WO2010067659A1 - コイル部品 - Google Patents
コイル部品 Download PDFInfo
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- WO2010067659A1 WO2010067659A1 PCT/JP2009/067706 JP2009067706W WO2010067659A1 WO 2010067659 A1 WO2010067659 A1 WO 2010067659A1 JP 2009067706 W JP2009067706 W JP 2009067706W WO 2010067659 A1 WO2010067659 A1 WO 2010067659A1
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- Prior art keywords
- core
- coil
- piezoelectric element
- movable core
- moving body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/06—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by movement of core or part of core relative to the windings as a whole
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F21/00—Variable inductances or transformers of the signal type
- H01F21/02—Variable inductances or transformers of the signal type continuously variable, e.g. variometers
- H01F21/06—Variable inductances or transformers of the signal type continuously variable, e.g. variometers by movement of core or part of core relative to the windings as a whole
- H01F21/065—Measures for obtaining a desired relation between the position of the core and the inductance
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
Definitions
- the present invention relates to a coil component suitable for application to, for example, changing the inductance value of a coil used in an electronic device.
- a coil component that can change the inductance value of the coil by changing the position of the magnetic core with respect to the coil by an external signal.
- a coil component includes a coil, a magnetic core, a movable core that is used as a part of the magnetic core, changes a relative position with the magnetic core, and an actuator that changes the position of the movable core.
- the actuator a monomorph type or bimorph type piezoelectric element is used.
- a movable core is connected to the tip of the piezoelectric element.
- Patent Document 1 describes a coil component including a bimorph type piezoelectric element.
- the movable core part bonded to the tip of the piezoelectric element is completely combined with the surrounding core part.
- the piezoelectric body bends and deforms in a direction away from the core.
- the movable core portion moves in the same direction as the piezoelectric body, the gap between the movable core portion and the core portion increases, and the inductance value decreases.
- Patent Document 2 describes a variable inductance element that changes the inductance value by changing the relative position of two cores by the action of a piezoelectric actuator using a monomorph type piezoelectric element.
- Patent Document 3 describes a coil component that adjusts an inductance value by changing a gap dimension between two opposed cores using a monomorph piezoelectric element. JP 2008-91438 A JP-A-8-213245 JP 2000-331840 A
- the conventional techniques have the following problems. (1) For example, the amount of displacement of the piezoelectric body constituting the bimorph type piezoelectric element was very small (several tens to several hundreds ⁇ m). For this reason, the amount of displacement of the magnetic core bonded to the tip of the bimorph piezoelectric element is also reduced, and the range in which the inductance value changes is limited.
- an elastic plate is disposed between two layers of piezoelectric bodies.
- the elastic plate receives a deformation stress and vibrates. For this reason, it takes time until the inductance value of the coil component is stabilized.
- the bimorph piezoelectric element vibrates, which may cause an error in the inductance value.
- the present invention has been made in view of such a situation, and an object of the present invention is to make it easy to maintain the inductance value once changed while increasing the amount of change of the inductance value.
- the coil component according to the present invention includes a magnetic core, a coil that generates magnetic flux when a predetermined current is supplied, and a magnetic signal generated by the coil by changing the position of the movable core relative to the coil by a control signal supplied from the outside. And an actuator for passing the movable core.
- the actuator is connected to the piezoelectric element that generates a displacement parallel to the thickness direction by a control signal, a movable body that is connected to the movable core and moves the movable core in accordance with the displacement generated in the piezoelectric element, and the piezoelectric element and the movable body. And a stationary part for stationaryly moving the moving body moved by the displacement generated in the piezoelectric element at a predetermined position.
- the coil component according to the present invention changes the inductance value of the coil component by changing the magnetic path configuration or the distance from the coil by the actuator moving the moving body to which the movable core is connected. For this reason, the adjustment range of the inductance value becomes large, and electric power for maintaining the inductance value once changed becomes unnecessary. In addition, the response speed of the inductance value is increased, and the inductance value can be mounted on various electric devices including a digital power source. Moreover, since there are few components, it becomes possible to reduce in size.
- FIGS. 4A and 4B are configuration diagrams showing examples of coil components when viewed from above in the first embodiment of the present invention.
- FIGS. 3A and 3B are configuration diagrams showing examples of coil components when viewed from the side according to the first embodiment of the present invention.
- a and B are explanatory diagrams illustrating an example of a change with time transition of a voltage applied to the piezoelectric actuator according to the first embodiment of the present invention.
- A, B, C are explanatory diagrams illustrating an operation example of the piezoelectric actuator according to the first embodiment of the present invention.
- a and B are configuration diagrams showing examples of coil parts in the second embodiment of the present invention. It is explanatory drawing which shows the example of the change ratio of the inductance value with respect to the position of the piezoelectric actuator of the coil components in the 1st and 2nd embodiment of this invention. It is a block diagram which shows the example of the coil components in the 3rd Embodiment of this invention.
- a and B are explanatory diagrams showing an operation example of the coil component according to the third embodiment of the present invention. It is a block diagram which shows the example of the coil components in the 4th Embodiment of this invention.
- A, B, C, D are configuration diagrams showing examples of coil components in the fourth and fifth embodiments of the present invention.
- A, B, C, D are configuration diagrams showing examples of coil components in the sixth embodiment of the present invention. It is explanatory drawing which shows the example of the change ratio of the inductance value with respect to the position of the piezoelectric actuator of the coil components in the 4th-6th embodiment of this invention.
- FIG. 1A is an external perspective view of a rectangular parallelepiped coil component 1.
- the coil component 1 includes a magnetic pot core 2 integrally formed with a bottom surface and four surfaces perpendicular to the bottom surface, and a flat plate core 6 that covers the top of the coil component 1. It is configured.
- the pot core 2 and the flat core 6 have functions of protecting a built-in coil 10 (see FIG. 1B described later) and generating a magnetic path by taking in a magnetic flux generated by the coil 10.
- the flat plate core 6 is provided with a piezoelectric actuator 15 that moves the movable core portion 11 by the action of a piezoelectric body.
- the piezoelectric actuator 15 includes a piezoelectric element 9 that expands and contracts when a voltage is applied, and an actuator base 12 that supports one end of the piezoelectric element 9.
- the actuator base 12 is a base table that is fixed by an adhesive or the like near the center of the upper surface of the flat core 6.
- a friction drive rod 13 having a predetermined static friction coefficient is attached to the other end of the piezoelectric element 9.
- a rectangular hole 14 is formed in the flat core 6 in the x direction.
- the rectangular hole 14 is a through hole formed through the flat core 6 in a direction parallel to the displacement direction of the piezoelectric element 9, and the moving body 16 is movable along the rectangular hole 14.
- the moving body 16 attached to the friction drive rod 13 of the present example moves in the ⁇ x direction within the rectangular hole 14 by the expansion and contraction of the piezoelectric element 9 that functions as a vibrator that vibrates when a voltage is applied.
- the actuator connection electrode 3 that supplies current to the piezoelectric element 9 and the inductor connection electrode 4 that supplies current to the coil 10 are formed in pairs at the four corners of the pot core 2.
- the inductor connection electrode 4 is connected to both ends of the coil terminal portion 5 corresponding to both ends of the built-in coil.
- FIG. 1B is an exploded perspective view of the coil component 1.
- the air-core coil 10 is stored in a pot core 2 made of a magnetic material formed with at least one surface as an opening, and in a flat core 6 made of a magnetic material installed in accordance with the opening.
- the pot core 2 is a magnetic core made of sintered ferrite, a metallic magnetic material, or the like. Since the magnetic permeability of the pot core 2 is high, the magnetic flux generated in the coil 10 is easy to pass through. For this reason, the pot core 2 suppresses the leakage magnetic flux by adopting a shape surrounding the entire coil 10.
- the pot core 2 is formed in a substantially box shape, and also has a function as a container that accommodates the coil 10, the moving body 16, and the like.
- the four corners of the pot core 2 are formed with a height dimension lower than that of other peripheral wall members.
- a pair of the actuator connection electrode 3 and the inductor connection electrode 4 is installed at each of the four corners.
- the actuator connection electrode 3 is used to connect a laminated piezoelectric element 9 that is largely expanded and contracted by applying a voltage to a mounting substrate (not shown) on which the coil component 1 is mounted.
- the actuator connection electrode 3 is connected to an external electrode connected to the internal electrode of the piezoelectric actuator 15 and is connected to the mounting substrate. Then, a voltage is supplied to the piezoelectric element 9 from the outside.
- the inductor connection electrode 4 is used to connect the coil terminal portion 5 and a mounting substrate (not shown) on which the coil component 1 is mounted.
- the inductor connection electrode 4 supplies current to the coil 10 from the outside.
- a trapezoidal fixed core portion 7 ( Pot core) is formed inside the pot core 2 and the flat plate core 6, in the vicinity of the center of the bottom surface of the pot core 2, along the winding axis direction of the coil 10, a trapezoidal fixed core portion 7 ( Pot core) is formed.
- a coil 10 is disposed around the fixed core portion 7.
- the coil 10 is formed by winding an electrically conductive wire by an ordinary means.
- the conductive wire used for the coil 10 is coated with an insulating film around the copper core.
- a so-called fusion wire in which the surface of the insulating film is coated with a film that dissolves by heating, application of an organic solvent, ultraviolet irradiation, or the like.
- the coil 10 is formed using a fusion wire, the coil shape wound with the air core can be maintained. Furthermore, handling of the coil 10 is facilitated in a later assembly process or the like.
- the flat plate core 6 is a core made of sintered ferrite, metallic magnetic material, or the like.
- the flat core 6 has a high magnetic permeability and a property that magnetic flux easily passes.
- the flat core 6 has a shape surrounding the entire coil in combination with the pot core 2 and has a function of suppressing leakage magnetic flux.
- the flat plate core 6 has the same width as the width of the moving body 16 in the y direction from the edge of the fixed piezoelectric actuator (vibrator) to the side of the edge, and has the same length as the moving distance of the moving body 16.
- a rectangular hole 14 is cut open.
- a fixed core portion 8 having a lower end surface formed obliquely with respect to the wide surface of the flat core 6 is formed near the center of the lower surface of the flat core 6. As described above, the magnetic core having the core portion is divided into the fixed core portions 7 and 8 and the movable core portion 11.
- the fixed core portions 7 and 8 are cores installed at the center portions of the flat core 6 and the pot core 2, respectively.
- the fixed core portions 7 and 8 are formed using a material such as sintered ferrite or a metallic magnetic material, have a high magnetic permeability, and easily pass magnetic flux.
- the upper end surface of the fixed core portion 7 is cut obliquely with respect to the bottom surface of the pot core 2.
- the lower end surface of the fixed core portion 8 is cut obliquely with respect to the plane of the flat core 6.
- the magnetic flux generated by the coil 10 passes through the fixed core portions 7 and 8 and the movable core portion 11.
- the lower end surface of the fixed core part 8 installed in the center part of the lower surface of the flat core 6 and the upper end surface of the fixed core part 7 installed in the center of the pot core 2 are wedge-shaped, and the movable core part 11 It is formed so as to mesh with the opposing surface.
- the movable core portion 11 is also formed using a material such as sintered ferrite or a metallic magnetic material.
- the movable core part 11 has a high magnetic permeability and a property that magnetic flux easily passes.
- the movable core portion 11 is formed as a hexahedron having a trapezoidal longitudinal cross section.
- the surfaces facing the fixed core portions 7 and 8 are formed in a wedge shape that is easy to be attached and detached, and the bottom surface is connected to the moving body 16.
- the surface corresponding to the oblique side of the trapezoid has a shape that matches the upper end surface of the fixed core portion 7 formed on the pot core 2 and the lower end surface of the fixed core portion 8 formed on the flat core 6 when combined. .
- the friction drive rod 13 is a rod-like support material having a certain strength and hardness and having an appropriate friction coefficient between the friction body and the movable body 16, and is connected to the piezoelectric element 9 and the movable body 16.
- Guide grooves of the moving body 16 may be formed on both sides of the friction drive rod 13.
- a stopper may be provided at the end of the friction drive rod 13 that floats in the air.
- One end of the moving body 16 is inserted into the rectangular hole 14 and the friction drive rod 13 is attached, and the moving body 16 moved by the displacement generated in the piezoelectric element 9 is stopped at a predetermined position.
- the movable core 11 is fixed to the other end of the moving body 16 by means such as an adhesive.
- the moving body 16 has a so-called cantilever structure. Further, it has an appropriate coefficient of friction with the friction drive rod 13 inserted into the moving body 16.
- the piezoelectric element 9 is a vibrator mounted between the actuator base 12 and the friction drive rod 13. In general, it is composed of several to a dozen layers of laminated piezoelectric material, an internal electrode and an external electrode. Although the displacement amount of the laminated piezoelectric material is small (several ⁇ m), there is an advantage that the response speed is fast and the generated force is large. Furthermore, in the present invention, since the displacement of the moving body 16 is used instead of the displacement of the piezoelectric material, the disadvantage that the displacement amount of the laminated piezoelectric body is small as described above can be overcome.
- the piezoelectric element constituting the piezoelectric element 9 may be a monomorph type or bimorph type piezoelectric element instead of a laminated piezoelectric body. When a bimorph type piezoelectric element is used as the piezoelectric element 9, the moving body 16 is moved by the vibration of the bimorph type piezoelectric element, and the movement is defined as the displacement of the movable core portion 11.
- the piezoelectric element 9 to which the drive signal (signal voltage) is applied is expanded and contracted with the actuator base 12 as a fixed point.
- the movable core portion 11 can be moved in a direction orthogonal to the magnetic flux excited by the coil 10 by the expansion and contraction displacement of the piezoelectric element 9.
- a variable magnetic gap is formed in the magnetic path formed in the pot core 2 -the fixed core portion 7 -the movable core portion 11 -the fixed core portion 8 -the flat plate core 6 -the pot core 2.
- a variable magnetic gap dimension is adjusted by a drive signal (signal voltage) applied to the piezoelectric element 9.
- FIG. 1C is an example of an exploded perspective view of the coil component 1 shown in FIG. 1B as viewed from the + y direction. Each member is given the same reference numeral as in FIG. 1B. In addition, since the structure of the coil component 1 is the same structure as the coil component 1 shown to FIG. 1B, detailed description is abbreviate
- a stopper is used at the end of the friction drive rod 13 (see FIG. 7 described later), or
- the movable core portion 11 may be configured to completely engage with the fixed core portions 7 and 8.
- a method in which the movable core portion 11 is formed slightly longer in the x direction, or the moving body 16 is formed in a substantially L shape, etc. are conceivable. .
- FIG. 2A and 2B show a configuration example of the coil component 1 as viewed from above.
- FIG. 2A shows an example of the coil component 1 in an initial state. In the initial state, since the piezoelectric actuator 15 is not driven, the moving body 16 is stationary while being in contact with the left end of the rectangular hole 14.
- FIG. 2B shows an example of the coil component 1 after the drive signal voltage is applied.
- the piezoelectric actuator 15 When the piezoelectric actuator 15 is driven, the moving body 16 gradually moves in the + x direction. However, the moving range of the moving body 16 stops within the range of the length of the rectangular hole 14.
- FIG. 3A and 3B show a state in which the piezoelectric actuator 15 is driven based on an example of a cross-sectional view taken along the line AA ′ of the coil component 1 in FIG.
- FIG. 3A shows an example of the coil component 1 in an initial state.
- the fixed core portions 7 and 8 and the movable core portion 11 come into contact with each other to form one pot core middle core.
- a drive signal (signal voltage) is not applied to the piezoelectric element 9, and the movable core portion 11 is not moved. Therefore, a magnetic path 17 is formed in the coil component 1 in the order of pot core 2 -fixed core portion 7 -movable core portion 11 -fixed core portion 8 -flat plate core 6 -pot core 2.
- the fixed core portions 7 and 8 and the movable core portion 11 are aligned on the coaxial line 18, and the magnetic gap is in a minimum state. At this time, only a boundary surface exists between the fixed core portion 7, the movable core portion 11, and the fixed core portion 8. When a current is applied to the coil 10 in this state, a high inductance value: L is obtained.
- FIG. 3B shows an example of the piezoelectric actuator 15 after the drive signal voltage is applied.
- a drive signal (signal voltage) is applied to the piezoelectric element 9
- the movable core portion 11 moves away from the fixed core portions 7 and 8 in the + x direction.
- the magnetic path 17 is formed in the coil component 1 in the order of pot core 2 -fixed core portion 7 -movable core portion 11 -fixed core portion 8 -flat plate core 6 -pot core 2.
- the movable core portion 11 is shifted from the fixed core portions 7 and 8 on the coaxial line 18, and a magnetic gap 19 is formed on the upper and lower end surfaces of the movable core portion 11.
- the inductance value: L becomes lower than that in the state of FIG. 3A.
- FIG. 4 shows a configuration example and an operation example of the piezoelectric element 9.
- the piezoelectric element 9 is installed on an external electrode 21 serving as a voltage terminal from a voltage source 20 that applies a predetermined voltage, a laminated piezoelectric body 22 in which a plurality of layers of piezoelectric materials are laminated, and a laminated surface of the laminated piezoelectric bodies 22.
- An internal electrode 23 is provided.
- the laminated piezoelectric body 22 is formed in a state of being sandwiched between the external electrode 21 and the internal electrode 23. When a predetermined voltage is applied from the voltage source 20, the internal electrode 23 is polarized in the direction of the arrow 24.
- the piezoelectric material of a plurality of layers is displaced in the direction of the arrow 25 when polarized simultaneously.
- the same displacement amount can be obtained with a voltage of 1 / the number of stacked layers as compared with a block of the same size. it can.
- the drive voltage of the piezoelectric element 9 can be lowered.
- FIGS. 5A and 5B show examples of changes with time transition of the voltage applied to the piezoelectric element 9 when the piezoelectric actuator 15 is driven.
- the horizontal axis represents time
- the vertical axis represents voltage
- FIG. 5A shows an example of the amount of change in voltage when the movable core portion 11 is moved in the direction away from the fixed core portions 7 and 8 (+ x direction).
- a signal voltage is applied to the piezoelectric actuator 15 within a range of voltages V 1 to V 2 satisfying the relationship of V 1 ⁇ V 2 .
- the voltage gradually changes from voltage V 1 to voltage V 2 , and constant voltage V 2 is applied between time t 2 and t 3 .
- the voltage V 2 is rapidly lowered to the voltage V 1 .
- a constant voltage V 1 is applied between times t 4 and t 5 .
- the movable core portion 11 moves away from the fixed core portions 7 and 8.
- FIG. 5B shows an example of the amount of change in voltage when the movable core portion 11 is moved in the direction approaching the fixed core portions 7 and 8 ( ⁇ x direction).
- a signal voltage is applied to the piezoelectric actuator 15 within a range of voltages V 1 to V 2 satisfying the relationship of V 1 ⁇ V 2 .
- the voltage V 1 changes suddenly from voltage V 1 to voltage V 2
- a constant voltage V 2 is applied between time t 2 and t 3 .
- the voltage V 2 is gradually changed to voltage V 1 .
- (t 2 -t 1 ) ⁇ (t 4 -t 3 ).
- a constant voltage V 1 is applied between times t 4 and t 5 .
- the movable core portion 11 approaches the fixed core portions 7 and 8.
- the piezoelectric actuator 15 includes the piezoelectric element 9, the actuator base 12, the friction drive rod 13, and the moving body 16.
- the piezoelectric element 9 When a voltage is gradually applied to the piezoelectric element 9, the laminated piezoelectric body 22 extends for each layer, so that the friction drive rod 13 engaged with one end of the piezoelectric element 9 by the action of a static frictional force also moves together (FIG. 1). + X direction at.).
- the moving body 16 fixed to the friction drive rod 13 also moves similarly to the friction drive rod 13 by the action of the static friction force.
- the moving body 16 performs either an operation of stopping at the original position or returning slightly to the ⁇ x direction. By repeating this operation, the moving body 16 (movable core portion 11) can be moved to a desired position and can be stopped at the moved position.
- FIG. 6A, 6B, and 6C show enlarged examples of the operation of the piezoelectric actuator 15 that is driven in accordance with the change in voltage shown in FIG.
- the piezoelectric actuator 15 moves the movable core portion 11 when the voltage applied to the piezoelectric element 9 changes.
- the piezoelectric element 9 extends parallel to the thickness direction, and the friction drive rod 13 causes the moving body 16 to move at the position of the displacement generated in the piezoelectric element 9. Keep it stationary.
- the piezoelectric element 9 contracts in parallel with the thickness direction and returns to the original length.
- the friction drive rod 13 stops the moving body 16 near the position of the displacement generated in the piezoelectric element 9.
- FIG. 6A shows an example of the piezoelectric actuator 15 in the initial state. In this state, since the voltage is not applied to the piezoelectric actuator 15, the movable core part 11 and the movable body 16 do not move.
- FIG. 6B shows a state where a voltage is applied to the piezoelectric actuator 15 between times t 1 and t 2 (see FIG. 5A).
- the voltage applied to the piezoelectric actuator 15 changes from the voltage V 1 to the voltage V 2 between times t 1 and t 2 , and the piezoelectric element 9 extends by ⁇ x 1 in the + x direction.
- the piezoelectric element 9 is deformed, the moving body 16 moves in the + x direction, so the movable core portion 11 connected to the moving body 16 also moves in the + x direction.
- the actuator base 12 does not move because it is fixed to the flat core 6.
- FIG. 6C shows a state in which a voltage is applied to the piezoelectric actuator 15 between times t 3 and t 4 (see FIG. 5A).
- the voltage applied to the piezoelectric actuator 15 is suddenly lowered from the voltage V 2 to the voltage V 1 in a short time (time t 3 to t 4 ), and the length of the piezoelectric element 9 is the same as that shown in FIG. 6A.
- the movable core portion 11 and the moving body 16 are heavy, they remain at the position shown in FIG. 6B or slightly return to the ⁇ x direction due to the inertial force.
- the displacement amount ⁇ x 3 is extremely small, the movable core portion 11 and the movable body 16 can be moved to desired positions by repeating the voltage application pattern shown in FIG. 5A. For this reason, the inductance value of the coil component 1 can be adjusted appropriately.
- the moving body 16 gradually moves away from the actuator base 12. Similarly, since the movable core portion 11 fixed to the moving body 16 also moves in a direction away from the fixed core portions 7 and 8, the gap of the core core of the coil 10 is increased. For this reason, the inductance value of the coil 10 becomes small.
- the moving body 16 moves so as to approach the actuator base 12, and the movable core portion 11 is fixed together with the fixed core portions 7 and 8. Get closer to. For this reason, the inductance value of the coil component 1 becomes large. Note that the movable core 11 and the moving body 16 are moved in the ⁇ x direction by repeating the voltage application pattern shown in FIG. 5B. This operation example is omitted.
- the moving distance with respect to the initial position of the movable core portion 11 becomes long, and the inductance value can be greatly varied.
- the movable core portion 11 can be moved either in the direction away from the fixed core portions 7 and 8 or in the direction closer thereto.
- the displacement amount of the movable core portion 11 is small, there is an effect that it is easy to adjust to a desired inductance value.
- the movable core portion is controlled by controlling the frequency of the voltage applied to the piezoelectric element 9 and the parameters relating to the voltage waveform such as the rising time, holding time, falling time, and peak value. 11 can be controlled to move by an arbitrary amount of movement. For this reason, it can adjust to a desired inductance value accurately. Furthermore, since the piezoelectric element 9 responds even when a high-frequency signal voltage is applied, there is an effect that the operation speed can be expected to be increased.
- the movable core part 11 can be stopped at an arbitrary position, and the position can be adjusted with high accuracy.
- the coil component 1 can be mounted on various electronic devices that use a digital power source as a voltage source, so that the applicability is high.
- FIG. 7A and 7B show a manner in which the piezoelectric actuator 15 is driven as an example of a cross-sectional view taken along the line AA ′ of the coil component 1 in FIG. 1, as in FIG.
- FIG. 7A shows an example of the coil component 30 in the initial state.
- the coil component 30 includes a holding base 31 at the end of the flat core 6 as a holding portion that holds the other end of the friction drive rod 13.
- the holding base 31 is fixed on the flat core 6 with an adhesive in the same manner as the actuator base 12.
- the holding base 31 has a function of suppressing the vibration of the friction drive rod 13 together with the actuator base 12.
- the holding base 31 holds the other end of the friction drive rod 13 so as not to interfere with expansion and contraction, there is no fear of the movable core portion 32 vibrating or falling off the rod.
- the movable core part 32 of a shape larger than the movable core part 11 which concerns on 1st Embodiment mentioned above can be formed.
- an insulating material such as an insulating resin, the fixed gap 36 is formed at the boundary surface between the pot core 2 and the fixed core portion 8, thereby reducing the inductance value and superimposing characteristics (inductance when a large current is passed). Can be improved).
- the fixed gap 36 is preferably used, for example, when the coil component 30 is mounted on a power supply system circuit to which a large current is supplied. However, even when the coil component 30 is mounted on such a power supply system circuit, it is not essential to form the fixed gap 36 as long as it does not affect the superposition characteristics or the like.
- the fixed core portions 7 and 8 and the movable core portion 32 are in contact with each other to form one pot core core.
- a drive signal (signal voltage) is not applied to the piezoelectric element 9 and the movable core portion 32 is not moved. Therefore, the magnetic path 33 is formed in the coil component 1 in the order of pot core 2 -fixed core portion 7 -movable core portion 32 -fixed core portion 8 -flat plate core 6 -pot core 2.
- the fixed core portions 7 and 8 and the movable core portion 32 are aligned on the coaxial line 34, and the magnetic gap is in the minimum state. At this time, only a boundary surface exists between the fixed core portions 7 and 8 and the movable core portion 32.
- FIG. 7B shows an example of the coil component 30 in a state where the piezoelectric element 9 is driven.
- a drive signal signal voltage
- the movable core portion 32 moves away from the fixed core portions 7 and 8 in the + x direction.
- the magnetic path 33 is formed in the coil component 1 in the order of pot core 2 -fixed core portion 7 -movable core portion 32 -fixed core portion 8 -flat plate core 6 -pot core 2.
- the movable core portion 32 is shifted from the fixed core portions 7 and 8 on the coaxial line 34, and a magnetic gap 35 is formed on the upper and lower end surfaces of the movable core portion 32.
- the inductance value L is lower than that in the state of FIG. 7A.
- FIG. 8 shows an example of the relationship between the actuator position of the coil components 1 and 30 and the inductance change ratio.
- the “actuator position” is the moving body of the piezoelectric actuator 15 when the maximum moving distance (end point) of the moving body 16 is 10, the minimum moving distance is 0 (start point), and the distance between the start point and the end point is equally divided into 10. 16 positional relationships are shown.
- the change ratio of the inductance value of the coil components 1 and 30 according to the first and second embodiments will be described.
- the inductance change ratio of the coil components 1 and 30 is 100 respectively. Then, as the actuator position increases, the change ratio of the inductance value decreases.
- the degree of decrease in the change ratio is larger in the coil component 1 than in the coil component 30. For this reason, when the coil component 1 is used, the change in the inductance value can be increased by a slight change in the actuator position.
- the end surfaces of the movable core portions 11 and 32 are obliquely overlapped with the end surfaces of the fixed core portions 7 and 8 with respect to the xy plane. It has become.
- a space may be provided so as to be parallel to the end surface xy plane of the fixed core portions 7 and 8 so as not to contact each end surface, and a plate having a thickness slightly smaller than the space may be provided.
- the plate is attached to the moving body 16 instead of the movable core portion 16 in the piezoelectric actuator 15. Even with such a configuration, the inductance value can be changed by changing the cross-sectional area of the magnetic gap 19 in the magnetic circuit.
- FIG. 9 is a perspective view of the coil component 40.
- the coil component 40 includes a U-shaped core 42 formed in a U-shape and a movable core 43 that is combined at both ends of the U-shaped core 42.
- One end of the U-shaped core 42 and one end of the movable core 43 are connected by a connection portion 44.
- the other end of the U-shaped core 42 is cut obliquely, and is in surface contact with the hypotenuse corresponding to the other end of the movable core 43 formed in a trapezoidal shape.
- a coil 41 is wound around one side of the U-shaped core 42. Since the conductive wire used for the coil 41 is the same as that of the coil 10 according to the first embodiment described above, detailed description thereof is omitted.
- the U-shaped core 42 and the movable core 43 are formed using a material such as sintered ferrite or a metallic magnetic material. Further, the U-shaped core 42 and the movable core 43 have a high magnetic permeability and have a property that magnetic flux can easily pass therethrough.
- the U-shaped core 42 functions as a core portion of the coil 41 and has a closed magnetic circuit structure together with the movable core 43. For this reason, the U-shaped core 42 and the movable core 43 increase the magnetic permeability of the coil 41 and suppress the leakage magnetic flux.
- the coil component 40 includes a piezoelectric actuator 51 that drives the piezoelectric element 46.
- the piezoelectric actuator 51 includes a piezoelectric element 46, a moving body 47, and a friction drive rod 49.
- the coil component 40 includes an actuator base 45 fixed by an adhesive near the center of the U-shaped core 42 on the surface facing the + y direction.
- the coil component 40 includes a support portion 48 fixed by an adhesive in the vicinity of the center on the surface of the movable core 43 facing the + y direction.
- the actuator base 45 supports one end of the piezoelectric element 46 that expands and contracts when a voltage is applied.
- a friction drive rod 49 is attached to the other end of the piezoelectric element 46.
- the friction drive rod 49 is fixed by the support portion 48 and has a function of connecting the movable core 43 to the moving body 47.
- the piezoelectric actuator 51 is installed at the other end of the U-shaped core 42 and the other end of the movable core 43, and one end of the U-shaped core 42 and one end of the movable core 43 are connected as the moving body 47 moves.
- the relative position between the other end of the U-shaped core 42 and the other end of the movable core 43 is changed with the location (in this example, the connection portion 44) as a fulcrum.
- the piezoelectric actuator 51 forms a magnetic gap of the magnetic flux generated by the coil 41.
- the piezoelectric element 46 is a vibrator mounted between the actuator base 45 and the friction drive rod 49. Since the configuration and operation of the piezoelectric element 46 are the same as those of the piezoelectric element 9 according to the first embodiment described above, detailed description thereof is omitted.
- the friction drive rod 49 is installed in a floating state.
- a moving body stopper 50 that prevents the moving body 47 from falling off the friction drive rod 49 is installed at the end of the friction drive rod 49.
- the substantially L-shaped connecting portion 44 has a function of connecting the U-shaped core 42 and the movable core 43.
- the connecting portion 44 can prevent the movable core 43 from dropping from the U-shaped core 42 with the opening / closing operation of the movable core 43.
- the connection part 44 is a simple shape, it is easy to process and contributes to space saving of the coil component 30. Further, when the U-shaped core 42 and the movable core 43 are connected using the connecting portion 44, there is an advantage that the magnetic permeability of these magnetic cores is not affected.
- a pair of inductor electrodes 52 connected to both ends of the coil 41 are formed on the surface of the U-shaped core 42 facing the ⁇ y direction.
- the inductor electrode 52 is an electrode connected to an external mounting board or the like.
- a pair of actuator electrodes 53 connected to the actuator base 45 is formed on the surface of the U-shaped core 42 facing the ⁇ y direction.
- the actuator electrode 53 supplies a voltage to the actuator base 45 and controls the driving of the piezoelectric element 46.
- FIG. 10A and 10B show an operation example of the coil component 40.
- FIG. FIG. 10A shows an example of the coil component 40 in the initial state.
- the inclined surfaces 55 of the U-shaped core 42 and the movable core 43 are in contact with each other. Since no magnetic gap is generated, the inductance value is maximized.
- FIG. 10B shows an example of the coil component 40 in a state where a voltage is applied to the piezoelectric element 46.
- the piezoelectric element 46 extends, the movable core 43 moves in the + x direction.
- the piezoelectric actuator 51 suddenly disappears, the piezoelectric element 46 returns to the original position, but the moving body 47 stops in a state displaced in the + x direction by the frictional force of the friction drive rod 49.
- a gap is generated between the inclined surface 55 of the U-shaped core 42 and the movable core 43.
- the U-shaped core 42 and the movable core 43 are fixed by the connecting portion 44, the U-shaped core 42 and the movable core 43 stand still with a gap in the inclined surface 55.
- the U-shaped core 42 and the movable core 43 have a small inductance value due to the magnetic gap 56 that opens and closes when a voltage is applied.
- the other end of the movable core 43 is connected by connecting one end of the movable core 43 to one end of the U-shaped core 42 via the connection portion 44. Can move. Thereby, the other end of the movable core 43 can be moved away from the other end of the U-shaped core 42 by the piezoelectric actuator 51. For this reason, the magnetic gap 56 is produced and the inductance value of the coil component 40 can be adjusted.
- the configuration of the coil component 40 is simple, the manufacturing is easy while the number of components is small. For this reason, manufacturing cost can be reduced.
- the voltage applied to the piezoelectric actuator 51 is gradually lowered, the movable core 43 moved to a predetermined position remains at that position. For this reason, there is an effect that it is not necessary to continue to apply a voltage in order to stop the movable core 43 and power can be saved.
- FIG. 11 is a perspective view of the coil component 60.
- the coil component 60 includes an insulating substrate 61, a movable core 62, and a flat coil 63.
- the insulating substrate 61 is a substantially rectangular insulating sheet and is generally formed of a heat resistant resin material in many cases.
- a flat coil 63 is disposed on the surface of the insulating substrate 61 by a plating method, a copper foil etching method, a printing method, a physical vapor deposition (PVD) method, or the like.
- the coil component 60 includes an inductor connection electrode 65 that is a connection electrode connected to an external mounting board, and an actuator connection electrode 66 that is an electrode that supplies a voltage to the actuator.
- the inductor connection electrodes 65 are electrodes connected to both ends of the flat coil 63, and are arranged at two different corners of the insulating substrate 61.
- the actuator connection electrode 66 is disposed at two different corners on the insulating substrate 61 from the inductor connection electrode 65.
- the flat coil 63 is formed in a spiral shape, and has an in-substrate wiring 64 that enters the inside of the insulating substrate 61 from the vicinity of the center of the vortex.
- the in-substrate wiring 64 is disposed on the inner layer of the substrate so that one end of the coil at the center of the flat coil 63 can be connected to an external electrode. Further, the in-substrate wiring 64 lies in the insulating resin substrate below the flat coil 63, one end is connected to the center end of the flat coil 63, and the other end is connected to the inductor connection electrode 65.
- the coil component 60 includes a piezoelectric actuator 72 that drives the piezoelectric element 68.
- the piezoelectric actuator 72 includes a moving body 70 as a first moving body, and a friction drive rod 71 as a first stationary part. And a piezoelectric element 68.
- a moving body 70 as a second moving body and a friction drive rod 71 as a second stationary part are arranged.
- the movable core 62 is a surface of the insulating substrate 61 on which the flat coil 63 is disposed, and is supported by being sandwiched between two moving bodies 70.
- the gauge rod 69 is shown as an example of a track rod, and the moving body 70 is movable in the ⁇ x direction along the gauge rod 69 installed on the side surface of the insulating substrate 61.
- the two moving bodies 70 move in a direction perpendicular to the winding axis direction of the flat coil 63 according to the displacement generated in the piezoelectric element 68, and the movable core 62 generates the magnetic flux generated by the flat coil 63. pass.
- the piezoelectric element 68 expands and contracts in the ⁇ x direction.
- the moving body 70 moves in the ⁇ x directions.
- the movable core 62 moves in the ⁇ x direction.
- the amount of magnetic flux passing through the flat coil 63 changes, so that the inductance value of the coil component 60 changes.
- the coil component 60 includes an actuator base 67 that supports the piezoelectric element 68 and the friction drive rod 71.
- the actuator base 67 is formed of an insulating material such as resin and is installed at the four corners on the insulating substrate 61.
- the actuator bases 67 and 67 ′ are disposed between the inductor connection electrode 65 and the actuator connection electrode 66 with a certain distance for insulation.
- the insulating properties of the actuator bases 67 and 67 ′ themselves are sufficiently high, a space saving effect due to contact with the electrodes is also expected.
- FIG. 12A, 12B, 12C, and 12D show operation examples of the coil component 60.
- FIG. FIG. 12A shows an example of the coil component 60 in the initial state. In the initial state, since the piezoelectric actuator 72 is not driven, the moving body 70 is stationary while being in contact with the actuator base 67 '. At this time, the magnetic flux generated by the flat coil 63 hardly passes through the movable core 62.
- FIG. 12B shows an example of the coil component 60 after the voltage is applied.
- the piezoelectric actuator 72 is driven, the moving body 70 gradually moves in the ⁇ x direction. In this example, the moving body 70 moves until it covers the upper surface of the flat coil 63 almost completely.
- FIG. 12C shows an example in which the coil component 60 shown in FIG. 12B is viewed from the side in the + z direction. From this figure, it is shown that the movable core 62 placed on the moving body 70 can move in the ⁇ x directions.
- FIG. 12D shows a configuration example of a coil component 75 according to the fifth embodiment of the present invention.
- the basic configuration and operation of the coil component 75 are the same as those of the coil component 60 according to the above-described fourth embodiment. For this reason, in the following description, the same reference numerals are given to portions corresponding to FIG. 11 already described in the fourth embodiment, and detailed description thereof is omitted.
- the coil component 75 of this example includes a magnetic body 76 that substantially covers the back surface of the insulating substrate 61 on the back surface of the surface on which the flat coil 63 is disposed. Due to the magnetic body 76, a part of the magnetic flux leaked through the lower surface of the insulating substrate 61 passes and becomes a closed magnetic circuit. For this reason, an inductance value larger than that of the coil component 60 according to the fourth embodiment described above can be obtained, and the fluctuation range of the inductance value can be expanded.
- both ends of the movable core 62 are connected to the two moving bodies 70, respectively.
- the moving body 70 can move along the gauge rod 69 on the friction drive rod 71.
- the moving amount of the movable core 62 can be arbitrarily changed by the piezoelectric actuator 72.
- the inductance value can be adjusted by stopping the movable core 62 at a desired position and allowing the magnetic flux generated by the flat coil 63 to pass through the movable core 62.
- the configuration of the coil parts 60 and 75 is simple, the manufacturing is easy while the number of parts is small. For this reason, manufacturing cost can be reduced. Further, when the voltage applied to the piezoelectric actuator is gradually lowered, the movable core 62 moved to a predetermined position remains at that position. For this reason, there is an effect that it is not necessary to continue to apply a voltage in order to stop the movable core 62 and power can be saved.
- FIG. 13A, B, C, and D show an example of the operation of the coil component 80.
- FIG. FIG. 13A shows an example of the coil component 80 in the initial state. In the initial state, since the piezoelectric actuator 72 is not driven, the moving body 81 is stationary while being in contact with the actuator base 67 '. At this time, the magnetic flux generated by the flat coil 63 hardly passes through the movable core 62.
- FIG. 13B shows an example of the coil component 80 after the voltage is applied.
- the piezoelectric actuator 72 is driven, the moving body 70 gradually moves in the ⁇ x direction.
- the moving body 70 is moved until the upper surface of the flat coil 63 is almost completely covered.
- FIG. 13C shows an example in which the coil component 80 shown in FIG. 13B is viewed from the side in the + z direction. From this figure, it is shown that the movable core 62 placed on the moving body 81 can move in the ⁇ x directions.
- FIG. 13D shows a configuration example of the moving body 81 from an example of a cross-sectional view taken along line BB ′ of the coil component 80 in FIG. 13C.
- the movable core 83 is supported by being sandwiched between two moving bodies 82 and 83 on the back surface of the insulating substrate 61 with respect to the surface on which the flat coil 63 is disposed.
- FIG. 13D shows that the periphery of the insulating substrate 61 and the flat coil 63 is covered with the moving bodies 82 and 83 formed of a magnetic material and formed on the ring.
- the coil component 80 can obtain an inductance value larger than the coil component 60 and a large inductance fluctuation range. Further, since the coil component 80 can control the amount of magnetic flux passing through the lower surface of the insulating substrate 61 in a larger range as compared with the coil component 75 according to the fifth embodiment, the inductance variation range can be further increased. .
- FIG. 14 shows an example of the relationship between the actuator position and the inductance value in the coil component 60 according to the fourth embodiment, the coil component 75 according to the fifth embodiment, and the coil component 80 according to the sixth embodiment. Indicates.
- “Actuator position” refers to the moving body 70 when the maximum moving distance (end point) of the moving bodies 70 and 81 is 10, the minimum moving distance is 0 (start point), and the distance between the start point and the end point is equally divided into 10. , 81 is shown.
- the coil component 75 according to the fifth embodiment shows that the change ratio of the inductance value increases as the actuator position increases as compared to the coil component 60 according to the fourth embodiment. It is. Furthermore, the coil component 80 according to the sixth embodiment also shows that the change ratio of the inductance value increases as the actuator position increases compared to the coil component 75 according to the fifth embodiment. From the above results, it was shown that the change ratio of the inductance value can be greatly changed by arranging a magnetic body around the flat coil 63.
- the coil component according to the present invention detects the circuit constant, the position of the movable core 11 or the movable magnetic body, or controls the drive pulse by means such as a Hall element during use, thereby controlling the inductance. Adjustments can be made precisely. For this reason, it becomes easy to mass-produce coil parts of the same quality.
- the piezoelectric element used for the actuator is a monomorph type or bimorph type piezoelectric element. May be used. Thereby, it is possible to obtain a coil component that can easily adjust the inductance while saving power.
- SYMBOLS 1 ... Coil component, 2 ... Pot core, 3 ... Actuator connection electrode, 4 ... Inductor connection electrode, 5 ... Coil terminal part, 6 ... Flat plate core, 7 ... Fixed core part, 8 ... Fixed core part, 9 ... Piezoelectric element, 10 DESCRIPTION OF SYMBOLS ... Coil, 11 ... Movable core part, 12 ... Actuator base, 13 ... Friction drive rod, 14 ... Rectangular hole, 15 ... Piezoelectric actuator, 16 ... Moving body, 17 ... Magnetic path, 18 ... Coaxial line, 19 ... Magnetic gap, DESCRIPTION OF SYMBOLS 20 ... Voltage source, 21 ... External electrode, 22 ...
- insulating substrate 62 ... movable core, 63 ... flat coil, 64 ... wiring in substrate, 65 ... inductor connection electrode, 66 ... actuator connection electrode, 67, 67 '... actuator base, 68 ... piezoelectric element, 69 ... gauge rod, 70 ... moving body , 71 ... Friction drive rod, 72 ... Piezoelectric actuator, 75 ... Coil part, 76 ... Magnetic body, 80 ... Coil part, 81, 82 ... Moving body, 83 ... Movable core
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Abstract
Description
(1)例えば、バイモルフ型圧電素子を構成する圧電体の変位量はわずか(数十~数百μm)であった。このため、バイモルフ型圧電素子の先端に接着される磁性コアの変位量も小さくなり、インダクタンス値が変化する範囲は限られていた。
アクチュエータは、制御信号によって厚み方向に平行な変位を生じる圧電素子と、可動コアに接続され、圧電素子に生じた変位に応じて可動コアを移動させる移動体と、圧電素子及び移動体に接続され、圧電素子に生じた変位によって移動される移動体を所定の位置に静止させる静止部と、を備える。
以下、本発明の第1の実施の形態について、図1~図6を参照して説明する。本実施の形態では、例えば、小型の電子機器、電子回路に採用されるコイル部品1に適用した例について説明する。
図1Aは、直方体形状のコイル部品1の外観斜視図である。
コイル部品1は、底面と、底面に対して垂直な4面とを一体成型した磁性体のポットコア2と、コイル部品1の上部を覆う平板コア6を備え、ポットコア2と平板コア6によって外形が構成されている。ポットコア2と平板コア6は、内蔵するコイル10(後述する図1B参照)を保護するとともに、コイル10が発生する磁束を取り込んで磁路を生成する機能がある。平板コア6には、圧電体の作用によって可動芯部11を移動させる圧電アクチュエータ15が設置される。
空芯のコイル10は、少なくとも一面を開口部として形成された磁性体からなるポットコア2の内部、及び開口部に合わせて設置される磁性体からなる平板コア6の内部に格納される。ポットコア2は、焼結フェライトや金属系磁性材料等を材質とする磁性コアである。ポットコア2の透磁率は高いため、コイル10で発生した磁束が通りやすい。このため、ポットコア2は、コイル10全体を囲む形状としたことによって、漏れ磁束を抑制する。本例では、ポットコア2は、ほぼ箱形状に形成されており、コイル10,移動体16等を収容する容器としての機能も有する。
各部材には、図1Bと同一符号を付す。なお、コイル部品1の構成は、図1Bに示したコイル部品1と同様の構成であるため、詳細な説明を省略する。図1Cを参照すると、平板コア6に対して、固定芯部8が下向きに形成されていることが分かる。
図2Aは、初期状態のコイル部品1の例を示す。
初期状態では、圧電アクチュエータ15が駆動しないため、移動体16は、矩形穴14の左端に接触した状態で静止する。
圧電アクチュエータ15が駆動すると、移動体16は、徐々に+x方向に移動する。ただし、移動体16の移動範囲は矩形穴14の長さの範囲内に止まる。
図3Aは、初期状態のコイル部品1の例を示す。
初期状態では、固定芯部7,8と可動芯部11は、互いに接触し一つのポットコア中芯を形成する。このとき、圧電素子9に駆動信号(信号電圧)が印加されておらず、可動芯部11が移動していない。このため、コイル部品1には、ポットコア2-固定芯部7-可動芯部11-固定芯部8-平板コア6-ポットコア2の順に、磁路17が形成される。そして、同軸線18上には固定芯部7,8、及び可動芯部11が整列しており、磁気ギャップは最小状態にある。このとき、固定芯部7、可動芯部11、固定芯部8との間に境界面が存在するのみである。この状態でコイル10に電流を印加すると、高いインダクタンス値:Lが得られる。
圧電素子9に駆動信号(信号電圧)が印加されると、可動芯部11が固定芯部7,8に対して+x方向に遠ざかる。このとき、コイル部品1には、ポットコア2-固定芯部7-可動芯部11-固定芯部8-平板コア6-ポットコア2の順に、磁路17が形成される。そして、同軸線18上には固定芯部7,8に対して、可動芯部11がずれた状態となり、可動芯部11の上下端面に磁気ギャップ19が形成される。この状態でコイル10に電流を印加すると、図3Aの状態よりもインダクタンス値:Lは低くなる。
圧電素子9は、所定の電圧を加える電圧源20からの電圧端子となる外部電極21と、複数層の圧電材料が積層された積層圧電体22と、積層圧電体22の積層面に設置される内部電極23を備える。積層圧電体22は、外部電極21と内部電極23の間に挟み込まれた状態で形成される。電圧源20から所定の電圧が加わると、内部電極23は、矢印24の方向に分極する。内部電極23における各層が分極することによる変位量はわずかであるが、複数層の圧電体が同時に分極することによって、矢印25の方向に大きく変位する。また、複数層の圧電体が積層された圧電素子9は、一層ごとに並列に電圧が印加されるため、同じ寸法のブロックと比較して1/積層数の電圧で同じ変位量を得ることができる。このように圧電素子9を積層型とすることによって、圧電素子9の駆動電圧を低くすることが可能となる。
圧電アクチュエータ15には、V1<V2の関係を満たす電圧V1~V2の範囲内で信号電圧が加わる。時刻t1~t2間は、徐々に電圧V1から電圧V2まで変化し、時刻t2~t3間は、一定の電圧V2が加わる。そして、時刻t3~t4間は、電圧V2から電圧V1に急激に下げられる。ここで、(t2-t1)>(t4-t3)である。そして、時刻t4~t5間は、一定の電圧V1が加わる。この電圧変化が繰り返されると、可動芯部11が固定芯部7,8から遠ざかる。
圧電アクチュエータ15には、V1<V2の関係を満たす電圧V1~V2の範囲内で信号電圧が加わる。時刻t1~t2間は、急激に電圧V1から電圧V2まで変化し、時刻t2~t3間は、一定の電圧V2が加わる。そして、時刻t3~t4間は、電圧V2から電圧V1に徐々に変化する。ここで、(t2-t1)<(t4-t3)である。そして、時刻t4~t5間は、一定の電圧V1が加わる。この電圧変化が繰り返されると、可動芯部11が固定芯部7,8に近づく。
上述したように、圧電アクチュエータ15は、圧電素子9、アクチュエータベース12、摩擦駆動ロッド13、及び移動体16を備える。圧電素子9に徐々に電圧を加えると、積層圧電体22が層毎に伸びることにより、圧電素子9の一端に静止摩擦力の働きによって係合されている摩擦駆動ロッド13も共に動く(図1における+x方向。)。このため、摩擦駆動ロッド13に固定されている移動体16も静止摩擦力の働きによって、摩擦駆動ロッド13と同様に動く。その後、圧電素子9に加えている電圧を急に下げることにより、積層圧電体22が-x方向に急に縮む。このため、摩擦駆動ロッド13についても同様に、進行方向の反対方向(-x方向)に動く。しかし、移動体16の慣性力は動摩擦力以上の大きさであるため、移動体16は元の位置に止まるか、少しだけ-x方向に戻るかのいずれかの動作を行う。この動作を繰り返すことによって、移動体16(可動芯部11)を所望の位置に移動させ、移動した位置に静止させることができる。
一方、電圧が印加された時間に比べて短い時間に、圧電素子9に印加されていた電圧が下げられた場合に、圧電素子9は、厚み方向に平行に縮んで元の長さに戻り、摩擦駆動ロッド13は、移動体16を圧電素子9に生じた変位の位置付近で静止させる。
この状態では、圧電アクチュエータ15に電圧が加わっていないため、可動芯部11,移動体16は、動かない。
圧電アクチュエータ15に加わる電圧は、時刻t1~t2間で電圧V1から電圧V2まで変化し、圧電素子9は+x方向に△x1だけ伸びる。そして、圧電素子9の変形に伴って、移動体16が+x方向に移動するため、移動体16に接続された可動芯部11も+x方向に移動する。なお、アクチュエータベース12は、平板コア6に固定されているため動かない。
このとき、圧電アクチュエータ15に加える電圧は、わずかな時間(時刻t3~t4)で電圧V2から電圧V1まで急激に下げられ、圧電素子9の長さは、図6Aに示す元の長さに戻る。しかし、可動芯部11と移動体16は重さがあるため、慣性力により図6Bの位置にとどまるか、わずかに-x方向に戻る。本例では、可動芯部11と移動体16は、-x方向に△x2だけ戻り、+x方向に△x3だけ動いた状態で静止する。このとき、△x1=△x2+△x3の関係を満たす。
なお、可動芯部11と移動体16を-x方向に動かす場合は、図5Bに示した電圧の印加パターンを繰り返すことによって行われる。この動作例については省略する。
次に、本発明の第2の実施の形態に係るコイル部品30の構成例について図7を参照して説明する。ただし、コイル部品30の基本的な構成及び動作は、上述した第1の実施の形態に係るコイル部品1と同様である。このため、以下の説明において、既に第1の実施の形態で説明した図1に対応する部分には同一符号を付し、詳細な説明を省略する。
図7Aは、初期状態のコイル部品30の例を示す。
コイル部品30は、摩擦駆動ロッド13の他端を保持する保持部として、保持ベース31を平板コア6の端に備える。保持ベース31は、アクチュエータベース12と同じように接着剤で平板コア6の上に固定される。保持ベース31は、アクチュエータベース12と共に、摩擦駆動ロッド13の振動を抑制する機能を有する。
圧電素子9に駆動信号(信号電圧)が印加されると、可動芯部32が固定芯部7,8に対して+x方向に遠ざかる。このとき、コイル部品1には、ポットコア2-固定芯部7-可動芯部32-固定芯部8-平板コア6-ポットコア2の順に、磁路33が形成される。そして、同軸線34上には固定芯部7,8に対して、可動芯部32がずれた状態となり、可動芯部32の上下端面に磁気ギャップ35が形成される。この状態でコイル10に電流を印加すると、図7Aの状態よりもインダクタンス値:Lは低くなる。
「アクチュエータ位置」とは、移動体16の最大移動距離(終点)を10とし、最小移動距離を0(起点)とし、起点と終点の間を10等分した場合における、圧電アクチュエータ15の移動体16の位置関係を示す。ここでは、第1及び第2の実施の形態に係るコイル部品1,30のインダクタンス値の変化比率について説明する。
次に、本発明の第3の実施の形態に係るコイル部品40の構成例について図9と図10を参照して説明する。
コイル部品40は、U字型に形成されたU字型コア42と、U字型コア42の両端部に組み合わされる可動コア43を備える。U字型コア42の一端及び可動コア43の一端は、接続部44によって接続される。U字型コア42の他端は、斜めに切り欠かれており、台形状に形成された可動コア43の他端に該当する斜辺と面接触する。U字型コア42の一辺には、コイル41が巻回される。コイル41に用いられる導電線は、上述した第1の実施の形態に係るコイル10と同様であるため、詳細な説明を省略する。U字型コア42と可動コア43は、焼結フェライト又は金属系磁性材料等の材質を用いて形成される。また、U字型コア42と可動コア43は、高透磁率を有し、磁束が通りやすい性質がある。そして、U字型コア42は、コイル41の芯部として機能しており、可動コア43と共に閉磁路構造である。このため、U字型コア42と可動コア43は、コイル41の透磁率を高めると共に、漏れ磁束を抑制する。
また、コイル部品40は、U字型コア42の+y方向に向いた面上の中心付近に、接着剤によって固定されたアクチュエータベース45を備える。同様に、コイル部品40は、可動コア43の+y方向に向いた面上の中心付近に、接着剤によって固定された支持部48を備える。アクチュエータベース45は、電圧の印加によって伸縮する圧電素子46の一方の端部を支持する。一方、圧電素子46の他方の端部には、摩擦駆動ロッド49が取付けられる。摩擦駆動ロッド49は、支持部48によって固定され、可動コア43を移動体47に連結する機能を有する。
図10Aは、初期状態のコイル部品40の例を示す。
このとき、U字型コア42と可動コア43の傾斜面55は互いに接触した状態である。そして、磁気ギャップは発生していないため、インダクタンス値は最大となる。
このとき、圧電素子46が伸びることにより、可動コア43が+x方向に動く。そして、圧電アクチュエータ51に加える電圧が急になくなると、圧電素子46は元の位置に戻るが、移動体47は摩擦駆動ロッド49の摩擦力により+x方向に変位した状態で静止する。このとき、U字型コア42と可動コア43の傾斜面55に隙間が生じる。しかし、U字型コア42と可動コア43は、接続部44によって固定されるため、傾斜面55に隙間を空けたまま静止する。そして、U字型コア42と可動コア43は、電圧の印加によって開閉動作する磁気ギャップ56によりインダクタンス値が小さくなる。
次に、本発明の第4及び第5の実施の形態に係るコイル部品60の構成例について図11と図12を参照して説明する。
コイル部品60は、絶縁基板61と、可動コア62と、フラットコイル63を備える。絶縁基板61は、略長方形の絶縁シートであり、一般的に、耐熱性樹脂材料で形成されることが多い。絶縁基板61の表面には、メッキ法や銅箔のエッチング法、印刷法又は物理的蒸着法(PVD:Physical Vapor Deposition)などの方法で、フラットコイル63が配される。
図12Aは、初期状態のコイル部品60の例を示す。
初期状態では、圧電アクチュエータ72が駆動しないため、移動体70は、アクチュエータベース67′に接触した状態で静止する。このとき、フラットコイル63が発生する磁束は、可動コア62にほとんど通過しない。
圧電アクチュエータ72が駆動すると、移動体70は、徐々に-x方向に移動する。本例では、移動体70がフラットコイル63の上面をほぼ完全に覆うまで移動する。
この図より、移動体70に載置される可動コア62が±x方向に移動可能であることが示される。
図12Dは、本発明の第5の実施の形態に係るコイル部品75の構成例を示す。
ただし、コイル部品75の基本的な構成及び動作は、上述した第4の実施の形態に係るコイル部品60と同様である。このため、以下の説明において、既に第4の実施の形態で説明した図11に対応する部分には同一符号を付し、詳細な説明を省略する。
次に、本発明の第6の実施の形態に係るコイル部品80の構成例について図13を参照して説明する。ただし、コイル部品80の基本的な構成及び動作は、上述した第4の実施の形態に係るコイル部品60と同様である。このため、以下の説明において、既に第4の実施の形態で説明した図11に対応する部分には同一符号を付し、詳細な説明を省略する。
図13Aは、初期状態のコイル部品80の例を示す。
初期状態では、圧電アクチュエータ72が駆動しないため、移動体81は、アクチュエータベース67′に接触した状態で静止する。このとき、フラットコイル63が発生する磁束は、可動コア62にほとんど通過しない。
圧電アクチュエータ72が駆動すると、移動体70は、徐々に-x方向に移動する。本例では、移動体70がフラットコイル63の上面をほぼ完全に覆うまで移動される。
この図より、移動体81に載置される可動コア62が±x方向に移動可能であることが示される。
可動コア83は、絶縁基板61のうち、フラットコイル63が配される表面に対する裏面に、2個の移動体82,83に挟まれて支持される。図13Dより、絶縁基板61とフラットコイル63の周囲が磁性体により形成された移動体82,83により覆われリング上に形成されることが示される。これらの移動体82,83により、第4の実施の形態に係るコイル部品60のように絶縁基板61の下面を通して漏洩した磁束の一部は、閉磁路になる。このため、コイル部品80は、コイル部品60より大きなインダクタンス値、かつ、大きなインダクタンス変動範囲を得られる。また、コイル部品80は、第5の実施の形態に係るコイル部品75に比べて、絶縁基板61の下面を通過する磁束の量をより大きな範囲で制御できるため、さらにインダクタンスの変動範囲を大きくできる。
以上の結果より、フラットコイル63の周囲に磁性体を配置することでインダクタンス値の変化比率を大きく変えることが可能であることが示された。
Claims (9)
- 磁性コアと、
所定の電流が供給されると磁束を発生するコイルと、
外部から供給される制御信号によって、前記コイルに対する可動コアの位置を変え、前記コイルが発生する磁束に前記可動コアを通過させるアクチュエータと、を備え、
前記アクチュエータは、
前記制御信号によって厚み方向に平行な変位を生じる圧電素子と、
前記可動コアに接続され、前記圧電素子に生じた変位に応じて前記可動コアを移動させる移動体と、
前記圧電素子及び前記移動体に接続され、前記圧電素子に生じた変位によって移動される前記移動体を所定の位置に静止させる静止部と、を備える
コイル部品。 - 前記コイルは、少なくとも一面を開口部として形成された磁性体からなるポットコアの内部、及び前記開口部に合わせて設置される前記磁性体からなる平板コアの内部に格納され、
前記ポットコア及び前記平板コアの内部には、前記コイルの巻き軸方向に沿って、前記可動コアの形状に合わせた芯部が形成され、
前記アクチュエータは、前記平板コアに設置され、
前記移動体は、前記圧電素子の変位方向に平行な方向に前記平板コアを貫通して形成された貫通穴に設置される
請求の範囲第1項記載のコイル部品。 - 前記圧電素子に印加される電圧が上げられた場合に、前記圧電素子は、前記厚み方向に平行に伸び、前記静止部は、前記移動体を前記圧電素子に生じた変位の位置で静止させ、
前記電圧が印加された時間に比べて短い時間に、前記圧電素子に印加されていた電圧が下げられた場合に、前記圧電素子は、前記厚み方向に平行に縮んで元の長さに戻り、前記静止部は、前記移動体を前記圧電素子に生じた変位の位置付近で静止させる
請求の範囲第2項記載のコイル部品。 - 更に、前記平板コアは、前記静止部を保持する保持部を備える
請求の範囲第3項記載のコイル部品。 - 前記磁性コアは、U字型に形成されたU字型コアによって形成され、
前記可動コアは、前記U字型コアの両端部に組み合わされる前記可動コアによって形成され、
前記コイルは、前記U字型コアの一辺に巻回され、
前記U字型コアの一端及び前記可動コアの一端が接続され、
前記アクチュエータは、前記U字型コアの他端及び前記可動コアの他端に設置され、前記移動体の移動に伴って、前記U字型コアの一端及び前記可動コアの一端が接続された箇所を支点として、前記U字型コアの他端及び前記可動コアの他端との相対的な位置を変えて、前記コイルによって発生した磁束の磁気ギャップを形成する
請求の範囲第1項記載のコイル部品。 - 更に、前記コイルが配される基板を備え、
前記基板の周囲であって、対向する2辺のうち、少なくとも1辺には、前記アクチュエータとして、前記圧電素子、第1の移動体、及び第1の静止部が配され、他の1辺には、第2の移動体及び第2の静止部が配され、
前記可動コアは、前記コイルが配される前記基板の表面であって、前記第1及び第2の移動体に支持され、
前記圧電素子に生じた変位に応じて、前記第1の移動体、及び前記可動コアに接続された前記第2の移動体が前記コイルの巻き軸方向に垂直な方向に移動し、前記コイルが発生する磁束を前記可動コアが通過する
請求の範囲第1項記載のコイル部品。 - 更に、前記基板のうち、前記コイルが配される表面に対する裏面に、前記裏面をほぼ覆う磁性体を備える
請求の範囲第6項記載のコイル部品。 - 更に、前記基板のうち、前記コイルが配される表面に対する裏面に、前記第1及び第2の移動体に支持される第2の可動コアを備える
請求の範囲第6項又は第7項記載のコイル部品。 - 前記圧電素子は、モノモルフ型又はバイモルフ型の圧電素子である
請求の範囲第1項~第8項のうち、いずれか1項に記載のコイル部品。
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US8299681B2 (en) | 2009-03-06 | 2012-10-30 | Life Services, LLC | Remotely adjustable reactive and resistive electrical elements and method |
US8854042B2 (en) | 2010-08-05 | 2014-10-07 | Life Services, LLC | Method and coils for human whole-body imaging at 7 T |
US8604791B2 (en) | 2010-09-09 | 2013-12-10 | Life Services, LLC | Active transmit elements for MRI coils and other antenna devices |
US9097769B2 (en) | 2011-02-28 | 2015-08-04 | Life Services, LLC | Simultaneous TX-RX for MRI systems and other antenna devices |
CN103975398B (zh) | 2011-08-18 | 2017-07-04 | 温彻斯特技术有限责任公司 | 具有大电感可调谐性的静电可调谐磁电电感器 |
JP2013172135A (ja) * | 2012-02-23 | 2013-09-02 | Fdk Corp | トランス |
US9500727B2 (en) | 2012-04-20 | 2016-11-22 | Regents Of The University Of Minnesota | System and method for control of RF circuits for use with an MRI system |
US9583250B2 (en) * | 2013-09-03 | 2017-02-28 | The United States Of America As Represented By The Secretary Of The Army | MEMS tunable inductor |
US10191128B2 (en) | 2014-02-12 | 2019-01-29 | Life Services, LLC | Device and method for loops-over-loops MRI coils |
US9711276B2 (en) * | 2014-10-03 | 2017-07-18 | Instrument Manufacturing Company | Resonant transformer |
US10288711B1 (en) | 2015-04-30 | 2019-05-14 | Life Services, LLC | Device and method for simultaneous TX/RX in strongly coupled MRI coil loops |
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US10827948B1 (en) | 2015-11-25 | 2020-11-10 | Life Services, LLC | Method and apparatus for multi-part close fitting head coil |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0167713U (ja) * | 1987-10-22 | 1989-05-01 | ||
JPH04185287A (ja) * | 1990-11-19 | 1992-07-02 | Canon Inc | 移動機構 |
JPH0541113U (ja) * | 1991-10-31 | 1993-06-01 | 日本電気株式会社 | コイル |
JPH08286093A (ja) * | 1995-04-14 | 1996-11-01 | Minolta Co Ltd | 電気機械変換素子を使用した駆動装置 |
JP2008091438A (ja) * | 2006-09-29 | 2008-04-17 | Sumida Corporation | コイル部品及びコイル部品を用いた電子回路 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62111405A (ja) * | 1985-11-08 | 1987-05-22 | Matsushita Electric Ind Co Ltd | 可変インダクタ |
JPS6467713A (en) | 1987-09-09 | 1989-03-14 | Ricoh Kk | Magnetic recording medium |
JPH02311166A (ja) * | 1989-05-26 | 1990-12-26 | Nec Corp | パルス幅制御方式電流共振型コンバータ |
US5225941A (en) | 1990-07-03 | 1993-07-06 | Canon Kabushiki Kaisha | Driving device |
JPH054113A (ja) | 1991-06-26 | 1993-01-14 | Yoshida Shokai:Kk | 刃物締付装置 |
JP2817647B2 (ja) | 1995-02-02 | 1998-10-30 | 日本電気株式会社 | 可変インダクタンス素子 |
JP3441973B2 (ja) * | 1998-06-30 | 2003-09-02 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
JP2000331840A (ja) | 1999-05-17 | 2000-11-30 | Fuji Elelctrochem Co Ltd | コイル部品 |
CN2807430Y (zh) * | 2005-07-06 | 2006-08-16 | 西北台庆科技股份有限公司 | 可承受大电流的电感结构 |
-
2009
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0167713U (ja) * | 1987-10-22 | 1989-05-01 | ||
JPH04185287A (ja) * | 1990-11-19 | 1992-07-02 | Canon Inc | 移動機構 |
JPH0541113U (ja) * | 1991-10-31 | 1993-06-01 | 日本電気株式会社 | コイル |
JPH08286093A (ja) * | 1995-04-14 | 1996-11-01 | Minolta Co Ltd | 電気機械変換素子を使用した駆動装置 |
JP2008091438A (ja) * | 2006-09-29 | 2008-04-17 | Sumida Corporation | コイル部品及びコイル部品を用いた電子回路 |
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