WO2009113160A1 - Transporteur de substrat et procédé de transport de substrat - Google Patents

Transporteur de substrat et procédé de transport de substrat Download PDF

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Publication number
WO2009113160A1
WO2009113160A1 PCT/JP2008/054417 JP2008054417W WO2009113160A1 WO 2009113160 A1 WO2009113160 A1 WO 2009113160A1 JP 2008054417 W JP2008054417 W JP 2008054417W WO 2009113160 A1 WO2009113160 A1 WO 2009113160A1
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WO
WIPO (PCT)
Prior art keywords
substrate
transport
path
transfer
width
Prior art date
Application number
PCT/JP2008/054417
Other languages
English (en)
Japanese (ja)
Inventor
健彦 堀
Original Assignee
平田機工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 平田機工株式会社 filed Critical 平田機工株式会社
Priority to PCT/JP2008/054417 priority Critical patent/WO2009113160A1/fr
Publication of WO2009113160A1 publication Critical patent/WO2009113160A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/88—Separating or stopping elements, e.g. fingers
    • B65G47/8807—Separating or stopping elements, e.g. fingers with one stop
    • B65G47/8815—Reciprocating stop, moving up or down in the path of the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position

Definitions

  • the present invention relates to a substrate transport apparatus that transports a substrate on a production line such as a liquid crystal panel, and more particularly to a substrate transport apparatus that includes a positioning device that regulates a substrate on the substrate transport apparatus to a normal position and posture.
  • the substrate is automatically transferred between processes.
  • a substrate transfer device is used.
  • a roller conveyor is used in the substrate transfer device, but since the substrate is simply placed on the roller conveyor and the position and posture are not restricted, the position and posture are shifted during the transfer.
  • the transport destination process apparatus
  • Patent Document 1 includes an air jetting unit that floats a substrate on a stage, a positioning unit that contacts and positions a floating substrate from the side, and a holding unit that holds the substrate on the stage.
  • a substrate positioning and holding device is disclosed.
  • Patent Document 2 includes a sensor that detects a positional deviation of a substrate, and an X-axis drive unit that moves the substrate in a direction orthogonal to the conveyance direction based on the deviation amount detected by the sensor, a conveyance direction Discloses a substrate positioning device that drives a Y-axis drive unit that moves in a direction parallel to the substrate and a ⁇ -axis drive unit that rotates the substrate about an axis orthogonal to the conveyance surface, thereby correcting the positional deviation of the substrate. Has been.
  • the substrate positioning and holding device described in Document 1 does not require a sensor or an arithmetic unit and can perform accurate positioning only with a mechanical device, but means for transferring a substrate on a transfer device to the substrate positioning and holding device. And means for transferring the substrate from the substrate positioning and holding device to the next process (apparatus), it is necessary to separately provide a transfer device. Moreover, there is also a problem that the tact time becomes long.
  • the positioning device described in Document 2 requires a sensor, an arithmetic device, and a three-axis drive device, which causes a problem that the device is complicated and expensive.
  • the tact time tends to be long because three steps of sensing, calculation and movement are performed.
  • the apparatuses described in Document 1 and Document 2 have a problem that a plurality of types of substrates having different sizes cannot be handled simultaneously.
  • the present invention has been made in order to solve such a problem. For a plurality of types of substrates of different sizes or a plurality of substrates arranged and transported in parallel (from the previous step). It is an object of the present invention to provide a substrate transfer device that can continuously carry in, position, and carry out (to the next process) on a continuous roller conveyor.
  • a substrate transport apparatus is disposed below a transport conveyor for transporting a substrate placed on a transport surface of a transport path along the transport path.
  • An elevating device that relatively separates the substrate placed on the conveyance surface from the conveyance surface, and moves the substrate separated from the conveyance surface in the width direction of the conveyance path, and positions the substrate at a predetermined position.
  • a width adjusting device and a guide means that is arranged in the center in the width direction of the transport path, partitions the transport path in the width direction, and guides the substrate in a direction parallel to the transport path from the transport surface. It is provided with a conveyance path partitioning device that appears and disappears.
  • the guide means may be a guide roller.
  • the transport path partition device may arrange a plurality of the guide rollers in the longitudinal direction of the transport path.
  • the width adjusting device has a pair of width adjusting pieces that respectively move between each side end of the conveying path and the center of the conveying path, and a drive mechanism that drives the pair of width adjusting pieces to be close to and away from each other. It may be.
  • the drive mechanism is a rotating machine, is disposed at one side end of the transport path, is driven to rotate by the rotating machine, and a driven pulley is disposed at the other side end of the transport path.
  • a belt that spans between the driving pulley and the driven pulley may be provided.
  • One of the pair of width adjusting pieces may be connected to the forward path of the belt, and the other of the pair of width adjusting pieces may be connected to the return path of the belt.
  • the transport conveyor may be configured by arranging a plurality of roller units in the width direction and the longitudinal direction of the transport path.
  • a stopper device may be provided that is disposed in the transport path and allows a stopper piece that stops the movement of the substrate on the transport surface to freely protrude above and below the transport surface.
  • a plurality of the stopper devices may be arranged in the width direction of the conveyance path.
  • a plurality of stopper device groups including a plurality of the stopper devices arranged in the width direction of the conveyance path may be arranged in the longitudinal direction of the conveyance path.
  • the transport conveyor is configured by arranging a plurality of roller units in the width direction and the longitudinal direction of the transport path, and is disposed in the transport path to stop the movement of the substrate on the transport surface. It is also possible to provide a stopper device that freely moves up and down above the conveying surface, and a control unit that individually controls the plurality of roller units and the plurality of stopper devices.
  • the traverse means for moving the transport conveyor in a direction orthogonal to the transport direction may be provided.
  • a substrate transfer device connected to one end of the transfer conveyor in the transfer direction, and a substrate storage device connected to the other end of the transfer conveyor in the transfer direction so that the substrate is carried out and loaded in may be provided.
  • the substrate transport method of the present invention is a substrate transport method for transporting a substrate placed on a transport surface of a transport path along the transport path, the step of partitioning the transport path left and right, and on the transport surface A step of stopping the movement of the substrate, a step of separating the substrate from which the movement of the substrate on the transfer surface is stopped from the transfer surface, and a width of the substrate separated from the transfer surface to the center of the transfer path And a step of placing the substrate, which has been brought closer to the center of the transport path, on the transport surface again.
  • the substrate is positioned on the transport path of the substrate transport device, it is not necessary to transfer the substrate between the positioning device and the substrate transport device. Therefore, the tact time required for transporting and positioning the substrate can be shortened.
  • FIG. 1 is a plan view of a substrate transfer line 2 including a substrate transfer apparatus 1 according to the present invention.
  • the substrate transport line 2 transports a glass substrate (not shown) flowing from the left-hand direction in the figure by the substrate transport device 1 and regulates the posture of the substrate, and then on the cassette transport device 3 on the right hand side of the substrate transport device 1.
  • the transfer line is stored in a cassette (not shown) and is transferred in the right-hand direction in the drawing by a cassette transfer device (not shown).
  • FIG. 2A and 2B are external views of the substrate transfer apparatus 1.
  • FIG. 2A is a plan view
  • FIG. 2B is a front view seen from the XX direction of FIG. 2A. These are the front views seen from the YY direction of Fig.2 (a).
  • FIG. 2D is a side view.
  • the substrate transport apparatus 1 has two types of large and small roller units 4 and 5 arranged in the front-rear and left-right directions. Paying attention to the arrangement of the roller units 4 and 5 in the width direction, the two roller units 4 are respectively arranged on the left and right outer sides of the transport path, and the two roller units 5 are on the inner side of the transport path, that is, the left and right roller units. It can be seen that they are arranged between 4. Further, a total of four sets of four roller units 4 and 5 are arranged in the front-rear direction.
  • the uppermost surfaces of the roller units 4, 5, that is, the surface that is in contact with the lower surface of the glass substrate to be transported will be referred to as the transport surface of the substrate transport apparatus 1 (see FIG. 2B).
  • FIG. 3 is a perspective view showing the configuration of the roller units 4 and 5. As apparent from FIG. 3, the roller unit 4 has a width approximately twice that of the roller unit 5, but the basic configuration is common.
  • the drive box 42 and the bearing base 43 are fixed to the left and right sides of the base plate 41 with a space therebetween, and four sets of shafts 45 on which the four rollers 44 are mounted are connected to the drive box 42 and the bearing base 43. Both are supported in a pivotable manner. Further, the drive box 42 incorporates a drive device (not shown) that drives the shaft 45 to rotate.
  • the drive box 52 and the bearing base 53 are fixed to the left and right of the base plate 51 with an interval therebetween, and the four sets of shafts 55 on which the two rollers 54 are mounted are connected to the drive box 52 and the bearing base. 53 and both are supported in rotation.
  • the drive box 52 includes a drive device (not shown) that drives the shaft 55 to rotate.
  • roller units 4 and 5 are provided with independent driving devices, the start / stop of the roller units 4 and 5 and the speed adjustment can be performed for each roller unit 4 and 5.
  • a plurality of stopper devices 6 (6a to 6d) are arranged in the substrate transfer device 1.
  • the stopper device 6 is a device for preventing the movement of the glass substrate in the carrying direction by causing the stopper piece to protrude from the carrying surface and abutting the stopper piece on the edge of the glass substrate to be carried by the substrate carrying device 1. It is.
  • the stopper devices 6 arranged in the length direction are distinguished from each other by adding subscripts such as 6a, 6b, 6c, 6d from the right side to the left side of the drawing.
  • subscripts such as 6a, 6b, 6c, 6d from the right side to the left side of the drawing.
  • all the four stopper devices 6a or stopper devices 6b arranged in the width direction of the substrate transfer device 1 are indicated.
  • the four stopper devices 6 with the same subscripts may be referred to as stopper device groups 6a to 6d.
  • the stopper device 6 is appropriately selected according to the size of the glass substrate to be transported by the substrate transport device 1. That is, the stopper device groups 6a to 6d are selected according to the size of the glass substrate in the transport direction. The four stopper devices 6 belonging to the selected stopper device groups 6a to 6d are appropriately selected and operated in accordance with the width direction size of the glass substrate. Of course, when all the stopper device groups 6a to 6d are selected, all four stopper devices 6 belonging to the same stopper device group 6a to 6d may be selected.
  • FIG. 4A and 4B are external views of the stopper device 6, wherein FIG. 4A is a plan view and FIG. 4B is a front view.
  • the stopper device 6 includes a contact member 61 that contacts the edge of the glass substrate, and a drive unit 62 that raises and lowers the contact member 61.
  • the contact member 61 and the drive unit 62 are brackets. 611 through 611.
  • the shape of the contact member 61 is not limited to the truncated cone shape.
  • the shape of the portion in contact with the glass substrate in plan view is curved rather than linear, so that the shape of the contact member 61 in plan view is preferably an ellipse or a circle.
  • the planar view shape of the portion in contact with the glass substrate may be an arc shape, and the other portion may be configured with a straight line.
  • the contact member 61 is preferably made of a soft material having a lower hardness than the glass substrate, such as rubber.
  • the drive unit 62 is an air cylinder having a cylinder 621 and a rod 622.
  • a bracket 611 is connected to the tip of the rod 622, and the contact member 61 moves up and down as the rod 622 advances and retreats.
  • the air supply parts 621a and 621b are provided on one side of the cylinder 621.
  • An air supply source for example, a compressor
  • a control valve not shown.
  • a sensor 623 for detecting the position of the rod 622 is provided on the other side of the cylinder 621. For this reason, with reference to the detection result of the sensor 623, it can be determined whether or not the movement of the contact member 61, that is, the advance and retreat of the rod 622 is completed.
  • a bracket 624 is fixed to the bottom of the cylinder 621, and the bracket 624 is fixed to the base plates 41 and 51 of the roller units 4 and 5.
  • the bracket 624 is provided with a mounting hole 625 for passing a fixing screw.
  • FIG. 5A shows a state where the contact member 61 is in the contact position
  • FIG. 5B shows a state where the contact member 61 is in the standby position.
  • the stopper device 6 is fixed to the base plates 41 and 51 so that the locus D1 of the rod 622 is inclined by ⁇ from the vertical axis Z to the opposite side of the conveying direction of the glass substrate 14.
  • the magnitude of ⁇ is selected so that the contact member 61 does not slide on the edge of the glass substrate 14 while the contact member 61 moves from the contact position to the standby position.
  • the value of ⁇ is set so that the portion of the contact member 61 that contacts the glass substrate 14 is substantially vertical (the value of ⁇ is not particularly limited, but, for example, 4 ⁇ 8 °, preferably around 6 °).
  • the contact member 61 When the rod 622 moves along the locus D1 from the contact position toward the standby position, the contact member 61 also moves along a locus parallel to the locus D1. Therefore, when the contact member 61 moves from the contact position to the standby position, the contact member 61 descends while leaving the edge of the glass substrate 14 in the horizontal direction. Therefore, the contact member 61 does not rub the edge of the glass substrate 14 while the contact member 61 moves between the contact position and the standby position.
  • moving the rod 622 from the standby position to the contact position and causing the contact member 61 to protrude from the transfer surface of the substrate transfer apparatus 1 is referred to as “operating the stopper device 6”.
  • the movement of the rod 622 from the contact position to the standby position and lowering the contact member 61 below the transfer surface of the substrate transfer apparatus 1 is referred to as “releasing the stopper device 6”.
  • ⁇ Width alignment device> Returning to FIG. 2, the description of the configuration of the substrate transfer apparatus 1 is continued. As shown in FIG. 2, a width adjusting device 7 is disposed in the transport path of the substrate transport device 1.
  • the width aligning device 7 moves the width aligning pieces 7d and 7e in the width direction of the substrate transport device 1 by using four sets of belt and pulley mechanisms including a driving pulley 7a, a driven pulley 7b, and a belt 7c, thereby aligning the glass substrate. Device.
  • the movement distance (width adjustment amount) of the width adjustment pieces 7d and 7e is determined in advance according to the size of the glass substrate.
  • the four belt / pulley mechanisms are arranged between the roller units 4 and 5 arranged in the conveyance path.
  • the four drive pulleys 7a are at one end of the conveyance path and are rotationally driven by a motor 7g via a common drive shaft 7f.
  • the four driven pulleys 7b are attached at positions facing the four driving pulleys 7a on the opposite end across the transport path.
  • FIG. 6 is a diagram showing a detailed configuration of the width adjusting device 7, and shows only one set of belt / pulley mechanisms provided in total of four sets.
  • 6A is a front view
  • FIG. 6B is a right side view
  • FIG. 6C is a left side view.
  • the width adjusting piece 7d has a cylindrical shape, is disposed at one end of the conveyance path, and is fixed to the upper surface of the slide member 7h. The upper end portion of the width adjusting piece 7d protrudes above the conveying surface.
  • the slide member 7h is supported by the rail 7i, and is slidable along the longitudinal direction of the rail 7i.
  • the rail 7i is arrange
  • the width adjusting piece 7e has a cylindrical shape, is disposed at the other end of the conveyance path, and is fixed to the upper surface of the slide member 7l.
  • the upper end portion of the width aligning piece 7e protrudes above the transport surface.
  • the slide member 7l is supported by the rail 7m, and is slidable along the longitudinal direction of the rail 7m.
  • the rail 7m is arranged in parallel with the belt 7c, and is fixed to the substrate transport apparatus 1 via a rail mounting member 7n.
  • the slide member 7l is connected to the lower running path of the belt 7d through a connecting member 7o.
  • the width-shifting pieces 7d and 7e move in the opposite directions.
  • the width adjusting piece 7d moves to the left
  • the width adjusting piece 7e moves to the right. That is, since the width adjusting piece 7d and the width adjusting piece 7e move in a direction approaching each other, the glass substrate (not shown in FIG. 6) between the width adjusting piece 7d and the width adjusting piece 7e is located at the center of the conveyance path. It is justified.
  • ⁇ lift device> Returning to FIG. 2, the description of the configuration of the substrate transfer apparatus 1 is continued. As shown in FIG. 2, eight lifting devices 8 are arranged between the roller units 4 and 5 in the conveyance path of the substrate conveyance device 1.
  • FIG. 7 is a diagram showing the configuration of the lifting device 8.
  • the lifting device 8 includes a lifting actuator 8a and a lifting piece 8b connected to the lifting actuator 8a.
  • the elevating actuator 8a When the elevating actuator 8a is raised and the mounting piece 8c fixed on the upper surface of the elevating piece 8b is projected from the conveying surface, the glass substrate to be conveyed on the conveying path is placed on the placing piece 8c and conveyed. Can be lifted from the surface.
  • the roller units 4 and 5 are fixed to the substrate transport apparatus 1, and the glass substrate on the transport surface of the substrate transport apparatus 1 is placed on the placing piece 8c and lifted by the lifting actuator 8a.
  • the mounting unit 8c may be fixed to the substrate transport apparatus 1 and the roller units 4 and 5 may be moved up and down.
  • ⁇ Conveying path section device> Returning to FIG. 2, the description of the configuration of the substrate transfer apparatus 1 is continued. As shown in FIG. 2, two transport path partitioning devices 9 are arranged at intervals in the transport direction at the center in the width direction of the transport path of the substrate transport apparatus 1. Further, the transport path partition device 9 is provided between two adjacent width adjusting devices 7, and the transport direction length of the transport path partition device 9 is substantially equal to the transport direction length of the roller units 4 and 5.
  • FIG. 8 is a diagram showing a configuration of the transport path partitioning device 9.
  • the transport path partitioning device 9 partitions the transport path of the substrate transport apparatus 1 in the width direction when transporting two small glass substrates (for example, size W3 (see FIG. 11)) side by side in the width direction of the substrate transport apparatus 1. It is a device to do.
  • the conveyance path partitioning device 9 includes an elevating actuator 9a, a rod 9b that is connected to the elevating actuator 9a and is driven to extend and contract, a mounting base 9c that is attached to the tip of the rod 9b and moves up and down, and a mounting base 9c.
  • a guide roller 9d that is attached to the upper surface of the lens and rotates freely around a vertical axis.
  • two guide rollers 9d are arranged along the transport direction of the substrate transport apparatus 1 to form a guide roller array, and two guide roller arrays are provided in the width direction of the substrate transport apparatus 1.
  • Three or more guide rollers 9d may be arranged along the transport direction of the substrate transport apparatus 1 to form a guide roller row.
  • the guide roller 9d is preferably made of a soft material having a lower hardness than the glass substrate, such as rubber. Further, instead of the guide roller 9d, a rod-shaped guide member (guide bar) having no rotating portion may be attached to the attachment base 9c to guide the glass substrate in the width direction of the substrate transport apparatus 1. .
  • the elevating actuator 9a is driven to cause the guide roller 9d to protrude above the transport surface of the substrate transport apparatus 1.
  • the guide roller 9d protrudes above the transport surface of the substrate transport apparatus 1
  • the two small glass substrates that have been width-adjusted by the width-adjusting device 7 are sandwiched between the guide roller 9d and the width-adjusting pieces 7d and 7e.
  • the transport path is not partitioned in the width direction, and therefore the transport path partition device 9 is not used.
  • the guide roller 9d is in a state of being pulled down below the conveying surface.
  • the lifting / lowering actuator 9a is omitted so that the guide roller 9d always protrudes from the transport surface. May be.
  • the substrate transport apparatus 1 includes a plurality of substrate detection sensors 10 and detects a substrate on the substrate transport apparatus 1.
  • FIG. 9 is a diagram illustrating the configuration of the substrate detection sensor 10.
  • the substrate detection sensor 10 is an optical sensor that is fixed to the base plates 41 and 51 of the roller units 4 and 5 via the bracket 101 and detects the edge of the glass substrate 14.
  • the detection point of the substrate detection sensor 10 is set to the position P1 of the edge of the glass substrate 14 when the glass substrate 14 comes into contact with the stopper device 6 and stops, so that the edge of the glass substrate 14 is the stopper device 6.
  • the substrate detection sensor 10 detects the edge of the glass substrate 14 when contacting the contact member 61.
  • the substrate detection sensor 10 detects the edge of the glass substrate 14, It may be determined that the edge of the glass substrate 14 has come into contact with the contact member 61 of the stopper device 6 after a predetermined time (determined by the offset amount and the transport speed of the substrate transport device) has elapsed.
  • an optical sensor is used as the substrate detection sensor 10, but other types of sensors may be selected as long as they can detect the edge of the glass substrate 14.
  • a pressure sensor may be provided on the contact member 61 of the stopper device 6 and the pressure sensor may detect that the glass substrate 14 has contacted the contact member 61.
  • the substrate transfer apparatus 1 includes a control device 11 (not shown in FIG. 2) and is automatically operated.
  • FIG. 10 is a diagram showing a configuration of the control device 11.
  • the control device 11 is a computer that is controlled by the host computer 12 to automatically operate the substrate transfer device 1, and includes a CPU 111, a RAM 112, a ROM 113, an input interface (I / F) 114, and an output interface (I / F) 115 and a communication input interface (I / F) 116.
  • the host computer 12 is a higher-level control device that controls the entire substrate processing facility including the substrate transfer apparatus 1.
  • the CPU 111 is a processing device that processes various sensor signals in accordance with commands from the host computer 12 and a control program written in the ROM 113, and commands the operations of various actuators.
  • the RAM 112 is a storage unit that provides a work area for the CPU 111 and stores variable data and the like.
  • the ROM 113 is storage means for storing fixed data such as control programs and control data.
  • the input interface (I / F) 114 is an interface for taking in the detection results of various sensors into the CPU 111.
  • the output interface (I / F) 115 is an interface for the CPU 111 to control various actuators (control valves, motors, etc.).
  • the communication interface (I / F) 116 is an interface for connecting the CPU 111 to the host computer 12.
  • the substrate transport apparatus 1 can transport a plurality of types of glass substrates having different sizes. Here, the size of the glass substrate conveyed by the substrate conveying apparatus 1 will be described.
  • FIG. 11A is a plan view showing a state in which the substrate transport apparatus 1 transports (places) a glass substrate 14 of size W1. As shown in FIG. 11A, since the glass substrate 14 of size W1 is the largest glass substrate that can be transported (placed) by the substrate transport apparatus 1, it is transported (placed) one by one.
  • FIG. 11B is a plan view showing a state in which the glass substrate 14 of size W2 is placed on the substrate transport apparatus 1.
  • the dimension of the size W2 in the front-rear direction is about 1 ⁇ 2 of the size W1, and two sheets are arranged (transferred) side by side in the front-rear direction of the substrate transport apparatus 1.
  • FIG. 11C is a plan view showing a state in which the glass substrate 14 of size W3 is placed on the substrate transport apparatus 1.
  • FIG. The size of the size W3 in the left-right direction is about 1 ⁇ 2 of the size W2, and a total of four sheets are transferred (placed) on the substrate transfer apparatus 1 in the front-rear and left-right directions.
  • FIG. 11D is a plan view showing a state in which the glass substrate 14 of size W2 and size W3 is mixedly mounted on the substrate transport apparatus 1.
  • the glass substrate 14 of size W2 is placed in front of the substrate transfer apparatus 1 (right hand in the figure), and the glass substrate 14 of size W3 is arranged in the left-right direction behind the glass substrate 14 of size W2 (left hand in the figure). It is transported (placed).
  • FIG. 12 is a plan view
  • FIG. 13 is a front view as seen from the downstream side in the transport direction.
  • FIG. 12 shows the case where the glass substrate 14 is conveyed from the left side to the right side.
  • the rollers 44 and 54 of the roller units 4 and 5 constituting the substrate conveying apparatus 1 are freely reversible, the glass substrate It is also possible to transport 14 from the right side to the left side.
  • the substrate transport apparatus 1 can handle a plurality of types of glass substrates 14 having sizes W1 to W3.
  • two glass substrates 14 having the smallest size W3 are arranged in front, rear, left and right ( The case where a total of four sheets) is conveyed (placed) side by side and regulated (positioned) will be taken up.
  • (1) Information regarding the size of the glass substrate 14 is transmitted from the host computer 12 (see FIG. 10) to the control device 11 (see FIG. 10). As shown in FIG. 12A, based on this information, the control device 11 projects the guide roller 9d of the transport path partitioning device 9 from the transport surface to partition the transport path left and right, and the stopper devices 6a and 6c. Is operated (stopper devices 6b and 6d are released) to stop the movement of the glass substrate 14. The stopper device 6c is released until the rear ends of the two glass substrates 14 arranged in the front row have passed right above the stopper device 6c, and the substrate detection located at the same position as the stopper device 6c is detected. The sensor 10 (see FIGS. 2 and 10) is activated when it is no longer detected.
  • the guide roller 9d of the conveyance path partition device 9 is pulled down below the conveyance surface, and the stopper devices 6a and 6c are operated.
  • the guide roller 9d of the transport path partitioning device 9 is pulled down below the transport surface and only the stopper device 6a is operated.
  • the substrate transfer device 1 selects and operates the stopper devices 6a to 6d according to the size of the glass substrate 14 to operate and release them, and selects the raising and lowering of the guide roller 9d of the transfer path partitioning device 9.
  • a sensor for determining the size of the glass substrate 14 may be provided in the substrate transport device 1.
  • the width alignment pieces 7d and 7e of the width alignment device 7 are moved from the end of the conveyance path toward the center of the conveyance path, so that the glass substrate 14 is conveyed to the conveyance path dividing device 9 Toward the guide roller 9d (see FIGS. 12B, 12C, and 13C).
  • the amount of movement of the width adjusting pieces 7d and 7e varies depending on the size of the glass substrate 14, and is stored in the control device 11 in advance, and the width adjusting pieces 7d and 7e are stopped at a predetermined position by a command from the control device 11. Further, in order to absorb the positioning error of the size of the glass substrate 14 and the width adjusting pieces 7d and 7e, the stop positions of the width adjusting pieces 7d and 7e are the width adjusting pieces 7d and 7e and the guide roller 9d of the conveyance path partitioning device 9. These intervals are set to be about 1 to 2 mm larger than the width of the glass substrate 14.
  • the edge of the glass substrate 14 does not contact the guide roller 9d (when it is conveyed while being biased toward the width-adjusting pieces 7d, 7e), or when it does not contact the width-adjusting pieces 7d, 7e (guide)
  • the toner is conveyed to the roller 9d side.
  • the edge of the glass substrate 14 does not contact both the guide roller 9d and the width-adjusting piece 7d (when transported in a normal position and posture), or both the guide roller 9d and the width-adjusting piece 7e are applied. There are also cases where they come into contact with each other (when they are conveyed in a largely inclined posture).
  • the control device 11 When it is detected by a confirmation sensor (not shown) that the width-adjusting pieces 7d and 7e are separated from the glass substrate 14, the control device 11 lowers the elevating piece 8b of the elevating device 8 so that the glass substrate 14 is again brought into the transport surface. (See FIG. 13 (e)).
  • the control device 11 releases the stopper devices 6a and 6c and drives the roller units 4 and 5 to transfer the glass substrate 14 to the cassette transport device 3. (See FIG. 12D).
  • Four glass substrates 14 may be transferred simultaneously, or may be transferred one by one. Alternatively, the left and right glass substrates 14 may be transported as a pair.
  • the stopper devices 6a and 6c may be released before the glass substrate 14 is lifted from the transport surface, that is, after the end of the step (2).
  • the glass substrate 14 is rotationally displaced clockwise from the normal posture on the transfer surface of the substrate transfer apparatus 1.
  • the glass substrate 14 ' is rotationally displaced counterclockwise.
  • the glass substrates 14 and 14 ′ are placed across the roller units 4 and 4 ′ and the roller units 5 and 5 ′. -Sent in the X direction.
  • the front edges of the glass substrates 14 and 14 ′ are ahead of the stopper device 6 of the roller units 4 and 4 ′. Abut.
  • the control device 11 stops the roller units 4 and 4 ′.
  • the front edge of the glass substrate 14 comes into contact with the roller unit 4 and the stopper device 6 of the roller unit 5 and stops. That is, the front edge of the glass substrate 14 is perpendicular (right angle) to the transport direction of the substrate transport apparatus 1.
  • the glass substrate 14 ′ rotates clockwise around the stopper device 6 of the roller unit 4 ′ by the same mechanism as the glass substrate 14, so that the front edge of the glass substrate 14 ′ is also relative to the conveyance direction of the substrate conveyance device 1. Become vertical (right angle).
  • the glass substrates 14 and 14 ′ are corrected to a normal posture (that is, a posture in which the long sides of the glass substrates 14 and 14 ′ are parallel to the transport direction and the short sides are perpendicular to the transport direction).
  • FIG. 15A and 15B are outline views of the substrate transfer line 21 according to the second embodiment of the present invention, in which FIG. 15A is a plan view and FIG. 15B is a front view.
  • the substrate transport line 21 includes two glass substrates (not shown) that are unloaded from a processing device 22 that performs a predetermined process on a glass substrate (not shown).
  • This is a transfer line for storing the cassette in a cassette (not shown) on the cassette transfer device 3, 3 'and transferring the cassette in the right-hand direction in the figure by a cassette transfer device (not shown).
  • the substrate transfer line 21 includes a substrate transfer device 1, a transfer conveyor 23, a traversing unit 24, and two cassette transfer devices 3 and 3 '.
  • the transfer conveyor 23 is a roller conveyor that transfers a glass substrate (not shown) unloaded from the processing apparatus 22 to the substrate transfer apparatus 1.
  • the traversing unit 24 is a device that moves the substrate transport device 1 in a direction orthogonal to the transport direction, and faces the substrate transport device 1 to the transfer conveyor 23 under the control of the control device 11 (not shown in FIG. 15). Position A, position B facing the cassette transport apparatus 3 and position C facing the cassette transport apparatus 3 ′ are positioned.
  • the traversing unit 24 includes a frame 24a, a pair of rails 24b fixed to the frame 24a, a rack 24c fixed to the frame 24a in parallel to the rails 24b, and a support that slides along the longitudinal direction of the rails 24b.
  • a plate 24d is provided, and the substrate transfer device 1 is mounted on the support plate 24d.
  • a motor 24e is fixed to the support plate 24d, and a pinion 24f is attached to an output shaft (not shown) of the motor 24e so as to mesh with the rack 24c.
  • the substrate transfer line 21 positions the substrate transfer device 1 at the position A, receives a glass substrate (not shown) from the transfer conveyor 23, and then moves to the position B or C.
  • the glass substrate can be stored in the cassette carrying device 3 or a cassette (not shown) on the cassette carrying device 3 ′.
  • the substrate transfer apparatus 1 can absorb the work time required for positioning in the movement time by positioning the glass substrate in the normal position and posture while moving from the position A to the position B or C. As a result, the conveyance efficiency is improved.
  • the example in which the two cassette transfer devices 3 and 3 ′ are arranged in parallel is shown, but it goes without saying that the number of cassette transfer devices arranged in parallel is not limited to two. Moreover, although the example which conveys from the glass substrate processing apparatus 22 to the cassette conveying apparatuses 3 and 3 'was taken up, it cannot be overemphasized that you may convey to the processing apparatus 22 from the cassette conveying apparatuses 3 and 3'.
  • the present invention is useful as a device for correctly positioning a substrate to be transported on a substrate transport device such as a liquid crystal panel.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention porte sur un transporteur de substrat, qui comprend des unités rouleaux (4, 5) pour porter un substrat monté sur un plan de transport d'un trajet de transport le long du trajet de transport, un élévateur (7) comportant le plan de transport pour séparer de façon relative le substrat monté sur le plan de transport, un dispositif de positionnement latéral (6) pour déplacer le substrat séparé du plan de transport dans la direction de la largeur du trajet de transport pour le positionnement dans une position prédéterminée, et un dispositif de sectionnement de trajet de transport (9) disposé au centre de la largeur du trajet de transport pour sectionner le trajet de transport dans la direction de la largeur, et, également, pour faire apparaître arbitrairement et fréquemment, à partir du plan de transport, un rouleau de guidage (9d) pour guider le substrat dans une direction parallèle au trajet de transport.
PCT/JP2008/054417 2008-03-11 2008-03-11 Transporteur de substrat et procédé de transport de substrat WO2009113160A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2008/054417 WO2009113160A1 (fr) 2008-03-11 2008-03-11 Transporteur de substrat et procédé de transport de substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2008/054417 WO2009113160A1 (fr) 2008-03-11 2008-03-11 Transporteur de substrat et procédé de transport de substrat

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Publication Number Publication Date
WO2009113160A1 true WO2009113160A1 (fr) 2009-09-17

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013011107A1 (fr) * 2011-07-21 2013-01-24 Thyssenkrupp System Engineering Gmbh Dispositif et procédé permettant d'arrêter et/ou d'orienter des produits transportés sur un convoyeur, et convoyeur
EP3388374A1 (fr) * 2017-04-10 2018-10-17 Cardinal Ig Company Technologie d'adjuvant de lots de chute
CN111850522A (zh) * 2020-08-04 2020-10-30 苏州腾晖光伏技术有限公司 一种传输装置
CN112777274A (zh) * 2021-01-04 2021-05-11 成都长城开发科技有限公司 全自动多工位通用输送装置

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JPS54149174A (en) * 1978-05-12 1979-11-22 Central Glass Co Ltd Line forming device of laminar body
JPS5926413U (ja) * 1982-08-05 1984-02-18 グンゼ株式会社 搬送コンベア
JPH11334850A (ja) * 1998-05-22 1999-12-07 Kobe Steel Ltd コンベアの巾方向位置決め装置
JP2000344209A (ja) * 1999-06-02 2000-12-12 Ishida Co Ltd 搬送装置及びそれを備えるストレッチ包装機
JP2005145669A (ja) * 2003-11-17 2005-06-09 Asahi Breweries Ltd 搬送装置
WO2007029401A1 (fr) * 2005-09-02 2007-03-15 Hirata Corporation Systeme de chargement/dechargement de piece de fabrication et dispositif de transport
JP2008019009A (ja) * 2006-07-11 2008-01-31 Daifuku Co Ltd 板状体整列設備

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Publication number Priority date Publication date Assignee Title
JPS54149174A (en) * 1978-05-12 1979-11-22 Central Glass Co Ltd Line forming device of laminar body
JPS5926413U (ja) * 1982-08-05 1984-02-18 グンゼ株式会社 搬送コンベア
JPH11334850A (ja) * 1998-05-22 1999-12-07 Kobe Steel Ltd コンベアの巾方向位置決め装置
JP2000344209A (ja) * 1999-06-02 2000-12-12 Ishida Co Ltd 搬送装置及びそれを備えるストレッチ包装機
JP2005145669A (ja) * 2003-11-17 2005-06-09 Asahi Breweries Ltd 搬送装置
WO2007029401A1 (fr) * 2005-09-02 2007-03-15 Hirata Corporation Systeme de chargement/dechargement de piece de fabrication et dispositif de transport
JP2008019009A (ja) * 2006-07-11 2008-01-31 Daifuku Co Ltd 板状体整列設備

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013011107A1 (fr) * 2011-07-21 2013-01-24 Thyssenkrupp System Engineering Gmbh Dispositif et procédé permettant d'arrêter et/ou d'orienter des produits transportés sur un convoyeur, et convoyeur
CN103687795A (zh) * 2011-07-21 2014-03-26 蒂森克虏伯系统工程股份有限公司 用于在传送装置上停止和/或对准运输货物的器件和方法以及传送装置
US9010524B2 (en) 2011-07-21 2015-04-21 Thyssenkrupp System Engineering Gmbh Device and method for stopping and/or aligning transport goods on a conveying device, and conveying device
CN103687795B (zh) * 2011-07-21 2016-05-11 蒂森克虏伯系统工程股份有限公司 用于在传送装置上停止和/或对准运输货物的器件和方法以及传送装置
EP3388374A1 (fr) * 2017-04-10 2018-10-17 Cardinal Ig Company Technologie d'adjuvant de lots de chute
US10214366B2 (en) 2017-04-10 2019-02-26 Cardinal Ig Company Drop batch builder technology
CN111850522A (zh) * 2020-08-04 2020-10-30 苏州腾晖光伏技术有限公司 一种传输装置
CN111850522B (zh) * 2020-08-04 2023-05-16 苏州腾晖光伏技术有限公司 一种传输装置
CN112777274A (zh) * 2021-01-04 2021-05-11 成都长城开发科技有限公司 全自动多工位通用输送装置

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