WO2011074685A1 - Cis系薄膜太陽電池の製造方法 - Google Patents
Cis系薄膜太陽電池の製造方法 Download PDFInfo
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- WO2011074685A1 WO2011074685A1 PCT/JP2010/072828 JP2010072828W WO2011074685A1 WO 2011074685 A1 WO2011074685 A1 WO 2011074685A1 JP 2010072828 W JP2010072828 W JP 2010072828W WO 2011074685 A1 WO2011074685 A1 WO 2011074685A1
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- light absorption
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- 239000010409 thin film Substances 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000010408 film Substances 0.000 claims abstract description 89
- 239000011521 glass Substances 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 238000009792 diffusion process Methods 0.000 claims abstract description 21
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 20
- 150000001340 alkali metals Chemical class 0.000 claims abstract description 20
- 230000031700 light absorption Effects 0.000 claims description 69
- 239000003513 alkali Substances 0.000 claims description 60
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 28
- 239000002243 precursor Substances 0.000 claims description 27
- 239000000377 silicon dioxide Substances 0.000 claims description 14
- 229910052738 indium Inorganic materials 0.000 claims description 13
- 229910052733 gallium Inorganic materials 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 238000005477 sputtering target Methods 0.000 claims description 8
- 229910052717 sulfur Inorganic materials 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 229910052711 selenium Inorganic materials 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 description 46
- 239000010949 copper Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 9
- 125000004429 atom Chemical group 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 8
- 239000011669 selenium Substances 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 6
- 238000005486 sulfidation Methods 0.000 description 5
- 239000005357 flat glass Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 1
- 229910052951 chalcopyrite Inorganic materials 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- CDZGJSREWGPJMG-UHFFFAOYSA-N copper gallium Chemical compound [Cu].[Ga] CDZGJSREWGPJMG-UHFFFAOYSA-N 0.000 description 1
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 1
- LCUOIYYHNRBAFS-UHFFFAOYSA-N copper;sulfanylideneindium Chemical compound [Cu].[In]=S LCUOIYYHNRBAFS-UHFFFAOYSA-N 0.000 description 1
- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 125000004436 sodium atom Chemical group 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Description
図2は、本発明に係る製造方法およびその他の方法で製造されたCIS系薄膜太陽電池セルの構造のパラメータと光電変換効率の関係を示す図である。
図3は、図2のデータに基づいて、Na添加量をパラメータとした場合の、各サンプルのアルカリ制御層(シリカ)膜厚と光電変換効率の関係を示すグラフである。
図4は、図2のデータに基づいて、シリカ膜厚をパラメータとした場合の、各サンプルのNa添加量と光電変換効率の関係を示すグラフである。
RFスパッタ法:SiO2ターゲット
投入電力:0.1~3.0W/cm2
O2濃度(O2/O2+Ar):0~20vol%
成膜圧力:0.3~2.0Pa
2セレン化銅インジウム (CuInSe2)
2イオウ化銅インジウム (CuInS2)
2セレン・イオウ化銅インジウム (CuIn(SeS)2)
2セレン化銅ガリウム (CuGaSe2)
2イオウ化銅ガリウム (CuGaS2)
2セレン化銅インジウム・ガリウム (Cu(InGa)Se2)
2イオウ化銅インジウム・ガリウム (Cu(InGa)S2)
等であってもよい。
Claims (10)
- 高歪点ガラス基板上にアルカリ制御層を形成し、
前記アルカリ制御層上に裏面電極層を形成し、
前記裏面電極層上にCIS系光吸収層を形成し、
前記CIS系光吸収層上にn型透明導電膜を形成する、各ステップを備え、
前記アルカリ制御層は前記高歪点ガラス基板に含まれるアルカリ金属の前記CIS系光吸収層への熱拡散を許容する厚さに形成され、さらに、前記CIS系光吸収層には前記高歪点ガラス基板からの熱拡散以外に外部よりアルカリ金属が添加されることを特徴とする、CIS系薄膜太陽電池の製造方法。 - 請求項1に記載の方法において、前記アルカリ制御層は、膜厚が3~12nmのシリカ膜で形成されることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項2に記載の方法において、前記アルカリ制御層は、屈折率が1.45~1.50の範囲のシリカ膜で形成されていることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記アルカリ金属の添加量は0.02原子数%から0.1原子数%であることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記アルカリ金属はNaであることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項5に記載の方法において、前記高歪点ガラス基板は、その熱膨張係数が8×10−6/℃~9×10−6/℃の範囲であり、かつ、Na2Oを2~5重量%の範囲で含むことを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記CIS系光吸収層の成膜は、前記裏面電極層上に前記アルカリ金属を含む金属プリカーサー膜を形成し、当該金属プリカーサー膜をセレン化/硫化することによって行われることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項7に記載の方法において、前記金属プリカーサー膜はスパッタにより形成され、CuGaスパッタターゲット中に、前記アルカリ金属が添加されることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法おいて、前記CIS系光吸収層はCu、In、Ga、Se、Sを主成分とする5元系化合物を材料とすることを特徴とする、CIS系薄膜太陽電池の製造方法。
- 請求項9に記載の方法において、前記CIS系光吸収層は、Cu、In、Gaを含む積層構造またはそれらの混晶の金属プリカーサー膜を、セレン化/硫化して形成されていることを特徴とする、CIS系薄膜太陽電池の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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DE112010004876T DE112010004876T5 (de) | 2009-12-16 | 2010-12-14 | Verfahren zur Herstellung einer Dünnfilm-Solarzelle auf CIS-Basis |
US13/515,721 US8501519B2 (en) | 2009-12-16 | 2010-12-14 | Method of production of CIS-based thin film solar cell |
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JP2009285318A JP2011129631A (ja) | 2009-12-16 | 2009-12-16 | Cis系薄膜太陽電池の製造方法 |
JP2009-285318 | 2009-12-16 |
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JP (1) | JP2011129631A (ja) |
DE (1) | DE112010004876T5 (ja) |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103367523A (zh) * | 2012-03-28 | 2013-10-23 | 英莱新能(上海)有限公司 | 薄膜太阳能电池的吸收层制作装置及其制作方法 |
WO2014024975A1 (ja) * | 2012-08-10 | 2014-02-13 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
JP2016169155A (ja) * | 2011-07-19 | 2016-09-23 | 日本電気硝子株式会社 | ガラス基材 |
US9934949B2 (en) | 2013-04-15 | 2018-04-03 | Mitsubishi Materials Corporation | Sputtering target and production method of the same |
US10283332B2 (en) | 2012-10-17 | 2019-05-07 | Mitsubishi Materials Corporation | Cu—Ga binary alloy sputtering target and method of producing the same |
US20220037553A1 (en) * | 2018-09-22 | 2022-02-03 | (Cnbm) Bengbu Design & Research Institute For Glass Industry Co., Ltd | Method for post-treating an absorber layer |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP5174230B1 (ja) | 2011-11-25 | 2013-04-03 | 昭和シェル石油株式会社 | 薄膜太陽電池モジュール及びその製造方法 |
US8586457B1 (en) * | 2012-05-17 | 2013-11-19 | Intermolecular, Inc. | Method of fabricating high efficiency CIGS solar cells |
DE102013109478A1 (de) * | 2013-08-30 | 2015-03-05 | Hanergy Holding Group Ltd. | Verfahren zur Herstellung von Sub-Solarmodulen durch elektrisch isolierende Isoliergräben in einem Dünnschichtsolarmodul und Verfahren zur Herstellung eines Dünnschichtsolarmoduls mit derartigen Isoliergräben |
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- 2010-12-14 WO PCT/JP2010/072828 patent/WO2011074685A1/ja active Application Filing
- 2010-12-14 DE DE112010004876T patent/DE112010004876T5/de not_active Withdrawn
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Cited By (7)
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JP2016169155A (ja) * | 2011-07-19 | 2016-09-23 | 日本電気硝子株式会社 | ガラス基材 |
CN103367523A (zh) * | 2012-03-28 | 2013-10-23 | 英莱新能(上海)有限公司 | 薄膜太阳能电池的吸收层制作装置及其制作方法 |
WO2014024975A1 (ja) * | 2012-08-10 | 2014-02-13 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
CN104520468A (zh) * | 2012-08-10 | 2015-04-15 | 三菱综合材料株式会社 | 溅射靶及其制造方法 |
US10283332B2 (en) | 2012-10-17 | 2019-05-07 | Mitsubishi Materials Corporation | Cu—Ga binary alloy sputtering target and method of producing the same |
US9934949B2 (en) | 2013-04-15 | 2018-04-03 | Mitsubishi Materials Corporation | Sputtering target and production method of the same |
US20220037553A1 (en) * | 2018-09-22 | 2022-02-03 | (Cnbm) Bengbu Design & Research Institute For Glass Industry Co., Ltd | Method for post-treating an absorber layer |
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US8501519B2 (en) | 2013-08-06 |
DE112010004876T5 (de) | 2013-01-10 |
US20120258562A1 (en) | 2012-10-11 |
JP2011129631A (ja) | 2011-06-30 |
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