WO2011071153A1 - ミスト冷却装置、熱処理装置及びミスト冷却方法 - Google Patents
ミスト冷却装置、熱処理装置及びミスト冷却方法 Download PDFInfo
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- WO2011071153A1 WO2011071153A1 PCT/JP2010/072251 JP2010072251W WO2011071153A1 WO 2011071153 A1 WO2011071153 A1 WO 2011071153A1 JP 2010072251 W JP2010072251 W JP 2010072251W WO 2011071153 A1 WO2011071153 A1 WO 2011071153A1
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- Prior art keywords
- cooling
- mist
- nozzle
- workpiece
- temperature
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- 238000001816 cooling Methods 0.000 title claims abstract description 246
- 239000003595 mist Substances 0.000 title claims abstract description 139
- 238000010438 heat treatment Methods 0.000 title claims description 32
- 239000002245 particle Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims description 46
- 230000008569 process Effects 0.000 claims description 38
- 238000002347 injection Methods 0.000 claims description 24
- 239000007924 injection Substances 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 19
- 239000007921 spray Substances 0.000 claims 1
- 230000009466 transformation Effects 0.000 description 16
- 239000002826 coolant Substances 0.000 description 14
- 238000010583 slow cooling Methods 0.000 description 12
- 230000008016 vaporization Effects 0.000 description 12
- 238000009834 vaporization Methods 0.000 description 12
- 230000032258 transport Effects 0.000 description 11
- 239000000110 cooling liquid Substances 0.000 description 10
- 238000010791 quenching Methods 0.000 description 10
- 230000000171 quenching effect Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
- 238000011084 recovery Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 229910000734 martensite Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 229910001562 pearlite Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 229910001563 bainite Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/62—Quenching devices
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/62—Quenching devices
- C21D1/667—Quenching devices for spray quenching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D15/00—Handling or treating discharged material; Supports or receiving chambers therefor
- F27D15/02—Cooling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/0002—Cooling of furnaces
- F27D2009/0005—Cooling of furnaces the cooling medium being a gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
- F27D2009/007—Cooling of charges therein
- F27D2009/0072—Cooling of charges therein the cooling medium being a gas
Definitions
- the present invention relates to a mist cooling device, a heat treatment device, and a mist cooling method.
- Patent Document 1 discloses a mist cooling device that is used for heat treatment of an object to be processed such as metal and cools the object to be processed.
- the mist cooling device injects a mist-like cooling liquid onto the heated object to be processed, and performs cooling by the vaporization latent heat of the cooling liquid. Therefore, the mist cooling device has a higher cooling capacity than the conventional gas injection type cooling device. Further, by adjusting the injection amount and the injection time of the mist, the mist cooling device can easily control the cooling rate of the workpiece, which has been difficult with the conventional immersion type cooling device.
- the object to be processed may be cooled by a predetermined cooling pattern in order to transform the object to be processed into a predetermined structure. For example, depending on the type of the object to be processed, rapid cooling is performed in a certain period. On the other hand, in other periods, gentle cooling is performed while maintaining the uniformity of cooling in order to prevent the occurrence of distortion and bending.
- the cooling at such different cooling rates is performed by adjusting the mist injection amount and the injection time.
- the present invention has been made in consideration of the above points, and an object thereof is to provide a mist cooling device, a heat treatment device, and a mist cooling method capable of cooling an object to be processed at a wide range of cooling rates.
- the present invention is a mist cooling device for injecting and cooling a cooling mist onto a heated object to be processed, the first nozzle for injecting the cooling mist, and the particles of the cooling mist injected from the first nozzle. And a second nozzle for injecting a cooling mist having a particle size smaller than the diameter.
- the particle size of the cooling mist injected from the first nozzle is larger than the particle size of the cooling mist injected from the second nozzle. Therefore, the amount of latent heat of vaporization for each cooling mist of the first nozzle is larger than the cooling mist of the second nozzle.
- the workpiece can be cooled more rapidly than using the second nozzle.
- the cooling using the second nozzle it is possible to perform the cooling more slowly while maintaining the uniformity of cooling than in the case of using the first nozzle.
- the first nozzle and the second nozzle diffuse and inject the cooling mist.
- the diffusion angle of the cooling mist of the first nozzle is narrower than the diffusion angle of the cooling mist of the second nozzle.
- the present invention includes a control unit that controls the injection amounts of the first nozzle and the second nozzle according to the cooling pattern of the workpiece.
- control unit switches the cooling mist injection between the first nozzle and the second nozzle according to the cooling pattern of the workpiece.
- the present invention is a heat treatment apparatus for performing heat treatment on an object to be processed, and includes the mist cooling apparatus described above.
- the present invention is also a mist cooling method for injecting and cooling a cooling mist onto a heated object to be processed, the first nozzle for injecting the cooling mist, and the cooling mist to be injected from the first nozzle. And a second nozzle for injecting a cooling mist having a particle size smaller than that of the first particle size.
- the particle size of the cooling mist injected from the first nozzle is larger than the particle size of the cooling mist injected from the second nozzle. Therefore, the amount of latent heat of vaporization for each cooling mist of the first nozzle is larger than the cooling mist of the second nozzle. Therefore, in the cooling using the first nozzle, the workpiece can be cooled more rapidly than using the second nozzle.
- the cooling using the second nozzle it is possible to perform the cooling more slowly while maintaining the uniformity of cooling than in the case of using the first nozzle.
- the present invention includes a first nozzle that can be rapidly cooled and a second nozzle that can be slowly cooled while maintaining uniformity of cooling. Therefore, the workpiece to be heat-treated can be cooled at a wide range of cooling rates. In addition, rapid cooling is performed in a certain period, while distortion and bending are prevented in other periods, so that cooling can be performed slowly while maintaining the uniformity of cooling.
- FIG. 1 is an overall configuration diagram of a heat treatment apparatus 1.
- FIG. 2 is a schematic diagram showing a configuration of a cooling chamber 3.
- FIG. 3 is a schematic view of a first nozzle 35.
- FIG. 4 is a schematic view of a second nozzle 45.
- 5 is a graph for explaining a heat treatment method for an object to be processed M; It is sectional drawing which shows the temperature distribution of the to-be-processed object M in time T1. It is sectional drawing which shows the temperature distribution of the to-be-processed object M in time T2. It is sectional drawing which shows the temperature distribution of the to-be-processed object M in time T3.
- FIGS. 1 to 5C In each drawing used for the following description, the scale of each member is appropriately changed to make each member a recognizable size. In the following description, an example of a two-chamber heat treatment apparatus is shown as the heat treatment apparatus.
- FIG. 1 is an overall configuration diagram of a heat treatment apparatus 1 according to the present embodiment.
- the heat treatment apparatus 1 is an apparatus that performs heat treatment such as quenching on the workpiece M.
- the heat treatment apparatus 1 includes a heating chamber 2 and a cooling chamber (mist cooling device) 3.
- the heating chamber 2 and the cooling chamber 3 are disposed adjacent to each other.
- a partition 4 that can be opened and closed is provided between the heating chamber 2 and the cooling chamber 3. When the partition 4 is opened, a transport path for transporting the workpiece M from the heating chamber 2 to the cooling chamber 3 is formed. Further, when the partition wall 4 is shielded, the heating chamber 2 and the cooling chamber 3 are in a sealed state, respectively.
- the to-be-processed object M is heat-processed with the heat processing apparatus 1, and is comprised from metal materials (including an alloy), such as steel containing a predetermined amount of carbon.
- the to-be-processed object M is transformed into a desired predetermined structure by heat treatment.
- the workpiece M is prevented from being transformed into other than the target tissue and is uniformly transformed into the target tissue by a predetermined cooling pattern (for example, a pattern having a rapid cooling period and a slow cooling period). To be cooled.
- a predetermined cooling pattern for example, a pattern having a rapid cooling period and a slow cooling period.
- the workpiece M is shown in a rectangular parallelepiped shape, but there are various forms such as the shape and size, the number of objects to be processed at one time, and the like.
- steel such as die steel (SKD material) and high-speed steel (SKH material) is targeted.
- SBD61 die steel is exemplified as the workpiece M and will be described below.
- FIG. 2 is a schematic diagram illustrating a configuration of the cooling chamber 3 according to the present embodiment. 2 is a cross-sectional view taken along line AA in FIG.
- FIG. 3A is a side view of the first nozzle 35 installed in the cooling chamber 3.
- FIG. 3B is a side view of the second nozzle 45.
- the cooling chamber 3 includes a container 10, a transfer unit 20, a first cooling system 30, a second cooling system 40, a temperature measuring instrument 50, and a control unit 60.
- the container 10 constitutes an outer shell of the cooling chamber 3 and is a substantially cylindrical container that can form a sealed space inside.
- a liquefier (liquefaction trap) 11 for liquefying the cooling liquid vaporized by the heat received from the workpiece M is installed at the upper part of the container 10.
- the transport unit 20 is a member for carrying the workpiece M from the heating chamber 2 to the cooling chamber 3 and carrying it out of the cooling chamber 3 to the outside.
- the transport unit 20 is a member that transports the workpiece M in a direction parallel to the central axis of the container 10.
- the transport unit 20 includes a pair of support frames 21, a plurality of transport rollers 22, and a roller drive unit (not shown).
- the pair of support frames 21 are erected on the inner bottom of the container 10 and support the workpiece M from below via a plurality of transport rollers 22.
- the pair of support frames 21 are provided so as to extend in the conveyance direction of the workpiece M.
- the plurality of transport rollers 22 are rotatably provided on the surfaces of the pair of support frames 21 facing each other with a predetermined interval in the transport direction.
- the to-be-processed object M is smoothly conveyed by the some conveyance roller 22 rotating.
- a roller driving unit (not shown) is a member that rotates the conveyance roller 22.
- the workpiece M of this embodiment is not directly placed on the transport roller 22 but is placed on the transport roller 22 via the tray 23. In order to allow the cooling mist to pass through, for example, a mesh-like tray or a tray in which a plurality of holes (such as punching holes) are formed in a plate material is used as the tray 23.
- the coolant M is sprayed in a mist form on the workpiece M that is heated and provided in the container 10, thereby cooling the workpiece M. Further, the first cooling system 30 is used when the workpiece M is rapidly cooled.
- the first cooling system 30 includes a first recovery pipe 31, a first heat exchanger 32, a first pump 33, a first supply pipe 34, and a plurality of first nozzles 35.
- a cooling liquid water, oil, salt, a fluorine-type inert liquid etc. are used, for example.
- the first recovery pipe 31 is a pipe member that recovers the coolant supplied into the container 10 and the coolant re-liquefied by the liquefier 11 after being vaporized by heat received from the workpiece M. Note that the coolant recovered in the first recovery pipe 31 is heated by heat received from the workpiece M.
- the first heat exchanger 32 is a heat exchanger that cools the recovered coolant.
- the first pump 33 is a member that discharges the coolant recovered from the container 10 and introduced into the first recovery pipe 31 to the first supply pipe 34 and flows toward the first nozzle 35.
- a first inverter 36 is connected to the first pump 33.
- the first inverter 36 is a member that drives the first pump 33 in accordance with an instruction from the control unit 60 described later.
- a plurality of the first pumps 33 may be arranged in parallel to the first supply pipe 34. By arranging the plurality of first pumps 33 in parallel, a large flow rate that cannot be produced by one pump can be created. Therefore, the adjustment range of the coolant flow rate in the first cooling system 30 can be set wide.
- the first supply pipe 34 is a pipe member that supplies the coolant discharged from the first pump 33 to a plurality of first nozzles 35 to be described later. Note that a valve (not shown) for blocking the supply of the coolant to the first nozzle 35 may be installed in the first supply pipe 34.
- the first nozzle 35 is a member that cools the workpiece M by spraying a mist-like cooling liquid (cooling mist) onto the workpiece M that is heated and provided in the container 10. Further, the first nozzle 35 is used when the workpiece M is rapidly cooled.
- a plurality of first nozzles 35 are provided on the inner wall of the container 10 so as to surround the workpiece M, and a plurality of the first nozzles 35 are provided side by side in the central axis direction of the container 10. As a result, the portion of the workpiece M that is not exposed to mist is minimized. And since the to-be-processed object M is cooled uniformly, generation
- the first nozzle 35 includes a single injection port 35a, and is a member that diffuses and injects cooling mist from the injection port 35a.
- the particle size of the cooling mist injected from the first nozzle 35 is set larger than the particle size of the cooling mist injected from the second nozzle 45 described later. Since the particle size of the cooling mist injected from the first nozzle 35 is large, the amount of latent heat of vaporization of the mist per particle increases.
- the diffusion angle of the cooling mist that is diffused and ejected from the first nozzle 35 is set to approximately 15 °.
- the diffusion angle of the cooling mist in the first nozzle 35 is set to be narrower than the diffusion angle of the cooling mist in the second nozzle 45.
- the first nozzle 35 is installed on the inner wall of the container 10 so that the direction of the injection port 35 a faces the workpiece M installed in the container 10.
- the coolant M is sprayed in a mist form on the workpiece M that is heated and provided in the container 10, thereby cooling the workpiece M.
- the second cooling system 40 is used when the workpiece M is cooled slowly while maintaining the uniformity of cooling.
- the second cooling system 40 includes a second recovery pipe 41, a second heat exchanger 42, a second pump 43, a second supply pipe 44, and a plurality of second nozzles 45.
- a cooling liquid water, oil, salt, a fluorine-type inert liquid etc. are used, for example. Since the configuration of the second cooling system 40 other than the second nozzle 45 is the same member as that of the first cooling system 30, the description thereof will be omitted, and the second nozzle 45 will be described below.
- the second nozzle 45 is a member that cools the workpiece M by spraying a mist-like cooling liquid (cooling mist) onto the workpiece M that is heated and provided in the container 10.
- the second nozzle 45 is a member that is used when the workpiece M is cooled slowly while maintaining the uniformity of cooling of the workpiece M.
- a plurality of the second nozzles 45 are provided on the inner wall of the container 10 so as to surround the workpiece M, and a plurality of the second nozzles 45 are provided side by side in the central axis direction of the container 10. As a result, the portion of the workpiece M that is not exposed to mist is minimized. Therefore, the workpiece M is uniformly cooled, and the occurrence of distortion and the like of the workpiece M due to the non-uniform cooling is prevented.
- the second nozzle 45 includes a plurality of (seven in the present embodiment) injection ports 45a, and is a member that diffuses and injects cooling mist from the plurality of injection ports 45a.
- One of the plurality of injection ports 45a is arranged at the center of the tip of the second nozzle 45, and the other injection ports 45a are arranged side by side around the center of the tip.
- the particle size of the cooling mist injected from the second nozzle 45 is set smaller than the particle size of the cooling mist injected from the first nozzle 35. Since the particle size of the cooling mist injected from the second nozzle 45 is small, the latent heat of vaporization of the mist per particle is small.
- the space residence time in the container 10 of the cooling mist injected from the second nozzle 45 is injected from the first nozzle 35. Longer than cooling mist. Further, since the particle size of the cooling mist is small, the cooling mist injected from the second nozzle 45 flows more irregularly in the space in the container 10 than the cooling mist injected from the first nozzle 35. it can.
- the diffusion angle of the cooling mist that is diffused and injected from the second nozzle 45 is set to approximately 75 °.
- the diffusion angle of the cooling mist in the second nozzle 45 is set wider than the diffusion angle of the cooling mist in the first nozzle 35.
- the second nozzle 45 is installed on the inner wall of the container 10 so that the direction of the injection port 45a located at the center of the plurality of injection ports 45a faces the workpiece M installed in the container 10. Yes.
- the temperature measuring instrument 50 is a measuring instrument that is provided in the container 10 and can measure the surface temperature of the workpiece M being cooled without contact.
- the temperature measuring instrument 50 is electrically connected (not shown) to the control unit 60 and outputs a temperature measurement value to the control unit 60.
- control unit 60 includes a data holding memory. And the control part 60 hold
- the control unit 60 has a configuration capable of measuring the internal temperature of the workpiece M from the measurement result of the temperature measuring device 50 (surface temperature of the workpiece M) using this table data.
- the correlation table data is created by, for example, preliminary experiments or simulations.
- FIG. 4 is a graph for explaining a heat treatment method for the workpiece M.
- the vertical axis represents temperature and the horizontal axis represents time.
- a solid line Ts indicates a temperature change on the surface of the workpiece M
- a broken line Tc indicates a temperature change inside the workpiece M.
- FIGS. 5A to 5C are cross-sectional views for explaining the temperature difference between the surface and the inside of the workpiece M.
- FIG. 5A to 5C show the temperature distribution state of the workpiece M that changes sequentially with the passage of time in FIG.
- FIG. 5A shows the temperature distribution at time T1.
- FIG. 5B shows the temperature distribution at time T2
- FIG. 5C shows the temperature distribution at time T3.
- the high and low temperatures are indicated by the shading of the halftone dots.
- the workpiece M heated to the austenite structure state (about 1000 ° C.) is in the vicinity of the transformation point Ms at which it begins to transform into a martensite structure.
- the cooling is performed from the time T0 to the target temperature Ta higher than the transformation point Ms using the first cooling system 30 (first quenching process S1).
- the target temperature Ta is set in a range lower than the transformation point Ps at which the workpiece M starts to transform into a pearlite structure and higher than the transformation point Ms at which the workpiece M begins to transform into a martensite structure.
- the target temperature Ta is set between 370 ° C. and 550 ° C.
- the target temperature Ta is preferably set to a temperature in the vicinity of the transformation point Ms (a temperature that is higher than the transformation point Ms by about tens of degrees Celsius) in consideration of the process in the second quenching process S4 described later.
- the workpiece M is rapidly cooled to the target temperature Ta by mist cooling so as to avoid a transformation point Ps (so-called pearlite nose) that starts to transform into a pearlite structure.
- the cooling liquid is supplied to the workpiece M transferred to the cooling chamber 3 from the first nozzle 35 in the first cooling system 30 and jetted in a mist form to be cooled.
- the control unit 60 drives the first pump 33 via the first inverter 36. At this time, the second pump 43 of the second cooling system 40 is stopped.
- the cooling liquid recovered from the container 10 and introduced into the first recovery pipe 31 by driving the first pump 33 is cooled by the first heat exchanger 32 and then sent out to the first supply pipe 34.
- the coolant flowing in the first supply pipe 34 is ejected from the plurality of first nozzles 35 in a mist form. Since the ejection port 35 a of the first nozzle 35 is provided to face the workpiece M, the cooling mist ejected from the first nozzle 35 adheres to the workpiece M.
- the attached cooling mist takes the latent heat of vaporization from the workpiece M and vaporizes it, whereby the workpiece M is cooled.
- the particle size of the cooling mist injected from the first nozzle 35 is set larger than the particle size of the cooling mist injected from the second nozzle 45, and the amount of latent heat of vaporization of the mist per particle is large. Therefore, the particle diameter of the cooling mist ejected from the first nozzle 35 can take a lot of latent heat of vaporization from the workpiece M. Therefore, the workpiece M is rapidly cooled.
- the diffusion angle of the cooling mist that is diffused and ejected from the first nozzle 35 is set to approximately 15 °. Further, the diffusion angle of the cooling mist in the first nozzle 35 is set to be narrower than the diffusion angle of the cooling mist in the second nozzle 45. Therefore, the cooling mist sprayed from the first nozzle 35 efficiently hits the workpiece M. Therefore, the workpiece M is rapidly cooled.
- the basic cooling of mist cooling is cooling from the surface side by vaporization latent heat. Therefore, a temperature difference is generated on the surface and inside of the workpiece M depending on the degree of contact with the cooling mist (see FIG. 5A). For example, as indicated by the solid line Ts and the broken line Tc in FIG. 4, the temperature of the surface of the workpiece M decreases more quickly than the temperature inside the workpiece M. Therefore, the temperature difference between the surface temperature of the workpiece M and the temperature inside the workpiece M increases with time.
- the second cooling system 40 when the measured temperature of the temperature measuring instrument 50 provided in the container 10 (that is, the surface temperature of the workpiece M) becomes lower than the target temperature Ta, the second cooling system 40 The workpiece M is cooled (slow cooling process S2). In the slow cooling process S2, the workpiece M is cooled using the second cooling system 40 with a cooling efficiency lower than that of the first rapid cooling process S1. At this time, in the workpiece M, heat is transferred from the high temperature inside to the low temperature surface by heat conduction, so that the temperature difference between the surface and the inside becomes small.
- the controller 60 stops driving the first pump 33 and drives the second pump 43 via the second inverter 46. That is, the pump to be driven is switched from the first pump 33 to the second pump 43 (adjustment step).
- the coolant recovered from the container 10 and introduced into the second recovery pipe 41 by driving the second pump 43 is cooled by the second heat exchanger 42 and then sent out to the second supply pipe 44.
- the coolant flowing in the second supply pipe 44 is ejected from the plurality of second nozzles 45 in a mist form.
- the second nozzle 45 is provided toward the workpiece M. Therefore, the cooling mist sprayed from the second nozzle 45 adheres to the workpiece M. As the attached cooling mist takes vaporization latent heat from the workpiece M and vaporizes, the workpiece M is cooled.
- the particle size of the cooling mist injected from the second nozzle 45 is set to be smaller than the particle size of the cooling mist injected from the first nozzle 35, and the amount of latent heat of vaporization of the mist per particle is small. Therefore, the amount of latent heat of vaporization taken away from the workpiece M is reduced, and the workpiece M can be slowly cooled. The amount of heat taken from the surface of the workpiece M is reduced, and heat is transferred from the high temperature inside to the low temperature surface by heat conduction, so that the temperature difference between the surface and the inside becomes small. That is, the workpiece M is cooled while the temperature is made uniform.
- the diffusion angle of the cooling mist that is diffused and injected from the second nozzle 45 is set to approximately 75 °.
- the diffusion angle of the cooling mist in the second nozzle 45 is set wider than the diffusion angle of the cooling mist in the first nozzle 35.
- the cooling mist injected from the second nozzle 45 in the space in the container 10 is more than the cooling mist injected from the first nozzle 35. It can stay in the space in the container 10 for a long time and can flow irregularly in the space in the container 10. Therefore, the cooling mist sprayed from the second nozzle 45 can adhere even if the cooling mist is difficult to adhere due to, for example, the size or shape of the workpiece M. That is, the workpiece M is cooled while the temperature is made uniform.
- the entire temperature of the workpiece M becomes higher than the target temperature Ta due to heat conduction from the inside of the high temperature, and does not reach the transformation point (for example, transformation point Ps) of another target that is not intended.
- Such cooling is performed. That is, in the slow cooling process S2, cooling is performed so as to offset the temperature rise due to high-temperature internal heat conduction. Further, in the slow cooling process S2, the cooling efficiency (injection amount of the cooling mist from the second nozzle 45) is controlled by the control unit 60 so that the surface temperature of the workpiece M does not reach the Ms transformation point due to cooling. Adjusted.
- the slow cooling process S2 is performed until the temperature inside the workpiece M becomes substantially equal to the target temperature Ta. Thereby, it can prevent that the temperature of the whole to-be-processed object M becomes higher than target temperature Ta.
- the temperature inside the workpiece M of this embodiment is measured by referring to the measurement result of the temperature measuring device 50 provided in the container 10 and the table data recorded in the memory of the control unit 60. Is done.
- FIG. 5B the surface M and the inside temperature distribution of the workpiece M that has undergone such a slow cooling treatment S2 are relaxed as compared to FIG. 5A.
- the supply of the cooling mist is stopped and the workpiece M is held for a predetermined time (holding process S3).
- the holding process S3 the workpiece M is held for a predetermined time while the supply of the cooling mist is stopped, whereby heat is transferred from the inside of the workpiece M to the surface by heat conduction, and the surface of the workpiece M And the temperature difference inside becomes further smaller.
- the mist cooling stop period of the holding process S3 is performed until the temperature difference between the surface and the inside of the workpiece M is within a predetermined threshold (for example, 10 ° C.).
- the surface of the workpiece M and the temperature inside the workpiece M are monitored using the table data in the temperature measuring device 50 and the control unit 60, and the workpiece M The process is terminated when the temperature difference between the surface and the interior of the substrate falls within a predetermined threshold.
- the temperature difference between the surface and the inside of the object to be processed M is determined from the temperature difference and the heat transfer coefficient of the surface and inside of the object to be processed M at the end of the slow cooling process S2.
- a method may be used in which a time that is within a predetermined threshold is predicted, and the process ends when the time elapses.
- the workpiece M that has undergone such holding processing S3 is uniformized so that the surface and internal temperatures of the workpiece M both reach the target temperature Ta.
- the workpiece M is cooled to a temperature equal to or lower than the transformation point Ms (second quenching process S4).
- the second quenching process S4 the workpiece M in a state in which the temperature difference between the surface and the interior is relaxed through the first quenching process S1, the slow cooling process S2, and the holding process S3 is cooled to the transformation point Ms or less. The Therefore, the surface and internal structure of the workpiece M are transformed into a martensite structure almost simultaneously.
- the target temperature Ta is a temperature that is higher than the transformation point Ms by about tens of degrees Celsius
- the temperature difference between the surface and the inside of the workpiece M generated by the cooling in the second quenching process S4 can be suppressed to a minute.
- production of the distortion and bending of the to-be-processed object M is prevented, and the quality of the to-be-processed object M improves.
- the workpiece M is rapidly cooled to a temperature equal to or lower than the transformation point Ms while avoiding the transformation point Bs that starts to transform into a bainite structure by mist cooling.
- the control unit 60 drives the first pump 33 via the first inverter 36 (adjustment process). Cooling is performed by supplying and ejecting the coolant from the first nozzle 35 in the first cooling system 30 in the form of a mist. That is, the first cooling system 30 is used even in a cooling pattern that requires not only rapid cooling at the start of cooling but also rapid cooling of the workpiece M during the cooling process. By performing the cooling that has been performed a plurality of times, the cooling pattern as described above can be handled.
- the following effects can be obtained.
- the heated object M can be treated in a wide range.
- the diffusion angle of the cooling mist in the first nozzle 35 is set to be narrower than the diffusion angle of the cooling mist in the second nozzle 45.
- the above embodiment is not limited to this, and the diffusion angles may be equal as long as there is a difference in the particle sizes of the cooling mists.
- the 1st cooling system 30 which has the 1st nozzle 35, and the 2nd cooling system 40 which has the 2nd nozzle 45 are installed as a cooling system which injects a cooling liquid in the container 10 in mist form.
- both the first nozzle 35 and the second nozzle 45 may be provided in one cooling system.
- a predetermined injection amount adjusting unit that adjusts the injection amount from the first nozzle 35 and the second nozzle 45 is provided in the one cooling system.
- the holding process S3 that does not inject the cooling mist is provided, but the present invention is not limited to this.
- 2nd rapid cooling process S4 may be implemented without implementing holding
- the object to be heat-treated can be cooled at a wide range of cooling rates.
- rapid cooling can be performed in a certain period, while cooling can be performed slowly while maintaining the uniformity of cooling in other periods.
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Abstract
Description
被処理物の熱処理においては、被処理物を所定の組織に変態させるため、所定の冷却パターンによって冷却する場合がある。例えば、被処理物の種類によっては、ある期間では急速な冷却が行われる。一方、他の期間では歪みや曲がり等の発生を防止するために冷却の均一性を維持しつつ緩やかな冷却が行われる。上記従来技術では、このような異なる冷却速度での冷却は、ミストの噴射量及び噴射時間を調整して行われている。しかし、ミストの噴射量及び噴射時間のみの調整では、広い範囲の冷却速度で冷却することが難しい。また、被処理物の種類によっては、必要な冷却速度を確保できない可能性がある。
本発明は、加熱された被処理物に冷却用ミストを噴射して冷却するミスト冷却装置であって、冷却用ミストを噴射する第1ノズルと、第1ノズルから噴射される冷却用ミストの粒径より小さい粒径の冷却用ミストを噴射する第2ノズルとを有する。
本発明では、第1ノズルから噴射される冷却用ミストの粒径が第2ノズルから噴射される冷却用ミストの粒径より大きい。そのため、第1ノズルの冷却用ミスト一粒あたりの気化潜熱量は、第2ノズルの冷却用ミストより大きい。そのため、第1ノズルを用いた冷却では、第2ノズルを用いるよりも急速に被処理物を冷却できる。一方、第2ノズルを用いた冷却では、第1ノズルを用いるよりも冷却の均一性を維持しつつ緩やかに冷却できる。
本発明では、第1ノズルから噴射される冷却用ミストの粒径が第2ノズルから噴射される冷却用ミストの粒径より大きい。そのため、第1ノズルの冷却用ミスト一粒あたりの気化潜熱量は、第2ノズルの冷却用ミストより大きい。そのため、第1ノズルを用いた冷却では、第2ノズルを用いるよりも急速に被処理物を冷却できる。一方、第2ノズルを用いた冷却では、第1ノズルを用いるよりも冷却の均一性を維持しつつ緩やかに冷却できる。
本発明は、急速に冷却できる第1ノズルと、冷却の均一性を維持しつつ緩やかに冷却できる第2ノズルとを備える。そのため、熱処理の被処理物を広い範囲の冷却速度で冷却できる。また、ある期間では急速な冷却を行う一方で、他の期間では歪みや曲がり等の発生を防止するため、冷却の均一性を維持しつつ緩やかに冷却できる。
熱処理装置1は、被処理物Mに対して焼き入れ等の熱処理を施す装置である。熱処理装置1は、加熱室2と、冷却室(ミスト冷却装置)3とを有する。加熱室2と冷却室3とは、隣接して配置されている。加熱室2と冷却室3との間には開閉自在な隔壁4が設けられている。隔壁4の開放時には、加熱室2から冷却室3へ向けて被処理物Mを搬送するための搬送経路が形成される。また、隔壁4の遮蔽時には、加熱室2及び冷却室3がそれぞれ密閉状態となる。
図2は、本実施形態に係る冷却室3の構成を示す概略図である。なお、図2は、図1のA-A線から見た断面図である。図3Aは、冷却室3に設置されている第1ノズル35の側面図である。また、図3Bは第2ノズル45の側面図である。
容器10は、冷却室3の外殻を構成し、内部に密閉した空間を形成可能な略円筒状の容器である。容器10の上部には、被処理物Mからの受熱により気化した冷却液を再び液化する液化器(液化トラップ)11が設置される。
緩冷処理S2では、第2冷却系40を用いて、第1急冷処理S1よりも低い冷却効率で被処理物Mが冷却される。このとき、被処理物Mでは、熱伝導により高温の内部から低温の表面に熱が伝わることにより、表面及び内部での温度差が小さくなる。
保持処理S3では、冷却用ミストの供給が停止したまま、被処理物Mが所定時間保持されることで、熱伝導により被処理物Mの内部から表面に熱が伝わり、被処理物Mの表面及び内部での温度差がさらに小さくなる。保持処理S3のミスト冷却停止期間は、被処理物Mの表面及び内部の温度差が所定の閾値(例えば10℃)以内になるまで実施される。本実施形態では、保持処理S3のミスト冷却停止期間は、温度計測器50及び制御部60内のテーブルデータを用いて、被処理物Mの表面及び内部の温度をモニタリングしつつ、被処理物Mの表面及び内部の温度差が所定の閾値以内になった時に終了する。
第2急冷処理S4では、第1急冷処理S1、緩冷処理S2及び保持処理S3を経ることで表面及び内部の温度差が緩和された状態の被処理物Mが、変態点Ms以下まで冷却される。そのため、被処理物Mの表面及び内部の組織がほぼ同時にマルテンサイト組織に変態させられる。なお、目標温度Taが、変態点Msより十数℃度程度高い温度であれば、第2急冷処理S4における冷却によって生じる被処理物Mの表面及び内部の温度差を微小に抑えることができる。そして、被処理物Mの歪みや曲がりの発生が防止され、被処理物Mの品質が向上する。
以上で、被処理物Mの組織をマルテンサイト組織に変態させる本実施形態の冷却工程が終了する。
本実施形態によれば、急速に冷却できる第1ノズル35と、冷却の均一性を維持しつつ緩やかに冷却できる第2ノズル45とを備えることで、加熱された被処理物Mを広い範囲の冷却速度で冷却できる。そのため、ある期間では急速な冷却が行われる一方で、他の期間では歪みや曲がり等の発生を防止するために冷却の均一性が維持されつつ緩やかに冷却できる。
3…冷却室(ミスト冷却装置)
35…第1ノズル
45…第2ノズル
60…制御部
M…被処理物
Claims (6)
- 加熱された被処理物に冷却用ミストを噴射して冷却するミスト冷却装置であって、
冷却用ミストを噴射する第1ノズルと、
前記第1ノズルから噴射される冷却用ミストの粒径より小さい粒径の冷却用ミストを噴射する第2ノズルと、を有するミスト冷却装置。 - 請求項1に記載のミスト冷却装置において、
前記第1ノズル及び前記第2ノズルは、冷却用ミストを拡散して噴射し、
前記第1ノズルにおける冷却用ミストの拡散角は、前記第2ノズルにおける冷却用ミストの拡散角よりも狭いミスト冷却装置。 - 請求項1又は2に記載のミスト冷却装置において、
前記被処理物の冷却パターンに応じて、前記第1ノズル及び前記第2ノズルの各噴射量をそれぞれ制御する制御部を有するミスト冷却装置。 - 請求項3に記載のミスト冷却装置において、
前記制御部は、前記被処理物の冷却パターンに応じて、冷却用ミストの噴射を前記第1ノズルと前記第2ノズルとの間で切り替えるミスト冷却装置。 - 被処理物に対して熱処理を行う熱処理装置であって、
請求項1に記載のミスト冷却装置を有することを特徴とする熱処理装置。 - 加熱された被処理物に冷却用ミストを噴射して冷却するミスト冷却方法であって、
冷却用ミストを噴射する第1ノズルと、前記第1ノズルから噴射される冷却用ミストの粒径より小さい粒径の冷却用ミストを噴射する第2ノズルと、を用いて前記被処理物を冷却する冷却工程を有するミスト冷却方法。
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US13/514,191 US9187795B2 (en) | 2009-12-11 | 2010-12-10 | Mist cooling apparatus, heat treatment apparatus, and mist cooling method |
PL10836072T PL2511385T3 (pl) | 2009-12-11 | 2010-12-10 | Urządzenie chłodzące mgłą, urządzenie do obróbki cieplnej i sposób chłodzenia mgłą |
EP10836072.8A EP2511385B1 (en) | 2009-12-11 | 2010-12-10 | Mist cooling apparatus, heat treatment apparatus, and mist cooling method |
CN2010800558516A CN102639725A (zh) | 2009-12-11 | 2010-12-10 | 喷雾冷却装置、热处理装置以及喷雾冷却方法 |
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JP5588661B2 (ja) * | 2009-12-11 | 2014-09-10 | 株式会社Ihi | ミスト冷却装置及び熱処理装置 |
CN103534547B (zh) | 2011-02-28 | 2015-08-19 | 株式会社Ihi | 热处理品的温度测定装置和温度测定方法 |
JP6515370B2 (ja) * | 2014-05-29 | 2019-05-22 | 株式会社Ihi | 冷却装置及び多室型熱処理装置 |
KR102005208B1 (ko) * | 2015-05-29 | 2019-07-29 | 고요 써모 시스템 가부시끼 가이샤 | 탱크 냉각 장치 |
DE112017001506T5 (de) * | 2016-03-23 | 2019-01-03 | Ihi Corporation | Kühlvorrichtung und Wärmebehandlungsvorrichtung |
JP6662510B2 (ja) * | 2017-03-28 | 2020-03-11 | ユニプレス株式会社 | 成形品の冷却方法及び冷却装置 |
CN108225031A (zh) * | 2017-12-30 | 2018-06-29 | 苏州博能炉窑科技有限公司 | 一种大型均热炉的汽化冷却设备 |
CN109119873B (zh) * | 2018-10-30 | 2024-02-09 | 中国工程物理研究院激光聚变研究中心 | 一种多工质组合式喷雾冷却装置 |
CN111549210B (zh) * | 2020-05-11 | 2022-06-14 | 菏泽学院 | 一种机床回转轴生产用热处理装置 |
KR102314086B1 (ko) * | 2021-02-08 | 2021-10-18 | 김웅기 | 진공열처리로의 냉각가스 분사노즐 |
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EP2511385A4 (en) | 2015-08-26 |
PL2511385T3 (pl) | 2021-07-19 |
KR20120093389A (ko) | 2012-08-22 |
CN103740904B (zh) | 2016-08-24 |
EP2511385B1 (en) | 2021-01-27 |
EP2511385A1 (en) | 2012-10-17 |
CN102639725A (zh) | 2012-08-15 |
JP2011122211A (ja) | 2011-06-23 |
US9187795B2 (en) | 2015-11-17 |
CN103740904A (zh) | 2014-04-23 |
US20120242014A1 (en) | 2012-09-27 |
JP5588661B2 (ja) | 2014-09-10 |
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