WO2011120269A1 - 掩膜传输系统 - Google Patents
掩膜传输系统 Download PDFInfo
- Publication number
- WO2011120269A1 WO2011120269A1 PCT/CN2010/074983 CN2010074983W WO2011120269A1 WO 2011120269 A1 WO2011120269 A1 WO 2011120269A1 CN 2010074983 W CN2010074983 W CN 2010074983W WO 2011120269 A1 WO2011120269 A1 WO 2011120269A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mask
- cavity
- carrying basket
- transport
- transmission
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Definitions
- the present invention relates to a mask transport system, and more particularly to a mask transport system capable of improving mask transmission continuity on a production line in a semiconductor industry and coherence with external modules.
- the workflow of the existing transmission system for transmitting the mask is as follows: First, the transmission system transports the mask on the production line to the vicinity of the mask carrying device in a rolling transmission manner. After being transported to the vicinity of the mask carrying device, the robot of the transmission system is activated, and the transported mask is picked up and stored in the mask carrying device, and a storage process of a mask is completed, when it is to be stored. When the next mask is completed, the above process can be repeated, and the direct mask carrying device is full.
- the above-mentioned transmission system for the transmission mask is transported by the production line to the mask carrying device in the mask.
- This process involves two different transmission modes of the transmission system, and the first one is to transfer the production line by rolling transmission.
- the upper mask is transported to the vicinity of the mask carrying device, and the second is to store the mask near the mask carrying device in the mask carrying device in a robotic transmission manner, thereby making the existing transmission system
- the continuity of the transport and storage process of the mask is extremely poor, thereby reducing the processing efficiency of the mask, which increases the processing cost; on the other hand, since the existing transmission system has two different transmission modes, Increased design difficulty of existing transmission systems.
- the problem of increasing difficulty makes the design of the mask transport system of the present invention easier.
- the present invention provides a mask transport system suitable for transporting a mask on a semiconductor production line, which includes a cavity, a transport mechanism, a carrying basket, a lifting mechanism, a control mechanism, and a vacuuming mechanism.
- the cavity has a hollow structure, and the hollow structure forms a sealed working cavity.
- the front end of the cavity is provided with a first conveying port, and the rear end of the cavity is provided with a second conveying port.
- the transmission mechanism includes a transmission member and a transmission driver, the transmission member is disposed in the working cavity in a horizontal direction and is connected to the transmission driver, and a rear end of the transmission member and a second delivery port of the cavity Docking.
- the carrying basket includes a carrying frame having a hollow structure, and at least two supporting groups are respectively disposed on opposite sidewalls of the carrying frame, and the supporting groups are arranged in parallel at equal intervals, and the supporting group is separated by A horizontal storage tank is formed between the adjacent support groups, and each mask is inserted into a storage slot, and a rear end of the load-bearing frame is provided with a transmission port.
- the lifting mechanism includes a lifting drive and a lifting carrier, the lifting driver is mounted on the outside of the cavity, and an output shaft of the lifting driver is sealingly penetrated into the working cavity and connected to the lifting carrier.
- the control mechanism includes a control processor and a first sensor, the first sensor is mounted on the cavity and facing the front end of the transmission member, and the first sensor is electrically connected to the control processor.
- the control processor is electrically connected to the lift driver, the first sensor detects that a front end of the transport member has a mask and sends a signal to a control processor, and the control processor controls the lift driver to drive the load
- the storage slots of the basket are docked one by one with the front end of the transport member.
- the evacuation mechanism is coupled to the cavity and provides a vacuum environment for the working chamber.
- the transport mechanism further includes a transporting member, the transporting member is received in the horizontal direction of the carrying frame of the carrying basket and connected to the transport driver, the front end of the transporting member and the first transporting Docking, the rear end of the conveying member is docked with the front end of the conveying member, and the control mechanism controls
- the transporting member is transported to the transporting member to realize the round-trip transport of the mask carrying the basket and the transporting mechanism, thereby improving the consistency between the transporting mechanism and the carrying basket.
- control mechanism further includes a second sensor, a third sensor, and a stop driver electrically connected to the control processor, the second sensor being disposed on the cavity and facing the rear end of the transport member
- the third sensor is disposed on the cavity and facing the front end of the conveying member, the stopping driver is mounted outside the cavity, and the stopping shaft of the stopping driver is sealingly extended Into the working chamber and facing the interface of the transfer member and the transport member, the stop drive drives the stop shaft to block or release the mask transported between the transport member and the transport member.
- the second sensor is used to sense whether the rear end of the transport member has a mask, and the signal is fed back to the control processor; and the third sensor is used to sense whether the storage of the mask in the carrying basket is in place, and Feeding the signal to the control processor; executing the command to control the processor through the above-mentioned stop driver, and blocking the mask transported between the transport member and the transport member, thereby docking the storage tanks carrying the basket one by one with the front end of the transport member Provide extremely superior conditions. At the same time, it also provides superior conditions for docking the storage slots of the basket one by one with the external storage devices.
- the transporting member includes a transfer wheel, a mounting shaft and a mounting bracket, the mounting bracket is coupled to the cavity, the mounting shaft is pivotally connected to the mounting bracket, and the transfer wheel is mounted on the mounting
- the support group of the carrying frame body is provided with a guiding groove in the vertical direction for the reciprocating movement of the carrying basket along the conveying wheel in a vertical direction.
- the conveying member is composed of the above-mentioned conveying wheel, the mounting shaft and the mounting bracket, so that the structure of the conveying member is simple and convenient to install. Through the above-mentioned guiding groove, the carrying basket can be moved in the vertical direction with respect to the conveying wheel, and the stratified storage of the mask in the carrying basket is realized.
- the cavity is further provided with a first gate sealed to the first delivery port and a second gate sealed to the second delivery port.
- a first gate sealed to the first delivery port and a second gate sealed to the second delivery port.
- the first and second gate valves described above it is ensured that the cavity can be operated in a vacuum.
- a surface of the first gate that seals the first conveying port is provided with a first groove and a second groove arranged in parallel from the inside to the outside, the first groove and the second groove Seals are provided on the grooves.
- the first gate has a silent closed structure, thereby providing extremely superior airtight performance to the cavity.
- the vacuuming mechanism comprises a gas pipe, a vacuum gauge, a third gate valve, a fourth gate valve, and an inflation valve.
- a vacuum generator wherein one end of the gas pipe is connected to the vacuum gauge and the cavity in turn, and the other end of the gas pipe is respectively connected to one end of the third gate valve and the fourth wide valve, and the other end of the third gate valve
- the gas pipe is connected to the vacuum generator, and the other end of the fourth gate valve is respectively connected to the inflator and the vacuum generator through the gas pipe.
- the lifting carrier includes two inverted plates, a guiding block, a limiting roller, a fixing member and a bottom plate connected to the output shaft of the lifting drive, and the two side plates are respectively symmetrically fixedly connected to the bottom plate
- the two sides of the guide block are fixedly connected to the front end of the bottom plate, and the two sides of the guide block are parallel to each other and are provided with rolling sliding grooves.
- a slide roller is pivotally connected to the lower end of the fixing member, and a stopper roller is slidably connected to the two sides of the upper end of the fixing member, and the sliding roller is slidably engaged in the rolling sliding groove, and the bearing basket is
- the front end of the carrying basket is provided with a sliding fixing groove for accommodating the stopping roller, and the rear end of the carrying basket is in contact with the limiting roller, and the front end of the carrying basket is in contact with the fixing member.
- the lifting carrier is composed of the above-mentioned bottom plate, the two side plates, the guiding block, the limiting roller and the fixing member, so that the lifting carrier has a compact structure and reliable operation.
- the top surfaces of the two side plates are provided with guide positioning rollers arranged in a gap and centered on the same straight line, and the opposite surfaces of the two side plates are arranged with thousands of gaps arranged and the center is located at the same a conveying roller on a straight line, the guiding positioning roller is disposed perpendicular to the conveying roller, and the guiding positioning roller, the conveying roller, the limiting roller and the guiding block form a positioning cavity for positioning the carrying basket, the bearing The basket is received in the positioning cavity, and the stopping roller of the fixing member is received on the sliding fixing groove of the carrying basket and is in contact with the front end of the carrying basket.
- the carrier basket can be reliably fixed to the lifting/supporting frame when the stopper roller of the fixing member is housed in the sliding fixing groove of the carrying basket.
- the retaining roller of the fixing member is disengaged from the sliding fixing groove of the carrying basket, the carrying basket is driven to move toward the first conveying port of the cavity, thereby realizing the conveying of the carrying basket to the next process.
- the transmission docking area of the carrying basket of the mask transport system of the present invention is docked with the transporting member of the transport mechanism, and under the control of the control mechanism and the driving mechanism of the lifting mechanism, the adjacent basket of the carrying basket is made
- the horizontal storage slots formed between the support groups are docked one by one with the transmission member, resulting from 3 ⁇ 4
- Each mask conveyed by the transport member of the transport mechanism can be stored extremely coherently in a storage slot of the carrier basket, thereby improving the continuity of transmission and storage of the mask transport system of the present invention. , thereby improving the processing efficiency of the mask and reducing the processing cost of the mask.
- the mask transmission system of the present invention can overcome the problem that the existing transmission system has difficulty in design due to the existence of two different transmission modes, and the design of the mask transmission system of the present invention is easier.
- Figure 1 is a schematic view showing the structure of a mask transport system of the present invention.
- FIG. 2a and 2b are schematic diagrams showing the state of the mask transport system shown in Fig. 1.
- FIG. 3 is a schematic structural view of a first wide door of the mask transport system shown in FIG. 1.
- Figure 4 is a cross-sectional view taken along line A A of Figure 3.
- Figure 5 is an enlarged view of a portion B in Figure 4.
- Fig. 6 is a structural schematic view showing the conveying member shown in Fig. 1 housed in a carrying frame of a carrying basket.
- Fig. 7 is a structural schematic view showing the relative position of the inside of the conveying member and the carrying frame shown in Fig. 6.
- Figure 8 is a schematic view showing the structure of the carrying basket of the mask transporting system of the present invention carried on the lifting carrier.
- Figure 9 is an enlarged view of a portion C in Figure 8.
- the mask transmission system 1 of the present invention is used for transmitting a mask 3 on a semiconductor production line, which comprises a cavity 12, a transmission mechanism, a carrying basket 11, a lifting mechanism, and a control mechanism. And vacuuming mechanism.
- the cavity 12 provides a vacuum environment for the transport and storage of the mask 3, and the transport mechanism transports the mask 3 conveyed on the production line into the carrying basket 11, the carrying basket 11 comprising a carrying frame having a hollow structure i la, the carrier frame i la is provided with at least two support groups 111, and a storage slot iI 3 for tier storage of the mask 3 is formed between the two support groups 111 adjacent in the horizontal direction, and the lifting mechanism is driven
- the tiered storage of the mask 3 in the carrying basket II is realized by the movement of the carrying basket 11 in the vertical direction, and the control mechanism controls the lifting mechanism so that the lifting mechanism can coordinately and accurately drive the carrying
- the basket 11 provides conditions for transport and stratified storage of the mask 3 delivered by the transport mechanism within the carrier basket 11, which vacuums the chamber 12 to create a vacuum environment for the chamber 12. Specifically, as follows:
- the cavity 12 has a hollow structure, and the hollow structure forms a sealed working cavity 120.
- the front end of the cavity 12 is provided with a first conveying port 121, and the cavity i2 is rearward.
- the second opening 122 is provided at the end opening.
- the cavity 12 is further provided with a first gate 123 sealing the first delivery port 121 and a first sealing port 122 Two gate valve 124.
- the surface of the first wide door 123 that seals the first conveying port 121 is provided with a first groove 1231 and a second groove which are arranged in parallel from the inside to the outside.
- a sealing member 1233 is disposed on each of the first groove 1231 and the second groove 1232.
- the first shutter 123 has a silent structure, thereby providing the chamber 12 with extremely superior airtight performance.
- the transmission mechanism includes a transmission member 131 and a transmission driver (not shown), and the transmission member i3 i is disposed in the working chamber i20 in a horizontal direction and is The transmission driver is connected, and the rear end of the transmission member 131 is docked with the second delivery port 122 of the cavity 12, that is, the height of the transmission mask 3 of the transmission member 131 and the center position of the second delivery port 122 are opposite.
- the mask 3 delivered from the module connected to the rear end of the cavity 12 is transported to the transport member 131.
- the transport mechanism is further provided with a transporting member 132, and the transporting member 132 is received in the horizontal direction in the loading basket 11 in order to enable the mask 3 in the carrying basket II to be transported to the transporting member 131.
- the front end of the transporting member 132 is docked with the first transport port 121, and the rear end of the transport member 32 is docked with the front end of the transporting member 131. That is, the transmission height of the transport member 132 to the mask 3 and the transmission height of the transport member 131 to the mask 3 are the same, both on the same horizontal plane, and the lift drive drives the carrier basket 11 along the transport member.
- the i32 direction makes a round-trip motion.
- the transporting member 132 includes a transporting wheel 1321, a mounting shaft 1322, and a mounting bracket 1323.
- the mounting bracket 1323 is coupled to the cavity 12, and the mounting shaft 1322 is mounted.
- the bracket 1323 is pivotally connected, and the conveying wheel 1321 is installed at the On the mounting shaft 1322, the support group 111 of the bearing frame 11a is provided with a guiding groove 112 for the vertical movement of the carrying basket II along the conveying wheel 1321 in the vertical direction.
- the conveying member 132 is composed of the conveying member 132 composed of the above-described conveying wheel 1321, the mounting shaft 1322 and the mounting bracket 1323, so that the structure of the conveying member 132 is simple and easy to install.
- the carrier basket II can be moved in the vertical direction with respect to the transfer wheel 1321, thereby achieving tiered storage of the mask 3 in the carrier basket 11.
- the structure of the above-mentioned transmission member 131 may be the same as that of the transmission member 132, or may be other structures. In the present embodiment, the structure of the transmission member 131 is the same as that of the transmission member 132.
- the support group I li is disposed on opposite sidewalls of the carrier frame 11a, wherein the number of the support groups ili is based on actual conditions.
- the need for flexible selection is not limited here.
- the support groups 111 are arranged in parallel at equal intervals. Specifically, the support groups 111 are equally spaced and parallel distributed in the horizontal direction and the vertical direction to facilitate installation and carrying of articles.
- the support group 111 in the horizontal direction is composed of a plurality of support members 115, and the support group 111 in the vertical direction is also composed of a plurality of support members 115, and the number of the support members 115 is according to actual needs. Selected.
- the guiding groove i I2 provides a condition for the vertical movement of the carrying basket 11 relative to the conveying member 132.
- the rear end of the carrying frame l ia is provided with a transmission port 116.
- the lifting mechanism includes a lifting drive 14 and an lifting carrier 15 .
- the lifting driver 14 is mounted outside the cavity 12 , and the output shaft 141 of the lifting driver i4 is sealed. Passing into the working chamber 120 and connecting with the lifting carrier 15, the carrying basket II is carried on the lifting carrier 15, and the lifting drive 14 drives the carrying basket 11 in the working chamber The reciprocating motion of the carrying basket U is performed in the 120.
- the reciprocating movement of the carrying basket U causes the transport port 116 to form a transport docking area (not shown) in the cavity 12, and the front end of the transporting member 131 is The transport docking area is docked.
- the lifting carrier 15 includes a first side plate 152, a second side plate 153, a guiding block 155, and a P-position roller.
- the first side plate 152 and the second inverted plate 153 are symmetrically fixedly connected to the two sides of the bottom plate 151, the limiting roller 156 is fixedly connected to the rear end of the bottom plate 151, and the guiding block 155 is fixedly connected to The front end of the bottom plate 151 is parallel to the two sides of the guide block 155 and is provided with a rolling sliding slot i550.
- the rolling sliding slot 1550 includes a fixing slot 1550a and a releasing slot 1550b communicating with each other.
- the fixing slot 1550a is The guiding block 155 is opened in the vertical direction, and the releasing groove 1550 is opened by the guiding block 155 in an acute angle with the fixing groove 1550a, and the releasing groove 1550b is located in front of the fixing groove 1550a, and the lower end of the fixing member 154 is two
- the side of the upper end of the fixing member 154 is pivotally connected with a stopping roller 1542, and the sliding roller 1541 is slidably engaged in the rolling sliding groove 1550 - the carrying basket li a sliding fixing groove 114 accommodating the stopping roller 1542, a rear end of the carrying basket 11 is in contact with the limiting roller 156, and a front end of the carrying basket U is in contact with the fixing member 154.
- the lifting carrier 15 is composed of the above-mentioned bottom plate 151, the first side plate 152, the second side plate 153, the guiding block 155, the limiting roller 156 and the fixing member 154, so that the lifting carrier 15 has a compact structure and is reliable in operation. More specifically, the top surfaces of the first inverted plate 52 and the second side plate 153 are provided with guide positioning rollers 157 which are arranged in a gap and are centered on the same straight line, the first side plate 152 and the second inverted plate 153. The opposite faces are respectively provided with a conveying roller 158 which is arranged in a gap and has a center on the same straight line.
- the guiding positioning roller 157 is disposed perpendicular to the conveying roller 158, and the guiding positioning roller 157, the conveying roller 158, The positioning roller 156 and the guiding block 155 form a positioning cavity (not shown) for positioning the carrying basket 11, the carrying basket 11 is received in the positioning cavity, and the stopping roller 1542 of the fixing member 154 is received in The sliding fixing groove l i4 of the carrying basket 11 is in contact with the front end of the carrying basket 11 to fix the supporting basket II on the lifting frame 15.
- the retaining roller 1542 is received in the sliding fixing groove 114 of the carrying basket 11 so that the carrying basket 11 can be reliably fixed to the lifting carrier 15.
- the stopping roller 1542 of the fixing member 154 is disengaged from the sliding fixing groove 114 of the carrying basket 11
- the carrier basket 11 is driven to move toward the first conveying port 121 of the cavity 12, from the implementation of the carrying basket 11 to the front end of the cavity 12. Conveyed inside the connected module.
- the control mechanism includes a control processor and a first sensor 193, and the first sensor 193 is respectively mounted on the cavity 12 and facing the front end of the transmission member 131.
- the first sensor 193 is electrically connected to the control processor
- the control processor is electrically connected to the elevation driver 14, and the first sensor 193 detects that the front end of the transmission member 131 has a mask 3 and transmits a signal.
- the control processor controls the lifting drive 14 to drive the storage slot 113 of the carrying basket II to interface with the front end of the transmitting member 131 one by one. Wherein, in order to detect the mask conveyed by the transport member 132.
- the control mechanism is also designed with a second sensor. 192, a third sensor 191 and a stop driver 18, the second sensor 192 is disposed on the cavity i2 and facing the rear end of the transporting member 132, and the third sensor 19i is disposed in the cavity 12 is opposite to the front end of the conveying member 132, the stopping actuator 18 is mounted outside the cavity 12, and the stopping shaft 181 of the stopping actuator 18 is sealingly inserted into the working cavity
- the inside of the 120 is opposed to the interface between the conveying member 132 and the conveying member 131, and the stopping driver i8 drives the stopping shaft 181 to block or translate the mask 3 conveyed between the conveying member 132 and the conveying member 131.
- the second sensor 192 described above it is used to sense whether the rear end of the transport member 132 has the mask 3, and the signal is fed back to the control processor; through the third sensor 191 described above, the sensing mask 3 is used in the carrying basket 11 Whether the storage is in place, and the signal is fed back to the control processor; the command to control the processor is executed by the above-described stop driver 18, and the mask 3 transported between the transport member 132 and the transport member 131 is blocked, from the carrying basket
- the storage slots 113 of 11 are interfaced one by one with the front end of the transport member 131 to provide extremely superior conditions. At the same time, superior conditions are provided for docking the storage slots 113 of the carrying basket 11 one by one with the storage devices of the modules connected to the rear end of the cavity 12.
- the evacuation mechanism is coupled to the cavity 12 and provides a vacuum environment for the working chamber 120.
- the vacuuming mechanism includes a gas pipe 161, a vacuum gauge 162, a third gate valve 163, a fourth gate valve 164, an inflator, and a vacuum generator, and one end of the gas pipe 161 is sequentially connected with the vacuum gauge! 62 and The cavity 12, the other end of the gas pipe 161 is respectively connected to the third gate valve 163 and the fourth One end of the gate valve 164 is connected, the other end of the third gate valve 163 is connected to the vacuum generator through the air pipe 161, and the other end of the fourth gate valve 164 is respectively connected to the inflator and the vacuum through the air pipe 161. Generator connection.
- a vacuuming mechanism is formed in the cavity 12 by the vacuuming mechanism composed of the above-mentioned air pipe 161, vacuum gauge 162, third gate valve 163, fourth gate valve 164, inflator, and vacuum generator, and the mask 3 and the cavity 12 are ensured. Cleanliness.
- the vacuum generator and the inflator described above the structure is well known to those skilled in the art, and the structure thereof will not be described.
- the vacuuming mechanism is turned on, and the fourth gate valve 164 is opened, so that the vacuuming mechanism pre-vacuates the cavity 12, and then the fourth gate valve 164 is closed, and the third wide valve 163 is opened at the same time, so that the vacuuming mechanism is further applied to the cavity 12.
- the second wide valve 124 is opened at this time, providing conditions for the rear module to transport the mask 3 therein to the transport member 131 of the transport mechanism.
- the transport member 131 rotates in the direction indicated by the arrow in the transport member 131 of Fig. 2a, and the mask 3 on the transport member 131 is carried to the carrying basket.
- the transport member 132 in II is transported.
- the working upper actuator 18 drives the stop shaft 181 to rise, thereby blocking the mask 3 on the front end of the transport member 131 from continuing to be transported to the transport member 132, and causing the transport member 131 under the friction of the mask 3 and the transport member 131. Stop turning.
- the control processor controls the lifting drive 14 of the lifting mechanism to operate, and the working lifting drive 14 drives the uppermost storage slot 113 of the carrying basket li at the same transmission height as the mask 3 conveyed by the transmitting member 131.
- the control processor controls the operation of the stopper driver 18, and the working stopper driver 18 drives the stopper shaft 18i to descend, so that the mask 3 on the transmission member 131 can continue to be conveyed to the conveying member 132 due to the conveying member.
- the transfer height of the mask member 132 to the mask member 3 is the same, so that the transport member 132 and the uppermost storage slot 113 of the carrier basket 11 are also at the same transfer height, so that the mask can be continuously and continuously rotated by the transport member 132.
- 3 is stored in the carrying basket 11.
- the control processor stops the transport member 132 from rotating.
- the control processor controls the lifting drive 14 of the lifting mechanism, and the lifting drive 14 drives the carrying basket 11 to rise a center distance formed by the centers of the two adjacent storage slots 113.
- the storage slot 113 adjacent to the uppermost storage slot 113 is located at the same transmission height as the transporting member 131, and then the flow is the same as that of the rear module to the transport basket 3 of the carrying basket II, and details are not described herein again.
- the second gate valve 124 is closed, and the fourth gate valve 164 is opened to operate the inflator of the vacuuming mechanism, and the working inflator is inflated into the cavity 12 until the cavity
- the first wide door 123 is opened at this time.
- the fixing member 154 of the lifting carrier 15 is pushed open, so that the sliding roller 1541 of the fixing member 154 is slid to the releasing groove 1550 of the rolling sliding groove 1550, so that the angle between the fixing member 154 and the fixing groove 1550a is an acute angle.
- the driving basket 11 is transported to the front module, and the mask 3 on the carrying basket 11 is processed by the front module.
- the first gate 123 is closed.
- the carrier module II containing the mask 3 is transported by the front module into the lifting carrier 15 of the mask transport system 1 when the carrier basket 11 is inserted into the cavity 12 by the front module.
- the first gate 123 of the cavity 12 is transported and approached, the first gate 123 is opened to provide conditions for the carrier basket 11 to be transported to the lifting and lowering frame 15 in the cavity 12, and the control processor controls the lifting.
- the lifting drive 14 of the mechanism is such that the positioning chamber of the lifting carriage i5 connected to the lifting drive 14 is at the same level as the lower surface of the carrying basket 11.
- the front module transports the carrier basket 11 into the positioning cavity of the lifting carrier 15, and the carrier basket 11 transported into the positioning cavity is guided by the positioning roller 157 and the conveying roller 158 of the lifting carrier 15.
- the carrier roller II is transported and fixed by the limit roller 156 and the fixing member 154, and the first wide door 123 is closed.
- the vacuuming mechanism is turned on, and the fourth gate valve 164 is opened, so that the vacuuming mechanism pre-vacuates the cavity 12, then closes the fourth gate valve 164, and simultaneously opens the third gate valve 163, so that the vacuuming mechanism performs the cavity 12 on the cavity 12.
- the vacuum is measured, and the air pressure of the cavity 12 is detected by the vacuum ⁇ 162, and the third gate valve 163 is adjusted according to the detection result of the vacuum gauge 162, so that the vacuum environment in the cavity 12 reaches the preset requirement.
- the second gate valve 124 is opened at this time, The mask 3 in the carrying basket 11 is transported to the storage device of the rear module to provide conditions. The following is a detailed description of the process of transporting the mask in the basket 1 !
- the control processor controls the operation of the transport mechanism, the drive transport member 132 is actuated in the direction indicated by the arrow in the transport member 132 of Fig. 2b, and the actuated transport member 132 will carry the mask in the basket 11. 3 to the transport member 131
- the transmission member 131 transports the mask to the rear module.
- the control processor at this time controls according to the signal sensed by the second sensor 192.
- the stop actuator 18 operates and the active stop actuator 18 drives the stop shaft 18i to rise and blocks the mask 3 on the rear end of the transfer member 132 from continuing to the front end of the transport member 131.
- the module starts to operate, so that its storage device is ready to receive the mask 3 delivered by the transport unit i3 i .
- the control processor controls the operation of the mask stopper 18, and the driving stop shaft 181 is lowered, so that the transfer member 132 transports the mask 3 thereon to the transport member 131, and then the transport member 131 The mask 3 is transported to a storage device of the rear module for storage.
- the control processor controls the lifting drive 14 to operate, and the actuating lifting drive 14 drives the carrying basket 11 to descend, and causes the next storage slot 1 13 to
- the transporting member 132 is at the same transmission height, and the flow down is the same as that of the above-mentioned carrying basket II to the rear module transporting mask 3, and details are not described herein again.
- the operation process of the above-mentioned carrying basket i i to the rear module conveying mask 3 may also be as follows:
- the rear module works, so that its storage device is configured to receive the mask 3 delivered by the transport member 131.
- the control processor controls the transport member 132 of the transport mechanism to rotate in the direction indicated by the arrow in the transport member 132 of Figure 2b, and the rotating transport member 132 carries the mask 3 in the basket II to the transport member.
- the mask 3 is transported and stored by the transport member 131 into the storage device of the rear module.
- the rear module adjusts its storage device, so that the storage device is ready to receive the mask 3 delivered by the transport member 131, and the control processor controls the lifting and lowering of the lifting mechanism.
- the driver 14 is actuated, and the actuating lift driver 14 causes the next mask 3 carrying the basket li to be at the same transfer height as the transport member i32.
- the transport member 132 can move the mask 3 backward.
- the module is transported, wherein the mask on the carrying basket li is the same as that described above, and will not be described here. It can be seen that the transport of the mask 3 in the carrying basket 11 to the rear module does not require the blocking of the mask 3 by the stop driver 18 and the detection and counteraction of the mask 3 by the second sensor 192. Therefore, the mask 3 described above is more efficient in transmission and more cost effective.
- the horizontal storage slots 113 formed by the adjacent support groups 111 of the carrying basket n are docked one by one with the transmitting member 131, and are transmitted from 3 ⁇ 4.
- Each of the masks 3 transported by the transmission member 131 of the mechanism can be stored extremely uniformly in a storage slot i I 3 of the carrier basket II, thereby improving the transmission of the mask 3 of the mask transport system 1 of the present invention.
- the consistency with the storage further improves the processing efficiency of the mask 3 and reduces the processing cost of the mask 3.
- the mask transport system 1 of the present invention can overcome the problem that the existing transmission system has an increased design difficulty due to the existence of two different transmission modes, and makes the design of the mask transport system 1 of the present invention easier.
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Description
掩膜传输系统
本发明涉及一种掩膜传输系统, 尤其涉及一种能提高半导体行业生产线上 的掩膜传输连贯性以及与外界模块的连贯性的掩膜传输系统。
随着社会的不断进步, 经济的不断发展, 以及科学技术的不断提高, 使企 业对流水线作业中的各设备之间的工作连贯性提出新的要求。 这是由于各设备 间的工作连贯性在艮大程度上影响到流水线作业的生产效率和成本。 相应地, 在半导体行业的掩膜生产系统中, 也遇到相同类型的问题, 因此, 如何提高各 设备间的工作连贯性已成为企业急需解决的问题之一。
目前, 现有的用于对掩膜进行传输的传输系统的工作流程如下: 先是传输 系统将生产线上的掩膜以滚动传输方式被输送到掩膜承载设备的附近。 当输送 到掩膜承载设备附近后, 此时的传输系统的机械手作动, 将输送来的掩膜拾取 并存储于掩膜承载设备内, 从 ^完成一个掩膜的一个存储流程, 当要存储下一 个掩膜时, 重复上述的流程即可实现, 直接掩膜承载设备被存满为止。
然而, 上述的用于传输掩膜的传输系统在掩膜由生产线传输到掩膜承载设 备内, 此过程会涉及到传输系统的两种不同的传输方式, 第一种是以滚动传输 方式把生产线上的掩膜往掩膜承载设备附近输送, 第二种是以机械手传输方式 把掩膜承载设备附近的掩膜进行分层地存储于掩膜承载设备内, 这一方面使得 现有的传输系统在掩膜的输送和存储过程的连贯性极差, 从而降低了对掩膜的 处理效率, 因 ^增加了处理成本; 另一方面, 由于现有的传输系统存在两种不 同的传输方式, 故增加了现有的传输系统的设计难度。 发明内容
本发明的目的在于提供一种掩膜传输系统, 该掩膜传输系统一方面能最大
限度地提高掩膜传输和存储的连贯性, 从而提高了掩膜的处理效率, 因 降低 掩膜的处理成本; 另一方面能克服现有的传输系统因存在两种不同的传输方式 而造成设计难度加大的问题, 使本发明掩膜传输系统的设计更易。
为实现上述目的, 本发明提供了一种掩膜传输系统, 适用于对半导体生产 线上的掩膜进行传输, 其包括腔体、 传输机构、 承载篮子、 升降机构、 控制机 构及抽真空机构。 所述腔体呈中空结构, 所述中空结构形成密封的工作腔, 所 述腔体的前端开设有第一输送口, 所述腔体的后端开设有第二输送口。 所述传 输机构包括传输件及传输驱动器, 所述传输件沿水平方向设置于所述工作腔内 并与所述传输驱动器连接, 所述传输件的后端与所述腔体的第二输送口对接。 所述承载篮子包括呈中空结构的承载框体, 所述承载框体内相对的两侧壁上分 别设置有至少两个支撑组, 所述支撑组呈等间距的平行分布, 所述支撑组由沿 同一水平面设置的若千支撑件组成, 相邻的支撑组之间形成呈水平的存储槽, 每个掩膜插放于一个存储槽内, 所述承载框体的后端开设有传输口。 所述升降 机构包括升降驱动器及升降承载架, 所述升降驱动器安装于所述腔体外, 所述 升降驱动器的输出轴呈密封地穿入所述工作腔内并与所述升降承载架连接, 所 述工作腔内做竖直方向的往返运动, 所述承载篮子的往返运动使所述传输口在 所述腔体内形成传输对接区, 所述传输件的前端与所述传输对接区对接, 所述 承载篮子的前端朝向所述第一输送口。 所述控制机构包括控制处理器及第一传 感器, 所述第一传感器安装于所述腔体上且正对所述传输件的前端, 所述第一 传感器与所述控制处理器电连接, 所述控制处理器与所述升降驱动器电连接, 所述第一传感器检测到所述传输件的前端具有掩膜并发送信号给控制处理器, 所述控制处理器控制所述升降驱动器驱动所述承载篮子的存储槽逐一与所述传 输件的前端对接。 所述抽真空机构与所述腔体连接并为所述工作腔提供真空环 境。
较佳地, 所述传输机构还包括传送件, 所述传送件沿水平方向收容于所述 承载篮子的承载框体内并与所述传输驱动器连接, 所述传送件的前端与所述第 一输送口对接, 所述传送件的后端与所述传输件的前端对接, 所述控制机构控
通过上述的传送件, 把存储于承载篮子内的掩膜往传输件处输送, 实现承载篮 子与传输机构的掩膜的往返输送, 因 提.高了传输机构和承载篮子之间的连贯 性。 具体地, 所述控制机构还包括与控制处理器电连接的第二传感器、 第三传 感器及止动驱动器, 所述第二传感器设置于所述腔体上并与所述传送件的后端 正对, 所述第三传感器设置于所述腔体上并与所述传送件的前端正对, 所述止 动驱动器安装于所述腔体外, 且所述止动驱动器的止动轴呈密封地伸入所述工 作腔内并与传送件和传输件的对接处正对, 所述止动驱动器驱动止动轴阻挡或 释放于传送件和传输件之间输送的掩膜。 通过上述的第二传感器, 用于感应传 送件的后端是否具有掩膜, 并将信号反馈于控制处理器; 通过上述的第三传感 器, 用于感应掩膜在承载篮子的存储是否到位, 并将信号反馈于控制处理器; 通过上述的止动驱动器去执行控制处理器的命令, 并阻挡传送件和传输件之间 输送的掩膜, 从而为承载篮子的存储槽逐一与传输件的前端对接提供极其优越 的条件。 同时也为承载篮子的存储槽逐一与外界的存储设备对接提供优越的条 件。 更具体地, 所述传送件包括传送轮、 安装轴及安装支架, 所述安装支架与 所述腔体连接, 所述安装轴与所述安装支架枢接, 所述传送轮安装在所述安装 轴上, 所述承载框体的支撑组沿竖直方向开设有供所述承载篮子沿所述传送轮 做竖直方向往返运动的导向槽。 通过由上述的传送轮、 安装轴及安装支架组成 的传送件, 使得传送件的结构简单, 且安装方便。 通过上述的导向槽, 使得承 载篮子能相对于传送轮作竖直方向的移动, 从^实现承载篮子内的掩膜的分层 存储。
较佳地, 所述腔体上还设置有对所述第一输送口密封的第一闸门、 对所述 第二输送口进行密封的第二闸阀。 通过上述的第一闸门和第二闸阀, 保证腔体 能处于真空中工作。 具体地, 所述第一闸 Π的对所述第一输送口进行密封的表 面由内至外开设有呈平行排列的第一凹槽及第二凹槽, 所述第一凹槽和第二凹 槽上均设有密封件。 通过上述的第一凹槽, 第二凹槽和密封件, 使第一闸门具 有默封闭结构, 从而为腔体提供极其优越的气密性能。
较佳地, 所述抽真空机构包括气管、 真空计《 第三闸阀、 第四闸阀、 充气
装置及真空产生器, 所述气管的一端依次连接有所述真空计和腔体, 所述气管 的另一端分别与第三闸阀和第四阔阀的一端连接, 所述第三闸阀的另一端通过 所述气管与所述真空产生器连接, 所述第四闸阀的另一端通过所述气管分别与 所述充气装置和真空产生器连接。 通过由上述的气管、 真空计、 第三闸阀、 第 四闸阀、 充气装置及真空产生器组成的抽真空机构, 为腔体内创造真空环境, 确保掩膜和腔体的洁净度。
较佳地, 所述升降承载架包括两倒板、 导向块, 限位辊子、 固定件及与所 述升降驱动器的输出轴连接的底板, 两所述侧板分别对称地固定连接于所述底 板的两侧, 所述限位辊子固定连接于所述底板的后端, 所述导向块固定连接于 所述底板的前端, 所述导向块的两侧相互平行且开设有滾动滑动槽, 所述固定 件的下端两侧枢接有滑动辊子, 所述固定件的上端两侧抠接有止动辊子, 所述 滑动辊子滑动地的卡设于所述滾动滑动槽内, 所述承载篮子的前端开设有容置 所述止动辊子的滑动固定槽, 所述承载篮子的后端与所述限位辊子抵触, 所述 承载篮子的前端与所述固定件抵触。 通过由上述的底板、 两侧板、 导向块、 限 位辊子及固定件组成的升降承载架, 使得升降承载架的结构紧凑, 工作可靠。 更具体地, 两所述侧板的顶面均设置有若千呈间隙排列且中心位于同一直线上 的导向定位辊子, 两所述侧板相对面均设置有若千呈间隙排列且中心位于同一 直线上的传送辊子, 所述导向定位辊子与所述传送辊子呈垂直设置, 且所述导 向定位辊子、 传送辊子、 限位辊子及导向块形成供所述承载篮子定位的定位腔, 所述承载篮子收容于定位腔内, 且所述固定件的止动辊子收容于所述承载篮子 的滑动固定槽上并与所述承载篮子的前端抵触。 通过上述的导向定位辊子、 传 送辊子、 限位辊子及固定件, 在固定件的止动辊子收容于承载篮子的滑动固定 槽内时使得承载篮子能可靠地固定于升降 ·承载架上。 同时, 在固定件的止动辊 子脱离于承载篮子的滑动固定槽时驱使承载篮子朝腔体的第一输送口处移动, 从而实现承载篮子往下道工序内输送。
与现有技术相比, 由于本发明掩膜传输系统的承载篮子的传输对接区与传 输机构的传输件对接, 且在控制机构的控制下和升降机构的驱动下, 使得承载 篮子的由相邻支撑组之间形成的呈水平的存储槽逐一与传输件对接, 从 ¾使得
被传输机构的传输件所输送来的每个掩膜均能极其连贯地存储于承载篮子的一 个存储槽内, 因而提高了本发明的掩膜传输系统的对掩膜的传输和存储的连贯 性, 进而提高了掩膜的处理效率并降低掩膜的处理成本。 同时, 本发明的掩膜 传输系统能克服现有的传输系统因存在两种不同的传输方式而造成设计难度加 大的问题, 使本发明掩膜传输系统的设计更易。 附图说明
图 I是本发明掩膜传输系统的结构示意图。
图 2a和图 2b是图 I所示的掩膜传输系统的状态示意图。
图 3是图 1所示的掩膜传输系统的第一阔门的结构示意图。
图 4 沿图 3中 A A线的剖视图。
图 5是图 4中 B部分的放大图。
图 6是图 1所示的传送件收容于承载篮子的承载框体内的结构示意图。 图 7是图 6所示的传送件与承载框体的内部相对位置的结构示意图。
图 8是本发明掩膜传输系统的承载篮子承载在升降承载架上的结构示意图。 图 9是图 8中 C部分的放大图。
为了详细说明本发明的技术内容、 构造特征, 以下结合实施方式并配合附 图作进一步说明。
请参阅图 1、 图 6和图 8, 本发明的掩膜传输系统 1用于对半导体生产线上 的掩膜 3进行传输, 其包括腔体 12、 传输机构、 承载篮子 11、 升降机构, 控制 机构及抽真空机构。 所述腔体 12为掩膜 3的传输和存储提供真空环境, 所述传 输机构将生产线上输送来的掩膜 3往承载篮子 11 内输送, 所述承载篮子 11 包 括呈中空结构的承载框体 i la, 该承载框体 i la上设置有至少两个支撑组 111 , 沿水平方向相邻的两支撑组 111之间形成供掩膜 3分层存储的存储槽 iI 3 , 所述 升降机构驱动承载篮子 11沿竖直方向的移动而实现掩膜 3于承载篮子 I I 内的 分层存储, 所述控制机构控制升降机构, 使升降机构能协调并精准地驱动承载
篮子 11 ,为传输机构所输送来的掩膜 3于承载篮子 11内的传输和分层存储提供 条件, 所述抽真空机构将腔体 12进行 '抽真空, 为腔体 12创造真空环境。 具体 地, 如下:
请参阅图 1至图 2b, 所述腔体 12呈中空结构, 所述中空结构形成密封的工 作腔 120, 所述腔体 12的前端开设有第一输送口 121 , 所述腔体 i2的后端开设 有第二输送口 122。 为了能在腔体 12内创造更优越的真空环境, 故所述腔体 12 还设置有对所述第一输送口 121密封的第一闸门 123、对所述第二输送口 122进 行密封的第二闸阀 124。 结合图 3至图 5 , 具体地, 所述第一阔门 123的对所述 第一输送口 121进行密封的表面由内至外开设有呈平行排列的第一凹槽 1231及 第二凹槽 1232, 所述第一凹槽 1231和第二凹槽 1232上均设有密封件 1233。 通 过上述的第一凹槽 1231、 第二凹槽 1232和密封件 1233, 使第一闸门 123具有 默封闭结构, 从而为腔体 12提供极其优越的气密性能。
请参阅图 1至图 2b和图 6,所述传输机构包括传输件 131及传输驱动器(图 中未示), 所述传输件 i3 i沿水平方向设置于所述工作腔 i20内并与所述传输驱 动器连接, 所述传输件 131的后端与所述腔体 12的第二输送口 122对接, 即是 传输件 131的传输掩膜 3的高度和第二输送口 122的正中位置正对以便于与腔 体 12后端连接的模块输送来的掩膜 3往传输件 131处输送。 其中, 为了使承载 篮子 I I 内的掩膜 3能往传输件 131处输送,故所述传输机构还设有传送件 132, 所述传送件 132沿水平方向收容于所述^^载篮子 11的承载框体 l ia内并与所述 传输驱动器连接, 所述传送件 132的前端与所述第一输送口 121对接, 所述传 送件 !32的后端与所述传输件 131的前端对接, 即是传送件 132对掩膜 3的传 输高度和传输件 131对掩膜 3的传输高度是相同的, 均位于同一水平面上, 所 述升降驱动器驱动所述承载篮子 11 沿垂直于所述传送件 i32 方向做往返的运 动。 通过上述的传送件 132, 把存储于承载篮子 11 内掩膜 3往传输件 131处输 送, 实现承载篮子 I I与传输机构的掩膜 3的往返输送, 因 提高了传输机构和 承载篮子 11之间的连贯性。 结合图 7和图 8, 具体地, 所述传送件 132包括传 送轮 1321、 安装轴 1322及安装支架 1323 , 所述安装支架 1323与所述腔体 12 连接, 所述安装轴 1322与所述安装.支架 1323枢接, 所述.传送轮 1321安装在所
述安装軸 1322上, 所述承载框体 11a的支撑组 111沿竖直方向开设有供所述承 载篮子 I I沿所述传送轮 1321做竖直方向往返运动的导向槽 112。通过由上述的 传送轮 1321、安装轴 1322及安装支架 1323组成的传送件 132,使得传送件 132 的结构简单, 且安装方便。 通过上述的导向槽 112 , 使得承载篮子 I I能相对于 传送轮 1321作竖直方向的移动, 从而实现承载篮子 11内的掩膜 3的分层存储。 值得注意者, 上述的传输件 131 的结构可以采用与传送件 132—样的结构, 也 可以是其它的结构, 而在本实施例中, 传输件 131 的结构是和传送件 132的结 构一样。
请参阅图 1至图 2b、 图 6和图 7, 上述的支撑组 I li是设置于所述承载框 体 11a内相对的两侧壁上,其中, 所述支撑组 i l i的个数是根据实际的需要 ¾灵 活地选择的, 在此不对其进行限制。 所述支撑组 111 呈等间距的平行分布, 具 体地, 所述支撑组 111 沿水平方向和竖直方向均是呈等间距且平行分布的, 以 便于安装和承载物件。沿水平方向的所述支撑组 111由若千支撑件 115组成, 沿 竖直方向的所述支撑组 i ll也是由若千支撑件 115组成,该支撑件 115的个数是 根据实际所需而选择的。 且沿水平方向相邻的支撑组 i l l 之间形成上述的存储 槽 113 , 每个掩膜 3插放于一个存储槽 113内; ¾沿竖直方向相邻的支撑组 1 U 之间形成上述的导向槽 i I2, 该导向槽 112为承载篮子 11相对于传送件 132作 竖直方向移动提供条件。 同时, 所述承载框体 l ia的后端开设有传输口 116。
请参阅图 1至图 2b和图 8,所述升降机构包括升降驱动器 14及升降承载架 15 ,所述升降驱动器 14安装于所述腔体 12外,所述升降驱动器 i4的输出轴 141 呈密封地穿入所述工作腔 120内并与所述升降承载架 15连接,所述承载篮子 I I 承载于所述升降承载架 15上, 所述升降驱动器 14驱动所述承载篮子 11在所述 工作腔 120内做竖直方向的往返运动, 所述承载篮子 U的往返运动使所述传输 口 116在所述腔体 12内形成传输对接区 (图中未标识), 所述传输件 131 的前 端与所述传输对接区对接, 具体地, 是传输件 131的前端与承载篮子 11的存储 槽 113逐一对接以使传输件 131把每个掩膜 3存储于一个存储槽 U3内, ¾所 述承载篮子 I I的前端朝向所述第一输送口 121。 结合图 9, 更具体, 如下: 所述升降承载架 15包括第一侧板 152、 第二侧板 153、 导向块 155、 P艮位辊
子 156、 固定件 154及与所述升降驱动器 14的输出轴 141连接的底板 151。 第 一侧板 152、 第二倒板 153分别对称地固定连接于所述底板 151的两侧, 所述限 位辊子 156固定连接于所述底板 151的后端, 所述导向块 155固定连接于所述 底板 151的前端, 所述导向块 155的两侧相互平行且开设有滚动滑动槽 i550, 该滾动滑动槽 1550包括相互连通的固定槽 1550a和释放槽 1550b, 所述固定槽 1550a是由导向块 155沿竖直方向开设的, 而释放槽 1550 是由导向块 155沿与 固定槽 1550a呈锐角的方向开设的,且释放槽 1550b位于固定槽 1550a的前方, 所述固定件 154的下端两侧枢接有滑动辊子 1541, 所述固定件 154的上端两侧 枢接有止动辊子 1542,所述滑动辊子 1541滑动地的卡设于所述滚动滑动槽 1550 内 -, 所述承载篮子 l i的前端开设有容置所述止动辊子 1542的滑动固定槽 114, 所述承载篮子 11的后端与所述限位辊子 156抵触, 所述承载篮子 U 的前端与 所述固定件 154抵触,具体地,当固定件 154的滑动辊子 1541滑动到固定槽 1550a 的末端, 此时的固定件 154的止动辊子 1542收容于承载篮子 I I的滑动固定槽 114内并与承载篮子 11的前端抵触, 从 实现承载篮子 I I在升降承载架 15上 的固定; 当固定件 154的滑动辊子 1541滑动到释放槽 1550b的末端且使固定件 154与固定槽 1550a之间形成夹角为锐角时,此时的固定件 154的止动辊子 1542 脱离承载篮子 U的滑动固定槽 114, 使得承载篮子 I I可沿升降承载架 15上滑 动。 通过由上述的底板 151 , 第一侧板 152、 第二侧板 153、 导向块 155、 限位 辊子 156及固定件 154组成的升降承载架 15 , 使得升降承载架 15的结构紧凑, 工作可靠。 更具体地, 第一倒板 !52和第二侧板 153的顶面均设置有若千呈间 隙排列且中心位于同一直线上的导向定位辊子 157, 第一侧板 152和第二倒板 153的相对面均设置有若千呈间隙排列且中心位于同一直线上的传送辊子 158 , 所述导向定位辊子 157与所述传送辊子 158呈垂直设置, 且所述导向定位辊子 157、传送辊子 158、 限位辊子 156及导向块 155形成供所述承载篮子 11定位的 定位腔(图中未标识), 所述承载篮子 11 收容于定位腔内, 且所述固定件 154 的止动辊子 1542收容于所述承载篮子 11的滑动固定槽 l i4上并与所述承载篮 子 11的前端抵触, 实现对承载篮子 I I在升降承载架 15上的固定。 通过上述的 导向定位辊子 157、 传送辊子 158、 限位辊子 156及固定件 154, 在固定件 !54
的止动辊子 1542收容于承载篮子 11的滑动固定槽 114内时使得承载篮子 11能 可靠地固定于升降承载架 15上。 同时, 在固定件 154的止动辊子 1542脱离于 承载篮子 11的滑动固定槽 114时驱使承载篮子 11朝腔体 12的第一输送口 121 处移动, 从 实现承载篮子 11往与腔体 12前端连接的模块内输送。
请参阅图 I 至图 2b, 所述控制机构包括控制处理器及第一传感器 193, 所 述第一传感器 193分别地安装于所述腔体 12上且正对所述传输件 131的前端, 所述第一传感器 193 与所述控制处理器电连接, 所述控制处理器与所述升降驱 动器 14电连接, 所述第一传感器 193检测到所述传输件 131的前端具有掩膜 3 并发送信号给控制处理器, 所述控制处理器控制所述升降驱动器 14驱动所述承 载篮子 I I的存储槽 113逐一与所述传输件 131的前端对接。 其中, 为检测传送 件 132所输送的掩膜. 3在承载篮子 I I 内是否到位, 以及为检测传送件 132往传 输件 131输送的掩膜 3位置, 故所述控制机构还设计有第二传感器 192、 第三传 感器 191及止动驱动器 18,所述第二传感器 192设置于所述腔体 i2上并与所述 传送件 132的后端正对, 所述第三传感器 19i设置于所述腔体 12上并与所述传 送件 132的前端正对, 所述止动驱动器 18安装于所述腔体 12外, 且所述止动 驱动器 18的止动轴 181呈密封地伸入所述工作腔 120内并与传送件 132和传输 件 131的对接处正对, 所述止动驱动器 i8驱动止动轴 181阻挡或译放于传送件 132和传输件 131之间输送的掩膜 3。 通过上述的第二传感器 192, 用于感应传 送件 132的后端是否具有掩膜 3 , 并将信号反馈于控制处理器; 通过上述的第三 传感器 191 , 用于感应掩膜 3在承载篮子 11的存储是否到位, 并将信号反馈于 控制处理器; 通过上述的止动驱动器 18去执行控制处理器的命令, 并阻挡传送 件 132和传输件 131之间输送的掩膜 3, 从 为承载篮子 11的存储槽 113逐一 与传输件 131的前端对接提供极其优越的条件。 同时也为承载篮子 11的存储槽 113逐一和与腔体 12后端连接的模块的存储设备对接提供优越的条件。
参阅图 I至图 2b, 所述抽真空机构与所述腔体 12连接并为所述工作腔 120 提供真空环境。 具体地, 所述.抽真空机构包括气管 161、 真空计 162、 第三闸阀 163 , 第四闸阀 164、 充气装置及真空产生器, 所述气管 161 的一端依次连接有 所述真空计 !62和腔体 12, 所述气管 161的另一端分别与第三闸阀 163和第四
闸阀 164的一端连接, 所述第三闸阀 163的另一端通过所述气管 161与所述真 空产生器连接, 所述第四闸阀 164的另一端通过所述气管 161分别与所述充气 装置和真空产生器连接。 通过由上述的气管 161、 真空计 162、 第三闸阀 163 , 第四闸阀 164、 充气装置及真空产生器组成的抽真空机构, 为腔体 12内创造真 空环境, 确保掩膜 3和腔体 12的洁净度。 对于上述的真空产生器及充气装置, 其结构均是本领域普通技术人员所熟知, 故不对其结构进行描述。
结合附图, 对本发明的安装在前后模块之间的掩膜传输系统 i 的工作原理 作详细的说明。 开启抽真空机构, 并打开第四闸阀 164, 使抽真空机构对腔体 12进行前期抽真空, 然后再关闭第四闸阀 164, 同时打开第三阔阀 163 , 使抽真 空机构再对腔体 12进行 ·后期抽真空, 并由真空 ϋ· 162对腔体 12的气压进行实 时的检测, 根据真空 ϋ· 162的检测结果去调节第三闸阀 163 , 使腔体 12内的真 空环境达到预设的要求。 当腔体 12与后模块内的真空均达到要求时, 此时打开 第二阔阀 124,为后模块将其内的掩膜 3往传输机构的传输件 131处输送提供条 件。 当后模块的掩膜 3被输送到传输件 131处时, 此时的传输件 131便沿图 2a 中传输件 131 内箭头所指的方向转动, 把传输件 131上的掩膜 3往承载篮子 I I 内的传送件 132处输送。 当掩膜 3被输送到传输件 131的前端并被第一传感器 193所感应时, 此时的第一传感器 ] 193便将该信号反馈于控制处理器, 由控制处 理器控制止动驱动器 18工作, 工作的上动驱动器 18便驱动止动轴 181上升, 从而阻挡传输件 131前端上的掩膜 3继续往传送件 132处输送, 在掩膜 3和传 输件 131 的摩擦力下使传输件 131停止转动。 同时, 控制处理器控制升降机构 的升降驱动器 14工作, 工作的升降驱动器 14驱动承载篮子 li的最上的存储槽 113与传输件 131所输送的掩膜 3处于同一传输高度上。接着, 控制处理器便再 控制止动驱动器 18工作, 工作的止动驱动器 18便驱动止动轴 18i下降, 使得 传输件 131上的掩膜 3能继续地往传送件 132处输送, 由于传送件 132和传输 件 131对掩膜 3的传输高度是相同的, 故传送件 132与承载篮子 11的最上存储 槽 113也是处于同一传输高度, 因此在传送件 132的转动下便能连贯地将掩膜 3 存储于承载篮子 11内。 当传送件 132上的掩膜 3被第三传感器 191所感应后, 此时的掩膜 3正好被传输到位, 控制处理器便令传送件 132停止转动, 从而完
了对后模块所输送来的一个掩膜 3的存储。 当承载篮子 11要存储下一个掩膜. 3 时,控制处理器再控制升降机构的升降驱动器 14, 由升降驱动器 14驱动承载篮 子 11上升一个由两相邻存储槽 113的中心构成的中心距, 即是使与最上存储槽 113相邻的存储槽 113与传输件 131位于同一传输高度,接着下来的流程和上述 的后模块往承载篮子 I I输送掩膜 3的一样, 在此不再赘述。
当承载篮子 11盛装满掩膜 3后, 关闭第二闸阀 124, 并使第四闸阀 164打 开, 使抽真空机构的充气装置工作, 而工作的充气装置便向腔体 12内充气, 直 至腔体 12内气压和腔体 12外的气压相等或略高于腔体 i2外的气压时, 此时的 第一阔门 123被打开。 紧接着,推开升降承载架 15的固定件 154,使固定件 154 的滑动辊子 1541 滑动到滾动滑动槽 1550的释放槽 1550 处, 使得固定件 154 与固定槽 1550a之间夹角为锐角, 从为承载篮子 11往前模块处输送做准备。 同 时, 在升降 ·承载架 15的导向定位辊子 157和传送辊子 158的作用下, 驱动承载 篮子 11往前模块处输送, 由前模块对承载篮子 11上的掩膜 3进行湘对应的处 理。 同时, 关闭第一闸门 123。
当前模块完成对掩膜 3的处理后, 由前模块把盛装满掩膜 3的承载篮子 I I 往掩膜传输系统 1的升降承载架 15内输送, 当承载篮子 11被前模块往腔体 12 内输送并接近腔体 12的第一闸门 123处时, 此时打开第一闸门 123 , 为承载篮 子 11往腔体 12内的升降 ^f 载架 15处输送提供条件的同时, 控制处理器控制升 降机构的升降驱动器 14, 使得与升降驱动器 14连接的升降承载架 i5的定位腔 与承载篮子 11的下底面处于同一水平高度。 当处于同一传输高度时, 前模块便 将承载篮子 11输送到升降承载架 15的定位腔内, 输送到定位腔内的承载篮子 11便在升降承载架 15的导向定位辊子 157、 传送辊子 158、 限位辊子 156和固 定件 154的作用下对承载篮子 I I进行输送并固定, 并关闭第一阔门 123。接着, 开启抽真空机构, 并打开第四闸阀 164, 使抽真空机构对腔体 12进行前期抽真 空, 然后关闭第四闸阀 164, 同时打开第三闸阀 163 , 使抽真空机构对腔体 12 进行后期抽真空, 并由真空 ϋ· 162对腔体 12的气压进行实时的检测, 并根据真 空计 162的检测结果去调节第三闸阀 163, 使腔体 12内的真空环境达到预设的 要求。 当腔体 12与后模块内的真空均达到要求时, 此时打开第二闸阀 124, 为
承载篮子 11内的掩膜 3往后模块的存储设备处输送提供条件。 下面对承载篮子 1 !内的掩膜. 3往后模块处输送的过程作详细的说明:
控制处理器控制传输机构工作, 驱动传送件 132沿图 2b中传送件 132内箭 头所指的方向作动, 而作动的传送件 132便将承载篮子 11内的掩膜. 3往传输件 131处输送, 再由传输件 131将掩膜. 3往后模块处输送, 当掩膜. 3被第二传感器 192所感应时,此时的控制处理器 据第二传感器 192所感应的信号去控制止动 驱动器 18工作,工作的止动驱动器 18便驱动止动轴 18i上升并阻挡传送件 132 后端上的掩膜 3继续往传输件 131 的前端处输送。 此时后模块便开始作动, 使 其存储设备做好接收传输件 i3 i 所输送来的掩膜 3的准备。 当准备好后, 此时 控制处理器控制掩膜止动器 18工作, 驱动止动轴 181下降, 使传送件 132将其 上的掩膜 3输送到传输件 131上, 再由传输件 131将掩膜 3输送到后模块的存 储设备内进行存储。 当承载篮子 11再要往后模块输送下一个掩膜 3时, 此时控 制处理器控制升降驱动器 14作动,作动的升降驱动器 14驱动承载篮子 11下降, 并使下个存储槽 1 13与传送件 132处于同一传输高度, 接着下来的流程和上述 的承载篮子 I I往后模块输送掩膜 3的一样, 在此不再赘述。
其中, 对于上述的承载篮子 i i往后模块输送掩膜 3的作动过程还可以是下 面的方式:
先是后模块工作, 使其存储设备做好接收传输件 131所输送掩膜 3。 当准备 好后, 控制处理器便控制传输机构的传送件 132沿图 2b中传送件 132内箭头所 指的方向转动, 而转动的传送件 132便将承载篮子 I I 内的掩膜 3往传输件 131 处输送, 再由传输件 131将该掩膜 3往后模块的存储设备内输送并存储。 当要 存储下一掩膜 3 时, 此时的后模块再调节其存储设备, 使该存储设备再做好接 收传输件 131所输送掩膜 3准备的同时, 控制处理器再控制升降机构的升降驱 动器 14作动, ^作动的升降驱动器 14使承载篮子 l i的下一掩膜. 3与传送件 i32 处于同一传输高度, 当处于同一传输高度时, 传送件 132便可将掩膜 3往后模 块处输送, 其中对于承载篮子 l i上的掩膜. 3往后模块的输送过程均和上述的一 样, 在此不再赘述。 可以看出, 上述承载篮子 11内的掩膜 3往后模块处输送可 以不需要止动驱动器 18对掩膜 3的阻挡和第二传感器 192对掩膜 3的检测和反
馈, 因此, 上述的掩膜 3的传输效率更高, 更能节省成本。
本发明掩膜传输系统 1 的承载篮子 11 的传输对接区与传输机构的传输件
131对接, 且在控制机构的控制下和升降机构的驱动下, 使得承载篮子 n的由 相邻支撑组 111之间形成的呈水平的存储槽 113逐一与传输件 131对接,从 ¾使 得被传输机构的传输件 131所输送来的每个掩膜 3均能极其连贯地存储于承载 篮子 I I一个存储槽 i I 3内, 因而提高了本发明的掩膜传输系统 1的对掩膜 3的 传输和存储的连贯性, 进而提高了掩膜 3的处理效率并降低掩膜 3的处理成本。 同时, 本发明的掩膜传输系统 1 能克服现有的传输系统因存在两种不同的传输 方式而造成设计难度加大的问题, 使本发明掩膜传输系统 1的设 ϋ·更易。
以上所揭露的仅为本发明的较佳实例而已, 当然不能以此来限定本发明之 权利范围, 因此依本发明权利要求所作的等同变化, 仍属于本发明所涵盖的范 围。
Claims
i、 一种掩膜传输系统, 适用于对半导体生产线上的掩膜进行传输, 其特征 在于, 所述掩膜传输系统包括:
腔体, 所述腔体呈中空结构, 所述中空结构形成密封的工作腔, 所述腔体 的前端开设有第一输送口, 所述腔体的后端开设有第二输送口;
传输机构, 所述传输机构包括传输件及传输驱动器, 所述传输件沿水平方 向设置于所述工作腔内并与所述传输驱动器连接, 所述传输件的后端与所述腔 体的第二输送口对接;
承载篮子, 所述承载篮子包括呈中空结构的承载框体, 所述承载框体内相 对的两侧壁上分别设置有至少两个支撑组, 所述支撑组呈等间距的平行分布, 所述支撑组由沿同一水平面设置的若千支撑件组成, 相邻的支撑组之间形成呈 水平的存储槽, 每个掩膜插放于一个存储槽内, 所述承载框体的后端开设有传 输口;
升降机构, 所述升降机构包括升降驱动器及升降承载架, 所述升降驱动器 安装于所述腔体外, 所述升降驱动器的输出轴呈密封地穿入所述工作腔内并与 所述升降承载架连接, 所述承载篮子承载于所述升降承载架上, 所述升降驱动 器驱动所述承载篮子在所述工作腔内做竖直方向的往返运动, 所述承载篮子的 往返运动使所述传输口在所述腔体内形成传输对接区, 所述传输件的前端与所 述传输对接区对接, 所述.承载篮子的前端朝向所述第一输送口;
控制机构, 所述控制机构包括控制处理器及第一传感器, 所述第一传感器 安装于所述腔体上且正对所述传输件的前端, 所述第一传感器与所述控制处理 器电连接, 所述控制处理器与所述升降驱动器电连接, 所述第一传感器 测到 所述传输件的前端具有掩膜并发送信号给所述控制处理器, 所述控制处理器控 制所述升降驱动器驱动所述承载篮子的存储槽逐一与所述传输件的前端对接; 以及
抽真空机构, 所述抽真空机构与所述腔体连接并为所述工作腔提供真空环
2、 如权利要求 1所述的掩膜传输系统, 其特征在于: 所述传输机构还包括 传送件, 所述传送件沿水平方向收容于所述承载篮子的承载框体内并与所述传 输驱动器连接, 所述传送件的前端与所述第一输送口对接, 所述传送件的后端 与所述传输件的前端对接, 所述控制机构控制所述升降驱动器驱动所述承载篮 子沿垂直于所述传送件方向做往返的运动。
3、 如权利要求 2所述的掩膜传输系统, 其特征在于: 所述控制机构还包括 与控制处理器电连接的第二传感器, 第三传感器及止动驱动器, 所述第二传感 器设置于所述腔体上并与所述传送件的后端正对, 所述第三传感器设置于所述 腔体上并与所述传送件的前端正对, 所述止动驱动器安装于所述腔体外, 且所 述止动驱动器的止动轴呈密封地伸入所述工作腔内并与传送件和传输件的对接 处正对, 所述止动驱动器驱动止动轴阻挡或释放于传送件和传输件之间输送的 掩膜。
4、 如权利要求 2或 3所述的掩膜传输系统, 其特征在于: 所述传送件包括 传送轮、 安装轴及安装支架, 所述安装支架与所述腔体连接, 所述安装轴与所 述安装支架枢接, 所述传送轮安装在所述安装轴上, 所述承载框体的支撑组沿 竖直方向开设有供所述承载篮子沿所述传送轮做竖直方向往返运动的导向槽。
5、 如权利要求 1所述的掩膜传输系统, 其特征在于: 所述腔体上还设置有 对所述第一输送口密封的第一闸门、 对所述第二输送口进行密封的第二闸阀。
6、 如权利要求 5所述的掩膜传输系统, 其特征在于: 所述第一闸门的对所 述第一输送口进行密封的表面由内至外开设有呈平行排列的第一凹槽及第二凹 槽, 所述第一凹槽和第二凹槽上均设有密封件。
7、 如权利要求 1所述的掩膜传输系统, 其特征在于: 所述抽真空机构包括 气管、 真空计、 第三闸阀, 第四闸阀、 充气装置及真空产生器, 所述气管的一 端依次连接有所述真空计和腔体, 所述气管的另一端分别与第三阔阀和第四闸 阀的一端连接, 所述第三闸阀的另一端通过所述气管与所述真空产生器连接, 所述第四阔阀的另一端通过所述气管分别与所述充气装置和真空产生器连接。
8、 如权利要求 1所述的掩膜传输系统, 其特征在于: 所述升降^载架包括 两侧板、 导向块, 限位辊子、 固定件及与所述升降驱动器的输出轴连接的底板, 两所述侧板分别对称地固定连接于所述底板的两侧, 所述限位辊子固定连接于 所述底板的后端, 所述导向块固定连接于所述底板的前端, 所述导向块的两侧 相互平行且开设有滚动滑动槽, 所述固定件的下端两侧枢接有滑动辊子, 所述 固定件的上端两侧枢接有止动辊子, 所述滑动辊子滑动地的卡设于所述滾动滑 动槽内, 所述承载篮子的前端开设有容置所述止动辊子的滑动固定槽, 所述承 载篮子的后端与所述限位辊子抵触, 所述承载篮子的前端与所述固定件抵触。
9、 如权利要求 8所述的掩膜传输系统, 其特征在于: 两所述侧板的顶面均 设置有若千呈间隙排列且中心位于同一直线上的导向定位辊子, 两所述倒板相 对面均设置有若千呈间隙棑列且中心位于同一直线上的传送辊子, 所述导向定 位辊子与所述传送辊子呈垂直设置, 且所述导向定位辊子、 传送辊子、 限位辊 子及导向块形成供所述承载篮子定位的定位腔, 所述承载篮子收容于定位腔内, 且所述固定件的止动辊子收容于所述承载篮子的滑动固定槽上并与所述承载篮 子的前端氏触。
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