WO 2011124716A3 EP 2011055575 W EP2011055575 W EP 2011055575W WO 2011124716 A3 WO2011124716 A3 WO 2011124716A3
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WIPO (PCT)
Prior art keywords
contact
carrier
semiconductor cells
producing
rear side
Prior art date
Application number
PCT/EP2011/055575
Other languages
English (en)
French (fr)
Other versions
WO2011124716A2 (de
Inventor
Ulrich Schaaf
Andreas Kugler
Martin Zippel
Patrick Stihler
Metin Koyuncu
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to EP11712894A priority Critical patent/EP2556546A2/de
Priority to CN201180017973.0A priority patent/CN102822989B/zh
Priority to KR1020127026061A priority patent/KR20130050285A/ko
Priority to US13/640,145 priority patent/US20130087181A1/en
Priority to JP2013503140A priority patent/JP5655236B2/ja
Publication of WO2011124716A2 publication Critical patent/WO2011124716A2/de
Publication of WO2011124716A3 publication Critical patent/WO2011124716A3/de

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433—Particular geometry of the grid contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/048—Encapsulation of modules
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
    • H01L31/0516—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module specially adapted for interconnection of back-contact solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • H01L31/188—Apparatus specially adapted for automatic interconnection of solar cells in a module
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Photovoltaic Devices (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung eines Photovoltaik-Moduls mit rückseitenkontaktierten Halbleiterzellen (1) mit jeweils auf einer Kontaktseite (2) vorgesehenen Kontaktbereichen (3), mit folgenden Verfahrensschritten: Bereitstellen eines nichtleitenden folienartigen Trägers (4), Aufsetzen der Kontaktseiten der Halbleiterzellen auf den Träger, Ausführen eines den Träger durchbrechenden Laserbohrens zum Erzeugen von Durchbrüchen (10) auf den Kontaktbereichen (3) der Kontaktseiten (2) der Halbleiterzellen (1), Aufbringen eines Kontaktiermittels (11) auf den Träger zum Verfüllen der Durchbrüche und zum Ausbilden einer auf dem Träger verlaufenden Kontaktierungsschicht.
PCT/EP2011/055575 2010-04-08 2011-04-08 Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen WO2011124716A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP11712894A EP2556546A2 (de) 2010-04-08 2011-04-08 Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen
CN201180017973.0A CN102822989B (zh) 2010-04-08 2011-04-08 用于制造具有背侧接触半导体电池的光生伏打模块的方法
KR1020127026061A KR20130050285A (ko) 2010-04-08 2011-04-08 후면 콘택팅 방식 반도체 셀을 포함하는 태양광 모듈의 제조 방법
US13/640,145 US20130087181A1 (en) 2010-04-08 2011-04-08 Method for producing a photovoltaic module having backside-contacted semiconductor cells
JP2013503140A JP5655236B2 (ja) 2010-04-08 2011-04-08 それぞれ後面でコンタクトされる複数の半導体セルを備えた光起電モジュールの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010003765A DE102010003765A1 (de) 2010-04-08 2010-04-08 Verfahren zur Herstellung eines Photovoltaik-Moduls mit rückseitenkontaktierten Halbleiterzellen
DE102010003765.6 2010-04-08

Publications (2)

Publication Number Publication Date
WO2011124716A2 WO2011124716A2 (de) 2011-10-13
WO2011124716A3 true WO2011124716A3 (de) 2012-01-12

Family

ID=44625731

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PCT/EP2011/055575 WO2011124716A2 (de) 2010-04-08 2011-04-08 Verfahren zur herstellung eines photovoltaik-moduls mit rückseitenkontaktierten halbleiterzellen

Country Status (7)

Country Link
US (1) US20130087181A1 (de)
EP (1) EP2556546A2 (de)
JP (1) JP5655236B2 (de)
KR (1) KR20130050285A (de)
CN (1) CN102822989B (de)
DE (1) DE102010003765A1 (de)
WO (1) WO2011124716A2 (de)

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* Cited by examiner, † Cited by third party
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DE202011052268U1 (de) * 2011-12-12 2012-01-25 Sitec Solar Gmbh Halbzeug für ein Modul mit einer Zelle aus photoaktivem Material
DE102011088476A1 (de) * 2011-12-14 2013-06-20 Robert Bosch Gmbh Solarmodul und Verfahren zur Herstellung eines solchen
DE102012224432A1 (de) * 2012-12-27 2014-04-10 Robert Bosch Gmbh Elektrische Schaltung und Verfahren zum Herstellen einer elektrischen Schaltung
DE102013205094A1 (de) 2013-03-22 2014-09-25 Robert Bosch Gmbh Solarmodul und Verfahren zur Herstellung eines solchen
DE102013206629A1 (de) 2013-04-15 2014-10-30 Robert Bosch Gmbh Verfahren zur Herstellung eines Solarmoduls
NL2012563B1 (en) * 2014-04-03 2016-03-08 Stichting Energieonderzoek Centrum Nederland Solar cell module and method manufacturing such a module.
EP3162427A1 (de) * 2015-10-28 2017-05-03 Casale SA Verfahren und vorrichtung zum entfernen von nox und n2o aus einem gas
AU2017337293A1 (en) * 2016-09-30 2019-05-16 Greatcell Energy Limited A solar module and a method of fabricating a solar module
US20200061536A1 (en) 2016-10-28 2020-02-27 Casale Sa A method for removing nitrogen oxides from a gas using an iron exchanged zeolite catalyst
RU2695277C1 (ru) * 2019-02-12 2019-07-22 Общество С Ограниченной Ответственностью "Товарищество Энергетических И Электромобильных Проектов" Способ изготовления гибкого фотоэлектрического модуля

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Also Published As

Publication number Publication date
KR20130050285A (ko) 2013-05-15
US20130087181A1 (en) 2013-04-11
JP2013527976A (ja) 2013-07-04
WO2011124716A2 (de) 2011-10-13
CN102822989B (zh) 2016-03-23
EP2556546A2 (de) 2013-02-13
DE102010003765A1 (de) 2011-10-13
JP5655236B2 (ja) 2015-01-21
CN102822989A (zh) 2012-12-12

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