WO2010150709A1 - 円筒体の表面検査装置 - Google Patents
円筒体の表面検査装置 Download PDFInfo
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- WO2010150709A1 WO2010150709A1 PCT/JP2010/060368 JP2010060368W WO2010150709A1 WO 2010150709 A1 WO2010150709 A1 WO 2010150709A1 JP 2010060368 W JP2010060368 W JP 2010060368W WO 2010150709 A1 WO2010150709 A1 WO 2010150709A1
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- cylindrical body
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
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- the present invention relates to a cylindrical surface inspection apparatus and related technology for inspecting the surface state of a cylindrical body.
- a cylindrical body such as a photosensitive drum substrate requires high surface accuracy
- surface inspection is performed so as to eliminate a cylindrical body having surface defects such as scratches, unevenness, foreign matter adhesion, and dirt.
- the cylindrical surface inspection apparatus disclosed in Patent Document 1 below irradiates the cylindrical body W with the illumination light L from the light source 101 disposed on the lateral upper side.
- the regular reflected light (reflected light image) Lr is imaged by the camera 102, and the surface defect of the cylindrical body 1 is detected based on the imaged data.
- streak-like recesses D and projections the relatively shallow streak-like recesses Da do not become defects, whereas the streak-like recesses Db that are relatively deep or have an edge on the periphery, In the case where a streak-like recess Db that becomes such a defect is formed, it is handled as a defective product.
- the illumination light L emitted from the light source 101 is reflected on the surface of the cylindrical body in a region having no irregularities such as the concave part D on the surface of the cylindrical body, While the specularly reflected light Lr is captured by the camera 102, the illumination light L is irregularly reflected on the inner peripheral side surface of the concave portion D and the diffusely reflected light Ld is not received by the camera 102 in the region having the concave portion D or the like.
- the concave portion D is detected based on the light amount difference of the regular reflection light Lr, even if the depth and shape of the concave portion D are slightly different, all of the concave portions D are detected, and an undefect concave portion is detected. There existed a subject that inspection accuracy fell, which can distinguish Da and defective crevice Db correctly.
- the present invention has been made in view of the above-described problems, and provides a cylindrical surface inspection apparatus having high inspection accuracy and its related technology that can accurately detect only defective ones of streaky uneven portions.
- the purpose is to provide.
- a surface inspection method using coaxial epi-illumination is well known as a method for performing surface inspection of an inspection object with reflected light, as shown in Patent Document 2 above.
- illumination light is incident on the surface of an inspection object coaxially and the reflected light image is recognized by a camera to detect a surface defect portion.
- the surface state is detected by a specularly reflected light image reflected perpendicularly to the inspection surface, so that the surface state can be inspected with high accuracy.
- the applicant of the present invention has invented a method for inspecting the surface of a cylindrical body using the coaxial epi-illumination. That is, as shown in FIGS. 5 and 6, the light source 101 is disposed on the upper side of the cylindrical body W, the half mirror 103 is disposed above the cylindrical body W, and the camera 102 is disposed above the half mirror 103. .
- the illumination light L emitted from the light source 101 is reflected by the half mirror 103, and the reflected illumination light L is coaxially incident on the cylindrical body W from vertically above. Further, the illumination light L is reflected vertically upward on the surface of the cylindrical body, and the reflected light Lr is transmitted through the half mirror 103 and taken into the camera 102.
- the illumination light L from the light source 101 is lateral to the cylindrical body W, that is, in the axial direction X of the cylindrical body W in plan view. Since the illumination is performed horizontally from the orthogonal direction, the direct illumination light L1 that directly reaches the cylindrical body W out of the illumination light L emitted from the light source 101 is a direction orthogonal to the defective streak-shaped recess Db. Is projected from. For this reason, this direct illumination light L1 is irregularly reflected by the inner peripheral side surface of the defective streak-shaped recess Db, and a part of the irregularly reflected light L1d is taken into the camera 102.
- the defect streak-shaped recess Db is the area of the defective streak-shaped recess Db, the excessive diffusely reflected light L1d is recognized by the camera 102, and in some cases, the defect streak-shaped recess Db is apologyd and detected as a normal area. It has been found that it is difficult to reliably solve the problem that the inspection accuracy is lowered.
- the streak-shaped recess is described as an example, but even in the case of the streak-shaped recess, as in the case described above, excessive irregular reflection light is inadvertently recognized by the camera 102, resulting in a decrease in inspection accuracy. Will end up.
- the present invention comprises the following means.
- An illumination light source disposed above the cylindrical body, a beam splitter disposed above the cylindrical body corresponding to the illumination light source, and a surface state recognition means disposed above the beam splitter.
- the illumination light emitted from the illumination light source is reflected by the beam splitter and is coaxially incident on the surface of the cylindrical body, and the reflected light reflected by the surface of the cylindrical body is transmitted through the beam splitter, and the surface state
- a cylindrical surface inspection apparatus that is recognized by a recognition means, An apparatus for inspecting a surface of a cylindrical body, wherein illumination light from the illumination light source is irradiated from one end side in the axial direction of the cylindrical body toward the other end side in parallel with the axial direction.
- the beam splitter is disposed in at least part of the axial direction of the cylindrical body, 2.
- Illumination light emitted from the illumination light source is reflected by a beam splitter and coaxially incident on the surface of the cylindrical body, and the reflected light reflected by the surface is transmitted through the beam splitter and recognized by the surface state recognition means.
- a method for inspecting the surface of a cylindrical body A method for inspecting a surface of a cylindrical body, wherein the illumination light is irradiated from one end side in the axial direction of the cylindrical body toward the other end side in parallel with the axial direction.
- a coaxial epi-illumination device for use in a cylindrical surface inspection apparatus that inspects the surface state of a cylindrical body based on reflected light reflected from the surface of the cylindrical body, An illumination light source disposed above the cylindrical body; A beam that is arranged above the cylindrical body corresponding to the illumination light source, reflects the illumination light emitted from the illumination light source, and falls coaxially on the cylindrical body surface, and transmits the reflected light reflected by the cylindrical body surface A splitter, and A coaxial epi-illumination device characterized in that illumination light is emitted from one end side in the axial direction of the cylindrical body toward the other end side in parallel with the axial direction from the illumination light source.
- the term “upward” is used to mean the direction perpendicular to the axial direction of the cylindrical body or the outside in the radial direction. It is not based on the direction of gravity.
- the surface state of the cylindrical body is recognized by the reflected light image of the coaxial incident illumination light, so that the surface state can be accurately grasped and the detection accuracy is improved. be able to. Furthermore, since the illumination light is emitted from the one end side of the cylindrical body along the axial direction, the direct illumination light directly radiated on the surface of the cylindrical body is present even if there are streaky irregularities along the axial direction. The reflected light can be prevented from being taken carelessly by the surface state recognition means, and high detection accuracy can be reliably maintained.
- the size of the illumination light source and the beam splitter can be reduced, and the size and size can be reduced.
- the inspection accuracy can be improved more reliably.
- FIG. 1 is a perspective view schematically showing a cylindrical surface inspection apparatus according to an embodiment of the present invention.
- FIG. 2 is a side view schematically showing the surface inspection apparatus of the embodiment.
- FIG. 3 is a perspective view for explaining a reflection state of direct illumination light around the defective streak-like recess in the surface inspection apparatus of the embodiment.
- FIG. 4A is a front view for explaining the reflection state of the coaxial incident illumination light around the non-defective streak-like recess.
- FIG. 4B is a front view for explaining a reflection state of the coaxial incident illumination light around the defect streak-like recess.
- FIG. 5 is a perspective view schematically showing a cylindrical surface inspection apparatus as a proposed technique.
- FIG. 6 is a front view schematically showing a surface inspection apparatus of the proposed technique.
- FIG. 7 is a perspective view for explaining a reflection state of direct illumination light around a defective streak-like recess in a surface inspection apparatus of the proposed technique.
- FIG. 8 is a front view schematically showing a conventional cylindrical surface inspection apparatus.
- FIG. 9 is a perspective view exaggeratingly showing a streak-like concave portion generated on the surface of a cylindrical body.
- FIG. 10 is a perspective view for explaining the state of reflection of illumination light around a streak-like recess in a conventional surface inspection apparatus.
- FIG 1 and 2 are views showing a cylindrical surface inspection apparatus according to an embodiment of the present invention. As shown in both drawings, this surface inspection apparatus can inspect the surface of a cylindrical body W as an inspection object (workpiece).
- the cylindrical body W is used for, for example, a photosensitive drum, a transfer roller, a developing roller, and other parts in a copying machine, a printer, a facsimile, and a composite machine that constitute an electrophotographic system.
- a cylindrical body W used as an element tube or a substrate for a photosensitive drum in a copying machine or a printer that employs an electrophotographic system is a preferable example.
- the photosensitive drum substrate is a tube after cutting or drawing and the like, and refers to the simpleness before forming the photosensitive layer.
- the tubular body after the photosensitive layer is formed on the photosensitive drum substrate can also be configured as the cylindrical body W which is an inspection object of the present invention.
- the method of manufacturing the cylindrical body W is not limited to this, and a tubular body such as extrusion molding, pultrusion molding, casting, forging, injection molding, cutting, or a combination thereof can be manufactured. Any method can be adopted as long as it is a method.
- the material of the cylindrical body W is not particularly limited, and various kinds of metal materials, synthetic resins, etc. can be applied.
- metal materials synthetic resins, etc.
- aluminum and aluminum alloys 1000 to 7000 series
- copper and copper alloys copper and copper alloys
- steel materials steel materials And magnesium and magnesium alloys.
- the cylindrical body W made of an aluminum alloy is suitable as an inspection object of the present invention.
- the surface inspection apparatus includes a coaxial epi-illumination device 1 disposed above the cylindrical body W and a camera 2 disposed above the coaxial epi-illumination device 1 as basic components.
- the coaxial epi-illumination device 1 includes an illumination light source 11 disposed above the outer side in the axial direction X on one end side of the cylindrical body W, and disposed above the cylindrical body W corresponding to the illumination light source 11 and a beam splitter.
- the half mirror 13 which comprises this.
- the illumination light source 11 is arranged with the light emitting surface 12 facing the other end side, and the illumination light L emitted from the light emitting surface 12 is applied to the half mirror 13 from the upper part on one end side of the cylindrical body W. Projecting toward the other end side in parallel with the axial direction X of the cylindrical body W.
- the half mirror 13 is disposed above the cylindrical body W along the entire axial direction of the cylindrical body W, and is disposed in an inclined posture of 45 ° so that one end side is high and the other end side is low.
- the illumination light L which is irradiated from the illumination light source 11 and goes to the half mirror 13 is reflected by the half mirror 13 and is incident on the cylindrical surface from vertically above, and the illumination light L reflected on the cylindrical surface is The light is reflected vertically upward on the surface of the cylindrical body, and the reflected light Lr is transmitted through the half mirror 13.
- the illumination light source 11 of the coaxial epi-illumination device 1 is constituted by a light emitting means capable of obtaining high luminance, such as a plurality of LEDs arranged on a line or a plane, a fluorescent lamp, and the like.
- the camera 2 is arranged in a downward posture at a vertically upper position of the half mirror 13.
- the reflected light Lr reflected from the surface of the cylindrical body and transmitted through the half mirror 13 is captured by the camera 2.
- the camera 2 is configured by a line sensor or the like in which a large number of light quantity detection elements are arranged one-dimensionally along the axial direction X of the cylindrical body W, for example.
- the illumination light L reflected by the half mirror 13 and incident on the cylindrical body W is so-called coaxial in which the optical axis coincides with the optical axis of the reflected light Lr (the optical axis of the camera 2). Epi-illumination.
- the camera 2 constitutes surface state recognition means.
- a light quantity measurement means for measuring the light quantity can be employed.
- the surface inspection apparatus includes an image processing unit 4 that processes a reflected light image captured by the camera 2, and a processed image and an inspection result determined based on the image.
- an inspection result display unit 5 such as a liquid crystal display or a CRT display.
- the surface inspection apparatus is provided with a rotation driving means (not shown) for rotating the set cylindrical body W about its axis.
- a controller for controlling the operation of the surface inspection apparatus is provided according to a predetermined program.
- the controller is constituted by, for example, a microcomputer, and an image processing program for processing image data acquired by the camera 2 is set.
- the image processing program functions as the image processing unit 4.
- the controller inspects the surface state of the cylindrical body W based on the image processed by the image processing unit 4 to detect the presence or absence of the defective portion Db, and the detection result, the image of the defective portion subjected to image processing, and the like. An image of the cylindrical surface is output and displayed on the inspection result display unit 5.
- an inspection start command is given to the controller with the cylindrical body W set at a predetermined position.
- the cylindrical body W is driven to rotate about the axis and the illumination light source 11 is turned on.
- the illumination light L emitted from the illumination light source 11 is projected from one end side of the cylindrical body W in parallel with the axial direction X and reflected by the half mirror 13 vertically downward.
- the illumination light L reflected by the half mirror 13 is coaxially incident on the upper surface of the cylindrical body W at a right angle and is reflected vertically upward on the surface. Further, the reflected light Lr passes through the half mirror 13 and is taken into the camera 2.
- the reflected light image of the imaging cylinder surface imaged by the camera 2 is processed by the image processing unit 4, and the presence or absence of a defective portion is inspected based on the processed image.
- the determination of the presence or absence of the defective portion is performed based on the amount of reflected light Lr acquired by the camera 2.
- the regular reflection light Lr of the illumination light L increases, and the amount of the reflected light image increases.
- the irregular reflection of the illumination light Lr increases, the regular reflection light decreases, and the light amount of the reflected light image decreases. Therefore, a defective portion such as a concave portion is detected based on this light amount difference.
- a relatively shallow undefective streak-like recess Da that does not become a defective part and a relatively deep defective streak-like recess Db that becomes a defective part can be clearly distinguished, Only the streak-shaped recess Db can be detected reliably. That is, as shown in FIG. 4A, in the region of the shallow undefected streak-shaped concave portion Da, the irregularly reflected light Ld of the illumination light L incident on the coaxial is small and the specularly reflected light Lr is large, whereas the deeply reflected as shown in FIG. 4B.
- the irregular reflection light Ld of the illumination light L1 is large and the regular reflection light Lr is small. Accordingly, in the reflected light image of the streak-like recess D acquired by the camera 2, when the light amount is less than a predetermined value, it is determined as an undefective streak-like recess Da, and when the light amount is large, the defect streak-like recess Db. To be judged. As a result, only the defective streak-shaped recess Db can be accurately detected as a defective portion, and the detection accuracy can be improved.
- the surface inspection apparatus can prevent the reflected light L1d of the direct illumination light L1 from being inadvertently taken into the camera 2, like the surface inspection apparatus of the proposed technology shown in FIGS.
- the direct illumination light L1 from the illumination light source 101 when the direct illumination light L1 from the illumination light source 101 is applied to the defective streak-shaped recess Db on the surface of the cylindrical body, the direct illumination light L1 is generated.
- the irregularly reflected light L1d is irregularly reflected on the inner peripheral side surface of the defective streak-like concave portion Db, and a part of the irregularly reflected light L1d is taken into the camera 102, thereby reducing the detection accuracy.
- the illumination light L is irradiated along the axial direction X from one end side in the axial direction X of the cylindrical body W. Irradiation is performed along the length direction of the recess D. For this reason, as shown in FIGS. 1 and 3, when the direct illumination light L1 directly irradiated onto the surface of the cylindrical body is projected onto the region of the streak-shaped recess D such as the defect streak-shaped recess Db, the regular reflection light L1r and the irregular reflection are performed. Both of the lights L1d are reflected obliquely upward toward the other end side of the cylindrical body W, and the reflected lights L1r and L1d do not go vertically upward.
- the reflected light L1r and L1d of the direct illumination light L1 is prevented from being taken into the camera 2, and the actual received light amount of the camera 2 exactly matches the received light amount of the reflected light Lr of the coaxial incident illumination light L.
- the defective streak-like concave portion Db can be accurately recognized as a defective portion, and the detection accuracy can be further improved.
- the streak-like concave portion D is a defective portion or a normal portion.
- an image is taken by the camera 2. Based on the reflected light image, a defect portion other than the streak-like concave portion, for example, a non-streaky concave-convex portion, a flaw, foreign matter adhesion, dirt, and the like are detected.
- the surface state of the cylindrical body is recognized by the reflected light image of the coaxial incident illumination light, so that the surface state can be accurately grasped and the detection accuracy is improved. Can be made.
- the illumination light L from the illumination light source 11 is irradiated from the one end side of the cylindrical body W along the axial direction X, it is directly irradiated from the illumination light source 11 directly onto the cylindrical body surface.
- the reflected light of the illumination light L1 is not inadvertently taken into the camera 2, and high detection accuracy can be maintained.
- the surface inspection apparatus of this embodiment since it is comprised so that the coaxial incident illumination light L1 may be irradiated to the whole length direction in the cylindrical body W to be examined at once, the whole length direction whole area of the cylindrical body W Can be inspected at a time, and the inspection efficiency can be improved.
- the surface inspection apparatus of this embodiment since illumination light is irradiated in parallel with the length direction of a defect part, even if illumination light L1 is directly irradiated to the cylindrical body surface from the illumination light source 11, it is. , Diffusely reflected light is less likely to occur. Accordingly, a large amount of irregularly reflected light does not enter the camera 2, and it is not necessary to separately provide an optical means such as an aperture or parallel light illumination to prevent the entrance of the light, and the structure is simplified correspondingly. And cost reduction.
- a streaky concave portion has been described as an example of the defective portion.
- a high convex portion having a defect and a low convex portion having no defect are similarly applied to the streaky convex portion. Can be reliably distinguished from each other, and a defective streak-like convex portion can be accurately detected.
- a half mirror what is arrange
- the present invention is not limited thereto, and in the present invention, a half mirror is used that is disposed only in a part of the cylindrical body in the length direction, and the illumination light is applied to only a part of the cylindrical body in the length direction. It may be used as well.
- the coaxial epi-illumination device itself can be reduced in size and size, and as a result, the entire surface inspection apparatus can be reduced in size and size.
- the coaxial epi-illumination device is configured to be movable in the length direction of the cylindrical body W.
- the whole length direction of W may be inspected, or a plurality of coaxial epi-illumination devices are arranged along the length direction of the cylindrical body W, and the length of the cylindrical body W is determined by each coaxial epi-illumination device.
- the entire direction may be inspected at once.
- the optical parts such as the illumination light source, the half mirror, and the camera are described as an example of the case where the optical parts are arranged above the horizontally arranged cylindrical body, but not limited thereto.
- the optical system component may be disposed at any position on the outer side in the radial direction perpendicular to the axial direction of the cylindrical body, that is, on the side of the cylindrical body.
- the surface inspection apparatus of the present invention can be applied to an inspection apparatus for inspecting the surface state of a cylindrical body.
- Coaxial epi-illumination device 11 Illumination light source 13: Half mirror (beam splitter) 2: Camera (surface condition recognition means) L: illumination light Lr: specular reflection light W: cylindrical body X: axial direction
Abstract
Description
前記照明光源から照明光が、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射されるようにしたことを特徴とする円筒体の表面検査装置。
前記ビームスプリッターで反射される照明光が、円筒体の軸心方向の一部に落射されるようになっている前項1に記載円筒体のの表面検査装置。
前記照明光源から照明光を、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射するようにしたことを特徴とする円筒体の表面検査方法。
円筒体の上方に配置される照明光源と、
円筒体の上方に前記照明光源に対応して配置され、前記照明光源から照射される照明光を反射して円筒体表面に同軸落射させ、その円筒体表面で反射された反射光を透過させるビームスプリッターと、を備え、
前記照明光源から照明光が、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射されるようにしたことを特徴とする同軸落射照明装置。
11:照明光源
13:ハーフミラー(ビームスプリッター)
2:カメラ(表面状態認識手段)
L:照明光
Lr:正反射光
W:円筒体
X:軸心方向
Claims (7)
- 円筒体の上方に配置される照明光源と、円筒体の上方に前記照明光源に対応して配置されるビームスプリッターと、前記ビームスプリッターの上方に配置される表面状態認識手段と、を備え、前記照明光源から照射される照明光が、前記ビームスプリッターによって反射されて円筒体表面に同軸落射され、その円筒体表面で反射された反射光が前記ビームスプリッターを透過して、前記表面状態認識手段によって認識されるようにした円筒体の表面検査装置であって、
前記照明光源から照明光が、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射されるようにしたことを特徴とする円筒体の表面検査装置。 - 前記ビームスプリッターが、円筒体の軸心方向の少なくとも一部に配置され、
前記ビームスプリッターで反射される照明光が、円筒体の軸心方向の一部に落射されるようになっている請求項1に記載円筒体のの表面検査装置。 - 前記ビームスプリッターが、ハーフミラーによって構成されている請求項1または2に記載の円筒体の表面検査装置。
- 円筒体として、引抜加工によって得られたアルミニウムまたはその合金製の引抜管が用いられる請求項1~3のいずれか1項に記載の円筒体の表面検査装置。
- 円筒体として、感光ドラム用基体が用いられる請求項1~4のいずれか1項に記載の円筒体の表面検査装置。
- 照明光源から照射される照明光を、ビームスプリッターによって反射させて円筒体表面に同軸落射させ、その表面で反射させた反射光を前記ビームスプリッターに透過させて、表面状態認識手段によって認識させるようにした円筒体の表面検査方法であって、
前記照明光源から照明光を、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射するようにしたことを特徴とする円筒体の表面検査方法。 - 円筒体の表面で反射された反射光に基づいて、円筒体の表面状態を検査するようにした円筒体の表面検査装置に用いられる同軸落射照明装置であって、
円筒体の上方に配置される照明光源と、
円筒体の上方に前記照明光源に対応して配置され、前記照明光源から照射される照明光を反射して円筒体表面に同軸落射させ、その円筒体表面で反射された反射光を透過させるビームスプリッターと、を備え、
前記照明光源から照明光が、円筒体の軸心方向の一端側から軸心方向と平行に他端側に向けて照射されるようにしたことを特徴とする同軸落射照明装置。
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- 2010-06-18 WO PCT/JP2010/060368 patent/WO2010150709A1/ja active Application Filing
- 2010-06-18 US US13/376,859 patent/US8941823B2/en not_active Expired - Fee Related
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CN102460130B (zh) | 2013-12-25 |
JP2011007498A (ja) | 2011-01-13 |
US8941823B2 (en) | 2015-01-27 |
CN102460130A (zh) | 2012-05-16 |
JP5415162B2 (ja) | 2014-02-12 |
US20120127462A1 (en) | 2012-05-24 |
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