WO2010117004A1 - 光透過性板状物のリーム検出方法 - Google Patents
光透過性板状物のリーム検出方法 Download PDFInfo
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- WO2010117004A1 WO2010117004A1 PCT/JP2010/056260 JP2010056260W WO2010117004A1 WO 2010117004 A1 WO2010117004 A1 WO 2010117004A1 JP 2010056260 W JP2010056260 W JP 2010056260W WO 2010117004 A1 WO2010117004 A1 WO 2010117004A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/167—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by projecting a pattern on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
Definitions
- the present invention relates to a detection method for detecting the ream of a light transmissive plate-like material such as a plate glass, and in particular, it is possible to detect the ream of a light transmissive plate-like material such as a plate glass conveyed on an inspection line in a non-stop manner. Related to the detection method.
- ream partial (local) linear deformation
- the ream is detected using, for example, a conventionally used point light projection method (see Patent Document 1).
- FIG. 8 is a diagram for explaining an apparatus configuration and the like for performing the point light projection method.
- the method for detecting a ream using the point light projection method is a method for directly detecting subtle brightness and darkness that appears due to a ream in a projected image from a point light (light source).
- a point light light source
- the light transmissive plate 110 such as plate glass is irradiated with light from the light source 100 arranged at a distance, and the light transmitted through the light transmissive plate 110 is projected onto the screen 120. This is performed by the inspector 130 observing the projected light image with the naked eye.
- the detection of the ream is a severe task for the inspector because the projected image projected onto the screen 120 has low contrast and poor visibility.
- the present invention has been made in view of such circumstances, and a detection method capable of reducing the burden of detecting a ream generated on a light-transmitting plate-like object such as a plate glass and accurately detecting the ream.
- the purpose is to provide.
- the first aspect of the present invention is fixedly arranged in a posture in which the optical axis is inclined at a predetermined angle with respect to the screen on which the stripe pattern is drawn and the light transmissive plate-like object.
- An image pickup means that is focused so that an image of the stripe pattern is formed on a light receiving element when the stripe pattern is imaged through the light-transmitting plate-like object that does not have a linear deformation, and a display;
- the image pickup means includes the image pickup means.
- a step of computing a graph showing a luminance distribution of each of the pixels characterized by comprising the steps of: displaying the calculated graph on the display surface of the image display device.
- the stripe pattern is imaged through the light-transmitting plate-like object that is fixedly arranged in a posture in which the optical axis is inclined at a predetermined angle with respect to the light-transmitting plate-like object.
- focus adjustment is performed so that the stripe pattern forms an image on the light receiving element.
- the focal length changes due to the ream, so the image includes a defocused portion.
- the defocus portion in the luminance distribution graph of each pixel of the image, the contrast of the luminance value is reduced so that the difference in brightness is reduced to an intermediate brightness (brightness of brightness is averaged).
- the envelope of the peak value of the luminance distribution and the envelope of the bottom value come close to each other, and the interval between the envelopes appears in a contracted state. For this reason, when a luminance distribution graph is displayed on the display surface of the image display device, a defocused portion (that is, a portion where the interval between both envelopes is contracted) in the graph can be easily recognized.
- the ream which is a wave of a light-transmitting plate-like object
- the conventional point light method in which the subtle brightness of the projected image from the point light is directly visually detected.
- the method further comprises the step of displaying the captured image on the display surface of the image display device so as to be stacked on the image captured immediately before.
- the stripe pattern is imaged through the light-transmitting plate-shaped object that is fixedly disposed in a posture in which the optical axis is inclined at a predetermined angle with respect to the light-transmitting plate-shaped object.
- focus adjustment is performed so that the stripe pattern forms an image on the light receiving element.
- the focal length changes due to the ream, so the image includes a defocused portion.
- the defocused portion that is, both envelopes in the image is displayed.
- the portion where the interval between the lines is contracted is continuously displayed (because the ream is a linear deformation, it is displayed as a linear defocused portion).
- the ream can be detected very easily by paying attention to the defocused part (linear defocused part, that is, the contracted part) in the image displayed in the form of being superimposed on the image captured immediately before. It becomes. That is, according to the second aspect, it is possible to detect a ream generated on a light transmissive plate-like object such as a plate glass conveyed on the line, reducing the burden on the inspector and stabilizing the accuracy. It becomes possible.
- a step of calculating a contraction amount of an interval between a peak value envelope and a bottom value envelope of the calculated graph Comparing the contraction amount of the gap between the peak value envelope and the bottom value envelope measured with a predetermined standard value, and whether or not there is a ream of the light-transmitting plate-like material based on the comparison result And a step of making a determination.
- the third aspect it is possible to automatically detect the ream generated in the light transmissive plate-like object.
- the light-transmitting plate-like material is a plate glass for a flat panel display, a plate glass for an automobile, or a resin. It is a board.
- the fourth aspect is an example of a light transmissive plate. Therefore, the light-transmitting plate-like material of the present invention is not limited to these.
- a screen having a stripe pattern drawn thereon, and a ream which is a partial linear deformation in which the optical axis is fixedly disposed at a predetermined angle with respect to the light-transmitting plate-like object.
- An image pickup unit that is focused so that an image of the stripe pattern is formed on a light receiving element when the stripe pattern is imaged through the light-transmitting plate-like object that does not exist, and an image display device having a display surface
- the imaging means passes through the field of view of the imaging means.
- a step of capturing an image including the stripe pattern through a light-transmitting plate-like object, and a luminance distribution of each pixel constituting the image based on the captured image A step of calculating a graph, a step of calculating a contraction amount of an interval between a peak value envelope and a bottom value envelope of the calculated graph, a peak value envelope and a bottom value of the calculated peak value
- the stripe pattern is imaged through the light-transmitting plate that is fixedly disposed in a posture in which the optical axis is inclined at a predetermined angle with respect to the light-transmitting plate, and no ream is present. In this case, focus adjustment is performed so that the stripe pattern forms an image on the light receiving element.
- the focal length changes due to the ream, so the image includes a defocused portion. Since the defocused part is averaged in the confusion range in the luminance distribution graph of each pixel of the image, the envelope of the peak value and the envelope of the bottom value of the luminance distribution approach each other, and both envelopes Appears in a contracted state.
- a ream generated in the light-transmitting plate-like object is obtained only by comparing the contraction amount of the interval between the peak value envelope and the bottom value envelope with a predetermined standard value. Automatic detection with high accuracy is possible.
- the present invention it is possible to provide a detection method capable of reducing the burden of detecting a ream generated on a light-transmitting plate-like object such as a plate glass and accurately detecting the ream. It becomes possible.
- FIG. 1 is a system configuration diagram of a ream detection device 10 used in a ream detection method of the present embodiment. It is a figure for demonstrating the general manufacturing process of plate glass. It is an example of a stripe pattern P drawn on the screen 16. 4 is a plan view of the vicinity of a detection section 32 on the inspection line 30.
- FIG. It is a flowchart for demonstrating the method to detect the ream of the glass ribbon. It is an example of the graph G and the stripe pattern image I showing the luminance distribution of each pixel. It is a graph G when there is no ream in the glass ribbon. It is a graph G when a ream exists in the glass ribbon. It is a graph G when dirt or a foreign substance exists in the glass ribbon. It is a figure for demonstrating a point light projection method.
- FIG. 1 is a system configuration diagram of a ream detection device 10 used in the ream detection method of the present embodiment.
- FIG. 2 is a diagram for explaining a general manufacturing process of plate glass.
- FIG. 3 is an example of the stripe pattern P drawn on the screen 16.
- FIG. 4 is a plan view of the vicinity of the detection section 32 on the inspection line 30.
- the plate glass using the float method is generally a melting step in which a mixture of cullet or the like with the main raw material silica sand is melted in a melting furnace to form a transparent glass substrate,
- the glass substrate is poured into a float bath in which molten metal (tin) is stored, and is molded into a glass sheet shape.
- the glass sheet after molding is gradually cooled to prevent distortion due to temperature differences. It is manufactured through a cooling step, a washing / drying step for washing / drying the plate glass after the slow cooling, an inspection step (inspection line) for inspecting the thickness of the plate glass after the washing / drying, and the like.
- the ream detection device 10 of the present embodiment is a partial (local) linear deformation (hereinafter referred to as a glass ribbon) that is formed using a float method (hereinafter referred to as a glass ribbon) for a plasma display (PDP).
- a glass ribbon a partial (local) linear deformation
- PDP plasma display
- the apparatus is used in the detection section 32 on the inspection line 30 on the upstream side of the plate glass manufacturing process using the float method.
- the glass ribbon 22 to be inspected is conveyed on the inspection line 30 by a known conveying means (not shown) and passes through the detection section 32.
- the ream detection device 10 sequentially displays on the image display device 20 images and the like that are referred to when detecting the ream of the glass ribbon 22 that passes through the detection section 32.
- a ream detection device 10 As shown in FIG. 1, a ream detection device 10 according to the present embodiment includes an image processing device 12, an imaging unit 14 connected to the image processing device 12 through a predetermined interface, a screen 16, an illumination unit 18, and an image display device 20. And two sets of ream detection optical systems.
- the image processing apparatus 12 includes calculation / control means such as MPU and CPU, storage means such as RAM and ROM (none of which are shown), and the like.
- the image processing apparatus 12 represents a luminance distribution of each pixel constituting a stripe pattern image, which will be described later, by a control unit that controls the imaging unit 14 and the like by executing a predetermined program read into the storage unit by the calculation / control unit. It functions as a calculation means for calculating the graph G.
- the imaging means 14 is for imaging the screen 16 through the glass ribbon 22 (that is, passing through the glass ribbon 22).
- a line sensor type CCD in which light receiving elements (not shown) are arranged in a line.
- photographing speed several kHz.
- the imaging means 14 has a range (a range in which the detection of the ream is desired) from the width direction central portion 22a to the width direction one end portion 22b (and the other end portion 22c) of the glass ribbon 22 (width dimension: about 5 m) in the horizontal posture.
- the optical axis AX is inclined by about 15 to 30 ° (preferably 15 °) with respect to the horizontal glass ribbon 22 so that it is within the field of view, and the arrangement direction of the light receiving elements is included in the vertical plane.
- the glass ribbon 22 is fixedly disposed below each of both end portions 22b and 22c in the width direction (see FIGS. 1 and 4).
- the imaging unit 14 is focused so that an image of the screen 16 (stripe pattern P) is formed on the light receiving element when the screen 16 is imaged through the glass ribbon 22 in a horizontal posture where no ream R exists.
- the screen 16 is a light transmissive screen, and is disposed in a posture perpendicular to the optical axis AX of the imaging means 14 (see FIG. 1).
- a stripe pattern P inclined by ° ⁇ 30 ° (preferably 45 °) is drawn.
- the stripe pattern P is, for example, a black and white stripe pattern having a duty ratio of 45:55 to 55:45 (preferably 50:50), a pitch of about 2 to 4 mm (constant pitch or variable pitch), and about 500 black and white stripe patterns.
- the screen 16 is uniformly illuminated by, for example, a high-frequency fluorescent lamp as the illumination unit 18 that operates at a frequency higher than the imaging speed of the imaging unit 14.
- the imaging unit 14 captures an image including the screen 16 (stripe pattern P) uniformly illuminated by the illumination unit 18 through the glass ribbon 22 passing through the field of view of the imaging unit 14.
- An alternate long and short dash line in FIG. 3 represents an imaging range of the imaging unit 14 with respect to the screen 16. The captured image is taken into the image processing device 12.
- FIG. 5 is a flowchart for explaining the method. The following processing is realized mainly by the image processing apparatus 12 (calculation / control means) executing a predetermined program read into the storage means.
- the imaging unit 14 includes a screen 16 (stripe pattern P) uniformly illuminated by the illumination unit 18 through the glass ribbon 22 passing through the field of view of the imaging unit 14 at each imaging timing (step S10: Yes).
- An image I (hereinafter referred to as a stripe pattern image I) is captured (step S12).
- the image processing device 12 calculates the luminance value of each pixel constituting the captured stripe pattern image I (for one line), and represents the graph G representing the luminance distribution of each pixel, that is, the calculation
- a graph G in which the luminance value of each pixel is drawn in a coordinate system in which the vertical axis represents the luminance value and the horizontal axis represents each pixel (pixel position of each pixel) is created, as shown in FIG. 20 is displayed on the display surface (step S14).
- the imaging unit 14 is focused so that when the stripe pattern P is imaged through the glass ribbon 22 where no ream R exists, the image of the stripe pattern P is formed on the light receiving element. Therefore, when imaging a stripe pattern image I containing a stripe pattern P in the glass ribbon 22 over the ream R is not present, the stripe pattern image I does not include the defocus portion D p. On the other hand, when the stripe pattern image I including the stripe pattern P is captured through the glass ribbon 22 where the ream R exists, the focal length changes due to the ream R, and therefore the stripe pattern image I is including a focus part D p.
- the defocused portion D p that is, the envelope EP of the peak value and the envelope of the bottom value
- the contracted portion of the interval with the line EB contracts to the average value of the surrounding luminance values (see FIG. 6), it can be seen much more easily than the conventional point light projection method.
- ream detection method of the present embodiment a conventional point light method that directly detects the subtle contrast of the projected image from the point light with respect to the ream that is the undulation of the light transmissive plate-like object. Compared to the above, not only the visibility is greatly improved, but also the field of view and distance of detection can be limited to an appropriate range for the inspector, so that stable detection can be performed with less burden.
- the interval between the peak value envelope EP and the bottom value envelope EB of the graph G is substantially constant (see FIG. 7A).
- the ream portion is in a defocused state, and the contrast of the brightness value is lowered so that the difference in brightness is reduced to an intermediate brightness.
- the interval between the peak value envelope EP and the bottom value envelope EB of the graph G contracts (see FIG. 7B).
- the envelope EP of the peak value of the graph G is the bottom value. It falls so that it may approach the envelope EB (refer FIG. 7C).
- the image processing device 12 displays the stripe pattern image I imaged in step S12 together with the graph G representing the luminance distribution of each pixel on the display surface of the image display device 20 (step S16).
- FIG. 6 shows an example in which the stripe pattern image I captured in step S12 is converted into an image (I1-I2) for one line extending in the left-right direction and displayed in a form in which n lines are stacked in the vertical direction.
- the lowermost stripe pattern image Itn represents that the image was captured before tn time (for example, 10 minutes before), and the uppermost stripe pattern image It1 was captured before time t1. Represents.
- the stripe pattern image I includes the defocus part D p.
- the stripe pattern image I including the stripe pattern P is displayed on the display surface of the image display device 20 in the form of being stacked on the most recently captured stripe pattern image I (historical display form)
- the stripe pattern is displayed.
- the defocus portion D p in the image I that is, the contraction portion between the envelopes EP and EB
- the ream R is a linear deformation, the linear defocus portion D p). Will be displayed).
- Defocus portion D p of the linear in order to shrink the average value of the surrounding luminance values, compared with the conventional point light projection method can be seen much easier (see FIG. 6).
- the ream R generated on the glass ribbon 22 can be detected very easily ( Assisting the detection of ream). That is, according to the ream detection method of the present embodiment, a ream generated on a light transmissive plate-like object such as a plate glass conveyed on the line is detected with reduced burden on the inspector and stable accuracy. Is possible.
- steps S18 to S22 a process for automatically detecting the ream R will be described (steps S18 to S22). If automatic detection of the ream R is not performed, these steps S18 to S22 can be omitted.
- the image processing device 12 calculates the contraction amount of the interval between the peak value envelope EP and the bottom value envelope EB of the graph G calculated in step S14 (step S18), and the calculated both envelopes EP are calculated. , The contraction amount of EB and a predetermined standard value (set range) set in advance, and based on the comparison result, whether or not the contraction amount of both envelopes EP and EB is within the standard value (set range) That is, the presence / absence of the ream R of the glass ribbon 22 is determined (step S20). If the calculated shrinkage amounts of the envelopes EP and EB are within the standard value (setting range) (step S20: Yes), the image processing apparatus 12 returns to step S10 and performs the processing of steps S10 to S20. repeat.
- the ream R is automatically measured in a non-stop manner on the glass ribbon 22 conveyed on the inspection line 30.
- the image processing device 12 displays an alarm or the like on the display surface of the image display device 20. This is notified by displaying.
- the processing in steps S18 to S20 is performed (that is, the contraction amount of the interval between the peak value envelope EP and the bottom value envelope EB, and a predetermined standard value). ), It is possible to automatically detect the ream R generated on the glass ribbon 22 with high accuracy.
- the plate glass to be inspected (that is, the glass ribbon 22) is a plate glass for a plasma display (PDP)
- PDP plasma display
- plate glass for flat panel display for example, plate glass for liquid crystal display (LCD), plate glass for field emission display, plate glass for flat display panel (FPD) such as plate glass for organic EL), plate glass for automobile
- the resin plate can be an inspection target.
- test object is the plate glass (namely, glass ribbon 22) which is not cut
- this invention is not limited to this.
- the present invention is not limited to this.
- only one set of ream detection optical systems may be used.
- three or more sets of ream detection optical systems may be used to improve detection accuracy.
- the imaging unit 14 is a line sensor type CCD
- the present invention is not limited to this.
- an area sensor type imaging device may be used as the imaging means 14.
- the ream R is automatically measured while displaying the graph G representing the luminance distribution of each pixel and the stripe pattern image I (see step S10 to step S22 in FIG. 5) has been described.
- the present invention is not limited to this.
- the ream R can be automatically measured without displaying the graph G representing the luminance distribution of each pixel and the stripe pattern image I.
- the present invention is not limited to this.
- the graph G representing the luminance distribution of each pixel or only the stripe pattern image I may be displayed.
- the imaging unit 14 is described as being fixedly disposed below the both ends 22b and 22c in the width direction of the glass ribbon 22 (see FIGS. 1 and 4). It is not limited to.
- the imaging means 14 may be fixedly disposed above each of the width direction both ends 22b and 22c of the glass ribbon 22, or may be disposed elsewhere.
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Abstract
Description
図2に示すように、フロート法を用いた板ガラスは、一般的に、主原料の珪砂にカレット等を混ぜ合わせたものを溶解炉で溶かし、透明なガラス素地とする溶解工程、当該溶解後のガラス素地を溶融金属(錫)が蓄えられたフロートバスに流しこみ、板ガラスの形状に成形する成形工程、温度差に起因する歪みが発生しないように、当該成形後の板ガラスを徐々に冷却する徐冷工程、当該徐冷後の板ガラスに対し、洗浄・乾燥を行う洗浄・乾燥工程、当該洗浄・乾燥後の板ガラスの厚さ等を検査する検査工程(検査ライン)等を経て製造される。
図1に示すように、本実施形態のリーム検出装置10は、画像処理装置12、画像処理装置12に所定インターフェースを介して接続された撮像手段14、スクリーン16、照明手段18、画像表示装置20等からなる2組のリーム検出光学系を備えている。
次に、上記構成のリーム検出装置10を用いて、検出セクション32を通過するように搬送されるガラスリボン22のリームRを検出する方法について、図5を参照しながら説明する。図5は、当該方法を説明するためのフローチャートである。以下の処理は、主に、画像処理装置12(演算・制御手段)が、記憶手段に読み込まれた所定プログラムを実行することにより実現される。
12…画像処理装置
14…撮像手段
16…スクリーン
18…照明手段
20…画像表示装置
22…ガラスリボン
Claims (5)
- ストライプパターンが描かれたスクリーンと、光透過性板状物に対して光軸が所定角度傾斜した姿勢で固定配置され、部分的な線状の変形であるリームが存在しない前記光透過性板状物越しに前記ストライプパターンを撮像した場合に当該ストライプパターンの像が受光素子に結像するようにピント調整された撮像手段と、表示面を有する画像表示装置と、を備えるリーム検出装置を用いて、検出セクションを通過するように搬送される光透過性板状物のリームを検出するリーム検出方法において、
前記撮像手段によって当該撮像手段の視野内を通過する前記光透過性板状物越しに前記ストライプパターンを含む画像を撮像するステップと、
前記撮像された画像に基づいて、当該画像を構成する各画素の輝度分布を表すグラフを演算するステップと、
前記演算されたグラフを前記画像表示装置の表示面に表示するステップと、
を備えることを特徴とするリーム検出方法。 - 前記撮像された画像を直前に撮像された画像に積み重ねる形で前記画像表示装置の表示面に表示するステップと、
を備えることを特徴とする請求項1に記載のリーム検出方法。 - 前記演算されたグラフのピーク値の包絡線とボトム値の包絡線との間隔の収縮量を演算するステップと、
前記演算されたピーク値の包絡線とボトム値の包絡線との間隔の収縮量と、所定の規格値とを比較するステップと、
前記比較結果に基づいて、前記光透過性板状物のリームの有無判定を行うステップと、をさらに備えることを特徴とする請求項1又は2に記載のリーム検出方法。 - 前記光透過性板状物は、フラットパネルディスプレイ用の板ガラス、自動車用の板ガラス、又は、樹脂板であることを特徴とする請求項1から3のいずれかに記載のリーム検出方法。
- ストライプパターンが描かれたスクリーンと、光透過性板状物に対して光軸が所定角度傾斜した姿勢で固定配置され、部分的な線状の変形であるリームが存在しない前記光透過性板状物越しに前記ストライプパターンを撮像した場合に当該ストライプパターンの像が受光素子に結像するようにピント調整された撮像手段と、表示面を有する画像表示装置と、を備えるリーム検出装置を用いて、検出セクションを通過するように搬送される光透過性板状物のリームを検出するリーム検出方法において、
前記撮像手段によって当該撮像手段の視野内を通過する前記光透過性板状物越しに前記ストライプパターンを含む画像を撮像するステップと、
前記撮像された画像に基づいて、当該画像を構成する各画素の輝度分布を表すグラフを演算するステップと、
前記演算されたグラフのピーク値の包絡線とボトム値の包絡線との間隔の収縮量を演算するステップと、
前記演算されたピーク値の包絡線とボトム値の包絡線との間隔の収縮量と、所定の規格値とを比較するステップと、
前記比較結果に基づいて、前記光透過性板状物のリームの有無判定を行うステップと、を備えることを特徴とするリーム検出方法。
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Application Number | Priority Date | Filing Date | Title |
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JP2011508372A JPWO2010117004A1 (ja) | 2009-04-09 | 2010-04-06 | 光透過性板状物のリーム検出方法 |
CN2010800061823A CN102334025A (zh) | 2009-04-09 | 2010-04-06 | 透光性板状物的拉引线道检测方法 |
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KR (1) | KR20120022701A (ja) |
CN (1) | CN102334025A (ja) |
TW (1) | TW201100747A (ja) |
WO (1) | WO2010117004A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102788805A (zh) * | 2011-05-19 | 2012-11-21 | 株式会社日立高新技术 | 多晶硅薄膜检查方法及其装置 |
CN103020950A (zh) * | 2011-09-27 | 2013-04-03 | 华为终端有限公司 | 亮度函数获取方法以及相关装置 |
JP2019053020A (ja) * | 2017-09-12 | 2019-04-04 | 富士通株式会社 | 検査方法、装置、システム及びプログラム |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6631261B2 (ja) * | 2016-01-14 | 2020-01-15 | セイコーエプソン株式会社 | 画像認識装置、画像認識方法および画像認識ユニット |
JP6829946B2 (ja) * | 2016-04-28 | 2021-02-17 | 川崎重工業株式会社 | 部品検査装置および方法 |
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JPS61176838A (ja) * | 1985-01-31 | 1986-08-08 | Kanebo Ltd | 透明または半透明の板状体の欠点検査方法 |
JPH05249052A (ja) * | 1992-03-06 | 1993-09-28 | Nippon Sheet Glass Co Ltd | 透光板材の欠点検出装置 |
JPH0720059A (ja) * | 1993-06-30 | 1995-01-24 | Asahi Glass Co Ltd | 透視歪の測定方法および装置 |
JPH0989603A (ja) * | 1995-09-26 | 1997-04-04 | Asahi Glass Co Ltd | 測定装置の補正方法および測定装置 |
JP2002116015A (ja) * | 2000-10-05 | 2002-04-19 | Mitsubishi Rayon Co Ltd | 欠陥検出装置及び方法 |
JP2002148195A (ja) * | 2000-11-06 | 2002-05-22 | Sumitomo Chem Co Ltd | 表面検査装置及び表面検査方法 |
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US6930772B2 (en) * | 2001-07-05 | 2005-08-16 | Nippon Sheet Glass Company, Limited | Method and device for inspecting defect of sheet-shaped transparent body |
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2010
- 2010-04-06 JP JP2011508372A patent/JPWO2010117004A1/ja not_active Withdrawn
- 2010-04-06 WO PCT/JP2010/056260 patent/WO2010117004A1/ja active Application Filing
- 2010-04-06 CN CN2010800061823A patent/CN102334025A/zh active Pending
- 2010-04-06 KR KR1020117017771A patent/KR20120022701A/ko not_active Application Discontinuation
- 2010-04-09 TW TW099111164A patent/TW201100747A/zh unknown
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JPS61176838A (ja) * | 1985-01-31 | 1986-08-08 | Kanebo Ltd | 透明または半透明の板状体の欠点検査方法 |
JPH05249052A (ja) * | 1992-03-06 | 1993-09-28 | Nippon Sheet Glass Co Ltd | 透光板材の欠点検出装置 |
JPH0720059A (ja) * | 1993-06-30 | 1995-01-24 | Asahi Glass Co Ltd | 透視歪の測定方法および装置 |
JPH0989603A (ja) * | 1995-09-26 | 1997-04-04 | Asahi Glass Co Ltd | 測定装置の補正方法および測定装置 |
JP2002116015A (ja) * | 2000-10-05 | 2002-04-19 | Mitsubishi Rayon Co Ltd | 欠陥検出装置及び方法 |
JP2002148195A (ja) * | 2000-11-06 | 2002-05-22 | Sumitomo Chem Co Ltd | 表面検査装置及び表面検査方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102788805A (zh) * | 2011-05-19 | 2012-11-21 | 株式会社日立高新技术 | 多晶硅薄膜检查方法及其装置 |
CN103020950A (zh) * | 2011-09-27 | 2013-04-03 | 华为终端有限公司 | 亮度函数获取方法以及相关装置 |
WO2013044642A1 (zh) * | 2011-09-27 | 2013-04-04 | 华为终端有限公司 | 亮度函数获取方法以及相关装置 |
JP2019053020A (ja) * | 2017-09-12 | 2019-04-04 | 富士通株式会社 | 検査方法、装置、システム及びプログラム |
Also Published As
Publication number | Publication date |
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CN102334025A (zh) | 2012-01-25 |
KR20120022701A (ko) | 2012-03-12 |
JPWO2010117004A1 (ja) | 2012-10-18 |
TW201100747A (en) | 2011-01-01 |
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