WO2010053081A1 - 異方導電膜貼付装置 - Google Patents
異方導電膜貼付装置 Download PDFInfo
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- WO2010053081A1 WO2010053081A1 PCT/JP2009/068803 JP2009068803W WO2010053081A1 WO 2010053081 A1 WO2010053081 A1 WO 2010053081A1 JP 2009068803 W JP2009068803 W JP 2009068803W WO 2010053081 A1 WO2010053081 A1 WO 2010053081A1
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- H—ELECTRICITY
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
- B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/22—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of both discrete and continuous layers
- B32B37/223—One or more of the layers being plastic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/202—Conductive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
- B32B2457/202—LCD, i.e. liquid crystal displays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1825—Handling of layers or the laminate characterised by the control or constructional features of devices for tensioning, stretching or registration
- B32B38/1833—Positioning, e.g. registration or centering
- B32B38/1841—Positioning, e.g. registration or centering during laying up
- B32B38/185—Positioning, e.g. registration or centering during laying up combined with the cutting of one or more layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01051—Antimony [Sb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01074—Tungsten [W]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19042—Component type being an inductor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0195—Tool for a process not provided for in H05K3/00, e.g. tool for handling objects using suction, for deforming objects, for applying local pressure
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0278—Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
Abstract
Description
図2において、異方導電膜貼付装置は、工程の上流側(図示左方)に位置する洗浄装置(図示省略)で洗浄されたワークWを、搬送アームを用いて装置本体内に取り込み(A→B位置)、xy二方向に移動可能でかつz方向のθ軸回りに回転可能な吸着パッド付き移動ステージに移載した後(B位置)、複数のカメラ等を用いて異方導電膜の貼り付け位置を確認・記憶してから(C位置)、その位置情報に合わせて、貼り付けポジション(D位置)で上記ワークWの所定位置に、異方導電膜の貼り付け(転写)を行なう。
図1は、本実施形態における異方導電膜貼付装置の本体内を操作(制御)パネル側から見た図であり、その操作パネル側(紙面表側)を装置の手前側、後述するリール交換などのために開閉可能な作業用パネルのある側(紙面裏側)を装置の奥側として説明する。なお、先に述べたような、ワークWを工程の上流側(図示左方)から装置本体内に搬入し、工程の下流側(図示右方)に搬出する搬送アームは図示を省略している。また、貼付に使用される異方導電(ACF)テープは、その厚みを強調して図示している。
P テープ供給部
Pu1,Pu2 テープ供給ユニット
Q 圧着部
Qu1,Qu2 圧着ユニット
R1,R2,R3,R4 リール
S ステージ
T1,T2,T3,T4 異方導電テープ
W ワーク
Claims (5)
- 装置本体内に搬入された基板を所定の位置に移動させて位置決めする基板位置決め手段と、上記位置決めされた基板の所定の部位に、セパレータと異方導電膜とが積層された異方導電テープを、その異方導電膜の面が上記基板に対峙する向きとなるよう供給する異方導電テープ供給手段と、上記異方導電テープをセパレータ側から押圧して異方導電膜のみを基板上に転写して貼り付ける貼付けヘッドとを備えた異方導電膜貼付装置であって、上記貼付けヘッドが、異方導電膜の貼り付け方向に沿って複数個配設され、各貼付けヘッドの間隔が調節可能に設定されているとともに、上記異方導電テープ供給手段が、異方導電テープが巻回されたリールを装着保持するリール装着部を備え、この異方導電テープ供給手段が、上記貼付けヘッドごとに独立して設けられていることを特徴とする異方導電膜貼付装置。
- 上記異方導電テープ供給手段には、上記リール装着部が、所定の配置交換手段を介して複数設けられ、同時に装着保持された複数のリールの配置を順次入れ換えできるように形成されているとともに、所定の配置において、いずれかのリール装着部が、上記貼付けヘッドに異方導電テープを供給可能な供給位置に位置決めされ、他のリール装着部のいずれかが、リールの付け替えが可能な待機位置に位置決めされるようになっている請求項1記載の異方導電膜貼付装置。
- 上記異方導電テープ供給手段が、上記配置交換手段としての回転軸と、この回転軸を挟んで背中合わせに配設された2個のリール装着部とからなり、上記回転軸を180°回転させることによって、一方のリール装着部が上記供給位置に、他方のリール装着部が上記待機位置に配置されるようになっている請求項2記載の異方導電膜貼付装置。
- 上記供給位置で使用中のリールの異方導電テープの残量が少なくなった時、この残余少量テープの終端部近傍をテープ把持部材で把持するとともに終端部側のテープを切断し、上記残余少量テープの終端部を固定した状態で上記回転軸を180°回転させて、当該残余少量テープの終端部に、上記待機位置に待機していたリールから引き出した未使用の異方導電テープの開始端部を近接させ、これら終端部と開始端部とを重ね合わせて接合した後、上記テープ把持部材の把持を解除して、上記貼付けヘッドへの異方導電テープの供給を再開するようになっている請求項3記載の異方導電膜貼付装置。
- 上記残余少量の異方導電テープの終端部と上記未使用の異方導電テープの開始端部との接合が、これらテープの重複部位への超音波の照射による融着によって行なわれるようになっている請求項4記載の異方導電膜貼付装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009801415682A CN102187748A (zh) | 2008-11-05 | 2009-11-04 | 各向异性导电膜贴附装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-284240 | 2008-11-05 | ||
JP2008284240A JP5231176B2 (ja) | 2008-11-05 | 2008-11-05 | 異方導電膜貼付装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010053081A1 true WO2010053081A1 (ja) | 2010-05-14 |
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ID=42152889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/068803 WO2010053081A1 (ja) | 2008-11-05 | 2009-11-04 | 異方導電膜貼付装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5231176B2 (ja) |
KR (1) | KR20110084171A (ja) |
CN (1) | CN102187748A (ja) |
TW (1) | TW201030870A (ja) |
WO (1) | WO2010053081A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5381971B2 (ja) * | 2010-12-27 | 2014-01-08 | パナソニック株式会社 | Acf貼着装置及びacf貼着方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168145A (ja) * | 1999-12-14 | 2001-06-22 | Matsushita Electric Ind Co Ltd | チップのボンディング装置 |
JP2007189197A (ja) * | 2005-12-16 | 2007-07-26 | Matsushita Electric Ind Co Ltd | 貼着装置 |
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2008
- 2008-11-05 JP JP2008284240A patent/JP5231176B2/ja not_active Expired - Fee Related
-
2009
- 2009-11-04 KR KR1020117007927A patent/KR20110084171A/ko not_active Application Discontinuation
- 2009-11-04 WO PCT/JP2009/068803 patent/WO2010053081A1/ja active Application Filing
- 2009-11-04 CN CN2009801415682A patent/CN102187748A/zh active Pending
- 2009-11-04 TW TW098137468A patent/TW201030870A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001168145A (ja) * | 1999-12-14 | 2001-06-22 | Matsushita Electric Ind Co Ltd | チップのボンディング装置 |
JP2007189197A (ja) * | 2005-12-16 | 2007-07-26 | Matsushita Electric Ind Co Ltd | 貼着装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2010114194A (ja) | 2010-05-20 |
CN102187748A (zh) | 2011-09-14 |
TW201030870A (en) | 2010-08-16 |
KR20110084171A (ko) | 2011-07-21 |
JP5231176B2 (ja) | 2013-07-10 |
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