Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
  • G02B7/28—Systems for automatic generation of focusing signals
  • G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
  • G02B7/28—Systems for automatic generation of focusing signals
  • G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane
  • G02B7/346—Systems for automatic generation of focusing signals using different areas in a pupil plane using horizontal and vertical areas in the pupil plane, i.e. wide area autofocusing
• • G—PHYSICS
  • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
  • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
  • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
  • G03B13/32—Means for focusing
  • G03B13/34—Power focusing
  • G03B13/36—Autofocus systems
• • H—ELECTRICITY
  • H04—ELECTRIC COMMUNICATION TECHNIQUE
  • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
  • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
  • H04N23/60—Control of cameras or camera modules
  • H04N23/67—Focus control based on electronic image sensor signals
• • H—ELECTRICITY
  • H04—ELECTRIC COMMUNICATION TECHNIQUE
  • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
  • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
  • H04N25/70—SSIS architectures; Circuits associated therewith
  • H04N25/703—SSIS architectures incorporating pixels for producing signals other than image signals
  • H04N25/704—Pixels specially adapted for focusing, e.g. phase difference pixel sets
• • H—ELECTRICITY
  • H04—ELECTRIC COMMUNICATION TECHNIQUE
  • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
  • H04N2101/00—Still video cameras

Definitions

• the present invention relates to a focus detection device and, more particularly, to a focus detection device having imaging pixels and focus- detecting pixels using a phase-difference focus detection method.
• the present invention also relates to an imaging apparatus having the focus detection device.
• phase-difference focus detection AF Auto Focus
• phase difference AF phase difference focus detection function
• some pixels of an image sensor are formed as focus-detecting pixels by giving a pupil division function to them.
• the pupil division function is provided by dividing the light receiving portion of a pixel into two. Outputs from the two light receiving portions are used as phase-difference focus detection signals, and the sum of them is used as a pixel signal.
• Japanese Patent Laid-Open No. 2001-305415 some pixels of an image sensor are formed as focus-detecting pixels by giving a pupil division function to them.
• the pupil division function is provided by dividing the light receiving portion of a pixel into two. Outputs from the two light receiving portions are used as phase-difference focus detection signals, and the sum of them is used as a pixel signal.
• the pupil division function is given to some pixels of an image sensor by forming a rectangular opening in a light shielding layer between a microlens and a photoelectric conversion unit so that the opening is decentered from the optical axis of the microlens.
• These pixels having the pupil division function are arranged as focus-detecting pixels at predetermined intervals to perform phase-difference focus detection AF.
• Image signals at portions where the focus-detecting pixels are arranged are generated from image signals from peripheral pixels.
• the image sensors need to be configured so that the light receiving portion of a pixel to be given the pupil division function is divided into two areas, and photoelectrically converted signals in the divided areas can be independently read out. This complicates the structure of the image sensor, which is disadvantageous in decreasing the pixel pitch. An area between the divided areas becomes a blind zone, so the sensitivity of the image sensor may decrease. [0007] According to the techniques disclosed in Japanese Patent Laid-Open Nos. 2000-156823 and 2008- 134389, a light shielding layer for pupil division needs to be arranged. However, arranging the pupil division-specific light shielding layer complicates the structure of the image sensor.
• CMOS image sensors solid-state image sensors using a complimentary metal oxide semiconductor
• the CMOS image sensor requires three electrode layers (interconnection layers) or so between a microlens and a photoelectric conversion unit.
• the light shielding layer is added to the interconnection layers.
• the distance between the microlens and the photoelectric conversion unit will increase, decreasing the light receiving efficiency.
• the focus position of the microlens is set near the surface of the photoelectric conversion unit. If the light shielding layer for pupil division is arranged immediately below the microlens, no desired pupil division performance can be obtained, and the focus detection precision may decrease.
• a focus detection device in which a plurality of pixels are arranged, each pixel having a photoelectric conversion unit for converting an incident light flux into signal charges and a microlens having a focus position near the photoelectric conversion unit, comprising: electrode groups which are used to read out signal charges converted by the photoelectric conversion units of the plurality of pixels, wherein the plurality of pixels include a plurality of imaging pixels for generating a shot image, and a plurality of focus-detecting pixels for generating an image signal for focus detection by a phase-difference focus detection method, and for the imaging pixels, the electrode groups are arranged not to block a light flux entering the photoelectric conversion units via the microlenses, and for the focus-detecting pixels, the electrode groups are arranged between the photoelectric
• an imaging apparatus comprising: a photographing optical system having a focus lens; a focus detection device according to the present invention; driving means for driving the focus lens in accordance with a defocus amount calculated by calculation means of the focus detection device; and image processing means for generating an image on the basis of signal charges read out from an imaging pixel of the focus detection device.
• FIG. 1 is a view showing an example of the arrangement of a digital camera as an example of an imaging apparatus to which a focus detection device according to an embodiment of the present invention is applicable;
• Fig. 2 is a view for explaining the concept of pupil division when performing focus detection by a phase-difference focus detection method in the digital camera according to the embodiment of the present invention
• FIG. 3 is a view showing an example of the layout of focus-detecting pixels in an image sensor which forms the focus detection device according to the embodiment of the present invention
• Fig. 4 is an enlarged plan view of one block shown in Fig. 3 when viewed from a photographing optical system;
• FIGs. 5A and 5B are plan view and sectional view, respectively, for explaining the structure of an imaging pixel in the image sensor according to the embodiment of the present invention.
• Figs. 6A and 6B are plan view and sectional view, respectively, for explaining the structure of a focus-detecting pixel (for horizontal phase-difference focus detection) in the image sensor according to the first embodiment of the present invention
• Figs. 7A and 7B are plan view and sectional view, respectively, for explaining the structure of a focus-detecting pixel (for vertical phase-difference focus detection) in the image sensor according to the first embodiment of the present invention
• Figs. 8A and 8B are plan view and sectional view, respectively, for explaining pupil projection of an imaging pixel in the image sensor according to the embodiment of the present invention.
• Figs. 9A and 9B are plan view and sectional view, respectively, for explaining pupil projection of a pixel (focus-detecting pixel) for phase-difference focus detection in the horizontal direction (X direction) of the photographing optical system in the image sensor according to the embodiment of the present invention
• Figs. 1OA and 1OB are plan view and sectional view, respectively, for explaining pupil projection of a pixel (focus-detecting pixel) for phase-difference focus detection in the vertical direction (Y direction) of the photographing optical system in the image sensor according to the embodiment of the present invention
• Fig. HA to Fig. HC are plan view and graphs, respectively, for explaining the pupil sharpnesses of focus-detecting pixels S HA and S HB and an imaging pixel in the image sensor according to the first embodiment of the present invention
• Fig. 12A to Fig. 12C are plan view and graphs, respectively, for explaining the pupil sharpnesses of focus-detecting pixels S V c and S VD and an imaging pixel in the image sensor according to the first embodiment of the present invention
• Fig. 13 is a schematic view for explaining an example of an image acquired upon focus detection and a focus detection area in the digital camera according to the first embodiment of the present invention
• Fig. 14 is a flowchart for explaining the overall operation of the digital camera according to the embodiment.
• Fig. 15 is a flowchart for explaining details of focus detection processing in S131 of Fig. 14 ;
• Fig. 16 is a flowchart for explaining details of shooting processing in S161 of Fig. 14;
• Figs. 18A and 18B are plan view and sectional view, respectively, for explaining the structure of a focus-detecting pixel (for horizontal phase-difference focus detection) in an image sensor according to the second embodiment of the present invention
• Figs. 19A and 19B are plan view and sectional view, respectively, for explaining the structure of a focus-detecting pixel (for vertical phase-difference focus detection) in the image sensor according to the second embodiment of the present invention
• Fig. 2OA to Fig. 2OC are plan view and graphs, respectively, for explaining the pupil sharpnesses of focus-detecting pixels S HA and S HB and an imaging pixel in the image sensor according to the second embodiment of the present invention.
• Fig. 21A to Fig. 21C are plan view and graphs, respectively, for explaining the pupil sharpnesses of focus-detecting pixels S V c and S VD and an imaging pixel in the image sensor according to the second embodiment of the present invention.
• Fig. 1 is a view showing an example of the arrangement of a digital camera as an example of an imaging apparatus to which a focus detection device according to the first embodiment of the present invention is applicable.
• a first lens group 101 is arranged on the first stage of a photographing optical system (image forming optical system) , and held to be movable along the optical axis.
• a shutter 102 functions as a shutter for controlling the exposure time in still image shooting, and also a stop for adjusting the light quantity in shooting by adjusting the aperture diameter,
• a third lens group 105 is a focus lens, and can move along the optical axis.
• An optical low-pass filter 106 is arranged in front of an image sensor 107, and reduces a false color and moire generated in a shot image.
• the image sensor 107 which forms the focus detection device includes a CMOS image sensor and its peripheral circuit.
• the image sensor 107 is a two-dimensional ICCD color image sensor in which m x n light receiving elements are arranged two-dimensionally in the lateral and longitudinal directions, and an on-chip primary color mosaic filter with the Bayer array is formed on them. The color filter limits the wavelength of transmitted light entering the light receiving element for each pixel.
• a zoom actuator 111 pivots a cam cylinder (not shown) to drive the first lens group 101 and/or third lens group 105 along the optical axis under the control of a zoom driving circuit 129.
• a shutter actuator 112 drives the shutter 102 with a predetermined aperture diameter at a predetermined open/close timing under the control of a shutter driving circuit 128.
• a focus actuator 114 drives the third lens group 105 along the optical axis under the control of a focus driving circuit 126.
• An electronic flash 115 is preferably a flash illumination device using a xenon tube, but may also be an illumination device having a continuous emission LED.
• An AF auxiliary light output unit 116 projects a mask image of a predetermined aperture pattern to the field, and assists focus detection in shooting at a dark place or for a low-contrast object.
• a CPU 121 controls the overall operation of the digital camera, and includes an arithmetic unit, ROM, RAM, A/D converter, D/A converter, communication interface circuit, and the like (none of them is shown) The CPU 121 provides digital camera functions such as AF, AE, image processing, and recording by executing a program stored in the ROM and controlling various circuits .
• An electronic flash control circuit 122 controls the ON operation of the electronic flash 115 in the shooting operation.
• An auxiliary light driving control circuit 123 controls the ON operation of the AF auxiliary light output unit 116 in the focus detection operation.
• An image sensor driving circuit 124 controls the operation of the image sensor 107.
• the image sensor driving circuit 124 A/D- converts an image signal read out from the image sensor 107, and outputs it to the CPU 121.
• An image processing circuit 125 applies image processes such as ⁇ conversion, color interpolation, and JPEG encoding to an image signal.
• the focus driving circuit 126 drives the focus actuator 114 on the basis of the focus detection result, and moves the third lens group 105 along the optical axis to adjust the focus.
• the shutter driving circuit 128 drives the shutter actuator 112 to control the aperture diameter and open/close timing of the shutter 102.
• the zoom driving circuit 129 drives the zoom actuator 111 in accordance with a zoom operation designated by the user by pressing, for example, a zoom operation switch among operation switches 132.
• a display 131 is, for example, an LCD, and displays information on the shooting mode of the digital camera, a preview image before shooting, a confirmation image after shooting, in-focus information upon focus detection, and the like.
• the operation switches 132 include a power switch, release (shooting trigger) switch, zoom operation switch, and shooting mode selection switch.
• a recording medium 133 is, for example, a detachable semiconductor memory card, and records a shot image.
• Fig. 2 is a view for explaining the concept of pupil division when performing focus detection by the phase-difference focus detection method in the digital camera according to the embodiment.
• the pupil is divided in the horizontal direction serving as the first pupil-divided direction and the vertical direction serving as the second pupil-divided direction perpendicular to the first pupil-divided direction.
• Some pixels of the image sensor 107 are given the pupil division function for phase-difference focus detection.
• EP HA and EP HB are pupil areas for phase-difference focus detection in the horizontal direction (X direction) .
• EP V c and EP VD are pupil areas for phase-difference focus detection in the vertical direction (Y direction) .
• Fig. 3 is a view showing an example of the layout of focus-detecting pixels in the image sensor 107 which forms the focus detection device according to the embodiment.
• the image sensor 107 in the first embodiment is formed by two-dimensionally arranging a plurality of pixels.
• a pair of focus-detecting pixels S HA and S HB for horizontally dividing the pupil, and a pair of focus- detecting pixels Svc and S VD for vertically dividing the pupil are arranged in each block.
• the arrangement of focus-detecting pixels is common to respective blocks. Blocks are repetitively arranged with regularity in the pixel area of the image sensor 107.
• AFLN HI to AFLN H3 are focus detection lines for detecting a horizontal phase difference.
• the defocus amount of an image is calculated by computing the phase difference between the first image signal made up of output signals from the focus-detecting pixels S HA on each line, and the second image signal made up of output signals from the focus-detecting pixels S HB on the same line.
• AFLN v i to AFLN V3 are focus detection lines for detecting a vertical phase difference.
• the defocus amount of an image is calculated by computing the phase difference between the third image signal made up of output signals from the focus-detecting pixels S V c on each line, and the fourth image signal made up of output signals from the focus-detecting pixels S VD on the same line.
• Fig. 4 to Fig. 7B are views for explaining an example of the structures of imaging pixels and focus-detecting pixels in the image sensor 107.
• Fig. 4 is an enlarged plan view of one block shown in Fig. 3 when viewed from the photographing optical system.
• photoelectric conversion units 152 represented by black rectangles are arranged on the lowermost layers of pixels, and have almost the square shape in all pixels.
• pixels 150 in which the entire photoelectric conversion units 152 are exposed are imaging pixels.
• Pixels S HA , S HB/ Svc f and S VD in which the photoelectric conversion units 152 are partially exposed are focus-detecting pixels.
• Outputs from the photoelectric conversion units 152 are read out via first and second electrode groups 154 and 155.
• the first and second electrode groups 154 and 155 are electrically connected with each other via through-holes (not shown) provided at areas depicted as overlapped sections in Fig. 4.
• the third electrode group, color filter, microlens, and the like are formed in order from the bottom on the second electrode group 155.
• the first electrode group 154 arranged above (on the light incident side) the photoelectric conversion unit 152 elongates in the Y direction (upward in Fig. 4).
• the first electrode group 154 includes linear electrodes 154a arranged regularly in the X direction (right in Fig. 4), and island-shaped electrodes 154b arranged in respective pixels.
• the island-shaped electrodes 154b each electrically connected, via a through-hole (not shown) , to a charge accumulation unit and a switching device reside in its lower layer (i.e., in the same plane as the photoelectric conversion unit 152) as well as the second electrode group 155 reside in its upper layer.
• the island-shaped electrodes 154b act as interconnecting electrodes. Therefore, in the following description, the linear electrodes 154a are referred to as a "primary electrode group for signal transmission" and the island-shaped electrodes 154b are referred to as an "interconnecting electrode group".
• the second electrode group, 155 arranged above the first electrode group 154 elongates in the X direction.
• the second electrode group 155 includes linear electrode 155a arranged regularly in the Y direction. Signal charges generated in the photoelectric conversion unit 152 are output to a subsequent circuit via a floating diffusion (not shown), the first electrode group 154, and the second electrode group 155.
• the first and second electrode groups 154 and 155 are formed with minimum widths so as not to block a light flux entering the photoelectric conversion unit 152.
• the line width of the electrode is partially extended to form a slit for giving the pupil division function.
• FIGs. 5A and 5B are views for explaining the structure of the imaging pixel in the image sensor 107 according to the first embodiment.
• Fig. 5A is a plan view of four pixels, that is, the focus-detecting pixels S HA and S HB and two imaging pixels 150 in Fig. 4.
• Fig. 5B is a sectional view of one imaging pixel 150 taken along the line A - A in Fig. 5A.
• the structure of the imaging pixel 150 will be explained with reference to Fig. 5B.
• the photoelectric conversion unit 152 is buried in a silicon substrate 151.
• a transparent polysilicon electrode 153 is formed on the upper surfaces of the photoelectric conversion unit 152 and silicon substrate 151.
• the first electrode group 154, the second electrode group 155, and a third electrode group 156 having a multilayered structure are formed above the transparent polysilicon electrode 153.
• the third electrode group 156 is arranged at the boundary between pixels, and has the # shape (not shown in Fig. 5A) .
• the first to third electrode groups 154 to 156 of the three layers each are formed by etching an aluminum or copper metal film.
• the first to third electrode groups 154 to 156 are insulated from each other by a transparent interlayer dielectric film 157 made of SiO 2 or the like.
• a passivation film 158 covers the top of the third electrode group 156.
• Reference numeral 159 denotes a first planarized layer; 160, a color filter which is a green (G) filter in Fig. 5B; 161, a second planarized layer; and 162, an on-chip microlens (to be also simply referred to as a microlens) .
• the first function demanded of the imaging pixel 150 is to efficiently guide, to the photoelectric conversion unit 152, an incident light flux having passed through the photographing optical system.
• the second function demanded of the imaging pixel 150 is to prevent a decrease in light flux transmission efficiency even if the photographing optical system is exchanged or optical characteristics change upon a zoom operation or focus adjusting operation.
• the shape of the microlens 162 is generally set to locate the focus position of the microlens 162 near the upper surface of the photoelectric conversion unit 152.
• the widths of the first and second electrode groups 154 and 155 are minimized to prevent the first and second electrode groups 154 and 155 from blocking a light flux entering the microlens 162.
• Figs. 6A and 6B are views for explaining the structure of a focus-detecting pixel (for horizontal phase-difference focus detection) in the image sensor 107 according to the first embodiment.
• Fig. 6A is a plan view of four pixels identical to those in Fig. 5A.
• Fig. 6B is a sectional view of the focus-detecting pixels S HA and S HB taken along the line A - A in Fig. 6A.
• the structure of the imaging pixel 150 shown in Figs. 5A and 5B and that of the focus- detecting pixels SHA and S HB are different in the shapes of the first and second electrode groups 154 and 155 in the pixel. More specifically, in the focus-detecting pixels S HA and S HB ⁇ the widths of the first and second electrode groups 154 and 155 are controlled to form a slit. In this way, the first embodiment forms a focus- detecting pixel by giving the pupil division function to a pixel using the first and second electrode groups 154 and 155 as light shielding films.
• the microlens 162 is set to locate its focus position near the uppermost surface of the photoelectric conversion unit 152.
• a light shielding member for limiting a light flux in the pupil-divided direction needs to be arranged near the focus position of the microlens 162.
• the CMOS image sensor requires a plurality of electrode layers between the microlens and the photoelectric conversion unit, as described above. If a dedicated light shielding layer is further arranged, this complicates the structure of the image sensor, increases the distance between the microlens and the photoelectric conversion unit, and decreases the light receiving efficiency of the imaging pixel.
• the first embodiment uses electrode groups originally included in the CMOS image sensor as a light shielding film.
• the first embodiment implements a preferable pupil division characteristic while preventing complication of the image sensor structure and suppressing an increase in the distance between the microlens and the photoelectric conversion unit 152.
• Fig. 6A does not illustrate the structure of the third electrode group 156 and its upper layer, similar to Fig. 5A.
• the line widths of the first and second electrode groups 154 and 155 are minimized in the imaging pixel 150.
• the line width of the first electrode group 154 is partially extended toward the center of the photoelectric conversion unit 152.
• the width of the second electrode group 155 is partially extended toward the center of the photoelectric conversion unit 152.
• the electrode groups of the two layers form a pair of slits OPHA and OP H B-
• each slit two sides (longer sides) which limit a light flux in the horizontal direction (X direction) parallel to the pupil-divided direction are defined by the first electrode group 154 positioned near the focus position of the microlens 162.
• Two sides (shorter sides) which limit a light flux in a direction (Y direction) perpendicular to the pupil-divided direction are defined by the second electrode group 155 positioned farther from the focus position of the microlens 162 than the first electrode group 154.
• a light flux in the pupil-divided direction is limited by an electrode group arranged near the focus position of the microlens 162 out of electrode groups having the multilayered structure, thereby increasing the pupil sharpness in the phase-difference focus detection direction.
• Paired slits are decentered by a predetermined amount in opposite directions from the optical axes of corresponding microlenses .
• a pair of pupils is projected on the photographing optical system at a predetermined interval, giving pixels the pupil division function for phase-difference focus detection.
• an electrode group which defines sides for limiting a light flux in a direction parallel to the pupil-divided direction suffices to be one other than an electrode group in a layer farthest from the focus position of the microlens 162 out of the electrode groups having the multilayered structure.
• An electrode group which defines sides for limiting a light flux in a direction perpendicular to the pupil-divided direction suffices to be one of a layer farther from the focus position of the microlens 162 than the electrode group which defines sides for limiting a light flux in the direction parallel to the pupil-divided direction out of the electrode groups having the multilayered structure.
• the first electrode group 154 out of the electrode groups 154 to 156 of three layers is farthest from the microlens 162.
• This structure can provide high pupil sharpness.
• this structure can reduce the angular misalignment of the center axis of the pupil arising from the alignment error between the optical axis of the microlens 162 and the electrode pattern.
• Figs. 7A and 7B are views for explaining the structure of a focus-detecting pixel (for vertical phase-difference focus detection) in the image sensor 107 according to the first embodiment.
• Fig. 7A is an enlarged plan view of four pixels, that is, the focus-detecting pixels S V c and S VD and two imaging pixels 150 in Fig.
• Fig. 7B is a sectional view of the focus-detecting pixels S V c and S VD taken along the line A - A in Fig. 7A.
• the sectional structure shown in Fig. 7B is substantially the same as those shown in Figs. 5B and 6B, and a description thereof will not be repeated.
• the first and second electrode groups 154 and 155 run in the same directions as those in the focus-detecting pixels S HA and S HB for horizontal phase-difference focus detection shown in Figs. 6A and 6B.
• the pupil-divided directions are different by 90°.
• the shapes of electrodes for forming pupil-dividing slits change as follows. [0074] A member which limits a light flux in the pupil-divided direction, that is, Y direction is not the primary electrode group for signal transmission 154a (see Fig.
• the width of the interconnecting electrode group 154b is extended toward the center of the photoelectric conversion unit 152 to cover the upper portion of the photoelectric conversion unit 152.
• a member which limits a light flux in a direction that is, X direction perpendicular to the pupil-divided direction is formed by extending the width of a part of the second electrode group 155 running in the Y direction.
• the shape of this member is different from that of a member which limits a light flux in the Y direction in a focus-detecting pixel for horizontal phase-difference focus detection.
• paired portions 155c extended from one electrode define two sides of a slit in the Y direction.
• the shape of electrodes 155d facing each other via the photoelectric conversion unit 152 remains unchanged.
• the pair of extended portions 155c may also be formed from a pair of electrodes facing each other via the photoelectric conversion unit 152.
• pupil-dividing slits OPvc and OP VD are formed.
• the shapes of the paired slits OPvc and OP VD are substantially the same as those obtained by rotating the slits OP HA and OP HB shown in Fig. 6A by 90° about the Z-axis.
• FIGs. 8A and 8B are views for explaining pupil projection of an imaging pixel.
• Figs. 8A and 8B are a plan view and sectional view, respectively, showing the same imaging pixel as that in Figs. 5A and 5B.
• the sectional view simply illustrates only the main part of the internal structure of the pixel.
• the upper surface of the photoelectric conversion unit 152 is projected onto the pupil plane of the photographing optical system via the microlens 162.
• an imaging pixel is configured to efficiently receive a light flux having passed through the entire exit pupil TL of the photographing optical system.
• a pupil EP NRM on which the photoelectric conversion unit 152 is projected has a shape which almost covers the exit pupil TL of the photographing optical system.
• Figs. 9A and 9B are views for explaining pupil projection of a pixel (focus-detecting pixel) for phase-difference focus detection in the horizontal direction (X direction) in the photographing optical system.
• Figs. 9A and 9B correspond to Figs. 6A and 6B.
• Fig. 9B which is a sectional view taken along the line A - A in Fig. 9A, the slit OPHA of the pixel SHA is projected as a pupil EP H A on the exit pupil TL of the photographing optical system via the microlens 162.
• the slit OP HB of the pixel SH B is projected as a pupil EP HB - That is, the exit pupil TL of the photographing optical system is divided into a pair of focus-detecting pupils EP HA and EPHB-
• the pixel S H A receives a light flux having passed through the divided pupil EP HA
• the pixel S HB receives a light flux having passed through the pupil
• the pixels S HA and S HB are regularly arranged in the horizontal direction.
• the defocus amount of an object image can be detected by detecting the image shift amount, that is, phase difference between the first image signal generated by concatenating outputs from a plurality of pixels S HA and the second image signal generated by concatenating outputs from a plurality of pixels S HB -
• Figs. 1OA and 1OB are views for explaining pupil projection of a pixel for phase-difference focus detection in the vertical direction (Y direction) in the photographing optical system.
• Figs. 1OA and 1OB correspond to Figs. 7A and 7B.
• Fig. 1OB similar to Fig. 9B, the slit OPvc of the pixel S V c is projected as a pupil EP V c on the exit pupil TL of the photographing optical system via the microlens 162.
• the slit OP VD of the pixel SV D is projected as a pupil EP V D- That is, the exit pupil TL of the photographing optical system is divided into a pair of focus-detecting pupils EP V c and EP VD -
• the pixel S V c receives a light flux having passed through the divided pupil EP V c/ and the pixel S V D receives a light flux having passed through the divided pupil EPVD-
• the pixels S V c and S VD are regularly arranged in the vertical direction.
• the defocus amount of an object image can be detected by detecting the image shift amount, that is, phase difference between the third image signal generated by concatenating outputs from a plurality of pixels S V c and the fourth image signal generated by concatenating outputs from a plurality of pixels S VD -
• Fig. HA to Fig. HC and Fig. 12A to Fig. 12C are views for explaining the sharpness of a pixel pupil projected on the exit pupil TL.
• Fig. HA to Fig. HC are views for explaining the pupil sharpnesses of the focus-detecting pixels S HA and S HB and imaging pixel.
• Fig. HA is a plan view of the exit pupil plane of the photographing optical system when viewed from the image sensor.
• TL represents the exit pupil of the photographing optical system.
• EP NRM represents a pupil shape corresponding to an imaging pixel.
• EP HA and EP HB represent pupil shapes corresponding to the focus-detecting pixels S HA and S HB - [0086] The sharpness of a projected pupil decreases owing to diffraction of light within a pixel or aberration of the microlens.
• a pupil image shown in Fig. HA is not an ideal sharp image but has a predetermined blur.
• Fig. HB is a graph for explaining the sharpness of each pupil on a section in the horizontal direction (x-axis direction) passing through the optical axis in the plan view shown in Fig. HA.
• the abscissa axis represents a horizontal coordinate on the pupil plane of the photographing optical system, and the ordinate axis represents the transmittance of a light flux in each pupil.
• Fig. HB shows the angular dependence of the light receiving efficiency of light in each pixel. For descriptive convenience, this graph will be referred to as a "pupil intensity distribution" In Fig.
• HB, INT NRM - H , INT HA -H, and INT HB -H represent the pupil intensity distributions of the imaging pixel and focus-detecting pixels S m and S HB on the horizontal section.
• the width at a 1/2 intensity of the maximum value is defined as a width W of the pupil intensity distribution.
• a slope angle ⁇ similarly at the 1/2 intensity is defined as the sharpness of the pupil intensity distribution.
• the width W and sharpness ⁇ are discriminated by the suffix, as shown in Fig. HB. [0088] Similar to Fig. HB, Fig.
• HC is a graph for explaining the sharpness of each pupil on a section in the vertical direction (y-axis direction) passing through the optical axis in the plan view shown in Fig. HA.
• INT NRM -v, INT HA -V, and INT H B-V represent the pupil intensity distributions of the imaging pixel and focus- detecting pixels S HA and S HB on the vertical section.
• the width W and sharpness ⁇ of the pupil intensity distribution in each pixel are discriminated by the suffix, as shown in Fig. HC.
• the widths WH A - H and W H B-H of the horizontal pupil intensity distribution are small, and the sharpnesses ⁇ HA- H an d ⁇ H B- H are high.
• the widths W H A-V and W H B-V of the vertical pupil intensity distribution are large, and the sharpnesses ⁇ H A-V and ⁇ H B-V are low.
• Fig. 12A to Fig. 12C are views for explaining the pupil sharpnesses of the focus-detecting pixels Svc and S VD and imaging pixel.
• the pupil-divided direction is different by 90° from that in Fig. HA to Fig. HC, so the characteristics in Figs.
• Fig. 13 is a schematic view for explaining an example of an image acquired upon focus detection and a focus detection area in the digital camera according to the first embodiment.
• an object image formed on the imaging surface of the image sensor 107 includes a person at the center, a tree in the foreground on the left side, and mountains in the background on the right side.
• the image sensor 107 in the first embodiment has pairs of first focus-detecting pixels SHA and S H B for detecting a horizontal phase difference, and pairs of second focus-detecting pixels S V c and S VD for detecting a vertical phase difference. As shown in Fig. 3, the pairs of first focus-detecting pixels and the pairs of second focus-detecting pixels are arranged distributedly at equal densities in the entire image sensor 107.
• Focus detection areas for detecting horizontal and vertical phase differences can be set at arbitrary positions in the imaging area.
• the person's face exists at the center of the frame.
• the image processing circuit 125 detects the presence of a face by applying a known face recognition technique to a shot image, a focus detection area centered on the face area can be set.
• a focus detection area centered on the face area can be set.
• a focus detection area AFAR h (xl,yl) for horizontal phase- difference focus detection and a focus detection area AFAR v (x3,y3) for vertical phase-difference focus detection can be set using the face area as a center.
• the suffix "h" represents the horizontal direction, and (xl,yl) and (x3,y3) indicate the coordinate values of the upper left corners of the focus detection areas.
• AFSIG h (Al) represents a phase-difference focus detection
• AFSIG h (Bl) represents a phase-difference focus detection B image signal obtained by concatenating, in the horizontal direction, image signals obtained by focus-detecting pixels S HB included in the focus detection area AFAR h (xl, yl) .
• the phase difference between the A image signal AFSIG h (Al) and B image signal AFSIG h (Bl) is calculated by a known correlation calculation, obtaining a horizontal defocus amount.
• a C image signal AFSIG V (C3) and D image signal AFSIG V (D3) are obtained from focus-detecting pixels Svc and SV D * and a vertical defocus amount is obtained.
• the two defocus amounts detected in the two focus detection areas AFARh (xl,yl) and AFAR v (x3,y3) are compared to adopt a value of higher reliability.
• the trunk of the tree on the left side of the frame mainly has a vertical line component, that is, a luminance distribution in the horizontal direction.
• a focus detection area AFAR h (x2,y2) for horizontal phase-difference focus detection is set.
• the ridgeline of the mountains on the right side of the frame mainly has a horizontal line component, that is, a luminance distribution in the vertical direction.
• a focus detection area AFAR v (x4,y4) for vertical phase-difference focus detection is set.
• focus detection areas for horizontal phase- difference focus detection and vertical phase- difference focus detection can be set in arbitrary areas of the frame (image sensor) .
• Appropriate focus detection can be executed regardless of the position of an object in the frame or the directional property of the luminance distribution.
• Fig. 14 to Fig. 16 are flowcharts for explaining the focus adjustment and shooting operations of the digital camera according to the embodiment.
• Fig. 14 is a flowchart for explaining the overall operation of the digital camera according to the embodiment .
• the CPU 121 checks the operations of the actuators and image sensor in the camera in S103.
• the CPU 121 initializes the memory contents and executing programs, and executes a shooting preparation operation.
• the CPU 121 starts the imaging operation of the image sensor 107 via the image sensor driving circuit 124.
• the image processing circuit 125 processes a shot image, generating a display image (lower in resolution than a recording image) . Further, the image processing circuit 125 detects a person's face from the display image.
• the CPU 121 sequentially outputs display images generated by the image processing circuit 125 to the display 131 to cause the display 131 to function as the EVF. While viewing images displayed on the display 131, the user determines the shooting composition.
• the CPU 121 determines a focus detection area in S117. In S121, the CPU 121 determines whether the user has turned on the shooting preparation switch. If the user has not turned on the shooting preparation switch, the process returns to S105, and the CPU 121 repetitively executes the process from driving of the image sensor to determination of the focus detection area in S117.
• the CPU 121 detects the state of the shooting preparation switch among the operation switches 132, and if the user has turned on the shooting preparation switch, the process shifts to S131. If the user has not turned on the shooting preparation switch, the process shifts to S105.
• the shooting preparation switch may be a switch which is turned on by pressing, for example, the release button halfway.
• Fig. 15 is a flowchart for explaining details of focus detection processing in S131.
• the CPU 121 reads out signals from imaging pixels and focus-detecting pixels included in the focus detection area determined in S117. In S133, the CPU 121 recognizes the directional dependence
• the CPU 121 selects a phase- difference focus detection direction suited to focus detection from the object pattern recognized in S133. More specifically, when the luminance of the object image changes in only the horizontal direction, focus detection- is done using only focus-detecting pixels for detecting a horizontal phase difference. Similarly, when the luminance of the object image changes in only the vertical direction, focus detection is done using only focus-detecting pixels for detecting a vertical phase difference. When the luminance of the object image changes in both the horizontal and vertical directions, focus detection (cross distance measurement) is performed using focus-detecting pixels for detecting a horizontal phase difference and those for detecting a vertical phase difference.
• the CPU 121 concatenates outputs from focus-detecting pixels in the focus detection area in accordance with pixel positions, obtaining an AF pixel signal.
• the CPU 121 executes, for the AF pixel signal obtained in S141, shading correction (light fall-off correction at the periphery of the frame) , correction of distortion of two images caused by vignetting, and the like, generating a pair of image signals for correlation computation.
• the CPU 121 generates a pair of image signals such as a pair of A image signal AFSIG h (Al) and B image signal AFSIG h (Bl), or a pair of C image signal AFSIG V (C3) and D image signal AFSIG V (D3) shown in Fig. 13.
• the CPU 121 computes the correlation between the pair of phase-difference focus detection image signals, calculating the phase difference between the image signals.
• the CPU 121 determines the reliability of the computed correlation.
• the reliability means the coincidence (wavelength similarity) between a pair of image signals, and when the coincidence is high, the reliability of the focus detection result is generally high.
• a phase difference based on a pair of higher-reliability image signals is preferentially used.
• the CPU 121 computes a final defocus amount on the basis of the phase difference obtained from the pair of high-reliability image signals. Then, the focus detection processing ends. [0119] Referring back to Fig. 14, in S151, the CPU 121 determines whether the defocus amount calculated in the focus detection processing is equal to or smaller than an allowance (whether the object is in focus) . If the defocus amount exceeds the allowance, the CPU 121 determines that the object is out of focus. In S153, the CPU 121 drives the focus lens (third lens group) 105 in a predetermined direction by a predetermined amount via the focus driving circuit 126.
• the CPU 121 repetitively executes the processes of S131 to S153 until it determines in S151 that the object is in focus [0120] If the CPU 121 determines in S151 that the object is in focus, it displays an in-focus image on the display 131 in S155, and shifts to S157. [0121] In S157, the CPU 121 determines whether the user has turned on the shooting start switch. If the user has not turned on the shooting start switch, the CPU 121 maintains the shooting standby state in S157. If the CPU 121 determines in S157 that the user has turned on the shooting start switch, the process shifts to S161 to execute shooting processing.
• the shooting start switch may be a switch which is turned on by pressing, for example, the release button fully. [0122] Fig.
• FIG. 16 is a flowchart for explaining details of the shooting processing in S161.
• the CPU 121 controls the aperture diameter and open/close timing of the shutter 102 via the shutter driving circuit 128, and performs exposure processing.
• auto exposure control processing is also executed parallel to the focus detection processing to determine an aperture value and shutter speed.
• the CPU 121 reads out an image for generating a recording image, that is, reads out signals from all pixels via the image sensor driving circuit 124.
• the CPU 121 interpolates omitted pixels in the readout image signal using the image processing circuit 125.
• the omitted pixels include a defective pixel generated in manufacturing the image sensor 107, and a focus-detecting pixel.
• the focus-detecting pixel does not have an RGB color filter, and can receive light from only part of the exit pupil.
• an image signal is generated by interpolation using information of peripheral imaging pixels, similar to a general defective pixel.
• the CPU 121 causes the image processing circuit 125 to perform so-called developing processes such as color interpolation, image ⁇ correction, and edge emphasis, and image processes such as encoding in accordance with settings.
• the CPU 121 records a shot image on the recording medium 133.
• electrode groups originally included in the image sensor are used as a member (light shielding film) that limits a light flux in the pupil-divided direction. No dedicated light shielding film need be arranged, and the degree at which the structure of the image sensor is complicated can be suppressed. [0130] Since electrode groups are positioned near the focus of the microlens, the pupil intensity distribution in the pupil-divided direction becomes sharp. As a result, the pupil division performance is improved, and degradation of the phase-difference focus detection image signal is suppressed, obtaining high focus detection precision.
• Positioning electrode groups near the focus of the microlens increases the distance between the microlens and the member which limits a light flux in the pupil-divided direction. This can reduce a positional error of the pupil intensity distribution arising from the alignment error between the microlens and the member which limits a light flux. Hence, even if focus-detecting pupils are eclipsed by the photographing lens, the eclipse amount becomes almost equal between the pair of pupils, and the light quantity is hardly unbalanced. A decrease in focus detection precision can be suppressed. [0132] [Second Embodiment]
• a member which limits a light flux in the pupil-divided direction in a focus- detecting pixel is formed using the first electrode group 154 closer to the focus position of the microlens 162 out of the first and second electrode groups 154 and 155 having different distances from the focus position of the microlens 162.
• a member which limits a light flux in a direction perpendicular to the pupil- divided direction in a focus-detecting pixel is formed using the second electrode group 155 farther from the focus position of the microlens 162 than the first electrode group 154.
• members which limit light fluxes in the pupil-divided direction and a direction perpendicular to it are formed by the first electrode group 154 without using the second electrode group 155.
• Photoelectric conversion units 152 represented by black rectangles are arranged on the lowermost layers of pixels, and have almost the square shape in all pixels. As will be described later, pixels 150 in which the entire photoelectric conversion units 152 are exposed are imaging pixels. Pixels S HA/ S HB ⁇ S VC/ and S VD in which the photoelectric conversion units 152 are partially exposed are focus-detecting pixels. Outputs from the photoelectric conversion units 152 are read out via first and second electrode groups 254 and 255.
• the image sensor according to the first embodiment and that according to the second embodiment are different in only the shapes of the first and second electrode groups. The shapes of the remaining members are the same, and only the difference will be explained.
• the first electrode group 254 arranged above (on the light incident side) the photoelectric conversion unit 152 elongates in the Y direction (upward in Fig. 17).
• the first electrode group 254 includes linear-shaped, a primary electrode group for signal transmission 254a arranged regularly in the X direction (right in Fig. 17), and island-shaped, interconnecting electrodes group 254b arranged in respective pixels.
• the second electrode group 255 arranged above the first electrode group 254 elongates in the X direction.
• the second electrode group 255 includes linear electrode 255a arranged regularly in the Y direction. Signal charges generated in the photoelectric conversion unit 152 are output to a subsequent circuit via a floating diffusion (not shown) , the first electrode group 254, and the second electrode group 255.
• Figs. 18A and 18B are views for explaining the structure of a focus-detecting pixel (for horizontal phase-difference focus detection) in an image sensor 107 according to the second embodiment. Figs. 18A and 18B correspond to Figs. 6A and 6B in the first embodiment.
• Fig. 18A is an enlarged plan view of four pixels, that is, the focus-detecting pixels S HA and S HB and two imaging pixels 150 in Fig. 17.
• Fig. 18B is a sectional view of the focus-detecting pixels S HA and S HB taken along the line A - A in Fig. 18A.
• the focus- detecting pixels S H A and S HB have pupil-dividing slits OP HA and OP HB -
• the first electrode group 254 defines all the sides of each slit.
• the first electrode group 254 runs in the Y direction.
• the photoelectric conversion unit 152 of the focus- detecting pixel includes an area (exposed portion) not shielded from light by the first electrode group 254.
• the second embodiment widens part of the second electrode group 255 to form projecting portions 255 H and 255 S extended to shield the exposed portion from light. This structure can effectively decrease unwanted light entering the focus-detecting pixel from a portion other than the slit.
• the slit of the focus-detecting pixel is formed using only the first electrode group arranged near the focus position of the microlens out of the electrode groups of the image sensor.
• Figs. 19A and 19B are views for explaining the structure of a focus-detecting pixel (for vertical phase-difference focus detection) in the image sensor 107 according to the second embodiment.
• Figs. 19A and 19B correspond to Figs. 7A and 7B in the first embodiment.
• Fig. 19A is an enlarged plan view of four pixels, that is, the focus-detecting pixels S V c and S VD and two imaging pixels 150 in Fig. 17.
• Fig. 19B is a sectional view of the focus-detecting pixels S V c and S VD taken along the line A - A in Fig. 19A.
• the structure of a pupil-dividing slit in a focus-detecting pixel for vertical phase-difference focus detection will be executed with reference to Fig. 19A.
• the first and second electrode groups 254 and 255 run in the same directions as those in the focus-detecting pixels S HA and S HB for horizontal phase-difference focus detection shown in Figs. 18A and 18B.
• the pupil-divided directions are different by 90°.
• the shapes of electrodes for forming pupil-dividing slits change as follows. [0143] In the focus-detecting pixel for horizontal phase-difference focus detection shown in Fig. 18A, the width of linear-shaped, the primary electrode group for signal transmission 254a running in the Y direction in the first electrode group 254 is extended to cover the photoelectric conversion unit 152. A slit is formed in the extended portion.
• the photoelectric conversion unit 152 is covered by a portion of island-shaped, the interconnecting electrode group 254b in the first electrode group 254 that is extended in the Y direction, and a slit OP VD or OP V c is formed in the extended portion, as shown in Fig. 19A.
• projecting portions 255 V and 255 S of the second electrode group 255 are formed to cover exposed portions present between linear-shaped, the primary electrode group for signal transmission 254a running in the Y direction and island-shaped, the interconnecting electrodes group 254b in the first electrode group 254.
• the projecting portions 255 V and 255 S reduce the exposed portion which allows a light flux to enter the photoelectric conversion unit 152. This structure effectively prevents unwanted light undesirable to pupil division from reaching the photoelectric conversion unit 152 via the exposed portion.
• Fig. 2OA to Fig. 2OC and Fig. 21A to Fig. 21C are views for explaining the pupil sharpness of each pixel in the second embodiment.
• Fig. 2OA to Fig. 2OC and Fig. 21A to Fig. 21C correspond to Fig. HA to Fig. HC and Fig. 12A to Fig. 12C in the first embodiment.
• Fig. 2OA to Fig. 2OC are views for explaining the pupil sharpnesses of the focus-detecting pixels S HA and S HB and imaging pixel shown in Figs. 18A and 18B.
• both slits which limit light fluxes in the pupil-divided direction and a direction perpendicular to it are formed by the first electrode group. That is, the slits are formed by electrodes equidistant from the focus position of a microlens 162.
• the sharpnesses H HA - H and H HB - H of pupil intensity distributions on the horizontal section in Fig. 2OB equal the sharpnesses H HA -v and H HB -v of pupil intensity distributions on the vertical section in Fig. 2OC.
• the width W of the pupil intensity distribution is small in the horizontal direction which is the pupil-divided direction (Fig. 20A), and large in the vertical direction (Fig. 20B) , similar to the first embodiment.
• the second embodiment also implements definite pupil division and reduces a decrease in light receiving amount.
• Pupil intensity distributions INT HA - X and INT HB - X represented by broken lines in Fig. 2OB are second peaks which appear owing to leakage light reaching the photoelectric conversion unit 152 via the exposed portion in a case wherein neither the projecting portion 255 H nor 255 S of the second electrode group 255 in Fig. 18A is formed.
• the second peak generated by leakage light degrades the pupil division performance when a photographing optical system using a small F-number, that is, a bright photographing optical system is used.
• the correlation between the defocus amount and the phase difference between a pair of image signals for phase- difference focus detection becomes irregular, making accurate focus detection difficult.
• the second embodiment as shown in Fig.
• Fig. 2IA to Fig. 21C are views for explaining the pupil sharpnesses of the focus-detecting pixels Svc and S VD and imaging pixel.
• the pupil-divided direction is different by 90° from that in Fig. 2OA to Fig. 2OC, so the characteristics in Figs. 21B and 21C are reversed from those in Figs. 20B and 2OC.
• a comparison between characteristics in the pupil-divided direction reveals that these characteristics are almost the same.
• characteristics in a direction perpendicular to the pupil-divided direction are almost the same.
• a selected focus detection area and phase- difference focus detection image in the second embodiment are the same as those shown in Fig. 13. Operations regarding focus detection and shooting are the same as those described with reference to Fig. 14 to Fig. 16, and a description thereof will not be repeated.
• a pupil-dividing opening is formed by an electrode group arranged near the focus position of the microlens.
• the pupil intensity distributions in the pupil-divided direction and a direction perpendicular to it become sharp.
• An electrode group different from one which forms a pupil-dividing opening prevents light entering the exposed portion from reaching the photoelectric conversion unit, thereby further improving the pupil division characteristic. As a result, degradation of a phase-difference focus detection image signal can be suppressed to increase the focus detection precision.
• the distance between the microlens and all members which form openings for limiting a light flux in the pupil-divided direction is large. This can further reduce a positional error of the pupil intensity distribution arising from the alignment error between the microlens and the member which limits a light flux. Even if focus-detecting pupils are eclipsed by the photographing lens, the eclipse amount becomes almost equal between the pair of pupils, and the light quantity is hardly unbalanced.
• the focus detection device according to the present invention is applied to a digital still camera.
• the present invention is widely available for image sensors, represented by a CMOS image sensor, in which a layer of a substance capable of light shielding is formed between a photoelectric conversion unit and a microlens.
• the present invention is applicable to an arbitrary apparatus capable of using such an image sensor.
• the present invention can be applied to an arbitrary apparatus having the function of the digital camera, such as a camcorder (movie camera) for recording a moving image, various inspection cameras, a monitoring camera, an endoscope camera, or a robot camera.
• An arrangement other than an image sensor having focus-detecting pixels is not indispensable for the present invention.
• Known arbitrary arrangements are available as an arrangement for generating a pair of image signals for phase-difference focus detection from outputs from focus-detecting pixels, and an arrangement for obtaining a defocus amount from a pair of image signals for phase-difference focus detection.

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