WO2010071078A1 - 銅または銅合金用のエッチング液、エッチング方法及びエッチング液の再生管理方法 - Google Patents
銅または銅合金用のエッチング液、エッチング方法及びエッチング液の再生管理方法 Download PDFInfo
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- WO2010071078A1 WO2010071078A1 PCT/JP2009/070713 JP2009070713W WO2010071078A1 WO 2010071078 A1 WO2010071078 A1 WO 2010071078A1 JP 2009070713 W JP2009070713 W JP 2009070713W WO 2010071078 A1 WO2010071078 A1 WO 2010071078A1
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- copper
- etching solution
- etching
- chloride
- regeneration
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/067—Etchants
Definitions
- the present invention relates to an etching solution for copper or copper alloy, an etching method, and a method for managing the regeneration of the etching solution.
- a subtractive method is widely used in which a resist pattern is formed on a substrate to which a copper foil is bonded in advance, and an unnecessary portion of the copper foil is removed using an etching solution such as an iron (III) chloride aqueous solution. It is used.
- an etching solution wraps around the back surface of the resist pattern, the line width becomes narrower than that of the resist pattern, and the shape of the line cross section does not become a rectangle, so-called undercutting occurs. It is known to occur. When undercut occurs, the electrical characteristics of the formed circuit deteriorate, and the area required for mounting components cannot be secured. Therefore, printed circuit boards with high circuit density are manufactured by the subtractive method. It was difficult to do.
- Patent Documents 4 and 5 A method for detecting the oxidation-reduction potential and chlorine concentration of an etching solution for the purpose of performing stable continuous regeneration operation, and adding hydrogen chloride and ferric chloride at a certain ratio to one equivalent of chlorate has been proposed (see, for example, Patent Documents 4 and 5).
- Patent Documents 4 and 5 when the regeneration is performed, the composition concentration in the etching solution is changed, and a continuous and stable etching rate cannot be ensured. Further, the undercut suppressing ability was quite insufficient.
- a regenerating gas, ozone is regenerated by regenerating ozone as a target, and a flow cell type photometer is used as a means to measure the degree of deterioration, and the color and absorbance of the etchant are measured.
- An etching solution regenerating apparatus has been proposed (see, for example, Patent Document 6).
- Patent Document 6 As the regeneration is repeated, the concentration of copper chloride increases, and proper management with a photometer becomes impossible, and the etching rate changes, and stable continuous regeneration operation cannot be performed. . Further, the undercut suppressing ability was quite insufficient.
- the value of absorbance changes due to a change in temperature, and the color and absorbance of the etching solution greatly fluctuate due to the influence of bubbles present in the etching solution, and stable regeneration management cannot be performed.
- an automatic analysis and management device As an automatic management device for electroless composite plating solutions, an automatic analysis and management device has been proposed that measures transmittance or absorbance at at least two different wavelengths and calculates the desired composition concentration from the measured values by arithmetic processing.
- a calibration curve is created from basic data obtained by changing the composition concentration of the plating solution to be blended in advance, and the concentration of the unknown electroless composite plating solution is calculated using this. The effects of temperature and bubbles could not be excluded.
- An object of the present invention is to provide an etching solution and an etching method for copper or a copper alloy that can be etched with very little undercut and that can maintain a stable etching rate from the time of bathing even if it is regenerated. It is to be. It is another object of the present invention to provide an etching solution regeneration management method that has a small change in etching rate before and after the regeneration, can suppress the influence of the temperature of the etching solution and bubbles present in the etching solution, and is excellent in maintainability.
- the present invention comprises water as a main component, (1) 5 to 20% by mass of iron (III) chloride, (2) 0.5 to 3% by mass of copper (II) chloride, (3) iron chloride ( III) Etching solution for copper or copper alloy, containing 5 to 20% by mass of a compound that forms an insoluble salt with copper, and using the etching solution as a new solution
- An etching solution regeneration management method comprising performing regeneration management using a characteristic etching method and a ratio of transmittance at two or more different wavelengths.
- the compound that forms an insoluble salt with copper is preferably oxalic acid.
- the ratio of transmittance at two or more different wavelengths is simultaneously measured in the same optical path to determine the etching solution regeneration management.
- the first feature of the present invention is an etching solution.
- the etching solution of the present invention has a concentration of iron (III) chloride and copper (II) chloride within a specified range, and contains a compound that forms an insoluble salt with copper. Very little etching is possible, and a printed wiring board having a high circuit density can be manufactured by a subtractive method.
- oxalic acid as a compound that forms an insoluble salt with copper, undercut is further suppressed, and no toxic gas is generated during use of the etching solution, and a processing method has been established. Since it comprises only components, it can be easily and completely treated after use, and it is easy to avoid problems in terms of occupational health, pollution prevention, and environmental conservation.
- the second feature of the present invention is a stable continuous regeneration operation brought about by the etching solution.
- the etching solution of the present invention is an etching solution composition that takes into consideration the etching amount of the copper foil and the concentration change of copper chloride and other additives accompanying the regeneration and overflow corresponding thereto, so that it is rebuilt and regenerated as it is. Even if it starts, the change of the various composition density
- the third feature of the present invention is a stable continuous regeneration operation brought about by regeneration management.
- the regeneration management of the present invention measures the permeability of the etching solution, but compared to the commonly used oxidation-reduction potential (hereinafter abbreviated as “ORP”), the change in the amount of copper dissolved Because it reacts very sensitively, it is possible to manage regeneration in fine cycles. For this reason, changes in various composition concentrations before and after the regeneration in the etching solution are very small, and a stable etching rate can be maintained before and after the regeneration.
- ORP oxidation-reduction potential
- the fourth feature of the present invention is that by controlling the transmittance ratio, it is possible to suppress the influence of the temperature change of the etching solution and the influence of bubbles present in the etching solution.
- the transmittance decreases as the temperature of the etching solution increases.
- the composition of the etching solution changes as needed due to the dissolution of copper, so that it is difficult to make an accurate correction.
- the transmittance is reduced when fine bubbles are present in the etching solution.
- a method of injecting an etchant from a shower nozzle is used for etching, but the return liquid contains many fine bubbles, and when an etchant containing these bubbles is used, the permeability is low. It will be difficult to use as a management index.
- the wavelength that changes characteristically due to dissolution of copper the wavelength that changes characteristically due to changes in temperature and air bubbles, etc.
- the ratio of the transmittance measured at at least two wavelengths By measuring the ratio of the transmittance measured at at least two wavelengths and using it as an index for regeneration management, it becomes possible to remarkably suppress the influence of temperature change and the influence of air bubbles.
- the fifth feature of the present invention is that the influence of bubbles existing in the etching solution can be further suppressed by determining the ratio of transmittance at two or more different wavelengths by simultaneously measuring in the same optical path. It is.
- the composition concentration in the etchant, especially the content of foam and its shape, change from time to time with the measurement location and time. Therefore, in order to accurately grasp the state of the etchant at a certain moment, the transmittance at different wavelengths must be the same. It is effective to measure simultaneously in the optical path. By performing this operation, it becomes possible to further suppress the influence of bubbles in the etching solution.
- the sixth feature of the present invention is that it is excellent in maintainability.
- the etching solution is managed by conventional ORP, ion concentration, pH, etc.
- measurement is performed by immersing various sensors in the etching solution. Due to adhesion and deterioration of the sensor itself, accurate values cannot be measured, and regular maintenance work is required.
- the etching solution can be circulated in the flow cell or the like, and the etching solution passing through the flow cell can be measured without directly contacting the etching solution from the outside. Is completely unnecessary and allows continuous measurement without maintenance for a long time.
- the use of the etching solution of the present invention enables stable continuous production by a subtractive method in which undercut is extremely suppressed and change in etching rate is extremely small. Further, by using the regeneration management method of the present invention, the change in the etching rate is small before and after the regeneration, the influence of the temperature of the etchant and the bubbles present in the etchant can be suppressed, and the maintenance of the etchant that does not require maintenance. Playback management is possible.
- FIG. 1 is a schematic cross-sectional view of a pattern obtained by an etching method.
- 6 is a schematic diagram for simultaneously measuring transmittance in the same optical path.
- Fig. 6 is a schematic diagram for measuring the transmittance in different optical paths.
- the etching solution of the present invention contains iron (III) chloride as the first essential component.
- the concentration of iron (III) chloride in the etching solution of the present invention needs to be 5 to 20% by mass, preferably 5 to 10% by mass, based on the total amount of the etching solution.
- concentration of iron (III) chloride is lower than 5% by mass, the etching rate is remarkably slow and impractical, and when the concentration of iron (III) chloride is higher than 20% by mass, undercut is suppressed. This is because it becomes insufficient.
- iron chloride (III) used for preparing the etching solution of the present invention is not particularly limited, and iron chloride (III) commercially available as an aqueous solution can be used by dissolving an anhydrous or hexahydrate solid. ) May be diluted as appropriate.
- Solid iron (III) chloride is usually supplied as hexahydrate (formula 270.3), but the calculation of iron (III) chloride concentration in the present invention is anhydrous (formula 162.21).
- the etching solution of the present invention contains copper (II) chloride as a second essential component.
- the concentration of copper (II) chloride in the etching solution of the present invention needs to be 0.5 to 3% by mass, preferably 0.5 to 2% by mass, based on the total amount of the etching solution.
- concentration of copper chloride is lower than 0.5% by mass, the change in the etching rate due to the change in the concentration of copper chloride increases during the regeneration process, making it difficult to secure a stable etching time, and copper (II) chloride. This is because when the concentration of is higher than 3% by mass, the undercut is not sufficiently suppressed.
- the form of copper (II) chloride used for preparing the etching solution of the present invention is not particularly limited, and copper chloride (II) commercially available as an aqueous solution can be used by dissolving an anhydrous or dihydrate solid. ) May be diluted as appropriate.
- solid copper chloride (II) is usually supplied as a dihydrate (formula 170.48), the calculation of the copper (II) chloride concentration in the present invention is an anhydride (formula 134.45). As a reference.
- the etching solution of the present invention contains a compound that forms an insoluble salt with copper as a third essential component.
- a compound which forms an insoluble salt with copper Specifically, the azole which is a heterocyclic 5-membered ring compound containing 1 or more of oxalic acid and nitrogen can be used.
- an imidazole compound, a triazole compound, a tetrazole compound, or the like can be used. In this, it is more preferable to use oxalic acid.
- the etching solution of the present invention using oxalic acid can suppress undercut more, does not generate toxic gas such as hydrogen sulfide, and consists only of components for which processing methods have been established.
- the treatment can be performed easily and completely, and it is easy to avoid problems in terms of occupational health, pollution prevention and environmental conservation.
- the addition amount is 5 to 20% by mass, preferably 5 to 15% by mass, with respect to iron (III) chloride.
- the addition amount is less than 5% by mass, the undercut is not sufficiently suppressed, and when the addition amount is more than 20% by mass, a very long time is required for etching or the fine space is sufficiently etched. This is because the problem of not being made occurs.
- the form of oxalic acid to be used is not particularly limited. Even if an anhydrous or dihydrate solid is dissolved and used, oxalic acid commercially available as an aqueous solution is diluted appropriately. May be used. In addition, although solid oxalic acid is normally supplied as a dihydrate (formula weight 126.07), the calculation of the oxalic acid concentration in this invention is performed on the basis of an anhydride (formula weight 90.04).
- the temperature of the etching solution is preferably 15 to 45 ° C, more preferably 25 to 35 ° C. This is because, when the temperature is lower than this, the etching rate may be remarkably reduced, and when the temperature is higher than this, the undercut may be insufficiently suppressed.
- the etching solution of the present invention may contain a surfactant, an antifoaming agent, a wetting accelerator such as alcohol or glycol, but is not essential.
- the etching solution of the present invention is an etching solution that can be used as a new solution. If the etching solution of the present invention is used as a new solution, it can be regenerated so as to have the composition concentration of the etching solution of the present invention when regenerated.
- the oxidizing agent used for regenerating the etching solution is not particularly limited, and a commonly used oxidizing agent can be used.
- a commonly used oxidizing agent can be used.
- chlorine gas, ozone, hydrogen peroxide, chlorates, and the like can be used.
- chlorates are preferably used, and sodium chlorate and potassium chlorate are more preferable. .
- a generally used management method can be used as the etching solution regeneration management method.
- various ion concentrations, ORP, pH, specific gravity, permeability, etc. can be measured and managed. From the viewpoint of reducing the change in the etching rate before and after the regeneration, it is desirable to repeat the regeneration reaction in fine cycles, and it is preferable to mainly use a transmittance with high detection sensitivity.
- the reproduction management method for measuring the transmittance of the etching solution there is no particular limitation on the device for measuring the transmittance, but a commonly used one such as a photoelectric photometer, a spectrophotometer, a color sensor, a fiber sensor, or the like is used. be able to.
- a measuring method for example, a method in which an etching solution is constantly circulated in a flow cell or the like and the measurement is performed from the outside without being brought into direct contact with the etching solution is desirable. In this manner, by comparing the numerical value measured online with the set value for managing the predetermined degree of deterioration, a necessary amount of an oxidizing agent or the like for regeneration can be added.
- the wavelength to be measured is in the range of 400 to 750 nm where the transmittance peak of the etching solution containing iron chloride (III) and copper chloride (II) exists.
- the wavelengths before and after the maximum point of the transmittance peak existing in the wavelength range of 400 to 750 nm are used.
- Measure the degree of deterioration of the etchant due to dissolution of copper by measuring a wavelength larger than the maximum point, measure the wavelength smaller than the maximum point, and measure the ratio to suppress the influence of temperature and bubbles Is possible.
- the maximum point exists at 550 nm 500 nm and 600 nm can be used.
- the selection of the wavelength for measuring the transmittance can be set as needed depending on the composition of the etching solution. It is preferable to select and use the most suitable wavelength as many as necessary.
- simultaneous measurement refers to measuring the transmittance at two or more wavelengths within 0 to 100 msec.
- white light is emitted, and only the transmittance in the required wavelength region is selected and measured by the light receiving unit, and the necessary wavelengths are sequentially switched within the measurement range to emit light and measured. Or the like can be used.
- the regeneration solutions to be added are a new solution and an oxidizing agent.
- the new liquid can be replaced at a fixed rate according to the deterioration liquid and the degree of deterioration in which etching has progressed, thereby removing various oxides and by-products generated in the etching process or the regeneration reaction.
- the new solution is an etching solution containing iron chloride (III) and hydrochloric acid necessary for the regeneration reaction. If necessary, other compounds that form insoluble salts with copper, surfactants, and antifoaming agents Further, wetting accelerators such as alcohol and glycol can be added.
- the oxidizing agent used for regenerating the etching solution is not particularly limited, and a commonly used oxidizing agent can be used.
- a commonly used oxidizing agent can be used.
- chlorine gas, ozone, hydrogen peroxide, chlorates, and the like can be used.
- chlorates are preferably used, and sodium chlorate and potassium chlorate are more preferable. .
- the type of the copper foil pasting base material used for manufacturing the printed wiring board is not particularly limited.
- the base material fiber base materials such as paper phenol, paper epoxy, and glass epoxy are impregnated with thermosetting resin, and various thermoplastic resin plate materials such as polyester, polyimide, polytetrafluoroethylene, and other fluororesins are used.
- the used materials and other various insulating plate-like or film-like materials can be used, and as the copper foil, copper foil made of rolled copper, electrolytic copper, etc., or foil made of various copper alloys is used. be able to.
- the bonding method of the base material and the copper foil is not particularly limited, and the base material and the copper foil can be bonded using an epoxy-based adhesive or the copper foil before the resin used for the base material is cured.
- the resin can be cured and then bonded, and after the resin solution or hot melt used for the base material is developed on the copper foil, the solvent is removed or the solution is solidified by cooling. Also good.
- the resist used for the production of the printed wiring board is not particularly limited, and a so-called positive photoresist that forms a pattern by developing and removing a portion solubilized by light irradiation with an alkali, or cured by light irradiation. It is possible to use a so-called negative type photoresist that forms a pattern by developing and removing the missing portion, and various other resists that form a pattern by a screen printing method or other printing methods.
- the etching solution of the present invention is suitably used for etching copper or copper alloys.
- the copper alloy refers to an alloy containing 50% by mass or more of copper. Examples thereof include an alloy of copper and tin (bronze), an alloy of copper, tin and phosphorus (phosphor bronze), copper, nickel and zinc. (Alloy), copper and zinc alloy (brass), copper and nickel alloy (white copper) are representative, but not limited thereto.
- the etching solution of the present invention when using the etching solution of the present invention or discarding the overflow solution, it is contained by one of the most basic heavy metal processing steps, that is, by adding calcium hydroxide to adjust the pH to a weak alkali. Since all the harmful chemical species of iron (II) ion, iron (III) ion, copper (I) ion, copper (II) ion and oxalate ion are completely settled and removed, the treatment after use is easy and It can be done completely, and it is easy to avoid problems related to occupational health, pollution prevention and environmental conservation.
- Example 1 [Preparation of etchant] 270 g of commercially available 40 ° Baume iron (III) chloride (concentration: 37% by mass) (100 g as anhydride), 25 g of copper (II) chloride dihydrate (20 g as anhydride), 14 g of oxalic acid dihydrate An etching solution containing 10% by weight of iron (III) chloride, 2% by weight of copper chloride, and 1% by weight of oxalic acid was prepared by adding water to (10 g as an anhydride) to make 1 kg.
- a resist pattern having a line (w 3 ) / space width of 25 ⁇ m / 25 ⁇ m was formed on a glass epoxy substrate having a rolled copper foil having a thickness of 9 ⁇ m on the surface, using a positive photoresist.
- the etching liquid adjusted to 20 ° C. is jetted toward the base material at a liquid supply pressure of 150 kPa and a jet amount of 1320 mL / min using a full cone spray nozzle having a jet surface diameter of 14 cm and etching. Went.
- the etching solution is regenerated by adjusting the specific gravity to be constant when about 10% of the bathed iron (III) chloride is consumed, while adjusting the 10% by weight sodium chlorate aqueous solution and 10% by weight hydrochloric acid. A necessary amount of an aqueous solution of 10% by mass of iron chloride was added, and this regeneration treatment was repeated 30 times and 60 times.
- FIG. 1 is a schematic cross-sectional view of a pattern obtained by an etching method, where w 1 is the top width of the copper foil line, w 2 is the bottom width of the copper foil line, and w 3 is the line width of the resist pattern.
- Examples 2 to 9, Comparative Examples 1 to 13 In the same manner as in Example 1, etching solutions containing the respective composition concentrations shown in Tables 1 to 3 were prepared, the same resist pattern-formed substrate as in Example 1 was subjected to the same regeneration and etching treatment, and the same evaluation was performed. Went.
- the etching solution of the present invention is an etching solution with little undercut and little change in etching rate even after regeneration.
- those using oxalic acid as a compound that forms an insoluble salt with copper are etching solutions with very little undercut.
- etching The glass epoxy base material having a rolled copper foil with a thickness of 9 ⁇ m on the surface is sprayed with the above etching solution adjusted to 30 ° C., using a full cone spray nozzle with a jet surface diameter of 20 cm, and a liquid supply pressure of 150 kPa to the nozzle. Etching was performed by spraying onto the substrate at an amount of 1000 mL / min.
- the transmittance was measured using a digital fiber sensor E3X-DAG-S (trade name, wavelength 525 nm) and E3X-NA11 (trade name, wavelength 680 nm) manufactured by OMRON Corporation.
- the measurement conditions were that the etching shower was stopped and the etching solution was circulated through the flow cell, and the measurement was performed simultaneously using different optical paths.
- ORP and pH were measured using a pH meter D-52S manufactured by HORIBA, Ltd. while the sensor was immersed in the etching solution.
- Regeneration of etchant Regeneration of the etching solution was carried out by adjusting the specific gravity to be constant when about 5% of the built-in iron (III) chloride was consumed. A necessary amount of a mass% iron chloride aqueous solution was added, and this regeneration treatment cycle was repeated 100 times.
- Table 4 shows the results of the playback process.
- Example 11 In order to examine the change in the permeability when the temperature of the etching solution prepared in Example 10 was changed and the influence of bubbles in the etching solution, the change in the permeability before and after the pump operation for the etching shower was Similarly, simultaneous measurement was performed in different optical paths, and the results are shown in Table 5.
- the numerical value of the transmittance at a single wavelength decreases as the temperature rises, but by measuring the transmittance ratio, it was possible to suppress the influence of temperature change.
- the numerical value of the transmittance at a single wavelength is reduced, but the influence of the bubbles can be suppressed by measuring the transmittance ratio. .
- FIG. 2 is a schematic diagram when measuring in the same optical path
- FIG. 3 is a schematic diagram when measuring transmittance in different optical paths.
- Light is emitted from the fiber sensors 5, 7, and 9, and is transmitted through the flow cell 4 in which the etching solution is constantly circulated from below to above, and then received by the fiber sensors 6, 8, and 10.
- a commercially available surfactant trade name: Emulgen 103, manufactured by Kao Corporation
- the permeability was measured with the amount of bubbles increased, and the results are shown in Table 6.
- the fiber sensor used in the measurement method having a different measurement optical path as shown in FIG. 3 is measured using the same fiber sensor as that used in Example 10, and the measurement optical path as shown in FIG. 2 is the same.
- the fiber sensor used in the measurement method is a digital fiber sensor E3MC-Y81 (trade name, wavelengths 525 nm and 680 nm) manufactured by OMRON.
- E3MC-Y81 trade name, wavelengths 525 nm and 680 nm
- the transmittance was measured 20 times at 1-second intervals. When the measurement times were different, the transmittance ratio when the transmittance on the low wavelength side was delayed for 1 second was used.
- the measurement method of the present invention in which the transmittance is measured simultaneously in the same optical path is a measurement method in which the influence of bubbles is further suppressed.
- the transmittance ratio is greatly swung up and down, and the range of the shake of the transmittance ratio obtained with different optical paths and different measurement times is the largest.
- the etching solution, etching method and regeneration management method of the present invention can be applied not only to the production of printed wiring boards, but also to the formation of various types of wiring such as wiring on a glass substrate, wiring on a plastic substrate, wiring on a semiconductor surface, In various other industrial applications, it can be suitably used when highly controlled etching of copper or copper alloy is required.
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Abstract
Description
[エッチング液の調製]
市販の40°ボーメの塩化鉄(III)水溶液(濃度37質量%)270g(無水物として100g)、塩化銅(II)二水和物25g(無水物として20g)、シュウ酸二水和物14g(無水物として10g)に水を加え1kgとし、塩化鉄(III)10質量%、塩化銅2質量%、シュウ酸1質量%を含むエッチング液を調製した。
表面に厚み9μmの圧延銅箔を有するガラスエポキシ基材に、ポジ型フォトレジストを用いライン(w3)/スペースの幅がそれぞれ25μm/25μmのレジストパターンを形成させた。ここに、20℃に調整した上記エッチング液を、噴射面の直径が14cmの充円錐型スプレーノズルを用いてノズルへの液供給圧150kPa、噴射量1320mL/minで上記基材に向け噴射しエッチングを行った。
実施例1と同様にして、表1~3に示す各組成濃度を含むエッチング液を調製し、実施例1と同一のレジストパターン形成済み基板に、同様の再生とエッチング処理を行い、同様の評価を行った。
[エッチング液の調製]
市販の40°ボーメの塩化鉄(III)水溶液(濃度37質量%)216g(無水物として100g)、塩化銅(II)二水和物25g(無水物として20g)、シュウ酸二水和物7g(無水物として5g)に水を加え1kgとし、塩化鉄(III)8質量%、塩化銅2質量%、シュウ酸0.5質量%を含むエッチング液を調製した。
表面に厚み9μmの圧延銅箔を有するガラスエポキシ基材に、30℃に調整した上記エッチング液を、噴射面の直径が20cmの充円錐型スプレーノズルを用いてノズルへの液供給圧150kPa、噴射量1000mL/minで上記基材に向け噴射しエッチングを行った。
透過度はオムロン社製のデジタルファイバセンサーE3X−DAG−S(商品名、波長525nm)及びE3X−NA11(商品名、波長680nm)を用いて計測した。測定条件は、エッチングシャワーを停止し、フローセルにエッチング液を循環させた状態で、異なる光路にて同時計測した。ORPとpHは、堀場製作所社製のpHメーターD−52Sを用いて、センサーをエッチング液中に浸漬させたまま計測した。
エッチング液の再生は、建浴した塩化鉄(III)の約5%が消費された時点で、比重が一定となるように調整しながら、10質量%の塩素酸ナトリウム水溶液、塩酸を含んだ8質量%の塩化鉄水溶液を必要量添加して行い、この再生処理のサイクルを100回繰り返した。
実施例10で調製したエッチング液の温度を変化させた時の透過度の変化及びエッチング液中の泡の影響をみるために、エッチングシャワー用ポンプ運転前後における透過度の変化を、実施例10と同様に、異なる光路にて同時計測を行い、結果を表5に示した。
図2および図3に示す計測方法を用いて、同一光路内で同時計測する場合の効果を検証した。図2は同一光路内で計測する場合の略図であり、図3は透過度を異なる光路で計測する場合の略図である。ファイバセンサー5、7及び9で発光させ、エッチング液が常時下方から上方へ循環するフローセル4内を透過させた後、ファイバセンサー6、8及び10で受光するものである。これらの2つの計測方法を用いて、実施例10で調製したエッチング液に市販の界面活性剤(商品名:エマルゲン103、花王社製)を0.05質量%加えたものを用い、エッチング液中の気泡の量を増加させた状態で透過度の測定を行い、その結果を表6に示した。なお、図3で示されるような測定光路が異なる測定方式で用いたファイバセンサーは、実施例10で用いたものと同じファイバセンサーを用いて測定し、図2で示されるような測定光路が同一である測定方式で用いたファイバセンサーは、オムロン社製のデジタルファイバセンサーE3MC−Y81(商品名、波長525nmおよび680nm)を用いて計測した。また、図3で示される測定光路が異なる場合のファイバセンサー7と9間の距離及びファイバセンサー8と10間の距離は10mmとした。透過度の測定は1秒間隔で20回行い、計測時間が異なる場合は、低波長側の透過度を1秒間遅らせて測定した場合の透過度比を用いた。
w2 銅箔ラインのボトム幅
w3 レジストのライン幅
1 レジスト
2 銅箔
3 基材
4 フローセル
5、7、9 ファイバセンサー(発光部)
6、8,10 ファイバセンサー(受光部)
Claims (5)
- 水を主成分とし、(1)5~20質量%の塩化鉄(III)、(2)0.5~3質量%の塩化銅(II)、(3)塩化鉄(III)に対して5~20質量%の銅と不溶性の塩を形成する化合物を含有してなることを特徴とする銅または銅合金用のエッチング液。
- 銅と不溶性の塩を形成する化合物がシュウ酸である請求項1記載の銅または銅合金用のエッチング液。
- 請求項1または2記載の銅または銅合金用のエッチング液を新液として使用することを特徴とするエッチング方法。
- 請求項1または2記載の銅または銅合金用のエッチング液を再生管理する方法において、異なる2つ以上の波長における透過度の比を用いて再生管理を行うことを特徴とするエンチング液の再生管理方法。
- 該2つ以上の波長を、同一光路内で同時計測することを特徴とする請求項4記載のエッチング液の再生管理方法。
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CN200980151047.5A CN102257180B (zh) | 2008-12-17 | 2009-12-04 | 铜或铜合金用的蚀刻液、蚀刻方法及蚀刻液的再生管理方法 |
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Cited By (3)
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JP2012172154A (ja) * | 2011-02-17 | 2012-09-10 | Jx Nippon Mining & Metals Corp | 銅変色防止液 |
WO2017141799A1 (ja) * | 2016-02-19 | 2017-08-24 | メック株式会社 | 銅のマイクロエッチング剤および配線基板の製造方法 |
JP2017150069A (ja) * | 2016-02-19 | 2017-08-31 | メック株式会社 | 銅のマイクロエッチング剤および配線基板の製造方法 |
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CN102321908A (zh) * | 2011-09-02 | 2012-01-18 | 广州市天承化工有限公司 | 酸性氯化物蚀刻液的循环再生工艺方法及金属铜回收系统 |
CN104278273A (zh) * | 2014-06-13 | 2015-01-14 | 叶涛 | 线路板低酸高效型酸性氯化铜蚀刻液 |
KR20180066289A (ko) * | 2016-12-07 | 2018-06-19 | (주)화백엔지니어링 | 그라비어 인쇄롤용 에칭액 조성물 |
CN111411361A (zh) * | 2020-05-07 | 2020-07-14 | 宁波福至新材料有限公司 | 一种提高蚀刻产品质量的蚀刻液 |
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- 2009-12-04 WO PCT/JP2009/070713 patent/WO2010071078A1/ja active Application Filing
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Also Published As
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CN102257180B (zh) | 2014-05-07 |
JP5604307B2 (ja) | 2014-10-08 |
KR20110093996A (ko) | 2011-08-19 |
TW201030185A (en) | 2010-08-16 |
CN102257180A (zh) | 2011-11-23 |
TWI486488B (zh) | 2015-06-01 |
JPWO2010071078A1 (ja) | 2012-05-31 |
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