WO2011010409A1 - 試験装置、付加回路および試験用ボード - Google Patents
試験装置、付加回路および試験用ボード Download PDFInfo
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- WO2011010409A1 WO2011010409A1 PCT/JP2010/001330 JP2010001330W WO2011010409A1 WO 2011010409 A1 WO2011010409 A1 WO 2011010409A1 JP 2010001330 W JP2010001330 W JP 2010001330W WO 2011010409 A1 WO2011010409 A1 WO 2011010409A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
- G01R31/31924—Voltage or current aspects, e.g. driver, receiver
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C29/50—Marginal testing, e.g. race, voltage or current testing
- G11C2029/5006—Current
Definitions
- the present invention relates to a test apparatus, an additional circuit, and a test board.
- this application is a continuation-in-part of the international application PCT / JP2009 / 003482 (filing date: July 23, 2009), and US application 12 / 603,350 (filing date: October 21, 2009). Part of the continuation application.
- Patent Document 1 JP 2001-195139 A Patent Document 2 US Pat. No. 6087843
- a bypass capacitor having a large capacity for example, several tens of ⁇ F
- a minute output current of the power supply device may be measured.
- a reed relay that disconnects a large-capacity bypass capacitor from the power supply line is provided.
- the large-capacity bypass capacitor cannot be provided in the vicinity of the device under test, and is provided at a position away from the device under test.
- the current consumption of the device under test is measured by measuring the current flowing through the power supply line. More specifically, the current consumption of the device under test is measured by measuring the current flowing through the power supply line on the device under test side relative to the bypass capacitor.
- a test apparatus for testing a device under test, the power source for generating power source power to be supplied to the device under test, and the power source power generated by the power source Is measured by the transmission line for transmitting the signal to the device under test, the intermediate capacitor provided between the transmission line and the ground potential, the charge / discharge current measuring unit for measuring the charge / discharge current of the intermediate capacitor, and the charge / discharge current measuring unit.
- a test apparatus is provided that includes a load current calculation unit that calculates a load current flowing in a device under test based on the measured current.
- an additional circuit used in a test apparatus that tests a device under test, the test apparatus including a power source that generates power to be supplied to the device under test, and a power source generated by the power source.
- a transmission line for transmitting power to the device under test; and a load current calculation unit for calculating a load current flowing through the device under test;
- the additional circuit includes an intermediate capacitor connected between the transmission line and the ground potential;
- An additional circuit including a charge / discharge current measuring unit that measures a charge / discharge current of an intermediate capacitor and notifies a load current calculating unit of the measured value.
- a test board used in a test apparatus for testing a device under test, wherein the power source generated by the power source provided in the test apparatus is supplied to the device under test.
- a test board is provided.
- FIG. 1 is a diagram showing a configuration of a test apparatus 100 according to one embodiment together with a device under test 200.
- FIG. 3 is a diagram illustrating a configuration example of a circuit that measures a current flowing through a transmission line 20.
- FIG. It is a figure which shows an example of the electric current I1 which the power supply current measurement part 60 measures, and the electric current I2 which the charging / discharging current measurement part 90 measures.
- 3 is a diagram illustrating a configuration example of a switch 52.
- FIG. The other structural example of the circuit which measures the electric current which flows into the transmission line 20 is shown.
- the current flowing through the device under test 200 when a resistor having a resistance value similar to that of the resistor 58 is used as the damping resistor 54 is shown.
- the current flowing through the device under test 200 when a resistor having a resistance value about 20 times larger than that of the resistor 58 is used as the damping resistor 54 is shown.
- the other structural example of the test apparatus 100 is shown.
- a configuration example of the additional circuit 110 is shown.
- FIG. 1 is a diagram showing a configuration of a test apparatus 100 according to one embodiment together with a device under test 200.
- the test apparatus 100 is an apparatus for testing a device under test 200 such as a semiconductor circuit, and includes a test board 10 and a test head 12.
- the test board 10 electrically connects the device under test 200 and the test head 12.
- the test board 10 includes a socket on which the device under test 200 is placed and is electrically connected to the device under test 200, and wiring that electrically connects the socket and the test head 12.
- the test board 10 may include probe pins that come into contact with the terminals of the device under test 200 and wiring that electrically connects the probe pins and the test head 12.
- the test head 12 generates a test signal, power supply power, etc., and supplies it to the device under test 200 via the test board 10. Further, the test head 12 measures a predetermined characteristic of the device under test 200 when a test signal or the like is supplied, and determines pass / fail of the device under test 200. For example, the test head 12 measures a data pattern of a signal output from the device under test 200 or power consumption of the device under test 200.
- the test head 12 of this example has a plurality of test modules 40. Each test module 40 is electrically connected to the test board 10 via the connection connector 24. Each test module 40 may have a different function.
- the test head 12 includes a test module 40 for supplying power, a test module 40 for analog signals, a test module 40 for digital signals, and the like.
- the test module 40-1 of this example has a power supply 30 that supplies power to the device under test 200.
- the power supply 30 is electrically connected to the device under test 200 via the transmission line 20.
- the transmission path 20 transmits the power source generated by the power source 30 to the device under test 200.
- the transmission line 20 may include a module wiring 28, a cable 26, a connection connector 24, and a board wiring 22.
- the module wiring 28 is formed inside the test module 40.
- the cable 26 connects between the test module 40 and the connection connector 24.
- the board wiring 22 is formed on the test board 10.
- the test apparatus 100 of this example measures the current consumed by the device under test 200 by measuring the current flowing through the transmission line 20.
- the test module 40-1 may determine pass / fail of the device under test 200 based on the measurement result of the current flowing through the transmission line 20.
- FIG. 2 is a diagram illustrating a configuration example of a circuit for measuring a current flowing through the transmission line 20.
- the power supply 30 is connected to the device under test 200 via the transmission line 20.
- the power supply 30 may include a minute current measuring unit 32 that measures a minute current such as a standby current of the device under test 200.
- the minute current measuring unit 32 may measure the current output from the power supply 30.
- the test apparatus 100 includes a medium-speed current supply unit 49, an intermediate capacitor 50, a charge / discharge current measurement unit 90, a switch 52, a small-capacitance capacitor 48, a power supply current measurement unit 60, and a load current calculation unit 97.
- R1, R2, R4, L1, L2, and L4 indicate a resistance component and an inductance component of the transmission line 20.
- the medium-speed current supply unit 49 includes a large-capacitance capacitor 44, a switch 46, a resistance component R2, and an inductance component L2.
- the large-capacitance capacitor 44 is provided between the transmission line 20 and the ground potential at a position closer to the power supply 30 than the intermediate capacitor 50.
- the large-capacitance capacitor 44 of this example is provided between the transmission line 20 (for example, module wiring 28) on the power supply 30 side with respect to the connection connector 24 and the ground potential.
- the capacity of the large capacity capacitor 44 may be larger than the maximum load capacity allowed for the minute current measuring unit 32. As the maximum load capacity, a specification value of the minute current measuring unit 32 may be used.
- the switch 46 switches whether or not the large-capacitance capacitor 44 is connected between the module wiring 28 and the ground potential.
- the switch 46 is, for example, a reed relay.
- the small-capacitance capacitor 48 is provided between the transmission line 20 and the ground potential at a position closer to the device under test 200 than the intermediate capacitor 50.
- the small-capacitance capacitor 48 of this example is provided between the board wiring 22 and the ground potential in the test board 10.
- the capacity of the small capacitor 48 is smaller than the capacity of the large capacitor 44.
- the capacity of the small-capacitance capacitor 48 may be smaller than the maximum load capacity allowed for the minute current measuring unit 32.
- the intermediate capacitor 50 is provided between the transmission line 20 and the ground potential at a position between the large capacity capacitor 44 and the small capacity capacitor 48.
- the intermediate capacitor 50 is preferably connected to the transmission line 20 at a position where the distance from the small capacitor 48 is smaller than the distance from the large capacitor 44.
- the inductance component L4 in the transmission line 20 between the intermediate capacitor 50 and the small-capacitance capacitor 48 is sufficiently smaller than the inductance component L2 in the transmission line 20 between the intermediate capacitor 50 and the large-capacitance capacitor 44. Further, it is preferable that the intermediate capacitor 50 is disposed.
- the intermediate capacitor 50 in this example is connected to the board wiring 22 of the test board 10 between the small-capacitance capacitor 48 and the connection connector 24.
- the inductance component L4 can be made sufficiently smaller than the inductance component L2. Thereby, the charging / discharging current of the intermediate capacitor 50 can follow the fluctuation of the consumption current of the device under test 200 at a relatively high speed.
- the capacity of the intermediate capacitor 50 may be larger than that of the small capacitor 48 and smaller than that of the large capacitor 44.
- the capacity of the small capacitor 48 may be about 1 ⁇ F, and the capacity of the intermediate capacitor 50 may be about 10 ⁇ F. Further, the capacity of the intermediate capacitor 50 may be larger than the maximum load capacity allowed for the minute current measuring unit 32.
- the switch 52 switches whether or not the intermediate capacitor 50 is connected between the module wiring 28 and the ground potential.
- the switch 52 may be smaller than the switch 46.
- the switch 52 is a semiconductor switch.
- the switch 46 and the switch 52 isolate the large-capacitance capacitor 44 and the intermediate capacitor 50 from between the transmission line 20 and the ground potential when the minute current measuring unit 32 measures a minute current such as a standby current of the device under test. It's okay.
- the power supply current measuring unit 60 measures the current I1 flowing through the transmission line 20 on the power supply 30 side with respect to the intermediate capacitor 50.
- the power supply current measuring unit 60 measures the current I1 flowing through the transmission line 20 between the large capacity capacitor 44 and the connection connector 24.
- the power supply current measuring unit 60 may be provided in the test module 40.
- the power supply current measuring unit 60 of this example includes a first detection resistor 62 and a differential circuit 64.
- the first detection resistor 62 in this example is provided on the path of the transmission line 20 on the power supply 30 side with respect to the connection connector 24, and generates a voltage drop corresponding to the value of the current flowing through the transmission line 20.
- the first detection resistor 62 is provided on the module wiring 28.
- the differential circuit 64 functions as a first potential difference detection unit that detects a potential difference between both ends of the first detection resistor 62. By multiplying the potential difference by the resistance value of the first detection resistor 62, the current I1 flowing through the first detection resistor 62 can be measured.
- the configuration of the power supply current measurement unit 60 is not limited to the example shown in FIG.
- the power supply current measurement unit 60 may include a current probe instead of the first detection resistor 62 and the differential circuit 64.
- the current probe may detect the current flowing through the transmission line 20 by converting a magnetic field generated by the current flowing through the transmission line 20 into a voltage.
- the charge / discharge current measuring unit 90 measures the charge / discharge current I2 of the intermediate capacitor 50.
- the charge / discharge current measuring unit 90 of this example includes a second detection resistor 91 and a differential circuit 92.
- the second detection resistor 91 is provided between the intermediate capacitor 50 and the switch 52, and generates a voltage drop corresponding to the charge / discharge current I2 of the intermediate capacitor 50.
- the differential circuit 92 functions as a second potential difference detection unit that detects a potential difference between both ends of the second detection resistor 91. By multiplying the potential difference by the resistance value of the second detection resistor 91, the current I2 flowing through the second detection resistor 91 can be measured.
- the load current calculation unit 97 calculates the load current I3 flowing through the device under test 200 based on the current I2 measured by the charge / discharge current measurement unit 90. As described above, the intermediate capacitor 50 follows the fluctuation of the load current I3 faster than the power supply 30. For this reason, the current I2 includes a current component having a frequency higher than that of the current I1. The load current calculation unit 97 may calculate a component having a higher frequency than the current I1 in the load current I3 by measuring the current I2.
- the load current calculation unit 97 calculates the load current I3 flowing through the device under test 200 based on the sum of the current I1 measured by the power supply current measurement unit 60 and the current I2 measured by the charge / discharge current measurement unit 90. May be. Thereby, the load current I3 including both the low frequency component and the high frequency component can be calculated. In this example, a case where the load current calculation unit 97 calculates the sum of the current I2 and the current I1 will be described.
- the load current calculation unit 97 includes an operational amplifier 98 and an AD converter 99.
- the operational amplifier 98 outputs a voltage corresponding to the sum of the current I1 and the current I2.
- the AD converter 99 converts the output voltage value of the operational amplifier 98 into a digital value.
- the load current calculation unit 97 includes the current I1 and the current I2. Based on the above, the current flowing through the device under test 200 and the small-capacitance capacitor 48 is calculated. Since the charging / discharging current flowing through the small-capacitance capacitor 48 is relatively short, the load current calculation unit 97 may use the sum of the current I1 and the current I2 as the current flowing through the device under test 200.
- the small-capacitance capacitor 48 may indicate a capacitor provided inside the device under test 200.
- the intermediate capacitor 50 is provided in the vicinity of the device under test 200, and the sum of the charge / discharge current I2 of the intermediate capacitor 50 and the power supply current I1 is calculated, thereby accurately determining the current consumption of the device under test 200. It can be measured well. That is, even when the power supply current I1 cannot follow the fluctuation of the consumption current of the device under test 200 at a high speed, the charge / discharge current I2 that fluctuates at a high speed is further measured. be able to.
- the power supply current measuring unit 60 can be provided on the power supply 30 side of the intermediate capacitor 50, the circuit design can be facilitated as compared with the case where the power supply current measuring unit 60 is provided on the test board 10.
- the power supply current I1 may be measured using a measurement circuit built in the power supply 30 such as the minute current measurement unit 32.
- the switch 52 as a semiconductor switch, the switch 52 can be easily provided on the test board 10 having structural limitations such as the height of the element. For this reason, even if the intermediate capacitor 50 having a relatively large capacity is provided on the test board 10, the switch 52 for controlling whether or not the intermediate capacitor 50 is disconnected from the transmission line 20 can be provided.
- the power supply 30 may detect the load voltage applied to the device under test 200 via the detection line 42.
- the power supply 30 controls the output voltage so that the detected load voltage is constant.
- the detection line 42 may detect a voltage in the transmission line 20 on the device under test 200 side with respect to the power supply current measuring unit 60.
- FIG. 3 is a diagram illustrating an example of the current I1 measured by the power supply current measuring unit 60 and the current I2 measured by the charge / discharge current measuring unit 90.
- the horizontal axis indicates time, and the vertical axis indicates the current level.
- Idd indicates current consumption in the device under test 200.
- the current consumption Idd of the device under test 200 can be accurately measured by calculating the sum of the power supply current I1 and the charge / discharge current I2.
- the first detection resistor 62 and the second detection resistor 91 are additionally provided to detect current. For this reason, when the current consumption in the device under test 200 fluctuates, the fluctuation in the power supply voltage applied to the device under test 200 increases according to the resistance values of the first detection resistor 62 and the second detection resistor 91.
- the resistance value of the first detection resistor 62 is R1
- the resistance value of the second detection resistor 91 is R2
- the maximum fluctuation amount of the consumption current Idd is Ia.
- the maximum variation ⁇ Vmax of the power supply voltage applied to the device under test 200 due to the additional provision of the first detection resistor 62 and the second detection resistor 91 is given by Ia ⁇ (R1 + R2).
- the first detection resistor 62 and the second detection resistor 91 have a resistance value corresponding to the amount of variation allowed for the power supply voltage applied to the device under test 200.
- the maximum fluctuation amount of current consumption is 100 mA and the allowable value of the power supply voltage fluctuation is 20 mV
- the current path of the power supply current I1 is an LCR series resonance circuit. For this reason, if the damping resistance of the series resonance circuit is not sufficiently smaller than the resistance component in the current path, a large charge / discharge current flows. For this reason, the measurement result of the power supply current I1 includes a charge / discharge current to the intermediate capacitor 50 due to series resonance.
- the sum of the power supply current I1 and the charge / discharge current I2 is measured. Since each of the power supply current I1 and the charge / discharge current I2 includes the influence of the charge / discharge current due to the series resonance, the influence of the charge / discharge current due to the series resonance can be offset.
- FIG. 4 is a diagram illustrating another configuration example of the charge / discharge current measuring unit 90.
- the charge / discharge current measuring unit 90 of this example includes a voltage measuring unit 93, a differential calculating unit 94, and a current calculating unit 95.
- the voltage measuring unit 93 measures the voltage of the intermediate capacitor 50.
- the voltage measuring unit 93 measures a change in voltage with time at a terminal on the transmission line 20 side of the intermediate capacitor 50.
- the differential calculation unit 94 calculates the differential value of the voltage measured by the voltage measurement unit 93.
- the current calculation unit 95 calculates the charge / discharge current of the intermediate capacitor 50 based on the differential value calculated by the differential calculation unit 94.
- the current calculation unit 95 may use the differential value of the voltage measured by the voltage measurement unit 93 as the current value of the charge / discharge current of the intermediate capacitor 50. With such a configuration, the charge / discharge current of the intermediate capacitor 50 can be measured without using the second detection resistor 91.
- FIG. 5 is a diagram illustrating a configuration example of the switch 52.
- the switch 52 includes a transistor 74, a transistor 78, a diode 76, a diode 80, a resistor 70, and a resistor 72.
- Transistor 74 and transistor 78 are arranged in series between intermediate capacitor 50 and the ground potential.
- Transistor 74 and transistor 78 receive the control signal in parallel via resistor 70 and resistor 72.
- Transistor 74 and transistor 78 may have the same polarity.
- the diode 76 is a parasitic diode formed between the source and drain of the transistor 74.
- a diode 80 is a parasitic diode formed between the source and drain of the transistor 78.
- the diode 76 is disposed with the direction from the ground potential toward the intermediate capacitor 50 as the forward direction
- the diode 80 is disposed with the direction from the intermediate capacitor 50 toward the ground potential as the reverse direction.
- the intermediate capacitor 50 When the control voltage is at the H level, the intermediate capacitor 50 is connected to the ground potential via the transistor 74 and the transistor 78.
- the control voltage When the control voltage is L level, each transistor is turned off, and each diode is reversely connected and no current flows, so that the intermediate capacitor 50 is disconnected from the ground potential.
- the switch 52 With such a configuration, the switch 52 can be reduced in size and power consumption.
- FIG. 6 shows another configuration example of a circuit for measuring the current flowing through the transmission line 20.
- FIG. 6 shows part of the circuit.
- the test apparatus 100 of this example further includes a damping resistor 54 in addition to the configuration described with reference to FIG.
- the damping resistor 54 may function as the second detection resistor 91.
- An inductive component in series with the intermediate capacitor 50 is indicated by an inductor 56 between the transmission line 20 and the ground potential. Further, between the transmission line 20 and the ground potential, a resistance component in series with the small-capacitance capacitor 48 is indicated by a resistor 58, and an inductive component is indicated by an inductor 66.
- the system connecting the intermediate capacitor 50 and the small capacitor 48 forms a series resonance circuit. For this reason, the current flowing between the intermediate capacitor 50 and the small capacitor 48 may resonate.
- the test apparatus 100 of this example reduces the resonance of the current by providing the damping resistor 54.
- the damping resistor 54 is provided in series with the intermediate capacitor 50 between the transmission line 20 and the ground potential, and has a resistance value corresponding to the capacitance values of the intermediate capacitor 50 and the small capacitor 48. More specifically, the damping resistor 54 is determined by the impedance at the resonance frequency of the combined induction component L and the combined capacitance component C of the series resonant circuit.
- the resonance frequency of the series resonance circuit is given by 1 / (2 ⁇ ⁇ (LC) ⁇ 0.5) by the combined induction component L and the combined capacitance component C of the circuit.
- the resistance value of the damping resistor 54 may be determined by the impedance of the combined induction component L and the combined capacitance component C at the resonance frequency.
- the impedance at the resonance frequency is given by (L / C) ⁇ 0.5.
- the resistance value of the damping resistor 54 may be determined such that the combined resistance value of the series resonance circuit is 2 ⁇ (L / C) ⁇ 0.5.
- FIG. 7 shows the current flowing through the resistance component R4 in the current path to the device under test 200 when a resistor having a resistance value similar to that of the resistor 58 is used as the damping resistor 54.
- the inductance of the inductance L4, the inductor 56 and the inductor 66 is 0.5 nH
- the capacitance of the intermediate capacitor 50 is 2 ⁇ F
- the capacitance of the small capacitor 48 is 0.2 ⁇ F
- the resistance value of the resistor R4 is 2 m ⁇
- the resistance value of the resistor 58 is 5 m ⁇ .
- a large resonance component is included in the current flowing between the intermediate capacitor 50 and the small capacitor 48.
- FIG. 8 shows the current flowing through the resistance component R4 in the current path to the device under test 200 when a resistor having a resistance value about 20 times larger than that of the resistor 58 is used as the damping resistor 54.
- the characteristic value of each element of this example is the same as the characteristic value of each element described in relation to FIG. 7 except that the resistance value of the damping resistor 54 is 85 m ⁇ .
- the damping resistor 54 can reduce the resonance component in the current flowing through the device under test 200.
- the damping resistor 54 may have a larger resistance value than the resistor 58.
- FIG. 9 shows another configuration example of the test apparatus 100.
- the test apparatus 100 of this example further includes an additional circuit 110 in addition to the configuration of the test apparatus 100 described with reference to FIG.
- the additional circuit 110 includes a part of the circuit configuration described with reference to FIG. 2 and is fixed to the test board 10.
- the additional circuit 110 is electrically connected to the board wiring 22 in the test board 10.
- the additional circuit 110 may be fixed to the back surface of the surface on which the device under test 200 is placed on the test board 10.
- the additional circuit 110 may be electrically connected to the board wiring 22 provided on the surface of the test board 10 via the via wiring 14.
- the via wiring 14 is provided to penetrate from the front surface to the back surface of the test board 10.
- the additional circuit 110 may have a part of the transmission path 20.
- the board wiring 22 in the test board 10 and the transmission line 20 in the additional circuit 110 are connected in series.
- the board wiring 22 is provided by cutting a part of the test board 10, and the additional circuit 110 is electrically connected in series between the cut board wirings 22.
- FIG. 10 shows a configuration example of the additional circuit 110.
- the additional circuit 110 of this example includes a part of the transmission line 20, the intermediate capacitor 50, the charge / discharge current measuring unit 90, and the switch 52. Both ends of the transmission path 20 are electrically connected to the board wiring 22 via the via wiring 14 so that the transmission path 20 in the additional circuit 110 is inserted into the cut portion of the board wiring 22.
- the intermediate capacitor 50, the charge / discharge current measuring unit 90, and the switch 52 are the same as the intermediate capacitor 50, the charge / discharge current measuring unit 90, and the switch 52 described with reference to FIG.
- the charge / discharge current measuring unit 90 notifies the measured current I2 to the load current calculating unit 97 provided in the test module 40.
- the test apparatus functions as the test apparatus 100 described with reference to FIGS. Can be made.
- the attachment of the additional circuit 110 can be easily realized by cutting the board wiring 22 as described above and electrically inserting the additional circuit 110 into the cut portion.
- the configuration of the additional circuit 110 is not limited to the configuration shown in FIG.
- the additional circuit 110 may further include one or more components shown in FIG. More specifically, the additional circuit 110 may further include one or more of the power supply current measurement unit 60, the medium speed current supply unit 49, and the small-capacitance capacitor 48.
- test board 10 may include the circuit configuration described in relation to FIG.
- the test board 10 includes a part of the transmission line 20, an intermediate capacitor 50, a charge / discharge current measuring unit 90, and a switch 52.
- the test board 10 may further include one or more of a power supply current measuring unit 60, a medium speed current supply unit 49, and a small-capacitance capacitor 48.
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- General Engineering & Computer Science (AREA)
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- General Physics & Mathematics (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
特許文献1 特開2001-195139号公報
特許文献2 米国特許第6087843号明細書
Claims (17)
- 被試験デバイスを試験する試験装置であって、
前記被試験デバイスに供給する電源電力を生成する電源と、
前記電源が生成した前記電源電力を、前記被試験デバイスに伝送する伝送路と、
前記伝送路および接地電位の間に設けられた中間コンデンサと、
前記中間コンデンサの充放電電流を測定する充放電電流測定部と、
前記充放電電流測定部が測定した電流に基づいて、前記被試験デバイスに流れる負荷電流を算出する負荷電流算出部と
を備える試験装置。 - 前記中間コンデンサよりも前記電源側の前記伝送路に流れる電流を測定する電源電流測定部を更に備え、
前記負荷電流算出部は、前記電源電流測定部が測定した電流、および、前記充放電電流測定部が測定した電流の和に基づいて、前記被試験デバイスに流れる負荷電流を算出する
請求項1に記載の試験装置。 - 前記中間コンデンサよりも前記電源に近い位置で、前記伝送路および接地電位の間に設けられ、前記中間コンデンサよりも容量の大きい大容量コンデンサを更に備える
請求項2に記載の試験装置。 - 前記中間コンデンサよりも前記被試験デバイスに近い位置で、前記伝送路および接地電位の間に設けられ、前記中間コンデンサよりも容量の小さい小容量コンデンサを更に備える
請求項3に記載の試験装置。 - 前記負荷電流算出部は、前記電源電流測定部が測定した電流、および、前記充放電電流測定部が測定した電流の和に基づいて、前記被試験デバイスおよび前記小容量コンデンサに流れる電流を算出する
請求項4に記載の試験装置。 - 前記中間コンデンサは、前記小容量コンデンサとの距離が、前記大容量コンデンサとの距離より小さくなる位置で、前記伝送路に接続される
請求項4に記載の試験装置。 - 前記伝送路および前記接地電位の間に前記中間コンデンサと直列に設けられ、前記中間コンデンサおよび前記小容量コンデンサの容量値に応じた抵抗値のダンピング抵抗を更に備える
請求項4に記載の試験装置。 - 前記被試験デバイスと接触する試験用ボードを更に備え、
前記小容量コンデンサおよび前記中間コンデンサは、前記試験用ボードに設けられる
請求項6に記載の試験装置。 - 前記伝送路上に設けられ、前記試験用ボードと前記電源とを電気的に接続する接続コネクタを更に備え、
前記大容量コンデンサは、前記接続コネクタに対して、前記電源側の前記伝送路に接続される
請求項8に記載の試験装置。 - 前記電源電流測定部は、前記接続コネクタおよび前記大容量コンデンサの間における前記伝送路に流れる電流を測定する
請求項9に記載の試験装置。 - 前記電源電流測定部は、
前記接続コネクタに対して、前記電源側の前記伝送路上に設けられた第1検出抵抗と、
前記第1検出抵抗の両端の電位差を検出する第1電位差検出部と
を有し、
前記充放電電流測定部は、
前記中間コンデンサおよび接地電位の間に設けられた第2検出抵抗と、
前記第2検出抵抗の両端の電位差を検出する第2電位差検出部と
を有する
請求項10に記載の試験装置。 - 前記電源電流測定部は、
前記接続コネクタに対して、前記電源側の前記伝送路上に設けられた第1検出抵抗と、
前記第1検出抵抗の両端の電位差を検出する第1電位差検出部と
を有し、
前記充放電電流測定部は、
前記コンデンサの電圧を測定する電圧測定部と、
前記電圧測定部が測定した電圧の微分値を算出する微分算出部と、
前記微分算出部が算出した前記微分値に基づいて、前記コンデンサの前記充放電電流を算出する電流算出部と
を有する請求項9に記載の試験装置。 - 被試験デバイスを試験する試験装置に用いられる付加回路であって、
前記試験装置は、
前記被試験デバイスに供給する電源電力を生成する電源と、
前記電源が生成した前記電源電力を、前記被試験デバイスに伝送する伝送路と、
前記被試験デバイスに流れる負荷電流を算出する負荷電流算出部と
を備え、
前記付加回路は、
前記伝送路および接地電位の間に接続される中間コンデンサと、
前記中間コンデンサの充放電電流を測定し、前記負荷電流算出部に通知する充放電電流測定部と
を備える付加回路。 - 前記試験装置は、前記伝送路が形成される試験用ボードを更に備え、
前記付加回路は、前記試験用ボードに固定される
請求項13に記載の付加回路。 - 前記付加回路は、前記中間コンデンサよりも前記電源側の前記伝送路に流れる電流を測定し、前記負荷電流算出部に通知する電源電流測定部を更に備える
請求項13に記載の付加回路。 - 被試験デバイスを試験する試験装置に用いられる試験用ボードであって、
前記試験装置に設けられた電源が生成した電源電力を、前記被試験デバイスに伝送する伝送路と、
前記伝送路および接地電位の間に設けられた中間コンデンサと、
前記中間コンデンサの充放電電流を測定し、前記試験装置に設けられた負荷電流算出部に通知する充放電電流測定部と
を備える試験用ボード。 - 前記試験用ボードは、前記中間コンデンサよりも前記電源側の前記伝送路に流れる電流を測定し、前記負荷電流算出部に通知する電源電流測定部を更に備える
請求項16に記載の試験用ボード。
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JP2010534299A JPWO2011010409A1 (ja) | 2009-07-23 | 2010-02-26 | 試験装置、付加回路および試験用ボード |
US12/876,052 US8558559B2 (en) | 2009-07-23 | 2010-09-03 | Test apparatus, additional circuit and test board for calculating load current of a device under test |
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JPPCT/JP2009/003482 | 2009-07-23 | ||
PCT/JP2009/003482 WO2011010349A1 (ja) | 2009-07-23 | 2009-07-23 | 試験装置 |
US12/603,350 | 2009-10-21 | ||
US12/603,350 US8164351B2 (en) | 2009-07-23 | 2009-10-21 | Test apparatus |
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PCT/JP2010/001333 WO2011010410A1 (ja) | 2009-07-14 | 2010-02-26 | 試験装置、付加回路および試験用ボード |
PCT/JP2010/001330 WO2011010409A1 (ja) | 2009-07-23 | 2010-02-26 | 試験装置、付加回路および試験用ボード |
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Cited By (1)
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EP3033086B1 (en) | 2013-08-14 | 2021-09-22 | Novartis AG | Combination therapy for the treatment of cancer |
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US8558560B2 (en) * | 2009-07-23 | 2013-10-15 | Advantest Corporation | Test apparatus, additional circuit and test board for judgment based on peak current |
US8558559B2 (en) * | 2009-07-23 | 2013-10-15 | Advantest Corporation | Test apparatus, additional circuit and test board for calculating load current of a device under test |
KR101970273B1 (ko) * | 2017-05-24 | 2019-04-18 | 포스필 주식회사 | 충방전 수단을 구비한 전류 계측 장치 및 이를 이용하는 전류 계측 방법 |
US10739411B2 (en) | 2018-06-04 | 2020-08-11 | Ford Global Technologies, Llc | Power electronic test automation circuit |
CN111929540B (zh) * | 2019-05-13 | 2023-08-11 | 上海海拉电子有限公司 | 一种开关器件耐压测量电路及方法 |
US11705894B2 (en) * | 2019-08-27 | 2023-07-18 | Keithley Instruments, Llc | Pulsed high current technique for characterization of device under test |
CN112034286B (zh) * | 2020-09-02 | 2023-07-28 | 苏州电器科学研究院股份有限公司 | 一种无线充放电测试系统及方法 |
KR20230042850A (ko) * | 2021-09-23 | 2023-03-30 | 삼성전자주식회사 | 커넥터의 체결 상태에 대한 모니터링 기능을 갖는 통신 장치 및 그 제어 방법 |
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JPWO2011010410A1 (ja) | 2012-12-27 |
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US20110018559A1 (en) | 2011-01-27 |
KR20110034581A (ko) | 2011-04-05 |
US8164351B2 (en) | 2012-04-24 |
KR20110038604A (ko) | 2011-04-14 |
WO2011010410A1 (ja) | 2011-01-27 |
KR20110034580A (ko) | 2011-04-05 |
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JPWO2011010412A1 (ja) | 2012-12-27 |
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