WO2010015296A2 - Élément optique transmetteur en spinelle magnésium-aluminium - Google Patents

Élément optique transmetteur en spinelle magnésium-aluminium Download PDF

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Publication number
WO2010015296A2
WO2010015296A2 PCT/EP2009/004534 EP2009004534W WO2010015296A2 WO 2010015296 A2 WO2010015296 A2 WO 2010015296A2 EP 2009004534 W EP2009004534 W EP 2009004534W WO 2010015296 A2 WO2010015296 A2 WO 2010015296A2
Authority
WO
WIPO (PCT)
Prior art keywords
magnesium
optical element
less
ppm
ratio
Prior art date
Application number
PCT/EP2009/004534
Other languages
German (de)
English (en)
Other versions
WO2010015296A3 (fr
Inventor
Wilfried Clauss
Yvonne Koehne
Christian Thiele
Original Assignee
Carl Zeiss Smt Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Smt Ag filed Critical Carl Zeiss Smt Ag
Publication of WO2010015296A2 publication Critical patent/WO2010015296A2/fr
Publication of WO2010015296A3 publication Critical patent/WO2010015296A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/44—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminates
    • C04B35/443—Magnesium aluminate spinel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C04B35/6455—Hot isostatic pressing
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B1/00—Single-crystal growth directly from the solid state
    • C30B1/12—Single-crystal growth directly from the solid state by pressure treatment during the growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/26—Complex oxides with formula BMe2O4, wherein B is Mg, Ni, Co, Al, Zn, or Cd and Me is Fe, Ga, Sc, Cr, Co, or Al
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C04B2235/725—Metal content
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9646—Optical properties
    • C04B2235/9653—Translucent or transparent ceramics other than alumina

Definitions

  • the optical element has an absorption coefficient k of at most 0.2 cm -1 , preferably of at most 0.1 cm -1 , in particular of at most 0.01, at at least one wavelength between 190 nm and 250 nm, in particular at 193 nm cm '1.
  • absorption coefficient k is given by:
  • a magnesium oxide powder and an alumina powder are preferably mixed in a mixed grinding process.
  • the stoichiometry can also be set with the required accuracy.
  • the required spatial homogeneity of the mixture hereby may be e.g. be ensured by a Mischmahlungs pulp.
  • the Al / Mg ratio V in the volume of the blank 6 is as constant as possible, i. if this varies by less than 200 ppm, preferably by less than 100 ppm, in particular by less than 50 ppm, since not only the transmission of the magnesium-aluminum spinel blank 6, but also other optical properties, e.g. whose refractive index, depend on this ratio.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

La présente invention concerne un élément optique (133) destiné à transmettre un rayonnement de longueurs d'onde inférieure à 250 nm, en particulier de 193 nm, fait d'un matériau contenant de la spinelle magnésium-aluminium. Selon l'invention, rapporté au volume de l'élément optique (133), le rapport (V) de la teneur en aluminium de la spinelle magnésium-aluminium sur la teneur en magnétisme de la spinelle magnésium-aluminium, varie d'une valeur inférieure à 200 ppm, de préférence d'une valeur inférieure à 100 ppm, de préférence encore d'une valeur inférieure à 50 PPCM, et/ou prend une valeur allant de 2,0 à 2,2, de préférence de 2,02 à 2,10, de préférence encore de 2,04 à 2,08. L'invention a également pour objet un objectif de projection et une installation d'éclairage par projection comprenant un tel élément optique, ainsi qu'un procédé de réalisation d'une ébauche (1) utilisée pour la réalisation de l'élément optique (133).
PCT/EP2009/004534 2008-08-06 2009-06-24 Élément optique transmetteur en spinelle magnésium-aluminium WO2010015296A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US8663708P 2008-08-06 2008-08-06
US61/086,637 2008-08-06
DE102008041055.1 2008-08-06
DE102008041055A DE102008041055A1 (de) 2008-08-06 2008-08-06 Transmittierendes optisches Element aus Magnesium-Aluminium-Spinell

Publications (2)

Publication Number Publication Date
WO2010015296A2 true WO2010015296A2 (fr) 2010-02-11
WO2010015296A3 WO2010015296A3 (fr) 2010-05-14

Family

ID=41528182

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/004534 WO2010015296A2 (fr) 2008-08-06 2009-06-24 Élément optique transmetteur en spinelle magnésium-aluminium

Country Status (2)

Country Link
DE (1) DE102008041055A1 (fr)
WO (1) WO2010015296A2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3272709A4 (fr) * 2015-03-18 2018-08-22 DIC Corporation Particules de spinelle, leur procédé de production, et composition et moulage comprenant les particules de spinelle
CN109790075A (zh) * 2016-10-05 2019-05-21 信越化学工业株式会社 透明尖晶石烧结体、光学构件以及透明尖晶石烧结体的制造方法
JPWO2020031598A1 (ja) * 2018-08-07 2021-03-18 三井金属鉱業株式会社 光拡散部材、並びにこれを用いた光拡散構造体及び発光構造体
CN116283317A (zh) * 2023-03-08 2023-06-23 湖南金铠新材料科技股份有限公司 一种钠离子电池正极材料烧结用匣钵及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006061225A1 (fr) * 2004-12-09 2006-06-15 Carl Zeiss Smt Ag Element optique d'emission et objectif destine a un appareil d'exposition par projection microlithographique
DE102005010655A1 (de) * 2005-03-08 2006-09-14 Schott Ag Verfahren zur Herstellung von optischen Elementen für die Mikrolithographie, damit erhältliche Linsensysteme und deren Verwendung
WO2008074503A1 (fr) * 2006-12-21 2008-06-26 Carl Zeiss Smt Ag Élément optique d'émission

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA947677B (en) * 1993-10-29 1995-05-02 Programme 3 Patent Holdings Method of making spinel compounds
DE102005043623A1 (de) * 2005-09-13 2007-03-15 Schott Ag Herstellung hochhomogener spannungsarmer Einkristalle durch Ziehen, eine Vorrichtung hierfür sowie die Verwendung solcher Kristalle
DE102007054287A1 (de) * 2006-12-21 2008-06-26 Carl Zeiss Smt Ag Transmittierendes optisches Element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006061225A1 (fr) * 2004-12-09 2006-06-15 Carl Zeiss Smt Ag Element optique d'emission et objectif destine a un appareil d'exposition par projection microlithographique
DE102005010655A1 (de) * 2005-03-08 2006-09-14 Schott Ag Verfahren zur Herstellung von optischen Elementen für die Mikrolithographie, damit erhältliche Linsensysteme und deren Verwendung
WO2008074503A1 (fr) * 2006-12-21 2008-06-26 Carl Zeiss Smt Ag Élément optique d'émission

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3272709A4 (fr) * 2015-03-18 2018-08-22 DIC Corporation Particules de spinelle, leur procédé de production, et composition et moulage comprenant les particules de spinelle
CN109790075A (zh) * 2016-10-05 2019-05-21 信越化学工业株式会社 透明尖晶石烧结体、光学构件以及透明尖晶石烧结体的制造方法
EP3524586A4 (fr) * 2016-10-05 2020-05-27 Shin-Etsu Chemical Co., Ltd. Corps fritté transparent en spinelles, élément optique et procédé de production d'un corps fritté transparent en spinelles
CN109790075B (zh) * 2016-10-05 2022-10-25 信越化学工业株式会社 透明尖晶石烧结体、光学构件以及透明尖晶石烧结体的制造方法
JPWO2020031598A1 (ja) * 2018-08-07 2021-03-18 三井金属鉱業株式会社 光拡散部材、並びにこれを用いた光拡散構造体及び発光構造体
CN116283317A (zh) * 2023-03-08 2023-06-23 湖南金铠新材料科技股份有限公司 一种钠离子电池正极材料烧结用匣钵及其制备方法
CN116283317B (zh) * 2023-03-08 2023-10-24 湖南金铠新材料科技股份有限公司 一种钠离子电池正极材料烧结用匣钵及其制备方法

Also Published As

Publication number Publication date
DE102008041055A1 (de) 2010-02-18
WO2010015296A3 (fr) 2010-05-14

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